CN114614769A - High-power radio frequency resonance generating device - Google Patents

High-power radio frequency resonance generating device Download PDF

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CN114614769A
CN114614769A CN202210236172.3A CN202210236172A CN114614769A CN 114614769 A CN114614769 A CN 114614769A CN 202210236172 A CN202210236172 A CN 202210236172A CN 114614769 A CN114614769 A CN 114614769A
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inductor
grid
plate
capacitor
anode
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颜文旭
于振中
杜小雄
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Hefei Hagong Jinlang Equipment Technology Co ltd
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HRG International Institute for Research and Innovation
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B1/00Details
    • AHUMAN NECESSITIES
    • A01AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01MCATCHING, TRAPPING OR SCARING OF ANIMALS; APPARATUS FOR THE DESTRUCTION OF NOXIOUS ANIMALS OR NOXIOUS PLANTS
    • A01M17/00Apparatus for the destruction of vermin in soil or in foodstuffs
    • A01M17/008Destruction of vermin in foodstuffs
    • AHUMAN NECESSITIES
    • A23FOODS OR FOODSTUFFS; TREATMENT THEREOF, NOT COVERED BY OTHER CLASSES
    • A23LFOODS, FOODSTUFFS, OR NON-ALCOHOLIC BEVERAGES, NOT COVERED BY SUBCLASSES A21D OR A23B-A23J; THEIR PREPARATION OR TREATMENT, e.g. COOKING, MODIFICATION OF NUTRITIVE QUALITIES, PHYSICAL TREATMENT; PRESERVATION OF FOODS OR FOODSTUFFS, IN GENERAL
    • A23L3/00Preservation of foods or foodstuffs, in general, e.g. pasteurising, sterilising, specially adapted for foods or foodstuffs
    • A23L3/36Freezing; Subsequent thawing; Cooling
    • A23L3/365Thawing subsequent to freezing
    • AHUMAN NECESSITIES
    • A23FOODS OR FOODSTUFFS; TREATMENT THEREOF, NOT COVERED BY OTHER CLASSES
    • A23LFOODS, FOODSTUFFS, OR NON-ALCOHOLIC BEVERAGES, NOT COVERED BY SUBCLASSES A21D OR A23B-A23J; THEIR PREPARATION OR TREATMENT, e.g. COOKING, MODIFICATION OF NUTRITIVE QUALITIES, PHYSICAL TREATMENT; PRESERVATION OF FOODS OR FOODSTUFFS, IN GENERAL
    • A23L5/00Preparation or treatment of foods or foodstuffs, in general; Food or foodstuffs obtained thereby; Materials therefor
    • A23L5/20Removal of unwanted matter, e.g. deodorisation or detoxification
    • AHUMAN NECESSITIES
    • A23FOODS OR FOODSTUFFS; TREATMENT THEREOF, NOT COVERED BY OTHER CLASSES
    • A23LFOODS, FOODSTUFFS, OR NON-ALCOHOLIC BEVERAGES, NOT COVERED BY SUBCLASSES A21D OR A23B-A23J; THEIR PREPARATION OR TREATMENT, e.g. COOKING, MODIFICATION OF NUTRITIVE QUALITIES, PHYSICAL TREATMENT; PRESERVATION OF FOODS OR FOODSTUFFS, IN GENERAL
    • A23L5/00Preparation or treatment of foods or foodstuffs, in general; Food or foodstuffs obtained thereby; Materials therefor
    • A23L5/30Physical treatment, e.g. electrical or magnetic means, wave energy or irradiation
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/08Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields

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  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Nutrition Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Polymers & Plastics (AREA)
  • Electromagnetism (AREA)
  • Physics & Mathematics (AREA)
  • Soil Sciences (AREA)
  • Insects & Arthropods (AREA)
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  • Wood Science & Technology (AREA)
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  • Inverter Devices (AREA)

Abstract

A high-power radio frequency resonance generating device belongs to the technical field of radio frequency generators and solves the problems of small output power, high energy consumption and unstable output frequency of a traditional microwave circuit, the resonance frequency of the primary side and the secondary side of a resonance transformer circuit is kept consistent by adjusting the distance between polar plates of an air capacitor of the polar plates, so that the output power is higher, an input filter circuit is designed at an input end to improve the influence of high-frequency harmonic waves on the circuit, the grid input current of a vacuum electron tube circuit is more stable, and the output power is more stable; the compensation circuit improves the power factor of the circuit and reduces the power consumption; the device has the advantages of compact structure, stable output radio frequency, high power and high energy conversion efficiency; the method is applied to large-scale industrial scenes of food sterilization and disinsection, enzyme inactivation of fresh fruits, quick thawing and the like.

Description

High-power radio frequency resonance generating device
Technical Field
The invention belongs to the technical field of radio frequency generators, and relates to a high-power radio frequency resonance generating device.
