CN114646276A - Three-dimensional optical detection device - Google Patents
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- CN114646276A CN114646276A CN202011493102.3A CN202011493102A CN114646276A CN 114646276 A CN114646276 A CN 114646276A CN 202011493102 A CN202011493102 A CN 202011493102A CN 114646276 A CN114646276 A CN 114646276A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 36
- 238000001514 detection method Methods 0.000 title abstract description 18
- 238000005286 illumination Methods 0.000 claims description 19
- 238000007689 inspection Methods 0.000 claims description 17
- 230000000694 effects Effects 0.000 abstract description 12
- 238000003384 imaging method Methods 0.000 abstract description 5
- 230000001902 propagating effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
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- 230000005499 meniscus Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
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- 230000007935 neutral effect Effects 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
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Abstract
The invention provides a three-dimensional optical detection device, comprising: the device comprises an image transmitting module, a light splitting module, a reflecting module, a projection module and an image acquisition module; the image emission module emits a light beam with a preset pattern to the light splitting module; the light beam with the preset pattern is divided into at least two sub-beams by the light splitting module, and the at least two sub-beams are respectively emitted to the corresponding reflecting modules; the reflection modules correspond to the projection modules one to one; the image acquisition module is used for acquiring the image of the measured object. The image projection device is ingeniously provided with the light splitting module, the light beam with the preset pattern is emitted by the image emitting module, the light beam with the preset pattern is divided into the sub-beams by the light splitting module, and the sub-beams with the preset pattern are finally projected onto an object to be projected, so that the number of the image emitting modules is reduced, the equipment cost is greatly reduced, the imaging effect is good, and the use is convenient.
Description
Technical Field
The invention relates to the field of three-dimensional detection, in particular to a three-dimensional optical detection device.
Background
At present, a three-dimensional optical detection device adopting surface structure light mainly comprises an image emission module, a projection module and an image acquisition module. The image emission module emits a light beam with a preset pattern (such as a stripe pattern) to enter the projection module, the projection module projects the light beam with the preset pattern onto a measured object (such as a PCB), and then the image acquisition module acquires an image modulated by the measured object.
The main scheme is multi-path projection single-path imaging, and at the moment, a plurality of image emitting modules and a plurality of projection modules are needed to emit a plurality of light beams with preset patterns to be emitted into a measured object. The most direct consequence of this is that the equipment costs remain high. And the projection effect between each image emission module and the projection module may be different, and it is often difficult to have a desirable imaging effect.
Disclosure of Invention
The invention aims to provide a three-dimensional optical detection device to solve the defect of high equipment cost in the prior art.
The invention provides a three-dimensional optical detection device, comprising: the device comprises an image transmitting module, a light splitting module, a reflecting module, a projection module and an image acquisition module;
the image emission module is used for emitting a light beam with a preset pattern, and the light beam with the preset pattern is emitted to the light splitting module;
the light splitting module is used for splitting the light beam with the preset pattern into at least two sub-light beams, each sub-light beam corresponds to one reflection module, and the at least two sub-light beams respectively irradiate to the corresponding reflection modules;
the reflection modules correspond to the projection modules one to one, and the reflection modules are used for reflecting the corresponding sub-beams to the corresponding projection modules;
the projection module is used for transmitting and projecting the corresponding sub-beams to an object to be measured;
the image acquisition module is used for acquiring the image of the measured object.
Compared with the prior art, the three-dimensional optical detection device is skillfully provided with the light splitting module, only one image emission module is needed to emit the light beam with the preset pattern, the light beam with the preset pattern is split into a plurality of sub-light beams by the light splitting module, and the plurality of sub-light beams with the preset pattern are finally projected onto a to-be-detected object, so that the number of the image emission modules is reduced, the equipment cost is greatly reduced, and the plurality of sub-light beams with the preset pattern are emitted from one image emission module equivalently, so that the imaging effect is good, and the use is convenient.
