CN114652294A - Flexible pressure sensor for intracranial pressure monitoring - Google Patents

Flexible pressure sensor for intracranial pressure monitoring Download PDF

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Publication number
CN114652294A
CN114652294A CN202210250900.6A CN202210250900A CN114652294A CN 114652294 A CN114652294 A CN 114652294A CN 202210250900 A CN202210250900 A CN 202210250900A CN 114652294 A CN114652294 A CN 114652294A
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Prior art keywords
flexible
layer
pressure sensor
inner electrode
electrode
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CN202210250900.6A
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钱翔
李宇时
王晓浩
张旻
董瑛
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Shenzhen International Graduate School of Tsinghua University
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Shenzhen International Graduate School of Tsinghua University
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/03—Detecting, measuring or recording fluid pressure within the body other than blood pressure, e.g. cerebral pressure; Measuring pressure in body tissues or organs
    • A61B5/031—Intracranial pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02—Details of sensors specially adapted for in-vivo measurements
    • A61B2562/0247—Pressure sensors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Medical Informatics (AREA)
  • Biophysics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Neurosurgery (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Hematology (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring And Recording Apparatus For Diagnosis (AREA)

Abstract

A flexible pressure sensor for monitoring intracranial pressure comprises a pressure sensitive film, an upper inner electrode, a lower inner electrode, a flexible packaging layer, an upper outer electrode and a lower outer electrode, wherein the upper inner electrode and the lower inner electrode are respectively arranged at the upper side and the lower side of the pressure sensitive film; the outer surface of the flexible pressure sensor is covered with a layer of biocompatible material. The packaging structure design of the flexible pressure sensor has better biocompatibility and packaging conformality, high monitoring sensitivity of the device and high response speed.