Background
The radio frequency is a high-frequency alternating electromagnetic wave with a frequency range of 3-300 MHz. The radio frequency bands permitted in the industry are 13.56,27.12 and 40.68 MHz. The frequency is relatively lower than that of the microwave, so that the microwave oven has a deeper penetrating effect on materials. The radio frequency heating is rapid and uniform, and does not require a temperature differential to force heating. The wet area will absorb more rf power than the dry area and excess moisture will be automatically drained from the wet area, thereby making the moisture distribution more uniform. And the rf power is mainly consumed in the load and does not require long warm-up or cool-down times. Power is consumed only when a load is present and is only proportional to the load. The conventional microwave technology has a short wavelength, and thus the industrial application of the microwave is limited to the application of small-sized products. The radio frequency has longer wavelength, so that the radio frequency can penetrate deep into and even penetrate through compact large-size materials, and the radio frequency can be widely applied to large-size products. At higher frequencies (microwaves), the difference between the loss factors of the various products is generally much smaller than at lower frequencies (radio frequencies). Radio frequency has a higher selectivity when heating products with different chemical, physical and morphological characteristics, so that the heat treatment of different materials is easier to control. Although radio frequency and microwave are energy efficient (about 70%), the operating mode and energy reflection phenomena of microwave devices make their overall energy efficiency about 55%, while radio frequency devices are 60-65%. Thus, energy savings of about 10-15% can be achieved using radio frequency devices compared to corresponding microwave devices. In the prior art, the chinese patent application of side output type rf resonance generator and insecticidal and bactericidal device, having an application publication number of CN109921745A of 21/6/2019, discloses a side output type rf resonance generator, comprising: a high-frequency resonant cavity and a vacuum electronic tube box; the vacuum electron tube box is formed by fixing and sealing a vacuum electron tube by adopting an insulating support and an insulating plate and is positioned in the center of the high-frequency resonant cavity; the high-frequency resonant cavity comprises a box body metal shell, a resonant cavity output polar plate, a resonant regulation capacitor polar plate and an output coupling polar plate. Although this document discloses a radio frequency device, it has the disadvantages of low output power, unstable output frequency, and being not applicable to large-sized material products.
Disclosure of Invention
The invention aims to design a high-power radio frequency resonance generating device and solve the problems of low output power, high energy consumption and unstable output frequency of the traditional microwave circuit.
The invention solves the technical problems through the following technical scheme:
a high power radio frequency resonance generating device comprising: the radio frequency resonance device comprises a radio frequency resonance cavity (10), a radio frequency processing cavity (20), a resonance transformer secondary side inductor (122) and a resonance transformer primary side inductor (123); the secondary side inductor (122) of the resonance transformer and the primary side inductor (123) of the resonance transformer form the resonance transformer; the output end of the radio frequency resonance cavity (10) is connected with the primary side of the resonance transformer, and the input end of the radio frequency processing cavity (20) is connected with the secondary side of the resonance transformer;
the radio frequency resonant cavity (10) comprises: the grid air capacitor (106), the ceramic insulating seat (115), the chassis base plate (128), the first fixed beam (131) and the second fixed beam (132); the four ceramic insulation seats (115) are respectively and fixedly arranged on four corners of a bottom plate (128) of the machine shell, two ends of the first fixed cross beam (131) are fixed between the two ceramic insulation seats (115) along the x-axis direction, and two ends of the second fixed cross beam (132) are fixed between the other two ceramic insulation seats (115) along the x-axis direction; the grid air capacitor (106) is fixed between the first fixed beam (131) and the second fixed beam (132);
the radio frequency processing chamber (20) comprises: outputting a polar plate air capacitor; the output plate air capacitor comprises: a lower polar plate (210), a first upper polar plate (201) and a second upper polar plate (211); the structure of the first upper polar plate (201) is the same as that of the second upper polar plate (211), the first upper polar plate (201) and the second upper polar plate (211) are respectively arranged above the lower polar plate (210) in parallel and symmetrically, the lower polar plate (210) is grounded, and the distance between the lower polar plate (210) and the first upper polar plate (201) as well as the distance between the lower polar plate (210) and the second upper polar plate (211) are adjustable;
the grid air capacitor (106) and the primary side inductor (123) of the resonance transformer jointly form a first LC resonance circuit, the secondary side inductor (122) of the resonance transformer and the output pole plate air capacitor jointly form a second LC resonance circuit, the distance between a lower pole plate (210) in the output pole plate air capacitor and the first upper pole plate (201) and the second upper pole plate (211) is adjusted, the size of the output pole plate air capacitor is changed, and the frequency of the second LC resonance circuit is adjusted to be the same as that of the first resonance circuit.
According to the invention, by adjusting the distance between the polar plates of the polar plate air capacitor, the resonant frequency of the primary side and the secondary side of the resonant transformer circuit is kept consistent, so that the output power is higher, the input filter circuit is designed at the input end, the influence of high-frequency harmonic waves on the circuit is improved, the grid input current of the vacuum electron tube circuit is more stable, and the output power is more stable; the compensation circuit improves the power factor of the circuit and reduces the power consumption; the invention has the advantages of compact structure, stable output radio frequency, high power and high energy conversion efficiency, and is stable in output radio frequency, high in power and high in conversion efficiency, and applied to large-scale industrial scenes such as food sterilization and disinsection, enzyme inactivation of fresh fruits, quick thawing and the like.
