CN114706152A - Processing method and system of patterned blazed grating - Google Patents
Processing method and system of patterned blazed grating Download PDFInfo
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- CN114706152A CN114706152A CN202210252297.5A CN202210252297A CN114706152A CN 114706152 A CN114706152 A CN 114706152A CN 202210252297 A CN202210252297 A CN 202210252297A CN 114706152 A CN114706152 A CN 114706152A
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- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
Abstract
The invention provides a processing method and a system of a patterned blazed grating, wherein the method comprises the following steps: determining the wavelength of light waves corresponding to each pixel based on the tone information of each pixel in the grating pattern to be processed; determining the interval of blazed gratings in the grating pattern to be processed and an input signal of an external driving device based on the wavelength of the light wave; based on the input signal and the light wave wavelength, controlling a cutter to perform cutting motion according to a preset track through a driving device; and processing and forming a patterned blazed grating corresponding to the pattern to be processed on a preset substrate through a cutter moving according to a preset track. The invention can realize high-quality and patterned blazed grating processing.
Description
Technical Field
The invention relates to the technical field of machining, in particular to a method and a system for processing a patterned blazed grating.
Background
Blazed gratings are a special form of diffraction gratings whose interface profile is asymmetrically sawtooth-shaped. Blazed gratings can achieve maximum diffraction efficiency for a given diffraction order, while the remaining power of other orders (in particular the zero order) is minimized. The function is only aiming at the diffraction of one wavelength, the maximum diffraction power in the direction of the blazed angle is realized, and the efficiency of the blazed grating is mainly dependent on the blazed angle and the surface quality and is not related to a non-working surface.
At present, the manufacturing method of the blazed grating mainly comprises mechanical scribing, holographic ion beam processing, electron beam lithography and wet etching. Among them, mechanical scribing is a method in which a tool directly performs scribing on the surface of a workpiece, and is the most direct method for processing a blazed grating, but ghost lines are easily generated. The key point of the processing of the blazed grating by mechanical scribing is to control the shape and quality of the groove, which depends on the processing factors such as equipment precision, cutter angle, film characteristics, environmental temperature, humidity and the like, and the blazed grating is basically used for manufacturing the blazed grating with large area on a plane and is difficult to realize the processing of the blazed grating with a concave surface and a free-form surface. In addition, when the grating pitch is close to the size of light wave, the mechanical scribing process is inefficient and difficult to apply to the patterned sub-wavelength blazed grating array process.
Holographic ion beam processing combines two processing technologies of holographic photoetching and ion beam etching, a grating mask is processed by the holographic photoetching, a groove is formed on a substrate by the holographic photoetching processed grating mask by the ion beam etching mask, and the blazed gratings with different angles can be realized by adjusting process parameters. However, due to technical limitations, blazed gratings are directly influenced by masks, the accuracy of the cross-sectional profile of the grating is limited by the ion beam velocity ratio and the mask depth-to-width ratio, and the processing accuracy is influenced because the parameter regulation and control are difficult to be performed by taking pixels as units.
Electron beam lithography is mask-less and uses electron beams directly to produce high resolution patterns on a substrate. However, the side wall is slightly inclined in the etching process, the optical function of the blazed grating is reduced, and the large-area grating cannot be processed well. Moreover, holographic ion beam processing and electron beam lithography are processing methods of high-energy beam processing, processing cost is high, processing efficiency is low, and high-energy beams can damage processed blazed surfaces, so that application of the method is greatly limited.
The wet etching can process a blazed surface with an ultra-low roughness value and a small blazed angle. But with etch instability and surface contamination resulting in a deterioration of grating quality; due to the lateral etching, edges are formed at the top of the etched profile, reducing the quality of the manufactured grating. Furthermore, wet etching, although it is possible to produce a blazed grating with a large area by combining with other methods, increases complexity and cost.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a method and a system for processing a patterned blazed grating, so as to solve the problems of high cost, low precision and limited application range of the conventional grating processing method.
