CN114603731B - Wire wheel of multi-wire cutting machine - Google Patents

Wire wheel of multi-wire cutting machine Download PDF

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Publication number
CN114603731B
CN114603731B CN202210327353.7A CN202210327353A CN114603731B CN 114603731 B CN114603731 B CN 114603731B CN 202210327353 A CN202210327353 A CN 202210327353A CN 114603731 B CN114603731 B CN 114603731B
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China
Prior art keywords
wire wheel
wire
shaft
spring
gland
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CN202210327353.7A
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CN114603731A (en
Inventor
靳永吉
吕磊
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Beijing Semiconductor Equipment Institute
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Beijing Semiconductor Equipment Institute
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Priority to CN202210327353.7A priority Critical patent/CN114603731B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades

Abstract

The invention provides a wire wheel of a multi-wire cutting machine, which comprises a wire wheel shaft, a wire wheel, a positioning gland, a set screw, a compression spring and a spring pressing seat; the proximal end of the wire wheel shaft is used for being connected with a driving main shaft, and the distal end of the wire wheel shaft is provided with a positioning gland; the spring pressing seat is arranged in the wire wheel shaft and can move along the axis direction of the wire wheel shaft; the proximal end and the distal end of the compression spring are respectively abutted against the spring compression seat and the wire wheel shaft; the set screw passes through the positioning gland and the wire wheel shaft and is then in threaded connection with the spring pressing seat; the proximal end of the wire wheel shaft is provided with a conical boss, and the positioning gland is in a conical shape; the wire wheel is coaxially sleeved on the outer side of the wire wheel shaft, and two ends of the wire wheel are respectively in fit connection with the conical surface of the conical boss and the conical surface of the positioning gland. According to the wire wheel of the multi-wire cutting machine, the positioning gland is elastically pressed and fixed on the wire wheel shaft through the set screw, the pressing spring and the spring pressing seat, and the locking and anti-locking functions of the wire wheel are realized by utilizing the two conical surface structures, so that the wire wheel is beneficial to high-speed forward and reverse winding and unwinding.

Description

Wire wheel of multi-wire cutting machine
Technical Field
The invention relates to the technical field of cutting machines, in particular to a wire wheel of a multi-wire cutting machine.
Background
Currently, the cutting of the third generation semiconductor material silicon carbide is mainly performed by a diamond multi-wire cutting machine. The diamond multi-wire cutting machine is provided with an automatic wire collecting system and a wire releasing system, and is characterized in that the wire winding system is required to rotate at a high speed in a forward and reverse direction frequently for a long time in practical application, so that bolts are easy to be blocked, the existing wire winding structure is easy to lock and has a locking function, the locking function with an anti-locking function is poor, the disassembly is inconvenient, the wire winding is difficult to replace, and the wire winding is not stable and reliable enough.
Disclosure of Invention
The invention aims to provide a wire wheel of a multi-wire cutting machine, which is helpful for solving the technical problems.
The invention is realized in the following way:
a wire wheel of a multi-wire cutting machine comprises a wire wheel shaft, a wire wheel, a positioning gland, a set screw, a compression spring and a spring pressing seat; the proximal end of the spool shaft is used for being connected with a driving main shaft, and the distal end of the spool shaft is provided with the positioning gland; the spring pressing seat is arranged in the wheel axle and can move along the axis direction of the wheel axle; the proximal end of the compression spring is abutted against the spring pressing seat, and the distal end of the compression spring is abutted against the wire wheel shaft; the set screw passes through the positioning gland and the spool shaft and then is in threaded connection with the spring pressing seat; the proximal end of the wire wheel shaft is provided with a conical boss, and the positioning gland is in a frustum shape; the small-caliber end of the conical boss and the small-caliber end of the positioning gland are arranged oppositely; the wire wheel is coaxially sleeved on the outer side of the wire wheel shaft, and two ends of the wire wheel are respectively in fit connection with the conical surface of the conical boss and the conical surface of the positioning gland.
When the wire wheel of the multi-wire cutting machine is used, the combined structure of the set screw, the compression spring and the spring compression seat is used for realizing the elastic tightness adjustment of the positioning gland and the wire wheel shaft, the larger the compression elasticity is, the two opposite conical surface clamping structures are used for assisting, the two opposite conical surface clamping structures are used for almost approaching to rigid fixed connection to realize the locking function, and in the forward and reverse rotation actions of the wire wheel, the wire wheel can be prevented from being locked by utilizing an elastic compression mode.