As a further improvement of the technical scheme of the invention, the secondary side inductor (122) of the resonance transformer is a half-turn inductor, and the primary side inductor (123) of the resonance transformer is a whole-turn inductor.
As a further improvement of the technical solution of the present invention, the gate air capacitor (106) includes: the solar cell comprises a plurality of first polar plates (1061), a plurality of second polar plates (1062), a side wall aluminum plate (1063), a top aluminum plate (1064) and a bottom aluminum plate (1065); the plurality of first polar plates (1061) and the plurality of second polar plates (1062) are arranged in a staggered and parallel manner, the top ends of the plurality of first polar plates (1061) are fixedly connected with the top aluminum plate (1064), the bottom ends of the first polar plates (1061) are fixedly connected with the bottom aluminum plate (1065), the side surfaces of the plurality of second polar plates (1062) are fixedly connected with the side wall aluminum plate (1063), and the top ends and the bottom ends of the second polar plates (1062) are not contacted with the top aluminum plate (1064) and the bottom aluminum plate (1065); and the bottom aluminum plate of the grid air capacitor (106) is fixed between the first fixed beam (131) and the second fixed beam (132).
As a further improvement of the technical solution of the present invention, the radio frequency resonant cavity (10) further comprises: the device comprises a first filament choke coil (101), a second filament choke coil (102), a filament sleeve (103), a grid sleeve (104), a vacuum electron tube (105), a grid adjusting inductor (107), a first grid inductor (108), a second grid inductor (109), a grid strip connecting copper foil (110), an anode water jacket (114), an insulating support (116), a grid capacitor (117), an anode choke coil (118), an anode filter inductor (119), a first anode filter capacitor (120), a second anode filter capacitor (121), a first anode blocking capacitor (124), a second anode blocking capacitor (125), a third anode blocking capacitor (126), a fourth anode blocking capacitor (127), a shell side plate (129) and a connecting copper plate (130); the vacuum electron tube (105) is arranged in an anode water jacket (114), and the anode water jacket (114) is fixedly arranged on a chassis bottom plate (128) through two insulating brackets (116); the first anode filter capacitor (120) and the second anode filter capacitor (121) are mounted on the side plate (129) of the machine shell, and two ends of the anode filter inductor (119) are respectively connected with the first anode filter capacitor (120) and the second anode filter capacitor (121); one end of the anode choke coil (118) is connected with the top platform of the anode water jacket (114), and the other end of the anode choke coil (118) is connected with the common point of an anode filter inductor (119) and a first anode filter capacitor (120); the filament sleeve (103) is sleeved on a cathode of a vacuum electron tube (105), one ends of the first filament choke coil (101) and the second filament choke coil (102) are connected with a filament power supply, the other ends of the first filament choke coil and the second filament choke coil are connected to the filament sleeve (103) of the vacuum electron tube (105), the grid sleeve (104) is sleeved on a grid of the vacuum electron tube (105), one end of a grid adjusting inductor (107) is connected to the grid sleeve (104), the other end of the grid adjusting inductor (107) is connected with one end of a grid capacitor (117), and the other end of the grid capacitor (117) is connected to an aluminum plate (1064) on the top of the grid air capacitor (106); one ends of the first grid inductor (108) and the second grid inductor (109) are respectively connected to two sides of the grid sleeve (104), and the other ends of the first grid inductor (108) and the second grid inductor (109) are connected together and then connected with the other end of the grid capacitor (117) through a grid strip-shaped connecting copper foil (110); after the first anode blocking capacitor (124) and the second anode blocking capacitor (125) are connected in series, one non-series end is connected to the top platform of the anode water jacket (114), and the other non-series end is connected with the side wall of the grid air capacitor (106) through a connecting copper plate (130); after the third anode blocking capacitor (126) and the fourth anode blocking capacitor (127) are connected in series, one non-series end is connected to a top platform of the anode water jacket (114), and the other non-series end is connected with a side wall aluminum plate (1063) of the grid air capacitor (106) through a connecting copper plate (130); the primary side inductor (123) of the resonance transformer is a whole-turn inductor, one end of the whole-turn inductor is connected with the side wall aluminum plate (1063) of the grid air capacitor (106), the other end of the whole-turn inductor is connected with the bottom aluminum plate (1065) of the grid air capacitor (106), the secondary side inductor (122) of the resonance transformer is a half-turn inductor, and two ends of the half-turn inductor are respectively connected with the radio frequency processing cavity (20).
As a further improvement of the technical scheme of the invention, the radio frequency resonant cavity (10) further comprises: a first balance inductance (111), a second balance inductance (112), and a balance capacitance (113); one end of the first balanced inductor (111) is connected with a bottom aluminum plate (1065) of the grid air capacitor (106) through a first fixed cross beam (131), one end of the second balanced inductor (112) is connected with a secondary side inductor (122) of the resonance transformer, the other ends of the first balanced inductor (111) and the second balanced inductor (112) are connected with one end of a balanced capacitor (113), and the other end of the balanced capacitor (113) is fixedly mounted on a bottom plate (128) of the machine shell.
