CN114619542B

CN114619542B - Moulding pressing equipment for IGZO target

Info

Publication number: CN114619542B
Application number: CN202210255296.6A
Authority: CN
Inventors: 唐安泰
Original assignee: Zhuzhou Torch Antai New Materials Co ltd
Current assignee: Zhuzhou Torch Antai New Materials Co ltd
Priority date: 2022-03-15
Filing date: 2022-03-15
Publication date: 2022-10-11
Anticipated expiration: 2042-03-15
Also published as: CN114619542A

Abstract

The invention discloses forming and pressing equipment for an IGZO target, which comprises a supporting seat and a supporting table fixed above the supporting seat, wherein a forming die is fixed on the top wall of the supporting seat, a stamping cylinder is arranged on the lower surface of the supporting table, a piston rod of the stamping cylinder is connected with a stamping plate, the supporting seat is of a rectangular cavity structure, the bottom wall of the forming die is communicated with the top wall of the supporting seat, a vibrating and pushing assembly is arranged between the forming die and the supporting seat and used for vibrating and paving powder and pushing out a formed biscuit, a feeding assembly is arranged between the supporting seat and the supporting table and can automatically add the powder into the forming die, the powder can be automatically added into the forming die before pressing, the powder in the forming die is vibrated and paved, the quality of pressing and forming is improved, the linkage of the equipment is good, the operation is simple, the working efficiency and the safety are improved, the flying of dust is reduced, and the equipment is safe and environment-friendly.

Description

Forming and pressing equipment for IGZO target

Technical Field

The invention relates to the technical field of forming and pressing equipment, in particular to forming and pressing equipment for an IGZO target.

Background

In the preparation process of the IGZO target, most production enterprises add a specific organic binder to increase the flowability of powder during molding. The addition of binders has the following disadvantages: firstly, long-time degreasing treatment is carried out before the target material is sintered; the target material porosity is large in the two target material degreasing processes, so that the components are distributed unevenly and the density is difficult to increase (hardly reaching 99.5%); and in the third sintering process, the volatilization of the adhesive easily causes the cracking of the target material, and the yield and the qualified rate are reduced. And the addition of the adhesive causes the introduction of impurities, which affects the purity of the target material.

Prior art Ga ₂ O ₃ 、ZnO、In ₂ O ₃ (specific surface area 20 m) ² /g) uniformly ball-milling and mixing the nano powder according to the atomic ratio of In to Ga to Zn = 1; and (3) putting the IGZO granulated powder into a customized forming die for pressing, carrying out secondary forming on the biscuit which is formed for the first time in a cold isostatic press at 250MPa, controlling the pressure relief pressure to be 6MPa/min, and reducing the pressure to normal pressure to obtain the IGZO biscuit with high density (relative density of 65-72%). Then the biscuit is put into a customized atmosphere sintering furnace for sinteringHeating at a heating rate of 0.3 ℃/min, carrying out heat preservation sintering at 1350 ℃ for 6 hours, then cooling to 1000 ℃ at a cooling rate of 0.5 ℃/min, and then naturally cooling. Although the IGZO target material with the relative density of more than 99.5 percent is obtained, the mould is easy to shake during the pressing process to influence the forming quality of pressed powder, and the research finds that, for example, a pressing and forming mechanism for powder metallurgy with the publication number of CN207325940U can fix the mould, but after the powder is added into the mould, the powder is not completely paved in the mould, the situation of protrusion or depression on the surface of a biscuit can be caused after the pressing, the qualification rate of products is influenced, and the powder is manually filled into the mould by the existing feeding, so that the safety accident is easily caused by careless operation.

Disclosure of Invention

In order to solve the technical problems, the invention provides the following technical scheme:

the invention discloses forming and pressing equipment for an IGZO target, which comprises a supporting seat and a supporting table fixed above the supporting seat, wherein a forming die is fixed on the top wall of the supporting seat, a stamping cylinder is arranged on the lower surface of the supporting table, a piston rod of the stamping cylinder is connected with a stamping plate, the supporting seat is of a rectangular cavity structure, the bottom wall of the forming die is communicated with the top wall of the supporting seat, a vibrating pushing assembly is arranged between the forming die and the supporting seat and used for vibrating and paving powder and pushing out a formed biscuit, a feeding assembly is arranged between the supporting seat and the supporting table, and the feeding assembly can automatically add the powder into the forming die.

