CN114614794A - Surface acoustic wave resonator with bus bars with different inclination angles - Google Patents

Surface acoustic wave resonator with bus bars with different inclination angles Download PDF

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Publication number
CN114614794A
CN114614794A CN202210290656.6A CN202210290656A CN114614794A CN 114614794 A CN114614794 A CN 114614794A CN 202210290656 A CN202210290656 A CN 202210290656A CN 114614794 A CN114614794 A CN 114614794A
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China
Prior art keywords
axis
bus bar
finger
section
interdigital
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Pending
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CN202210290656.6A
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Chinese (zh)
Inventor
刘贤栋
高安明
张海力
姜伟
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Zhejiang Xingyao Semiconductor Co ltd
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Zhejiang Xingyao Semiconductor Co ltd
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Priority to CN202210290656.6A priority Critical patent/CN114614794A/en
Publication of CN114614794A publication Critical patent/CN114614794A/en
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02685—Grating lines having particular arrangements
    • H03H9/02763—Left and right side electrically coupled reflectors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14558—Slanted, tapered or fan shaped transducers

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

The invention discloses a surface acoustic wave resonator with bus bars with different inclination angles, which belongs to the technical field of piezoelectricity and comprises an interdigital transducer and two reflecting gratings, wherein the two reflecting gratings are respectively arranged on two sides of the interdigital transducer; the reflection grating comprises two short-circuit strips and reflection grating fingers, the reflection grating fingers are arranged between the two short-circuit strips, and the short-circuit strips short-circuit the reflection grating fingers to form the short-circuit reflection grating. The upper bus bar and the lower bus bar have different dip angles, so that the resonator is provided with a plurality of different deflection angles, the deflection angles of the resonator are changed, the energy flow direction of the resonator is close to the arrangement direction of the finger bars of the resonator, the transverse component of the sound wave is reduced, meanwhile, each part of the resonator is provided with different apertures, the resonance of a transverse mode is weakened, the resonance condition of the transverse mode is destroyed by the design, the transverse mode excited by the interdigital electrode cannot resonate, the effect of inhibiting the transverse mode is realized, and the device is worthy of popularization and use.

