CN114563896A - Multicolor inorganic all-solid-state electrochromic device and preparation method thereof - Google Patents
Multicolor inorganic all-solid-state electrochromic device and preparation method thereof Download PDFInfo
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- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
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- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
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Abstract
The invention discloses a multicolor inorganic all-solid-state electrochromic device and a preparation method thereof. The device comprises a substrate, a transparent bottom electrode layer, a multicolor ion storage layer, a first electron barrier layer, an electrolyte layer, a second electron barrier layer, an electrochromic layer and a transparent top electrode layer which are sequentially stacked; the material of the multicolor ion storage layer is AxOy,AxOyIs a bipolar coloring material, wherein A is a metal element having multiple valence states. The invention utilizes the characteristic that a multicolor ion storage layer presents multicolor when ions and electrons are injected/extracted together, and the multicolor ion storage layer is in phase with a transparent electrochromic layer with electrochemical activity and single color changeMatching, and realizing the multi-color change performance of the device capable of converting yellow-green-blue. The device prepared by the invention has super large optical modulation amplitude, is easy to uniformly prepare in a large area, has good stability and simple preparation process, and effectively solves the problem of single color of the traditional inorganic all-solid-state electrochromic device.
Description
Technical Field
The invention relates to the technical field of electrochromic devices, in particular to a multicolor inorganic all-solid-state electrochromic device and a preparation method thereof.
Background
Electrochromic technology provides an effective way for the controllable adjustment of the optical properties of materials. Under the action of an electric field, the oxidation-reduction reaction in the electrochromic material changes the valence state or components of the electrochromic material, so that the optical properties (absorption rate, transmittance, reflectivity and the like) of the material are stably and reversibly changed in visible, infrared and even microwave regions. The electrochromic device is a device formed by using the electrochromic effect of materials, taking an electrochromic layer as a base and assisting other related layers and structures.
Based on the unique advantages of wide viewing angle, low driving voltage, low energy consumption, memory function and the like, the research and development of the high-performance electrochromic device has great significance to the fields of energy, buildings, information, national defense and the like. Especially in the military national defense science and technology field, the traditional camouflage material has fixed color and can not change along with the environment and seasons, so that the requirement of intelligent national defense military camouflage can not be met, the problem can be solved by the electrochromic technology with adjustable optical color, and the purposes of military stealth and camouflage are realized.
At present, electrochromic devices based on organic molecules, polymers and metal organic frameworks show multi-color characteristics, but in practical applications, organic materials have inferior thermal, photo, chemical and radiation stability compared to inorganic electrochromic materials. Therefore, implementing the multicolor characteristics of inorganic material-based electrochromic devices is a paradigm shift in the field of electrochromic defense. Meanwhile, the all-solid-state electrochromic thin film device based on the inorganic electrolyte has the advantages of high stability, good durability, easiness in large-area preparation and the like, and is a hotspot of current research. Meanwhile, the all-solid-state structure enables the design of the device to be more flexible and miniaturized, and the device is easier to integrate in lightweight and portable intelligent electronic products.
At present, inorganic all-solid-state electrochromic devices are mainly based on matching coupling of cathode tungsten oxide and anode nickel oxide functional layers, and the two typical electrochromic materials can only be switched between transparent states and inherent valence-state colors of the materials. Therefore, the final thin film device can only realize adjustment between different transparencies and has single color change.
Accordingly, the prior art is yet to be improved and developed.
Disclosure of Invention
In view of the defects of the prior art, the invention aims to provide a multicolor inorganic all-solid-state electrochromic device and a preparation method thereof, and aims to solve the problem that the color of the existing inorganic all-solid-state electrochromic device is changed singly.
The technical scheme of the invention is as follows:
the invention provides a multicolor inorganic all-solid-state electrochromic device, which comprises a substrate, a transparent bottom electrode layer, a multicolor ion storage layer, a first electron barrier layer, an electrolyte layer, a second electron barrier layer, an electrochromic layer and a transparent top electrode layer which are sequentially stacked;
wherein the material of the multicolor ion storage layer is AxOySaid A isxOyIs a bipolar coloring material, wherein A is a metal element having multiple valence states.
