CN114646453B - Vertical spherical interference splicing measuring device and adjusting method thereof - Google Patents

Vertical spherical interference splicing measuring device and adjusting method thereof Download PDF

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Publication number
CN114646453B
CN114646453B CN202210559409.1A CN202210559409A CN114646453B CN 114646453 B CN114646453 B CN 114646453B CN 202210559409 A CN202210559409 A CN 202210559409A CN 114646453 B CN114646453 B CN 114646453B
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guide rail
plate
axis guide
axis
measuring device
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CN114646453A (en
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刘有亮
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Jiangsu Haona Photoelectric Co ltd
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Jiangsu Haona Photoelectric Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005Testing of reflective surfaces, e.g. mirrors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0207Details of measuring devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0207Details of measuring devices
    • G01M11/0214Details of devices holding the object to be tested
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/04Optical benches therefor

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

The invention belongs to the technical field of interference measurement equipment, and particularly relates to a vertical spherical interference splicing measurement device and an adjustment method thereof, wherein the vertical spherical interference splicing measurement device comprises a support frame, an interferometer is arranged on the front side of the support frame, a computer is arranged at the top of the interferometer, a spherical wave conversion mirror is arranged at the bottom of the interferometer, a three-axis adjustment mechanism is arranged on the front side of the support frame, and a self-unloading workbench is arranged on the three-axis adjustment mechanism; according to the invention, all the lenses can be placed at one time through the self-unloading workbench, and the lenses are deflected after the measurement of the lenses at the top is completed, so that the lenses at the bottom are exposed, the measurement is convenient and rapid, and the measurement efficiency is improved.

Description

Vertical spherical interference splicing measuring device and adjusting method thereof
Technical Field
The invention belongs to the technical field of interference measurement equipment, and particularly relates to a vertical spherical interference splicing measurement device and an adjustment method thereof.
Background
With the increasing development of science and technology and industry, the precision requirement of modern industry for optical elements is higher and higher, and especially the precision requirement of large numerical aperture spherical optical elements is higher in recent years. The method comprises the steps of measuring the large-numerical-aperture spherical optical element, dividing the lens into a plurality of areas by adopting a splicing measuring device, measuring each area, and splicing data together to finish the measurement of the lens.
When carrying out the measurement of lens, a lens is placed at every turn to current concatenation measuring device, detects the completion back, need close the interferometer to avoid when the lens of taking, on the lens reflects personnel's eyes with light, take off the lens afterwards, place the other lens of examining, it is inefficient.
Therefore, it is necessary to provide a vertical spherical interference splicing measuring device and an adjusting method thereof to solve the above problems.
Disclosure of Invention
In view of the above problems, the present invention provides a vertical spherical interference splicing measurement device and an adjustment method thereof, so as to solve the problems proposed in the background art.
In order to achieve the purpose, the invention provides the following technical scheme: vertical spherical interference concatenation measuring device, including the support frame, the interferometer is installed to the support frame front side, the interferometer top is provided with the computer, and the interferometer bottom is provided with the spherical wave conversion mirror, and the support frame front side is provided with three-axis guiding mechanism, the last self-discharging workstation that is provided with of three-axis guiding mechanism.
Preferably, the self-discharging workbench comprises a lifting plate, wherein one side of the lifting plate is provided with a limiting strip, the limiting strip is slidably clamped on a three-axis adjusting mechanism, a lead screw lifting mechanism for driving the limiting strip to move vertically is arranged in the three-axis adjusting mechanism, the other side of the lifting plate is provided with a plurality of laying plates, one side of the front end of each laying plate is rotatably connected onto the lifting plate, the bottom of the rear side of each laying plate is provided with a supporting plate, the supporting plate is fixedly arranged on the lifting plate, the front side of each laying plate is provided with an arc-shaped rack, the front side of each arc-shaped rack is provided with a straight rack, and the straight racks are fixedly connected onto the three-axis adjusting mechanism.
