CN114659701A - High-sensitivity gas pressure sensor for rapidly desorbing gas and preparation method thereof - Google Patents
High-sensitivity gas pressure sensor for rapidly desorbing gas and preparation method thereof Download PDFInfo
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- CN114659701A CN114659701A CN202210206897.8A CN202210206897A CN114659701A CN 114659701 A CN114659701 A CN 114659701A CN 202210206897 A CN202210206897 A CN 202210206897A CN 114659701 A CN114659701 A CN 114659701A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
- G01L11/025—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/245—Removing protective coverings of light guides before coupling
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/25—Preparing the ends of light guides for coupling, e.g. cutting
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/255—Splicing of light guides, e.g. by fusion or bonding
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Abstract
The invention discloses a high-sensitivity air pressure sensor for rapidly desorbing gas, which is characterized by comprising a first single-mode optical fiber, a first multimode optical fiber, a special-shaped optical fiber with a concave open cavity, a second multimode optical fiber and a second single-mode optical fiber which are sequentially connected; the special-shaped optical fiber is an optical fiber with a concave open cavity, the concave open cavity is filled with a gas-sensitive material, and the gas-sensitive material is also provided with a porous material; light enters the gas sensitive material and the special-shaped optical fiber through the first multimode optical fiber after being incident from the first single mode optical fiber, and two paths of light paths of the MZI are formed. The invention can realize the refractive index response of the MZ gas-sensitive material optical path to the air pressure and realize the rapid desorption of the gas-sensitive material to the gas, thereby improving the measurement sensitivity and the gas desorption efficiency of the sensor and realizing the high-sensitivity measurement of the rapid desorption.
Description
Technical Field
The invention belongs to the technical field of optical fiber sensing and communication, and particularly relates to a high-sensitivity air pressure sensor for rapidly desorbing gas and a preparation method thereof.
Background
Fiber optic air pressure sensors are a very important device in the industrial and environmental monitoring fields. MZ interferometers (MZI, mach-zehnder interferometers) based on optical paths of various materials have shown good potential in pressure sensing applications over the past few decades. Common fiber pressure sensors include a grating type and a MZ type, and in the case of the grating type, a grating is usually used as a sensitive unit to convert the change of the external gas pressure into the expansion of the position of a gate region, i.e., the change of the gate pitch, thereby bringing about the drift of the spectrum. Since the amount of deformation caused by the optical fiber (the main material is SiO2) is very small due to the change of the air pressure, the sensitivity of such sensors is usually not high, such as 240pm/MPa, 137pm/MPa and 0.1 pm/MPa. The MZ sensor is used for measuring the change of the gas pressure, and the change of the external air pressure is converted into the change of the refractive index of the MZ air path.
The MZ-based pressure sensor mainly includes two types, one is an MZ open-cavity pressure sensor based on a pure quartz structure, an air path of the MZ open-cavity pressure sensor is communicated with the outside, and when the air pressure changes, the refractive index of the air changes, so that spectral shift is caused, and the MZ open-cavity pressure sensor is used for measuring the change of the air pressure. There is also a MZ pressure sensor based on film material, which can cause the refractive index of the material light path to change when the external pressure changes, i.e. the spectrum drift caused by the change of the material refractive index along with the change of the pressure, to realize the measurement of the pressure.
However, most of the existing gas pressure sensors are based on a single parameter of the refractive index of a gas-sensitive material or gas, and the gas pressure sensors are sensitive to gas pressure but the gas-sensitive material is difficult to desorb the gas.
Disclosure of Invention
The invention aims to solve the problems that the existing gas pressure sensor is sensitive to gas pressure based on a gas-sensitive material or a single refractive index parameter of gas and the gas-sensitive material is difficult to desorb the gas, and provides a high-sensitivity gas pressure sensor for rapidly desorbing the gas and a preparation method thereof.
