CN114584104A

CN114584104A - Bulk acoustic wave filter and manufacturing method thereof

Info

Publication number: CN114584104A
Application number: CN202210477582.7A
Authority: CN
Inventors: 不公告发明人
Original assignee: Shenzhen Newsonic Technologies Co Ltd
Current assignee: Shenzhen Newsonic Technologies Co Ltd
Priority date: 2022-05-05
Filing date: 2022-05-05
Publication date: 2022-06-03
Anticipated expiration: 2042-05-05
Also published as: CN114584104B

Abstract

The invention discloses a bulk acoustic wave filter, which comprises a piezoelectric substrate, wherein the upper end surface and the lower end surface of the piezoelectric substrate are respectively provided with a first comb-shaped electrode patch and a second comb-shaped electrode patch through a firing process, the input end of the first comb-shaped electrode patch is provided with a first analog-digital converter module, and the output end of the second comb-shaped electrode patch is provided with a second analog-digital converter module; still including the protector that is used for holding piezoelectric substrate, square through hole has all been seted up to protector's upper surface and lower surface, supplies on external sound wave transmits piezoelectric substrate, is equipped with spacing part on the inside lateral wall of protector. According to the invention, the protective device is arranged on the outer side of the piezoelectric substrate, so that the piezoelectric substrate can be protected to a certain extent, the interference of the external environment in the use process is avoided, and the sound wave transmission effect of the electrode patch and the piezoelectric substrate is improved by adopting a firing process.

Description

Bulk acoustic wave filter and manufacturing method thereof

Technical Field

The invention belongs to the technical field of filters, and particularly relates to a bulk acoustic wave filter and a manufacturing method thereof.

Background

A conventional filter is a filter circuit composed of a capacitor, an inductor, and a resistor. The filter can effectively filter the frequency point of the specific frequency in the power line or the frequencies except the frequency point to obtain a power signal of the specific frequency or eliminate the power signal of the specific frequency. Bulk acoustic wave refers to an acoustic wave propagating inside an infinite elastic solid, and longitudinal and transverse waves propagating in a bounded medium are also commonly referred to as bulk waves.

The existing bulk acoustic wave filter is usually in an exposed state before being used, and electric signals are filtered to a certain extent, and the exposed state can be influenced by external environmental sanitation, and pollution or influence on the service performance of the existing bulk acoustic wave filter can be caused after a long time.

In addition, the bulk acoustic wave filter can generate heat in the using process, if the heat is not volatilized in time, the service life and the sensitivity of elements in the bulk acoustic wave filter can be influenced, and therefore, the timely heat dissipation has important significance on the ultrasonic wave filter.

Disclosure of Invention

The present invention is directed to overcome the existing defects, and provides a bulk acoustic wave filter and a method for manufacturing the same, so as to solve the problems of pollution caused by exposure and difficulty in timely heat dissipation at high temperature in the working state of the existing general filter, which are proposed in the background art, which affect the service life of the filter.

In order to achieve the purpose, the invention provides the following technical scheme: the upper end face and the lower end face of the piezoelectric substrate are respectively provided with a first comb electrode patch and a second comb electrode patch through a firing process, the input end of the first comb electrode patch is provided with a first analog-digital converter module, and the output end of the second comb electrode patch is provided with a second analog-digital converter module; the piezoelectric substrate protection device is characterized by further comprising a protection device used for containing the piezoelectric substrate, square through holes are formed in the upper surface and the lower surface of the protection device, and limiting parts are arranged on the side wall inside the protection device.

Preferably, the top surface of piezoelectric substrate is provided with the protective layer, the one end of first comb electrode paster is equipped with feed input port, the one end of second comb electrode paster is equipped with feed output port, still includes:

the acoustic wave reflector is arranged on the bottom surface of the second comb-shaped electrode patch and is used for reflecting acoustic waves alternately through impedance;

and the silicon substrate is arranged on the bottom surface of the sound wave reflector and is used for supporting the sound wave reflector and transmitting electric signals.

Preferably, the limiting component comprises limiting support plates respectively fixed on two opposite side walls in the middle of the protective device, the limiting support plates are used for supporting the piezoelectric substrate, an elastic pressing block is arranged on the side walls above each limiting support plate, and the elastic pressing blocks are pressed on the upper end face of the piezoelectric substrate.

Preferably, the protection device comprises an upper shell and a lower shell which are mutually buckled, four corners of the lower surface of the upper shell are fixedly connected with inserting blocks, one end of each inserting block, far away from the upper shell, is fixedly connected with a trapezoidal block, the inner side surface of each inserting block is provided with a groove, the inside of each groove is slidably connected with a clamping block through a spring,

four corners of the upper surface of the lower shell are provided with slots matched with the inserting blocks, the bottom end of the inner outer side surface of each slot is provided with a clamping slot matched with the clamping block, and the surface of one side, far away from the slots, of each clamping slot is provided with a dismounting slot in a penetrating mode;

cylindrical bulges are protruded on the outer side surfaces of two ends of the upper shell and the lower shell, the cylindrical bulges on each side comprise a plurality of cylindrical bulges which are uniformly arranged, a circular through hole penetrating through the inner side surface of the protective device is formed in the middle of each cylindrical bulge, and the cylindrical bulges are positioned on the inner side walls of the circular through holes and are provided with filter grids;

the inner wall of the upper shell is uniformly provided with a plurality of temperature sensor modules and a controller module electrically connected with the temperature sensor modules, and the temperature sensor modules are used for detecting the temperature value of the surrounding environment of the piezoelectric substrate and transmitting the detected temperature value to the controller module;

the inner wall of the lower shell is provided with a heat dissipation mechanism, the heat dissipation mechanism comprises a plurality of uniformly arranged heat dissipation fans, each heat dissipation fan is fixedly connected with the output end of a micro motor, and the micro motor is fixed on the inner wall of the lower shell through a motor box;

the micro motor is electrically connected with the controller module and is used for controlling the on-off of the micro motor.

Preferably, the LED display screen is installed to the upper surface one end of going up the casing, the LED display screen with controller module electric connection, and will the temperature value that the temperature sensor module detected is shown on the LED display screen.

Preferably, the inside both sides of casing all are provided with the baffle down, the inside of baffle is the four-layer structure, just the innermost of the inside material of baffle is provided with the puigging, the inside of puigging is the soundproof cotton material, the outside surface of puigging is provided with the matrix layer, the outside surface on matrix layer is provided with the heat dissipation layer, the inside on heat dissipation layer is the heating panel material, the outside surface on heat dissipation layer is provided with the waterproof layer, the inside of waterproof layer is the high molecular polymer material.

Preferably, the four corners of the outer side surface of the upper shell and the four corners of the outer side surface of the lower shell are fixedly connected with eight connecting blocks, the middle part inside the eight connecting blocks penetrates through a threaded hole, and the inner threads of the threaded hole are connected with fixing screws.