Description

Surface acoustic wave resonator with bus bars with different inclination angles
Technical Field
The invention relates to the technical field of piezoelectricity, in particular to a surface acoustic wave resonator with bus bars with different inclination angles.
Background
Resonators (interdigital transducers, IDTs) made of 42 DEG Y-X lithium tantalate substrates are widely used in the field of mobile communications. The piezoelectric device based on 42-degree Y-X lithium tantalate (the thickness of the substrate is far larger than the wavelength of a mechanical wave in a resonator) excites leaky waves, and the leaky waves are characterized in that bulk waves are scattered towards the inside of the base continuously in the propagation process, and the Q value of the interdigital transducer is reduced to a certain extent due to the energy of the scattered bulk waves, so that the piezoelectric substrate is thinned to a certain extent, and a high-sound-velocity layer is manufactured on the bottom layer of the piezoelectric substrate and used for reflecting the scattered sound waves back to the interdigital transducer. The method of thinning the piezoelectric substrate and manufacturing the high-speed sound layer on the bottom layer (POI device) changes the boundary condition of the sound wave, and can cause the interdigital transducer to excite the sound wave of other modes, wherein the transverse resonant mode has the most obvious influence on the performance of the device, so that the suppression of the transverse resonant mode becomes the technical key to be considered in designing the POI device. Accordingly, a surface acoustic wave resonator having bus bars with different tilt angles is proposed.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: how to solve the horizontal resonance mode problem that appears among the present surface acoustic wave syntonizer, provide a surface acoustic wave syntonizer that has the bus bar of different inclinations, two upper and lower bus bars in this surface acoustic wave syntonizers are the broken line shape at different inclinations, and the bus bar of different inclinations makes every part of interdigital electrode have different apertures to have a plurality of energy flow angles in making the interdigital electrode, destroyed the resonance condition of horizontal mode, the unable resonance of the horizontal mode that the interdigital electrode arouses, realize the effect that restraines horizontal mode.
The invention solves the technical problem through the following technical scheme, and the invention comprises an interdigital transducer and two reflecting gratings, wherein the two reflecting gratings are respectively arranged on two sides of the interdigital transducer; the reflection grating comprises two short-circuit strips and a reflection grating finger strip, the reflection grating finger strip is arranged between the two short-circuit strips, and the short-circuit strips short-circuit the reflection grating finger strips to form a short-circuit reflection grating; the interdigital transducer includes two upper and lower interdigital electrodes that set up side by side, the interdigital electrode includes zigzag bus bar and electrode finger, the electrode finger with zigzag bus bar connects, the electrode finger divide into true finger and artificial finger, and true finger and artificial finger interval on the same interdigital electrode set up, and true finger and artificial finger dislocation set on the different interdigital electrodes.
Furthermore, the distance between the reflection grating finger in the reflection grating with the nearest distance and the electrode finger in the interdigital electrode is half-period wavelength of the interdigital transducer.
Furthermore, the center distance between the real finger and the dummy finger on the same interdigital electrode is half of the wavelength of the interdigital transducer.
Furthermore, the distance between the real finger and the false finger at the opposite positions on different interdigital electrodes is Dg, and the Dg value is less than the period wavelength of 0.5 interdigital transducers.
Furthermore, the zigzag bus bar at least comprises two connected sections, the deflection angle values of the two sections in the zigzag bus bar are within the range of an energy flow angle +/-10 degrees or within the range of an energy flow angle complementary angle +/-10 degrees, wherein the energy flow angle is an included angle between energy flow and the interdigital electrode in the vertical direction, and the deflection angle is an included angle between each section in the zigzag bus bar and the interdigital electrode in the vertical direction.
Furthermore, the zigzag bus bar comprises four connected sections, wherein the first section of the zigzag bus bar of the upper interdigital electrode forms an angle theta with the positive direction of the X axis1The angle between the second section and the X axis is theta2The angle between the third section and the positive direction of the X axis is theta1The included angle between the fourth section and the X-axis negative direction is 0 degree; wherein the angle theta is formed between the first section of the zigzag bus bar of the lower interdigital electrode and the positive direction of the X axis3The angle between the second section and the X axis is theta4The third section forms an angle theta with the positive direction of the X axis3The included angle between the fourth section and the X-axis negative direction is 0 degree; wherein theta is1～θ4The range of (A) is 0 to 15 deg.