As a further improvement of the technical solution of the present invention, the rf processing chamber (20) further comprises: a first compensation inductor (203), a second compensation inductor (204), a third compensation inductor (213), a fourth compensation inductor (214), a first output connection copper foil (207), a second output connection copper foil (217), a first inductor connection copper foil (205), a second inductor connection copper foil (206), a third inductor connection copper foil (215), a fourth inductor connection copper foil (216), and an output copper bar (221); the first compensation inductor (203) and the second compensation inductor (204) are symmetrically arranged on the upper surface of the first upper polar plate (201) through a bracket, the first inductance connecting copper foil (205) and the second inductance connecting copper foil (206) are respectively connected with one end of the first compensation inductor (203) and one end of the second compensation inductor (204) correspondingly, the third compensation inductor (213) and the fourth compensation inductor (214) are symmetrically arranged on the upper surface of the second upper polar plate (211) through a bracket, the third inductance connecting copper foil (215) and the fourth inductance connecting copper foil (216) are respectively connected with one end of the first compensation inductor (203) and one end of the second compensation inductor (204) correspondingly, one end of the first output connecting copper foil (207) is connected with the first upper polar plate (201), and the other end of the first output connecting copper foil is connected with one end of the secondary side inductor (122) of the resonance transformer and the output copper bar (221); one end of the second output connecting copper foil (217) is connected with the second upper polar plate (211), and the other end of the second output connecting copper foil is simultaneously connected with the other end of the secondary side inductor (122) of the resonance transformer and the output copper bar (221).
As a further improvement of the technical scheme of the invention, the center positions of the first upper polar plate (201) and the second upper polar plate (211) are respectively provided with a first heat dissipation hole (202) and a second heat dissipation hole (212).
The invention has the advantages that:
according to the invention, by adjusting the distance between the polar plates of the polar plate air capacitor, the resonant frequency of the primary side and the secondary side of the resonant transformer circuit is kept consistent, so that the output power is higher, the input filter circuit is designed at the input end, the influence of high-frequency harmonic waves on the circuit is improved, the grid input current of the vacuum electron tube circuit is more stable, and the output power is more stable; the compensating circuit improves the power factor of the circuit and reduces the power consumption; the invention has the advantages of compact structure, stable output radio frequency, high power and high energy conversion efficiency, and is stable in output radio frequency, high in power and high in conversion efficiency, and applied to large-scale industrial scenes such as food sterilization and disinsection, enzyme inactivation of fresh fruits, quick thawing and the like.
Drawings
FIG. 1 is a front view of a high power RF resonance generator according to an embodiment of the present invention;
FIG. 2 is a front view of the structure of a high power RF resonance generator according to an embodiment of the present invention;
FIG. 3 is a right side view of the structure of the high power RF resonance generating device of the embodiment of the present invention;
FIG. 4 is a structural diagram of a gate air capacitor of a high power RF resonance generating device according to an embodiment of the present invention;
FIG. 5 is a structural diagram of a RF processing chamber of the high power RF resonance generating device according to the embodiment of the present invention;
fig. 6 is a schematic circuit diagram of a high power rf resonance generating device according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The technical scheme of the invention is further described by combining the drawings and the specific embodiments in the specification:
example one
As shown in fig. 1 to 3, a high power rf resonance generating apparatus includes: radio frequency resonant cavity 10, radio frequency processing cavity 20, radio frequency resonant cavity 10 include: a first filament choke coil 101, a second filament choke coil 102, a filament sheath 103, a grid sheath 104, a vacuum tube 105, a grid air capacitor 106, a grid adjustment inductor 107, a first grid inductor 108, a second grid inductor 109, a grid strip connection copper foil 110, a first balance inductor 111, a second balance inductor 112, a balance capacitor 113, an anode water jacket 114, a ceramic insulating base 115, an insulating support 116, the transformer comprises a grid capacitor 117, an anode choke coil 118, an anode filter inductor 119, a first anode filter capacitor 120, a second anode filter capacitor 121, a secondary inductor 122 of a resonance transformer, a primary inductor 123 of the resonance transformer, a first anode blocking capacitor 124, a second anode blocking capacitor 125, a third anode blocking capacitor 126, a fourth anode blocking capacitor 127, a chassis base plate 128, a chassis side plate 129, a connecting copper plate 130, a first fixed beam 131 and a second fixed beam 132. The radio frequency resonance cavity 10 and the radio frequency treatment cavity 20 are both reliably grounded, the radio frequency generated by the frequency resonance generating device is 27.12MHz, the output radio frequency power is 0-100kW and is adjustable, and the device is also provided with a forced air cooling device besides a cooling water path and is used for air circulation and vacuum electron tube cooling. Can be used in the fields of sterilization of low-moisture content food, grain disinsection, enzyme inactivation of vegetables and fruits, quick thawing of meat and aquatic products, and the like.
As shown in fig. 4, the gate air capacitor 106 includes: a plurality of first polar plates 1061, a plurality of second polar plates 1062, a side wall aluminum plate 1063, a top aluminum plate 1064, and a bottom aluminum plate 1065; the plurality of first pole plates 1061 and the plurality of second pole plates 1062 are arranged in a staggered and parallel manner, the top ends of the plurality of first pole plates 1061 are fixedly connected with the top aluminum plate 1064, the bottom ends of the first pole plates 1061 are fixedly connected with the bottom aluminum plate 1065, the side surfaces of the plurality of second pole plates 1062 are fixedly connected with the side wall aluminum plate 1063, and the top ends and the bottom ends of the second pole plates 1062 are not in contact with the top aluminum plate 1064 and the bottom aluminum plate 1065; the capacitance of the gate air capacitor 106 is changed by changing the facing area or gap between the first plate 1061 and the second plate 1062.