Preferably, the controller module includes: the system comprises a curve fitting unit, a reference determining unit, a deviation determining unit, a first calculating unit, a first judging unit, a second judging unit, a third judging unit and a fan control unit which are sequentially connected;

the curve fitting unit is used for acquiring temperature values detected by a plurality of temperature sensor modules with the distance between the curve fitting unit and the cooling fan within a preset range, and fitting a corresponding temperature variation curve based on the temperature values detected by each temperature sensor module with the distance between the curve fitting unit and the cooling fan within the preset range;

the reference determining unit is used for determining a plurality of reference points in the reference temperature-change curve by taking any temperature-change curve as the reference temperature-change curve, and determining a reference temperature value corresponding to the reference points in the reference temperature-change curve;

the deviation determining unit is used for determining a first time corresponding to reaching each reference temperature value in the temperature change curves except the reference temperature change curve, and determining a corresponding deviation time of each reference point in each temperature change curve except the reference temperature change curve based on the first time and the corresponding reference time of the corresponding reference point in the reference temperature change curve;

the first calculating unit is used for sequencing corresponding deviation time of all the reference points in the corresponding temperature-change curves except the reference temperature-change curve based on the time sequence corresponding to the reference points to obtain a corresponding deviation time sequence of the corresponding temperature-change curve, and calculating a corresponding deviation time characterization value of the corresponding temperature-change curve based on the deviation time sequence;

the first judging unit is used for judging whether extreme points exist in all temperature-change curves, if so, determining reference extreme value time corresponding to each reference extreme value point contained in the reference temperature-change curve, judging whether first extreme value points with difference values within a difference value range exist in each temperature-change curve except the reference temperature-change curve, if so, determining first extreme value time corresponding to the first extreme value points, and judging whether a time interval between the first extreme value time and the corresponding reference extreme value time is smaller than corresponding deviation time, if so, judging that the temperature sensor module corresponding to the corresponding temperature-change curve does not have faults, otherwise, judging that the temperature sensor module corresponding to the corresponding temperature-change curve has faults;

the second judging unit is configured to, when there is no first extreme point having a difference value within a difference range from the reference extreme point in the remaining temperature change curves except the reference temperature change curve, count up a first total number of temperature change curves having no first extreme point having a difference value within a difference range from the reference extreme point, and judge whether a first ratio of the first total number to a second total number of all temperature change curves is less than one-half, if yes, judge that a temperature sensor module corresponding to each temperature change curve having no first extreme point having a difference value within a difference range from the reference extreme point fails, otherwise, judge that a temperature sensor module corresponding to each temperature change curve having a first extreme point having a difference value within a difference range from the reference extreme point fails;

the third judging unit is used for counting the third total number of all the temperature change curves without the extreme points when the temperature change curves without the extreme points exist, judging whether the second ratio of the third total number to the second total number is less than one half, if so, judging that the temperature sensor module corresponding to each temperature change curve without the extreme points breaks down, otherwise, judging that the temperature sensor module corresponding to each temperature change curve with the extreme points breaks down;

the fan control unit is used for controlling the rotating speed of the cooling fan based on the latest temperature value which is obtained by latest detection of the temperature sensor module which is judged not to have a fault.

Preferably, the fan control unit includes: the system comprises a distance determining subunit, a relation determining subunit, a temperature predicting subunit, a rotating speed determining subunit and a rotating speed setting subunit which are sequentially connected;

the distance determining subunit is configured to determine a first distance between each temperature sensor module and the cooling fan, where a distance between each temperature sensor module and the cooling fan is within a preset range, and use an average value of all the first distances as an average distance corresponding to the cooling fan;

the relationship determining subunit is configured to determine a functional relationship between a third ratio and a latest temperature value obtained by latest detection of each temperature sensor module determined to be not faulty based on a third ratio between a second distance between each temperature sensor module determined to be not faulty and the corresponding cooling fan and the average distance, and the latest temperature value obtained by latest detection of each temperature sensor module determined to be not faulty;

the temperature prediction subunit is configured to calculate a predicted temperature value corresponding to each temperature sensor module determined to have a fault based on a fourth ratio between the first distance between the temperature sensor module determined to have a fault and the corresponding cooling fan and the average distance, and the functional relationship;

the rotating speed determining subunit is configured to calculate a corresponding rotating speed of the cooling fan based on a predicted temperature value corresponding to each temperature sensor module determined to be faulty and a latest temperature value obtained by latest detection of each temperature sensor module determined not to be faulty;

the rotating speed setting subunit is used for setting the rotating speed of the cooling fan to the set rotating speed.

A method for manufacturing a bulk acoustic wave filter comprises the following steps:

a piezoelectric substrate is formed on the substrate,

preparing two electrode patches, forming a first comb-shaped electrode patch on the upper surface of the piezoelectric substrate through a firing process, and forming a second comb-shaped electrode patch on the lower surface of the piezoelectric substrate through the firing process;

preparing a protective device, putting the piezoelectric substrate after the firing process into a lower shell through a limiting part, then buckling an upper shell,

at the in-process under the upper housing lid, the inserted block will be inserted to the inside of slot, and at inserted block male in-process, the fixture block will be crowded into the inside of recess, after the inserted block arrived the position of least significant end, the fixture block will be popped out the recess by the spring to be blocked in the inside of draw-in groove, will set up the connecting block mutual fixed connection of casing and lower casing both sides at last through four set screw afterwards.

Compared with the prior art, the invention provides a bulk acoustic wave filter and a manufacturing method thereof, and the bulk acoustic wave filter has the following beneficial effects: set up first comb electrode paster and second comb electrode paster on piezoelectric substrate through adopting the firing technology, improved the stability and the electric conductive property of electrode, can effectually protect components such as piezoelectric substrate through setting up protector, avoid the surrounding environment to exert an influence to bulk acoustic wave filter's performance, and piezoelectric substrate etc. is in the detachable state, convenient the maintenance.

According to the invention, by arranging the curve fitting unit, the reference determining unit, the deviation determining unit, the first calculating unit, the first judging unit, the second judging unit, the third judging unit and the fan control unit, the analysis and comparison of the extreme point and the deviation time in the temperature change curve obtained by fitting the temperature value detected by the temperature sensor module are realized, so that whether a fault exists in the temperature sensor module can be judged, the accuracy of the temperature value detected by the temperature sensor module is ensured, the control accuracy of the heat radiation fan is also ensured, and the heat radiation effect of the bulk acoustic wave filter is ensured.

According to the invention, through setting the interval determining subunit, the relation determining subunit, the temperature predicting subunit, the rotating speed determining subunit and the rotating speed setting subunit, the temperature prediction of the temperature sensor module with the fault based on the temperature value obtained by the temperature sensor module without the fault and the interval between the temperature sensor module and the corresponding cooling fan is realized, the corresponding predicted temperature value is obtained, the corresponding set rotating speed corresponding to the cooling fan is calculated based on the interval between different temperature sensor modules and the corresponding cooling fan, the predicted temperature values corresponding to all the temperature sensor modules with the fault and the latest temperature value obtained by the latest detection of all the temperature sensor modules without the fault, so that the accurate control of the cooling fan is realized, and the cooling effect of the bulk acoustic wave filter is further ensured.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention without limiting the invention in which:

fig. 1 is a schematic structural diagram of a piezoelectric substrate in a bulk acoustic wave filter according to the present invention;

fig. 2 is a schematic structural diagram of a bulk acoustic wave filter according to the present invention;

fig. 3 is a schematic structural diagram of a protection device in a bulk acoustic wave filter according to the present invention;

fig. 4 is a top view of a lower case of the bulk acoustic wave filter according to the present invention;

FIG. 5 is a schematic diagram of a material structure of a spacer in a bulk acoustic wave filter according to the present invention;

fig. 6 is a cross-sectional view of an upper case in the bulk acoustic wave filter and the method of fabricating the same according to the present invention;

fig. 7 is an enlarged view of a portion a in fig. 4 of the bulk acoustic wave filter and the method for manufacturing the same according to the present invention;

fig. 8 is a side view of a lower case of the bulk acoustic wave filter and the method for fabricating the same according to the present invention;

fig. 9 is an enlarged view of the bulk acoustic wave filter and the method of manufacturing the same shown in fig. 8 at B;

fig. 10 is a schematic structural diagram of a controller module included in the bulk acoustic wave filter according to the present invention;

fig. 11 is a schematic structural diagram of a fan control unit included in the bulk acoustic wave filter according to the present invention.

