CN114645323B - Vacuum system structure of diamond crystal growth equipment - Google Patents
Vacuum system structure of diamond crystal growth equipment Download PDFInfo
- Publication number
- CN114645323B CN114645323B CN202210327235.6A CN202210327235A CN114645323B CN 114645323 B CN114645323 B CN 114645323B CN 202210327235 A CN202210327235 A CN 202210327235A CN 114645323 B CN114645323 B CN 114645323B
- Authority
- CN
- China
- Prior art keywords
- furnace body
- pneumatic
- vacuum furnace
- plummer
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 21
- 239000010432 diamond Substances 0.000 title claims abstract description 21
- 239000013078 crystal Substances 0.000 title claims abstract description 17
- 238000007789 sealing Methods 0.000 claims abstract description 39
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 239000000463 material Substances 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 7
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 238000003786 synthesis reaction Methods 0.000 abstract description 2
- 238000004804 winding Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a vacuum system structure of diamond crystal growing equipment, relates to the technical field of diamond synthesis, and discloses a vacuum system structure of diamond crystal growth equipment, which comprises the following components: workstation and be located the roof of its top, workstation's top middle part fixed mounting has the plummer, the top edge of plummer installs the sealing ring, the vacuum furnace body is installed to the bottom of roof, be used for with sealing ring complex first seal groove is seted up to the inner wall bottom of vacuum furnace body, four outer wall tops of plummer and four outer wall bottoms of vacuum furnace body have all seted up the second seal groove, be used for with second seal groove complex closing plate is all installed to the top four sides of workstation, pneumatic tight mechanism is installed in the one side that the plummer was kept away from to the closing plate, install pneumatic locating part between the top edge of vacuum furnace body and the roof. The deviation generated when the vacuum system descends is avoided, the air tightness of the vacuum system after the structure is installed is ensured, and the air leakage during the working process is avoided.
Description
Technical Field
The invention relates to the technical field of diamond synthesis, in particular to a vacuum system structure of diamond crystal growth equipment.
Background
The synthetic diamond is also named artificial diamond, and is polycrystalline diamond formed by polymerizing diamond crystals with the diameter of 10-30 nanometers, when the vacuum system structure used in the diamond crystal growth process is installed, the vacuum system structure is manually assisted by manpower to hoist, shaking easily occurs, and when the diamond is attached to a placing table, the shaking causes uneven surface contact to generate impact force, and the effect on the crystals on the placing table can be caused.
The Chinese patent with the publication number of CN210560879U discloses a vacuum system structure of diamond crystal growing equipment, which comprises a top beam and a workbench, wherein a motor is fixedly arranged at the top of the top beam, and an output shaft of the motor is sheathed with a winding disc. According to the vacuum system structure of the diamond crystal growth equipment, after a worker places polished crystals into the vacuum system structure, a motor is started to drive a winding disc to rotate, a traction rope starts to be paid off, a furnace body descends to the bottom cover along with paying off of the traction rope to be close to the bottom cover, and when the furnace body moves, the end, connected with the furnace body, of a guy rope is pulled, and the guy rope moves around a fixed pulley.
However, the technical scheme has the following defects that the existing vacuum system structure is usually hoisted when being installed, and the side plates are used for limiting the vacuum system structure when being hoisted, but a traction rope cannot play a role in fixing and limiting a vacuum furnace body in the hoisting process, so that the vacuum furnace body is easy to shake, and is deviated when being installed, so that air leakage is caused, and the vacuum coefficient of the working process is influenced.
Disclosure of Invention
The invention aims to provide a vacuum system structure of diamond crystal growth equipment, and aims to solve the problems that in the prior art, when the existing vacuum system structure is installed, hoisting is usually adopted, and although a side plate is adopted for limiting the vacuum system structure in hoisting, a traction rope cannot play a role in fixing and limiting a vacuum furnace body in the hoisting process, so that the vacuum furnace body is easy to shake, and offset occurs in the installation process, so that the vacuum furnace body leaks air, and the vacuum coefficient of the vacuum furnace body in the working process is influenced.
In order to achieve the above purpose, the invention adopts the following technical scheme: the vacuum system structure of the diamond crystal growing device comprises: workstation and be located the roof of its top, workstation's top middle part fixed mounting has the plummer, the top edge of plummer installs the sealing ring, the vacuum furnace body is installed to the bottom of roof, be used for with sealing ring complex first seal groove is seted up to the inner wall bottom of vacuum furnace body, four outer wall tops of plummer and four outer wall bottoms of vacuum furnace body have all seted up the second seal groove, be used for with second seal groove complex closing plate is all installed to the top four sides of workstation, pneumatic tight mechanism is installed in the one side that the plummer was kept away from to the closing plate, install pneumatic locating part between the top edge of vacuum furnace body and the roof.
