CN114659473A

CN114659473A - Flatness detection device, system and detection method

Info

Publication number: CN114659473A
Application number: CN202011531013.3A
Authority: CN
Inventors: 李派; 熊盼; 鲁旭峰; 陈勇; 谭春华; 吴永胜
Original assignee: Ningbo Sunny Opotech Co Ltd
Current assignee: Ningbo Sunny Opotech Co Ltd
Priority date: 2020-12-22
Filing date: 2020-12-22
Publication date: 2022-06-24
Anticipated expiration: 2040-12-22
Also published as: CN114659473B

Abstract

The application provides a roughness detection device and a detecting system. The flatness detection apparatus includes: an inspection platform having an upper surface and a lower surface; a light-emitting hole exposed on the upper surface of the detection device; and the light source is positioned at the bottom of the light outlet hole. In this application, utilize the principle that refraction and diffraction can take place at the small clearance, observe the little clearance that whether the outgoing of light judges to have more difficult observation under dark state environment, carry out the roughness through the outgoing of light and detect. The flatness detection device can obtain a more accurate detection effect, and the detection operation is simpler and more convenient.

Description

Flatness detection device, system and detection method

Technical Field

The application relates to the field of equipment detection, in particular to a flatness detection device, a flatness detection system and a flatness detection method.

Background

As a high-precision production industry, the related production process and production equipment of the mobile phone module need to have higher precision management and control, otherwise, the production quality of the module cannot be ensured. In module production, its process flow just needs to formulate comparatively accurate parameter standard and management and control bound at first, and the parameter is up to standard, and the production flow that needs the design on the one hand is reasonable, and the equipment that needs to be responsible for production on the one hand can effectively accomplish such high accuracy production. It is well known that the accuracy of a device needs to be viewed in two ways, one being the initial accuracy and one being the ability to maintain that accuracy during operation of the device. In module production, an important link is to assemble the lens on the circuit board assembly, wherein the relative angle between the lens and the circuit board assembly needs to be controlled well, and the deviation of the angle or position can cause the rapid reduction of the module quality, so that the imaging quality verification does not meet the requirements. Therefore, before the equipment is put into production formally, the equipment needs to be completely overhauled and debugged once. One of the debugs is to adjust the flatness of the equipment, which is one of the important standards in the production process of the equipment.

Currently, the general device flatness detection mostly uses a pressure sensing paper calibration method. The principle is that a welding head motor of the equipment is powered off, the top of a suction nozzle is installed on a welding head, then the sensing paper is placed on a cushion block, and the welding head is pressed downwards by hands, so that the bottom of the suction nozzle is in contact with the sensing paper. Because the bearing surface at the bottom of the suction nozzle has a specific shape, when the suction nozzle is pressed downwards, the pressure sensing paper can display a corresponding graph. The graphic display of the sensing paper can represent the horizontal state of the part, namely, the inclination direction of the equipment can be judged by observing the integrity of the graphic or the coloring degree of the edge of the graphic. However, since the sensing paper has a certain thickness and there is a bonding error in the contact between the top of the suction nozzle and the bonding head, when the bonding head is pressed downward by hand, the degree of pressing force directly affects the calibration effect when the bottom of the suction nozzle is in contact with the sensing paper. Therefore, the steps of the pressure sensing paper calibration method are complicated, the whole operation consumes long time, and meanwhile, the detection precision of the pressure sensing paper calibration method is low.

After considering the influence of the thickness of the pressure sensing paper, a technician adopts another method to cancel the pressure sensing paper, namely, the horizontal state of equipment and parts is judged by printing and dyeing the bottom of the suction nozzle through the inkpad and matching with the common white paper, namely, the inkpad rubs out a pattern corresponding to the inkpad on the white paper, and the horizontal state is judged and adjusted by further having a clear distribution state of the pattern. However, the inkpad and the plain white paper have a problem that the inkpad and the plain white paper are easily affected by moisture, the plain white paper easily absorbs moisture, the inkpad has a certain amount of moisture, the pattern is easily scattered after the bottom of the suction nozzle is contacted with the plain white paper, and the printed pattern is qualified, which is obviously not taken as a main method for adjusting the level of the equipment.

