CN114576742A - Pressure difference control operation support system for clean room - Google Patents

Pressure difference control operation support system for clean room Download PDF

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Publication number
CN114576742A
CN114576742A CN202210138393.7A CN202210138393A CN114576742A CN 114576742 A CN114576742 A CN 114576742A CN 202210138393 A CN202210138393 A CN 202210138393A CN 114576742 A CN114576742 A CN 114576742A
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CN
China
Prior art keywords
air
clean room
unit
air supply
return
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Pending
Application number
CN202210138393.7A
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Chinese (zh)
Inventor
崔静涛
李爱民
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sichuan Chuanjing Clean Technology Holding Co ltd
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Sichuan Chuanjing Clean Technology Holding Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Priority to CN202210138393.7A priority Critical patent/CN114576742A/en
Publication of CN114576742A publication Critical patent/CN114576742A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00Control or safety arrangements
    • F24F11/70Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F24F11/74Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
    • F24F11/77Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity by controlling the speed of ventilators
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00Ventilation
    • F24F7/003Ventilation in combination with air cleaning
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00Ventilation
    • F24F7/04Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F24F7/08Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit with separate ducts for supplied and exhausted air with provisions for reversal of the input and output systems
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00Control inputs relating to air properties
    • F24F2110/10Temperature
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00Control inputs relating to air properties
    • F24F2110/20Humidity
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Air Conditioning Control Device (AREA)
  • Ventilation (AREA)

Abstract

The invention discloses a clean room pressure difference control operation guarantee system, which comprises an air supply unit, a control unit and a control unit, wherein the air supply unit is used for supplying air into a clean room; the AHU is used for sending the fresh air to the air supply unit after being processed; an air exhaust unit for exhausting part of air in the clean room from the clean room; and the air return unit is used for discharging part of air in the clean room from the clean room, returning the part of air to the AHU and sending the part of air to the air supply unit again. The invention utilizes the main module to reasonably design and control the air supply, air exhaust and return air volume of each area in the air conditioning system, thereby ensuring the constant pressure difference and temperature and humidity of the clean room.