Optionally, the material of the multicolor ion storage layer is selected from V2O5、Co3O4、Rh2O3Any one or more of;
the thickness of the multicolor ion storage layer is 100-400 nm.
Optionally, the material of the transparent bottom electrode layer is selected from any one or more of indium tin oxide, aluminum-doped zinc oxide, fluorine-doped tin oxide, gallium-doped zinc oxide and indium-doped zinc oxide; or the transparent bottom electrode layer is selected from a metal transparent film or a metal grid material film;
the transparent top electrode layer is made of any one or more of indium tin oxide, aluminum-doped zinc oxide, fluorine-doped tin oxide, gallium-doped zinc oxide and indium-doped zinc oxide; alternatively, the transparent top electrode layer is selected from a metal transparent film or a metal mesh material film.
Optionally, the square resistance value of the transparent bottom electrode layer is 10-20 Ω/sq, and the transmittance of the transparent bottom electrode layer at a wavelength of 550nm is higher than 80%;
the square resistance value of the transparent top electrode layer is 20-100 omega/sq, and the transmittance of the transparent top electrode layer is higher than 80% at the wavelength of 550 nm.
Optionally, the thickness of the first electron blocking layer is 20 to 50nm, and the thickness of the second electron blocking layer is 20 to 50 nm.
Optionally, the material of the first electron blocking layer and the material of the second electron blocking layer are independently selected from SiO2、Si3N4、Ta2O5、ZrO2、Nb2O5Any one or more of them.
Optionally, the material of the electrolyte layer is selected from LiF, LiAlOx、LiPON、LiNbO3、LiTaO3And the electrolyte layer has a thickness of 50 to 500 nm.
Optionally, the material of the electrochromic layer is selected from WO3、TiO2、Li4Ti5O12、MoO3Any one or more of them.
Optionally, the electrochromic layer has a thickness of 100-300 nm.
In a second aspect of the present invention, there is provided a method for preparing a multicolor inorganic all-solid-state electrochromic device according to the present invention, wherein the method comprises the steps of:
providing a substrate with a transparent bottom electrode layer on the surface;
forming a multicolor ion storage layer on the transparent bottom electrode layer;
forming a first electron blocking layer on the multicolor ion storage layer;
forming an electrolyte layer on the first electron blocking layer;
forming a second electron blocking layer on the electrolyte layer;
forming an electrochromic layer on the second electron blocking layer;
forming a transparent top electrode layer on the electrochromic layer to obtain the multicolor inorganic all-solid-state electrochromic device;
wherein the material of the multicolor ion storage layer is A xOySaid A isxOyThe coloring material is a bipolar coloring material, wherein A is a metal element with multiple valence states.
Has the beneficial effects that: the multicolor inorganic all-solid-state electrochromic device mainly comprises a transparent electrode layer, a multicolor ion storage layer, an electrolyte layer (also called an ion conducting layer), an electron blocking layer and an electrochromic layer. By utilizing the characteristic that the multicolor ion storage layer presents multicolor when ions and electrons are injected/extracted together, the multicolor ion storage layer is matched with the transparent electrochromic layer with electrochemical activity and single color change, and finally the multicolor change performance of the inorganic all-solid-state electrochromic device capable of converting yellow, green and blue is realized. The multicolor inorganic all-solid-state electrochromic device prepared by the invention has super large optical modulation amplitude, is easy to uniformly prepare in a large area, and has good stability and simple preparation process. The invention effectively solves the technical problem of single color of the traditional inorganic all-solid-state electrochromic device.
Drawings
Fig. 1 is a schematic view of the structure of a multicolor inorganic all-solid-state electrochromic device in example 1.
Fig. 2 is a graph showing a transmittance spectrum in a colored/faded state of the multicolor inorganic all-solid electrochromic device of example 1.
Fig. 3 is a graph of the chromaticity change of the multi-color inorganic all-solid-state electrochromic device in example 1 under different voltages.
Detailed Description
The invention provides a multicolor inorganic all-solid-state electrochromic device and a preparation method thereof, and the invention is further described in detail below in order to make the purpose, technical scheme and effect of the invention clearer and clearer. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the invention.