Therefore, a detection device, a detection system and a detection method capable of improving the flatness detection accuracy and detection efficiency of the equipment are needed.

Disclosure of Invention

The application aims at providing a roughness detection device and system, can improve the roughness detection precision and the detection efficiency of part.

The application provides a roughness detection device, includes:

a suction nozzle standard having a flat lower surface;

an inspection platform having an upper surface and a lower surface parallel to each other;

the light outlet is exposed on the upper surface of the detection platform;

and the light source is arranged in the light outlet hole.

According to some embodiments, the detection platform comprises a groove exposed to an upper surface of the detection platform, and the light exit hole is exposed to the groove and is concentrically arranged with the groove.

According to some embodiments, the peripheral wall of the recess and/or the inner wall of the light exit opening have a smooth surface.

According to some embodiments, the peripheral wall of the groove has an array of keyways for quantifying the direction and/or angle of the flatness defect.

According to some embodiments, the array of keyways is regularly arranged along a peripheral wall of the groove;

the keyway array has an angular scale along the circumferential wall of the groove.

According to some embodiments, the recess has a chamfer at an interface with an upper surface of the detection platform.

According to some embodiments, the opening of the light exit aperture has an array of wedges.

According to some embodiments, the wedge array is regularly arranged along the opening of the light exit hole.

The application also provides a roughness detecting system, includes:

the flatness detecting device of any one of the above;

and the driving device drives the suction nozzle standard component to move towards the flatness detection device so as to cover the light outlet of the flatness detection device.

According to some embodiments, the nozzle standard comprises:

the fixed end is connected with the driving device;

the bottom bearing surface is provided with a flat lower surface and covers the light emitting hole under the driving of the driving device;

and the connecting rod is connected with the fixed end and the bottom bearing surface.

According to some embodiments, the bottom bearing surface is uniform in thickness and the bottom bearing surface has a lower surface flatness deviation of less than ± 0.1%.

The application also provides a detection method of the flatness detection system, which comprises the following steps:

in a dark state environment, the light source is started, and the driving device drives the suction nozzle standard component to move towards the detection platform so as to cover the light outlet;

observing whether light leaks from the lower surface of the suction nozzle standard part;

and judging the inclination direction and angle of the suction nozzle standard component according to the leakage direction and angle of the light.

judging the inclination direction and angle of the suction nozzle standard component according to the leakage direction and angle of light;

the driving device drives the suction nozzle standard part to be far away from the light outlet;

the driving device drives the suction nozzle standard part to rotate for a certain angle;

the driving device drives the suction nozzle standard component to move towards the detection platform so as to cover the light outlet hole again;

observing whether light leaks from the lower surface of the suction nozzle standard part or not;

and judging the inclination direction and angle of the suction nozzle standard part again according to the leakage direction and angle of the light.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.

Drawings

The above and other objects, features and advantages of the present application will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings.

Fig. 1 shows a schematic structural diagram of a flatness detection system according to some embodiments of the present application.

Fig. 2 shows a schematic structural diagram of a flatness detection apparatus according to an exemplary embodiment of the present application.

Fig. 3 is a front view showing a structure of a flatness detecting apparatus according to another embodiment of the present application.

Fig. 4 is a plan view showing a structure of a flatness detection apparatus according to another embodiment of the present application.

Fig. 5 is a partial schematic structural diagram of a flatness detection system according to another embodiment of the present application.

Fig. 6 is a flowchart illustrating a detecting method of a flatness detecting system according to another embodiment of the present application.

Fig. 7 is a flowchart illustrating a detecting method of a flatness detecting system according to another embodiment of the present application.

Detailed Description

Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference numerals denote the same or similar parts in the drawings, and thus, a repetitive description thereof will be omitted.

The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the disclosure. One skilled in the relevant art will recognize, however, that the embodiments of the disclosure can be practiced without one or more of the specific details, or with other means, components, materials, devices, or the like. In such cases, well-known structures, methods, devices, implementations, materials, or operations are not shown or described in detail.