In the figure: 1. a piezoelectric substrate; 101. a first comb electrode patch; 102. a feed input port; 103. a second comb electrode patch; 104. a feed output port; 105. an acoustic wave reflector; 106. a silicon substrate; 2. a guard; 201. an upper housing; 202. a lower housing; 203. a square through hole; 3. an LED display screen; 4. connecting blocks; 5. a threaded hole; 6. a set screw; 7. a cylindrical bulge; 8. disassembling the groove; 9. a circuit board; 10. a partition plate; 11. a sound insulating layer; 12. a substrate layer; 13. a heat dissipation layer; 14. a waterproof layer; 15. a motor case; 16. a micro motor; 17. a heat radiation fan; 18. a rotating blade; 19. inserting a block; 20. a groove; 21. a spring; 22. a clamping block; 23. a trapezoidal block; 24. a slot; 25. a card slot; 26. a temperature sensor module; 27. a spacer block; 281. a curve fitting unit; 282. a reference determination unit; 283. a deviation determination unit; 284. a first calculation unit; 285. a first judgment unit; 286. a second judgment unit; 287. a third judgment unit; 288. a fan control unit; 2881. a pitch determining subunit; 2882. a relationship determination subunit; 2883. a temperature predictor unit; 2884. a rotation speed determining subunit; 2885. and a rotation speed setting subunit.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-8, the present invention provides a technical solution: a bulk acoustic wave filter comprises a piezoelectric substrate 1, wherein the piezoelectric substrate 1 can adopt a substrate stacked with silicon, for example, a silicon wafer can be used as a material for manufacturing the piezoelectric substrate 1, the top surface of the piezoelectric substrate 1 is provided with a protective layer, and the protective layer can be formed on the top surface of a substrate 110 so as to reduce the risk of etching in the processing process. The upper end face and the lower end face of the piezoelectric substrate 1 are respectively provided with a first comb-shaped electrode patch 101 and a second comb-shaped electrode patch 103 through a firing process, and the electrical connection performance of the first comb-shaped electrode patch 101 and the second comb-shaped electrode patch 103 and the piezoelectric substrate 1 can be improved by adopting the firing process.

One end of the first comb electrode patch 101 is provided with a feed input port 102, the feed input port 102 facilitates external input of current signals, the input end of the first comb electrode patch 101 is provided with a first analog-to-digital converter module, the first analog-to-digital converter module is used for converting electric signals input from the feed input port 102 into initial sound waves, and the initial sound waves are reflected into the piezoelectric substrate 1 to oscillate.

One end of the second comb-shaped electrode patch 103 is provided with a feed output port 104, the vertical standing sound waves which are transmitted by reciprocating reflection in the piezoelectric substrate 1 are output from the second comb-shaped electrode patch 103 through the feed output port 104, and the output end of the second comb-shaped electrode patch 103 is provided with a second analog-digital converter module for converting the vertical standing sound waves which are transmitted in the piezoelectric substrate 1 into specific electric signals to be output.

Preferably, in order to prevent the sound waves from diffusing to the piezoelectric substrate 1, a sound wave reflector 105 is disposed on the bottom surface of the second comb-shaped electrode patch 103, the sound wave reflector 105 is used for reflecting the sound waves alternately through impedance, a silicon substrate 106 is disposed on the bottom surface of the sound wave reflector 105, and the silicon substrate 106 can support the sound wave reflector 105 on one hand and can also transmit certain electric signals by using a silicon material on the other hand.

In the invention, in order to avoid the influence of the external environment in the use process, the protection device 2 for accommodating the piezoelectric substrate 1 is further included, and the protection device 2 is used for limiting and protecting the positions of the piezoelectric substrate 1 and other components to form a modular structure. Square through hole 203 has all been seted up to protector 2's upper surface and lower surface, supplies on external sound wave or current signal transmission to piezoelectric substrate 1, is equipped with on the inside lateral wall of protector 2 and is used for injecing the spacing part of piezoelectric substrate 1 position can provide outside protective space for piezoelectric substrate 1 in the sound wave transmission process through protector 2.

Spacing part is including fixing the spacing layer board on the double-phase relative lateral wall in protector 2 middle part respectively, spacing layer board is used for holding piezoelectric substrate 1, it is equipped with an elasticity compact heap to be located every spacing layer board top on protector 2's the lateral wall, compress tightly on piezoelectric substrate 1's up end through the elasticity compact heap, the position of piezoelectric substrate 1 is injectd in the realization that the elasticity compact heap can be fine, and its clamping face is great with piezoelectric substrate 1's contact surface, certain elasticity has, can not cause the damage to piezoelectric substrate 1.

Referring to fig. 3, 4 and 6, the protection device 2 includes an upper housing 201 and a lower housing 202 that are fastened to each other, the square through holes 203 are respectively disposed on the upper housing 201 and the lower housing 202, and are vertically corresponding to each other, and the size of the square through hole 203 is slightly smaller than or equal to that of the piezoelectric substrate 1, so as to facilitate transmission of sound waves or current signals.

Go up the equal fixedly connected with in lower surface four corners of casing 201 and insert piece 19, insert the one end fixedly connected with trapezoidal piece 23 that the piece 19 kept away from last casing 201, the size of the free end of trapezoidal piece 23 is less. The groove 20 is opened on the inner side surface of the inserting block 19, the clamping block 22 is slidably connected to the inside of the groove 20 through the spring 21, the slots 24 are opened at four corners of the upper surface of the lower shell 202, the clamping groove 25 matched with the clamping block 22 is opened at the bottom end of the inner side surface of the slot 24, and the dismounting groove 8 is opened through the surface of one side of the clamping groove 25 far away from the slot 24. Through the fixture 22, when the upper shell 201 and the lower shell 202 are installed, the fixture 22 can be clamped in the clamping groove 25 by inserting the inserting block 19 into the inserting groove 24, so that the installation of the upper shell 201 and the lower shell 202 is completed. Through the trapezoidal piece 23 that sets up, can be convenient for more through trapezoidal piece 23 and insert the inside of piece 19 to slot 24, convenient and fast more during the use.

Above-mentioned technical scheme has avoided present general wave filter when the preparation, through two shell mutual fixed connection of a plurality of screw with the wave filter usually to prevent that the inside part of wave filter from taking place the problem of scattering when using, but the dismantlement of adopting the general maintenance of screw fixation mode, overhauing is comparatively troublesome, can only pull down the screw one by one. According to the invention, through the arranged disassembly grooves 8, when the filter needs to be disassembled for maintenance or overhaul, after the fixing screws 6 are disassembled from the threaded holes 5 through the screwdriver, the fixing blocks 22 are pushed into the four disassembly grooves 8 through the disassembly grooves 8 again, and then the upper shell 201 is taken down from the upper end of the lower shell 202, so that the problem of inconvenience in disassembling the existing body acoustic wave filter in use is effectively avoided.