Description

Flexible pressure sensor for intracranial pressure monitoring
Technical Field
The invention relates to a pressure sensor, in particular to a flexible pressure sensor for intracranial pressure monitoring.
Background
Most brain diseases such as intracranial hemorrhage, brain tumor, brain abscess and the like can cause intracranial blood pressure change, and the size of the intracranial pressure is an important basis for clinical diagnosis of doctors and accurate treatment proposal. The monitoring of the intracranial pressure can reflect the condition of the patient to a doctor in time. However, the intracranial pressure is a minute pressure different from the atmospheric pressure, and is not easily monitored.
There are generally four methods of monitoring intracranial pressure in actual clinics: (a) a cerebral ventricular method (b) a subdural space of dura mater, a subarachnoid space intubation method (c) a dura mater external method (d) a lumbar puncture method. Among them, ventricular measurement is the most accurate measurement method, and the highest accuracy is the earliest measurement method, and has been called the "gold standard" (gold standard) for intracranial pressure monitoring. The catheter connected with a pressure detection sensor and a drainage device is implanted into the cranium of a patient, and the aim of intracranial decompression is fulfilled by utilizing the ventricular drainage. However, most of the existing pressure monitoring devices use silicon-based sensors, are poor in biocompatibility, are generally conformal when the catheter is packaged externally, are extremely high in risk, and are prone to cause intracranial infection of a patient and damage to surrounding brain tissues. The pressure sensor for monitoring the intracranial pressure has higher requirement on processing precision and high cost, and has certain difficulty in biological packaging.
It is to be noted that the information disclosed in the above background section is only for understanding the background of the present application and thus may include information that does not constitute prior art known to a person of ordinary skill in the art.
Disclosure of Invention
The main object of the present invention is to overcome the above mentioned drawbacks of the background art, and to provide a flexible pressure sensor for intracranial pressure monitoring.
In order to achieve the purpose, the invention adopts the following technical scheme:
a flexible pressure sensor for monitoring intracranial pressure comprises a pressure sensitive film, an upper inner electrode, a lower inner electrode, a flexible packaging layer, an upper outer electrode and a lower outer electrode, the upper layer inner electrode and the lower layer inner electrode are respectively arranged at the upper side and the lower side of the pressure sensitive film, the flexible packaging layer forms a closed cavity which is used for packaging the pressure sensitive film, the upper layer inner electrode and the lower layer inner electrode, the upper layer outer electrode and the lower layer outer electrode are respectively arranged on the upper side and the lower side of the flexible packaging layer, the upper part and the lower part of the flexible packaging layer are respectively provided with a conductive hole, the upper layer inner electrode is connected with the upper layer outer electrode through the conductive hole on the upper part of the flexible packaging layer, the lower layer inner electrode is connected with the lower layer outer electrode through the conductive hole at the lower part of the flexible packaging layer; the outer surface of the flexible pressure sensor is covered with a layer of biocompatible material.
Further:
the pressure sensitive film is a mixed material of polydimethylsiloxane PDMS and multi-walled carbon nano-tube MWCNT.
The pressure sensitive film is obtained by fully mixing a dispersion liquid obtained by ultrasonically dispersing a multi-walled carbon nanotube and a dispersion liquid obtained by ultrasonically dispersing a PDMS monomer, and adding a curing agent for curing.
The flexible wrapping and packaging layer is made of FEP materials.
The layer of biocompatible material is parylene.
And a protrusion array with a pyramid-shaped microstructure is formed on the upper surface of the pressure sensitive film.
The outer surface of the pyramid-shaped microstructure is subjected to gold plating.
The outer surface of the pyramid-shaped microstructure is provided with a chromium plating layer and a gold plating layer covering the chromium plating layer.
The upper strata inner electrode, lower floor's inner electrode, upper strata outer electrode and the outer electrode of lower floor is the copper foil, the electrically conductive silver thick liquid is filled to the electrically conductive hole.
The flexible pressure sensor is integrally bent and then packaged into a ring shape.
The invention has the following beneficial effects:
the invention provides a flexible pressure sensor for intracranial pressure monitoring, which has a high biocompatibility in a packaging structure design, is conveniently arranged on the inner wall or the outer wall of a catheter, is soft and interactive with intracranial surrounding tissues, and reduces infection risks and other injuries. As a flexible pressure monitoring device, it has better biocompatibility and packaging conformability than traditional pressure sensors. In the preferred scheme, a pressure sensitive film made of polydimethylsiloxane doped multi-walled carbon nanotube nano-material and a pyramid-shaped microstructure are formed on the surface of the film, so that the monitoring sensitivity of the device can be greatly improved. In a further preferable scheme, the outer surface of the pyramid-shaped microstructure is further subjected to gold plating, so that the electrical conductivity of the device can be improved, the contact conduction between the film and the internal electrode can be enhanced, the viscoelastic property between the film and the electrode can be reduced, and the response speed of the device can be increased. The invention can monitor the intracranial pressure of a patient more efficiently, safely and accurately, is beneficial to reducing the difficulty of the production and the preparation of the intracranial pressure drainage catheter and is also convenient for the application of related implantable medical devices.
Drawings
FIG. 1 is a flow chart illustrating the preparation of a pressure sensitive membrane in one embodiment of the present invention.
FIG. 2 is a schematic view of a pressure-sensitive film with a pyramidal microstructure according to an embodiment of the present invention.
FIG. 3 is a schematic structural diagram of a pressure-sensitive film and upper and lower internal electrodes according to an embodiment of the present invention.
FIG. 4 is a cross-sectional view of a package of a flexible pressure sensor in accordance with one embodiment of the present invention.
FIG. 5 is a schematic view of a flexible pressure sensor package in the form of a ring according to one embodiment of the present invention.