In the module production, the completion of the transportation and the installation of the lens is basically completed through the suction nozzle, and whether the driving device is arranged accurately and directly determines whether the produced module meets the requirements or not. Therefore, the present application proposes a method of measuring flatness that is not easily affected by the outside. The characteristics of light retransmission, namely, the principle of light propagation along a straight line and diffraction are utilized to observe and detect some tiny gaps.

When the horizontal state of the driving device is adjusted, because the driving device does not have a relatively complete regular surface for detecting the horizontal state, the suction nozzle with the regular surface is installed on the driving device, the horizontal state of the driving device is judged by judging the horizontal state of the regular surface of the suction nozzle, namely the flatness of a bearing surface at the bottom of the suction nozzle needs to be ensured to ensure the flatness of the driving device, so that the production precision is controlled within a certain range in the production process of equipment.

In this application, a suction nozzle standard part for detection is designed, the connection end of the suction nozzle standard part and the driving device is the same as the connection end of the suction nozzle and the driving device in the production process, namely, the state of the connection part of the suction nozzle standard part and the suction nozzle for actual production is basically similar. The bottom of the suction nozzle standard part is provided with a flat bottom bearing surface, the bottom bearing surface is even in thickness and extremely high in bottom surface evenness, the bottom bearing surface and the suction nozzle standard part are of an integrated structure and are made of metal materials with high strength, and the bottom bearing surface participates in equipment debugging work after the use standard of the standard part is reached through detection.

As shown in fig. 1, according to the technical concept of the present application, the flatness detecting system includes a detecting platform 10, a light emitting hole 20, a light source 30, a nozzle standard 40, and a driving device 50.

Referring to fig. 1, the testing platform 10 has an upper surface and a lower surface parallel to each other, the light outlet 20 is exposed on the upper surface of the testing platform 10, and the light outlet 20 extends toward the lower surface of the testing platform 20. The light source 30 may be located at the bottom of the light outlet hole 20.

The suction nozzle standard 40 is disposed on the driving device 50, and the driving device 50 drives the suction nozzle standard 40 to move towards the detection platform 10 to cover the light outlet 20.

Wherein, the driving device includes a rotary motor 501 and a lifting device 502, the rotary motor 501 is fixed on the lifting device 502, the lifting device 502 can drive the rotary motor 501 to move, the nozzle standard 40 is installed on the rotary motor 501, thereby the lifting of the nozzle standard 40 can be controlled by controlling the lifting of the rotary motor 501, it is noted that the rotating shafts of the nozzle standard 40 and the rotary motor 501 are related to each other, therefore, when the rotating shaft of the rotary motor 501 is vertically arranged, the nozzle standard 40 can rotate along the vertical direction axis, in this application, the nozzle standard 40 is related to the rotary motor 501 in the process of detecting the flatness.

The lifting device 502 movably holds the rotary motor 501, and the rotary motor 501 can be controlled by the lifting device 502 to reciprocate, so as to move away from or close to the detection platform 10. The rotary motor 501 is provided with a rotary shaft which can rotate around the rotary shaft in the vertical direction, the nozzle standard 40 is fixed on the rotary shaft of the rotary motor 501 and rotates synchronously with the rotary motor 501, and in the production process, the adjustment of the module angle is realized, and it should be noted that the rotary shaft of the rotary motor 501 and the rotary shaft of the nozzle standard 40 are coaxial, so that the position deviation or the vibration of the nozzle standard 40 in the rotation process is avoided. In the invention, in the process of detecting the flatness, after one detection, the rotary motor 501 is lifted under the control of the lifting device 502, namely the rotary motor 501 drives the suction nozzle standard component 40 to lift, and simultaneously the rotary motor 501 controls the rotary shaft to rotate, namely the rotary motor 501 drives the suction nozzle standard component 40 to rotate, and the flatness detection is repeated again after rotating a certain angle, so that the vertical coaxiality of the rotary motor 501 and the suction nozzle standard component 40 is ensured, and the phenomenon that the suction nozzle standard component 40 is deviated after rotating a certain angle in the actual production process is avoided, so that the precision of the detection result is ensured, namely the detection of different angles is repeated for many times in the detection process.

