CN114678670A - Terahertz broadband band elimination filter based on SSPPs transmission line - Google Patents
Terahertz broadband band elimination filter based on SSPPs transmission line Download PDFInfo
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- CN114678670A CN114678670A CN202210418980.1A CN202210418980A CN114678670A CN 114678670 A CN114678670 A CN 114678670A CN 202210418980 A CN202210418980 A CN 202210418980A CN 114678670 A CN114678670 A CN 114678670A
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 23
- 230000008030 elimination Effects 0.000 title claims abstract description 13
- 238000003379 elimination reaction Methods 0.000 title claims abstract description 13
- 238000005530 etching Methods 0.000 claims abstract description 14
- 230000007704 transition Effects 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 230000000295 complement effect Effects 0.000 claims abstract description 5
- 230000001629 suppression Effects 0.000 abstract description 10
- 238000001914 filtration Methods 0.000 abstract description 8
- 230000009467 reduction Effects 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 2
- 230000000052 comparative effect Effects 0.000 description 12
- 238000004088 simulation Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/201—Filters for transverse electromagnetic waves
- H01P1/203—Strip line filters
Abstract
The invention discloses a terahertz broadband band elimination filter based on an SSPPs transmission line, belonging to the technical field of terahertz filters, and comprising a symmetrical sawtooth SSPPs TL, and a step gradual transition structure and a coplanar waveguide which are sequentially arranged at two ends of the symmetrical sawtooth SSPPs TL; the symmetrical sawtooth SSPPs TL comprises etching CSRR arranged in each metal sawtooth and loading SRR arranged in each tooth gap, and the loading SRR and the etching CSRR are of complementary structures except for different lengths of branches. According to the invention, the etching CSRR and the loading SRR are simultaneously designed on the SSPPs TL, the pass-resistance-pass-resistance filtering characteristic is obtained, the filtering frequency band is widened, the filtering suppression depth is increased, the broadband effect of the terahertz filter is realized, and the terahertz filter can be widely applied to the fields of clutter suppression, noise reduction, frequency selection and the like.
Description
Technical Field
The invention belongs to the technical field of terahertz filters, and particularly relates to a terahertz broadband band elimination filter based on an SSPPs transmission line.
Background
The terahertz integrated chip is developed rapidly in recent years, is the fundamental development direction of future electronic information technology, and has potential application prospects in the fields of imaging, wireless sensing, high-speed communication and the like. The on-chip filter is used as a basic branch of an integrated functional chip, plays a vital role in aspects of clutter suppression, noise reduction, frequency selection and the like of an integrated system, and is particularly a broadband and compact band-stop filter urgently needed by the terahertz on-chip technology.
The artificial surface plasmon polaritons (SSPPs) have unique field binding and enhancement characteristics, are widely concerned in the field of electromagnetism in recent years, and are expected to become a solution for further breakthrough of terahertz integrated chips. SSPPs Transmission Lines (TL), which manually control dispersion characteristics by adjusting the cell size of the saw teeth, have been widely studied for band-stop filter designs. Compared to conventional microstrip, coplanar waveguide or substrate integrated waveguide based bandstop filters, SSPPs based bandstop filters have the potential to achieve smaller size and lower crosstalk. The narrow-band-stop filter and the multi-band-stop filter based on the SSPPs TL are realized by loading band-stop resonators on an SSPPs unit. In some cases, however, such as when the receiving satellite performs interference suppression and broadband signal radiation, a broadband band-stop filter with a small size is required. In addition, most of research on the SSPPs band-stop filter works in the microwave range, and the design of the terahertz integrated chip is very scarce. Therefore, the research of the broadband band-stop filter based on the SSPPs TL is of great significance for the characteristics of the plasma integrated chip in the terahertz system.