Description

Pressure difference control operation support system for clean room
Technical Field
The invention relates to the technical field of clean room pressure difference control, in particular to a clean room pressure difference control operation guarantee system.
Background
Clean rooms (Clean rooms), also called Clean rooms, are rooms in which the number of dust particles and microorganisms in the air is strictly limited and the parameters such as pressure, temperature and humidity in the Room are controlled within a certain range, and are widely applied to the fields of electronics, pharmacy, medical treatment, scientific research and the like.
The pressure of the clean room is one of the critical parameters of the clean room and plays a crucial role in preventing contamination and cross-contamination of the clean room. According to different process requirements, some clean rooms need to maintain positive pressure and some clean rooms need to maintain negative pressure, but all without exception, the clean rooms need to maintain stable and proper pressure level to avoid pollution and cross contamination. For clean rooms of different grades, different pressure differences, i.e. ordered pressure gradients, should also be established between the rooms to ensure a directional flow of air, from a high cleaning grade room to a low cleaning grade room, and from a non-contaminated room to a contaminated room. Unstable pressure control and a clean room with fluctuations beyond the allowable values are unacceptable with serious consequences.
The residual air quantity method can be well applied to general clean rooms such as electronic factory clean rooms, pharmaceutical factory clean rooms and the like, and at present, the precision of the air valve with the highest adjusting precision can reach +/-3%. These valves are widely used in clean room engineering and have found good results in most clean rooms.
Therefore, it is desirable to provide a solution to the problem of achieving satisfactory pressure control in these particular cleanrooms.
At present, the pressure of a room is controlled by controlling the difference value of air inlet and air outlet of the room by adopting an excess air quantity method, when the excess air quantity is a positive value, the room is in a relative positive pressure state, air flows out from the room to the periphery, and when the excess air quantity is a negative value, the opposite is performed; when the residual air volume is kept at a constant value, stable positive pressure or negative pressure can be obtained, and the operation of keeping the residual air volume can be realized by adjusting the opening degree of an air valve of the air inlet pipe and the opening degree of an air valve of the air outlet pipe.
Within the category of clean rooms there are also higher-grade biosafety laboratories. As a clean room for biological experiments, biological safety laboratories, especially high-grade biological safety laboratories can be used for research experiments such as new coronavirus and SARS virus, and because these viruses have extremely strong infectivity, leakage of the viruses in the experimental process must be prevented, the sealing performance of the biological safety laboratories is very high, and the biological safety laboratories are strictly regulated in national standard "biological safety laboratory construction technical Specification" (GB 50346 plus 2011). For these biosafety laboratories, where the above-mentioned conventional methods are often not satisfactory, a loss of control of the pressure may lead to serious consequences such as microbial contamination of the sterile drug, leakage of dangerous microorganisms (e.g. new coronavirus, SARS virus) etc.
In the prior art, the pressure difference is mostly controlled by controlling the residual air volume method to control the pressure difference of the clean room, and the adopted control method is a plurality of open-loop controls, so that the defects are obvious: firstly, the pressure deviation is caused by the fact that the preset air volume cannot overcome interference factors in open-loop control, secondly, accurate control cannot be achieved, and thirdly, energy consumption is large.
Disclosure of Invention
The invention aims to provide a clean room pressure difference control operation guarantee system, which aims to solve the technical problems in the background technology.
In order to achieve the purpose, the invention adopts the following technical scheme:
a pressure difference control operation guarantee system for a clean room comprises an air supply unit, a pressure sensor and a controller, wherein the air supply unit is used for supplying air into the clean room; the AHU is used for sending the fresh air to the air supply unit after being processed; an air exhaust unit for exhausting part of air in the clean room from the clean room; and the air return unit is used for discharging part of air in the clean room from the clean room, returning the part of air to the AHU and sending the part of air to the air supply unit again.
In some embodiments, further comprising: the air supply variable air volume valve is used for controlling the air supply volume of the air supply unit; the air exhaust variable air volume valve is used for controlling the air exhaust volume of the air exhaust unit; and the return air variable air valve is used for controlling the return air quantity of the return air unit.
In some embodiments, further comprising: the main module is respectively connected with the AHU and the air supply variable air volume valve; and the air supply variable air volume valve is respectively connected with the air exhaust variable air volume valve and the air return variable air volume valve.
In some embodiments, further comprising: and the differential pressure sensor is used for detecting the differential pressure in the clean room and is connected with the air supply variable air volume valve.
In some embodiments, further comprising: and the temperature and humidity sensor is used for detecting the temperature and the humidity in the clean room and is connected with the air supply variable air volume valve.
Drawings
FIG. 1 is a schematic view of a clean room differential pressure control operation assurance system of the present invention;
illustration of the drawings: 1-main module, 2-AHU, 3-air supply variable air volume valve, 4-air supply unit, 5-air exhaust unit, 6-air return unit, 7-air exhaust variable air volume valve and 8-air return variable air volume valve.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
On the contrary, this application is intended to cover any alternatives, modifications, equivalents, and alternatives that may be included within the spirit and scope of the application as defined by the appended claims. Furthermore, in the following detailed description of the present application, certain specific details are set forth in order to provide a better understanding of the present application. It will be apparent to one skilled in the art that the present application may be practiced without these specific details.
A clean room pressure difference control operation support system according to an embodiment of the present application will be described in detail with reference to fig. 1. It is to be noted that the following examples are only for explaining the present application and do not constitute a limitation to the present application.
In the embodiment of the application, as shown in fig. 1, the clean room differential pressure control operation support system may include an air supply unit 4, an AHU2, an exhaust unit 5, an air supply variable air volume valve 3, a main module 1, a differential pressure sensor, a temperature and humidity sensor, and the air supply unit 4 is used for supplying air into a clean room; the AHU2 is used for sending the fresh air to the air supply unit 4 after being processed; the exhaust unit 5 is used for exhausting part of air in the clean room from the clean room; and a return air unit 6, wherein the return air unit 6 is used for discharging part of the air in the clean room from the clean room, returning the air to the AHU2, and sending the air to the air supply unit 4 again. The air supply variable air volume valve 3 is used for controlling the air supply volume of the air supply unit 4; an exhaust variable air volume valve 7 for controlling the exhaust volume of the exhaust unit 5; and the return air variable air valve 8 is used for controlling the return air quantity of the return air unit 6.