Referring to fig. 1, in a dark environment, the light source 30 is turned on, the driving device 50 drives the suction nozzle standard component 40 to move towards the detection platform 10 to cover the light outlet 20, the light source 30 emits uniform light towards the suction nozzle standard component 40, the light is projected to the bottom surface of the suction nozzle standard component 40 after being reflected for multiple times on the inner wall of the light outlet 20, if the flatness of the lower surface of the suction nozzle standard component 40 is defective, the suction nozzle standard component 40 cannot perfectly cover the light outlet 20, the light passes through a gap between the suction nozzle standard component 40 and the light outlet 20 and is projected onto the detection platform 10, and the flatness condition of the lower surface of the suction nozzle standard component 40 can be determined by analyzing the projection result of the light on the detection platform 10. After a detection result is obtained, the lifting device 502 controls the suction nozzle standard component 40 to be far away from the light outlet 20, the rotating motor 501 controls the suction nozzle standard component 40 to rotate by a certain angle, then the driving device 50 drives the suction nozzle standard component 40 to move towards the detection platform 10 again to cover the light outlet 20, and the flatness condition of the lower surface of the suction nozzle standard component 40 can be judged more accurately by analyzing the projection result of light on the detection platform 10 again.

Optionally, the rotation angle of the rotation shaft of the rotation motor 501 may be 90 degrees, or may be any angle convenient for detection, and the present application is not limited thereto.

Optionally, the lifting device 502 controls the nozzle standard component 40 to be away from the light exit hole, and the number of times of performing the flatness detection again may be zero or multiple times, which is not limited in this application.

Referring to fig. 2, the flatness detecting apparatus includes a detecting platform 10, a light outlet hole 20, and a light source 30 according to an exemplary embodiment.

As shown in fig. 2, the detection platform 10 has an upper surface and a lower surface, the upper surface and the lower surface may be surfaces of any shape, the light outlet 20 is exposed on the upper surface of the detection platform 10, the bottom of the light outlet 20 extends towards the lower surface, the light source 30 is stably placed at the bottom of the light outlet 20, and the light emitted by the light source 30 is uniform and continuous.

Alternatively, the detection platform 10 may be a platform with any shape, and the upper surface and the lower surface of the detection platform 10 may be surfaces with any shape, and the present application is not limited to a horizontally arranged plane.

Alternatively, the light emitting hole 20 may be a countersunk hole, and the light source 30 is connected by a wire disposed inside the detection platform 10 to ensure the opening and closing of the light source 30.

Optionally, the light emitting hole 20 may also be a through hole, the light source 30 is fastened to the inner wall of the light emitting hole 20 through a screw thread, the light source 30 enters the light emitting hole 20 through a wire arranged inside the detection platform 10 and/or from the lower surface of the detection platform 10 to mount a power supply device, and the light emitting hole 20 of the present application is not limited to a countersunk structure.

Alternatively, the light source 30 is an LED light source, or any light source capable of emitting continuous smooth light, and the light source 30 is smoothly arranged at the bottom of the light outlet hole 20.

The light source can be a flat surface light source, and meanwhile, the light source can be a cold light source, so that the condition that the detection result is influenced by the fact that parts in the detection device are uneven due to expansion caused by heat and contraction caused by cold generated by the light source in the working process is avoided.

According to an exemplary embodiment, in a dark state environment, by turning on the light source 30, light can be uniformly projected out of the light outlet 20 after being reflected by the inner wall of the light outlet 20.

It is worth noting that the inner wall of the structure such as the light through hole, the groove and the key groove array can be a smooth surface with a good reflection effect, so that light can be reflected, refracted, diffracted and emitted on the surface of the inner wall, and the phenomenon that the light is rapidly attenuated to influence an observation result and cause deviation of a detection result is avoided.