Disclosure of Invention
The invention aims to solve the problems in the prior art, and provides a terahertz broadband band elimination filter based on an SSPPs transmission line, which can be applied to the fields of clutter suppression, noise reduction, frequency selection and the like in terahertz communication and has the advantages of compact structure, broadband and the like.
The technical scheme adopted by the invention is as follows:
a terahertz broadband band elimination filter based on an SSPPs transmission line is characterized by comprising a symmetrical sawtooth SSPPs TL, and a step gradual transition structure and a coplanar waveguide which are sequentially arranged at two ends of the symmetrical sawtooth SSPPs TL; the symmetrical sawtooth SSPPs TL comprises etching CSRR (complementary split resonant ring) arranged in each metal sawtooth and loading SRR (split resonant ring) positioned in each tooth gap, wherein the loading SRR is a folding split resonant ring structure, and the loading SRR and the etching CSRR are complementary structures except for different lengths of branches.
Further, the saw tooth unit having only the symmetrical saw tooth type SSPPs TL etched with the CSRR operates in the fundamental mode and the first order higher order mode, and forms a stop band between the fundamental mode and the first order higher order mode.
Further, the loading SRRs comprise a first loading SRR and a second loading SRR with different branch lengths, and the first loading SRR and the second loading SRR are symmetrically and alternately arranged in the tooth gaps of the symmetrical sawtooth SSPPs TL.
Furthermore, by controlling the lengths of the branches of the first loaded SRR and the second loaded SRR, the resonant frequency point of the first loaded SRR is located at the upper cut-off point of the stop band, and the resonant frequency point of the second loaded SRR is located at the lower cut-off point of the stop band.
Further, the symmetrical sawtooth SSPPs TL realizes 50 omega impedance matching with the coplanar waveguide through a stepped transition structure.
The invention has the beneficial effects that:
the invention provides a terahertz broadband band elimination filter based on an SSPPs transmission line, which is characterized in that through designing and etching a CSRR and loading an SRR on an SSPPs TL at the same time, the filtering characteristics of pass-resistance-pass-resistance are obtained, meanwhile, the filtering frequency band is widened, the filtering suppression depth is increased, the broadband effect of the terahertz filter is realized, the terahertz broadband band elimination filter can be widely applied to the fields of clutter suppression, noise reduction, frequency selection and the like, and the overall structure is compact.
Drawings
Fig. 1 is a schematic structural diagram of a terahertz broadband band-stop filter based on an SSPPs transmission line according to embodiment 1 of the present invention;
fig. 2 is a dimension marking diagram of the terahertz broadband band-stop filter based on the SSPPs transmission line according to embodiment 1 of the present invention;
FIG. 3 is a dispersion curve of a band-stop filter based on SSPPs transmission lines according to comparative example 2 of the present invention;
fig. 4 is a comparison graph of simulation results of the band stop filters provided in example 1, comparative example 1, and comparative example 2 of the present invention;
fig. 5 is a real object diagram of a terahertz broadband band-stop filter based on an SSPPs transmission line according to embodiment 1 of the present invention;
fig. 6 is a diagram of a test and simulation result of the terahertz broadband band-stop filter based on the SSPPs transmission line according to embodiment 1 of the present invention;
the reference symbols in the drawings are as follows:
1: a coplanar waveguide; 2: a step gradual transition structure; 3: symmetric sawtooth SSPPs TL; 4: etching the CSRR; 5: a first load SRR; 6: the second load SRR.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Example 1
The embodiment provides a terahertz broadband band-stop filter based on an SSPPs transmission line, which is applied to terahertz wave bands, and has a structure shown in fig. 1, and comprises a symmetrical sawtooth SSPPs TL3, a stepped gradual transition structure 2 and a feeding coplanar waveguide 1, wherein the stepped gradual transition structure 2 and the feeding coplanar waveguide 1 are sequentially arranged at two ends of a symmetrical sawtooth SSPPs TL3, and the symmetrical sawtooth SSPPs TL3 realizes 50 omega impedance matching with the coplanar waveguide 1 through the stepped gradual transition structure 2.