Preferably, the three-axis adjusting mechanism comprises an X-axis guide rail, a Y-axis guide rail and a Z-axis guide rail, the X-axis guide rail is installed on the support frame, the Y-axis guide rail is installed on the front side of the X-axis guide rail, the X-axis guide rail drives the Y-axis guide rail to move left and right, the Z-axis guide rail is installed on one side of the Y axis, the Y-axis guide rail drives the Z-axis guide rail to move back and forth, the self-discharging workbench is installed on the Y-axis guide rail, and a deflection cylinder for driving the Z-axis guide rail to deflect is installed at the top of the Y-axis guide rail.
Preferably, lay the board surface and be provided with the recess, the recess runs through lays the board, and recess inside is provided with the silica gel pad.
Preferably, the four corners of the top of each placing plate are provided with through holes, the diameters of the through holes are gradually reduced towards the bottom, and the bottom ends of the through holes in the placing plate at the top face the center of the placing plate adjacent to the bottom.
Preferably, lay board front end one side and be provided with and supply pivoted axis of rotation, axis of rotation one end has cup jointed the joint piece, and the joint piece is 1/4 cylinders, lays the board surface and is provided with and supplies joint piece pivoted spacing groove, and the spacing groove is the 3/4 cylinder, lays the board rear side and has spliced the cardboard, lays the board vertical state when, the cardboard can the downstream, carries out the closing cap to laying the board.
Preferably, the bottom of the clamping plate is embedded with the buffer plate, the top of the buffer plate is provided with the spring, the bottom end of the spring is connected with the tensioning rope, one end of the tensioning rope is connected with the gravity ball, the center of the clamping plate is provided with the vertical cavity, the gravity ball is located in the vertical cavity, and the gravity ball pulls the tensioning rope to enable the spring to be in a compression state.
Preferably, the bottom of the support frame is provided with a bearing plate with an arc-shaped lower concave surface at the top, and the top of the bearing plate is provided with a plurality of protective strips made of rubber materials.
Preferably, the invention also provides an adjusting method, which uses the vertical spherical interference splicing measuring device, and the method comprises the following steps,
the method comprises the following steps: placing all the lenses to be measured on different placing plates respectively, adjusting the self-unloading workbench through a three-axis adjusting mechanism, measuring the lenses through an interferometer and a spherical wave conversion mirror, and transmitting all measurement data to a computer;
step two: the screw rod lifting mechanism drives the limiting strips to ascend, the limiting strips move the lifting plate to ascend, and when the lifting plate drives all the placing plates to ascend, the arc-shaped racks are meshed with the straight racks to rotate so as to drive the placing plate at the top to deflect;
step three: and after the placing plate at the bottom reaches the straight rack, stopping the work of the screw rod lifting mechanism, and completing the position adjustment of the next lens on the placing plate.
The invention has the technical effects and advantages that:
1. according to the invention, all the lenses can be placed at one time through the self-unloading workbench, and the lenses are deflected after the measurement of the lenses at the top is completed, so that the lenses at the bottom are exposed, the measurement is convenient and rapid, and the measurement efficiency is improved;
2. according to the invention, the clamping block and the limiting groove are arranged, when the lifting plate is lifted, the placing plate can rotate freely under the action of the straight rack and the arc rack, the clamping block is/cylindrical, the limiting groove is/cylindrical, namely the clamping block can rotate for half a circle, so that the placing plate can also rotate for half a circle, the turnover of the placing plate is realized, then the straight rack is separated from the arc rack, the placing plate is kept in a turned-over state, and when the placing plate rotates to a vertical state, the clamping plate moves downwards at the moment to seal the groove, so that a blocking effect is realized on a lens in the groove, and the lens is prevented from falling from the groove;
3. according to the lens fixing device, the clamping plate is changed into a vertical state along with the rotation of the placing plate, the clamping plate enters the groove to seal the groove, and finally after the placing plate rotates for half a circle and turns over, the gravity ball moves to the other end of the vertical cavity, the tensioning rope is in a loose state, the spring is restored, the spring pushes the buffer plate to ascend, and when a lens falls on the buffer plate, the buffer plate can play a role in buffering the lens, so that the thinner lens cannot be damaged.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic perspective view of a vertical spherical interference splicing measuring device according to the present invention;
FIG. 2 is an enlarged view of portion A of FIG. 1 according to the present invention;
FIG. 3 is a schematic view of one of the angles of FIG. 1 in accordance with the present invention;
FIG. 4 is an enlarged view of portion B of FIG. 3 according to the present invention;
FIG. 5 is a schematic view of a mounting plate according to the present invention;
FIG. 6 is a schematic view of the position of the limiting groove and the locking block on the lifting plate according to the present invention;
FIG. 7 is a cross-sectional view of a card of the present invention;
fig. 8 is a flow chart of the adjustment method in the present invention.