Preferably, the four corners of the outer surfaces of the upper shell 201 and the lower shell 202 are fixedly connected with eight connecting blocks 4, the middle part of the inside of each connecting block 4 is provided with a threaded hole 5 in a penetrating manner, and the inside of each threaded hole 5 is connected with a fixing screw 6 in a threaded manner.

Through the connecting block 4 that sets up, through fixture block 22 and draw-in groove 25 with last casing 201 and casing 202 after the reciprocal anchorage, 6 threaded connection of four fixing screw of rethread are inside screw hole 5 to with the reciprocal fixed connection of eight connecting block 4, can accomplish the fixed process to casing 201 and casing 202 down on the wave filter.

Go up and all bulge on the lateral surface at casing 201 and casing 202's both ends down and have cylindrical protrusion 7, every side cylindrical protrusion 7 has been seted up at the middle part of every cylindrical protrusion 7 including the even a plurality of that sets up and has been link up the round through hole 71 of 2 medial surfaces of protector, cylindrical protrusion is located be equipped with the filtration net on the inside wall of round through hole 71, the gas circulation of being convenient for on the one hand of setting up of round through hole 71 also reduces the influence to the signal transmission process. The setting of filtering net can effectively place external dust etc. and enter into protector 2 in, to the pollution that its inside spare part caused, improve security performance and life.

The equal fixedly connected with spacer block 27 in lower casing 202's lower surface four corners, spacer block 27 are provided with four, can play certain supporting role to casing 202 down through spacer block 27, avoid the influence that the bottom surface is moist to equipment production.

Evenly be provided with a plurality of temperature sensor modules 26 on the inner wall of last casing 201 and electric connection's controller module with it, temperature sensor module 26 is used for detecting the temperature numerical value of 1 surrounding environment of piezoelectric substrate, can monitor the temperature of last casing 201 and casing 202 inner space down in real time, prevents that the wave filter from the high temperature when using, and transmits the temperature numerical value that detects for the controller module, the temperature environment around the fact monitoring piezoelectric substrate 1 has effectively solved the high temperature and has leaded to the internals to burn out the problem that causes the wave filter to damage, has guaranteed the normal operating of wave filter and the life of wave filter.

Be provided with heat dissipation mechanism on the inner wall of casing 202 down, dispel the heat through heat dissipation mechanism, improve the air flow, can reduce the temperature environment around whole piezoelectric substrate 1, heat dissipation mechanism is including a plurality of radiator fan 17 of even setting, every radiator fan 17 and micro motor 16's output fixed connection, and can drive radiator fan 17 through micro motor 16 and rotate, evenly be provided with a plurality of rotating vane 18 on the radiator fan 17, the rotatory air flow that blows in the protector 2 of rotating vane 18 on the radiator fan 17, thereby realize the heat dissipation, micro motor 16 passes through motor case 15 and fixes on the inner wall of casing 202 down, micro motor 16 and controller module electric connection, and be used for controlling opening and close of micro motor 16. During use, the micro motor 16 in the motor box 15 can drive the heat dissipation fan 17 to rotate at a high speed, so that the inner space of the upper shell 201 of the filter is cooled, and the heat dissipation performance of the filter is guaranteed.

Go up the upper surface one end of casing 201 and install LED display screen 3, LED display screen 3 and controller module electric connection to show the temperature value that temperature sensor module 26 detected on LED display screen 3. Through being provided with LED display screen 3, can make things convenient for the user to master the temperature condition in protector 2 from the outside.

Referring to the accompanying drawings 4 and 5 of the specification, the partition plates 10 are arranged on two sides of the inside of the lower shell 202, the partition plates 10 are part of the outer side face of the lower shell 202 and used for improving the performance of the lower shell 202, the inside of the partition plates 10 is of a four-layer structure, the sound insulation layer 11 is arranged on the innermost side of the inside material of the partition plates 10, the sound insulation cotton material is adopted inside the sound insulation layer 11 and wrapped in the sound insulation layer 11, the matrix layer 12 is arranged on the surface of the outer side of the sound insulation layer 11, the heat dissipation layer 13 is arranged on the surface of the outer side of the matrix layer 12, the heat dissipation layer 13 is made of a heat dissipation plate material, the waterproof layer 14 is arranged on the surface of the outer side of the heat dissipation layer 13, and the high polymer material is arranged inside the waterproof layer 14.

Through the baffle 10 that sets up, when using, through the inside most inboard puigging 11 that sets up of baffle 10, the effectual noise that gives out when the part to the wave filter inside moves keeps apart, the effectual silence operation of having guaranteed the device, through the heat dissipation layer 13 that sets up, at the inside heating panel that sets up of heat dissipation layer 13, the effectual space to the baffle 10 inside dispels the heat, prevent that the too high wave filter internals surface that causes of inner space temperature from being overheated, lead to the problem that influences the life of wave filter, through the waterproof layer 14 that sets up, the waterproof performance of wave filter can effectually be guaranteed to the inside high polymer through waterproof layer 14, prevent the inside of casing 201 and lower casing 202 in the moisture infiltration, cause the internals to leak and lead to the problem of electric leakage.

Referring to fig. 10, the controller module includes: a curve fitting unit 281, a reference determination unit 282, a deviation determination unit 283, a first calculation unit 284, a first judgment unit 285, a second judgment unit 286, a third judgment unit 287, and a fan control unit 288, which are connected in sequence;

the curve fitting unit 281 is configured to obtain temperature values detected by the plurality of temperature sensor modules 26 having a distance to the cooling fan 17 within a preset range, and fit a corresponding temperature variation curve based on the temperature values detected by each temperature sensor module 26 having a distance to the cooling fan 17 within the preset range;

the reference determining unit 282 is configured to determine a plurality of reference points in a reference temperature-change curve by using any temperature-change curve as the reference temperature-change curve, and determine a reference temperature value corresponding to the reference point in the reference temperature-change curve;

the deviation determining unit 283 is configured to determine a first time corresponding to each reference temperature value in the temperature change curves other than the reference temperature change curve, and determine a deviation time corresponding to each reference point in each temperature change curve other than the reference temperature change curve based on the first time and a reference time corresponding to the corresponding reference point in the reference temperature change curve;

the first calculating unit 284 is configured to sort, based on the time sequence corresponding to the reference point, the corresponding deviation times of all the reference points in the remaining corresponding temperature-change curves except the reference temperature-change curve, to obtain a deviation time sequence corresponding to the corresponding temperature-change curve, and calculate, based on the deviation time sequence, a deviation time characterization value corresponding to the corresponding temperature-change curve;