Referring to fig. 3, in the flatness detecting apparatus of another embodiment, the detecting platform 10 includes a groove 101, the groove 101 is exposed on the upper surface of the detecting platform 10, the light emitting hole 20 is exposed on the groove 101 and is concentrically disposed with the groove 101, a peripheral wall of the groove has a key groove array 1011, the key groove array 1011 is regularly arranged, the key groove array 1011 has a scale value, and a chamfer 1012 is provided at an intersection of the groove 101 and the upper surface of the detecting platform 10.

Optionally, the key groove array 1011 is located on the inner wall of the groove 101, and may be an isosceles triangle key type, or a key type with any shape, and after the light is projected from the light exit hole 20, a part of the light may be projected onto the inner wall of the groove 101, and another part of the light may be projected into the key groove array 1011.

Optionally, the chamfer 1012 is located at a junction between the groove 101 and the upper surface of the detection platform 10, and may be a smooth triangular chamfer or a chamfer of any shape, so that a device to be detected is conveniently placed in the groove 101, and meanwhile, the projection condition of light inside the groove 101 is conveniently observed.

According to another embodiment, in the detection process, if the detected device has flatness defects, light forms a light band on the key slot array 1011 after the light is projected out of the light outlet 20, the light band can be observed and recorded through the chamfer 1012 at the scale value projected by the key slot array 1011, and the flatness defects of the device to be detected can be quantified according to the scale value.

Referring to fig. 4, in the flatness detecting apparatus according to another embodiment, a wedge array 201 is disposed at an opening of the light exit hole 20, the wedge array 201 is regularly arranged, and the wedge array 201 is an inner chamfer.

According to another embodiment, in the detection process, if the detected device has flatness defects, light can be emitted with directivity through the wedge-shaped opening array 201, after the light is emitted, a light band can be formed on the key slot array 1011, and the scale value of the projection of the light band on the key slot array 1011 can be observed and recorded through the chamfer 1012.

According to another embodiment, the wedge array 201 is equivalent to a certain size planning of light, so that the observation is more convenient, and the flatness detection is convenient according to the size standard.

Optionally, the present application is not limited to the wedge array, but may also be other arrays that can implement the light directional exit function.

Referring to fig. 5, the nozzle module 40 includes a fixing end 401, a bottom bearing surface 402 and a connecting rod 403, the fixing end 401 is connected to the driving device, and the bottom bearing surface 402 covers the light emitting hole 20 under the driving of the driving device.

According to another embodiment, the connecting rod 403 is connected with the fixed end 401 and the bottom bearing surface 402, a through hole is formed in the center of the fixed end 401, the through hole conducts the connecting rod 403 of the suction nozzle standard component 40, the bottom bearing surface 402 is arranged below the connecting rod 403, a through hole is also formed in the center of the bottom bearing surface 402, namely, the suction nozzle standard component 40 is vertically communicated, and the air channel of the upper fixed end 401 is connected with the air pipe at the driving device, so that the vacuum adsorption function of the suction nozzle standard component 40 is realized.

Optionally, the bottom of the suction nozzle standard 40 is supported by the surface with uniform thickness and extremely high flatness of the bottom surface, and may be made of a metal material with high strength or other high-strength structures, which is not limited in this application.

Optionally, the driving device is used to provide continuous and smooth directional driving, the driving device has a return function, and the driving device may be a stepping motor, or any driving device with a reciprocating function.

Optionally, the thickness of the bottom bearing surface of the suction nozzle standard part is uniform, and the deviation of the flatness of the bottom surface of the bottom bearing surface is less than ± 0.1%.

Optionally, the side wall of the light exit hole 20 is perpendicular to the moving direction of the driving device, and the side wall of the light exit hole 20 may also form a certain angle with the moving direction of the driving device as a whole, which is not limited in this application.

Alternatively, the application is not limited to the nozzle standard structure, and can be any detection standard with a high-flatness bottom surface.