FIG. 6 is a characteristic diagram of a flexible pressure sensor in a low pressure region in accordance with one embodiment of the present invention.
FIG. 7 is a graph of minimum resolution and response time of a flexible pressure sensor in accordance with one embodiment of the present invention.
Detailed Description
The embodiments of the present invention will be described in detail below. It should be emphasized that the following description is merely exemplary in nature and is not intended to limit the scope of the invention or its application.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element. In addition, the connection may be for either a fixed or coupled or communicating function.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the embodiments of the present invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be in any way limiting of the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of the present invention, "a plurality" means two or more unless specifically limited otherwise.
Referring to fig. 2 to 4, an embodiment of the present invention provides a flexible pressure sensor for monitoring intracranial pressure, including a pressure sensitive film 5, an upper inner electrode 1, a lower inner electrode 6, a flexible packaging layer 4, an upper outer electrode 2, and a lower outer electrode 7, wherein the upper inner electrode 1 and the lower inner electrode 6 are respectively disposed on the upper and lower sides of the pressure sensitive film 5, the flexible packaging layer 4 forms a sealed cavity in which the pressure sensitive film 5, the upper inner electrode 1, and the lower inner electrode 6 are packaged, the upper outer electrode 2 and the lower outer electrode 7 are respectively disposed on the upper and lower sides of the flexible packaging layer 4, conductive holes are respectively disposed on the upper portion and the lower portion of the flexible packaging layer 4, the upper inner electrode 1 is connected to the upper outer electrode 2 through the conductive hole on the upper portion of the flexible packaging layer 4, the lower layer inner electrode 6 is connected with the lower layer outer electrode 7 through a conductive hole at the lower part of the flexible packaging layer 4; the outer surface of the flexible pressure sensor is covered with a layer of biocompatible material.
In a preferred embodiment, the pressure-sensitive film 5 is a mixture of polydimethylsiloxane PDMS and multi-walled carbon nanotubes MWCNT.
As shown in the preparation process shown in fig. 1, in a preferred embodiment, the pressure-sensitive film 5 is obtained by sufficiently mixing a dispersion liquid obtained by ultrasonically dispersing a multi-walled carbon nanotube with a dispersion liquid obtained by ultrasonically dispersing a PDMS monomer, and adding a curing agent to cure.
In a preferred embodiment, the flexible wrap encapsulant layer 4 is an FEP material.
In a preferred embodiment, the layer of biocompatible material is parylene.
Referring to fig. 2 to 4, in a preferred embodiment, the pressure-sensitive membrane 5 has an array of protrusions having pyramidal microstructures 51 formed on its upper surface.
In a more preferred embodiment, the outer surface of the pyramidal microstructure 51 is gold plated.
In a more preferred embodiment, the outer surface of the pyramidal microstructure has a chromium plating layer and a gold plating layer 3 overlying the chromium plating layer.
The upper layer inner electrode 1, the lower layer inner electrode 6, the upper layer outer electrode 2 and the lower layer outer electrode 7 are copper foils, and conductive silver paste is filled in the conductive hole.
Referring to fig. 5, in one embodiment, the flexible pressure sensor is integrally bent and then packaged in a ring shape.
Compared with the traditional pressure sensor, the packaging structure design of the flexible pressure sensor for intracranial pressure monitoring provided by the embodiment of the invention has better biocompatibility and packaging conformability, is conveniently arranged on the inner wall or the outer wall of the catheter, is soft and flexible in interaction with the intracranial surrounding tissues, and reduces infection risks and other injuries. In a preferred embodiment, a pressure sensitive film made of polydimethylsiloxane-doped multi-walled carbon nanotube nanomaterial and a pyramid-shaped microstructure formed on the surface of the film can greatly improve the monitoring sensitivity of the device. In a further preferred embodiment, the outer surface of the pyramid-shaped microstructure is further subjected to gold plating, so that on one hand, the electrical conductivity of the device can be improved, the contact conduction between the film and the internal electrode can be enhanced, on the other hand, the viscoelastic property between the film and the electrode can be reduced, and the response speed of the device can be increased. The invention can monitor the intracranial pressure of a patient more efficiently, safely and accurately, is beneficial to reducing the difficulty of the production and the preparation of the intracranial pressure drainage catheter and is also convenient for the application of related implantable medical devices.
Specific embodiments of the present invention are further described below.
The basic principle of the pressure monitoring device used in the invention is piezoresistive effect, when the material monitors pressure, the device is deformed, so that the resistance of the device is changed, and the device is converted into response stress. The materials used by the device are all flexible materials, and the device has excellent bending and stretching characteristics and extremely high biocompatibility.
(1) Preparation of pressure-sensitive materials
PDMS (polydimethylsiloxane) has good biocompatibility, but is itself an insulating material. In order to make it have good and stable conductivity, multi-walled carbon nanotube conductive nanomaterial is added to PDMS. And (2) carrying out ultrasonic treatment by using a cell crusher to obtain a dispersion liquid of the multi-walled carbon nano tube, fully mixing the dispersion liquid with a PDMS monomer dispersion liquid prepared by ultrasonic treatment, and adding a curing agent to form a conductive mixture, thereby finally obtaining the pressure sensitive material with conductivity. The process for preparing the pressure sensitive material is generally as shown in figure 1.
(2) Preparation of pressure sensitive film and microstructure thereof
In order to improve the sensitivity and the monitoring range of the sensitive material, the pressure sensitive material is used for preparing the pressure sensitive film with the pyramid microstructure. When pressure acts on the pressure sensitive film, the deformation generated by the pyramid-shaped microstructure is the largest, the change of the measured resistance value is the most obvious, and the sensitivity of the sensor is improved.
During preparation, firstly, a pyramid microstructure with the side length of 50 micrometers is etched on a silicon wafer by using a wet etching technology, the conductive mixture obtained in the step (1) is poured on the silicon wafer with the microstructure, a conductive pressure sensitive film 5 with the thickness of 0.5mm is prepared by using a spin coater, and the surface of the conductive pressure sensitive film is provided with the pyramid microstructure 51, as shown in fig. 2.