Drawings
FIG. 1 is a schematic structural diagram of a three-dimensional optical inspection apparatus according to the present invention;
FIG. 2 is a schematic diagram of an image transmitting module according to the present invention;
fig. 3 is a schematic structural diagram of a light splitting module according to the present invention;
FIG. 4 is a schematic structural diagram of a three-dimensional optical inspection apparatus according to the present invention;
fig. 5 is a schematic structural diagram of another light splitting module according to the present invention.
Fig. 6 is a schematic structural diagram of a projection module according to the present invention.
Fig. 7 is a schematic structural diagram of a collimating module of the present invention.
Detailed Description
Referring to fig. 1, the three-dimensional optical inspection apparatus of the present embodiment includes an image emitting module 10, a light splitting module 20, a reflecting module 30, a projecting module 40, and an image collecting module 50.
The following describes the respective modules of the three-dimensional optical inspection apparatus:
1. the image transmitting module 10:
referring to fig. 2, the image emitting module 10 is configured to emit a light beam 70 with a predetermined pattern, and the light beam 70 with the predetermined pattern is emitted to the light splitting module 20.
The image emission module 10 of the present embodiment includes an illumination unit 11, a TIR prism 12, and a projection chip 13.
The illumination unit 11 is used for emitting a light beam, and the emitted light beam plays a role of illumination. The illumination unit 11 of this embodiment includes an LED light source 111, a collimating lens group 112, a fly eye lens 113, and a relay lens group 114, which are sequentially disposed along an optical path, and a light beam emitted by the LED light source 111 sequentially passes through the collimating lens group 112, the fly eye lens 113, and the relay lens group 114 and then is emitted, and the emitted light beam is a light beam emitted by the illumination unit 11.
The collimating lens group 112 is used for collimating the light beam, and reduces the divergence angle of the light beam of the LED light source 111, so as to avoid that the light beam entering the fly eye lens 113 cannot be focused by the fly eye lens 113 due to the overlarge divergence angle of the light beam of the LED light source 111, and further the illumination uniformity is reduced due to stray light. The collimating lens group 112 includes at least one lens, and the collimating lens group 112 of this embodiment includes three spherical lenses, each of which is sequentially disposed along the light path, so that the collimating effect is good.
The fly-eye lens 113 is used for homogenizing light and shaping light spots, the shape of the light spots projected by the light beam is corrected by shaping the light spots, the light spots projected by the three-dimensional detection device on the market at present are trapezoidal, and the detection precision is not high. The aspect ratio of each small compound eye in the compound eye lens 113 determines the final aspect ratio of the light spot, and in this embodiment, by setting the compound eye lens 113 and adjusting the aspect ratio of the small compound eye, the light spot of the light beam passing through the compound eye lens 113 is rectangular, so that the light spot of the light beam emitted by the illumination unit 11 is rectangular, and the rectangular light spot is convenient for the image acquisition module 50 to detect, thereby improving the system detection accuracy of the three-dimensional optical detection device.
The relay lens group 114 is used to form a kohler illumination mode to cooperate with the fly-eye lens 113 for better dodging, and the relay lens group 114 includes at least two lenses. The lighting unit 11 of the present embodiment has good quality and high brightness of emitted light beams by arranging the LED light source 111, the collimating lens group 112, the fly-eye lens 113, and the relay lens group 114.
In addition, the three-dimensional optical detection devices on the market are designed according to a forward projection or an oblique projection, and the correction is incomplete, so that light spots of light beams projected onto a measured object (such as a PCB) are trapezoidal. Therefore, the light spot of the light beam emitted by the illumination unit 11 of the present embodiment is preferably rectangular, so that the light spot of the light beam finally projected to the object to be measured is also rectangular, and the rectangular light spot can improve the detection accuracy of the three-dimensional optical detection device. Specifically, since the lighting unit 11 of the present embodiment is provided with the fly-eye lens 113, the spot of the light beam transmitted through the fly-eye lens 113 can be made rectangular by adjusting the aspect ratio of each small fly-eye of the fly-eye lens 113.