the first determining unit 285 is configured to determine whether extreme points exist in all temperature-change curves, determine a reference extreme point time corresponding to each reference extreme point included in a reference temperature-change curve if the extreme points exist, determine whether a first extreme point having a difference value from the reference extreme point within a difference range exists in each remaining temperature-change curve except the reference temperature-change curve, determine a first extreme point time corresponding to the first extreme point if the extreme point exists, determine whether a time interval between the first extreme point time and the corresponding reference extreme point time is smaller than a corresponding deviation time if the extreme point exists, determine that the temperature sensor module 26 corresponding to the corresponding temperature-change curve fails if the extreme point exists, and determine that the temperature sensor module 26 corresponding to the corresponding temperature-change curve fails if the extreme point exists;

the second determination unit 286 is configured to, when there is no first extreme point having a difference value within a difference range from the reference extreme point in the remaining temperature change curves except for the reference temperature change curve, count a first total number of temperature change curves having no first extreme point having a difference value within a difference range from the reference extreme point, and determine whether a first ratio of the first total number to a second total number of all temperature change curves is smaller than one half, if yes, determine that there is no temperature sensor module 26 corresponding to each temperature change curve having a first extreme point having a difference value within a difference range from the reference extreme point, and otherwise, determine that there is a temperature sensor module 26 corresponding to each temperature change curve having a first extreme point having a difference value within a difference range from the reference extreme point;

the third determining unit 287 is configured to count a third total number of all temperature change curves without the extreme point when there is a temperature change curve without the extreme point, and determine whether a second ratio of the third total number to the second total number is smaller than one-half, if yes, determine that the temperature sensor module 26 corresponding to each temperature change curve without the extreme point fails, otherwise, determine that the temperature sensor module 26 corresponding to each temperature change curve with the extreme point fails;

the fan control unit 288 is configured to control the rotation speed of the heat dissipation fan 17 based on the latest temperature value newly detected by the temperature sensor module 26 determined as not malfunctioning.

In this embodiment, the preset range is a range in which the preset temperature sensor module for determining the rotation speed of the corresponding cooling fan is located.

In this embodiment, the temperature change curve is a curve representing temperature change fitted based on a temperature value detected by the corresponding temperature sensor module 26 having a distance with the cooling fan 17 within a preset range.

In this embodiment, the reference temperature-change curve is any temperature-change curve.

In this embodiment, determining a plurality of reference points in the reference temperature-change curve is: and determining a reference point in the temperature change curve at preset time intervals (which can be set according to actual conditions).

In this embodiment, the reference point is a point determined in the reference temperature-change curve.

In this embodiment, the reference temperature value is a temperature value corresponding to the reference point in the reference temperature-change curve.

In this embodiment, the first time is the time corresponding to when each reference temperature value is reached, which is determined in the remaining temperature-change curves except for the reference temperature-change curve.

In this embodiment, the reference time is a time corresponding to the reference point in the reference temperature-change curve.

In this embodiment, the deviation time is a time interval between the first time and a corresponding reference time in the lesion temperature change curve.

In this embodiment, the deviation time sequence is a sequence corresponding to the corresponding temperature-change curve obtained by sorting the corresponding deviation times of all the reference points in the remaining corresponding temperature-change curves except the reference temperature-change curve based on the time sequence corresponding to the reference points.

In this embodiment, calculating a deviation time characterization value corresponding to the temperature-change curve based on the deviation time series includes:

in the formula (I), the compound is shown in the specification,

the deviation time characterization value corresponding to the temperature change curve calculated currently,

for a currently calculated offset time contained in the currently calculated offset time series,

for the total number of offset times contained in the currently calculated offset time series,

for the value taking time corresponding to the ith deviation time contained in the currently calculated deviation time sequence,

is the i-th deviation time contained in the currently calculated deviation time series.

In this embodiment, the reference extremum time is a time corresponding to the reference extremum point in the reference temperature variation curve.

In this embodiment, the difference range is a preset range (specifically set according to an actual situation) for screening the difference of the extreme points of the corresponding extreme points of the reference extreme point in the remaining temperature-change curves except the reference temperature-change curve.

In this embodiment, the first extreme point is an extreme point that is divided by the reference temperature-change curve to determine that the difference between the remaining temperature-change curves and the reference extreme point is within the difference range.

In this embodiment, the first extreme point is a corresponding point in the corresponding temperature-change curve.

In this embodiment, the first total number is the total number of the temperature change curves without the first extreme point whose difference value from the reference extreme point is within the difference range.

In this embodiment, the second total number is the total number of all temperature change curves.

In this embodiment, the first ratio is a ratio of the first total number and the second total number.

In this embodiment, the third total is the total number of all temperature change curves without the extreme point.

In this embodiment, the second ratio is a ratio of the third total number to the second total number.

In this embodiment, the latest temperature value is the temperature value that is newly detected by the temperature sensor module 26 that is determined not to have failed.

The working principle of the technology is as follows: the curve fitting unit 281 fits a corresponding temperature change curve, and the reference determination unit 282 determines a plurality of reference points in the reference temperature change curve and determines corresponding reference temperature values; the deviation determining unit 283 determines a deviation time corresponding to each reference point in each of the temperature change curves remaining except the reference temperature change curve; the first calculating unit 284 is configured to calculate a deviation time characterization value corresponding to the temperature-change curve; the first, second, and

third determination units

285, 286, and 287 determine whether the corresponding temperature sensor module 26 has a fault based on analyzing and determining the extreme point and the deviation time in the temperature change curve, and the fan control unit 288 controls the rotation speed of the heat dissipation fan 17 based on the latest temperature value obtained by the latest detection of the temperature sensor module 26 determined as not having a fault.

Referring to fig. 11, the fan control unit 288 includes: a distance determining subunit 2881, a relation determining subunit 2882, a temperature predicting subunit 2883, a rotating speed determining subunit 2884, and a rotating speed setting subunit 2885, which are connected in sequence;

the distance determining subunit 2881 is configured to determine a first distance between each temperature sensor module 26 and the heat dissipation fan 17, where a distance between the temperature sensor module and the heat dissipation fan 17 is within a preset range, and use an average value of all the first distances as an average distance corresponding to the heat dissipation fan 17;

the relationship determining subunit 2882 is configured to determine a functional relationship between a third ratio between the second distance between each temperature sensor module 26 determined to be not faulty and the corresponding cooling fan 17 and the average distance, and a latest temperature value obtained by latest detection of each temperature sensor module 26 determined to be not faulty, based on the third ratio and the latest temperature value;

the temperature prediction subunit 2883 is configured to calculate, based on a fourth ratio between the first distance between the temperature sensor module 26 determined to be faulty and the corresponding heat dissipation fan 17 and the average distance, and the functional relationship, a predicted temperature value corresponding to each temperature sensor module 26 determined to be faulty;

the rotation speed determining subunit 2884 is configured to calculate a corresponding rotation speed of the micro motor 16 based on a predicted temperature value corresponding to each temperature sensor module 26 determined to have a fault and a latest temperature value obtained by latest detection of each temperature sensor module 26 determined to have no fault;

the rotation speed setting subunit 2885 is configured to set the rotation speed of the micro motor 16 to the setting rotation speed.

In this embodiment, the first distance is a distance between each temperature sensor module 26 and the heat dissipation fan 17, where the distance between the temperature sensor module and the heat dissipation fan 17 is within a preset range.

In this embodiment, the average pitch is an average of the first pitches.

In this embodiment, the second pitch is a pitch between each temperature sensor module 26 determined not to be malfunctioning and the corresponding heat dissipation fan 17.

In this embodiment, the third ratio is a ratio between the second pitch and the average pitch.

