CN114571125B - Film welding method of capacitance type film vacuum gauge - Google Patents
Film welding method of capacitance type film vacuum gauge Download PDFInfo
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- CN114571125B CN114571125B CN202210492279.4A CN202210492279A CN114571125B CN 114571125 B CN114571125 B CN 114571125B CN 202210492279 A CN202210492279 A CN 202210492279A CN 114571125 B CN114571125 B CN 114571125B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
- B23K31/02—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to soldering or welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K10/00—Welding or cutting by means of a plasma
- B23K10/02—Plasma welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
- B23K31/12—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to investigating the properties, e.g. the weldability, of materials
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
Abstract
The invention relates to the technical field of measuring instruments, and particularly discloses a film welding method of a capacitance film vacuum gauge, which comprises the following steps: heating the central membrane according to a preset temperature, wherein the preset temperature is set according to the tension requirement and the material property of the central membrane; combining a lower cavity, a central diaphragm and an upper cavity of the capacitance type film vacuum gauge and carrying out heat preservation so that the lower cavity and the upper cavity clamp the edge of the central diaphragm at a preset temperature; welding and fixing the lower cavity, the central diaphragm and the upper cavity to form a combined body; standing and cooling the assembly; the method utilizes the characteristics of expansion with heat and contraction with cold of the central diaphragm to weld the heated central diaphragm, so that the central diaphragm in the assembly after standing and cooling has the tension meeting the requirement of the tension, the tension treatment of the tension equipment is omitted, the central diaphragm meets the requirement of the processing quality of the capacitance type film vacuum gauge, and the product percent of pass is effectively improved.
Description
Technical Field
The application relates to the technical field of measuring instruments, in particular to a film welding method of a capacitance film vacuum gauge.
Background
The core part of the metal diaphragm capacitance type film vacuum gauge is a central diaphragm, and the gas pressure is measured by utilizing the deformation generated by the pressure difference of two sides of the central diaphragm.
In order to ensure the strength and the sealing performance of the central diaphragm, the central diaphragm is often welded to a cavity of a vacuum gauge in a welding mode; the tension of the central diaphragm is directly related to the deformation characteristic of the diaphragm, so that the tension of the central diaphragm is closely related to key indexes such as measurement accuracy and repeatability of the counter-volume film vacuum gauge.
In the prior art, a manufacturing process of a capacitance type film vacuum gauge generally adopts a tensioning device to tension a central diaphragm, then the central diaphragm is arranged in a lower cavity and an upper cavity, and then welding is carried out; the processing mode has the defects that the tension is difficult to control, the residual stress in the welding process is easy to couple with the tension to generate uncertain influence, and the product percent of pass is seriously restricted.
In view of the above problems, no effective technical solution exists at present.
Disclosure of Invention
The application aims to provide a film welding method of a capacitance type film vacuum gauge, which replaces an original treatment method of tensioning first and then welding, and avoids influence on product yield caused by coupling of welding residual stress and tensioning force.
The application provides a film welding method of a capacitance type film vacuum gauge, which is used for welding and fixing a central diaphragm of the capacitance type film vacuum gauge and comprises the following steps:
heating the central membrane according to a preset temperature, wherein the preset temperature is set according to the tension requirement and the material property of the central membrane;
combining a lower cavity, the central diaphragm and an upper cavity of the capacitance type thin film vacuum gauge and carrying out heat preservation so that the lower cavity and the upper cavity clamp the edge of the central diaphragm at the preset temperature;
welding and fixing the lower cavity, the central diaphragm and the upper cavity to form a combined body;
and standing to cool the assembly.
According to the film welding method of the capacitive film vacuum gauge, the heated central diaphragm is welded by using the characteristics of expansion with heat and contraction with cold of the central diaphragm, so that the central diaphragm in the combination after standing and cooling has the tension force meeting the tension force requirement, the product percent of pass is effectively improved, and the production flow of the capacitive film vacuum gauge is simplified.
The film welding method of the capacitance film vacuum gauge comprises the following steps of:
calculating the heating temperature difference required by the central membrane to meet the tension requirement according to the tension requirement and the material characteristics;
and setting the preset temperature according to the heating temperature difference and the current temperature.