Further, the compression spring is a belleville spring, the spring pressing seat is cylindrical and is coaxially arranged with the wire wheel shaft, and the belleville spring is sleeved on the outer side of the spring pressing seat. The technical effects are as follows: compared with the conventional spiral pressure spring, the disc spring has high rigidity, strong buffering and vibration absorbing capacity, can bear large load with small deformation, has strong mounting and use stability, and is suitable for occasions with small axial space requirement and large load requirement.
Further, a front guide seat is fixedly arranged at the distal end of the wire wheel shaft, and the front guide seat seals the inner cavity of the wire wheel shaft, so that a containing cavity for the movement of the spring pressing seat is formed in the wire wheel shaft. The technical effects are as follows: the front guide seat and the hub with the cavity are utilized to form the accommodating cavity, so that the disassembly, assembly and maintenance of the spring pressing seat and the compression spring are facilitated.
Further, the two ends of the spring pressing seat are respectively provided with a bushing, and the spring pressing seat is respectively connected with the wire wheel shaft and the front guide seat through the two bushings. The technical effects are as follows: the bushing can reduce abrasion and vibration, and reduces the negative influence of the fine vibration of the spring pressing seat and the compression spring on the wire wheel in the using process.
Further, a guide sleeve is further arranged between the spool shaft and the spool, and the inner wall and the outer wall of the guide sleeve are respectively attached to and connected with the spool shaft and the spool. The technical effects are as follows: the guide sleeve is favorable for positioning and assembling the spool and the spool.
Further, a poking shaft pin is arranged between the spool shaft and the spool. The technical effects are as follows: the shift pin is used for torque transmission between the spool and the spool.
Further, the device also comprises a driving main shaft, a bearing seat and a front bearing gland; the driving main shaft and the bearing seat are coaxially arranged, and the bearing is arranged between the driving main shaft and the bearing seat; the front bearing pressure cover is sleeved outside the far end of the driving main shaft; and an airtight structure is arranged on the inner wall of the front bearing gland. The technical effects are as follows: the front bearing gland is arranged at the far end of the driving main shaft and is positioned at one side close to the wire wheel and the wire wheel shaft, so that water vapor and slag particles can be prevented from entering the bearing to damage the bearing.
Further, the driving main shaft is a stepped shaft, and the diameter of the driving main shaft at the front bearing gland is different from the diameter of the driving main shaft at the bearing. The technical effects are as follows: the stepped shaft forms contact surfaces with different layers in the radial direction, so that a better sealing effect is achieved; meanwhile, the drive main shaft is respectively different in diameter along the axial direction, so that the positioning of structures such as a bearing, a gasket and the like is facilitated.
Further, a main shaft lock nut is arranged at the proximal end of the driving main shaft; the diameter of the driving main shaft at the bearing is larger than the diameter of the driving main shaft at the main shaft locking nut. The technical effects are as follows: the main shaft lock nut is arranged at the proximal end with smaller diameter of the driving main shaft, and is matched with the elastic compression function of the wire wheel shaft, so that the main shaft lock nut is not easy to lock and has higher positioning reliability.
Further, the near end of the driving main shaft is also provided with a dustproof sealing ring and a rear bearing gland; the rear bearing gland penetrates through the driving main shaft and plugs the bearing seat, and the dustproof sealing ring is arranged between the driving main shaft and the rear bearing gland. The technical effects are as follows: the dustproof sealing ring and the rear bearing gland are plugged at the proximal end of the driving main shaft and are matched with the front bearing gland at the distal end of the driving main shaft and the airtight structure of the front bearing gland, so that external impurities are prevented from entering the driving main shaft to interfere with the normal operation of the bearing.
The beneficial effects of the invention are as follows:
according to the wire wheel of the multi-wire cutting machine, the positioning gland is elastically pressed and fixed on the wire wheel shaft through the set screw, the pressing spring and the spring pressing seat, and the locking and anti-locking functions of the wire wheel are realized by utilizing the two conical surface structures, so that the wire wheel is beneficial to high-speed forward and reverse winding and unwinding.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic diagram of the outline structure of a wire wheel of a multi-wire cutting machine provided by the invention;
fig. 2 is an axial side view of a multi-wire saw wire wheel provided by the invention;
fig. 3 is a cross-sectional view taken along A-A in fig. 2.
Icon: 110-line wheel axle; 111-conical boss; 112-a front guide seat; 120-line wheel; 130-positioning the gland; 140-set screw; 150-compressing a spring; 160-spring pressing seat; 170-a bushing; 180-guiding sleeve; 190-a poking shaft pin; 210-driving a spindle; 220-bearings; 230-bearing seat; 240-front bearing gland; 241-airtight structure; 250-main shaft locking nut; 260-dustproof sealing ring; 270-rear bearing gland.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It will be apparent that the described embodiments are some, but not all, embodiments of the invention. The components of the embodiments of the present invention, as generally described and illustrated in the figures, can be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present invention, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present invention and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal," "vertical," "overhang," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Some embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following embodiments and features of the embodiments may be combined with each other without conflict.
