CN114649188A - Corrosion-resistant gas spray header and manufacturing method thereof - Google Patents
Corrosion-resistant gas spray header and manufacturing method thereof Download PDFInfo
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- CN114649188A CN114649188A CN202210119168.9A CN202210119168A CN114649188A CN 114649188 A CN114649188 A CN 114649188A CN 202210119168 A CN202210119168 A CN 202210119168A CN 114649188 A CN114649188 A CN 114649188A
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- protective layer
- layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
- H01J37/32495—Means for protecting the vessel against plasma
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
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- Plasma & Fusion (AREA)
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Abstract
The invention provides a corrosion-resistant gas spray header and a manufacturing method thereof, wherein the corrosion-resistant gas spray header comprises: the spray header body comprises an air inlet surface and an air outlet surface which is arranged opposite to the air inlet surface; a plurality of air holes which penetrate through the air inlet surface and the air outlet surface; the gas outlet face is sequentially provided with a protective layer and a barrier layer from inside to outside, the protective layer is used for protecting the spray header body from being corroded, and the barrier layer is used for blocking the protective layer from reacting with plasma. According to the gas spray header, the gas outlet surface of the spray header body is covered with the protective layer with strong corrosion resistance, and meanwhile, the protective layer is covered with the barrier layer, so that the spray header body can be protected from being corroded, the corrosion resistance is improved, and the gas spray header has better stability.
Description
Technical Field
The invention relates to the technical field of plasma processing parts, in particular to a corrosion-resistant gas spray header and a manufacturing method thereof.
Background
One of the cores of the integrated circuit industry is chip fabrication, which is at the heart of wafer processing. The gas spray header is a key part widely used for a film and an etching part in a wafer processing procedure, and various process gases required in the wafer processing procedure are uniformly sprayed into a reaction chamber through the spray header to participate in plasma generation and reaction.
At present, gas spray headers made of metal materials such as aluminum or aluminum alloy are common, but aluminum is easily corroded in a plasma environment, and after a certain number of wafers are produced by the spray headers, the gas holes are corroded to become large and deform, so that the spray headers cannot be used continuously, and the service life of the spray headers is shortened.
Disclosure of Invention
In order to overcome the defects in the prior art, the main object of the present invention is to provide a corrosion-resistant gas shower head and a method for manufacturing the same, wherein the gas outlet surface of the shower head body is covered with a protective layer with strong corrosion resistance, and the protective layer is covered with a barrier layer, so that the shower head body can be protected from corrosion, the corrosion resistance is improved, and the shower head has better stability.
To achieve the above object, according to a first aspect of the present invention, there is provided a corrosion-resistant gas shower head.
The corrosion-resistant gas shower head includes:
the spray header body comprises an air inlet surface and an air outlet surface which is arranged opposite to the air inlet surface;
a plurality of air holes which penetrate through the air inlet surface and the air outlet surface;
the gas outlet face is sequentially provided with a protective layer and a barrier layer from inside to outside, the protective layer is used for protecting the spray header body from being corroded, and the barrier layer is used for blocking the protective layer from reacting with plasma.
Further, the protective layer is an yttrium oxide layer covering the gas outlet surface.
Furthermore, the thickness of the protective layer is 0.19-0.22 mm.
Furthermore, the thickness of the protective layer is 0.02-0.15 mm.
Further, the barrier layer is a yttrium fluoride layer covering the protective layer.
Furthermore, the thickness of the barrier layer is 2-10 μm.
In order to achieve the above object, according to a second aspect of the present invention, there is provided a method of manufacturing a corrosion-resistant gas shower head.
The manufacturing method of the corrosion-resistant gas spray header comprises the following steps:
depositing a protective layer on at least part of the gas outlet surface of the shower head body exposed to the plasma environment;
and forming a barrier layer on the surface of the protective layer.
Further, the protective layer is subjected to fluorination treatment, and a layer of dense and uniform yttrium fluoride is formed on the surface of the protective layer to form the barrier layer.
Further, the technological parameters of the fluorination treatment are as follows: the radio frequency power of the fluorine-containing plasma is less than or equal to 1000W, and the air pressure of the reaction chamber is more than or equal to 100 mtorr.
Further, the protective layer is formed by depositing a layer of yttrium oxide on the gas outlet surface by adopting a sol-gel deposition, plasma deposition or thermal spraying deposition process.