The invention provides a processing method of a patterned blazed grating, which comprises the following steps: determining the wavelength of light waves corresponding to each pixel based on the tone information of each pixel in the grating pattern to be processed; determining the interval of blazed gratings in the grating pattern to be processed and an input signal of an external driving device based on the wavelength of the light wave; based on the input signal and the light wave wavelength, controlling a cutter to perform cutting motion according to a preset track through a driving device; and processing and forming a patterned blazed grating corresponding to the pattern to be processed on a preset substrate through a cutter moving according to a preset track.
In addition, an optional technical solution is that the expression formula for determining the wavelength of the light wave corresponding to each pixel is:
where Hue denotes a Hue value of a pixel, and λ denotes a wavelength of light.
In addition, an alternative solution is that the pitch of the blazed grating is expressed as:
wherein m represents a diffraction order, λ represents a light wave wavelength, θ represents a blazed angle of the blazed grating, the blazed angle is determined based on an included angle of the tool, and α represents an included angle between the incident light and a normal of a blazed surface of the blazed grating.
In addition, an optional technical solution is that the process of determining the input signal of the driving device includes: determining a relationship between a vibration frequency of the tool and a nominal cutting speed based on the pitch; the input signal is determined based on a relationship between the vibration frequency and the nominal cutting speed.
In addition, an optional technical solution is that a relational expression between the vibration frequency and the nominal cutting speed is as follows:
wherein, VcDenotes the nominal cutting speed, f denotes the vibration frequency and d denotes the pitch.
In addition, an optional technical scheme is that the preset substrate is made of metal, organic nonmetal or inorganic nonmetal.
In addition, an alternative solution is that the cutting edge of the tool is linear.
In addition, the optional technical scheme is that the vibration track of the cutter is in a space spiral shape; and the number of the vibration periods of the space spiral line is equal to the processing number of the blazed grating.
In addition, the optional technical solution is that the driving device includes a signal generator, a power amplifier connected with the signal generator, and a vibration device connected with the power amplifier; wherein, the cutter is fixed on the vibrating device through the piezoelectric patch.
According to another aspect of the present invention, there is provided a processing system for patterning a blazed grating, comprising: an optical wavelength determining unit for determining an optical wavelength corresponding to each pixel based on hue information of each pixel in the grating pattern to be processed; the distance and input signal determining unit is used for determining the distance of the blazed grating in the grating pattern to be processed and the input signal of an external driving device based on the light wave wavelength; the cutting unit is used for controlling the cutter to perform cutting motion according to a preset track through the driving device based on the input signal and the light wave wavelength; and the blazed grating forming unit is used for processing and forming the patterned blazed grating corresponding to the pattern to be processed on the preset substrate through the cutter moving according to the preset track.
By utilizing the processing method and the processing system of the patterned blazed grating, the light wave wavelength corresponding to each pixel can be determined according to the tone information of each pixel in the grating pattern to be processed, the space of the blazed grating and the input signal of an external driving device are further acquired, and finally the patterned blazed grating corresponding to the pattern to be processed is processed and formed on the preset substrate through the matching of the input signal and the cutter, so that the operation is convenient and fast, and the preparation of the high-quality blazed surface and the patterned blazed grating can be realized.
To the accomplishment of the foregoing and related ends, one or more aspects of the invention comprise the features hereinafter fully described. The following description and the annexed drawings set forth in detail certain illustrative aspects of the invention. These aspects are indicative, however, of but a few of the various ways in which the principles of the invention may be employed. Further, the present invention is intended to include all such aspects and their equivalents.
Drawings
Other objects and results of the present invention will become more apparent and more readily appreciated as the same becomes better understood by reference to the following description taken in conjunction with the accompanying drawings. In the drawings:
FIG. 1 is a flow chart of a method of processing a patterned blazed grating according to an embodiment of the invention;
FIG. 2 is a parametric schematic diagram of a blazed grating according to an embodiment of the invention;
FIG. 3 is a schematic view of a tool according to an embodiment of the present invention;
FIG. 4 shows a side view of a tool and substrate according to an embodiment of the invention;
FIG. 5 is a schematic diagram of a parametric configuration of a tool according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a tool path structure according to an embodiment of the present invention;
fig. 7 is a schematic diagram of a forming structure of a patterned blazed grating according to an embodiment of the invention.