The main module 1 is respectively connected with an AHU2 and an air supply variable air volume valve 3; the air supply variable air volume valve 3 is respectively connected with an air exhaust variable air volume valve 7 and a return air variable air volume valve 8. And the differential pressure sensor is used for detecting the differential pressure in the clean room and is connected with the air supply variable air volume valve 3. And the temperature and humidity sensor is used for detecting the temperature and the humidity in the clean room and is connected with the air supply variable air volume valve 3.
The invention realizes the function by a set of clean room differential pressure operation guarantee system which can carry out three-level regulation and control, and the system comprises: an air supply unit 4, an air exhaust unit, an air return unit 6, an AHU2 (air handling unit) and a central control system.
The clean room is connected with the air supply unit 4, the air exhaust unit 5 and the air return unit 6, and process equipment is arranged in the clean room. The upstream of the air supply unit 4 is connected with an AHU2 (air handling unit), the downstream of the air return unit 6 is connected with an AHU2, and the outer part of the tail end of the air exhaust unit 5 is provided with an air outlet. Wherein, the exhaust variable air valve 7 of the exhaust unit 5 and the return variable air valve 8 of the return unit 6 are connected with the supply variable air valve 3 of the supply unit 4, and the supply variable air valve 3 and the AHU2 of the supply unit 4 are controlled by a central control system.
When the system works, fresh air and return air which enter the system from the AHU2 enter the air supply unit 4 through the programs of filtering, heating/cooling, humidifying and the like of the AHU2 (air handling unit), and the air supply variable air volume valve 3 controls the air volume which is sent into the clean room.
Part of the air flow in the clean room is then exhausted to the atmosphere by the exhaust unit 5, and the exhaust air volume is controlled by the exhaust air variable air volume valve 7 in the unit. A portion of the clean room flow is returned to the AHU2 by the return air unit 6, which is also controlled by the return air variable flow valve 8. Thereby, a stable pressure difference is formed in the clean room.
When the pressure difference in the clean room changes due to the fact that people enter and exit or equipment is started and stopped, the central control system can detect the change of the residual air quantity transmitted by the sensor system, and then the central control system automatically issues instructions to control the variable air quantity valves of all the units to control the air quantity to maintain the pressure difference for guaranteeing the clean room.
The first stage of differential pressure control is the control of the submodules (the air supply unit 4, the air exhaust unit 5 and the air return unit 6). After the pressure of the clean room is set, the air supply quantity, the air exhaust quantity and the air return quantity are determined in sequence, the air quantity of the room is kept in a stable range at the moment, and further the room pressure is basically kept in a constant interval. When the room pressure is disturbed by the residual air quantity generated by personnel entering or exiting or equipment starting and stopping, the influence of the residual air quantity on the room pressure can be eliminated by adjusting and controlling the air supply unit 4 and the air exhaust unit 5, and the control is the first-stage control on the pressure of the clean room.
The second stage of pressure control is control of the secondary module (variable air volume valve). In each submodule, a variable air volume valve is correspondingly arranged, and besides adjusting the self air inlet volume, the air supply variable air volume valve 3 positioned on the air supply unit 4 also has a control function on an air exhaust variable air volume valve 7 and an air return variable air volume valve 8 positioned on the air exhaust unit 5 and the air return unit 6, and can control the air exhaust and air supply volume correspondingly. The clean room air flow is equal to air supply amount + residual air amount-exhaust amount-air return amount, when the room is in positive pressure (relative to the outside of the clean room), the residual air amount is in a negative value, and the air supply amount can be increased or the exhaust amount can be reduced for ensuring the pressure difference of the room; on the contrary, when the room is at negative pressure, the residual air volume is at a positive value, and the air exhaust volume can be increased or the air supply volume can be reduced to ensure the pressure difference. This is the second level of control over the sub-modules.
The third level of control is control of the main module 1 (central control system). The central control system of the main module 1 controls the AHU2 air handling unit and the sub-module variable air volume valve. The control of the AHU2 air handling unit is mainly the control of each component of the AHU2, such as a fan, a heater, a cooler, and the like, so as to adjust the temperature and humidity in the clean room.
The clean room is provided with a dynamic temperature and humidity sensor, working condition parameters can be reflected to a controller of the variable air volume valve in real time, and the main module 1 can acquire the temperature and humidity parameters. The main module 1 (central control system) controls the sub-modules (variable air volume valves) more comprehensively, and the variable air volume valves of the air supply unit 4, the air exhaust unit 5 and the air return unit 6 can be controlled independently.
After the room condition parameters of the clean room are set, firstly, the main module 1 can download each control command to the secondary module, the components of the fresh air volume, the heating degree/cooling degree, the humidifying section and the like in the AHU2 can act according to the set parameters, each variable air volume valve of the secondary module can also act to the corresponding opening degree to achieve the corresponding air volume, then the secondary module can feed back a loop to continuously adjust each sub-module according to the information of the temperature, the humidity, the pressure and the like at the beginning, and finally the purpose of keeping the pressure difference of the clean room constant is achieved. During the operation of the whole system, the generated residual wind interference can be continuously adjusted by the whole closed-loop control system until being eliminated.
It is worth mentioning that the time spent in the whole interference cancellation process is greatly shortened compared to the conventional technique.
The beneficial effects that may be brought by the clean room differential pressure control operation guarantee system disclosed by the application include but are not limited to:
1. the three-gradient-level control system composed of the main module, the secondary module and the sub-modules can accurately and quickly control air volume to eliminate pressure fluctuation and change the pressure difference of a clean room.
2. The invention utilizes the main module to reasonably design and control the air supply, air exhaust and return air volume of each area in the air conditioning system, thereby ensuring the constant pressure difference and temperature and humidity of the clean room.
3. In the control of the secondary module, the air supply unit, the air exhaust unit, the air return unit, the fresh air block in the AHU and the temperature, humidity and pressure difference sensing system can form a closed-loop control system capable of adjusting automatically.
4. The system has quick response, can reduce the adjusting times and realize the effect of reducing energy consumption.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.