In this embodiment, the fourth ratio is the ratio between the first pitch and the average pitch.

In this embodiment, the functional relationship is a functional relationship representing a numerical relationship between the third ratio and the latest temperature value.

In this embodiment, based on the fourth ratio between the first distance between the temperature sensor module 26 determined to have a fault and the corresponding heat dissipation fan 17 and the average distance, and the functional relationship, the predicted temperature value corresponding to each temperature sensor module 26 determined to have a fault is calculated, that is, the fourth ratio is substituted into the functional relationship to obtain the corresponding predicted temperature value.

In this embodiment, the predicted temperature value is the temperature value corresponding to the temperature sensor module 26 determined to be faulty based on the fourth ratio and the functional relationship.

In this embodiment, calculating the rotational speed of the micro-motor 16 according to the predicted temperature value corresponding to each temperature sensor module 26 determined to be faulty and the latest temperature value newly detected and obtained by each temperature sensor module 26 determined not to be faulty includes:

in the formula (I), the compound is shown in the specification,

the rotation speed of the micro motor 16 is set,

is a conversion coefficient and

has the unit of

，

For the total number of temperature sensor modules 26 that are determined to be non-malfunctioning,

for the currently calculated temperature sensor module 26 that is determined to be non-malfunctioning,

for the third ratio corresponding to the pth temperature sensor module 26 that is determined to be not malfunctioning,

for the latest temperature value corresponding to the pth temperature sensor module 26 that is determined not to be malfunctioning,

for the total number of temperature sensor modules 26 determined to be malfunctioning,

for the currently calculated temperature sensor module 26 determined to be malfunctioning,

a fourth ratio for the qth temperature sensor module 26 determined to be malfunctioning,

the predicted temperature value corresponding to the qth temperature sensor module 26 determined to be faulty.

In this embodiment, the rotational speed to be set is the calculated rotational speed to be set for the cooling fan 17.

The working principle of the technology is as follows: the distance determining subunit 2881 determines a first distance between each temperature sensor module 26 and the cooling fan 17, where the distance between the temperature sensor module and the cooling fan 17 is within a preset range, and determines a corresponding average distance; the relationship determining subunit 2882 is configured to determine a functional relationship between a third ratio between the second distance between each temperature sensor module 26 determined to be not faulty and the corresponding heat dissipation fan 17 and the average distance, and a latest temperature value obtained by latest detection of each temperature sensor module 26 determined to be not faulty, based on the third ratio and the latest temperature value; the temperature prediction subunit 2883 is configured to calculate a predicted temperature value corresponding to each temperature sensor module 26 determined to be faulty; the rotation speed determining subunit 2884 is used for calculating the rotation speed of the micro motor 16; the rotation speed setting subunit 2885 is used for setting the rotation speed of the micro motor 16 to a preset rotation speed.

The invention also discloses a manufacturing method of the bulk acoustic wave filter, which comprises the following steps:

a piezoelectric substrate 1 is formed and,

preparing two electrode patches, forming a first comb-shaped electrode patch 101 on the upper surface of the piezoelectric substrate 1 through a firing process, and forming a second comb-shaped electrode patch 103 on the lower surface of the piezoelectric substrate 1 through the firing process;

preparing a protection device 2, placing the piezoelectric substrate 1 after the firing process into a lower case 202 through a stopper, and then fastening an upper case 201,

during the process of covering the upper shell 201, the inserting block 19 is inserted into the slot 24, and during the process of inserting the inserting block 19, the fixture 22 is squeezed into the groove 20, after the inserting block 19 reaches the lowest end position, the fixture 22 is popped out of the groove 20 by the spring 21 and is clamped in the clamping groove 25, and then the connecting blocks 4 arranged at the two sides of the upper shell 201 and the lower shell 202 are fixedly connected with each other by four fixing screws 6;

when the bulk acoustic wave filter needs to be disassembled and maintained, the fixing screw 6 is firstly disassembled through the screwdriver, the clamping block 22 is jacked into the groove 20 through the disassembling groove 8, then the upper shell 201 is taken down from the upper surface of the lower shell 202, and the disassembling process can be completed, so that the bulk acoustic wave filter is more convenient and faster to use.

In the process of adopting the protective device 2, the operation and the corresponding working principle of the invention are as follows: when the fixture block 22 is used, when the upper shell 201 and the lower shell 202 are installed, the insertion block is inserted into the insertion slot, and the fixture block can be clamped in the clamping slot, so that the upper shell 201 and the lower shell 202 are installed, and the problem that parts are easy to scatter in a screw installation mode is effectively solved;

through the arranged disassembly grooves 8, when the filter needs to be disassembled for maintenance or overhaul, the fixing screws 6 are disassembled from the threaded holes 5 through the screwdriver, the long rods are inserted into the four disassembly grooves 8, the fixture blocks 22 are pushed into the grooves 20 through the disassembly grooves 8 again, and then the upper shell 201 is taken down from the upper end of the lower shell 202, so that the problem that when the existing body sound wave filter is used, when parts in the filter need to be disassembled for maintenance, only one screw can be disassembled, and certain inconvenience exists in use is effectively solved;

through the arranged partition board 10, when in use, the noise emitted by the parts in the filter during operation is effectively isolated through the sound insulation layer 11 arranged on the innermost side in the partition board 10, so that the silent operation of the device is effectively ensured, through the arranged heat dissipation layer 13, the heat dissipation plate is arranged in the heat dissipation layer 13, the space in the partition board 10 is effectively dissipated, the problem that the service life of the filter is influenced due to the surface overheating of the parts in the filter caused by the overhigh temperature of the inner space is solved, through the arranged waterproof layer 14, the waterproof performance of the filter can be effectively ensured through the high polymer in the waterproof layer 14, and the problem that the water leaks from the parts to cause electric leakage is prevented because the water permeates into the upper shell 201 and the lower shell 202;

through the arranged connecting blocks 4, after the upper shell 201 and the lower shell 202 are mutually fixed through the clamping blocks 22 and the clamping grooves 25, the eight connecting blocks 4 are mutually fixedly connected through the four fixing screws 6 in the threaded holes 5, and then the fixing process of the upper shell 201 and the lower shell 202 of the filter can be completed; through the LED display screen 3 that sets up, can show the inside temperature of wave filter in real time through LED display screen 3, through the radiator fan 17 that sets up, can drive radiator fan 17 through the inside micro motor 16 of motor case 15 during the use and rotate at a high speed to dispel the heat to the last casing 201 inner space of wave filter, guaranteed the heat dispersion of wave filter, through the bulk acoustic wave chip that sets up, so that carry out real time monitoring to the bulk acoustic wave through the wave filter.

The invention has the following technical effects:

1. set up first comb electrode paster and second comb electrode paster on piezoelectric substrate through adopting the firing technology, improved the stability and the electric conductive property of electrode, can effectually protect components such as piezoelectric substrate through setting up protector, avoid the surrounding environment to exert an influence to bulk acoustic wave filter's performance, and piezoelectric substrate etc. is in the detachable state, convenient the maintenance.