The projection chip 13 is used for generating a preset pattern, which includes but is not limited to a DMD (Digital Micromirror Device) or an LCOS (Liquid Crystal On Silicon, or Liquid Crystal On chip), and the preset pattern may be set according to a design requirement, and the preset pattern in this embodiment is a stripe pattern.
The light beam emitted by the illumination unit 11 of this embodiment is emitted to the TIR prism 12, and the TIR prism 12 totally reflects the light beam emitted by the illumination unit 11 to the projection chip 13 and emits the light beam 70 with the preset pattern formed after being reflected by the projection chip 13.
2. The spectroscopic module 20:
the light splitting module 20 is configured to split the light beam 70 with the preset pattern into at least two sub-light beams, each sub-light beam corresponds to one reflection module 30, at least two sub-light beams respectively irradiate to the corresponding reflection modules 30, the reflection modules 30 correspond to the projection modules 40 one to one, and the reflection modules 30 are configured to reflect the corresponding sub-light beams to the corresponding projection modules 40. The sub-beams have the same or substantially the same illumination (light energy).
For example, in fig. 3, the light splitting module 20 may be a light splitter 21, in which the light splitting module 20 splits the light beam 70 with the predetermined pattern into two sub-light beams 71 after the light beam 70 with the predetermined pattern is emitted to the light splitter 21, and the two sub-light beams 71 with the predetermined pattern are emitted to the corresponding reflection modules 30 respectively.
Referring to fig. 4, fig. 4 includes a propagation process of the light beam. Preferably, the beam splitting module 20 splits the beam 70 with the predetermined pattern into four sub-beams, which are the first sub-beam 75, the second sub-beam 76, the third sub-beam 77 and the fourth sub-beam 78, respectively, all of which have the predetermined pattern and the same or substantially the same illumination intensity (light energy), and they are respectively emitted to the corresponding reflection modules 30.
The four reflection modules 30 respectively reflect the first sub-beam 75, the second sub-beam 76, the third sub-beam 77 and the fourth sub-beam 78 to the four corresponding projection modules 40.
The four projection modules 40 respectively transmit and project the first sub-beam 75, the second sub-beam 76, the third sub-beam 77 and the fourth sub-beam 78 to the object to be measured. Have the beamlet projection of predetermineeing the pattern to the testee through four bands, can improve the projection quality, also can let image acquisition module 50's collection effect better.
Referring to fig. 5, fig. 5 includes a propagation process of the light beam. As an implementation manner, the light splitting module 20 of the present embodiment includes a first beam splitting element 22, a second beam splitting element 23, and a third beam splitting element 24; the first beam splitter element 22 is configured to split the light beam 70 with the predetermined pattern into a first main beam 72 and a second main beam 73 with orthogonal directions, wherein the first main beam 72 is directed to the second beam splitter element 23, and the second main beam 73 is directed to the third beam splitter element 24.
Second beam splitting element 23 is configured to split first main beam 72 into first and second orthogonally directed sub-beams 75 and 76; the third beam splitting element 24 is arranged to split the second main beam 73 into a third sub-beam 77 and a fourth sub-beam 78 with orthogonal directions. By this arrangement, the light beam 70 with the predetermined pattern is divided into four sub-beams, the beam properties are unchanged, and the light energy utilization rate is high.
Preferably, in this embodiment, the first sub-beam, the second sub-beam, the third sub-beam, and the fourth sub-beam have the same illuminance, which is 8000 to 12000Lux, and the light beams in this illuminance range can make the object to be measured exhibit a better image effect, which is beneficial for the image acquisition module 50 to acquire the image of the object to be measured, and the illuminance of the sub-beams can be controlled by the LED light source. Specifically, the illuminance of the first sub-beam, the second sub-beam, the third sub-beam and the fourth sub-beam is all 10000Lux or so.
