CN114658654B - Roots rotor - Google Patents
Roots rotor Download PDFInfo
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- CN114658654B CN114658654B CN202210208276.3A CN202210208276A CN114658654B CN 114658654 B CN114658654 B CN 114658654B CN 202210208276 A CN202210208276 A CN 202210208276A CN 114658654 B CN114658654 B CN 114658654B
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- rotor
- roots rotor
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2250/00—Geometry
- F04C2250/20—Geometry of the rotor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/60—Other road transportation technologies with climate change mitigation effect
- Y02T10/64—Electric machine technologies in electromobility
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Rotary Pumps (AREA)
Abstract
The invention belongs to the field of dry vacuum pumps, and particularly relates to a Roots rotor. Wherein the terminal surface molded lines includes: n curves connected end to end, wherein n is the number of leaves of the Roots rotor; the first curve is formed by straight line modification at the tooth root arc envelope line, a curve obtained by cutting off the tooth top arc by straight line modification at the tooth top arc, the tooth root arc envelope line and the straight line modification at the tooth root arc envelope line are sequentially connected anticlockwise, and the nth curve is obtained by n first curve arrays; taking a straight line passing through the rotation center point O and the circle center of the tooth top arc as a symmetry axis of the first molded line; the straight line modification at the tooth root arc envelope line and the straight line modification at the tooth root arc envelope line are symmetrical relative to the symmetry axis; the tooth root arc envelope line and the tooth root arc envelope line are symmetrical relative to a symmetry axis; the invention can effectively reduce the stress concentration phenomenon at the tooth top and has higher strength.
Description
Technical Field
The invention belongs to the field of dry vacuum pumps, and particularly relates to a Roots rotor.
Background
The main application fields of the dry vacuum pump comprise a semiconductor process represented by an etching process, a preparation process of polysilicon in chemical industry and low-pressure chemical vapor deposition, scientific experimental instrument application and the like, wherein the market share occupancy of the dry vacuum pump in the semiconductor application field is up to 40%. Taking the semiconductor industry with the most extensive application field of the dry vacuum pump as an example, the process environment comprises three conditions of cleaning, medium and severe, wherein the process types comprise Load lock, gas conveying, metering, PVD (physical vapor deposition) process, PVD pre-cleaning, CVD, PECVD, MOCVD and the like, and the problems of scratch and the like among rotors still occur easily due to the narrow size in a pump cavity although the form is helpful for rapid powder discharge under actual working conditions to a certain extent in order to meet the requirements of different process environments in the semiconductor industry. The lobe rotor profile based on conjugate curves adopted at present still has the defect that dust accumulation occurs after meshing to cause scraping during meshing. Therefore, a rotor is designed to solve the stress concentration phenomenon and prevent the scratch phenomenon caused by overheat or dust accumulation.
Disclosure of Invention
The invention aims to provide a Roots rotor with linear repair for the severe process conditions such as dust in the semiconductor industry, and the changes of the volume of a working space in a pump cavity are completed through the meshing rotation of the rotor, so that the air extraction effect is achieved; compared with the original Roots rotor based on conjugate curves, the rotor can effectively reduce stress concentration, prevent scratch phenomenon caused by overheat or dust accumulation, and has stronger process applicability.