In the film welding method of the capacitance type film vacuum gauge of this example, the central diaphragm is heated from the normal temperature, and the assembly is finally cooled to the normal temperature, so that the capacitance type film vacuum gauge finally manufactured and obtained can be normally used at the normal temperature, and therefore, the preset temperature needs to calculate the heating temperature difference required by the heating expansion of the central diaphragm and then calculate the heating temperature difference by combining the current temperature.
The film welding method of the capacitance film vacuum gauge is characterized in that the heating temperature difference is obtained by calculating according to the following formula:
△Tas the difference in the heating temperature, for example,σa corresponding tensioning force is required for said tensioning force,αis the coefficient of thermal expansion of the central diaphragm,Eis the modulus of elasticity of the central membrane.
In the film welding method of the capacitance film vacuum gauge, the heating temperature difference required by the central diaphragm to generate the expected expansion form can be quickly calculated according to the tension requirement according to the formula, and the method has the characteristic of convenient and fast calculation.
The film welding method of the capacitance film vacuum gauge, wherein the step of combining the lower cavity, the central diaphragm and the upper cavity of the capacitance film vacuum gauge and performing heat preservation to enable the lower cavity and the upper cavity to clamp the edge of the central diaphragm at the preset temperature comprises the following steps:
the heated central membrane is placed on the lower cavity in an aligned mode, so that the edge of the central membrane is uniformly distributed on the lower cavity, and heat preservation is carried out on the central membrane;
aligning the upper cavity on the lower cavity and pressing the edge of the central membrane.
The film welding method of the capacitance film vacuum gauge, wherein the step of insulating the central diaphragm comprises the following steps:
and supporting the central diaphragm by using a heating support arranged on the inner side of the lower cavity and carrying out heat preservation and heating on the central diaphragm so as to keep the temperature of the central diaphragm at the preset temperature.
The film welding method of the capacitance film vacuum gauge, wherein the step of heating the central diaphragm according to the preset temperature comprises the following steps:
and heating the central membrane by using the heating support so that the temperature of the central membrane reaches the preset temperature.
The film welding method of the capacitance film vacuum gauge, wherein the step of combining the lower cavity, the central diaphragm and the upper cavity of the capacitance film vacuum gauge and performing heat preservation to enable the lower cavity and the upper cavity to clamp the edge of the central diaphragm at the preset temperature further comprises the following steps:
and applying pressure to the upper cavity to enable the upper cavity and the lower cavity to tightly clamp the central diaphragm.
The method for welding a thin film of a capacitive thin film gauge, wherein the step of aligning the heated central diaphragm on the lower chamber comprises:
and the heated central membrane is leveled and is aligned and placed on the lower cavity in a horizontal state.
In the film welding method of the capacitance film vacuum gauge in this example, in order to avoid the position offset or deformation of the central diaphragm caused by the action of gravity, the central diaphragm needs to be leveled and adjusted to be kept in a horizontal state in the operation process of the above steps, and then the central diaphragm is placed on the lower cavity, and the central diaphragm placed on the lower cavity is still kept in a horizontal state of being pulled open, so that the processing error of the product is further reduced, and the processing quality of the product is improved.
The film welding method of the capacitance film vacuum gauge, wherein the step of welding and fixing the lower cavity, the central diaphragm and the upper cavity to form a combined body comprises the following steps: and welding and fixing the lower cavity, the central diaphragm and the upper cavity into the combined body by adopting a micro-beam plasma welding mode with argon protection.
The film welding method of the capacitance film vacuum gauge is characterized in that the central diaphragm is made of inconel X-750, stainless steel SS304, Hastelloy, 3J21 alloy or 0Cr 15 Ni 7 Mo 2 Al。
According to the method, the heated central diaphragm is welded by utilizing the characteristics of expansion with heat and contraction with cold of the central diaphragm, so that the central diaphragm in a combination body after standing and cooling has the tension meeting the tension requirement, the tension treatment of tension equipment is omitted, the random effect caused by stress coupling in the processes of the tension treatment and the welding treatment is avoided, the central diaphragm meets the processing quality requirement of the capacitive film vacuum gauge, the product percent of pass is effectively improved, and the production flow of the capacitive film vacuum gauge is simplified.