Preferably, the light splitting module 20 of the present embodiment further includes a reflective element 25, the reflective element 25 is used for adjusting the propagation direction of the first main beam 72 or the second main beam 73, and the reflective element 25 may be a reflective prism. The reflection element 25 may be disposed on an optical path of the first main beam 72 or the second main beam 73, specifically, in this embodiment, the reflection element 25 is disposed on an optical path of the second main beam 73, and the second main beam 73 is reflected by the reflection element 25 and then emitted to the third beam splitting element 24, so as to adjust a propagation direction of the third sub-beam 77 and the fourth sub-beam 78. It will be appreciated that in other embodiments, reflective element 25 may be disposed in the optical path of first main beam 72, depending on design requirements.
In the present embodiment, the first beam splitting element 22 and the second beam splitting element 23 are located on the same plane; the reflection element 25 is disposed below the first beam splitting element 22 and located on the same plane as the third beam splitting element 24, and the reflection element 25 is configured to adjust a propagation direction of the second main beam 73, so that the light splitting module 20 is convenient to debug and has a good light splitting effect. Further, the first sub-beam 75, the second sub-beam 76, the third sub-beam 77 and the fourth sub-beam 78 are directed to four axes of a rectangular plane coordinate system, respectively, as viewed along the propagation direction of the beam 70 with the predetermined pattern. For example, first sub-beam 75 is directed in an east direction (e.g., positive X-axis), second sub-beam 76 is directed in a south direction (e.g., negative Y-axis), third sub-beam 77 is directed in a west direction (e.g., negative X-axis), and fourth sub-beam 78 is directed in a north direction (e.g., positive Y-axis). It is understood that, as shown in fig. 5, the emission of each sub-beam can be realized by setting the beam splitting directions of the first beam splitting element 22, the second beam splitting element 23 and the third beam splitting element 24 and the reflection direction of the reflection element 25, and this design is beneficial to the algorithm calculation after the image acquisition module 50 acquires the image.
The first beam splitting element 22, the second beam splitting element 23 and the third beam splitting element 24 are preferably beam splitting cubes, so that the installation and debugging are convenient, and the light splitting effect is good. Specifically, in this embodiment, the neutral beam splitting film layer may be coated on an inclined plane of a 45 ° right-angle prism, and then a right-angle prism with the same shape may be glued to form a beam splitting cube. In other embodiments, the beam splitting cube may be made by plating a neutral beam splitting film on a flat mirror.
3. The reflection module 30:
the reflection module 30 can adjust the angle of the light beam, and the light beam reflected by the reflection module 30 can enter the projection module 40 at an appropriate angle, and the reflection module 30 can be a mirror, which is only required to be disposed on the corresponding light beam path. The number of the reflection modules 30 and the number of the light beams correspond to each other, and since the light splitting module 20 splits four sub-light beams in the present embodiment, the number of the reflection modules 30 is correspondingly set to four. In other embodiments, if two sub-beams 71 are split by the splitting module 20, the number of the reflection modules 30 is two.
4. The projection module 40:
the projection modules 40 of this embodiment are configured to transmit and project the corresponding light beams to the object to be measured, and the number of the projection modules 40 corresponds to the number of the reflection modules 30. In the present embodiment, the four projection modules 40 respectively transmit and project the first sub-beam 75, the second sub-beam 76, the third sub-beam 77 and the fourth sub-beam 78 to the object to be measured. Referring to fig. 6, the projection module 40 of the present embodiment includes three meniscus lenses 41, a double convex lens 42, a double concave lens 43 and a meniscus lens 44 sequentially disposed along the optical path, so that the projection module 40 has a good projection effect and can project an image with good image quality.
5. The image acquisition module 50:
the image capturing module 50 is used to capture an image of the object to be measured and may include a conventional photographic objective and a telecentric lens. The image on the object to be measured enters the common photographic objective lens after passing through the telecentric lens.