According to the further technical scheme, an automatic telescopic rod for driving the vacuum furnace body to lift is arranged between the middle part of the top end of the vacuum furnace body and the middle part of the top plate, and the number of the pneumatic limiting pieces is the same as that of the pneumatic jacking mechanisms.
According to a further technical scheme, the automatic telescopic rod is an electric telescopic rod or a hydraulic telescopic rod, and the pneumatic limiting piece is a pneumatic telescopic rod.
According to a further technical scheme, the pneumatic jacking mechanism comprises at least two cylinders which are fixedly arranged at the top of the workbench and uniformly distributed along the length direction of the sealing plate.
According to the further technical scheme, a connecting pipe for communicating the end, close to the pneumatic limiting piece, of the air cylinder and the top of the pneumatic limiting piece is arranged between the end, close to the pneumatic limiting piece, of the air cylinder.
According to a further technical scheme, movable ends of the cylinders are fixedly connected with the outer wall of the sealing plate, and communicating pipes are communicated between one ends, close to the sealing plate, of the cylinders.
According to a further technical scheme, the sealing ring and the sealing plate are both supported by rubber materials.
According to a further technical scheme, support columns for supporting the top plate are fixedly arranged between the top four corners of the workbench and the bottom four corners of the top plate.
The beneficial effects of the invention are as follows:
when the vacuum system structure is installed, the automatic telescopic rod is started to drive the vacuum furnace body to descend, meanwhile, four pneumatic limiting pieces can limit the descending of the vacuum furnace body, the pneumatic limiting pieces can only descend along the vertical direction, the deviation is avoided when the vacuum furnace body descends, the movable end of the pneumatic limiting pieces stretches along with the descending of the vacuum furnace body, the air of the pneumatic jacking mechanism is pumped out through the connecting pipe, the ejection end of the pneumatic jacking mechanism drives the sealing plate to move towards the bearing table, when the vacuum furnace body is in contact with the bearing table, the sealing ring is just clamped into the first sealing groove, the pneumatic jacking mechanism jacks the sealing plate into the second sealing groove, the air tightness of the vacuum system structure after the vacuum furnace body is installed is guaranteed, and the vacuum coefficient is prevented from being influenced by air leakage during working.
Drawings
Fig. 1 is a schematic overall structure of an embodiment of the present invention.
Fig. 2 is a schematic top view of the table of the present invention.
Fig. 3 is a schematic view of a sealing structure of the vacuum furnace of the present invention.
Fig. 4 is a schematic diagram of a connection structure of the pneumatic limiter and the pneumatic tightening mechanism of the present invention.
In the figure: 1. a work table; 2. top plate the method comprises the steps of carrying out a first treatment on the surface of the; 3. a support column; 4. a carrying platform; 5. a vacuum furnace body; 6. a seal ring; 7. a first seal groove; 8. a second seal groove; 9. a sealing plate; 10. an automatic telescopic rod; 11. pneumatic limiting parts; 12. a pneumatic jacking mechanism; 13. a connecting pipe; 14. and communicating pipe.
Detailed Description
The following describes the embodiments of the present invention further with reference to the drawings.
As shown in fig. 1 to 4, a vacuum system structure of a diamond crystal growing apparatus, comprising: the vacuum furnace body is installed to workstation and the roof that is located its top, and the top middle part fixed mounting of workstation has the plummer, and the top edge of plummer installs the sealing ring, and the vacuum furnace body is installed to the bottom of roof, and the first seal groove that is used for with sealing ring complex is offered to the inner wall bottom of vacuum furnace body, and the second seal groove has all been offered to four outer wall tops of plummer and four outer wall bottoms of vacuum furnace body, and the sealing plate that is used for with second seal groove complex is all installed to the top four sides of workstation, and pneumatic tight mechanism is installed to one side that the plummer was kept away from to the sealing plate, installs pneumatic locating part between the top edge of vacuum furnace body and the roof.