Drawings
Fig. 1 is a flowchart of a thin film welding method of a capacitance thin film gauge according to an embodiment of the present application.
Fig. 2 is a schematic view illustrating a center diaphragm placed on a lower cavity in a thin film welding method of a capacitance thin film vacuum gauge according to an embodiment of the present disclosure.
Fig. 3 is a schematic diagram illustrating a lower cavity, a central diaphragm, and an upper cavity in a film welding method of a capacitance film vacuum gauge according to an embodiment of the present disclosure.
Fig. 4 is a schematic structural diagram of a combined unit in a film welding method of a capacitance film vacuum gauge according to an embodiment of the present application.
Reference numerals: 1. a central diaphragm; 2. a lower cavity; 3. an upper cavity; 4. the support is heated.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only some embodiments of the present application, and not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, as presented in the figures, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined or explained in subsequent figures.
In a first aspect, please refer to fig. 1-4, fig. 1-4 illustrate a thin film welding method for a capacitance type thin film vacuum gauge for welding and fixing a central diaphragm 1 of the capacitance type thin film vacuum gauge in some embodiments of the present application, the method includes the following steps:
s1, heating the central membrane 1 according to a preset temperature, wherein the preset temperature is set according to the tension requirement and the material characteristics of the central membrane 1;
specifically, the heating process is heating means capable of accurately controlling the heating temperature, such as induction heating or thermal conduction heating, so that the central membrane 1 can be smoothly and accurately heated to the preset temperature.
More specifically, the central diaphragm 1 of the capacitance type thin film vacuum gauge is generally a thin film made of metal, and after the central diaphragm 1 made of metal is heated, the central diaphragm 1 expands due to heating based on the principle that metal expands with heat and contracts with cold; the heated central diaphragm 1 is cooled and can contract due to temperature reduction, and the film welding method of the capacitance type film vacuum gauge in the embodiment of the application aims to weld and fix the heated and expanded central diaphragm 1 by using the expansion and contraction characteristics of the central diaphragm 1, so that the central diaphragm 1 is cooled and then generates enough tension due to edge contraction limitation.
More specifically, the capacitance type film vacuum gauge has different tension requirements on the central diaphragms 1 made of different materials, the capacitance type film vacuum gauge with different specifications also has different tension requirements on the central diaphragms 1, and different metal materials have different expansion with heat and contraction with cold characteristics; therefore, the preset temperature in step S1 needs to be set according to the tension requirement and the material property of the central diaphragm 1, so that the finally obtained central diaphragm 1 in the capacitance type thin film gauge has an accurate tension.
More specifically, the preset temperature is a target temperature to which the center diaphragm 1 needs to be heated.
S2, carrying out heat preservation on the lower cavity 2, the central diaphragm 1 and the upper cavity 3 of the combined capacitance type film vacuum gauge so as to enable the lower cavity 2 and the upper cavity 3 to clamp the edge of the central diaphragm 1 at a preset temperature;
specifically, the capacitance type film vacuum gauge is a measuring instrument for measuring gas pressure based on the deformation degree generated by the pressure difference between the upper side and the lower side of the central diaphragm, and in the production process, the central diaphragm 1 in a tensioning state generally needs to be welded and fixed by the lower cavity 2 and the upper cavity 3.
More specifically, the central membrane 1 of the capacitance type thin film vacuum gauge is generally a circular membrane, and therefore, uniform heating of the central membrane 1 can cause circumferential uniform deformation of the central membrane 1, so that the central membrane 1 can form a circular membrane slightly larger than the size at normal temperature after being heated, that is, the central membrane 1 is in an expected expansion form of circumferential expansion after being heated; step S2 is to assemble the central diaphragm 1 in the expected expansion form, that is, the lower cavity 2 and the upper cavity 3 are respectively disposed on the upper end surface and the lower end surface of the central diaphragm 1 to combine and connect the three, so that the lower cavity 2 and the upper cavity 3 can clamp the edge of the central diaphragm 1 in the expected expansion form.