6. The collimating module 60:
preferably, the three-dimensional optical inspection apparatus of this embodiment further includes a collimating module 60, and the light beam 70 with the predetermined pattern emitted by the image emitting module 10 firstly passes through the collimating module 60 and then is emitted to the light splitting module 20. The collimating module 60 may further reduce the divergence angle of the light beam. Referring to fig. 7, the collimating module 60 of the present embodiment includes a meniscus spherical lens 61, a double cemented lens 62, a meniscus spherical lens 63, and a plano-convex lens 64 sequentially disposed along the optical path, and the collimating module 60 has a good collimating effect and can effectively reduce the divergence angle of the light beam.
It is understood that, according to design requirements, the image emitting module 10 of the present embodiment can emit the light beam 70 with the preset pattern in multiple directions, and can adjust the angle at which the corresponding light beam enters the projection module 40 by adjusting the reflection angle of each reflection module 30.
The following describes a specific propagation process of the light beam of the three-dimensional optical detection device provided in the present application (the light beam 70 with the preset pattern propagates vertically downwards) with reference to fig. 4 to 5:
the light beam 70 with the preset pattern emitted from the image emitting module 10 propagates in the vertical direction, and enters the light splitting module 20 after being transmitted through the collimating module 60. In the light splitting module 20, the light beam 70 with the preset pattern is split by the first beam splitting element 22 into a first main light beam 72 propagating in the horizontal direction and a second main light beam 73 propagating in the vertical direction;
the first main beam 72 propagating in the horizontal direction is split by the second beam splitting element 23 into a first sub-beam 75 and a second sub-beam 76 propagating in the horizontal direction and having orthogonal directions;
the second main beam 73 propagating in the vertical direction is reflected by the reflecting element 25 into the second main beam 73 propagating in the horizontal direction, and the second main beam 73 propagating in the horizontal direction is split by the third beam splitting element 24 into a third sub-beam 77 and a fourth sub-beam 78 propagating in the horizontal direction and having orthogonal directions.
The first sub-beam 75, the second sub-beam 76, the third sub-beam 77 and the fourth sub-beam 78 respectively irradiate to the four corresponding reflection modules 30 and are reflected to the four corresponding projection modules 40, the four corresponding projection modules 40 respectively project the first sub-beam 75, the second sub-beam 76, the third sub-beam 77 and the fourth sub-beam 78 onto the object to be measured, so that the object to be measured presents a specific image, and finally the image acquisition module 50 acquires the image of the object to be measured.
The three-dimensional optical detection device is ingeniously provided with the light splitting module 20, only one image emitting module 10 needs to emit the light beam 70 with the preset pattern, the light beam 70 with the preset pattern is split into a plurality of sub-light beams by the light splitting module 20, and finally the sub-light beams with the preset pattern are projected onto a to-be-detected object, so that the number of the image emitting modules 10 is reduced, the equipment cost is greatly reduced, the sub-light beams with the preset pattern are emitted from one image emitting module 10 equivalently, the imaging effect is good, and the use is convenient.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that various changes and modifications can be made by those skilled in the art without departing from the spirit of the invention, and these changes and modifications are all within the scope of the invention.
Claims (12)
1. A three-dimensional optical inspection apparatus, comprising:
the device comprises an image transmitting module, a light splitting module, a reflecting module, a projection module and an image acquisition module;
the image emission module is used for emitting a light beam with a preset pattern, and the light beam with the preset pattern is emitted to the light splitting module;
the light splitting module is used for splitting the light beam with the preset pattern into at least two sub-light beams, each sub-light beam corresponds to one reflection module, and the at least two sub-light beams respectively irradiate to the corresponding reflection modules;
the reflection modules correspond to the projection modules one to one, and the reflection modules are used for reflecting the corresponding sub-beams to the corresponding projection modules;
the projection module is used for transmitting and projecting the corresponding sub-beams to an object to be measured;
the image acquisition module is used for acquiring the image of the measured object.