In the figure: the device comprises a support frame 1, an interferometer 2, a computer 3, a spherical wave conversion mirror 4, a three-axis adjusting mechanism 5, an X-axis guide rail 51, a Y-axis guide rail 52, a Z-axis guide rail 53, a deflection cylinder 54, a self-unloading workbench 6, a lifting plate 61, a limiting strip 62, a placing plate 63, a support plate 64, an arc-shaped rack 65, a straight rack 66, a through hole 7, a rotating shaft 8, a clamping block 9, a limiting groove 10, a clamping plate 11, a buffer plate 12, a spring 13, a tensioning rope 14, a gravity ball 15, a bearing plate 16 and a protection strip 17.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments of the present invention without any creative effort belong to the protection scope of the present invention;
in the description of the present invention, it is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention. Further, in the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
The invention provides a vertical spherical interference splicing measuring device shown in figures 1-7, which comprises a support frame 1, wherein an interferometer 2 is arranged on the front side of the support frame 1, a computer 3 is arranged on the top of the interferometer 2, a spherical wave conversion mirror 4 is arranged at the bottom of the interferometer 2, a three-axis adjusting mechanism 5 is arranged on the front side of the support frame 1, and a self-unloading workbench 6 is arranged on the three-axis adjusting mechanism 5.
All lenses to be measured are laid on a self-discharging workbench 6, the self-discharging workbench 6 is adjusted through a three-axis adjusting mechanism 5, the lenses are measured through an interferometer 2 and a spherical wave conversion mirror 4 at last, the positions of the lenses are moved, the rest positions of the lenses can be measured, the lenses are measured until all the positions are measured, the interferometer 2 transmits all the measurement data to a computer 3, the data are analyzed, the measurement data after final splicing are displayed, the self-discharging workbench 6 can not only place all the lenses at one time, and meanwhile, after the lens measurement at the top is completed, the lenses are deflected, the lenses at the bottom are exposed, the rapid measurement is convenient to be carried out, and the measurement efficiency is improved.
Referring to the attached drawings 1-6 of the specification, the self-discharging workbench 6 comprises a lifting plate 61, a limiting strip 62 is arranged on one side of the lifting plate 61, the limiting strip 62 is slidably clamped on a three-axis adjusting mechanism 5, a lead screw lifting mechanism for driving the limiting strip 62 to vertically move is arranged inside the three-axis adjusting mechanism 5, a plurality of laying plates 63 are arranged on the other side of the lifting plate 61, one side of the front end of each laying plate 63 is rotatably connected onto the lifting plate 61, a supporting plate 64 is arranged at the bottom of the rear side of each laying plate 63, the supporting plate 64 is fixedly arranged on the lifting plate 61, an arc-shaped rack 65 is arranged on the front side of each laying plate 63, a straight rack 66 is arranged on the front side of each arc-shaped rack 65, and the straight rack 66 is fixedly connected onto the three-axis adjusting mechanism 5.