S3, welding and fixing the lower cavity 2, the central diaphragm 1 and the upper cavity 3 to form a combined body;
specifically, the central diaphragm 1 of the capacitance type thin film vacuum gauge generally has a thickness of only 20-30 μm, and the thickness of the central diaphragm 1 is negligible relative to the combined body, and during the execution of the step, circumferential welding is mainly performed on the transition position of the lower cavity 2 and the upper cavity 3, so that the lower cavity 2, the central diaphragm 1 and the upper cavity 3 are fixedly connected into a combined body.
And S4, standing and cooling the combined body.
Specifically, step S4 is to cool the assembly to room temperature, preferably using natural air to cool the assembly, so that the assembly cooling process is more gentle.
More specifically, as shown in fig. 4, in the embodiment of the present application, the process of still cooling the combined body is to remove the heating support 4 and make the combined body still cool by using natural air.
More specifically, after welding to form a combined body, the edge of the central membrane 1, which is originally clamped and fixed by the lower cavity 2 and the upper cavity 3, is fixed on the lower cavity 2 and the upper cavity 3 in a circumferential manner; in the process of static cooling of the combined body, the central diaphragm 1 can shrink circumferentially due to temperature reduction, the edges fixed to the lower cavity 2 and the upper cavity 3 can prevent the central diaphragm 1 from shrinking, and then the middle of the central diaphragm 1 can generate tension force from the edges, so that automatic tensioning treatment of the central diaphragm 1 is realized, and the film welding method of the capacitive film vacuum gauge in the embodiment of the application can meet the requirement of the tension force without adopting extra tensioning equipment to perform tensioning treatment before welding on the central diaphragm 1.
More specifically, in the traditional processing process of firstly tensioning and then welding, the residual stress generated in the welding process is difficult to control, so that the membrane in the tensioned state is easy to generate defects such as fracture or crack, and secondly, even if the residual stress is properly controlled, the residual stress and the tensioning force of the central membrane 1 generate random coupling action, so that the processing quality of a product is difficult to control; the tensioning force applied to the central diaphragm 1 is the tensioning stress spontaneously generated from the edge to the center due to cooling shrinkage in the standing and cooling process, so that the tensioning force of the central diaphragm 1 is uniformly distributed, and the processing quality requirement of the capacitance type film vacuum gauge can be met.
The film welding method of the capacitance film vacuum gauge comprises the steps of welding the heated center diaphragm 1 by utilizing the characteristics of expansion with heat and contraction with cold of the center diaphragm 1, enabling the center diaphragm 1 in the combination body after standing and cooling to have the tension meeting the tension requirement, avoiding the tension treatment of the tension equipment, avoiding the random effect generated by stress coupling in the processes of tension treatment and welding treatment, enabling the center diaphragm 1 to meet the processing quality requirement of the capacitance film vacuum gauge, effectively improving the product qualification rate, and simplifying the production flow of the capacitance film vacuum gauge.
In some preferred embodiments, the method further comprises the steps of:
s5, carrying out stress test on the central diaphragm 1, and checking whether the tension force applied to the central diaphragm 1 meets the tension force requirement.
Specifically, the tension force applied to the central membrane 1 of the combined body manufactured based on steps S1-S4 may cause an error in the tension force due to some scene factors or operation errors, and therefore, a stress test is performed on the central membrane 1 in the combined body to check the processing quality of the combined body.
More specifically, in addition to the above-mentioned factors, there may occur a tension error caused by a deviation of a reference parameter, such as an inaccuracy of a material characteristic that causes a preset temperature not to generate a desired tension of the center membrane 1 of the finally obtained assembly, which may affect the processing quality of all assemblies, and therefore, the method further includes the steps of:
and S6, adjusting the preset temperature according to the stress test result.
Specifically, the adjusted preset temperature is a heating temperature used before the welding treatment of the central diaphragm 1 of other subsequent capacitive film vacuum gauges, so that the central diaphragm 1 in the assembly obtained by the subsequent welding process meets the requirement of the tension force.
More specifically, the step is to obtain a tension deviation result according to the stress test result, and appropriately increase or decrease the preset temperature according to the deviation result, that is, compensate the originally calculated preset temperature, so that the tension requirement of the capacitance film vacuum gauge can be met by performing steps S2-S4 after the subsequently processed center diaphragm 1 is heated based on the compensated preset temperature.