Wherein the reference numerals include: the device comprises a vibrating device 3, a piezoelectric sheet 4, a cutter 5, a nominal cutting depth direction 6, a motion track 7, a cutting direction 8, a cutter feeding direction 9, a cutter back angle 10, a workpiece 11, a nominal cutting depth 12, a cutter motion direction 13, an included angle 14, a blazed grating 15, a cutter actual motion track 16, an unprocessed surface 17, a pixel unit 18 and a pixel unit 19.
The same reference numbers in all figures indicate similar or corresponding features or functions.
Detailed Description
In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of one or more embodiments. It may be evident, however, that such embodiment(s) may be practiced without these specific details. In other instances, well-known structures and devices are shown in block diagram form in order to facilitate describing one or more embodiments.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention.
To describe the method and system for processing a patterned blazed grating in detail, embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
Fig. 1 shows a schematic flow of a method of processing a patterned blazed grating according to an embodiment of the invention;
as shown in fig. 1, the method for processing a patterned blazed grating according to an embodiment of the present invention mainly includes
S110: the wavelength of the light wave corresponding to each pixel is determined based on the hue information of each pixel in the grating pattern to be processed.
Because the pixels of the grating pattern to be processed are not consistent, the light wave wavelength corresponding to each pixel can be determined according to the tone information of the specific pixel, and then the cutter control signal corresponding to the pattern area can be set according to the corresponding light wave wavelength requirement, so that the processing of the blazed grating of the corresponding area is completed. Specifically, the expression for determining the wavelength of light waves corresponding to each pixel may be:
where Hue denotes a Hue value of a pixel, and λ denotes a wavelength of light.
S120: and determining the interval of the blazed grating in the grating pattern to be processed and an input signal of an external driving device based on the wavelength of the light wave.
Wherein a relationship between a vibration frequency of the tool and a nominal cutting speed may be determined based on the pitch; the input signal is then determined based on the relationship between the vibration frequency and the nominal cutting speed.
Specifically, after the wavelength of the light wave is determined, the angle condition of the incident light signal can be determined according to the diffraction of the blazed grating on the incident white light, and then the pitch of the corresponding blazed grating can be determined according to the pitch expression. Specifically, the pitch of a blazed grating is expressed as:
the method comprises the steps that m represents diffraction orders, lambda represents light wave wavelength, theta represents a blazed angle of a blazed grating, the blazed angle is determined based on an included angle of a cutter, alpha represents an included angle between incident light and a normal line of a blazed surface of the blazed grating, the blazed angle is determined by the included angle of the cutter, after the incident angle of white light, namely alpha, is determined, the diffraction orders m can be set, and then the distance d of the blazed grating changes along with the wavelength lambda of the diffracted light wave.
It can be known that, according to the tone information of each pixel in the grating pattern to be processed, the light wave wavelength corresponding to the tone of each pixel can be determined through the formula light wave wavelength formula, that is, λ in the pitch formula is determined, and after other conditions are determined, the grating pitch of each pixel unit can be calculated according to the pitch formula. Finally, the corresponding nominal cutting speed V can be adapted according to the pitch, and also the vibration frequency f of the tool (determined by the input sinusoidal signal of the signal generator 1)cAnd further processing a blazed grating corresponding to the diffraction wavelength.
In one embodiment of the invention, the relationship between the pitch d of the blazed grating and the vibration frequency f and the nominal cutting speed of the tool is expressed as:
wherein, VcDenotes the nominal cutting speed, f denotes the vibration frequency and d denotes the pitch.
S130: based on the input signal and the light wave wavelength, the cutter is controlled by the driving device to carry out cutting motion according to a preset track.
S140: and processing and forming a patterned blazed grating corresponding to the pattern to be processed on a preset substrate through a cutter moving according to a preset track.
Therefore, after the vibration frequency and the nominal cutting speed are determined, the input signal of the corresponding driving device can be determined, and then the patterned blazed grating corresponding to the pattern to be processed can be processed and formed on the preset substrate according to the input signal and the preset track.