The technical scheme adopted by the invention is as follows:
the high-sensitivity air pressure sensor for rapidly desorbing gas comprises a first single-mode optical fiber, a first multimode optical fiber, a special-shaped optical fiber, a second multimode optical fiber and a second single-mode optical fiber which are sequentially connected;
the special-shaped optical fiber is an optical fiber with a concave open cavity, and the concave open cavity is filled with a gas-sensitive material which contains a porous material; light enters the gas sensitive material and the special-shaped optical fiber through the first multimode optical fiber after being incident from the first single mode optical fiber, and two paths of light paths of the MZI are formed.
According to the technical scheme, the section of the special-shaped optical fiber is groove-shaped.
According to the technical scheme, the section of the special-shaped optical fiber is crescent.
According to the technical scheme, the gas sensitive material is a mixture of PDMS and a porous material, and the thickness of the gas sensitive material is 60-80 micrometers.
According to the technical scheme, the gas sensitive material is a mixture of PDMS and MOF, COF or zeolite.
According to the technical scheme, the gas-sensitive material is completely filled in the concave open cavity and is communicated with the outside.
According to the technical scheme, the depth of the concave open cavity is 60-80 microns, and the thickness of the bottom of the special-shaped optical fiber is 65-85 microns.
According to the technical scheme, in the gas sensitive material, the mass ratio of PDMS to the porous material is 85: 11-18: 1.
the invention also provides a manufacturing method of the high-sensitivity air pressure sensor for rapidly desorbing gas, which comprises the following steps:
(1) respectively cutting the special-shaped optical fiber with the concave open cavity and the multimode optical fiber with the coating layer removed into flat end surfaces by using a cutting knife, respectively welding two ends of the special-shaped optical fiber with the multimode optical fiber, and then welding the multimode optical fiber at two ends with the single-mode optical fiber to form an optical fiber interferometer structure;
(2) fixing the prepared optical fiber interferometer structure on a glass sheet by ultraviolet glue, wherein the opening of a concave open cavity of the special-shaped optical fiber is upward;
(3) and filling the gas-sensitive material solution into the concave open cavity of the special-shaped optical fiber, and heating and curing.
The invention also provides a test system of the optical fiber sensor, which comprises a broadband light source, an air pressure sensor and an optical fiber spectrometer which are sequentially connected, wherein the air pressure sensor is arranged in an air pressure chamber, and the air pressure sensor is a high-sensitivity air pressure sensor for rapidly desorbing gas in the technical scheme.
The invention has the following beneficial effects: injecting a gas-sensitive material into an open cavity of a special-shaped optical fiber to serve as a path of optical path medium, welding the special-shaped optical fiber with a multimode optical fiber, and forming two paths of MZ optical paths in the light re-special-shaped optical fiber and the gas-sensitive material; when the external air pressure is increased, the refractive index of the gas sensitive material is increased, and the porous material is added into the gas sensitive material, so that the refractive index of the gas sensitive material can rapidly desorb gas to an initial state when the air pressure is reduced, and the desorption of the gas sensitive material to the gas is accelerated, therefore, the invention can realize the refractive index response of the MZ gas sensitive material optical path to the air pressure and the rapid desorption of the gas sensitive material to the gas, improve the measurement sensitivity and the gas desorption efficiency of the sensor, and realize the high-sensitivity measurement of the rapid desorption.
Drawings
The invention will be further described with reference to the accompanying drawings and examples, in which:
fig. 1 is a schematic structural diagram of a high-sensitivity barometric sensor for rapidly desorbing gas according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a testing system for an optical fiber sensor according to an embodiment of the present invention;
FIG. 3 is a schematic cross-sectional view of several different open-cavity profile optical fibers.