The symmetrical sawtooth SSPPs TL3 comprises etching CSRR4 arranged in each square metal sawtooth and loading SRR positioned in each tooth gap, wherein the loading SRR is a folding open resonant ring structure, and the loading SRR and the etching CSRR4 are complementary structures except for different lengths of branches. The loading SRRs comprise a first loading SRR5 and a second loading SRR6 with different branch lengths, and are symmetrically and alternately arranged in the tooth gaps of the symmetrical sawtooth SSPPs TL 3.
The dimension marks of the structures in this embodiment are shown in FIG. 2, and the period p, the depth h and the width w of the sawtooth unit of the symmetrical sawtooth SSPPs TL30P is 200 μm, h is 200 μm and w 0100 μm; the width g, the length L and the branch length L of the gap area of the etched CSRR4cRespectively, g is 10 μm, L is 190 μm and Lc90 μm; the lengths of the branches of the first loading SRR5 and the second loading SRR6 are L respectivelys1130 μm and L s2100 μm, the resonance frequency of the first loaded SRR5 is located at the upper cut-off point (148GHz) of the stop band, the resonance frequency of the second loaded SRR6 is located at the lower cut-off point (133GHz) of the stop band, and the widths of the two are equal to the width g of the gap region etched in the CSRR 4.
The substrate material of the terahertz broadband band-stop filter based on the SSPPs transmission line provided by the embodiment is 50 μm thick quartz, and the symmetrical sawtooth SSPPs TL3, the step gradual transition structure 2 and the coplanar waveguide 1 are all made of gold films with the thickness of 2 μm.
Comparative example 1
The traditional band elimination filter comprises a sawtooth SSPPs TL, a stepped gradual transition structure and a feeding coplanar waveguide, wherein the stepped gradual transition structure and the feeding coplanar waveguide are sequentially arranged at two ends of the sawtooth SSPPs TL, and the sawtooth SSPPs TL only has square metal sawteeth which are symmetrically arranged. Period p, depth h and width w of the saw tooth unit0The dimensions of (a) are the same as in example 1.
Comparative example 2
This comparative example provides a band elimination filter based on SSPPs transmission line, including sawtooth pattern SSPPs TL to and be located sawtooth pattern SSPPs TL both ends ladder gradual change transition structure and the coplanar waveguide of feed in proper order, sawtooth pattern SSPPs TL's structure compares in comparative example 1, still includes the sculpture CSRR that sets up in each square metal sawtooth. Period p, depth h and width w of saw tooth unit0And the width g, length L and branch length L of the void region for etching CSRRcThe dimensions of (a) are the same as in example 1.
Comparative example 2 dispersion curve of the band-stop filter based on the SSPPs transmission line as shown in fig. 3, it can be known that the SSPPs sawtooth unit having the etched CSRR operates in both the fundamental mode and the first-order higher-order mode, and the stop band can be clearly observed between the fundamental mode and the first-order higher-order mode. This is because etching the CSRR increases the relative serration depth of the SSPPs, and the higher-order modes of the SSPPs are excited when the relative serration depth is greater than the period length of the serration unit. As shown in the simulation result of FIG. 3, the dispersion band rejection range (stopband) of the SSPPs unit with the etched CSRR is 133-148 GHz.
Simulation results of the band elimination filters provided in example 1, comparative example 1 and comparative example 2 are shown in fig. 4, and it can be known that the conventional band elimination filter of comparative example 1 has pass-stop filtering characteristics; after the CSRR is etched by loading, the band-stop filter of comparative example 2 has a distinct stop band with a relative bandwidth of 10.7%, which is consistent with the dispersion curve shown in fig. 3; the first loading SRR5 and the second loading SRR6 are reloaded to obtain the band-stop filter of the embodiment 1, the relative bandwidth of the filter is improved to 21% from 10.7%, the suppression degree is kept above 10dB, and meanwhile, the in-band suppression depth is also obviously improved.