According to another embodiment, during the testing process, the driving device drives the nozzle standard 40 to move vertically downward under the dark environment, and the lower surface of the bottom bearing surface 402 finally contacts the groove 101. If the driving device has flatness defects, the lower surface of the bottom bearing surface 402 cannot be completely attached to the groove 101, the light source 30 is turned on at the moment, light can be emitted in directivity through the wedge-shaped opening array 201, a light band can be formed on the key groove array 1011 after the light is emitted, and the light band can be observed and the scale value projected on the key groove array 1011 through the chamfer 1012 can be recorded.

According to another embodiment, the flatness defect of the driving device can be rapidly detected by the flatness detecting system, the flatness detecting system is convenient to operate and low in cost, and meanwhile, the flatness detecting system is high in detecting precision.

At S610, the detection system is installed.

According to another embodiment, the nozzle module is mounted on the driving device 50, and the light source 30 is disposed inside the light outlet 20.

In S620, the positional relationship is adjusted.

According to another embodiment, the driving device is disposed above the light exit hole 20, such that the moving direction of the driving device 50 is perpendicular to the hole surface of the light exit hole 20.

At S630, the device under test contacts the detection apparatus.

According to another embodiment, in a dark environment, the light source 30 is turned on, the driving device 50 drives the nozzle module 40 to move vertically downward, and the lower surface of the bottom bearing surface 402 finally contacts the groove 101.

At S640, it is detected whether the flatness of the device is acceptable.

According to another embodiment, if the driving device 50 has a defect of flatness, the lower surface of the bottom bearing surface 402 cannot completely fit on the groove 101, and the light generated by the light source 30 can exit through the wedge-shaped opening array 201 with directivity and finally be projected on the key slot array 1011.

At S650, the direction of the device flatness defect is determined.

According to another embodiment, after the light is emitted, a light strip is formed on the key slot array 1011, and the projection direction of the light strip on the key slot array 1011 can be observed and recorded through the chamfer 1012, so that the direction of the flatness defect of the driving device 50 can be quantified.

At S660, the angle of the device flatness defect is determined.

According to another embodiment, after the light is emitted, a light band is formed on the key groove array 1011, and the scale projected by the light band on the scale value of the key groove array 1011 can be observed and recorded through the chamfer 1012, so that the angle of the flatness defect of the driving device is quantified.

At S710, a detection system is installed.

In S720, the positional relationship is adjusted.

According to another embodiment, the driving device 50 is disposed above the light exit hole 20, such that the moving direction of the driving device 50 is perpendicular to the hole surface of the light exit hole 20.

At S730, the device under test contacts the detection apparatus.

At S740, it is detected whether the flatness of the device is acceptable.

At S750, the direction of the device flatness defect is determined.

According to another embodiment, after the light is emitted, a light band is formed on the key slot array 1011, and the projection direction of the light band on the key slot array 1011 can be observed and recorded through the chamfer 1012, so that the direction of the flatness defect of the driving device is quantified.

In S760, the angle of the device flatness defect is determined.

According to another embodiment, after the light is emitted, a light band is formed on the key slot array 1011, and the scale projected by the light band on the scale value of the key slot array 1011 can be observed and recorded through the chamfer 1012, so that the angle of the flatness defect of the driving device 50 can be quantified.

At S770, the device under test is repositioned.

According to another embodiment, the driving device 50 drives the nozzle module 40 away from the light outlet 20, and then the driving device 50 drives the nozzle module 40 to rotate by a certain angle.

At S780, the device under test contacts the detection apparatus again.

According to another embodiment, the driving means 50 again drives the nozzle module 40 vertically downward, and the lower surface of the bottom seating surface 402 finally contacts the recess 101.

In S790, the device flatness defect is judged again.

According to another embodiment, the flatness defect of the driving device is detected again, after the light is emitted, a light band can be formed on the key groove array 1011, the direction of the light band projected on the key groove array 1011 can be observed and recorded through the chamfer 1012, so that the direction of the flatness defect of the driving device is quantized, meanwhile, the scale of the light band projected on the scale value of the key groove array 1011 can be observed and recorded through the chamfer 1012, and the angle of the flatness defect of the driving device 50 is quantized.