The technical scheme adopted by the invention for achieving the purpose is as follows: a roots rotor, an end face profile of the roots rotor comprising: n curves connected end to end, wherein n is the number of leaves of the Roots rotor;
the first curve in the end surface molded line is formed by sequentially connecting a curve BDCA obtained by cutting out an addendum arc AB by a straight line modification EP at an addendum arc envelope line, an addendum arc envelope line AE and a straight line modification CD at an addendum arc line BG and an addendum arc envelope line GQ anticlockwise;
taking a straight line passing through the rotation center point O of the Roots rotor and the center of the tooth top arc AB as a symmetry axis of the first molded line; the straight line modification GQ at the tooth root arc envelope line and the straight line modification EP at the tooth root arc envelope line are symmetrical relative to a symmetry axis; the tooth root arc envelope line BG and the tooth root arc envelope line AE are symmetrical relative to a symmetry axis;
a curve BDCA formed by cutting out the tooth top curve AB by a straight line trimming CD at the tooth top arc on the tooth top arc AB forms the tooth top curve AB; the straight line trimming CD at the tooth top arc is a connecting line of a point C and a point D on the tooth top arc AB and is perpendicular to the symmetry axis;
the nth curves in the end surface molded lines are obtained by n first curve arrays; the first curve and the n curves are connected end to form an end surface molded line of the Roots rotor;
the symmetry axes for the N curves coincide or intersect at a point.
The end surface molded lines are all obtained by sequentially arranging n first curves with an origin O as a rotation center and 2 pi/n as rotation angles.
The end surface molded lines of the pair of meshed rotors generated by the Roots rotor molded lines are identical and conjugate with each other.
The tooth top arc AB is meshed with a pair of generated tooth root arc envelope curves A 'L' of the meshing rotors, and a molded line equation of the tooth top arc AB is as follows:
X＝r*cosγ
Y＝R b +r*sinγ
wherein R is the small radius of the tooth top, R b The distance from the rotation center point O of the Roots rotor to the circle center of the addendum circle is the included angle between the connecting line of any point on the addendum small circle and the circle center of the addendum small circle and the straight line passing through the circle center of the addendum circle and perpendicular to the symmetry axis.
The tooth root arc envelope AE and the symmetrical curve FL thereof are mutually meshed with the tooth top arc a 'B' of the generated pair of meshing rotors, wherein the curve FL is symmetrically obtained by the curve AE by taking the connecting line of the rotation center O and the midpoint P as the symmetrical axis, and the molded line equations are as follows:
X＝2A*cosα-R b *cos2α-r*cosβ
Y＝2A*sinα-R b *sin2α+r*sinβ
wherein A is the center distance of the two rotors after engagement, and alpha is the connecting line OO of the centers of the two rotors after engagement 1 The included angle between the horizontal line included angle and the horizontal line included angle,beta is the connection OO between the centers of the two rotors after engagement 1 An included angle with OM;
OM is O point O 1 O 2 Perpendicular to the extension line is crossed with O 1 O 2 Extension line at M point, O 2 Is the center of a small circle of the tooth crest of the generated pair of meshing rotors.
The relationship between beta and alpha is as follows:
α＝0-π/2*n
wherein n is the number of roots rotor blades.
The linear modification at the tooth top arc corresponds to the linear modification at the tooth root arc envelope line of the other rotor, and the linear modification at the tooth top arc has the following linear equation of CD:
Y＝a
X∈[-b,b]
wherein X and Y are points on the coordinate axis XOY, and a and b are constants;
the coordinate axis XOY is: the point O is taken as the rotation center point O of the Roots rotor, the symmetry axis is taken as the Y axis, the straight line perpendicular to the Y axis is taken as the X axis, and the coordinate axis XOY is established.
When the two rotors run, a gap exists between the rotors and the pump cavity, and the Roots rotor molded line and the generated other pair of Roots rotor molded lines are conjugate curves;
the linear modification EP at the tooth root arc envelope line and the linear modification PF at the tooth root arc envelope line are conjugated with the linear modification C 'D' at the tooth tip arc of the other rotor, so that the gap is uniform, and the Roots rotor has geometric symmetry.
The straight line modification EF at the tooth root arc envelope AE is equal to the straight line modification E 'F' at the tooth root arc envelope A 'E' of the other rotor.
The distance R between the small tooth top radius R and the rotation center point O of the Roots rotor and the center of the small tooth top circle b The relationship of (2) is as follows:
r＝H m -R b
wherein R is m The tooth tip radius is the Roots rotor blade number.