The vacuum electron tube 105 is arranged in an anode water jacket 114, and the anode water jacket 114 is fixedly arranged on a chassis bottom plate 128 through two insulating brackets 116; the first anode filter capacitor 120 and the second anode filter capacitor 121 are mounted on the side plate 129 of the casing, and two ends of the anode filter inductor 119 are respectively connected with the first anode filter capacitor 120 and the second anode filter capacitor 121; one end of the anode choke coil 118 is connected with the top platform of the anode water jacket 114, and the other end of the anode choke coil 118 is connected to the common point of the anode filter inductor 119 and the first anode filter capacitor 120; the four ceramic insulation seats 115 are respectively fixedly installed at four corners of the chassis bottom plate 128, two ends of the first fixed beam 131 are fixed between the two ceramic insulation seats 115 along the x-axis direction, two ends of the second fixed beam 132 are fixed between the other two ceramic insulation seats 115 along the x-axis direction, and the grid air capacitor 106 is fixed between the first fixed beam 131 and the second fixed beam 132 through an aluminum plate at the bottom of the grid air capacitor; the filament sleeve 103 is sleeved on the cathode of the vacuum electron tube 105, one end of the first filament choke coil 101 and one end of the second filament choke coil 102 are connected with a filament power supply, the other end of the first filament choke coil 101 and the other end of the second filament choke coil 102 are connected with the filament sleeve 103 of the vacuum electron tube 105, the grid sleeve 104 is sleeved on the grid of the vacuum electron tube 105, one end of the grid regulating inductor 107 is connected with the grid sleeve 104, the other end of the grid regulating inductor 107 is connected with one end of a grid capacitor 117, and the other end of the grid capacitor 117 is connected on an aluminum plate on the top of the grid air capacitor 106; one end of the first grid inductor 108 and one end of the second grid inductor 109 are respectively connected to two sides of the grid sleeve 104, and the other ends of the first grid inductor 108 and the second grid inductor 109 are connected together and then connected with the other end of the grid capacitor 117 through the grid strip connection copper foil 110; after the first anode blocking capacitor 124 and the second anode blocking capacitor 125 are connected in series, one non-series end is connected to the top platform of the anode water jacket 114, and the other non-series end is connected to the side wall of the grid air capacitor 106 through the connecting copper plate 130; after the third anode blocking capacitor 126 and the fourth anode blocking capacitor 127 are connected in series, one non-series end is connected to the top platform of the anode water jacket 114, and the other non-series end is connected to the side wall aluminum plate of the grid air capacitor 106 through the connecting copper plate 130; the primary side inductor 123 of the resonance transformer is a whole-turn inductor, one end of the whole-turn inductor is connected with the side wall aluminum plate of the grid air capacitor 106, the other end of the whole-turn inductor is connected with the bottom aluminum plate of the grid air capacitor 106, the secondary side inductor 122 of the resonance transformer is a half-turn inductor, and two ends of the half-turn inductor are respectively connected with the radio frequency processing cavity 20; one end of the first balanced inductor 111 is connected with the bottom aluminum plate of the grid air capacitor 106 through a first fixed beam 131, one end of the second balanced inductor 112 is connected with the half-turn inductor, the other ends of the first balanced inductor 111 and the second balanced inductor 112 are both connected with one end of the balanced capacitor 113, and the other end of the balanced capacitor 113 is fixedly mounted on the chassis bottom plate 128.
As shown in fig. 3 and 5, the rf processing chamber 20 includes: a lower polar plate 210, a first upper polar plate 201, a second upper polar plate 211, a first compensation inductor 203, a second compensation inductor 204, a third compensation inductor 213, a fourth compensation inductor 214, a first heat dissipation hole 202, a second heat dissipation hole 212, a first output connection copper foil 207, a second output connection copper foil 217, a first inductance connection copper foil 205, a second inductance connection copper foil 206, a third inductance connection copper foil 215, a fourth inductance connection copper foil 216, and an output copper bar 221.