Fig. 1 is a schematic diagram of the outline structure of a wire wheel of a multi-wire cutting machine provided by the invention; fig. 2 is an axial side view of a multi-wire saw wire wheel provided by the invention; fig. 3 is a cross-sectional view taken along A-A in fig. 2. Referring to fig. 1 to 3, the present embodiment provides a wire wheel of a multi-wire saw, which includes a wire wheel shaft 110, a wire wheel 120, a positioning gland 130, a set screw 140, a compression spring 150 and a spring holder 160.
Wherein, the proximal end of the hub 110 is used for connecting with the driving main shaft 210, and the distal end of the hub 110 is provided with a positioning gland 130; the spring pressing seat 160 is disposed in the wire axle 110 and is movable in the axial direction of the wire axle 110; the proximal end of the hold-down spring 150 abuts the spring hold-down seat 160 and the distal end of the hold-down spring 150 abuts the wire axle 110; the set screw 140 passes through the positioning gland 130, the hub 110 and then is threaded with the spring retainer 160.
In addition, a conical boss 111 is arranged at the proximal end of the hub 110, and the positioning gland 130 is in a frustum shape; the small-caliber end of the conical boss 111 and the small-caliber end of the positioning gland 130 are oppositely arranged; the wire wheel 120 is coaxially sleeved on the outer side of the wire wheel shaft 110, and two ends of the wire wheel 120 are respectively attached to the conical surface of the conical boss 111 and the conical surface of the positioning gland 130.
In the above structure, the proximal end of the spool shaft 110 is connected to the driving spindle 210, so as to input rotational torque from the driving spindle 210 and drive the outer spool 120 to rotate forward and backward.
In the above-described structure, the spring holder 160 is built in the hub 110 (cannot be automatically separated from the hub 110 after being mounted), and the spring holder 160 has a certain degree of freedom of movement in the axial direction of the hub 110. And two ends of the compression spring 150 are respectively used for abutting against the spring pressing seat 160 and the wire wheel shaft 110, and the deformation of the compression spring 150 can be adjusted by adjusting the screw depth of the set screw 140 and the spring pressing seat 160, so as to adjust the elasticity of the compression spring 150, thereby realizing the elastic compression adjustment of the positioning gland 130 and the wire wheel shaft 110.
In addition, the clamping action of the conical boss 111 and the conical positioning gland 130 is added, so that the wire wheel 120 and the wire wheel shaft 110 have the double functions of locking and anti-locking.
Alternatively, the taper angle between the taper boss 111 and the positioning gland 130 may be between 15 degrees and 45 degrees, and preferably is set to 30 degrees.
The working principle and the operation method of the wire wheel of the multi-wire cutting machine in the embodiment are as follows:
when the multi-wire cutting machine wire wheel is used, the combined structure of the set screw 140, the compression spring 150 and the spring pressing seat 160 is utilized to realize the elastic tightness adjustment of the positioning gland 130 and the wire wheel shaft 110, the more the compression elasticity is, the two opposite conical surface clamping structures are adopted, the locking function can be almost realized by approaching to rigid fixed connection, and in the forward and reverse rotation actions of the wire wheel 120, the wire wheel can be prevented from being locked by utilizing an elastic compression mode. According to actual tests, the wire wheel of the multi-wire cutting machine can not loosen when the linear speed reaches 1500 m/min; the device has the functions of high-speed forward and reverse wire winding, paying-off and anti-loosening and anti-locking, and has the advantages of simple and novel structure, stability and reliability, and convenience in quick wire replacement operation.
In at least one preferred embodiment, further, as shown in fig. 3, the compression spring 150 is a belleville spring, and the spring holder 160 is cylindrical and is disposed coaxially with the hub 110, and the belleville spring is sleeved outside the spring holder 160. Of course, the belleville springs can also be replaced by helical compression springs with larger elastic coefficients.
In at least one preferred embodiment, further, as shown in fig. 1-3, the distal end of the hub 110 is fixedly provided with a leading seat 112, the leading seat 112 sealing off the inner cavity of the hub 110, such that a receiving cavity for movement of the spring press 160 is formed in the hub 110. The spring pressing seat 160 is cylindrical and is coaxially disposed with the hub 110, and the inner cavity of the hub 110 is also a cylindrical cavity, so the accommodating cavity is also preferably a cylindrical cavity, and the inner diameter of the accommodating cavity is larger than the inner cavity of the hub 110, so as to allow the spring pressing seat 160 to be provided with a baffle ring for installing a belleville spring.