In the figure: 1. the optical fiber spectrometer comprises a single-mode optical fiber, 2 multi-mode optical fibers, 3 special-shaped optical fibers, 4 gas-sensitive materials, 5 crescent optical fibers, 6 high-sensitivity air pressure sensors, 7 light sources, 8 air pressure chambers and 9 spectrometers.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The high-sensitivity gas pressure sensor for rapidly desorbing gas provided by the invention can realize that MZ gas-sensitive materials are sensitive to gas pressure and can simultaneously rapidly desorb gas, thereby greatly improving the sensitivity and the gas desorption efficiency of the gas pressure sensor.
The high-sensitivity air pressure sensor for rapidly desorbing gas in the embodiment of the invention comprises a single-mode optical fiber 1, a multi-mode optical fiber 2, a special-shaped optical fiber 3 and a gas sensitive material 4. The special-shaped optical fiber 3 is connected with the multimode optical fiber 2 at two ends in a fusion mode, one end of each of two sections of single-mode optical fibers 1 is connected with the multimode optical fiber 2 in a fusion mode, the special-shaped optical fiber 3 is provided with a concave open cavity, gas-sensitive materials 4 (the gas-sensitive materials 4 contain porous materials) are filled in the open cavity to form an optical fiber interferometer structure, the optical fiber interferometer structure can be fixed on a glass sheet, the gas-sensitive materials 4 are communicated with the external environment, and light and the special-shaped optical fiber 3 form two paths of MZ light paths through the gas-sensitive materials 4.
The sensor of the invention carries out porous modification to the gas-sensitive material, so that the porosity of the gas-sensitive material is increased to solve the problem that the gas desorption of the traditional gas-sensitive material is difficult, meanwhile, the refractive index of the gas-sensitive material changes along with the air pressure, the gas-sensitive material is used as a light path, the sensitivity of the sensor is improved, and the desorption time of the gas-sensitive material to the gas can be shortened. When the external air pressure changes, the air enters the photosensitive material from the special-shaped open cavity to cause the refractive index of the photosensitive material to change. Therefore, the invention breaks through the problems of low air pressure sensitivity of a pure quartz structure and difficult desorption of gas combined with a photosensitive material in the prior art, constructs a mixed porous material as a light path, can effectively improve the air pressure sensitivity and simultaneously shortens the desorption time of the gas sensitive material to the gas.
In the preferred embodiment of the present invention, the core diameter of the single mode optical fiber 1 is 8.2 microns, and the outer diameter is 125 microns.
The gas-sensitive material 4 is a porous material, and the change rate of the refractive index of the gas-sensitive material along with the change of the air pressure is-2.1 multiplied by 10-2RIU per MPa or so. The gas sensitive material matrix can be PDMS (polydimethylsiloxane) which is used as a cross-linking agent, and a porous material is added into the gas sensitive material matrix and is cured to form a mixed material. The porous material for increasing the porosity is prepared by selecting Metal-Organic Frameworks (MOFs), Covalent-Organic Frameworks (COFs), zeolite and other materials, adding the porous material into a PDMS solution, uniformly mixing the materials by using a magnetic stirrer, and then injecting the mixture into an open cavity of the special-shaped optical fiber, wherein the thickness of the open cavity is 60-80 microns.
The material of the porous material is zeolite, MOF or COF material, wherein the mass ratio of PDMS: the mass ratio of the porous material is 85: 11-18: 1.
the cross section of the profiled fiber can be designed to be crescent-shaped or other shapes (as shown in fig. 3). In a preferred embodiment of the present invention, the crescent-shaped fiber has a diameter of 125 microns and an open cavity diameter of 60-80 microns. The thickness of the bottom (and crescent bottom) of the special-shaped optical fiber is 65-85 micrometers.
The multimode fiber 2 had a core diameter of 105 microns, an outer diameter of 125 microns and a length of 1 mm.