Conventional inorganic solid state electrochromic devices are generally composed of five successive layers, two transparent current collector layers, an electrochromic active layer, an ion conductor layer and an ion storage layer. The inorganic solid electrochromic device is mainly based on matching coupling of cathode tungsten oxide and anode nickel oxide functional layers, and the two typical electrochromic materials can only be switched between a transparent state and inherent valence-state colors of the materials. Therefore, the final device can only realize adjustment between different transparencies and has single color change.
Therefore, the embodiment of the invention selects the electrochromic material with rich color change as the ion storage layer to be matched with the transparent electrochromic layer with electrochemical activity and single color change, thereby realizing the multicolor characteristic of the inorganic all-solid-state electrochromic device.
Specifically, the embodiment of the invention provides a multicolor inorganic all-solid-state electrochromic device, which comprises a substrate, a transparent bottom electrode layer, a multicolor ion storage layer, a first electron blocking layer, an electrolyte layer, a second electron blocking layer, an electrochromic layer and a transparent top electrode layer, wherein the substrate, the transparent bottom electrode layer, the multicolor ion storage layer, the first electron blocking layer, the electrolyte layer, the second electron blocking layer, the electrochromic layer and the transparent top electrode layer are sequentially stacked;
wherein the material of the multicolor ion storage layer is AxOySaid A isxOyThe coloring material is a bipolar coloring material, wherein A is a metal element with multiple valence states.
The bipolar coloring material is a material that exhibits a change in color in both ion-implanted and ion-extracted states. Such as WO3The material is a unipolar coloring material, and the material is blue when lithium ions are injected and is transparent when the lithium ions are extracted.
The multicolor inorganic all-solid-state electrochromic device mainly comprises a transparent electrode layer, a multicolor ion storage layer, an electrolyte layer, an electron blocking layer and an electrochromic layer. The multicolor ion storage layer causes the valence change of metal ions due to the injection/extraction of cations driven by an electric field, thereby adjusting the optical refractive index and extinction coefficient of the material and leading the material to show color change. Due to AxOyThe A metal ion in the material has multiple valence states, so that the material has multiple color changes. Thus, the multicolor ion storage layer is at different electric potentials The color of the product can be changed under the control of pressure.
The embodiment utilizes the characteristic that the multicolor ion storage layer presents multicolor when ions and electrons are injected/extracted together, and the multicolor ion storage layer is matched with the transparent electrochromic layer with electrochemical activity and single color change, so as to finally realize the multicolor change performance of the inorganic all-solid-state electrochromic device capable of converting yellow, green and blue. The multicolor inorganic all-solid-state electrochromic device prepared by the embodiment has an ultra-large optical modulation amplitude, is easy to uniformly prepare in a large area, and has good stability and a simple preparation process. The embodiment effectively overcomes the technical problem of single color of the traditional inorganic all-solid-state electrochromic device.
Specifically, the principle that the inorganic all-solid-state electrochromic device can realize multicolor is that the multicolor ion storage layer presents different colors when lithium ions are injected/extracted or injected/extracted at different quantities, and the electrochromic layer only has one color change in the lithium ion injection/extraction process, and the color of the electrochromic layer changes from a transparent state to a single color and is continuously deepened along with the change of the lithium ion injection quantity. When an electric field is applied to the inorganic all-solid-state electrochromic device, the applied electric field is opposite for the positive and negative electrodes. In addition, with the change of the applied voltage, the lithium ion injection amount/extraction amount of each color-changing functional layer is correspondingly increased or decreased, so that the multicolor ion storage layer in the color-changing functional layer presents different colors, the color of the electrochromic layer is continuously deepened from a transparent state to a color state due to the change of the lithium ion content, and the color displayed by the color superposition of the multicolor ion storage layer and the electrochromic layer in the corresponding states is the color finally presented by the device. Thus, the color change of the device can be adjusted accordingly by the magnitude of the applied voltage.
In one embodiment, said A isxOyA in (b) is any one of V, Co and Rh. Namely, the material of the multicolor ion storage layer is selected from vanadium pentoxide (V)2O5) Cobalt oxide (Co)3O4) And rhodium oxide (Rh)2O3) And the like.