The first upper polar plate 201 and the second upper polar plate 211 have the same structure, the first upper polar plate 201 and the second upper polar plate 211 are respectively arranged above the lower polar plate 210 in parallel and symmetrically, the lower polar plate 210 is grounded, and the distance between the lower polar plate 210 and the first upper polar plate 201 and the distance between the lower polar plate 211 and the first upper polar plate 201 are adjustable; the center positions of the first upper polar plate 201 and the second upper polar plate 211 are respectively provided with a first heat dissipation hole 202 and a second heat dissipation hole 212, and the first heat dissipation hole 202 and the second heat dissipation hole 212 are used for discharging water vapor brought out during heating; the first compensation inductor 203 and the second compensation inductor 204 are symmetrically arranged on the upper surface of the first upper polar plate 201 through a support, the first inductor connecting copper foil 205 and the second inductor connecting copper foil 206 are respectively and correspondingly connected with one ends of the first compensation inductor 203 and the second compensation inductor 204, the third compensation inductor 213 and the fourth compensation inductor 214 are symmetrically arranged on the upper surface of the second upper polar plate 211 through a support, the third inductor connecting copper foil 215 and the fourth inductor connecting copper foil 216 are respectively and correspondingly connected with one ends of the first compensation inductor 203 and the second compensation inductor 204, one end of the first output connecting copper foil 207 is connected with the first upper polar plate 201, and the other end of the first output connecting copper foil is simultaneously connected with one end of a half-turn inductor of the secondary side inductor 122 of the resonance transformer and an output copper rod 221; one end of the second output connecting copper foil 217 is connected with the second upper polar plate 211, and the other end is simultaneously connected with the other end of the half-turn inductor of the secondary side inductor 122 of the resonance transformer and the output copper bar 221.
As shown in fig. 6, which is a schematic circuit diagram of the high-power rf resonance generating device according to the embodiment of the present invention, the anode high-voltage input is filtered by the anode feedthrough capacitor Z1, the anode filter inductor L13, and the anode filter capacitor C11, and then transmitted to the anode of the vacuum electron tube V through the anode choke coil L1, and meanwhile, four anode dc blocking capacitors C1, C2, C3, and C4 are connected between the anode of the vacuum electron tube V and the resonant circuit, so as to isolate the dc component from the resonant circuit. The gate input signal is filtered by the gate filter inductor L12 and the gate filter capacitor C8, and then connected to the resonant circuit through the gate feedthrough capacitor Z2 and the gate choke L4. Filament chokes L5 and L6 are respectively connected in series at two ends of the filament power supply, and one end of the filament chokes is connected with the cathode of the vacuum electron tube through a filament feedthrough capacitor Z3. The anode of the vacuum electron tube V provides power for the resonant circuit, and radio frequency power is output after passing through the resonant circuit. A grid adjustable inductor L7 and a grid capacitor C6 are connected between the cathode and the grid of the vacuum electron tube V, L8 and L9 jointly form a resonance transformer, L8 is a primary side inductor, L9 is a secondary side inductor, the resonance transformer has high working frequency, generally has no magnetic core, and the magnetic fluxes of the two coils are different, so that the two coils do not need to be closely closed or aligned, and radio frequency power is transmitted from the primary side inductor L8 to the secondary side inductor L9; c5 and L8 jointly form a first LC resonance circuit, L9 and an output pole plate air capacitor C12 jointly form a second LC resonance circuit, the size of the output pole plate air capacitor C12 can be changed along with the rising and the lowering of the pole plate in the output pole plate air capacitor C12 and the change of the load in the pole plate, the sizes of a compensation capacitor and a compensation inductor are adjusted, the frequency of the second LC resonance circuit is adjusted to be the same as that of the first resonance circuit, the output radio frequency is 27.12MHz, and the output radio frequency power is 0-100kW and can be adjusted.
The size of the distance between the polar plates of the polar plate air capacitor is adjusted, and the size of the compensation capacitor and the compensation inductor are adjusted, so that the resonant frequency of the primary side and the secondary side of the resonant transformer circuit is kept consistent, the output power is higher, the input filter circuit is designed at the input end, the influence of high-frequency harmonic waves on the circuit is improved, the grid input current of the vacuum electron tube circuit is more stable, and the output power is more stable; the compensation circuit improves the power factor of the circuit and reduces the power consumption; the device has the advantages of compact structure, stable output radio frequency, high power and high energy conversion efficiency.
The working principle of the device is as follows:
the anode high voltage input is filtered by a filter composed of an anode filter inductor 119, a first anode filter capacitor 120 and a second anode filter capacitor 121 and then is transmitted to the anode of the vacuum electron tube 105 through an anode choke coil 118, and meanwhile, a first anode blocking capacitor 124, a second anode blocking capacitor 125, a third anode blocking capacitor 126 and a fourth anode blocking capacitor 127 are connected between the anode of the vacuum electron tube 105 and the resonant circuit, so that the direct current component is isolated from the resonant circuit; a first filament choke coil 101 and a second filament choke coil 102 are respectively connected in series at two ends of the filament power supply, and are connected with the cathode of the vacuum electron tube 105 to supply power to the vacuum electron tube 105, and a grid control signal of the vacuum electron tube 105 is input into the grid sleeve 104; the anode of the vacuum electron tube 105 supplies power to the resonance circuit, and outputs radio frequency power after resonance. A grid regulating inductor 107 and a grid capacitor 117 are connected between the cathode and the grid of the vacuum electron tube 105, a resonance transformer is formed by the resonance transformer secondary side inductor 122 and the resonance transformer primary side inductor 123, the resonance transformer has high working frequency, generally, no magnetic core is arranged, and the magnetic fluxes of the two coils are different, so that the two coils do not need to be closely closed or aligned, and the radio frequency power is transmitted to the resonance transformer secondary side inductor 122 from the resonance transformer primary side inductor 123; the grid air capacitor 106 and the resonance transformer primary side inductor 123 jointly form a first LC resonance circuit, the resonance transformer secondary side inductor 122 and the output electrode plate air capacitor jointly form a second LC resonance circuit, the size of the output electrode plate air capacitor can be changed along with the rising and the falling of an electrode plate in the output electrode plate air capacitor and the change of load in the electrode plate, the frequency of the second LC resonance circuit is adjusted to be consistent with that of the first resonance circuit, the output radio frequency is 27.12MHz, and the output radio frequency power is 0-100kW and is adjustable.