As shown in fig. 3, the pressure-sensitive film 5 and the upper and lower inner electrodes 1 and 6 form a sandwich structure, the inner electrode is, for example, a copper foil with a thickness of 25 μm, and the middle layer is the pressure-sensitive film 5. When pressure is applied, the sandwich structure can be bent, the resistance of the pressure sensitive film 5 in the middle layer is greatly changed under the action of pressure, and the pressure value can be obtained through corresponding electrical signal measurement.
(3) Microstructure surface treatment
Gold plating is performed on the outer surface of the pyramidal microstructure 51. Electron beam evaporation may be used. On one hand, the gold plating treatment can improve the conductivity of the device and strengthen the contact conduction between the thin film and the electrode; on the other hand, the viscoelastic property between the film and the inner electrode can be reduced, and the response speed of the device is accelerated. Preferably, 10nm of chromium metal is plated first, and then 50nm of gold metal is plated, so that better attachment characteristics can be obtained.
(4) Device package
The outer surface of the device is wrapped and packaged by adopting an FEP material to form a flexible wrapping and packaging layer 4, so that the device can stably work in a liquid environment and has good biocompatibility. The FEP flexible wrapping and packaging layer 4 also has good flexibility, and the Young modulus is smaller than that of human muscles, so that muscle tissues cannot be scratched. The sandwich structure is arranged between flexible packaging layers 4 made of FEP materials, circular through holes are dug out on the flexible packaging layers 4 and filled with conductive silver paste 2, inner electrodes 1 and 6 of the sensor are led out to the outer side and connected with outer electrodes 2 and 7 (such as micron-sized conductive copper adhesive tapes) arranged on the outer side of the flexible packaging layers 4. The pressure sensitive film 5 and the inner electrodes 1, 6 can be sealed by bonding the FEP material on both sides together to form a closed cavity using a hot press. A cross-sectional view of the package is shown in fig. 4.
A layer of parylene is deposited on the outer surface of the pressure sensor which is integrally packaged by FEP materials, so that the whole device has good biocompatibility and can be implanted into the cranium for pressure measurement. The parylene is a polymer with excellent performance, has strong electrical insulation, chemical inertness, permeation resistance and hydrolysis resistance, has good biocompatibility, and is an ideal biocompatible packaging material.
All the materials used are flexible, so that the integrally packaged pressure sensor can be bent at a large angle. In one embodiment, the pressure sensor is packaged in a ring shape, as shown in FIG. 5, with a length of only 7mm, and can be placed on the inner or outer wall of the medical rubber catheter as desired.
Actual index testing
And (3) linearity test:
fig. 6 shows the characteristics of the flexible pressure sensor of the embodiment in a low pressure region. In clinical indexes, the <2.00KPa is in a normal physiological range, the KPa is 2.00 KPa-2.70 KPa and belongs to slight intracranial pressure increase, the KPa is 2.70 KPa-5.50 KPa and belongs to moderate intracranial pressure increase, when the intracranial pressure change exceeds 5.50KPa, the intracranial pressure increase belongs to moderate intracranial pressure increase, and emergency treatment of a clinician is needed. When the device of the present invention is tested according to the standard, it can be seen from fig. five that the device has good linear monitoring characteristics within 0-10 KPa, and meets the use requirements as an intracranial pressure monitoring device.
Response characteristics and pressure resolution:
fig. 7 illustrates the minimum resolution and response time of a flexible pressure sensor of an embodiment. The response characteristic of a weight removal experiment detection device is utilized, a button cell with the weight of 2.03g (the diameter of the bottom surface is 11.52mm) is placed, the flexible pressure sensor can obviously sense the pressure, the calculated pressure value is about 195Pa, and the standard for judging the intracranial pressure rise in the existing clinical medical detection on the opposite side can meet the monitoring standard. Meanwhile, the pressure response time of the flexible pressure sensor is checked, the LCR bridge is used for testing in an MED (90 ms sampling time) mode, the response time of the sensor is less than 200ms, and the medical measurement condition can be completely met.
Compared with the traditional silicon-based pressure sensor, the flexible pressure sensor for intracranial pressure measurement has better biological interaction characteristic and is safer when being applied to an intracranial (implanted) pressure monitoring instrument. The packaging structure design of the flexible sensor solves the application problem of the implanted flexible device, and the conformal design can be carried out according to different appearance requirements of the device. The packaging is convenient, simple and easy, and is easy to process in batch, thereby having wide prospect in the application field of micro devices and great advantages in the field of medical appliances. The application scheme of the flexible device provided by the invention can greatly improve the utilization rate of the miniature flexible device, is convenient to realize integration, and can be applied to various implanted medical instruments.
The background of the present invention may contain background information related to the problem or environment of the present invention and does not necessarily describe the prior art. Accordingly, the inclusion in the background section is not an admission of prior art by the applicant.
The foregoing is a more detailed description of the invention in connection with specific/preferred embodiments and is not intended to limit the practice of the invention to those descriptions. It will be apparent to those skilled in the art that various substitutions and modifications can be made to the described embodiments without departing from the spirit of the invention, and these substitutions and modifications should be considered to fall within the scope of the invention. In the description of the present specification, reference to the description of "one embodiment," "some embodiments," "preferred embodiments," "example," "specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Various embodiments or examples and features of various embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction. Although embodiments of the present invention and their advantages have been described in detail, it should be understood that various changes, substitutions and alterations can be made herein without departing from the scope of the claims.