As a preferred technical scheme, the vibration material pushing assembly comprises a material pushing plate, two limiting rings and two hydraulic cylinders, the material pushing plate is located in a forming die, the two limiting rings are fixed on the side wall of the joint of the forming die and a supporting seat, guide rods are movably arranged in the limiting rings, the top ends of the guide rods are fixed on the lower surface of the material pushing plate, pushing blocks are fixed at the bottom ends of the guide rods, springs are sleeved on the guide rods and located between the limiting rings and the pushing blocks, the two hydraulic cylinders are symmetrically installed on the inner surface of the bottom wall of the supporting seat, piston rods of the two hydraulic cylinders are jointly fixed with an installation plate, installation rods are symmetrically welded on the upper surface of the installation plate, a rotating shaft is rotatably installed between the two installation rods, a plurality of convex strips are installed at two ends of the rotating shaft, a motor is installed on one side of one installation rod, and an output shaft of the motor is in transmission connection with the rotating shaft.

As a preferred technical scheme, the feeding assembly comprises a feeding box and two rails, the feeding box is mounted on the upper surface of a supporting table through bolts, the two rails are mounted on the upper surface of a supporting seat and located on two sides of a forming die, the bottoms of two side walls of the feeding box are connected with conveying pipes, powder conveying pumps are mounted on the conveying pipes, one ends of the conveying pipes penetrate through the supporting table and are connected with feeding pipes, sliding blocks are connected in the rails in a sliding mode, the two feeding pipes are respectively fixed to the tops of the two sliding blocks, tension springs are connected to the side walls, close to the two sliding blocks, of the two tension springs, one ends of the two tension springs are connected to the side walls of the forming die, fixed pulleys I are symmetrically mounted on the lower surface of the supporting table, fixed pulleys II are symmetrically mounted on the upper surface of the supporting seat, pull ropes are connected to the side walls, far away from the two sliding blocks, the pull ropes on two sides respectively penetrate through the fixed pulleys II and the fixed pulleys I on two sides and are connected to the upper surface of a stamping plate, and two groups of dust collection assemblies are mounted on the supporting table.

As a preferred technical scheme of the invention, the vertical sections of the push blocks and the convex strips are of semicircular structures, the convex strips are distributed on the side wall of the rotating shaft in a circumferential array manner, the two push blocks are respectively positioned above the convex strips on the two sides, and the push blocks are in contact with the convex strips.

According to a preferable technical scheme of the invention, the dust collection assembly comprises a dust collection fan, a dust collection pipe is connected to a dust collection port of the dust collection fan, one end of the dust collection pipe penetrates through the support table and is connected with a collection pipe, the collection pipe is fixed above the feeding pipe through a fixing block, and a plurality of dust collection heads are installed on one side wall of the collection pipe.

As a preferable technical scheme of the invention, the cross sectional area of the material pushing plate is the same as that of the inner cavity of the forming die.

As a preferable technical scheme of the invention, the conveying pipe is a rubber hose, and the conveying pipe deforms when the feeding assembly moves, so that the movement of the feeding assembly is not hindered.

As a preferable technical scheme of the invention, the collecting pipe is in a circular arc structure, the collecting pipe is positioned outside the forming die, and the plurality of dust collecting heads are distributed on the collecting pipe in a circumferential array.