The grid capacitor in the first resonant circuit is an air capacitor and is composed of a plurality of groups of polar plates, so that the withstand voltage is higher, and the current passing capacity is higher; c5, L8 and L9 in the first resonant circuit and the second resonant circuit are all cooled by water, so that the problem of heat dissipation in a high-power state is solved; the grid inductors are arranged on two sides of the electronic tube in a parallel connection mode, grid current is stabilized, and therefore output power is stabilized by the L10, the L11 and the C7 to reduce parasitic oscillation in the resonant circuit.
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (7)

1. A high power radio frequency resonance generating device, comprising: the radio frequency resonance device comprises a radio frequency resonance cavity (10), a radio frequency processing cavity (20), a resonance transformer secondary side inductor (122) and a resonance transformer primary side inductor (123); the secondary side inductor (122) of the resonance transformer and the primary side inductor (123) of the resonance transformer form the resonance transformer; the output end of the radio frequency resonance cavity (10) is connected with the primary side of the resonance transformer, and the input end of the radio frequency processing cavity (20) is connected with the secondary side of the resonance transformer;
the radio frequency resonant cavity (10) comprises: the grid air capacitor (106), the ceramic insulating seat (115), the chassis base plate (128), the first fixed beam (131) and the second fixed beam (132); the four ceramic insulation seats (115) are respectively and fixedly arranged on four corners of a bottom plate (128) of the machine shell, two ends of the first fixed cross beam (131) are fixed between the two ceramic insulation seats (115) along the x-axis direction, and two ends of the second fixed cross beam (132) are fixed between the other two ceramic insulation seats (115) along the x-axis direction; the grid air capacitor (106) is fixed between the first fixed beam (131) and the second fixed beam (132);
the radio frequency processing chamber (20) comprises: outputting a polar plate air capacitor; the output plate air capacitor comprises: a lower polar plate (210), a first upper polar plate (201) and a second upper polar plate (211); the structure of the first upper polar plate (201) is the same as that of the second upper polar plate (211), the first upper polar plate (201) and the second upper polar plate (211) are respectively arranged above the lower polar plate (210) in parallel and symmetrically, the lower polar plate (210) is grounded, and the distance between the lower polar plate (210) and the first upper polar plate (201) as well as the distance between the lower polar plate (210) and the second upper polar plate (211) are adjustable;
the grid air capacitor (106) and the primary side inductor (123) of the resonance transformer jointly form a first LC resonance circuit, the secondary side inductor (122) of the resonance transformer and the output pole plate air capacitor jointly form a second LC resonance circuit, the distance between a lower pole plate (210) in the output pole plate air capacitor and the first upper pole plate (201) and the second upper pole plate (211) is adjusted, the size of the output pole plate air capacitor is changed, and the frequency of the second LC resonance circuit is adjusted to be the same as that of the first resonance circuit.
2. The high power rf resonance generating device as claimed in claim 1, wherein the secondary side inductor (122) of the resonance transformer is a half turn inductor, and the primary side inductor (123) of the resonance transformer is a full turn inductor.
3. A high power rf resonance generating device as claimed in claim 1, wherein said gate air capacitor (106) comprises: the solar cell comprises a plurality of first polar plates (1061), a plurality of second polar plates (1062), a side wall aluminum plate (1063), a top aluminum plate (1064) and a bottom aluminum plate (1065); the plurality of first polar plates (1061) and the plurality of second polar plates (1062) are arranged in a staggered and parallel manner, the top ends of the plurality of first polar plates (1061) are fixedly connected with the top aluminum plate (1064), the bottom ends of the first polar plates (1061) are fixedly connected with the bottom aluminum plate (1065), the side surfaces of the plurality of second polar plates (1062) are fixedly connected with the side wall aluminum plate (1063), and the top ends and the bottom ends of the second polar plates (1062) are not contacted with the top aluminum plate (1064) and the bottom aluminum plate (1065); and the bottom aluminum plate of the grid air capacitor (106) is fixed between the first fixed beam (131) and the second fixed beam (132).