Furthermore, the X axis is arranged along the vertical direction of the interdigital electrode and is positioned on the plane of the interdigital electrode, and the Y axis is arranged along the direction of the interdigital electrode and is positioned on the plane of the interdigital electrode and is vertical to the X axis.
Further, when two of the surface acoustic wave resonators having bus bars with different inclination angles are cascaded, the bus bars of the cascaded portion are at an included angle of 0 ° with respect to the X-axis.
Furthermore, the fold-line-shaped bus bar comprises two connected sections, wherein an included angle between the first section of the fold-line-shaped bus bar of the upper interdigital electrode and the positive direction of the X axis is 6 degrees, an included angle between the second section of the fold-line-shaped bus bar of the lower interdigital electrode and the negative direction of the X axis is 6 degrees, and an included angle between the short circuit bar and the X axis is 0 degree.
Furthermore, the zigzag bus bar comprises two sections which are connected, wherein the first section of the zigzag bus bar of the upper interdigital electrode and the first section of the zigzag bus bar of the lower interdigital electrode are 6 degrees from the positive direction included angle of the X axis, the second section of the zigzag bus bar are 6 degrees from the negative direction included angle of the X axis, and the zigzag bus bar is close to the first section of the zigzag bus bar, the short circuit bar is 6 degrees from the positive direction included angle of the X axis and is close to the second section of the zigzag bus bar, and the short circuit bar is 6 degrees from the negative direction included angle of the X axis.
Compared with the prior art, the invention has the following advantages: this surface acoustic wave syntonizer with different inclination busbar, the upper and lower busbar has different inclinations, make have a plurality of different deviation angles in the syntonizer, change the deviation angle of syntonizer, make syntonizer energy flow direction and syntonizer indicate that the strip arrangement direction is close, the horizontal component of sound wave reduces, simultaneously, every part of syntonizer has the resonance that the different apertures has weakened horizontal mode, the resonance condition of horizontal mode has been destroyed to this kind of design, the unable resonance of horizontal mode of interdigital electrode excitation, realize restraining the effect of horizontal mode, be worth being generalized to use.
Drawings
Fig. 1 is a schematic structural diagram of a surface acoustic wave resonator according to a first embodiment of the present invention;
fig. 2 is a schematic structural diagram of a cascade of surface acoustic wave resonators according to a first embodiment of the present invention;
fig. 3 is a schematic structural view of a surface acoustic wave resonator in a second embodiment of the present invention;
FIG. 4 is a schematic diagram showing comparison between SAW resonator test data designed in the second embodiment of the present invention and resonator test data not designed with an inclination angle;
fig. 5 is a schematic structural diagram of a surface acoustic wave resonator in the third embodiment of the present invention.
Detailed Description
The following examples are given for the detailed implementation and specific operation of the present invention, but the scope of the present invention is not limited to the following examples.
Example one
The embodiment provides a technical scheme: a surface acoustic wave resonator with bus bars with different inclination angles comprises an interdigital transducer and two reflecting grids, wherein the interdigital transducer is designed by adopting a zigzag bus bar, and interdigital electrodes are arranged in a staggered mode. The reflection gratings are arranged on two sides of the interdigital transducer, the reflection gratings reflect the sound wave signals leaked to the two sides of the interdigital transducer back to the interdigital transducer, each reflection grating comprises a reflection grating finger strip 12 and a short-circuit strip 11, the reflection grating finger strips 12 are short-circuited by the short-circuit strips 11 to form short-circuit reflection gratings, and if no short-circuit strip 11 exists, the open-circuit reflection gratings are formed. The center-to-center spacing between the fingers adjacent to the grating and the interdigital transducer (the fingers on the side edges) is Pitch, and can be changed as required.