As a specific example, the processing procedure of the patterned blazed grating will be described in detail with reference to the accompanying drawings, wherein fig. 2 to 7 respectively show parameters of the blazed grating, structural parameters of the tool and the substrate, a running track, and a schematic structure of the finally formed blazed grating according to an embodiment of the present invention.
As shown in fig. 2 to 7 in common, the processing apparatus for a patterned blazed grating according to the embodiment of the present invention mainly includes: the cutting tool comprises a driving device and a cutting tool 5 arranged on the driving device, wherein the driving device comprises a signal generator, two power amplifiers connected with the signal generator, and a vibrating device 3 connected with the two power amplifiers; wherein the cutter 5 is fixed on the vibrating device 3 through the piezoelectric sheet 4.
The material of the blazed grating to be patterned, i.e., the substrate or the workpiece 11, may be metal, organic nonmetal, or inorganic nonmetal, such as resin, the tool 5 may be single crystal diamond, and the cutting edge of the tool 5 may be arranged linearly.
In the processing process, an elliptical vibration scribing method can be adopted, two sinusoidal power signals are sent out through a signal generator, then the sinusoidal power signals are amplified through a power amplifier and then are connected to a non-resonance elliptical vibration device (namely a vibration device 3), a ceramic piezoelectric sheet of the non-resonance elliptical vibration device, namely a piezoelectric sheet 4, induces mechanical deformation through the inverse piezoelectric effect under the action of an alternating electric field, and finally an elliptical motion track 7 is generated through a cutter 5 at the front end. It can be known that the specific running track of the tool 5 can be controlled by adjusting parameters such as the frequency, the voltage amplitude and the phase of the sinusoidal signal sent by the signal generator, and the running track can be flexibly adjusted according to the requirements of the patterned blazed grating formed as required.
In a specific embodiment of the present invention, the tool 5 is a single crystal diamond tool, the parameters include a nominal cutting depth direction 6, a cutting direction 8, a tool feeding direction 9, a tool back angle 10, a nominal cutting depth 12, and a tool motion direction 13, an included angle 14 of the tool 5 determines a blazed angle of a blazed grating 15 to be processed, in a single elliptical vibration period of the tool 5, one blazed grating 15 can be correspondingly processed, a positive elliptical track is adopted, it can be ensured that a blazed grating (an unprocessed surface 17 of the workpiece 11) with a larger length is processed on the surface of the workpiece 11, and in the patterning process, by adjusting transverse feeding and overlapping blazed gratings with the same interval in a horizontal direction, the length of the blazed grating can be increased, and the diffraction efficiency and the structural color effect of the grating can be improved.
The cutter 5 is matched with a proper cutting speed and moves in the cutter feeding direction 9, so that the final actual movement track 16 of the cutter can be realized, and the track is in a spatial spiral shape; the number of vibration periods of the spatial spiral line is equal to the number of blazed gratings 15 to be processed.
It is understood that the processing method of the present invention can process a structural color pattern on the surface of the workpiece 11 pixel by pixel, process blazed gratings with different pitches according to different pixel units of an image, and diffract the color tone of the pixel of the corresponding pattern. For example, when a pixel unit 18 is processed with a blazed grating with the same grating pitch, and another pixel unit 19 is processed with a blazed grating with a different grating pitch, two pixel blocks can diffract diffracted light with different wavelengths under the same illumination condition, and the pixel tones of the two pixel blocks are consistent with the pixel tones corresponding to the image to be processed. In a similar way, the blazed grating with the corresponding wavelength can be processed by controlling the nominal cutting speed, and the whole image is processed pixel by pixel, so that the structural color pattern of the blazed grating is completed.
Corresponding to the processing method of the patterned blazed grating, the invention also provides a processing system of the patterned blazed grating.
Specifically, a processing system for patterning blazed gratings includes: an optical wavelength determining unit for determining an optical wavelength corresponding to each pixel based on hue information of each pixel in the grating pattern to be processed; the distance and input signal determining unit is used for determining the distance of the blazed grating in the grating pattern to be processed and the input signal of an external driving device based on the light wave wavelength; the cutting unit is used for controlling the cutter to perform cutting motion according to a preset track through the driving device based on the input signal and the light wave wavelength; and the blazed grating forming unit is used for processing and forming the patterned blazed grating corresponding to the pattern to be processed on the preset substrate through the cutter moving according to the preset track.