The invention has the beneficial effects that:

1. according to the forming and pressing equipment for the IGZO target, through the arrangement of the structures such as the material pushing plate, the limiting ring, the guide rod, the pushing block, the spring, the hydraulic cylinder, the mounting plate, the mounting rod, the rotating shaft, the convex strips and the motor, after powder is added into a forming die, the rotating shaft is driven by the motor to rotate at a high speed, and under the cooperation of the structures such as the convex strips, the pushing block and the spring, the material pushing plate can rapidly vibrate to flatten the powder, the possibility of defects generated after stamping is reduced, the qualification rate of products is improved, and after stamping is finished, a biscuit can be rapidly pushed out, so that the working efficiency is improved;

2. according to the forming and pressing equipment for the IGZO target, the feeding assembly is arranged, IGZO granulation powder in the feeding box can be fed into a forming die by using the powder conveying pump before stamping, when stamping is carried out, the stamping plate descends to drive one end of the pull rope to descend, so that the two slide blocks are mutually far away, the feeding pipe is far away from the forming die, the stamping is not influenced, after the stamping is finished, the feeding pipe automatically resets under the action of the tension spring, the subsequent work is facilitated, manual feeding is not needed, and the safety is improved;

3. this kind of moulding pressing equipment of IGZO target, through the dust absorption subassembly, when the punching press, pressure probably causes the dust to fly upward, utilizes the dust absorption subassembly to carry out the dust absorption and handles, and the collecting pipe is along with the filling tube together removes, can not hinder the removal of punching press board, and the dust that produces when will suppressing absorbs, reduces the pollution to the environment, guarantees operational environment's clean and tidy.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic structural diagram of a forming and pressing device for an IGZO target of the invention;

FIG. 2 is a schematic structural diagram of a vibrating pusher assembly of a forming and pressing apparatus for an IGZO target according to the present invention;

FIG. 3 is an enlarged view at A in FIG. 2;

FIG. 4 is a side view of the push block, the rotating shaft and the convex strips of the IGZO target forming and pressing device of the present invention;

FIG. 5 is a top view of a collector tube of an IGZO target forming press apparatus of the present invention.

In the figure: 1. a supporting seat; 2. a support table; 3. forming a mold; 4. punching a cylinder; 5. stamping a plate; 101. a material pushing plate; 102. a limiting ring; 103. a guide bar; 104. a push block; 105. a spring; 106. a hydraulic cylinder; 107. mounting a plate; 108. mounting a rod; 109. a rotating shaft; 110. a convex strip; 111. a motor; 201. a feed box; 202. a delivery pipe; 203. a powder delivery pump; 204. a feed tube; 205. a track; 206. a slider; 207. a tension spring; 208. a first fixed pulley; 209. pulling a rope; 210. a second fixed pulley; 301. a dust collection fan; 302. a collection pipe; 303. a dust collection pipe; 304. a dust collection head.

Detailed Description

The invention aims to provide forming and pressing equipment for an IGZO target, and aims to solve the technical problems that after powder is added into a die, the powder is not completely paved in the die, the surface of a biscuit is likely to be raised or sunken after stamping, the product yield is affected, and safety accidents are easily caused due to careless operation because the powder is manually added into the die during feeding at present.

Please refer to fig. 1 and 2, a forming and pressing apparatus for IGZO target includes a supporting seat 1 and a supporting seat 2 fixed above the supporting seat 1, a forming mold 3 is fixed on the top wall of the supporting seat 1, a stamping cylinder 4 is installed on the lower surface of the supporting seat 2, a piston rod of the stamping cylinder 4 is connected with a stamping plate 5, the supporting seat 1 is of a rectangular cavity structure, the bottom wall of the forming mold 3 is communicated with the top wall of the supporting seat 1, a vibrating pushing component is arranged between the forming mold 3 and the supporting seat 1, the vibrating pushing component is used for vibrating and flattening powder and pushing out a formed biscuit, a feeding component is arranged between the supporting seat 1 and the supporting seat 2, and the feeding component can automatically add the powder into the forming mold 3.

The working process is as follows: the IGZO granulation powder is fed into the forming die 3 by using the feeding assembly, the powder can be driven to vibrate rapidly by a vibration mechanism in the vibration pushing assembly, so that the powder is uniformly paved in the forming die 3, and after the powder is vibrated to be uniform, the stamping cylinder 4 is used for driving the stamping plate 5 to descend so as to press and form the powder; the material pushing mechanism in the vibrating material pushing assembly can push out the formed biscuit from the forming die 3, so that operators can take the biscuit down conveniently, and the working efficiency is improved.