The invention has the following beneficial effects and advantages:
1. the invention can effectively reduce the stress concentration phenomenon at the tooth top and has higher strength;
2. the invention can also reduce the deformation problem of the tooth top caused by thermal expansion; meanwhile, the phenomenon of scratch caused by excessive dust is prevented, the dust accumulation condition is reduced, and the process applicability is stronger.
Drawings
FIG. 1 is a schematic view of a rotor profile of the present invention;
FIG. 2 is a schematic diagram of the rotor coordinates of the present invention;
FIG. 3 is a schematic view of a rotor profile with different numbers of lobes according to the present invention;
fig. 4 is a diagram showing a relationship between rotor engagement angles according to the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
FIG. 1 is a schematic view of a rotor profile according to the present invention; the end surface molded line of the Roots rotor comprises: n curves connected end to end, wherein n is the number of leaves of the Roots rotor molded line;
the first curve in the end surface molded line is formed by sequentially connecting a curve BDCA obtained by cutting out an addendum arc AB by a straight line modification EP at an addendum arc envelope line, an addendum arc envelope line AE and a straight line modification CD at an addendum arc line BG and an addendum arc envelope line GQ anticlockwise;
taking a straight line passing through the rotation center point O of the Roots rotor and the center of the tooth top arc AB as a symmetry axis of a first curve; the straight line modification GQ at the tooth root arc envelope line and the straight line modification EP at the tooth root arc envelope line are symmetrical relative to a symmetry axis; the tooth root arc envelope line BG and the tooth root arc envelope line AE are symmetrical relative to a symmetry axis;
a curve BDCA formed by cutting out the tooth top curve AB by a straight line trimming CD at the tooth top arc on the tooth top arc AB forms the tooth top curve AB; the straight line trimming CD at the tooth top arc is a connecting line of a point C and a point D on the tooth top arc AB and is perpendicular to the symmetry axis;
the nth curves in the end surface molded lines are obtained by n first curve arrays; the first curve and the n curves are connected end to form an end surface molded line of the Roots rotor; the symmetry axes for the N curves coincide or intersect at a point.
The end surface molded lines are obtained by sequentially arranging n first curves with an origin O as a rotation center and 2 pi/n as a rotation angle.
The pair of intermeshing rotor end face profiles created by the Roots rotor profile are identical and conjugate to each other.
The end surface molded line mainly comprises three types of lines, namely an addendum arc AB, a straight line trimming CD at the addendum arc, a dedendum arc AE and a straight line trimming EH at the dedendum arc envelope line, namely a first curve; when the two rotors run, a small gap exists between the rotors and the pump cavity, the pair of rotor molded lines are conjugate curves, the straight line modification at the tooth top arc corresponds to the straight line modification at the tooth root arc envelope line of the other rotor, the gap can be ensured to be uniform, the running is stable, and the geometric symmetry is good. The rotor is meshed and rotated to complete the change of the volume of the working space in the pump cavity, so that the air extraction effect is achieved. Compared with the existing Roots rotor, due to the action of the tooth top arc, and the pair of meshing rotor end surface molded lines generated by the Roots rotor molded lines are completely identical and conjugate with each other, the tooth top arc is easy to scratch, and the tooth top arc AB conforming to the straight line trimming CD at the tooth top arc is designed, namely:
the tooth top arc AB is meshed with the generated tooth root arc envelope curve A 'L' of the pair of meshing rotors, and the molded line equation of the tooth top arc AB is as follows:
X＝r*cosγ
Y＝R b +r*sinγ
wherein R is the small radius of the tooth top, R b The distance from the rotation center point O of the Roots rotor to the center of the small addendum circle is gamma, and the included angle between the connecting line of any point on the small addendum circle and the center of the addendum circle and the straight line passing through the center of the addendum circle and perpendicular to the symmetry axis is gamma.