In some preferred embodiments, the setting of the preset temperature includes:
calculating the heating temperature difference required by the central membrane 1 to meet the tension requirement according to the tension requirement and the material characteristics;
and setting a preset temperature according to the heating temperature difference and the current temperature.
Specifically, in other embodiments, the preset temperature may be estimated based on the tension requirement and the material property and according to an empirical value or a plurality of verification tests.
More specifically, in the embodiment of the present application, the central diaphragm 1 is heated from a normal temperature (current temperature), and the assembly is finally cooled to the normal temperature, so that the finally manufactured capacitance type thin film vacuum gauge can be normally used at the normal temperature, and therefore, the preset temperature needs to calculate the heating temperature difference required by the central diaphragm 1 to heat and expand, and then calculate the preset temperature by combining the current temperature.
More specifically, in the process of calculating the preset temperature, the welding temperature of the material of the central diaphragm 1 needs to be considered, that is, the temperature of the central diaphragm 1 heated according to the preset temperature needs to be ensured to meet the use rule of the corresponding welding operation; in the embodiment of the present application, the preset temperature is required to satisfy NB/T47015-20 ll pressure vessel welding regulations, i.e. the preset temperature corresponding to the central diaphragm 1 is required to satisfy the preheating temperature range of the corresponding material in the pressure vessel welding regulations.
In some preferred embodiments, the heating temperature difference is calculated according to the following formula:
△Tin order to heat the temperature difference,σa corresponding tensioning force is required for the tensioning force,αbeing the thermal expansion coefficient of the central membrane 1,Ethe modulus of elasticity of the central membrane 1.
Specifically, the heating temperature difference required by the central membrane 1 to generate the expected expansion form can be quickly calculated according to the tension requirement according to the formula (1), and the method has the characteristic of convenience and quickness in calculation.
More specifically, the derivation of equation (1) is obtained as follows:
from hooke's law:
（2）
wherein the content of the first and second substances,εis strain;
according to the strain formula, the following can be obtained:
（3）
wherein the content of the first and second substances,Din order to be of an effective diameter,△Din radial increments;
the method can be obtained according to the characteristics of the relationship between the radial increment and the thermal expansion of the uniform metal material after being heated:
the equations (2) and (3) are substituted into the equation (4), and the equation (1) is obtained by conversion.
More specifically, coefficient of thermal expansionαHas a linear relation with temperature, i.e. the same metal material is differentThe solid metal material has different thermal expansion coefficients at temperature, and generally, when the temperature change degree is not high (such as 25-200 ℃), the change of the thermal expansion coefficient of the solid metal material is small and negligible, so that in the process of calculating the heating temperature difference by using the formula (1), the thermal expansion coefficient can be regarded as a fixed value to simplify the calculation process of the heating temperature difference.
More specifically, the thermal expansion coefficient is preferably set to a constant value according to the temperature interval, such as a value corresponding to the thermal expansion coefficient at 25 ℃ or 100 ℃ or 112.5 ℃ in the interval of 25 to 200 ℃; therefore, in the embodiment of the present application, in the process of calculating the heating temperature difference, it is necessary to obtain the current temperature first to determine the value of the thermal expansion coefficient, so that the finally obtained heating temperature difference matches the current temperature.
In some preferred embodiments, the step of combining the lower chamber 2, the central membrane 1 and the upper chamber 3 of the capacitance type thin film vacuum gauge and performing heat preservation such that the lower chamber 2 and the upper chamber 3 sandwich the edge of the central membrane 1 at a preset temperature includes:
s21, as shown in figure 2, the heated central membrane 1 is placed on the lower cavity 2 in an aligned mode, so that the edge of the central membrane is uniformly distributed on the lower cavity 2, and heat preservation is carried out on the central membrane 1;
specifically, the capacitance type thin film vacuum gauge measures gas pressure according to the deformation of the middle part of the central diaphragm 1, so that a combined body formed by welding the central diaphragm 1 needs to ensure that the tension force received by the middle part of the central diaphragm 1 is uniform, and step S21 needs to align the central diaphragm 1 to the lower cavity 2, so that the edge of the central diaphragm is uniformly distributed on the lower cavity 2, and the finally manufactured capacitance type thin film vacuum gauge is guaranteed to be qualified in quality.
More specifically, to avoid premature shrinkage of the central membrane 1 due to cooling before welding, this step requires continuous heat preservation of the central membrane 1, so that the temperature of the central membrane 1 is maintained at the preset temperature until the end of the welding operation.
More specifically, the lower cavity 2 is cylindrical in shape, and the alignment of the central diaphragm 1 with the lower cavity 2 should be understood as the axial lines of the circular central diaphragm 1 and the lower cavity 2 are collinear, so that the edges of the central diaphragm 1 at different positions have the same contact ratio with the lower cavity 2.
S22, as shown in fig. 3, the upper chamber 3 is aligned on the lower chamber 2 and pressed against the edge of the central membrane 1.
Specifically, the upper cavity 3 and the lower cavity 2 are aligned so that the upper cavity 3 is also aligned with the central membrane 1, so that the upper cavity 3 and the lower cavity 2 can smoothly compress and clamp the edge of the central membrane 1, and subsequent welding operation is facilitated.
In some preferred embodiments, the step of maintaining the central membrane 1 comprises:
and supporting the central membrane 1 by using a heating support 4 arranged on the inner side of the lower cavity 2 and carrying out heat preservation and heating on the central membrane 1 so as to keep the temperature of the central membrane 1 at a preset temperature.
Specifically, the heating support 4 is used to heat the bottom surface of the center membrane 1 so that the center membrane 1 is maintained at a preset temperature.
More specifically, the heating support 4 is also used for supporting the central membrane 1, so that the central membrane 1 can be welded and fixed in the lower cavity 2 and the upper cavity 3 under the supporting effect of the heating support 4, and the problem that the central membrane 1 of the finally manufactured capacitive thin film vacuum gauge generates tension deviation due to the fact that the central portion of the central membrane 1 sinks under the action of gravity can be effectively avoided.
More specifically, the top of the heating support 4 is provided with a heating coil or a heating film to contact and heat the central membrane 1; the temperature of the central diaphragm 1 can be conveniently and accurately controlled by adopting a contact heating mode, the thickness of the central diaphragm 1 is smaller, and in the embodiment of the application, the temperature of the central diaphragm 1 can be kept to be the preset temperature only by ensuring that the temperature of the heating coil or the heating film of the heating support 4 is stabilized at the preset temperature.
In some preferred embodiments, step S1 may be implemented by using an existing heating device, such as a heating furnace, to heat the central membrane 1, in order to reduce equipment cost, improve resource utilization rate, and reduce heat loss, in this embodiment, it is preferable to implement step S1 to heat the central membrane 1 by using the above-mentioned heating support 4, and therefore, the step of heating the central membrane 1 according to the preset temperature includes:
the central membrane 1 is heated by the heating support 4 so that the temperature of the central membrane 1 reaches a preset temperature.
Specifically, in another embodiment, the central membrane 1 may be placed on the lower cavity 2, and then the central membrane 1 is heated to the predetermined temperature by the heating support 4 to simplify the operation process, but this processing manner may cause the temperature of the lower cavity 2 to rise due to the heat conduction function of the central membrane 1, and therefore, in this embodiment of the present application, it is preferable to first heat the central membrane 1 to the predetermined temperature by the heating support 4, then take up the central membrane 1, transfer the heating support 4 to the inner side of the lower cavity 2, and then execute step S21 to avoid the temperature rise of the lower cavity 2 from affecting the subsequent operation.
In some preferred embodiments, the step of combining the lower cavity 2, the central diaphragm 1 and the upper cavity 3 of the capacitance type thin film vacuum gauge and performing heat preservation so that the lower cavity 2 and the upper cavity 3 clamp the edge of the central diaphragm 1 at a preset temperature further comprises the steps of:
and S23, applying pressure to the upper cavity 3 to enable the upper cavity 3 and the lower cavity 2 to tightly clamp the central diaphragm 1.
Specifically, the upper cavity 3 is pressed to enable the upper cavity 3, the central diaphragm 1 and the lower cavity 2 to be in close contact, the welding positions of the upper cavity 3, the central diaphragm 1 and the lower cavity are ensured to be welded tightly, and the processing quality of products is improved.
More specifically, the pressure applying direction is perpendicular to the top surface of the central diaphragm 1, and the force is applied along the annular columnar structure of the lower cavity 2, so that the upper cavity 3 and the lower cavity 2 can tightly and firmly clamp the edge of the central diaphragm 1.
In some preferred embodiments, the step of placing the heated central membrane 1 in alignment on the lower chamber 2 comprises:
the heated central membrane 1 is laid flat and aligned horizontally on the lower chamber 2.
Specifically, in order to avoid the position offset or deformation of the central diaphragm 1 caused by the action of gravity, the central diaphragm 1 needs to be leveled and adjusted to be kept in a horizontal state in the operation process of the steps, and then the central diaphragm is placed on the lower cavity 2, so that the central diaphragm 1 placed on the lower cavity 2 is still kept in a pulled horizontal state, and thus, the processing error of the product is further reduced, and the processing quality of the product is improved.
In some preferred embodiments, the step of welding the lower chamber 2, the central diaphragm 1 and the upper chamber 3 to form a combined body comprises: and the lower cavity 2, the central diaphragm 1 and the upper cavity 3 are welded and fixed into a combined body by adopting a micro-beam plasma welding mode with argon protection.
Specifically, the micro-beam plasma welding mode with argon protection has the characteristic of high-precision welding, has a higher preheating temperature range, and ensures that the heated central diaphragm 1 can be welded.
More specifically, in the embodiment of the present application, the welding mode of the microbeam plasma with the argon shield preferably adopts a welding current of 25A.
In some preferred embodiments, the center diaphragm 1 is made of various grades of nickel-based alloys or various alloy steels, such as inconel X-750, stainless steel SS304, hastelloy (nickel-based superalloy), 3J21 (cobalt-based spring and gold), or 0Cr 15 Ni 7 Mo 2 Al。
Specifically, the above materials are all metal materials which can be selected for the central diaphragm of the capacitance film vacuum gauge, and have relatively stable thermal expansion and cold contraction characteristics, and can meet the requirement of the film welding method of the capacitance film vacuum gauge provided by the embodiment of the present application, in the embodiment of the present application, the material of the central diaphragm 1 is preferably inconel X-750.
Example 1
Taking the welding process of the center diaphragm 1 made of inconel X-750 material as an example, the inconel X-750 is a nickel-based alloy, and the thermal expansion coefficient is as follows:
TABLE 1 thermal expansion coefficient of inconel X-750
| Temperature (. degree.C.) | 50 | 100 | 300 | 500 | 900 |
| Coefficient of thermal expansion (X10) -6 /℃） | 13.1 | 13.1 | 13.5 | 14.4 | 16.2 |
Taking the tensile force requirement of the capacitance film vacuum gauge as 300MPa and the current temperature as 25 ℃ as an example, the elasticity modulus of inconel X-750 is 214000MPa, and the expansion coefficient is set as 13.1X 10 -6 and/DEG C, calculating according to the formula (1), wherein the heating temperature difference is 107 ℃, so that the preset temperature is 25+107=132 ℃, the preset temperature meets the preheating temperature range of nickel-based alloy in pressure vessel welding regulations, and the central diaphragm 1 of the combined body obtained by executing the steps S1-S4 according to the preset temperature meets the tension requirement of 300MPa after verification.
Example 2
Taking the welding process of the central diaphragm 1 made of austenitic stainless steel SS304 as an example, the thermal expansion coefficient of the stainless steel SS304 is as follows:
TABLE 2 thermal expansion coefficient of stainless steel SS304
| Temperature (. degree. C.) | 50 | 100 | 300 | 500 |
| Coefficient of thermal expansion (X10) -6 /℃） | 15.4 | 15.8 | 17 | 17.6 |
Taking the tensile force requirement of a capacitance film vacuum gauge as 300MPa and the current temperature as 25 ℃ as an example, the elastic modulus of stainless steel SS304 is 200000MPa, and the expansion coefficient is set as 15.8X 10 -6 The heating temperature difference is 95 ℃ calculated according to the formula (1), so the preset temperature is 25+95=120 ℃, according to the pressure vessel welding regulation, the influence of the preheating temperature on the welding performance can be ignored due to the good welding performance of austenitic stainless steel, and the central diaphragm 1 of the combined body obtained by executing the steps S1-S4 according to the preset temperature meets the tension requirement of 300MPa after verification.
In summary, the embodiment of the present application provides a film welding method for a capacitive film vacuum gauge, the method utilizes the characteristics of thermal expansion and cold contraction of a central film 1 to weld the heated central film 1, so that the central film 1 in a combination after standing and cooling has a tension meeting the tension requirement, the tension treatment of a tension device is omitted, the random effect generated by stress coupling in the processes of tension treatment and welding treatment is also avoided, the central film 1 meets the processing quality requirement of the capacitive film vacuum gauge, the product yield is effectively improved, and the production flow of the capacitive film vacuum gauge is simplified.
In the embodiments provided in the present application, it should be understood that the disclosed method may be implemented in other ways. The above-described method embodiments are merely illustrative.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (6)
1. A film welding method of a capacitance film vacuum gauge, which is used for welding and fixing a central diaphragm of the capacitance film vacuum gauge, and is characterized by comprising the following steps:
heating the central membrane according to a preset temperature, wherein the preset temperature is set according to the tension requirement and the material characteristics of the central membrane;
combining a lower cavity, the central diaphragm and an upper cavity of the capacitance type thin film vacuum gauge and preserving heat so that the lower cavity and the upper cavity clamp the edge of the central diaphragm at the preset temperature;
welding and fixing the lower cavity, the central diaphragm and the upper cavity to form a combined body;
standing and cooling the assembly;
the step of combining the lower cavity, the central diaphragm and the upper cavity of the capacitance type thin film vacuum gauge and performing heat preservation so that the lower cavity and the upper cavity clamp the edge of the central diaphragm at the preset temperature comprises the following steps:
the heated central membrane is placed on the lower cavity in an aligned mode, so that the edge of the central membrane is uniformly distributed on the lower cavity, and heat preservation is carried out on the central membrane;
aligning the upper cavity on the lower cavity and pressing the edge of the central membrane;
applying pressure to the upper cavity to enable the upper cavity and the lower cavity to tightly clamp the central diaphragm;
the step of insulating the central membrane comprises:
supporting the central diaphragm by using a heating support arranged on the inner side of the lower cavity and carrying out heat preservation and heating on the central diaphragm so as to keep the temperature of the central diaphragm at the preset temperature;
the central diaphragm is made of stainless steel SS304, Hastelloy, 3J21 alloy or 0Cr 15 Ni 7 Mo 2 Al；
And the top of the heating support is provided with a heating coil or a heating film to contact and heat the central diaphragm.
2. The film welding method of a capacitance type film vacuum gauge according to claim 1, wherein the setting process of the preset temperature comprises:
calculating the heating temperature difference required by the central membrane to meet the tension requirement according to the tension requirement and the material characteristics;
and setting the preset temperature according to the heating temperature difference and the current temperature.
3. The film welding method of a capacitance type film vacuum gauge according to claim 2, wherein the heating temperature difference is calculated according to the following formula:
△Tas the difference in the heating temperature, there is,σa corresponding tensioning force is required for said tensioning force,αis the coefficient of thermal expansion of the central diaphragm,Eis the modulus of elasticity of the central membrane.
4. The film welding method of a capacitance type film vacuum gauge as set forth in claim 1, wherein said step of heating said center diaphragm at a predetermined temperature comprises:
and heating the central membrane by using the heating support so that the temperature of the central membrane reaches the preset temperature.
5. The film welding method of a capacitance type film vacuum gauge according to claim 1, wherein the step of aligning the heated center diaphragm placed on the lower chamber comprises:
and the heated central membrane is leveled and is aligned and placed on the lower cavity in a horizontal state.
6. The method of claim 1, wherein the step of welding the lower chamber, the central diaphragm, and the upper chamber to form a combination comprises: and welding and fixing the lower cavity, the central diaphragm and the upper cavity into the combined body by adopting a micro-beam plasma welding mode with argon protection.
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