4. A high power rf resonance generating device according to claim 3, wherein said rf resonance chamber (10) further comprises: the device comprises a first filament choke coil (101), a second filament choke coil (102), a filament sleeve (103), a grid sleeve (104), a vacuum electron tube (105), a grid adjusting inductor (107), a first grid inductor (108), a second grid inductor (109), a grid strip connecting copper foil (110), an anode water jacket (114), an insulating support (116), a grid capacitor (117), an anode choke coil (118), an anode filter inductor (119), a first anode filter capacitor (120), a second anode filter capacitor (121), a first anode blocking capacitor (124), a second anode blocking capacitor (125), a third anode blocking capacitor (126), a fourth anode blocking capacitor (127), a shell side plate (129) and a connecting copper plate (130); the vacuum electron tube (105) is arranged in an anode water jacket (114), and the anode water jacket (114) is fixedly arranged on a chassis bottom plate (128) through two insulating brackets (116); the first anode filter capacitor (120) and the second anode filter capacitor (121) are mounted on the side plate (129) of the machine shell, and two ends of the anode filter inductor (119) are respectively connected with the first anode filter capacitor (120) and the second anode filter capacitor (121); one end of the anode choke coil (118) is connected with the top platform of the anode water jacket (114), and the other end of the anode choke coil (118) is connected with the common point of an anode filter inductor (119) and a first anode filter capacitor (120); the filament sleeve (103) is sleeved on a cathode of a vacuum electron tube (105), one ends of the first filament choke coil (101) and the second filament choke coil (102) are connected with a filament power supply, the other ends of the first filament choke coil and the second filament choke coil are connected to the filament sleeve (103) of the vacuum electron tube (105), the grid sleeve (104) is sleeved on a grid of the vacuum electron tube (105), one end of a grid adjusting inductor (107) is connected to the grid sleeve (104), the other end of the grid adjusting inductor (107) is connected with one end of a grid capacitor (117), and the other end of the grid capacitor (117) is connected to an aluminum plate (1064) on the top of the grid air capacitor (106); one ends of the first grid inductor (108) and the second grid inductor (109) are respectively connected to two sides of the grid sleeve (104), and the other ends of the first grid inductor (108) and the second grid inductor (109) are connected together and then connected with the other end of the grid capacitor (117) through a grid strip-shaped connecting copper foil (110); after the first anode blocking capacitor (124) and the second anode blocking capacitor (125) are connected in series, one non-series end is connected to the top platform of the anode water jacket (114), and the other non-series end is connected with the side wall of the grid air capacitor (106) through a connecting copper plate (130); after the third anode blocking capacitor (126) and the fourth anode blocking capacitor (127) are connected in series, one non-series end is connected to a top platform of the anode water jacket (114), and the other non-series end is connected with a side wall aluminum plate (1063) of the grid air capacitor (106) through a connecting copper plate (130); the primary side inductor (123) of the resonance transformer is a whole-turn inductor, one end of the whole-turn inductor is connected with the side wall aluminum plate (1063) of the grid air capacitor (106), the other end of the whole-turn inductor is connected with the bottom aluminum plate (1065) of the grid air capacitor (106), the secondary side inductor (122) of the resonance transformer is a half-turn inductor, and two ends of the half-turn inductor are respectively connected with the radio frequency processing cavity (20).
5. A high power RF resonance generating device according to claim 4, wherein said RF resonance chamber (10) further comprises: a first balance inductance (111), a second balance inductance (112), and a balance capacitance (113); one end of the first balanced inductor (111) is connected with a bottom aluminum plate (1065) of the grid air capacitor (106) through a first fixed cross beam (131), one end of the second balanced inductor (112) is connected with a secondary side inductor (122) of the resonance transformer, the other ends of the first balanced inductor (111) and the second balanced inductor (112) are connected with one end of a balanced capacitor (113), and the other end of the balanced capacitor (113) is fixedly mounted on a bottom plate (128) of the machine shell.
6. The high power rf resonance generating device as claimed in claim 5, wherein said rf processing chamber (20) further comprises: a first compensation inductor (203), a second compensation inductor (204), a third compensation inductor (213), a fourth compensation inductor (214), a first output connection copper foil (207), a second output connection copper foil (217), a first inductor connection copper foil (205), a second inductor connection copper foil (206), a third inductor connection copper foil (215), a fourth inductor connection copper foil (216), and an output copper bar (221); the first compensation inductor (203) and the second compensation inductor (204) are symmetrically arranged on the upper surface of the first upper polar plate (201) through a bracket, the first inductance connecting copper foil (205) and the second inductance connecting copper foil (206) are respectively connected with one end of the first compensation inductor (203) and one end of the second compensation inductor (204) correspondingly, the third compensation inductor (213) and the fourth compensation inductor (214) are symmetrically arranged on the upper surface of the second upper polar plate (211) through a bracket, the third inductance connecting copper foil (215) and the fourth inductance connecting copper foil (216) are respectively connected with one end of the first compensation inductor (203) and one end of the second compensation inductor (204) correspondingly, one end of the first output connecting copper foil (207) is connected with the first upper polar plate (201), and the other end of the first output connecting copper foil is connected with one end of the secondary side inductor (122) of the resonance transformer and the output copper bar (221); one end of the second output connecting copper foil (217) is connected with the second upper polar plate (211), and the other end of the second output connecting copper foil is simultaneously connected with the other end of the secondary side inductor (122) of the resonance transformer and the output copper bar (221).
7. The high power RF resonance generating device according to claim 6, wherein the first top plate (201) and the second top plate (211) have a first heat dissipating hole (202) and a second heat dissipating hole (212) at their central positions, respectively.
CN202210236172.3A 2022-03-10 2022-03-10 High-power radio frequency resonance generating device Pending CN114614769A (en)

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