2. According to the filter, the clamping block is arranged, when the upper shell and the lower shell are installed, the inserting block is inserted into the inserting groove, and the clamping block can be clamped in the clamping groove, so that the installation of the upper shell and the lower shell is completed, and the problem that parts in the filter are scattered when the filter is used due to the fact that the two shells of the filter are usually fixedly connected through a plurality of screws when the existing common filter is manufactured is effectively solved, but the fixing mode is generally troublesome;

3. according to the invention, through the arranged disassembly grooves, when the filter needs to be disassembled for maintenance or overhaul, the fixing screws are disassembled from the threaded holes through the screwdriver, the fixing screws are inserted into the four disassembly grooves through the long rods, the clamping blocks are jacked into the grooves through the disassembly grooves, and then the upper shell is taken down from the upper end of the lower shell, so that the problem that when the existing body acoustic wave filter is used, when parts in the filter need to be disassembled for maintenance, only one screw can be disassembled, and certain inconvenience exists in use is effectively avoided.

4. According to the invention, through the arranged partition plate, when the device is used, the noise emitted by parts in the filter during operation is effectively isolated through the sound insulation layer arranged on the innermost side in the partition plate, so that the silent operation of the device is effectively ensured, and through the arranged heat dissipation layer, the heat dissipation plate arranged in the heat dissipation layer is used for effectively dissipating heat of the space in the partition plate, so that the problem that the service life of the filter is influenced due to the surface overheating of the parts in the filter caused by overhigh temperature of the inner space is solved;

5. the invention can effectively ensure the waterproof performance of the filter through the waterproof layer and the high molecular polymer in the waterproof layer, prevent the water from permeating into the upper shell and the lower shell to cause the problem of electric leakage caused by water leakage of internal parts, the upper shell and the lower shell are mutually fixed through the fixture blocks and the clamping grooves by the arranged connecting blocks and then are connected in the threaded holes through the four fixing screws in a threaded manner, so that the eight connecting blocks are mutually fixedly connected, the fixing process of the upper shell and the lower shell of the filter can be finished, and through the arranged temperature sensor module, the temperature sensor module can monitor the temperature of the inner space of the upper shell and the lower shell in real time, so that the problem that the filter is damaged due to burning out of internal parts caused by overhigh temperature and non-alignment treatment when the filter is used is prevented, and the normal operation of the filter and the service life of the filter are ensured;

6. according to the invention, by arranging the curve fitting unit, the reference determining unit, the deviation determining unit, the first calculating unit, the first judging unit, the second judging unit, the third judging unit and the fan control unit, the analysis and comparison of the extreme point and the deviation time in the temperature change curve obtained by fitting the temperature value detected by the temperature sensor module can be realized, so that whether a fault exists in the temperature sensor module can be judged, the accuracy of the temperature value detected by the temperature sensor module is ensured, the control accuracy of the heat radiation fan is also ensured, and the heat radiation effect of the bulk acoustic wave filter is ensured;

7. according to the invention, through setting the interval determining subunit, the relation determining subunit, the temperature predicting subunit, the rotating speed determining subunit and the rotating speed setting subunit, the temperature prediction of the temperature sensor module with the fault based on the temperature value obtained by the temperature sensor module without the fault and the interval between the temperature sensor module and the corresponding cooling fan is realized, the corresponding predicted temperature value is obtained, the corresponding set rotating speed corresponding to the cooling fan is calculated based on the interval between different temperature sensor modules and the corresponding cooling fan, the predicted temperature values corresponding to all the temperature sensor modules with the fault and the latest temperature value obtained by the latest detection of all the temperature sensor modules without the fault, the accurate control of the cooling fan is realized, and the cooling effect of the bulk acoustic wave filter is further ensured.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A bulk acoustic wave filter comprises a piezoelectric substrate (1), and is characterized in that the upper end face and the lower end face of the piezoelectric substrate (1) are respectively provided with a first comb electrode patch (101) and a second comb electrode patch (103) through a firing process, the input end of the first comb electrode patch (101) is provided with a first analog-digital converter module, and the output end of the second comb electrode patch (103) is provided with a second analog-digital converter module; the piezoelectric substrate protection device is characterized by further comprising a protection device (2) used for containing the piezoelectric substrate (1), wherein a square through hole (203) is formed in the upper surface and the lower surface of the protection device (2), and a limiting part is arranged on the side wall inside the protection device (2).

2. A bulk acoustic wave filter according to claim 1, characterized in that: the top surface of piezoelectric substrate (1) is provided with the protective layer, the one end of first comb electrode paster (101) is equipped with feed input port (102), the one end of second comb electrode paster (103) is equipped with feed output port (104), still includes:

the acoustic wave reflector (105) is arranged on the bottom surface of the second comb-shaped electrode patch (103), and the acoustic wave reflector (105) is used for reflecting acoustic waves alternately through impedance;

and the silicon substrate (106) is arranged on the bottom surface of the acoustic wave reflector (105), and the silicon substrate (106) is used for supporting the acoustic wave reflector (105) and transmitting electric signals.

3. A bulk acoustic wave filter according to claim 1, wherein: the limiting component comprises limiting support plates which are respectively fixed on two opposite side walls in the middle of the protective device (2), the limiting support plates are used for supporting the piezoelectric substrate (1), an elastic pressing block is arranged on the side walls above each limiting support plate, and the elastic pressing blocks are pressed on the upper end face of the piezoelectric substrate (1).

4. A bulk acoustic wave filter according to claim 1, wherein: the protective device (2) comprises an upper shell (201) and a lower shell (202) which are buckled with each other, four corners of the lower surface of the upper shell (201) are fixedly connected with inserting blocks (19), one end, far away from the upper shell (201), of each inserting block (19) is fixedly connected with a trapezoidal block (23), the inner side surface of each inserting block (19) is provided with a groove (20), the inside of each groove (20) is connected with a clamping block (22) in a sliding mode through a spring (21),

four corners of the upper surface of the lower shell (202) are provided with inserting grooves (24) matched with the inserting blocks (19), the bottom end of the inner outer side surface of each inserting groove (24) is provided with a clamping groove (25) matched with the clamping block (22), and the surface of one side, far away from the inserting grooves (24), of each clamping groove (25) is provided with a dismounting groove (8) in a penetrating mode;

cylindrical protrusions (7) are protruded on the outer side faces of two ends of the upper shell (201) and the lower shell (202), the cylindrical protrusions (7) on each side comprise a plurality of cylindrical protrusions which are uniformly arranged, a circular through hole (71) penetrating through the inner side face of the protection device (2) is formed in the middle of each cylindrical protrusion (7), and filtering grids are arranged on the inner side walls, located on the circular through holes (71), of the cylindrical protrusions;

the inner wall of the upper shell (201) is uniformly provided with a plurality of temperature sensor modules (26) and a controller module electrically connected with the temperature sensor modules, and the temperature sensor modules (26) are used for detecting the temperature value of the surrounding environment of the piezoelectric substrate (1) and transmitting the detected temperature value to the controller module;

a heat dissipation mechanism is arranged on the inner wall of the lower shell (202), the heat dissipation mechanism comprises a plurality of heat dissipation fans (17) which are uniformly arranged, each heat dissipation fan (17) is fixedly connected with the output end of the micro motor (16), and the micro motor (16) is fixed on the inner wall of the lower shell (202) through a motor box (15);

the micro motor (16) is electrically connected with the controller module and is used for controlling the on-off of the micro motor (16).