In this embodiment, when the vacuum system structure is installed, the automatic telescopic rod 10 is started to drive the vacuum furnace body 5 to descend, and simultaneously, the four pneumatic limiting pieces 11 can limit the descent of the vacuum furnace body, so that the vacuum furnace body can only descend along the vertical direction, the deviation of the vacuum furnace body is avoided when the vacuum furnace body descends, along with the descent of the vacuum furnace body 5, the movable end of the pneumatic limiting piece 11 stretches, and the air of the pneumatic jacking mechanism 12 is pumped out through the connecting pipe 13, so that the ejection end of the pneumatic jacking mechanism 12 drives the sealing plate 9 to move towards the bearing table 4, when the vacuum furnace body 5 contacts with the bearing table 4, the sealing ring 6 is just clamped into the first sealing groove 7 at the moment, the pneumatic jacking mechanism 12 jacks the sealing plate 9 into the second sealing groove 8, the air tightness of the vacuum system structure after installation is ensured, the air leakage of the vacuum furnace body during operation is avoided, and the vacuum coefficient of the vacuum furnace is influenced.
Specifically, an automatic telescopic rod for driving the vacuum furnace body to lift is arranged between the middle part of the top end of the vacuum furnace body and the middle part of the top plate, and the number of pneumatic limiting parts is the same as that of the pneumatic jacking mechanisms.
The automatic telescopic rod is an electric telescopic rod or a hydraulic telescopic rod, and the pneumatic limiting part is a pneumatic telescopic rod.
Specifically, the pneumatic jacking mechanism comprises at least two cylinders which are fixedly arranged at the top of the workbench and uniformly distributed along the length direction of the sealing plate.
Preferably, further, a connecting pipe for communicating the pneumatic limiting piece and the cylinder is arranged between one end of the cylinder close to the pneumatic limiting piece and the top of the pneumatic limiting piece.
Further, the movable end of the cylinder is fixedly connected with the outer wall of the sealing plate, and a communicating pipe is communicated between one ends of the plurality of cylinders, which are close to the sealing plate.
Preferably, the sealing ring and the sealing plate are both supported by a rubber material.
Further, support columns for supporting the top plate are fixedly arranged between the top four corners of the workbench and the bottom four corners of the top plate.
In the description of the present invention, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (3)
1. A vacuum system structure of a diamond crystal growing apparatus, comprising: workstation (1) and be located roof (2) of its top, a serial communication port, workstation (1) top middle part fixed mounting has plummer (4), sealed ring (6) are installed in plummer (4) top edge department, vacuum furnace body (5) are installed to the bottom of roof (2), first seal groove (7) that are used for with sealed ring (6) complex are seted up to the inner wall bottom of vacuum furnace body (5), four outer wall tops of plummer (4) and four outer wall bottoms of vacuum furnace body (5) all have seted up second seal groove (8), be used for with second seal groove (8) complex closing plate (9) are all installed at the top four sides of workstation (1), pneumatic tight mechanism (12) are installed in one side that plummer (4) were kept away from to closing plate (9), pneumatic tight mechanism (12) are including at least fixed mounting at workstation (1) top and two cylinders along closing plate (9) length direction equipartition, be used for with sealing plate (9) between the one end that cylinder pneumatic spacing piece (11) and the spacing piece (11) of plummer are close to one end and sealing plate (9) are installed, connecting pipe (13) are close to between the connecting pipe (13) between the two, connecting pipe is fixed to the end, the automatic sealing device is characterized in that a pneumatic limiting piece (11) is arranged between the top edge of the vacuum furnace body (5) and the top plate (2), an automatic telescopic rod (10) used for driving the vacuum furnace body (5) to lift is arranged between the middle of the top end of the vacuum furnace body (5) and the middle of the top plate (2), the number of the pneumatic limiting pieces (11) is the same as that of the pneumatic jacking mechanisms (12), the automatic telescopic rod (10) is an electric telescopic rod or a hydraulic telescopic rod, the pneumatic limiting pieces (11) are pneumatic telescopic rods, when the vacuum system is structurally arranged, the automatic telescopic rod (10) is started, the vacuum furnace body (5) is driven to descend, meanwhile, the four pneumatic limiting pieces (11) can limit the descending of the vacuum furnace body only along with the descending of the vacuum furnace body, the deviation is avoided, the movable end of the pneumatic limiting pieces (11) stretches out along with the descending of the vacuum furnace body (5), the movable end of the pneumatic jacking mechanisms (12) is pulled out through connecting pipes (13), the movable end of the pneumatic jacking mechanisms (12) drives a sealing plate (9) to move towards a bearing table (4), and the sealing plate (4) just contacts with a sealing groove (8) when the sealing plate (7) is in the bearing table (6).