Referring to fig. 1-3, the vibrating pushing assembly includes a pushing plate 101, two limiting rings 102 and two hydraulic cylinders 106, the pushing plate 101 is located in the forming mold 3, the two limiting rings 102 are fixed on a side wall of a joint of the forming mold 3 and the supporting seat 1, guide rods 103 are movably arranged in the limiting rings 102, top ends of the guide rods 103 are fixed on a lower surface of the pushing plate 101, a pushing block 104 is fixed at a bottom end of the guide rods 103, springs 105 are sleeved on the guide rods 103, the springs 105 are located between the limiting rings 102 and the pushing block 104, the two hydraulic cylinders 106 are symmetrically mounted on an inner surface of a bottom wall of the supporting seat 1, mounting plates 107 are jointly fixed on piston rods of the two hydraulic cylinders 106, mounting rods 108 are symmetrically welded on an upper surface of the mounting plates 107, a rotating shaft 109 is rotatably mounted between the two mounting rods 108, a plurality of raised strips 110 are mounted at two ends of the rotating shaft 109, a motor 111 is mounted on one side of one of the mounting rod 108, and an output shaft of the motor 111 is in transmission connection with the rotating shaft 109; after the powder is to be put into the forming die 3, the motor 111 is started, the output shaft of the motor 111 drives the rotating shaft 109 to rotate rapidly, the convex strips 110 rotate synchronously along with the rotating shaft 109, the convex strips 110 are distributed at intervals in an array mode, in the high-speed rotating process, the push block 104 is continuously pushed, the push plate 101 is enabled to vibrate rapidly by matching with the spring 105, the powder on the push plate 101 is leveled, the motor 111 is closed after the powder is leveled, then the push plate 5 is driven to descend by using the punching cylinder 4, the powder is pressed and formed, after the pressing is finished, the push plate 5 is reset, the hydraulic cylinder 106 is started, the hydraulic cylinder 106 pushes the mounting plate 107 to ascend, the formed biscuit can be pushed out by using the push plate 101, and the subsequent processing is convenient to carry out.

Referring to fig. 1, the feeding assembly includes a feeding box 201 and two rails 205, the feeding box 201 is mounted on the upper surface of the supporting base 2 through bolts, the two rails 205 are mounted on the upper surface of the supporting base 1 and located on two sides of the forming mold 3, the bottoms of two side walls of the feeding box 201 are connected with a conveying pipe 202, a powder conveying pump 203 is mounted on the conveying pipe 202, one end of the conveying pipe 202 penetrates through the supporting base 2 and is connected with a feeding pipe 204, sliders 206 are slidably connected with the rails 205, the two feeding pipes 204 are respectively fixed on the tops of the two sliders 206, the side walls, close to the two sliders 206, of the two sliders 206 are respectively connected with tension springs 207, one ends of the two tension springs 207 are respectively connected to the side walls of the forming mold 3, first fixed pulleys 208 are symmetrically mounted on the lower surface of the supporting base 2, second fixed pulleys 210 are symmetrically mounted on the upper surface of the supporting base 1, pull ropes 209 are connected to the side walls, the pull ropes 209 on the two sides respectively penetrate through the second fixed pulleys 210 and the first fixed pulleys 208 on the two sides and are connected to the upper surface of the stamping plate 5, and two sets of dust collecting assemblies are mounted on the supporting base 2; add IGZO powder into feed box 201, before processing, start powder delivery pump 203, send out the powder through conveyer pipe 202, the powder falls into forming die 3 through conveyer pipe 202 and filling tube 204, carry and close powder delivery pump 203 after accomplishing, in stamping process, punching press board 5 descends, the one end of pulling stay cord 209 removes, under the effect of fixed pulley one 208 and fixed pulley two 210, the slider 206 of two stay cords 209 pulling both sides respectively removes, and tensile extension spring 207, make filling tube 204 keep away from forming die 3 gradually, can not influence going on of punching press, reset when punching press board 5, under the effect of extension spring 207 pulling force, slider 206 automatic re-setting, make things convenient for feeding in next time, the linkage of equipment is high, and the operation is simple.