As shown in fig. 2 or 4, which is a rotor coordinate schematic diagram and a rotor engagement angle relationship diagram of the present invention, the tooth root arc envelope AE and its symmetric curve FL are engaged with the generated tooth top arcs a 'B' of a pair of engaged rotors, wherein the curve FL is obtained by symmetric axis of the curve AE with the line connecting the rotation center O and the midpoint P as the symmetric axis, and the line equations are:
X＝2A*cosα-R b *cos2α-r*cosβ
Y＝2A*sinα-R b *sin2α+r*sinβ
wherein A is the center distance of the two rotors after engagement, and alpha is the connecting line OO of the centers of the two rotors after engagement 1 The included angle between the two rotor center lines and the horizontal line is beta, which is the connection line OO of the two rotor center lines after the two rotor center lines are meshed 1 An included angle with OM;
OM is O point O 1 O 2 Perpendicular to the extension line is crossed with O 1 O 2 Extension line at M point, O 2 Is the center of a small circle of the tooth crest of the generated pair of meshing rotors.
The relationship between beta and alpha is as follows:
α＝0-π/2*n
wherein n is the number of roots rotor blades.
Compared with a large plane area cut by straight lines at the tooth top of the Roots rotor through the straight line trimming CD at the tooth top arc, the stress concentration phenomenon at the tooth top can be effectively reduced compared with the case that the tooth top arc is taken as the Roots rotor molded line, and the Roots rotor molded line has higher strength; the deformation problem of the tooth top caused by thermal expansion can be reduced; meanwhile, the phenomenon of scratch caused by excessive dust can be prevented, the probability of dust accumulation is reduced, and easy sediment generated in the actual process is effectively discharged.
The linear modification at the tooth top arc corresponds to the linear modification at the tooth root arc envelope line of the other rotor, and the linear modification at the tooth top arc has the following linear equation of CD:
Y＝a
X∈[-b,b]
wherein X and Y are points on the coordinate axis XOY, and a and b are constants;
the coordinate axis XOY is: the point O is taken as the rotation center point O of the Roots rotor, the symmetry axis is taken as the Y axis, the straight line perpendicular to the Y axis is taken as the X axis, and the coordinate axis XOY is established.
When the two rotors run, a gap exists between the rotors and the pump cavity, and the Roots rotor molded line and the generated other pair of Roots rotor molded lines are conjugate curves;
the linear modification EP at the tooth root arc envelope line and the linear modification PF at the tooth root arc envelope line are conjugated with the linear modification C 'D' at the tooth tip arc of the other rotor, so that the gap is uniform, and the Roots rotor has geometric symmetry.
The straight line modification EF at the tooth root arc envelope AE is equal to the straight line modification E 'F' at the tooth root arc envelope A 'E' of the other rotor.
The distance R between the small tooth top radius R and the rotation center point O of the Roots rotor and the center of the small tooth top circle b The relationship of (2) is as follows:
r＝R m -R b
wherein R is m The tooth tip radius is the Roots rotor blade number.
Examples:
the invention relates to a Roots rotor with linear trimming, the structural schematic diagram of which is shown in figures 1, 2 and 3, taking a two-leaf Roots rotor molded line as an example, wherein the rotor molded line consists of a tooth top arc section AB, a linear trimming CD on the tooth top arc section AB, a tooth root arc envelope line AE and a linear trimming CE at the tooth root arc envelope line, and the rest molded lines are mirrored by the four molded lines.
The generation process is as follows:
and (3) making an addendum arc AB, wherein a molded line equation is as follows:
X＝r*cosγ
Y＝R b +r*sinγ
wherein R is the small radius of the tooth top, R b Is the distance from the origin to the center of the small circle of the tooth top.
And (3) taking a tooth root arc envelope line AE, wherein a molded line equation is as follows:
X＝2A*cosα-R b *cos2α-r*cosβ
Y＝2A*sinα-R b *sin2α+r*sinβ
wherein A is the center distance of the two rotors, and the relationship between beta and alpha is as follows:
α=0-pi/2×n, n being the number of leaves.