The working process of the self-discharging workbench 6 is as follows: put all the lens that need measure respectively on the board 63 is laid to the difference, treat that the lens on the board 63 is laid of topmost is measured and accomplish the back, it rises to drive spacing strip 62 through lead screw elevating system, spacing strip 62 drives lifting plate 61 and rises, lifting plate 61 drives all when laying board 63 and rising, the board 63 of laying of topmost aligns spur rack 66, arc rack 65 meshes the rotation on spur rack 66, finally drive the board 63 of laying of topmost and deflect, until laying of bottom board 63 reach spur rack 66 department after, stop lead screw elevating system work, can realize continuous work.
Referring to the attached drawings 1 and 3 of the specification, the three-axis adjusting mechanism 5 comprises an X-axis guide rail 51, a Y-axis guide rail 52 and a Z-axis guide rail 53, the X-axis guide rail 51 is mounted on the support frame 1, the Y-axis guide rail 52 is mounted on the front side of the X-axis guide rail 51, the X-axis guide rail 51 drives the Y-axis guide rail 52 to move left and right, the Z-axis guide rail 53 is mounted on one side of the Y-axis, the Y-axis guide rail 52 drives the Z-axis guide rail 53 to move front and back, the dump table 6 is mounted on the Y-axis guide rail 52, and a deflection cylinder 54 for driving the Z-axis guide rail 53 to deflect is mounted on the top of the Y-axis guide rail 52.
The X-axis guide rail 51, the Y-axis guide rail 52 and the Z-axis guide rail 53 drive the lens to realize three-dimensional movement, one surface of the lens is dispersed into a plurality of areas to be measured independently, and finally, data is spliced together, and in the whole measuring process, the deflection air cylinder 54 drives the Z-axis guide rail 53 to deflect the lens on the Z-axis guide rail 53, so that each area of the lens is opposite to the interferometer 2 during measurement.
Referring to the attached figure 2 of the specification, a groove is formed in the surface of the placing plate 63, penetrates through the placing plate 63, and is internally provided with a silica gel pad.
The lens is directly placed in the groove, and meanwhile, the silica gel pad plays a role in buffering the lens, so that the impact of the lens is reduced.
Referring to the attached drawings 2 and 4 of the specification, through holes 7 are formed in four corners of the top of each mounting plate 63, the diameter of each through hole 7 gradually decreases towards the bottom, and the bottom end of each through hole 7 in the top mounting plate 63 faces the center of the bottom adjacent mounting plate 63.
When the lifting plate 61 is lifted, in the lifting process of the placing plate 63, a part of air above the placing plate is guided downwards through the through holes 7, and the through holes 7 face to the center of the placing plate 63 adjacent to the bottom, so that the air guided downwards at the through holes 7 is just guided to the lenses on the placing plate 63 at the bottom, the lenses at the bottom can be cleaned, impurities on the surfaces of the lenses are prevented from being left, and the measuring precision is improved.
Referring to the attached drawings 5-6 in the specification, a rotating shaft 8 for rotation is arranged on one side of the front end of the placing plate 63, a clamping block 9 is sleeved at one end of the rotating shaft 8, the clamping block 9 is an 1/4 cylinder, a limiting groove 10 for rotation of the clamping block 9 is formed in the surface of the placing plate 63, the limiting groove 10 is a 3/4 cylinder, a clamping plate 11 is inserted into the rear side of the placing plate 63, and when the placing plate 63 is in a vertical state, the clamping plate 11 can move downwards to seal the placing plate 63.
Joint piece 9 and spacing groove 10's setting, when lifting plate 61 goes up, under spur rack 66 and arc rack 65's effect, lay board 63 and give birth to the rotation, because joint piece 9 is 1/4 cylinder, spacing groove 10 is the 3/4 cylinder, joint piece 9 can rotate the half cycle promptly, consequently lay board 63 and also can rotate the half cycle, the turn-over of board 63 is laid in the realization, spur rack 66 and arc rack 65 separation afterwards, lay the state that board 63 kept behind the turn-over, and lay when board 63 rotated vertical state, cardboard 11 downstream this moment, seal groove, play the effect of blockking to the lens in the recess, prevent that the lens from dropping in the recess.