In one embodiment of the present invention, a method for manufacturing a high-sensitivity gas pressure sensor capable of rapidly desorbing gas includes the following steps:
(1) respectively cutting the special-shaped optical fiber with the concave open cavity and the multimode optical fiber with the coating layer removed into flat end faces by using a cutting knife, respectively welding two ends of the special-shaped optical fiber with the multimode optical fiber, and then welding the multimode optical fiber with a single-mode optical fiber (such as a tapered single-mode optical fiber) to form an optical fiber interferometer structure;
(2) fixing the prepared optical fiber interferometer structure on a glass sheet by ultraviolet glue, wherein the opening of the open cavity of the special-shaped optical fiber is upward;
(3) filling the uniformly mixed gas-sensitive material solution in an open cavity of the special-shaped optical fiber, and heating and curing; the light passes through the cured gas-sensitive material and the special-shaped optical fiber to form two paths of light paths respectively.
The gas-sensitive material solution is obtained by respectively weighing PDMS and a porous material according to a certain mass ratio, adding the porous material into the PDMS solution, and uniformly mixing the porous material and the PDMS solution by using a magnetic stirrer.
Taking the crescent-shaped optical fiber 5 as an example, the method for preparing the high-sensitivity gas pressure sensor for rapidly desorbing gas in another embodiment of the invention comprises the following steps:
s1, respectively cutting the crescent optical fiber and the multimode optical fiber with the coating layers removed into flat end faces by using a cutting knife, respectively welding two ends of the crescent optical fiber with the multimode optical fiber, and then welding the multimode optical fiber with the tapered single-mode optical fiber;
s2, fixing the prepared optical fiber interferometer structure on a glass sheet by ultraviolet glue, wherein the opening of the open cavity of the crescent optical fiber is upward;
s3, weighing PDMS and the porous material according to a certain mass ratio, adding the porous material into the PDMS solution, and mixing the porous material and the PDMS solution uniformly by using a magnetic stirrer;
and S4, filling the uniformly mixed gas-sensitive material solution in the open cavity of the crescent optical fiber, and heating and curing.
S5, the gas-sensitive material and the crescent-shaped optical fiber form two paths of light paths respectively after the light is solidified.
Therefore, the preparation method is simple and easy to implement, two different optical fibers are welded together by cutting and welding, and then the gas-sensitive material is filled in the open cavity of the crescent optical fiber, so that the gas-sensitive material is protected, the sensitivity is improved to a great extent, and the desorption time of the gas-sensitive material to gas is shortened.
Fig. 2 is a schematic diagram of a testing system of an optical fiber sensor according to the present invention, the testing system includes a broadband light source 7, an air pressure chamber 8, an optical fiber spectrometer 9, and the high-sensitivity air pressure sensor 6 of the above embodiment, the high-sensitivity air pressure sensor 6 mainly includes a single-mode optical fiber 1, a multimode optical fiber 2 connected to the single-mode optical fiber 1, and a profiled optical fiber 3 connected to the multimode optical fiber, an open cavity of the profiled optical fiber 3 is filled with a gas-sensitive material 4 and is communicated with the outside, when the outside air pressure changes, gas enters the inside of the photosensitive material 4 from the open cavity of the profiled optical fiber 3 to cause the refractive index of the gas to change, thereby causing the spectrum drift. One end of the single-mode fiber 1 is connected with a broadband light source 7, the other end of the single-mode fiber is connected with a fiber spectrometer 9, and a high-sensitivity air pressure sensor 6 for rapidly desorbing gas is arranged in an air pressure chamber 8.
As shown in fig. 2, when performing a pressure sensing experiment, a high-sensitivity pressure sensor 6 for rapidly desorbing gas is sealed in a pressure chamber 8, the gas in the pressure chamber enters the gas sensitive material 4 through an open cavity of a special-shaped optical fiber 3 (taking a crescent-shaped optical fiber 5 as an example), when light emitted by a broadband light source enters the high-sensitivity pressure sensor 6 based on rapidly desorbing gas, a part of the light is transmitted in the gas sensitive material 4, the other part of the light is transmitted in the crescent-shaped optical fiber 5, and the two beams meet and transmit light to generate interference.