The interdigital transducer comprises an upper interdigital electrode and a lower interdigital electrode which are arranged side by side and used for exciting and absorbing surface acoustic waves, the center distance value of the interdigital electrodes is Pitch, the Pitch is the half-cycle wavelength of the interdigital transducer, and the Pitch is used for selecting the resonance frequency of a resonator. The upper interdigital electrode and the lower interdigital electrode are formed by opposite true fingers 231 and false fingers 232 (the true fingers 231 and the false fingers 232 are fingers of interdigital electrodes in the interdigital transducer), the distance between the true fingers 231 and the false fingers 232 is Dg, the Dg value generally takes a period wavelength less than 0.5 interdigital transducer, finally, the true fingers 231 and the false fingers 232 are both connected to a fold-line-shaped bus bar 21/22, and the interdigital transducer further comprises an upper continuous fold-line-shaped bus bar 21/22 and a lower continuous fold-line-shaped bus bar 21/22. The zigzag bus bars 21 and 22 have different bending angles, and the included angle between the zigzag bus bar 21/22 and the X-axis direction is called the electrode offsetThe included angle between the first section of the bus bar (the fold-line bus bar 22) of the lower electrode and the positive direction of the X axis is theta1The angle between the second section and the X axis is theta2The third section forms an angle theta with the positive direction of the X axis1The included angle between the fourth section and the X-axis negative direction is 0 degree; the angle theta between the first section of bus bar (fold-line bus bar 21) of the upper electrode and the positive direction of the X axis3The second section forms an included angle theta with the negative direction of the X axis4The third section forms an angle theta with the positive direction of the X axis3The included angle between the fourth section and the X-axis negative direction is 0 degree; the dog-leg bus bar 21/22 allows a plurality of deflection angles to exist in the interdigital transducer and allows the interdigital transducer to have different apertures, and when the deflection angle approaches the energy flow angle (the angle of energy flow perpendicular to the interdigital electrodes) θ or (180 ° - θ), the lateral mode of the acoustic wave within the half period L is suppressed, and the different apertures for each part of the interdigital electrodes can attenuate the resonance of the lateral mode.
As shown in fig. 2, a schematic diagram of cascade connection of surface acoustic wave resonators with bus bars having different inclination angles is shown, and for the convenience of cascade connection, the bus bars of the cascade connection part can be designed with 0 ° inclination angle (linear bus bars).
Example two
As shown in fig. 3, which is a schematic structural diagram of the surface acoustic wave resonator in this embodiment, the upper and lower bus bars of the interdigital transducer adopt a double-fold-line design, and the inclination angles are both 6 °, specifically, an angle between a first segment of the bus bar of the upper and lower electrodes and a positive direction of an X axis is 6 °, and an angle between a second segment of the bus bar of the upper and lower electrodes and a negative direction of the X axis is 6 °. The inclination angles of the upper and lower bus bars of the interdigital electrodes are the same so that the interdigital transducers have the same aperture. Fig. 4 is a comparison of test data of the saw resonator of fig. 3 with test data of a resonator not designed with a tilt angle, in which a sharp transverse mode is visible in a solid line, and test data of the design structure of the present embodiment of fig. 3 in a dotted line, and in which it is seen in fig. 4 that an admittance curve between a positive resonant peak and an anti-resonant peak is smooth and the transverse mode has been well suppressed.
EXAMPLE III
As shown in fig. 5, it is a schematic view of the structure of the surface acoustic wave resonator in this embodiment. The short-circuit bars of the short-circuit reflection grating are designed by adopting the same inclination angles, and the reflection grating and the bus bar section on the side close to the interdigital transducer have the same inclination angles, so that the effect of suppressing the transverse mode is the same as that in the embodiment of fig. 3.
To sum up, the surface acoustic wave resonator with the bus bars with different inclination angles of the embodiment has the advantages that the upper bus bar and the lower bus bar have different inclination angles, so that the resonator is provided with a plurality of different deflection angles, the deflection angle of the resonator is changed, the energy flow direction of the resonator is close to the arrangement direction of the finger bars of the resonator, the transverse component of the sound wave is reduced, meanwhile, each part of the resonator is provided with different apertures, the resonance of a transverse mode is weakened, the resonance condition of the transverse mode is destroyed by the design, the transverse mode excited by the interdigital electrodes cannot resonate, the effect of inhibiting the transverse mode is realized, and the surface acoustic wave resonator is worthy of being popularized and used.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.