In at least one preferred embodiment, further, as shown in fig. 3, the two ends of the spring pressing seat 160 are respectively provided with a bushing 170, and the spring pressing seat 160 is respectively connected with the hub 110 and the front guide seat 112 through two bushings 170.
In at least one preferred embodiment, further, as shown in fig. 3, a guiding sleeve 180 is further provided between the wire wheel axle 110 and the wire wheel 120, and the inner wall and the outer wall of the guiding sleeve 180 are respectively attached to the wire wheel axle 110 and the wire wheel 120. Preferably, the outer contour of the guide sleeve 180 should also be configured as a truncated cone.
In at least one preferred embodiment, further, as shown in FIGS. 1-3, a dial pin 190 is also provided between the spool shaft 110 and the spool 120.
In at least one preferred embodiment, further, as shown in FIGS. 1-3, further comprises a drive spindle 210, a bearing 220, a bearing housing 230, and a front bearing gland 240; the driving main shaft 210 and the bearing seat 230 are coaxially arranged, and a bearing 220 is arranged between the driving main shaft 210 and the bearing seat 230; the front bearing gland 240 is sleeved outside the distal end of the drive spindle 210; an airtight structure 241 is provided on the inner wall of the front bearing cover 240.
In at least one preferred embodiment, further, as shown in FIG. 3, the drive spindle 210 is a stepped shaft, with the diameter of the drive spindle 210 at the front bearing gland 240 being different from the diameter of the drive spindle 210 at the bearing 220.
In at least one preferred embodiment, further, as shown in FIG. 3, the proximal end of drive spindle 210 is also provided with a spindle lock nut 250; the diameter of the drive spindle 210 at the bearing 220 is greater than the diameter of the drive spindle 210 at the spindle lock 250.
In at least one preferred embodiment, further, as shown in fig. 1-3, the proximal end of drive spindle 210 is further provided with a dust seal 260 and a rear bearing gland 270; a rear bearing gland 270 extends through the drive spindle 210 and blocks the bearing housing 230, and a dust seal 260 is disposed between the drive spindle 210 and the rear bearing gland 270.
In summary, the whole assembly structure and the installation procedure of the wire wheel of the multi-wire cutting machine are as follows: first, after the first bearing 220 is mounted on the bearing housing 230, the front bearing cover 240 is sealed with a screw-fixing band. The drive spindle 210 is then installed, with the spacer between the two bearings 220, the second bearing 220, the gasket, and the locking spindle lock nut 250 installed upside down. The rear bearing cover 270 is fixed on the bearing seat 230 by bolts, and then the dustproof sealing ring 260 is installed. Then, the above-mentioned whole structure is inverted, the dial pin 190 is mounted on the hub 110, the guide sleeve 180 is inserted, the first bush 170, the spring holder 160 and the belleville spring are mounted, and the front guide 112 with the second bush 170 is mounted on the hub 110 and fixed by screws. The front end of the wheel axle 110 is detected by a dial indicator, and the diameter jump is smaller than 0.015mm. Finally, the wire wheel and the positioning gland 130 are installed, and the positioning gland 130 is fixed by screwing the bolt. Finally, the driving spindle 210 is manually rotated, so that the driving spindle 210 can flexibly rotate without clamping stagnation, and the line system is assembled.
The new wire wheel replacement process comprises the following steps: after the equipment is installed, unscrewing the bolts to remove the positioning gland 130, and removing the wire wheel; the line wheel is changed into a line wheel fully wound with a new line, the line wheel is arranged on the paying-off wheel shaft 110, the positioning gland 130 is arranged, the bolt is screwed with 40 kg of moment, and the new line wheel is changed.
Before the multi-wire cutting machine wire wheel starts to work, firstly, an air source is opened to prevent dust and water mist from entering the driving main shaft 210 to damage the bearing 220, and when the driving main shaft 210 rotates at a high speed, the bearing of the wire wheel shaft 110 is prevented from being damaged by means of air seal and labyrinth seal, so that the long-term stable operation of the wire wheel shaft 110 is ensured.