Referring to the attached drawings 2, 4 and 7 in the specification, a buffer plate 12 is embedded in the bottom of the clamping plate 11, a spring 13 is arranged at the top of the buffer plate 12, a tensioning rope 14 is connected to the bottom end of the spring 13, one end of the tensioning rope 14 is connected with a gravity ball 15, a vertical cavity is formed in the center of the clamping plate 11, the gravity ball 15 is located in the vertical cavity, and the gravity ball 15 pulls the tensioning rope 14 to enable the spring 13 to be in a compressed state.
After cardboard 11 is followed the rotation of laying board 63 and is become vertical state, cardboard 11 enters into the recess, to the recess closing cap, lay board 63 at last and rotate half a week take place the turn-over after, gravity ball 15 moves to the other end in vertical chamber this moment, taut rope 14 is in the lax state, spring 13 recovers, spring 13 promotes buffer board 12 and rises, and when the lens fell on buffer board 12, buffer board 12 can play the cushioning effect to the lens, can not damaged in order to guarantee thinner lens.
Referring to the attached drawing 1 of the specification, a bearing plate 16 with an arc-shaped concave bottom is arranged at the bottom of the support frame 1, and a plurality of protective strips 17 made of rubber materials are arranged at the top of the bearing plate 16.
The undetected lens can be placed at the position of the bearing plate 16, the top of the bearing plate 16 is an arc-shaped lower concave surface, so that the lens can be prevented from falling to two sides, and the protective strip 17 on the surface can play a role in protecting and preventing the lens from sliding.
Referring to the accompanying fig. 8, the present invention further provides an adjusting method using the above-mentioned vertical spherical interference splicing measuring device, the method comprises the following steps,
the method comprises the following steps: placing all the lenses to be measured on different placing plates 63 respectively, adjusting the self-unloading workbench 6 through the three-axis adjusting mechanism 5, measuring the lenses through the interferometer 2 and the spherical wave conversion mirror 4, and transmitting all the measurement data to the computer 3;
step two: the lead screw lifting mechanism drives the limiting strips 62 to ascend, the limiting strips 62 drive the lifting plate 61 to ascend, when the lifting plate 61 drives all the placing plates 63 to ascend, the arc-shaped racks 65 are meshed with and rotate on the straight racks 66 to drive the placing plates 63 at the top to deflect;
step three: after the placing plate 63 at the bottom reaches the straight rack 66, the screw rod lifting mechanism stops working, and the position of the lens on the next placing plate 63 is adjusted.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (8)

1. Vertical spherical interference concatenation measuring device, including support frame (1), interferometer (2) are installed to support frame (1) front side, interferometer (2) top is provided with computer (3), and interferometer (2) bottom is provided with spherical wave conversion mirror (4), and support frame (1) front side is provided with three-axis guiding mechanism (5), its characterized in that: the three-shaft adjusting mechanism (5) is provided with a self-discharging workbench (6), the self-discharging workbench (6) comprises a lifting plate (61), one side of the lifting plate (61) is provided with a limit strip (62), the limit strip (62) is slidably clamped on the three-shaft adjusting mechanism (5), a lead screw lifting mechanism for driving the limit strip (62) to vertically move is arranged in the three-shaft adjusting mechanism (5), a plurality of placing plates (63) are arranged on the other side of the lifting plate (61), one side of the front end of each placing plate (63) is rotatably connected to the lifting plate (61), a supporting plate (64) is arranged at the bottom of the rear side of each placing plate (63), the supporting plate (64) is fixedly arranged on the lifting plate (61), an arc-shaped rack (65) is arranged on the front side of each placing plate (63), the front side of the arc-shaped rack (65) is provided with a straight rack (66), and the straight rack (66) is fixedly connected to the three-axis adjusting mechanism (5).