Claims (10)

1. A surface acoustic wave resonator having bus bars with different tilt angles, comprising: the device comprises an interdigital transducer and two reflecting gratings, wherein the two reflecting gratings are respectively arranged on two sides of the interdigital transducer; the reflection grating comprises two short-circuit strips and a reflection grating finger strip, the reflection grating finger strip is arranged between the two short-circuit strips, and the short-circuit strips short-circuit the reflection grating finger strips to form a short-circuit reflection grating; the interdigital transducer includes two upper and lower interdigital electrodes that set up side by side, the interdigital electrode includes zigzag bus bar and electrode finger, the electrode finger with zigzag bus bar connects, the electrode finger divide into true finger and artificial finger, and true finger and artificial finger interval on the same interdigital electrode set up, and true finger and artificial finger dislocation set on the different interdigital electrodes.
2. A surface acoustic wave resonator having bus bars with different tilt angles as set forth in claim 1, wherein: and the distance between the reflection grating finger in the reflection grating with the nearest distance and the electrode finger in the interdigital electrode is the half-period wavelength of the interdigital transducer.
3. A surface acoustic wave resonator having bus bars with different tilt angles as set forth in claim 2, wherein: the center distance between the real finger and the false finger on the same interdigital electrode is the half-period wavelength of the interdigital transducer.
4. A surface acoustic wave resonator having bus bars with different tilt angles as set forth in claim 2 or 3, wherein: the distance between the real finger and the false finger at the relative positions on different interdigital electrodes is Dg, and the value of Dg is less than the period wavelength of 0.5 interdigital transducers.
5. A surface acoustic wave resonator having bus bars with different tilt angles as set forth in claim 4, wherein: the zigzag bus bar at least comprises two connected sections, the deflection angle values of the two sections in the zigzag bus bar are within the range of an energy flow angle +/-10 degrees or within the range of an energy flow angle complementary angle +/-10 degrees, the energy flow angle is an included angle between an energy flow and the direction perpendicular to the interdigital electrode, and the deflection angle is an included angle between each section in the zigzag bus bar and the direction perpendicular to the interdigital electrode.
6. A surface acoustic wave resonator having bus bars with different tilt angles as set forth in claim 5, wherein: the zigzag bus bar comprises four connected sections, wherein the included angle between the first section of the zigzag bus bar of the upper interdigital electrode and the positive direction of the X axis is theta1The angle between the second section and the X axis is theta2The third section forms an angle theta with the positive direction of the X axis1The included angle between the fourth section and the X-axis negative direction is 0 degree; wherein the first section of the zigzag bus bar of the lower interdigital electrode forms an included angle theta with the positive direction of the X axis3The angle between the second section and the X axis is theta4The angle between the third section and the positive direction of the X axis is theta3The included angle between the fourth section and the X-axis negative direction is 0 degree; wherein theta is1～θ4The angle range of (a) is 0 to 15 deg.
7. A surface acoustic wave resonator having buses with different tilt angles as claimed in claim 6, wherein: the X axis is arranged along the vertical direction of the interdigital electrode and is positioned on the plane of the interdigital electrode, and the Y axis is arranged along the direction of the interdigital electrode and is positioned on the plane of the interdigital electrode and is vertical to the X axis.
8. A surface acoustic wave resonator having bus bars with different tilt angles as set forth in claim 7, wherein: when the two surface acoustic wave resonators with the bus bars with different inclination angles are cascaded, the included angle between the bus bars of the cascaded part and an X axis is 0 degree.
9. A surface acoustic wave resonator having bus bars with different tilt angles as set forth in claim 7, wherein: the fold-line bus bar comprises two connected sections, wherein the included angle between the first section of the fold-line bus bar of the upper interdigital electrode and the positive direction of the X axis is 6 degrees, the included angle between the second section of the fold-line bus bar and the negative direction of the X axis is 6 degrees, and the included angle between the short circuit bar and the X axis is 0 degree.
10. A surface acoustic wave resonator having bus bars with different tilt angles as set forth in claim 7, wherein: the zigzag bus bar comprises two sections which are connected, wherein the first section of the zigzag bus bar of the upper interdigital electrode and the first section of the zigzag bus bar of the lower interdigital electrode are 6 degrees from the positive direction included angle of the X axis, the second section of the zigzag bus bar is 6 degrees from the negative direction included angle of the X axis and is close to the first section of the zigzag bus bar is 6 degrees from the positive direction included angle of the X axis and is close to the second section of the zigzag bus bar is 6 degrees from the negative direction included angle of the X axis and the short circuit bar.
CN202210290656.6A 2022-03-23 2022-03-23 Surface acoustic wave resonator with bus bars with different inclination angles Pending CN114614794A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115632629A (en) * 2022-10-20 2023-01-20 重庆大学 Elastic wave device for realizing transverse wave suppression and manufacturing method
CN116347971A (en) * 2023-05-24 2023-06-27 北京中科飞鸿科技股份有限公司 Semiconductor package for radio frequency front end
CN116667812A (en) * 2023-07-11 2023-08-29 唯捷创芯(天津)电子技术股份有限公司 Surface acoustic wave resonator and method for manufacturing the same
WO2023193499A1 (en) * 2022-04-08 2023-10-12 浙江星曜半导体有限公司 Surface acoustic wave resonator and surface acoustic wave filter
CN116961619A (en) * 2023-09-21 2023-10-27 苏州声芯电子科技有限公司 Surface acoustic wave resonator structure with double transverse mode inhibition

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023193499A1 (en) * 2022-04-08 2023-10-12 浙江星曜半导体有限公司 Surface acoustic wave resonator and surface acoustic wave filter
CN115632629A (en) * 2022-10-20 2023-01-20 重庆大学 Elastic wave device for realizing transverse wave suppression and manufacturing method
CN116347971A (en) * 2023-05-24 2023-06-27 北京中科飞鸿科技股份有限公司 Semiconductor package for radio frequency front end
CN116347971B (en) * 2023-05-24 2023-08-08 北京中科飞鸿科技股份有限公司 Semiconductor package for radio frequency front end
CN116667812A (en) * 2023-07-11 2023-08-29 唯捷创芯(天津)电子技术股份有限公司 Surface acoustic wave resonator and method for manufacturing the same
CN116961619A (en) * 2023-09-21 2023-10-27 苏州声芯电子科技有限公司 Surface acoustic wave resonator structure with double transverse mode inhibition

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