2. The three-dimensional optical inspection device of claim 1, wherein:
the light beam with the preset pattern is divided into four sub-beams by the light splitting module, wherein the four sub-beams are a first sub-beam, a second sub-beam, a third sub-beam and a fourth sub-beam respectively;
the four reflection modules respectively reflect the first sub-beam, the second sub-beam, the third sub-beam and the fourth sub-beam to the four corresponding projection modules;
and the four projection modules respectively transmit and project the first sub-beam, the second sub-beam, the third sub-beam and the fourth sub-beam to the measured object.
3. The three-dimensional optical inspection device of claim 2, wherein:
the light splitting module comprises a first beam splitting element, a second beam splitting element and a third beam splitting element;
the first beam splitting element is used for splitting the light beam with the preset pattern into a first main light beam and a second main light beam which are orthogonal in direction, wherein the first main light beam is emitted to the second beam splitting element, and the second main light beam is emitted to the third beam splitting element;
the second beam splitting element is used for splitting the first main beam into the first sub-beam and the second sub-beam with orthogonal directions;
the third beam splitting element is configured to split the second main beam into the third sub-beam and the fourth sub-beam with orthogonal directions.
4. The three-dimensional optical inspection device of claim 3, wherein:
the first beam splitting element, the second beam splitting element and the third beam splitting element are all beam splitting cubes.
5. The three-dimensional optical inspection device of claim 3, wherein:
the light splitting module further comprises a reflecting element for adjusting the propagation direction of the first main beam or the second main beam.
6. The three-dimensional optical inspection device of claim 5, wherein:
the first beam splitting element and the second beam splitting element are positioned on the same plane; the reflection element is arranged below the first beam splitting element and is positioned on the same plane with the third beam splitting element, and the reflection element is used for adjusting the propagation direction of the second main beam.
7. The three-dimensional optical inspection device of claim 6, wherein:
the directions of the first sub-beam, the second sub-beam, the third sub-beam and the fourth sub-beam respectively correspond to four axial directions of a plane rectangular coordinate system.
8. The three-dimensional optical inspection device according to any one of claims 1 to 7, wherein:
the image emission module comprises an illumination unit, a TIR prism and a projection chip, wherein the illumination unit is used for emitting a light beam, and the projection chip is used for generating a preset pattern; the light beam emitted by the illumination unit is emitted to the TIR prism, the TIR prism totally reflects the light beam emitted by the illumination unit to the projection chip and emits the light beam with the preset pattern formed after the light beam is reflected by the projection chip.
9. The three-dimensional optical inspection device of claim 8, wherein: the lighting unit comprises an LED light source, a collimating lens group, a fly-eye lens and a relay lens group which are sequentially arranged along a light path, and light beams emitted by the LED light source sequentially pass through the collimating lens group, the fly-eye lens and the relay lens group and then are emitted out.
10. The three-dimensional optical inspection device of claim 9, wherein: the light spots of the light beams emitted by the lighting units are rectangular.
11. The three-dimensional optical inspection device of claim 10, wherein: the light beam with the preset pattern emitted by the image emission module firstly passes through the collimation module and then is emitted to the light splitting module.
12. The three-dimensional optical inspection device of claim 2, wherein: the first sub-beam, the second sub-beam, the third sub-beam and the fourth sub-beam have the same illumination, and the illumination is 8000-12000 Lux.
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| US20190113384A1 (en) * | 2017-10-12 | 2019-04-18 | Chroma Ate Inc. | Optical measuring device |
| CN209764029U (en) * | 2019-04-11 | 2019-12-10 | 东莞市神州视觉科技有限公司 | Detection device for detecting three-dimensional shape of object |
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| JP2009169385A (en) * | 2007-12-19 | 2009-07-30 | Victor Co Of Japan Ltd | Projection display device |
| CN103913940A (en) * | 2012-12-28 | 2014-07-09 | 台达电子工业股份有限公司 | Stereoscopic projection device and display method using same |
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| US20190113384A1 (en) * | 2017-10-12 | 2019-04-18 | Chroma Ate Inc. | Optical measuring device |
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