Claims (10)

1. A flexible pressure sensor for monitoring intracranial pressure is characterized by comprising a pressure sensitive film, an upper inner electrode, a lower inner electrode, a flexible packaging layer, an upper outer electrode and a lower outer electrode, the upper layer inner electrode and the lower layer inner electrode are respectively arranged at the upper side and the lower side of the pressure sensitive film, the flexible packaging layer forms a closed cavity which is used for packaging the pressure sensitive film, the upper layer inner electrode and the lower layer inner electrode, the upper layer external electrode and the lower layer external electrode are respectively arranged at the upper side and the lower side of the flexible packaging layer, the upper part and the lower part of the flexible packaging layer are respectively provided with a conductive hole, the upper layer inner electrode is connected with the upper layer outer electrode through the conductive hole on the upper part of the flexible packaging layer, the lower layer inner electrode is connected with the lower layer outer electrode through the conductive hole at the lower part of the flexible packaging layer; the outer surface of the flexible pressure sensor is covered with a layer of biocompatible material.
2. The flexible pressure sensor of claim 1, wherein the pressure sensitive film is a polydimethylsiloxane PDMS and multi-walled carbon nanotube MWCNT hybrid material.
3. The flexible pressure sensor of claim 2, wherein the pressure sensitive film is obtained by mixing a dispersion obtained by ultrasonic dispersion of multi-walled carbon nanotubes with a dispersion obtained by ultrasonic dispersion of PDMS monomers, and adding a curing agent for curing.
4. The flexible pressure sensor of any of claims 1 to 3, wherein the flexible encapsulating layer is a FEP material.
5. The flexible pressure sensor of any of claims 1 to 4, wherein the layer of biocompatible material is parylene.
6. The flexible pressure sensor of any of claims 1 to 5, wherein the pressure sensitive membrane has an upper surface formed with an array of protrusions having a pyramidal microstructure.
7. The flexible pressure sensor of claim 6 wherein the outer surface of the pyramidal microstructure is gold plated.
8. The flexible pressure sensor of claim 7, wherein the outer surface of the pyramidal microstructure has a chromium plating and a gold plating overlying the chromium plating.
9. The flexible pressure sensor according to any one of claims 1 to 8, wherein the upper inner electrode, the lower inner electrode, the upper outer electrode, and the lower outer electrode are copper foils, and the conductive hole is filled with a conductive silver paste.
10. The flexible pressure sensor according to any one of claims 1 to 9, wherein the flexible pressure sensor is integrally packaged in a ring shape after being bent.
CN202210250900.6A 2022-03-15 2022-03-15 Flexible pressure sensor for intracranial pressure monitoring Pending CN114652294A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210250900.6A CN114652294A (en) 2022-03-15 2022-03-15 Flexible pressure sensor for intracranial pressure monitoring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210250900.6A CN114652294A (en) 2022-03-15 2022-03-15 Flexible pressure sensor for intracranial pressure monitoring

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CN114652294A true CN114652294A (en) 2022-06-24

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