5. A bulk acoustic wave filter according to claim 4, characterized in that: go up the upper surface one end of casing (201) and install LED display screen (3), LED display screen (3) with controller module electric connection, and will the temperature value that temperature sensor module (26) detected is shown on LED display screen (3).

6. A bulk acoustic wave filter according to claim 4, characterized in that: the inside both sides of casing (202) all are provided with baffle (10) down, the inside of baffle (10) is four-layer structure, just the innermost of the inside material of baffle (10) is provided with puigging (11), the inside of puigging (11) is the soundproof cotton material, the outside surface of puigging (11) is provided with matrix layer (12), the outside surface of matrix layer (12) is provided with heat dissipation layer (13), the inside of heat dissipation layer (13) is the heating panel material, the outside surface of heat dissipation layer (13) is provided with waterproof layer (14), the inside of waterproof layer (14) is the polymer material.

7. A bulk acoustic wave filter according to claim 4, characterized in that: go up the equal fixedly connected with connecting block (4) in the outside surface four corners of casing (201) and lower casing (202), connecting block (4) are provided with eight, eight the inside mid portion of connecting block (4) all runs through set up threaded hole (5), the inside threaded connection of screw hole (5) has set screw (6).

8. A bulk acoustic wave filter according to claim 4, characterized in that: the controller module includes: the fan control device comprises a curve fitting unit (281), a reference determining unit (282), a deviation determining unit (283), a first calculating unit (284), a first judging unit (285), a second judging unit (286), a third judging unit (287) and a fan control unit (288), which are sequentially connected;

the curve fitting unit (281) is used for acquiring temperature values obtained by detection of a plurality of temperature sensor modules (26) with a distance between the curve fitting unit and the heat dissipation fan (17) within a preset range, and fitting a corresponding temperature change curve based on the temperature values obtained by detection of each temperature sensor module (26) with a distance between the curve fitting unit and the heat dissipation fan (17) within the preset range;

the reference determination unit (282) is used for determining a plurality of reference points in a reference temperature-change curve by taking any temperature-change curve as the reference temperature-change curve, and determining reference temperature values corresponding to the reference points in the reference temperature-change curve;

the deviation determining unit (283) is used for determining a first time corresponding to reaching each reference temperature value in the temperature change curves except the reference temperature change curve, and determining the corresponding deviation time of each reference point in each temperature change curve except the reference temperature change curve based on the first time and the corresponding reference time of the corresponding reference point in the reference temperature change curve;

the first calculating unit (284) is used for sequencing corresponding deviation time of all the reference points in the corresponding temperature-change curves except the reference temperature-change curve based on the time sequence corresponding to the reference points to obtain a deviation time sequence corresponding to the corresponding temperature-change curve, and calculating a characteristic value of the deviation time corresponding to the corresponding temperature-change curve based on the deviation time sequence;

the first judgment unit (285) is used for judging whether extreme points exist in all temperature-change curves, if so, determining a reference extreme point time corresponding to each reference extreme point contained in the reference temperature-change curve, judging whether a first extreme point of which the difference value with the reference extreme point is within the difference value range exists in each remaining temperature-change curve except the reference temperature-change curve, if so, determining a first extreme point time corresponding to the first extreme point, and judging whether the time interval between the first extreme point time and the corresponding reference extreme point time is smaller than the corresponding deviation time, if so, judging that the temperature sensor module (26) corresponding to the temperature-change curve does not have a fault, otherwise, judging that the temperature sensor module (26) corresponding to the corresponding temperature-change curve has a fault;

the second determination unit (286) is configured to, when there is no first extreme point having a difference value within a difference range from the reference extreme point in the temperature change curves other than the reference temperature change curve, count a first total number of temperature change curves having no first extreme point having a difference value within a difference range from the reference extreme point, and determine whether a first ratio of the first total number to a second total number of all temperature change curves is less than one half, if yes, determine that there is no temperature sensor module (26) corresponding to each temperature change curve having a first extreme point having a difference value within a difference range from the reference extreme point, and otherwise, determine that there is a temperature sensor module (26) corresponding to each temperature change curve having a first extreme point having a difference value within a difference range from the reference extreme point;

the third judging unit (287) is configured to count a third total number of all temperature change curves without the extreme point when the temperature change curves without the extreme point exist, and judge whether a second ratio of the third total number to the second total number is smaller than half, if yes, judge that the temperature sensor module (26) corresponding to each temperature change curve without the extreme point fails, otherwise, judge that the temperature sensor module (26) corresponding to each temperature change curve with the extreme point fails;

the fan control unit (288) is configured to control the rotation speed of the radiator fan (17) based on the latest temperature value obtained by latest detection by the temperature sensor module (26) determined as not having failed.

9. A bulk acoustic wave filter according to claim 8, wherein: the fan control unit (288) comprises: a distance determining subunit (2881), a relation determining subunit (2882), a temperature predicting subunit (2883), a rotating speed determining subunit (2884) and a rotating speed setting subunit (2885) which are connected in sequence;

the distance determining subunit (2881) is configured to determine a first distance between each temperature sensor module (26) and the heat dissipation fan (17), where a distance between the temperature sensor module and the heat dissipation fan (17) is within a preset range, and take an average value of all the first distances as an average distance corresponding to the heat dissipation fan (17);

the relationship determining subunit (2882) is configured to determine a functional relationship between a third ratio and a latest temperature value obtained by latest detection of each temperature sensor module (26) determined as not having a fault based on the third ratio between the second distance between each temperature sensor module (26) determined as not having a fault and the corresponding heat dissipation fan (17) and the average distance, and the latest temperature value obtained by latest detection of each temperature sensor module (26) determined as not having a fault;

the temperature prediction subunit (2883) is used for calculating a predicted temperature value corresponding to each temperature sensor module (26) determined to have a fault based on a fourth ratio between the first distance between the temperature sensor module (26) determined to have a fault and the corresponding heat dissipation fan (17) and the average distance and the functional relation;

the rotating speed determining subunit (2884) is used for calculating the corresponding rotating speed of the heat radiation fan (17) based on the predicted temperature value corresponding to each temperature sensor module (26) judged to have a fault and the latest temperature value obtained by the latest detection of each temperature sensor module (26) judged not to have a fault;

the rotating speed setting subunit (2885) is used for setting the rotating speed of the heat radiation fan (17) to the set rotating speed.

10. A method for manufacturing a bulk acoustic wave filter is characterized by comprising the following steps:

a piezoelectric substrate (1) is formed,

preparing two electrode patches, forming a first comb-shaped electrode patch (101) on the upper surface of a piezoelectric substrate (1) through a firing process, and forming a second comb-shaped electrode patch (103) on the lower surface of the piezoelectric substrate (1) through the firing process;

preparing a protective device (2), loading the piezoelectric substrate (1) after the firing process into a lower shell (202) through a limiting component, then buckling an upper shell (201),

in the process that upper housing (201) is covered, insert block (19) will be inserted into the inside of slot (24), and in the process that insert block (19) is inserted, fixture block (22) will be squeezed into the inside of recess (20), after insert block (19) arrived the position of least significant end, fixture block (22) will be popped out recess (20) by spring (21), and be blocked in the inside of draw-in groove (25), will set up connecting block (4) mutual fixed connection in upper housing (201) and lower housing (202) both sides through four set screw (6) afterwards.