It should be noted that, for the embodiment of the processing system for patterned blazed grating, reference may be made to the description in the embodiment of the processing method for patterned blazed grating, and details are not repeated here.
By using the processing method and the system for the patterned blazed grating, the light wave wavelength corresponding to each pixel can be determined according to the tone information of each pixel in the grating pattern to be processed, so that the distance of the blazed grating and the input signal of an external driving device are obtained, and finally, the patterned blazed grating corresponding to the pattern to be processed is processed and formed on the preset substrate through the matching of the input signal and the cutter, so that the preparation of the high-quality blazed surface and the patterned blazed grating can be realized.
The processing method and system of a patterned blazed grating according to the invention are described above by way of example with reference to the accompanying drawings. However, it should be understood by those skilled in the art that various modifications can be made to the processing method and system for patterned blazed grating proposed by the present invention without departing from the scope of the present invention. Therefore, the scope of the present invention should be determined by the contents of the appended claims.
Claims (10)
1. A method of processing a patterned blazed grating, comprising:
determining the wavelength of light waves corresponding to each pixel in a grating pattern to be processed based on the hue information of each pixel;
determining the interval of blazed gratings in the grating pattern to be processed and an input signal of an external driving device based on the wavelength of the light wave;
controlling a cutter to perform cutting motion according to a preset track through the driving device based on the input signal and the light wave wavelength;
and processing and forming a patterned blazed grating corresponding to the pattern to be processed on a preset substrate through a cutter moving according to a preset track.
2. A method of processing a patterned blazed grating as claimed in claim 1, wherein the expression for determining the wavelength of light corresponding to each pixel is:
where Hue denotes a Hue value of a pixel, and λ denotes a wavelength of light.
3. A method of processing a patterned blazed grating as claimed in claim 1, wherein the pitch of the blazed grating is expressed as:
wherein m represents a diffraction order, λ represents a wavelength of light, θ represents a blaze angle of the blazed grating, the blaze angle is determined based on an included angle of the tool, and α represents an included angle between an incident light ray and a normal of a blazed surface of the blazed grating.
4. A method of processing a patterned blazed grating as claimed in claim 1, wherein determining an input signal for the driving means comprises:
determining a relationship between a vibration frequency of the tool and a nominal cutting speed based on the spacing;
determining the input signal based on a relationship between the vibration frequency and the nominal cutting speed.
5. The method of processing a patterned blazed grating as claimed in claim 4,
the relationship between the vibration frequency and the nominal cutting speed is expressed as:
wherein, VcRepresenting the nominal cutting speed, f representing the vibration frequency, d representing the pitch.
6. The method of processing a patterned blazed grating as claimed in claim 1,
the preset substrate is made of metal, organic nonmetal or inorganic nonmetal.
7. The method of processing a patterned blazed grating as claimed in claim 1,
the cutting edge of the cutter is linear.
8. The method of processing a patterned blazed grating as claimed in claim 1,
the vibration track of the cutter is in a spatial spiral shape; and the number of the first and second electrodes,
the number of the vibration periods of the space spiral line is equal to the number of the blazed gratings.
9. The method of processing a patterned blazed grating as claimed in claim 1,
the driving device comprises a signal generator, a power amplifier connected with the signal generator, and a vibrating device connected with the power amplifier; wherein the content of the first and second substances,
the cutter is fixed on the vibration device through a piezoelectric sheet.
10. A system for processing a patterned blazed grating, comprising:
an optical wavelength determining unit for determining an optical wavelength corresponding to each pixel in the grating pattern to be processed based on hue information of each pixel;
the interval and input signal determining unit is used for determining the interval of the blazed gratings in the grating patterns to be processed and the input signal of an external driving device based on the light wave wavelength;
the cutting unit is used for controlling a cutter to perform cutting motion according to a preset track through the driving device based on the input signal and the light wave wavelength;
and the blazed grating forming unit is used for processing and forming a patterned blazed grating corresponding to the pattern to be processed on a preset substrate through a cutter moving according to a preset track.
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