2. The vertical spherical interference splicing measuring device according to claim 1, wherein: the three-axis adjusting mechanism (5) comprises an X-axis guide rail (51), a Y-axis guide rail (52) and a Z-axis guide rail (53), the X-axis guide rail (51) is installed on the support frame (1), the Y-axis guide rail (52) is installed on the front side of the X-axis guide rail (51), the X-axis guide rail (51) drives the Y-axis guide rail (52) to move left and right, the Z-axis guide rail (53) is installed on one side of the Y axis, the Y-axis guide rail (52) drives the Z-axis guide rail (53) to move front and back, the self-discharging workbench (6) is installed on the Y-axis guide rail (52), and a deflection air cylinder (54) for driving the Z-axis guide rail (53) to deflect is installed at the top of the Y-axis guide rail (52).
3. The vertical spherical interference splicing measuring device according to claim 1, wherein: lay board (63) surface and be provided with the recess, the recess runs through and lays board (63), and recess inside is provided with the silica gel pad.
4. The vertical spherical interference splicing measuring device according to claim 3, wherein: through holes (7) are formed in the four corners of the top of each placing plate (63), the diameter of each through hole (7) is gradually reduced towards the bottom, and the bottom end of each through hole (7) in each placing plate (63) at the top faces the center of the adjacent placing plate (63) at the bottom.
5. The vertical spherical interference splicing measuring device according to claim 1, wherein: lay board (63) front end one side and be provided with and supply pivoted axis of rotation (8), joint piece (9) have been cup jointed to axis of rotation (8) one end, joint piece (9) are the 1/4 cylinder, lay board (63) surface and be provided with and supply joint piece (9) pivoted spacing groove (10), spacing groove (10) are the 3/4 cylinder, it has cardboard (11) to lay board (63) rear side plug-in connection, when laying board (63) vertical state, cardboard (11) can the downstream, carry out the closing cap to laying board (63).
6. The vertical spherical interference splicing measuring device according to claim 5, wherein: the buffer plate (12) is embedded into the bottom of the clamping plate (11), the spring (13) is arranged at the top of the buffer plate (12), the tensioning rope (14) is connected to the bottom end of the spring (13), one end of the tensioning rope (14) is connected with the gravity ball (15), the vertical cavity is formed in the center of the clamping plate (11), the gravity ball (15) is located in the vertical cavity, the gravity ball (15) pulls the tensioning rope (14), and the spring (13) is in a compression state.
7. The vertical spherical interference splicing measuring device according to claim 1, wherein: the supporting frame (1) is provided with a bearing plate (16) with an arc-shaped lower concave surface at the top at the bottom, and a plurality of protective strips (17) made of rubber materials are arranged at the top of the bearing plate (16).
8. An adjustment method using the vertical spherical interference splicing measuring device according to any one of claims 1 to 7, wherein: the method comprises the following steps of (a) carrying out,
the method comprises the following steps: all lenses to be measured are respectively placed on different placing plates (63), a self-unloading workbench (6) is adjusted through a three-axis adjusting mechanism (5), the lenses are measured through an interferometer (2) and a spherical wave conversion mirror (4), and all measurement data are transmitted to a computer (3);
step two: the lead screw lifting mechanism drives the limiting strips (62) to ascend, the limiting strips (62) drive the lifting plates (61) to ascend, when the lifting plates (61) drive all the placing plates (63) to ascend, the arc-shaped racks (65) are meshed and rotate on the straight racks (66) to drive the placing plate (63) at the top to deflect;
step three: and after the placing plate (63) at the bottom reaches the straight rack (66), stopping the work of the screw rod lifting mechanism, and finishing the position adjustment of the lens on the next placing plate (63).
CN202210559409.1A 2022-05-23 2022-05-23 Vertical spherical interference splicing measuring device and adjusting method thereof Active CN114646453B (en)

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CN113238390A (en) * 2021-06-15 2021-08-10 深圳双十科技有限公司 Eight-station automatic focusing machine for optical lens

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