The straight line modification at the tooth top arc corresponds to the straight line modification at the tooth root arc envelope line of the other rotor, and the straight line modification CD equation at the tooth top arc is as follows:
Y＝a X∈[-b，b]
the relation among the parameters is as follows:
r＝R m -R b
wherein R is m Is the radius of the addendum circle.
The remaining line segments were mirrored about X, Y axis.
FIG. 3 is a schematic view of a rotor profile with different numbers of lobes according to the present invention;
the end surface molded lines are sequentially arrayed by 3, 4 and 5 by taking an origin O as a rotation center and 120 degrees and 90 degrees 72 degrees as rotation angles respectively from any first end surface molded line to obtain three-lobe Roots rotor molded lines, four-lobe Roots rotor molded lines and five-lobe Roots rotor molded lines.
While the basic principles and main features of the present invention and advantages of the present invention have been shown and described, it will be understood by those skilled in the art that the present invention is not limited by the foregoing embodiments, which are described in the foregoing specification merely illustrate the principles of the present invention, and various changes and modifications may be made therein without departing from the spirit and scope of the invention, which is defined in the appended claims and their equivalents.
Claims (10)
1. The utility model provides a roots rotor which characterized in that, roots rotor's terminal surface molded lines includes: n curves connected end to end, wherein n is the number of leaves of the Roots rotor;
the first curve in the end surface molded line is formed by sequentially connecting a curve BDCA obtained by cutting out an addendum arc AB by a straight line modification EP at an addendum arc envelope line, an addendum arc envelope line AE and a straight line modification CD at an addendum arc line BG and an addendum arc envelope line GQ anticlockwise;
a straight line passing through the rotation center point O of the Roots rotor and the center of the tooth top arc AB is taken as a symmetry axis of the curve; the straight line modification GQ at the tooth root arc envelope line and the straight line modification EP at the tooth root arc envelope line are symmetrical relative to a symmetry axis; the tooth root arc envelope line BG and the tooth root arc envelope line AE are symmetrical relative to a symmetry axis;
a curve BDCA formed by cutting out the tooth top curve AB by a straight line trimming CD at the tooth top arc on the tooth top arc AB forms the tooth top curve AB; the straight line trimming CD at the tooth top arc is a connecting line of a point C and a point D on the tooth top arc AB and is perpendicular to the symmetry axis;
the nth curves in the end surface molded lines are obtained by n first curve arrays; the first curve and the n curves are connected end to form an end surface molded line of the Roots rotor;
the symmetry axes for the n curves coincide or intersect at a point.
2. The roots rotor according to claim 1, wherein the end surface molded lines are each obtained by sequentially arranging n end surface molded lines with an origin O as a center of rotation and 2 pi/n as a rotation angle.
3. A roots rotor according to claim 1, wherein the roots rotor profile creates a pair of intermeshing rotor end face profiles that are identical and conjugate to each other.
4. The roots rotor according to claim 1, wherein the tip arc AB intermeshes with a generated tooth root arc envelope curve a 'L' of a pair of intermeshing rotors, and a profile equation for the tip arc AB is:
X＝r*cosγ
Y＝R b +r*sinγ
wherein R is the small radius of the tooth top, R b And gamma is the included angle between the connecting line of any point on the small circle of the tooth top and the circle center of the small circle of the tooth top and the straight line passing through the center of the small circle of the tooth top and being perpendicular to the symmetry axis.
5. The roots rotor according to claim 4, wherein the tooth root arc envelope AE and a symmetric curve FL thereof are engaged with the tooth tip arcs a 'B' of the pair of engaged rotors, wherein the curve FL is obtained by axisymmetric symmetry of the curve AE with a line connecting a rotation center O and a midpoint P as a symmetric axis, and the line equations are:
X＝2A*cosα-R b *cos2α-r*cosβ
Y＝2A*sinα-R b *sin2α+r*sinβ
wherein A is the center distance of the two rotors after engagement, and alpha is the connecting line OO of the centers of the two rotors after engagement 1 The included angle between the two rotor center lines and the horizontal line is beta, which is the connection line OO of the two rotor center lines after the two rotor center lines are meshed 1 An included angle with OM;
OM is O point O 1 O 2 Perpendicular to the extension line is crossed with O 1 O 2 Extension line at M point, O 2 Is the center of a small circle of the tooth crest of the generated pair of meshing rotors.