Fig. 5 is a diagram of a band-stop filter prepared by a micro-nano processing technology in an embodiment 1, a terahertz probe table is used for testing the band-stop filter, and measurement and simulation results are shown in fig. 6, which shows that the measurement results are basically consistent with the simulation results, the rejection depth of the band-stop filter is greater than 10dB, the relative bandwidth is 21%, and the maximum rejection depth is about 50dB @135GHz/143GHz within a frequency range of 128 to 158 GHz. The actual measurement result is basically consistent with the simulation result, and the device has good performance in the application of filtering on the terahertz sheet.
In summary, the invention provides a terahertz broadband band-stop filter based on an SSPPs transmission line, which realizes control on terahertz waves by etching CSRR and loading SRR, can be applied to clutter suppression, noise reduction, frequency selection and the like, and has the advantages of compact structure, wide frequency band and the like.
While the invention has been described with reference to specific embodiments, any feature disclosed in this specification may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise; all of the disclosed features, or all of the method or process steps, may be combined in any combination, except mutually exclusive features and/or steps.
Claims (5)
1. A terahertz broadband band elimination filter based on an SSPPs transmission line is characterized by comprising a symmetrical sawtooth SSPPs TL, and a step gradual transition structure and a coplanar waveguide which are sequentially arranged at two ends of the symmetrical sawtooth SSPPs TL; the symmetrical sawtooth SSPPs TL comprises etching CSRR arranged in each metal sawtooth and loading SRR positioned in each tooth gap, wherein the loading SRR is a folding open resonant ring structure, and the loading SRR and the etching CSRR are complementary structures except for different lengths of branches.
2. The terahertz broadband band-stop filter based on the SSPPs transmission line according to claim 1, wherein only the sawtooth unit with the symmetrical sawtooth SSPPs TL etched with CSRR works in a fundamental mode and a first order higher order mode, and forms a stop band between the fundamental mode and the first order higher order mode.
3. The terahertz broadband band-stop filter based on the SSPPs transmission line according to claim 1, wherein the loading SRR comprises a first loading SRR and a second loading SRR with different branch lengths, and the first loading SRR and the second loading SRR are symmetrically and alternately arranged in the tooth gaps of the symmetrical sawtooth SSPPs TL.
4. The terahertz broadband band-stop filter based on the SSPPs transmission line according to claim 3, wherein the resonance frequency point of the first loaded SRR is located at the upper cut-off point of the stop band, and the resonance frequency point of the second loaded SRR is located at the lower cut-off point of the stop band by controlling the lengths of the branches of the first loaded SRR and the second loaded SRR.
5. The terahertz broadband band-stop filter based on the SSPPs transmission line according to claim 1, wherein the symmetrical sawtooth SSPPs TL realizes 50 Ω impedance matching with the coplanar waveguide through a step-gradual transition structure.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116031600A (en) * | 2023-02-21 | 2023-04-28 | 西安电子科技大学 | Stop band suppression structure based on impedance matching artificial surface plasmon |
| CN116053735A (en) * | 2023-03-20 | 2023-05-02 | 电子科技大学 | Adjustable terahertz SSPPs transmission line |
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Cited By (4)
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| CN116053735B (en) * | 2023-03-20 | 2024-03-08 | 电子科技大学 | Adjustable terahertz SSPPs transmission line |
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Effective date of registration: 20231017 Address after: Room 101, Room 1307, Yuhua Garden Plaza, No. 59 Zhongshan Second Road, Shiqi District, Zhongshan City, Guangdong Province, 528499 Patentee after: Huahui Microelectronics Technology (Guangdong) Co.,Ltd. Address before: 611731, No. 2006, West Avenue, Chengdu hi tech Zone (West District, Sichuan) Patentee before: University of Electronic Science and Technology of China |