Referring to fig. 3 and 4, the vertical cross sections of the pushing blocks 104 and the protruding strips 110 are both semicircular structures, a plurality of protruding strips 110 are distributed on the side wall of the rotating shaft 109 in a circumferential array, the two pushing blocks 104 are respectively located above the protruding strips 110 on both sides, and the pushing blocks 104 are in contact with the protruding strips 110; the protruding strips 110 are distributed at intervals, and along with the rapid rotation of the rotating shaft 109, the pushing block 104 can be driven to vibrate, and the vibration is transmitted to the pushing plate 101 to shake the powder.

Referring to fig. 1, the dust collection assembly includes a dust collection fan 301, a dust collection pipe 303 is connected to a dust collection port of the dust collection fan 301, one end of the dust collection pipe 303 penetrates through the support platform 2 and is connected to a collection pipe 302, the collection pipe 302 is fixed above the feed pipe 204 through a fixing block, and a plurality of dust collection heads 304 are installed on one side wall of the collection pipe 302; the collecting pipe 302 of the dust collection assembly can move along with the charging pipe 204, the collecting pipes 302 on two sides are positioned outside the forming die 3, and when the dust collection assembly is pressed, the dust collection fan 301 is started to absorb flying dust, so that pollution and waste are reduced.

Referring to fig. 2, the cross-sectional area of the material pushing plate 101 is the same as the cross-sectional area of the inner cavity of the forming mold 3; the material pushing plate 101 is matched with the forming die 3, and the pressing and material pushing effects are guaranteed.

Referring to fig. 1, the delivery pipe 202 is a rubber hose, and the delivery pipe 202 deforms when the feeding assembly moves, so that the movement of the feeding assembly is not hindered.

Referring to fig. 5, the collecting pipe 302 is a circular arc structure, the collecting pipe 302 is located outside the forming die 3, and the plurality of dust collecting heads 304 are distributed on the collecting pipe 302 in a circumferential array.

The working principle is as follows: when the powder injection molding machine is used, IGZO powder is added into the feeding box 201, before processing, the powder conveying pump 203 is started, the powder is sent out through the conveying pipe 202, the powder falls into the molding die 3 through the conveying pipe 202 and the feeding pipe 204, after the conveying is finished, the powder conveying pump 203 is closed, after the powder is sent into the molding die 3, the motor 111 is started, an output shaft of the motor 111 drives the rotating shaft 109 to rotate rapidly, the convex strips 110 rotate synchronously along with the rotating shaft 109, the convex strips 110 are distributed at intervals in an array manner, the push block 104 is continuously pushed in the high-speed rotating process, the motor 111 is closed in cooperation with the spring 105, the push plate 101 vibrates rapidly to flatten the powder on the push plate 101, the powder is flattened, then the stamping cylinder 4 is used for driving the stamping plate 5 to descend, one end of pulling stay cord 209 removes, under the effect of fixed pulley 208 and fixed pulley two 210, the slider 206 of two stay cords 209 pulling both sides respectively removes, and tensile extension spring 207, make filling tube 204 keep away from forming die 3 gradually, can not influence going on of punching press, completion suppression is accomplished in punching press board 5 gets into forming die 3, in the time of the suppression, dust absorption assembly's collecting pipe 302 can together remove along with filling tube 204, the collecting pipe 302 of both sides is located forming die 3's outside, start dust absorption fan 301, the dust absorption that will fly upward, reduce pollution and waste, after the suppression is accomplished, punching press board 5 resets, under the effect of extension spring 207 pulling force, slider 206 automatic re-setting, make things convenient for the feeding in next time, the linkage of equipment is high, and the operation is simple.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The forming and pressing equipment for the IGZO target comprises a supporting seat (1) and a supporting table (2) fixed above the supporting seat (1), wherein a forming die (3) is fixed on the top wall of the supporting seat (1), a stamping cylinder (4) is installed on the lower surface of the supporting table (2), and a piston rod of the stamping cylinder (4) is connected with a stamping plate (5), and is characterized in that the supporting seat (1) is of a rectangular cavity structure, the bottom wall of the forming die (3) is communicated with the top wall of the supporting seat (1), a vibrating and pushing assembly is arranged between the forming die (3) and the supporting seat (1), the vibrating and pushing assembly is used for flatly paving powder and pushing out a formed biscuit, a feeding assembly is arranged between the supporting seat (1) and the supporting table (2), and the vibrating and pushing assembly can automatically add the powder into the forming die (3);