The wire unloading wheel comprises the following procedures: after the silicon carbide bar is cut, the wire wheel fully wound with the waste wire needs to be disassembled, and the steps are as follows: unscrewing the bolts, removing the positioning gland 130, pulling out and removing the wire wheel, simultaneously replacing the wire wheel with a new wire wheel, installing the positioning gland 130, screwing the bolts to fix the positioning gland 130, and waiting for cutting after the new wire wheel 120 is installed.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (7)

1. The wire wheel of the multi-wire cutting machine is characterized by comprising a wire wheel shaft (110), a wire wheel (120), a positioning gland (130), a set screw (140), a compression spring (150) and a spring pressing seat (160);
the proximal end of the wire wheel shaft (110) is used for being connected with a driving main shaft (210), and the distal end of the wire wheel shaft (110) is provided with the positioning gland (130); the spring pressing seat (160) is arranged in the hub (110) and can move along the axis direction of the hub (110); the proximal end of the compression spring (150) is abutted against the spring pressing seat (160), and the distal end of the compression spring (150) is abutted against the wire wheel shaft (110); the set screw (140) passes through the positioning gland (130), the wire wheel shaft (110) and then is in threaded connection with the spring pressure seat (160);
the proximal end of the spool shaft (110) is provided with a conical boss (111), and the positioning gland (130) is in a frustum shape; the small-caliber end of the conical boss (111) and the small-caliber end of the positioning gland (130) are oppositely arranged; the wire wheel (120) is coaxially sleeved on the outer side of the wire wheel shaft (110), and two ends of the wire wheel (120) are respectively connected with the conical surface of the conical boss (111) and the conical surface of the positioning gland (130) in a fitting manner;
the compression spring (150) is a belleville spring, the spring pressing seat (160) is cylindrical and is coaxially arranged with the wire wheel shaft (110), and the belleville spring is sleeved on the outer side of the spring pressing seat (160);
a front guide seat (112) is fixedly arranged at the distal end of the spool shaft (110), and the front guide seat (112) seals an inner cavity of the spool shaft (110) so that a containing cavity for moving the spring pressing seat (160) is formed in the spool shaft (110);
the device also comprises a driving main shaft (210), a bearing seat (230) and a front bearing gland (240); the driving main shaft (210) and the bearing seat (230) are coaxially arranged, and the bearing is arranged between the driving main shaft (210) and the bearing seat (230); the front bearing gland (240) is sleeved outside the far end of the driving main shaft (210); an airtight structure (241) is arranged on the inner wall of the front bearing gland (240).
2. The multi-wire cutting machine wire wheel according to claim 1, wherein the two ends of the spring pressing seat (160) are respectively provided with a bushing (170), and the spring pressing seat (160) is respectively connected with the wire wheel shaft (110) and the front guide seat (112) through the two bushings (170).
3. The multi-wire cutting machine wire wheel according to claim 2, wherein a guide sleeve (180) is further arranged between the wire wheel shaft (110) and the wire wheel (120), and the inner wall and the outer wall of the guide sleeve (180) are respectively in fit connection with the wire wheel shaft (110) and the wire wheel (120).
4. A multi-wire cutting machine reel according to claim 3, characterized in that a dial pin (190) is also provided between the reel axle (110) and the reel (120).
5. The multi-wire cutting machine reel according to claim 1, wherein the drive spindle (210) is a stepped shaft, the diameter of the drive spindle (210) at the front bearing gland (240) being different from the diameter of the drive spindle (210) at the bearing.
6. The multi-wire cutting machine reel according to claim 5, wherein the proximal end of the drive spindle (210) is further provided with a spindle lock nut (250); the diameter of the drive spindle (210) at the bearing is greater than the diameter of the drive spindle (210) at the spindle lock (250).
7. The multi-wire cutting machine reel according to claim 5, wherein the proximal end of the drive spindle (210) is further provided with a dust seal ring (260) and a rear bearing gland (270); the rear bearing gland (270) penetrates the drive spindle (210) and seals the bearing seat (230), and the dust seal ring (260) is arranged between the drive spindle (210) and the rear bearing gland (270).
CN202210327353.7A 2022-03-30 2022-03-30 Wire wheel of multi-wire cutting machine Active CN114603731B (en)

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US5111622A (en) * 1989-05-18 1992-05-12 Silicon Technology Corporation Slicing and grinding system for a wafer slicing machine
US6357433B1 (en) * 2000-06-01 2002-03-19 Motorola, Inc. Machine for cutting brittle materials
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CN204711356U (en) * 2015-06-11 2015-10-21 常州市哲益机电有限公司 Wire cutting machine permanent tensile force front jocket wheel assembly
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CN112277175A (en) * 2019-07-27 2021-01-29 江苏晶品新能源科技有限公司 Diamond wire cutting polycrystalline silicon wafer texturing process
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