Claims (5)

1. A pressure difference control operation support system for a clean room, comprising:
an air supply unit for supplying air into the clean room;
the AHU is used for sending the fresh air to the air supply unit after being processed;
an air exhaust unit for exhausting a part of air in the clean room from the clean room;
and the air return unit is used for discharging part of air in the clean room from the clean room, returning the part of air to the AHU and sending the part of air to the air supply unit again.
2. The clean room differential pressure control operation assurance system of claim 1, further comprising:
the air supply variable air volume valve is used for controlling the air supply volume of the air supply unit;
the air exhaust variable air volume valve is used for controlling the air exhaust volume of the air exhaust unit;
and the return air variable air valve is used for controlling the return air quantity of the return air unit.
3. The clean room differential pressure control operation assurance system of claim 2, further comprising: the main module is respectively connected with the AHU and the air supply variable air volume valve; and the air supply variable air volume valve is respectively connected with the air exhaust variable air volume valve and the air return variable air volume valve.
4. The clean room differential pressure control operation assurance system of claim 2, further comprising: and the differential pressure sensor is used for detecting the differential pressure in the clean room and is connected with the air supply variable air volume valve.
5. The clean room differential pressure control operation assurance system of claim 2, further comprising: and the temperature and humidity sensor is used for detecting the temperature and the humidity in the clean room and is connected with the air supply variable air volume valve.
CN202210138393.7A 2022-02-15 2022-02-15 Pressure difference control operation support system for clean room Pending CN114576742A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210138393.7A CN114576742A (en) 2022-02-15 2022-02-15 Pressure difference control operation support system for clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210138393.7A CN114576742A (en) 2022-02-15 2022-02-15 Pressure difference control operation support system for clean room

Publications (1)

Publication Number Publication Date
CN114576742A true CN114576742A (en) 2022-06-03

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115682199A (en) * 2022-10-25 2023-02-03 军事科学院系统工程研究院卫勤保障技术研究所 Pressure difference control and ventilation air-conditioning system for isolation cabin
CN116538311A (en) * 2023-07-04 2023-08-04 西安四腾环境科技有限公司 A ventilation valve device for toilet

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115682199A (en) * 2022-10-25 2023-02-03 军事科学院系统工程研究院卫勤保障技术研究所 Pressure difference control and ventilation air-conditioning system for isolation cabin
CN116538311A (en) * 2023-07-04 2023-08-04 西安四腾环境科技有限公司 A ventilation valve device for toilet

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