In the invention, firstly, the gas outlet surface of the spray header body is covered with a protective layer with stronger corrosion resistance, so that the corrosion resistance of the spray header body can be improved; furthermore, a barrier layer is covered on the protective layer, so that particle pollution caused by reaction of partial atoms in the protective layer and plasma can be effectively avoided. In addition, the barrier layer is not easy to be corroded by fluorine-containing plasma, so that the shower head body has better stability.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
FIG. 1 is a schematic diagram of a gas shower head used in a wafer processing process in the prior art;
FIG. 2 is a schematic structural diagram of a showerhead body in the prior art;
FIG. 3 is a schematic longitudinal cross-sectional view of a showerhead body according to an embodiment of the present invention;
FIG. 4 is an enlarged view of a portion of FIG. 3;
fig. 5 is a flow chart of a process for fabricating a corrosion-resistant showerhead in accordance with an embodiment of the present invention.
In the figure:
1. a showerhead body; 2. air holes; 3. a protective layer; 4. a barrier layer; 5. a locking plate;
6. an upper cover; 7. a gas channel; 8. a vacuum pump; 9. and (3) a silicon wafer.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
Fig. 1 and 2 respectively show a schematic structural diagram of a gas shower head in the prior art and an application diagram thereof in a wafer processing process.
According to an embodiment of the present invention, a corrosion resistant gas showerhead is provided.
As shown in fig. 3 to 4, the corrosion-resistant gas shower head comprises a shower head body 1, wherein the shower head body 1 comprises an air inlet surface and an air outlet surface arranged opposite to the air inlet surface; the corrosion-resistant gas spray header also comprises a plurality of gas holes 2, and the gas holes 2 are arranged through the gas inlet surface and the gas outlet surface. Wherein, the gas outlet surface is sequentially provided with a protective layer 3 and a barrier layer 4 from inside to outside for improving the corrosion resistance of the spray header body 1.
In the above embodiment, firstly, the gas outlet surface of the shower head body 1 is covered with the protective layer 3 with strong corrosion resistance, so that the shower head body 1 can be protected from being corroded, and the corrosion resistance of the shower head body 1 is improved; furthermore, a barrier layer 4 is further covered on the protective layer 3, which can effectively prevent particle contamination caused by reaction of partial atoms (such as yttrium atoms) in the protective layer 3 with plasma. Moreover, the barrier layer 4 is not easy to be corroded by the fluorine-containing plasma, so that the shower head body 1 has better stability.
As shown in fig. 4, the protective layer 3 is a layer of yttria material, i.e., yttria layer, covering the gas exit surface.
The yttrium oxide is used as the material of the protective layer 3 because yttrium oxide has good corrosion resistance and stability, and thus exhibits high corrosion resistance with stability even when exposed to a fluorine-containing gas or plasma.
In one embodiment of the present invention, the thickness of the protective layer 3 is in the range of 0.19 to 0.22 mm.
In another embodiment of the present invention, the thickness of the protective layer 3 is in the range of 0.02 to 0.15 mm.
To avoid flaking or unstable properties, the thickness of the protective layer 3 is generally determined by the manufacturing process and the application environment, i.e. the thickness of the protective layer 3 can be selectively controlled according to the specific deposition process. For example, the protective layer 3 can be formed by a sol-gel deposition process, a plasma deposition process or a thermal spraying deposition process, when the protective layer 3 is formed by the sol-gel deposition and the thermal spraying deposition, the thickness of the protective layer is generally within the range of 0.19-0.22 mm, and when the plasma enhanced physical vapor deposition process is adopted, the thickness of the protective layer is within the range of 0.02-0.15 mm.
It should be noted that the gelgel deposition process, the plasma deposition process, and the thermal spray deposition process are all conventional deposition processes in the prior art, and specific deposition parameters may be selectively set according to the thickness of the required protective layer 3 without specific requirements.
As shown in fig. 4, the barrier layer 4 is a layer of yttrium fluoride material, i.e. a layer of yttrium fluoride, overlying the protective layer 3.
In practical applications, yttrium atoms in yttrium oxide inevitably react with corrosive gas such as fluorine-containing gas or plasma to generate yttrium fluoride, and because the plasma density generated in the reaction chamber of the plasma processing apparatus has uneven characteristic distribution, at a place where the plasma density is high, yttrium atoms in the protective layer 3 react with fluorine-containing plasma to generate more yttrium fluoride; accordingly, at a low plasma density, the amount of the yttrium fluoride formed on the surface of the protective layer 3 is small, so that the growth rate of the yttrium fluoride on the surface of the protective layer 3 inevitably shows non-uniformity, and as the thickness of the yttrium fluoride is increased, the yttrium fluoride may peel off from the surface of the protective layer 3 under pressure in a region where the growth is fast.