the vibrating material pushing assembly comprises a material pushing plate (101), two limiting rings (102) and two hydraulic cylinders (106), the material pushing plate (101) is located in a forming die (3), the two limiting rings (102) are fixed on the side wall of the joint of the forming die (3) and a supporting seat (1), guide rods (103) are movably arranged in the limiting rings (102), the top ends of the guide rods (103) are fixed on the lower surface of the material pushing plate (101), push blocks (104) are fixed at the bottom ends of the guide rods (103), springs (105) are sleeved on the guide rods (103), the springs (105) are located between the limiting rings (102) and the push blocks (104), the two hydraulic cylinders (106) are symmetrically installed on the inner surface of the bottom wall of the supporting seat (1), mounting plates (107) are jointly fixed on piston rods of the two hydraulic cylinders (106), mounting rods (108) are symmetrically welded on the upper surface of the mounting plate (107), rotating shafts (109) are rotatably installed between the two mounting rods (108), a plurality of convex strips (110) are installed at two ends of the rotating shafts (109), one side of one convex strip mounting rod (108) is provided with a motor (111), and an output shaft of the motor (111) is connected with a transmission shaft (109);

reinforced subassembly includes charging box (201) and two tracks (205), charging box (201) passes through the upper surface of bolted mounting at brace table (2), install the upper surface at supporting seat (1) and be located the both sides of forming die (3) two tracks (205), the bottom of charging box (201) both sides wall all is connected with conveyer pipe (202), install powder delivery pump (203) on conveyer pipe (202), the one end of conveyer pipe (202) is run through brace table (2) and is connected with filling tube (204), sliding connection has slider (206) in track (205), and two filling tubes (204) are fixed respectively at the top of two slider (206), all be connected with extension spring (207) on the lateral wall that two slider (206) are close to mutually, and the one end of two extension springs (207) all is connected on the lateral wall of forming die (3), fixed pulley (208) is installed to the lower surface symmetry of brace table (2), fixed pulley two (210) are installed to the upper surface symmetry of supporting seat (1), all be connected with stay cord (209) on the lateral wall that two sliders (206) kept away from mutually, and the stay cord (209) of both sides pass fixed pulley (210) and fixed pulley (208) and fixed pulley (5) upper surface mounting plate (2) of two sets of supporting table (2) respectively, dust absorption pulley (2), upper surface components (209) are installed.

2. The forming and pressing equipment of the IGZO target according to claim 1, wherein the vertical cross sections of the push blocks (104) and the convex strips (110) are both semicircular structures, a plurality of convex strips (110) are distributed on the side wall of the rotating shaft (109) in a circumferential array, the two push blocks (104) are respectively positioned above the convex strips (110) at two sides, and the push blocks (104) are in contact with the convex strips (110).

3. The IGZO target forming and pressing equipment as claimed in claim 1, wherein the dust collection component comprises a dust collection fan (301), a dust collection pipe (303) is connected to a dust collection opening of the dust collection fan (301), one end of the dust collection pipe (303) penetrates through the support table (2) and is connected with a collection pipe (302), the collection pipe (302) is fixed above the feeding pipe (204) through a fixing block, and a plurality of dust collection heads (304) are mounted on one side wall of the collection pipe (302).

4. The IGZO target forming and pressing equipment according to claim 1, wherein the cross-sectional area of the material pushing plate (101) is the same as that of the inner cavity of the forming die (3).

5. The IGZO target forming and pressing equipment according to claim 1, wherein the conveying pipe (202) is a rubber hose, and the conveying pipe (202) deforms when the feeding assembly moves and does not obstruct the movement of the feeding assembly.

6. The IGZO target forming and pressing equipment according to claim 3, wherein the collecting pipe (302) is in a circular arc structure, the collecting pipe (302) is located outside the forming die (3), and the dust collecting heads (304) are distributed on the collecting pipe (302) in a circumferential array.