6. A roots rotor according to claim 5, wherein the relationship between β and α is as follows:
α＝0-π/2*n
wherein n is the number of roots rotor blades.
7. The roots rotor according to claim 1, wherein the linear modification at the tip arc corresponds to the linear modification at the envelope of the root arc of the other rotor, and the linear modification at the tip arc CD has the following linear equation:
Y＝a
X∈[-b,b]
wherein X and Y are points on the coordinate axis XOY, and a and b are constants;
the coordinate axis XOY is: the point O is taken as the rotation center point O of the Roots rotor, the symmetry axis is taken as the Y axis, the straight line perpendicular to the Y axis is taken as the X axis, and the coordinate axis XOY is established.
8. The roots rotor of claim 1, wherein there is a gap between the rotors and the pump chamber when the rotors are in operation, and wherein the roots rotor profile is conjugate with the other pair of roots rotor profiles;
the linear modification EP at the tooth root arc envelope line and the linear modification PF at the tooth root arc envelope line are conjugated with the linear modification C 'D' at the tooth tip arc of the other rotor, so that the gap is uniform, and the Roots rotor has geometric symmetry.
9. The roots rotor of claim 8, wherein the straight modification EF at the root arc envelope AE is equal to the straight modification E ' F at the root arc envelope a ' E ' of the other rotor.
10. A roots rotor according to claim 4 or 5, wherein the tip small circle radius R is the distance R from the center of rotation O of the roots rotor to the tip small circle center b The relationship of (2) is as follows:
r＝R m -R b
wherein R is m The tooth tip radius is the Roots rotor blade number.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210208276.3A CN114658654B (en) | 2022-03-04 | 2022-03-04 | Roots rotor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210208276.3A CN114658654B (en) | 2022-03-04 | 2022-03-04 | Roots rotor |
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| CN114658654A CN114658654A (en) | 2022-06-24 |
| CN114658654B true CN114658654B (en) | 2023-08-15 |
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| CN203548222U (en) * | 2013-10-14 | 2014-04-16 | 山东伯仲真空设备股份有限公司 | Lobe pump rotor |
| CN204827918U (en) * | 2015-07-31 | 2015-12-02 | 山东伯仲真空设备股份有限公司 | Three leaf lobe pump rotors of cycloid formula |
| CN204961287U (en) * | 2015-07-31 | 2016-01-13 | 山东伯仲真空设备股份有限公司 | Three leaf lobe pump rotors gradually burst at seams |
| CN206458603U (en) * | 2016-12-31 | 2017-09-01 | 浙江创为真空设备有限公司 | A kind of bilobal rotor assembly of Roots vaccum pump |
| CN207879602U (en) * | 2018-01-09 | 2018-09-18 | 中国石油大学(华东) | A kind of asymmetry roots rotor |
| CN108757448A (en) * | 2018-07-12 | 2018-11-06 | 中国石油大学(华东) | Three leaf sectional circular camber roots rotors of one kind and its Profile Design method |
| GB2578923A (en) * | 2018-11-14 | 2020-06-03 | Edwards Ltd | A rotor for a twin shaft pump and a twin shaft pump |
| CN211082247U (en) * | 2019-11-29 | 2020-07-24 | 宿迁学院 | Universal high-form-factor profile structure for pump rotor |
| CN111441949A (en) * | 2020-04-23 | 2020-07-24 | 夏鹏程 | Novel roots rotor molded lines for measurement |
| CN111828316A (en) * | 2020-07-30 | 2020-10-27 | 山东章晃机械工业有限公司 | Fan impeller and fan |
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