Therefore, in the invention, the protective layer 3 is fluorinated to form a dense and uniform layer of yttrium fluoride on the surface of the yttrium oxide coating layer to form the barrier layer 4. Moreover, the thickness of the yttrium fluoride layer is within the range of 2-10 μm, so that particle pollution caused by reaction of yttrium atoms in yttrium oxide and plasma can be effectively avoided. In addition, the barrier layer 4 has high corrosion resistance to corrosive gas or plasma such as fluorine-containing gas, is not easy to corrode by fluorine-containing plasma, has better stability, and can protect the shower head body from being corroded.
According to the specific implementation mode of the invention, the invention also provides a manufacturing method of the corrosion-resistant gas spray header.
As shown in fig. 5, the method for manufacturing the corrosion-resistant gas shower head comprises the following steps:
the showerhead body 1 is obtained.
And depositing a protective layer 3 on at least part of the gas outlet surface of the shower head body 1 exposed to the plasma environment.
The material of the protective layer 3 may be yttria, and yttria has good corrosion resistance and stability, so that yttria can show stable and high corrosion resistance even if exposed to fluorine-containing gas or plasma environment thereof.
In the present invention, in order to avoid peeling or unstable performance, the thickness of the yttria coating layer generally depends on the preparation process and application environment, wherein the yttria material can be deposited on the gas outlet surface of the shower head body 1 by using sol-gel deposition, plasma deposition or thermal spray deposition process to form the protective layer 3.
A barrier layer 4 is formed on the surface of the protective layer 3. In order to avoid particle contamination caused by reaction between yttrium atoms in yttrium oxide and plasma, the protective layer 3 is fluorinated to form a dense and uniform layer of yttrium fluoride on the surface of the protective layer 3 to form the barrier layer 4.
In the invention, the technological parameters of the fluorination treatment are as follows: the radio frequency power of the fluorine-containing plasma is less than or equal to 1000W, and the air pressure of the reaction chamber is more than or equal to 100 mtorr.
While the invention has been described with reference to specific preferred embodiments, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the following claims. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.
Claims (10)
1. A corrosion resistant gas showerhead, comprising:
the spray header body comprises an air inlet surface and an air outlet surface which is arranged opposite to the air inlet surface;
a plurality of air holes which penetrate through the air inlet surface and the air outlet surface;
the gas outlet face is sequentially provided with a protective layer and a barrier layer from inside to outside, the protective layer is used for protecting the spray header body from being corroded, and the barrier layer is used for blocking the protective layer from reacting with plasma.
2. The corrosion resistant gas showerhead of claim 1, wherein the protective layer is a yttria layer overlying the gas exit face.
3. The corrosion-resistant showerhead of claim 1 or 2, wherein the protective layer has a thickness of 0.19 to 0.22 mm.
4. The corrosion-resistant gas showerhead of claim 1 or 2, wherein the protective layer has a thickness of 0.02 to 0.15 mm.
5. The corrosion resistant gas showerhead of claim 1, wherein the barrier layer is a yttrium fluoride layer overlying the protective layer.
6. The corrosion-resistant showerhead of claim 1 or 5, wherein the barrier layer has a thickness of 2 to 10 μm.
7. The method of making a corrosion resistant gas showerhead according to any of claims 1-6, comprising the steps of:
depositing a protective layer on at least part of the gas outlet surface of the shower head body exposed to the plasma environment;
and forming a barrier layer on the surface of the protective layer.
8. The method of claim 7, wherein the protective layer is fluorinated to form a dense uniform layer of yttrium fluoride on the surface of the protective layer to form the barrier layer.
9. The method of claim 8, wherein the fluorination process comprises the following process parameters: the radio frequency power of the fluorine-containing plasma is less than or equal to 1000W, and the air pressure of the reaction chamber is more than or equal to 100 mtorr.
10. The method of claim 8, wherein the protective layer is formed by depositing a layer of yttria on the gas exit surface using sol-gel deposition, plasma deposition, or thermal spray deposition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210119168.9A CN114649188A (en) | 2022-02-08 | 2022-02-08 | Corrosion-resistant gas spray header and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210119168.9A CN114649188A (en) | 2022-02-08 | 2022-02-08 | Corrosion-resistant gas spray header and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114649188A true CN114649188A (en) | 2022-06-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210119168.9A Pending CN114649188A (en) | 2022-02-08 | 2022-02-08 | Corrosion-resistant gas spray header and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114649188A (en) |
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2022
- 2022-02-08 CN CN202210119168.9A patent/CN114649188A/en active Pending
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