2. Vacuum system structure of diamond crystal growing apparatus according to claim 1, characterized in that the sealing ring (6) and sealing plate (9) are both supported by rubber material.
3. The vacuum system structure of the diamond crystal growing apparatus according to claim 1, wherein support columns (3) for supporting the top plate (2) are fixedly installed between the top four corners of the table (1) and the bottom four corners of the top plate (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210327235.6A CN114645323B (en) | 2022-03-30 | 2022-03-30 | Vacuum system structure of diamond crystal growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210327235.6A CN114645323B (en) | 2022-03-30 | 2022-03-30 | Vacuum system structure of diamond crystal growth equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114645323A CN114645323A (en) | 2022-06-21 |
| CN114645323B true CN114645323B (en) | 2024-02-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210327235.6A Active CN114645323B (en) | 2022-03-30 | 2022-03-30 | Vacuum system structure of diamond crystal growth equipment |
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| CN (1) | CN114645323B (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004347191A (en) * | 2003-05-21 | 2004-12-09 | Matsushita Electric Ind Co Ltd | Built-in type gas range |
| JP2006083405A (en) * | 2004-09-14 | 2006-03-30 | Arios Inc | Cvd apparatus for synthesizing diamond |
| JP2012049244A (en) * | 2010-08-25 | 2012-03-08 | Tokyo Electron Ltd | Vacuum processing equipment |
| CN102587834A (en) * | 2012-03-14 | 2012-07-18 | 北京市三一重机有限公司 | Drilling tool and piling machinery |
| CN203546206U (en) * | 2013-11-20 | 2014-04-16 | 河北同光晶体有限公司 | Lower furnace lid lifting mechanism |
| EP3312535A1 (en) * | 2016-10-21 | 2018-04-25 | Toyota Jidosha Kabushiki Kaisha | Vacuum heat insulation structure |
| CN210560879U (en) * | 2019-09-17 | 2020-05-19 | 江苏卓远半导体有限公司 | Vacuum system structure of diamond crystal growth equipment |
| CN210560886U (en) * | 2019-09-17 | 2020-05-19 | 江苏卓远半导体有限公司 | Full-automatic intelligent silicon carbide crystal growing device |
| CN210796696U (en) * | 2019-09-17 | 2020-06-19 | 江苏卓远半导体有限公司 | Furnace body structure of diamond crystal growth equipment |
-
2022
- 2022-03-30 CN CN202210327235.6A patent/CN114645323B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004347191A (en) * | 2003-05-21 | 2004-12-09 | Matsushita Electric Ind Co Ltd | Built-in type gas range |
| JP2006083405A (en) * | 2004-09-14 | 2006-03-30 | Arios Inc | Cvd apparatus for synthesizing diamond |
| JP2012049244A (en) * | 2010-08-25 | 2012-03-08 | Tokyo Electron Ltd | Vacuum processing equipment |
| CN102587834A (en) * | 2012-03-14 | 2012-07-18 | 北京市三一重机有限公司 | Drilling tool and piling machinery |
| CN203546206U (en) * | 2013-11-20 | 2014-04-16 | 河北同光晶体有限公司 | Lower furnace lid lifting mechanism |
| EP3312535A1 (en) * | 2016-10-21 | 2018-04-25 | Toyota Jidosha Kabushiki Kaisha | Vacuum heat insulation structure |
| CN210560879U (en) * | 2019-09-17 | 2020-05-19 | 江苏卓远半导体有限公司 | Vacuum system structure of diamond crystal growth equipment |
| CN210560886U (en) * | 2019-09-17 | 2020-05-19 | 江苏卓远半导体有限公司 | Full-automatic intelligent silicon carbide crystal growing device |
| CN210796696U (en) * | 2019-09-17 | 2020-06-19 | 江苏卓远半导体有限公司 | Furnace body structure of diamond crystal growth equipment |
Non-Patent Citations (3)
| Title |
|---|
| Design of a furnace for refining copper prior to fusion;Villarroel, D，et al;《Minerals Engineering》;第13卷(第1期);95-104 * |
| 一种"一体两机"式立式真空炉结构设计;唐宏波;郭华锋;郝嘉欣;;装备制造技术(第03期);67-69 * |
| 一种真空熔炼炉的设计;梁君宁等;《今日制造与升级》(第04期);64-65 * |
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| CN114645323A (en) | 2022-06-21 |
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