The embodiments of the present application have been described and illustrated in detail above. It should be clearly understood that this application describes how to make and use particular examples, but the application is not limited to any details of these examples. Rather, these principles can be applied to many other embodiments based on the teachings of the present disclosure.

Through the description of the example embodiments, those skilled in the art will readily appreciate that the technical solutions according to the embodiments of the present application have at least one or more of the following advantages.

According to some embodiments of the present application, by using a diffraction principle of light, under a dark environment, the nozzle standard covers the light outlet, and if the mounting state of the nozzle standard is vertical, that is, the lower surface of the nozzle standard is horizontal, there is no light leakage at the contact position. If the suction nozzle standard part can not completely cover the light outlet hole and has a certain inclination angle, certain light leakage exists, the light leakage can be light leakage with a small gap, the flatness defect which cannot be detected by the traditional method can be detected by the detection method, and the precision of the detection result is improved.

According to some embodiments of the application, the angle and the direction of the flatness defect of the equipment to be detected are quantized through the key groove array, so that the flatness defect can be accurately adjusted according to the detection result, and the transmission detection method is difficult to realize.

According to some embodiments of the application, the projection effect of the light is directionally amplified through the wedge array, and the detection result of the flatness of the equipment is more accurate.

In some other embodiments of the present invention, both the contact surfaces of the nozzle standard 40 and the testing platform 10 are provided with flat hard rubber, the surface of the hard rubber is flat, and the deviation of the surface flatness of the hard rubber is less than ± 0.1%, so as to effectively prevent the wear of the device.

In some embodiments of the present invention, a buffer member may be disposed on the suction nozzle standard member, and the buffer member has a certain amount of extension and retraction, so that the contact process between the suction nozzle standard member 40 and the detection platform 10 is smooth through damping motion, thereby reducing irreversible loss caused by direct impact on the device.

Exemplary embodiments of the present application are specifically illustrated and described above. It is to be understood that the application is not limited to the details of construction, arrangement, or method of implementation described herein; on the contrary, the intention is to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.

Claims

1. A flatness detecting apparatus comprising:

a suction nozzle standard having a flat lower surface;

the detection platform is provided with an upper surface and a lower surface which are parallel to each other;

the light outlet is exposed on the upper surface of the detection platform;

and the light source is arranged in the light outlet hole.

2. The flatness detecting apparatus according to claim 1, wherein the detection stage includes a groove exposed to an upper surface of the detection stage, and the light exit hole is exposed to the groove and disposed concentrically with the groove.

3. The flatness detecting apparatus according to claim 2, wherein a peripheral wall of the groove and/or an inner wall of the light exit hole has a smooth surface.

4. A flatness detecting arrangement according to claim 3, wherein the peripheral wall of the groove has an array of keyways for quantifying the direction and/or angle of the flatness defect.

5. The flatness detecting apparatus according to claim 4, wherein the key groove arrays are regularly arranged along a peripheral wall of the groove.

6. The flatness detecting apparatus according to claim 4, wherein the key groove array has an angular scale in a circumferential wall direction of the groove.

7. The flatness detection apparatus according to claim 2,

and a chamfer is arranged at the intersection of the groove and the upper surface of the detection platform.

8. The flatness detecting device according to claim 1, wherein an array of wedges is provided at the opening of the light exit hole.

9. The flatness detecting device according to claim 8, wherein the wedge arrays are regularly arranged along the opening of the light exit hole.

10. A flatness detection system, comprising:

the flatness detection apparatus according to any one of claims 1 to 9;

11. The flatness detection system of claim 10, wherein the nozzle standard includes:

the fixed end is connected with the driving device;

the connecting rod is connected the stiff end with the bottom bears the face of leaning on.

12. The flatness detection system of claim 11, said bottom bearing surface being of uniform thickness and having a lower surface flatness deviation of less than ± 0.1%.

13. A method of inspecting a flatness inspection system according to claim 10, the method comprising:

14. A method of inspecting a flatness inspection system according to claim 10, the method comprising: