CN114570990A - Forming cutter for sputtering target material sealing groove and grooving method thereof - Google Patents
Forming cutter for sputtering target material sealing groove and grooving method thereof Download PDFInfo
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- CN114570990A CN114570990A CN202210238074.3A CN202210238074A CN114570990A CN 114570990 A CN114570990 A CN 114570990A CN 202210238074 A CN202210238074 A CN 202210238074A CN 114570990 A CN114570990 A CN 114570990A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C5/00—Milling-cutters
- B23C5/02—Milling-cutters characterised by the shape of the cutter
- B23C5/10—Shank-type cutters, i.e. with an integral shaft
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C3/00—Milling particular work; Special milling operations; Machines therefor
- B23C3/28—Grooving workpieces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C5/00—Milling-cutters
- B23C5/16—Milling-cutters characterised by physical features other than shape
- B23C5/165—Milling-cutters characterised by physical features other than shape with chipbreaking or chipdividing equipment
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Abstract
The invention relates to a forming cutter for a sputtering target material sealing groove and a grooving method thereof, wherein the forming cutter comprises a cylindrical cutter bar, protrusions are arranged on the end surface of the cutter bar, the protrusions are distributed on an annular region taking the central axis of the cutter bar as the central line, and a chip removal groove is formed between every two adjacent protrusions; the forming cutter is used for the slotting process of sputtering the O-shaped sealing groove of the target material, the rotating speed and the feeding amount of the forming cutter are controlled, various errors generated in the machining process can be effectively avoided, the consistency of the diameter of the O-shaped sealing groove is favorably maintained, and the slotting efficiency is improved.
Description
Technical Field
The invention belongs to the field of sputtering target processing, and relates to a forming cutter for a sputtering target sealing groove and a grooving method thereof.
Background
The sputtering target material sealing groove is the most critical place in the use process of the target material, can ensure that the phenomena of air leakage, water leakage and the like do not occur in the use process of the sputtering target material, and avoids damaging a sputtering machine table in the sputtering process; at present, an end mill is adopted for processing in the processing process of a sputtering target material sealing groove machine, and cutter measurement errors, machine tool alignment errors and errors existing in each measurement exist in each processing; further, the problem of poor diameter consistency of the machined O-shaped sealing groove is caused.
CN101935823A discloses a magnetron sputtering target, which comprises a target cathode and a target anode, wherein the target anode comprises a target top flange and a grounding sheath, the target top flange is connected with the grounding sheath, and the upper part of the target anode is sealed; the target cathode comprises a target body, the target body is arranged in a grounding sheath in a non-contact manner with the target anode through an insulating connecting piece arranged on the target anode, the upper surface of the target body and the target anode are sealed through an O-shaped ring, the target material is tightly fixed on the lower surface of the target body, and a through hole matched with the target material in size is formed in the grounding sheath at the lower part of the target material.
CN204849010U discloses a magnetron sputtering target capable of externally adjusting a magnetic field, which mainly comprises a target body and a magnetizer, wherein the lower end of the target body is provided with a through hole, an adjusting shaft is arranged in the target body, the lower end of the adjusting shaft is positioned in the through hole, a locking nut is arranged in the through hole through a pressing sleeve III and is fixed with the lower end of the adjusting shaft, the adjusting shaft is provided with a pressing sleeve I and a pressing sleeve II, an O-shaped sealing ring is arranged between the pressing sleeve I and the pressing sleeve II, the pressing sleeve I is positioned above the pressing sleeve II, the pressing sleeve I is fixed in the target body through a bolt, an O-shaped sealing ring is arranged between the pressing sleeve I and the target body, the magnetizer is arranged on the adjusting shaft through an adjustable supporting plate, and the magnetizer is arranged on the adjustable supporting plate through a stud and is fixed through a nut; none of the above documents gives a technical content of how to improve the uniformity of the diameter of the O-ring seal groove.
Therefore, in order to avoid various errors in the traditional milling cutter machining and improve the reliability of the sputtering target in the using process, the development of the forming cutter and the grooving method which can effectively improve the diameter consistency of the O-shaped sealing groove of the sputtering target is still of great significance.
Disclosure of Invention
The invention aims to provide a forming cutter for sputtering a target material sealing groove and a grooving method thereof, wherein the forming cutter comprises a cylindrical cutter bar, bulges are arranged on the end surface of the cutter bar, the bulges are distributed on a circular region taking the central axis of the cutter bar as the central line, and chip grooves are arranged between adjacent bulges; the forming cutter is used for the slotting process of sputtering the O-shaped sealing groove of the target material, the rotating speed and the feeding amount of the forming cutter are controlled, various errors generated in the machining process can be effectively avoided, the consistency of the diameter of the O-shaped sealing groove is favorably maintained, and the slotting efficiency is improved.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the invention provides a forming cutter for a sputtering target material sealing groove, the forming cutter comprises a cylindrical cutter bar, protrusions are arranged on the end face of the cutter bar, the protrusions are distributed on an annular region with the central axis of the cutter bar as the central line, and chip removal grooves are formed between every two adjacent protrusions.
The sputtering target material sealing groove is machined by adopting an end mill at present, cutter measurement errors, machine tool alignment errors and errors existing in each measurement exist in each machining, and due to the existence of the errors, the obtained sputtering target material is easy to generate the phenomena of air leakage, water leakage and the like, so that the phenomenon of damaging a sputtering machine table in the sputtering process is easy to generate; and adopt this application above-mentioned structure's shaping sword, it is located the arch of the terminal surface of cutter arbor uses the axis of cutter arbor to be the ring form distribution as the central line to set up the chip groove between adjacent arch, use it for the fluting process of O type seal groove, can effectively control the diameter uniformity of sputtering target O type seal groove, avoid the production of course of working error, and be favorable to improving the machining efficiency of fluting process.
The projections on the forming cutter are distributed in a circular ring shape by taking the central axis of the cutter bar as a central line, and when the projections rotate by taking the central axis of the cutter bar as an axis, the projections are in contact with the sputtering target to form an O-shaped sealing groove in a rotatable manner, so that various errors can be avoided, the diameter consistency of the O-shaped sealing groove of the sputtering target can be effectively controlled, meanwhile, a chip groove is formed between every two adjacent projections, and chips generated in the grooving process can be timely discharged, so that the processing effect is ensured, and the processing efficiency is improved.
As a preferable technical scheme of the invention, the number of the bulges is two, and the bulges are rotationally and symmetrically distributed by taking the central axis of the cutter bar as a central line.
The two bulges are rotationally and symmetrically distributed, so that the consistency of the diameters of the O-shaped sealing grooves can be further ensured in the grooving process, and the grooving efficiency can be improved.
As a preferred technical solution of the present invention, the protrusion is of a two-stage step shape, the protrusion includes a first-stage protrusion connected to an end surface of the cutter bar and a second-stage protrusion located on the first-stage protrusion, cross-sectional shapes of the first-stage protrusion and the second-stage protrusion are respectively independent and rectangular, and a radial thickness of the second-stage protrusion is smaller than a radial thickness of the first-stage protrusion.
The forming cutter adopting the structure is used for the grooving process, so that the consistency of the diameter of the O-shaped ring can be controlled more favorably, and the processing efficiency is higher.
The cross-sections of the first-stage projection and the second-stage projection here refer to the cross-sections formed by the intersection of the plane of the central axis and radial line of the tool shank with the projections.
The cross section of the bulge is rectangular, the first-stage bulge and the second-stage bulge respectively comprise an outer circumferential surface, an inner circumferential surface, an upper end surface and two side surfaces along the circumferential direction, and the second-stage bulge is positioned on the upper end surface of the first-stage bulge.
As a preferred technical solution of the present invention, the outer circumferential surface of the first-stage protrusion is flush with the outer circumferential surface of the cutter bar.
The outer circumferential surface of the first-stage bulge is controlled to be flush with the outer circumferential surface of the cutter bar, and the control of the grooving depth is facilitated.
As a preferred technical solution of the present invention, the outer circumferential surface of the first-stage protrusion and the outer circumferential surface of the second-stage protrusion are transitionally connected by a first inclined surface.
Preferably, the inner circumferential surface of the first-stage protrusion is in transitional connection with the inner circumferential surface of the second-stage protrusion through a second inclined surface.
Preferably, the included angle between the first inclined surface and the second inclined surface is 80-100 °, such as 80 °, 82 °, 84 °, 86 °, 88 °, 90 °, 92 °, 94 °, 96 °, 98 ° or 100 °, but not limited to the listed values, and other values in the range of the values are also applicable.
The corresponding position is the included angle between the cross section of the first protrusion and the second protrusion and two inclined planes at the intersection position of the first inclined plane and the second inclined plane.
As a preferable technical scheme of the present invention, the chip groove is located at an end of the cutter bar, the chip groove is a groove body formed by intersecting a plane and a curved surface, and the plane is flush with a side surface of one side of the protrusion.
The chip discharge grooves are located between the adjacent bulges and used for timely discharging chips generated in the grooving process, so that the diameter consistency of the O-shaped sealing grooves in the grooving process is ensured, and the grooving efficiency is improved.
The chip groove is located the tip of cutter arbor, it is the crossing cell body that constitutes by a plane and a curved surface, the plane with bellied one side parallel and level adopts above-mentioned design, and it is favorable to the piece of fluting process production in time to discharge, reduces the piece to the interference of fluting process, and then improves the machining effect.
Preferably, as a preferred embodiment of the present invention, the height of the first-stage protrusions is 2 to 3mm, and may be, for example, 2.0mm, 2.1mm, 2.2mm, 2.3mm, 2.4mm, 2.5mm, 2.6mm, 2.7mm, 2.8mm, 2.9mm, or 3.0mm, but is not limited to the values listed, and other values not listed in the range of the values are also applicable.
Preferably, the height of the second stage projections is 1 to 2mm, and may be, for example, 1.0mm, 1.1mm, 1.2mm, 1.3mm, 1.4mm, 1.5mm, 1.6mm, 1.7mm, 1.8mm, 1.9mm or 2.0mm, but is not limited to the recited values, and other values not recited in the range of values are equally applicable.
The heights of the first-stage bulges and the second-stage bulges refer to the thicknesses of the first-stage bulges and the second-stage bulges along the central axis direction of the cutter bar; according to the invention, the heights of the first-stage bulges and the second-stage bulges can be adjusted according to the depth requirement of the grooved O-shaped sealing groove.
In a preferred embodiment of the present invention, the diameter of the inner circumference of the first-stage projection is 8 to 10mm, and may be, for example, 8.0mm, 8.2mm, 8.4mm, 8.6mm, 8.8mm, 9.0mm, 9.2mm, 9.4mm, 9.6mm, 9.8mm, or 10mm, but is not limited to the above-mentioned values, and other values not listed in the above-mentioned range are also applicable.
Preferably, the diameter of the outer circumference of the first-stage protrusions is 10-20 mm, such as 10mm, 11mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm or 20mm, but is not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the inner circumference of the second stage protrusion has a diameter of 5 to 15mm, such as 5mm, 6mm, 7mm, 8mm, 9mm, 10mm, 11mm, 12mm, 13mm, 14mm or 15mm, and the outer circumference of the second stage protrusion has a diameter of 10 to 20mm, such as 10mm, 11mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm or 20mm, but not limited to the recited values, and other values not recited in the range of values are equally applicable.
Preferably, one end of the cutter bar, which is far away from the bulge, is provided with a truncated cone-shaped cutter tail.
In a second aspect, the present invention provides a method for slotting a sealing groove of a sputtering target, wherein the slotting method employs the forming cutter of the first aspect.
Preferably, the sputtering target sealing groove is an O-shaped sealing groove.
Preferably, the rotation speed of the forming blade used in the grooving method is 3000-4000 rpm, for example 3000rpm, 3100rpm, 3200rpm, 3300rpm, 3400rpm, 3500rpm, 3600rpm, 3700rpm, 3800rpm, 3900rpm or 4000rpm, but is not limited to the above-mentioned values, and other values not listed in the above-mentioned range are also applicable.
Preferably, the feeding amount of the forming blade is 10 to 20mm, for example, 10mm, 11mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm or 20mm, but is not limited to the values listed, and other values not listed in the range of the values are also applicable.
According to the slotting method, the forming cutter in the first aspect is adopted, the rotating speed and the feeding parameters of the forming cutter are controlled within the ranges in the slotting process, the machining precision of the O-shaped sealing groove of the sputtering target material is improved, scraps in the machining process are discharged in time, the diameter consistency of the O-shaped sealing groove of the sputtering target material is ensured, and meanwhile, the machining efficiency is high.
As a preferable technical solution of the present invention, the grooving method adopts an alcohol spray cooling as a cooling method.
By adopting the forming cutter and combining the processing parameters, the processing precision of the O-shaped sealing groove can be obviously improved by adopting alcohol spray cooling, and the diameter consistency of the O-shaped sealing groove is ensured.
The principle of the forming cutter for slotting the O-shaped sealing groove of the sputtering target material is as follows: in the process of slotting, the forming cutter rotates by taking the central axis of the cutter bar as an axis to drive the bulge on the end face of the cutter bar to do rotary motion, the bulge is in contact with a sputtering target material, and the O-shaped sealing groove is obtained by machining; the forming cutter is adopted to process the O-shaped sealing groove, so that the problem of inconsistent diameter of the O-shaped sealing groove is avoided, and the safety of the sputtering target material in the using process is improved.
Compared with the prior art, the invention has the following beneficial effects:
(1) the forming cutter comprises a cylindrical cutter bar, wherein the end face of the cylindrical cutter bar is provided with protrusions which are distributed in a ring shape and take the central axis of the cutter bar as a central line, chip grooves are formed between the adjacent protrusions, the forming cutter is used for machining an O-shaped sealing groove of a sputtering target, various measurement errors generated in the machining process can be effectively avoided, the diameter consistency of the obtained O-shaped sealing groove is good, the chip grooves are formed in the gaps between the adjacent protrusions, chips generated in the groove opening are timely removed, the machining effect is favorably improved, and the machining efficiency is improved;
(2) the forming cutter is used for processing an O-shaped sealing groove, the rotating speed and the feeding amount of the forming cutter in the grooving process are controlled, the grooving efficiency and the grooving precision are high, the obtained sputtering target material is used in the sputtering process, the phenomena of air leakage and water leakage are not easy to occur, and a sputtering machine table cannot be damaged.
Drawings
FIG. 1 is a cross-sectional view of a profiled knife according to one embodiment of the present invention;
FIG. 2 is an optical photograph of a form knife according to one embodiment of the present invention;
wherein, 1-a cutter bar; 2-convex; 20-first level projections; 21-second level protrusions; 3-chip removal groove; 4-knife tail.
Detailed Description
It is to be understood that in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be taken as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
It should be noted that, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "disposed," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The technical solution of the present invention is further explained by the following embodiments.
In a specific embodiment, the invention provides a forming cutter for a sputtering target sealing groove, as shown in fig. 1 and 2, the forming cutter comprises a cylindrical cutter bar 1, wherein protrusions 2 are arranged on an end surface of the cutter bar 1, the protrusions 2 are distributed on an annular region taking a central axis of the cutter bar 1 as a central line, and chip removal grooves 3 are arranged between adjacent protrusions 2.
The sputtering target material sealing groove is machined by adopting an end mill at present, cutter measurement errors, machine tool alignment errors and errors existing in each measurement exist in each machining, and due to the existence of the errors, the obtained sputtering target material is easy to generate the phenomena of air leakage, water leakage and the like, so that the phenomenon of damaging a sputtering machine table in the sputtering process is easy to generate; and adopt this application above-mentioned structure's shaping sword, it is located the arch 2 of the terminal surface of cutter arbor 1 uses the axis of cutter arbor 1 to be the ring form distribution as the central line to set up chip groove 3 between adjacent arch 2, use it for the fluting process of O type seal groove, can effectively control the diameter uniformity of sputtering target O type seal groove, avoid the production of course of working error, and be favorable to improving the machining efficiency of fluting process.
The bulges 2 on the forming cutter are distributed in a circular ring shape by taking the central axis of the cutter bar 1 as a central line, when the forming cutter rotates by taking the central axis of the cutter bar 1 as an axis, the bulges 2 are in contact with the sputtering target material and can rotate to form an O-shaped sealing groove, so that various errors can be avoided, the diameter consistency of the O-shaped sealing groove of the sputtering target material can be effectively controlled, meanwhile, the chip grooves 3 arranged between the adjacent bulges 2 can discharge chips generated in the grooving process in time, the processing effect is further ensured, and the processing efficiency is improved.
Furthermore, the number of the bulges 2 is two, and the bulges 2 are rotationally and symmetrically distributed by taking the central axis of the cutter bar 1 as a central line.
The two bulges 2 are rotationally and symmetrically distributed, so that the consistency of the diameters of the O-shaped sealing grooves can be further ensured in the grooving process, and the grooving efficiency can be improved.
Further, arch 2 is the two-stage notch cuttype, arch 2 include with the protruding 20 of the first order that the terminal surface of cutter arbor 1 links to each other and being located the protruding 21 of second level on the protruding 20 of first order, the protruding 20 of first order and the protruding 21 cross sectional shape of second level all independent be the rectangle respectively, the protruding 21 radial thickness of second level is less than the protruding 20 radial thickness of first order.
The bulge 2 is in a two-stage ladder shape, the cross sections of the first-stage bulge 20 and the second-stage bulge 21 are both rectangular, the radial thickness of the second-stage bulge 21 is smaller than that of the first-stage bulge 20, and the forming cutter adopting the structure is used for the grooving process, so that the consistency of the diameter of the O-shaped ring can be controlled more favorably, and the machining efficiency is higher.
The cross-sections of the first-stage projection 20 and the second-stage projection 21 refer to cross-sections formed by the intersection of the plane of the central axis and radial line of the tool holder 1 and the projection 2.
The cross section of the protrusion 2 is rectangular, the first-stage protrusion 20 and the second-stage protrusion 21 each include an outer circumferential surface, an inner circumferential surface, an upper end surface, and two side surfaces along the circumferential direction, wherein the second-stage protrusion 21 is located on the upper end surface of the first-stage protrusion 20.
Further, the outer circumferential surface of the first-stage protrusion 20 is flush with the outer circumferential surface of the cutter bar 1.
Here, the outer circumferential surface of the first-stage protrusion 20 is controlled to be flush with the outer circumferential surface of the tool holder 1, which is advantageous for controlling the depth of the grooving.
Further, the outer circumferential surface of the first-stage protrusion 20 and the outer circumferential surface of the second-stage protrusion 21 are in transitional connection through a first inclined surface.
Further, the inner circumferential surface of the first-stage protrusion 20 and the inner circumferential surface of the second-stage protrusion 21 are transitionally connected through a second inclined surface.
Furthermore, the included angle between the corresponding positions of the first inclined surface and the second inclined surface is 80-100 degrees.
The corresponding position here refers to an angle between the cross section of the first protrusion 2 and the second protrusion 2 and two inclined planes at the intersection of the first inclined plane and the second inclined plane.
Further, the chip groove 3 is located the tip of cutter arbor 1, the escape groove is the crossing cell body that constitutes by plane and curved surface, the plane with protruding 2 one side parallel and level.
The chip grooves 3 are positioned between the adjacent bulges 2 and used for discharging scraps generated in the slotting process in time, so that the diameter consistency of the O-shaped sealing grooves in the slotting process is ensured, and the slotting efficiency is improved.
Further, the height of the first-stage protrusions 20 is 2-3 mm.
The heights of the first-stage bulges 20 and the second-stage bulges 21 refer to the thicknesses of the first-stage bulges 20 and the second-stage bulges 21 along the central axis direction of the cutter bar 1; according to the invention, the heights of the first-stage bulge 20 and the second-stage bulge 21 can be adjusted according to the depth requirement of the grooved O-shaped sealing groove.
Further, the diameter length of the inner circumference of the first-stage protrusion 20 is 8-10 mm, and the diameter length of the outer circumference of the first-stage protrusion 20 is 10-20 mm.
Further, the diameter length of the inner circumference of the second-stage protrusion 21 is 5-15 mm, and the diameter length of the outer circumference of the second-stage protrusion 21 is 10-20 mm.
Furthermore, one end of the cutter bar 1, which is far away from the protrusion 2, is provided with a truncated cone-shaped cutter tail 4.
In another embodiment, the invention provides a slotting method for a sealing groove of a sputtering target, which adopts the forming cutter.
Further, the sputtering target sealing groove is an O-shaped sealing groove.
Further, the rotation speed of a forming cutter adopted by the slotting method is 3000-4000 rpm.
Furthermore, the feeding amount of the forming cutter is 10-20 mm.
According to the slotting method, the forming cutter in the first aspect is adopted, the rotating speed and the feeding parameters of the forming cutter are controlled within the ranges in the slotting process, the machining precision of the O-shaped sealing groove of the sputtering target material is improved, scraps in the machining process are discharged in time, the diameter consistency of the O-shaped sealing groove of the sputtering target material is ensured, and meanwhile, the machining efficiency is high.
Further, the grooving method adopts an alcohol spray cooling mode.
By adopting the forming cutter and combining the processing parameters, the processing precision of the O-shaped sealing groove can be obviously improved by adopting alcohol spray cooling, and the diameter consistency of the O-shaped sealing groove is ensured.
The principle of the forming cutter for slotting the O-shaped sealing groove of the sputtering target material is as follows: in the grooving process, the forming cutter rotates by taking the central axis of the cutter bar 1 as an axis to drive the bulge 2 on the end surface of the cutter bar 1 to do rotary motion, and the bulge is in contact with the sputtering target material to be processed to obtain the O-shaped sealing groove; the forming cutter is adopted to process the O-shaped sealing groove, so that the problem of inconsistent diameter of the O-shaped sealing groove is avoided, and the safety of the sputtering target material in the using process is improved.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.
Claims (10)
1. The utility model provides a shaping sword of sputtering target seal groove, its characterized in that, shaping sword includes columniform cutter arbor, be provided with the arch on the terminal surface of cutter arbor, the arch distributes on the ring shape region that uses the axis of cutter arbor as the central line, is provided with the chip groove between the adjacent arch.
2. The forming tool as claimed in claim 1, wherein the number of the protrusions is two, and the protrusions are rotationally symmetrically distributed with the central axis of the tool bar as a central line.
3. A forming cutter as claimed in claim 1 or 2, wherein the protrusions are of a two-step ladder type, the protrusions include a first-step protrusion connected to an end surface of the cutter bar and a second-step protrusion located on the first-step protrusion, cross-sectional shapes of the first-step protrusion and the second-step protrusion are respectively independent of each other and are rectangular, and a radial thickness of the second-step protrusion is smaller than a radial thickness of the first-step protrusion.
4. A forming cutter as claimed in claim 3, wherein the outer circumferential surface of the primary projection is flush with the outer circumferential surface of the cutter bar.
5. A forming cutter as claimed in claim 3 or 4, wherein the outer circumferential surface of the first-stage projection is in transitional connection with the outer circumferential surface of the second-stage projection through a first inclined surface;
preferably, the inner circumferential surface of the first-stage bulge is in transitional connection with the inner circumferential surface of the second-stage bulge through a second inclined surface;
preferably, the included angle between the corresponding positions of the first inclined plane and the second inclined plane is 80-100 degrees.
6. A forming cutter as claimed in any one of claims 1 to 5, wherein the chip groove is located at the end of the cutter bar, the chip groove is a groove body formed by intersecting a plane and a curved surface, and the plane is flush with one side surface of the protrusion.
7. A forming blade according to any one of claims 3 to 6, characterised in that the height of the first-stage projections is 2 to 3 mm;
preferably, the height of the second-stage protrusions is 1-2 mm.
8. A profiled knife as claimed in any one of claims 3 to 7 wherein the inner circumference of the first stage projections has a diameter of from 8 to 10 mm;
preferably, the diameter of the outer circumference of the first-stage bulges is 10-20 mm;
preferably, the diameter of the inner circumference of the second-stage protrusion is 5-15 mm;
preferably, the diameter of the outer circumference of the second-stage bulge is 10-20 mm;
preferably, one end of the cutter bar, which is far away from the protrusion, is provided with a truncated cone-shaped cutter tail.
9. A slotting method for a sealing groove of a sputtering target, which is characterized in that the slotting method adopts a forming cutter as claimed in any one of claims 1 to 8;
preferably, the sputtering target sealing groove is an O-shaped sealing groove;
preferably, the rotation speed of a forming cutter adopted by the slotting method is 3000-4000 rpm;
preferably, the feeding amount of the forming knife is 10-20 mm.
10. The grooving method of claim 9, wherein the cooling means used in the grooving method is alcohol spray cooling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210238074.3A CN114570990A (en) | 2022-03-11 | 2022-03-11 | Forming cutter for sputtering target material sealing groove and grooving method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210238074.3A CN114570990A (en) | 2022-03-11 | 2022-03-11 | Forming cutter for sputtering target material sealing groove and grooving method thereof |
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| CN114570990A true CN114570990A (en) | 2022-06-03 |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007063572A (en) * | 2005-08-29 | 2007-03-15 | Sanyo Special Steel Co Ltd | Method for manufacturing sputtering target material |
| CN101704124A (en) * | 2009-11-17 | 2010-05-12 | 宁波江丰电子材料有限公司 | Surface processing method of large-size sputtering target material |
| CN208322246U (en) * | 2018-04-10 | 2019-01-04 | 赫莱德（常州）精密工具有限公司 | A kind of step profile milling cutter |
| CN109396518A (en) * | 2018-12-14 | 2019-03-01 | 广东星联精密机械有限公司 | A kind of profile milling cutter being exclusively used in the processing of sealing ring hole location |
| US20190099814A1 (en) * | 2017-02-16 | 2019-04-04 | Sumitomo Chemical Company, Limited | Method for processing sputtering target and method for manufacturing sputtering target product |
| US20190210122A1 (en) * | 2017-02-16 | 2019-07-11 | Sumitomo Chemical Company, Limited | Cutting tool for sputtering target, processing method of sputtering target, and manufacturing method of sputtering target product |
| CN111633254A (en) * | 2020-06-02 | 2020-09-08 | 西安法士特汽车传动有限公司 | A high-efficient PCD cutter of one shot forming for annular processing |
| CN213530923U (en) * | 2020-10-16 | 2021-06-25 | 合肥江丰电子材料有限公司 | Processing cutter of LCD plane target |
| CN113084236A (en) * | 2021-04-26 | 2021-07-09 | 宁波江丰电子材料股份有限公司 | Machining method for sputtering target material inclined plane patterns |
| CN214602127U (en) * | 2021-05-11 | 2021-11-05 | 赫比(成都)精密塑胶制品有限公司 | Seal ring groove processing forming cutter and equipment |
-
2022
- 2022-03-11 CN CN202210238074.3A patent/CN114570990A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007063572A (en) * | 2005-08-29 | 2007-03-15 | Sanyo Special Steel Co Ltd | Method for manufacturing sputtering target material |
| CN101704124A (en) * | 2009-11-17 | 2010-05-12 | 宁波江丰电子材料有限公司 | Surface processing method of large-size sputtering target material |
| US20190099814A1 (en) * | 2017-02-16 | 2019-04-04 | Sumitomo Chemical Company, Limited | Method for processing sputtering target and method for manufacturing sputtering target product |
| US20190210122A1 (en) * | 2017-02-16 | 2019-07-11 | Sumitomo Chemical Company, Limited | Cutting tool for sputtering target, processing method of sputtering target, and manufacturing method of sputtering target product |
| CN208322246U (en) * | 2018-04-10 | 2019-01-04 | 赫莱德（常州）精密工具有限公司 | A kind of step profile milling cutter |
| CN109396518A (en) * | 2018-12-14 | 2019-03-01 | 广东星联精密机械有限公司 | A kind of profile milling cutter being exclusively used in the processing of sealing ring hole location |
| CN111633254A (en) * | 2020-06-02 | 2020-09-08 | 西安法士特汽车传动有限公司 | A high-efficient PCD cutter of one shot forming for annular processing |
| CN213530923U (en) * | 2020-10-16 | 2021-06-25 | 合肥江丰电子材料有限公司 | Processing cutter of LCD plane target |
| CN113084236A (en) * | 2021-04-26 | 2021-07-09 | 宁波江丰电子材料股份有限公司 | Machining method for sputtering target material inclined plane patterns |
| CN214602127U (en) * | 2021-05-11 | 2021-11-05 | 赫比(成都)精密塑胶制品有限公司 | Seal ring groove processing forming cutter and equipment |
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