The total reflected light intensity of the two reflected lights is:
wherein phiMZIIs the phase difference of two output lights, when phiMZIOdd multiples of piMZITaking the minimum value, reflected in the interference spectrum as a trough, can be expressed as:
wherein Δ neffFor the effective refractive index difference of the optical mode propagating in the crescent-shaped optical fiber 5 and the gas-sensitive material 4, l is the length of the crescent-shaped optical fiber 5
From equation (2):
wherein q is a positive integer. Due to delta neffAnd l is a function of the pressure, and thereforeThe air pressure sensitivity expression can be obtained from equation (3):
the optical fiber spectrometer is represented by the drift of a spectrum peak, and the sensing measurement of the air pressure can be realized by measuring the drift amount of the output central wavelength.
It will be understood that modifications and variations can be made by persons skilled in the art in light of the above teachings and all such modifications and variations are intended to be included within the scope of the invention as defined in the appended claims.
Claims (10)
1. A high-sensitivity air pressure sensor for rapidly desorbing gas is characterized by comprising a first single-mode fiber, a first multimode fiber, a profiled fiber, a second multimode fiber and a second single-mode fiber which are connected in sequence;
the special-shaped optical fiber is an optical fiber with a concave open cavity, and the concave open cavity is filled with a gas-sensitive material which contains a porous material; light enters the gas sensitive material and the special-shaped optical fiber through the first multimode optical fiber after entering the first single-mode optical fiber, and two paths of light paths of the MZI are formed.
2. The high-sensitivity gas pressure sensor for rapidly desorbing gas according to claim 1, wherein the cross section of the profiled optical fiber is groove-shaped.
3. The high-sensitivity gas pressure sensor for rapidly desorbing gas according to claim 1, wherein the cross section of the special-shaped optical fiber is crescent-shaped.
4. The high-sensitivity gas pressure sensor for rapidly desorbing gas as claimed in claim 1, wherein the gas sensitive material is a mixture of PDMS and a porous material, and the thickness of the gas sensitive material is 60 to 80 μm.
5. The gas pressure sensor for rapidly desorbing gas as claimed in claim 1, wherein the gas sensitive material is a mixture of PDMS and MOF, COF or zeolite.
6. The high-sensitivity gas pressure sensor for rapidly desorbing gas as claimed in claim 1, wherein the gas sensitive material is completely filled in the concave open cavity, and the gas sensitive material is communicated with the outside.
7. The high-sensitivity gas pressure sensor for rapidly desorbing gas according to claim 1, wherein the depth of the concave open cavity is 60 to 80 microns, and the thickness of the bottom of the profiled optical fiber is 65 to 85 microns.
8. The high-sensitivity gas pressure sensor for rapidly desorbing gas as claimed in claim 4, wherein the mass ratio of PDMS to the porous material in the gas sensitive material is 85: 11-18: 1.
9. a manufacturing method of a high-sensitivity gas pressure sensor for rapidly desorbing gas is characterized by comprising the following steps:
(1) respectively cutting flat end faces of the special-shaped optical fiber with the concave open cavity and the multimode optical fiber with the coating layers removed by using a cutting knife, respectively welding two ends of the special-shaped optical fiber with the multimode optical fiber, and then welding the multimode optical fibers at two ends with the single-mode optical fiber to form an optical fiber interferometer structure;
(2) fixing the prepared optical fiber interferometer structure on a glass sheet by ultraviolet glue, wherein the opening of a concave open cavity of the special-shaped optical fiber is upward;
(3) and filling the gas-sensitive material solution in the concave open cavity, and heating and curing.
10. A test system of an optical fiber sensor is characterized in that the test system comprises a broadband light source, an air pressure sensor and an optical fiber spectrometer which are connected in sequence, the air pressure sensor is arranged in an air pressure chamber, and the air pressure sensor is a high-sensitivity air pressure sensor for rapidly desorbing gas according to any one of claims 1 to 8.
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