In one embodiment, the multicolor ion storage layer has a thickness of 100-400 nm.
The functions of the transparent bottom electrode layer in this embodiment are: conducting electrons for device operation.
In one embodiment, the material of the transparent bottom electrode layer is selected from indium tin oxide (In)2O3Sn, abbreviated as ITO), aluminum-doped zinc oxide (ZnO: Al, abbreviated as AZO), fluorine-doped tin oxide, gallium-doped zinc oxide (ZnO: Ga, abbreviated as GZO), indium-doped zinc oxide (ZnO: In, abbreviated as IZO), etc.; alternatively, the transparent bottom electrode layer is selected from a very thin metal transparent film or a metal mesh material film. That is, in addition to the doped transparent conductive oxide, an extremely thin metal transparent film or a metal mesh material film may also serve as the transparent bottom electrode.
The required voltage of the device during working is overlarge due to overlarge resistance of the transparent bottom electrode layer, the integral transmittance of the device is influenced by the light transmittance of the transparent bottom electrode layer, the square resistance value of the transparent bottom electrode layer is 10-20 omega/sq, and the transmittance of the transparent bottom electrode layer is higher than 80% at the wavelength of 550 nm.
In one embodiment, the thickness of the transparent bottom electrode layer is 100-200 nm. When the transparent bottom electrode layer is an extremely thin metal transparent film, the thickness of the transparent bottom electrode layer is 10-20 nm.
The function of the transparent top electrode layer in this embodiment is: the transparent thin film layer for conducting electrons of the device and the transparent bottom electrode layer together form a uniform electric field for the redox reaction of the multicolor ion storage layer and the electrochromic layer in the device.
In one embodiment, the material of the transparent top electrode layer is selected from indium tin oxide (In)2O3Sn, abbreviated as ITO), aluminum-doped zinc oxide (ZnO: Al, abbreviated as AZO), fluorine-doped tin oxide, gallium-doped zinc oxide (ZnO: Ga, abbreviated as GZO), indium-doped zinc oxide (ZnO: In, abbreviated as IZO), etc.; alternatively, the transparent top electrode layer is selected from a very thin metal transparent film or a metal mesh material film. That is, except for dopingBesides the mixed transparent conductive oxide, an extremely thin metal transparent film or metal mesh material film can also be used as the transparent top electrode.
In one embodiment, the transparent top electrode layer has a sheet resistance of 20 to 100 Ω/sq, and the transparent top electrode layer has a transmittance of more than 80% at a wavelength of 550 nm.
In one embodiment, the thickness of the transparent top electrode layer is 100-200 nm. When the transparent top electrode layer is an extremely thin metal transparent film, the thickness of the transparent top electrode layer is 10-20 nm.
In order to realize excellent color retention of the multicolor inorganic all-solid-state electrochromic device and ensure that the multicolor inorganic all-solid-state electrochromic device does not need continuous loading voltage to maintain the color, in this embodiment, electron blocking layers are added on two sides of the electrolyte layer, and the electron blocking layers do not influence the effective ion transmission. That is, in this embodiment, the first electron blocking layer and the second electron blocking layer are added on both sides of the electrolyte layer, so that reverse electron transfer inside the device can be suppressed, the coloring efficiency of the device can be improved, and the color retention performance of the device can be ensured.
The thickness of the first electron blocking layer has an influence on the dielectric property of the electrolyte layer, and meanwhile, certain potential barrier needs to be overcome when lithium ions enter the multicolor ion storage layer from the electrolyte layer, and the thickness of the first electron blocking layer is 20-50 nm.
In one embodiment, the material of the first electron blocking layer is selected from SiO2、Si3N4、Ta2O5、ZrO2、Nb2O5Any one or more of them.
In one embodiment, the thickness of the second electron blocking layer is in the range of 20 to 50nm, consistent with the thickness determination principle of the first electron blocking layer.
In one embodiment, the material of the second electron blocking layer is selected from SiO2、Si3N4、Ta2O5、ZrO2、Nb2O5Any one or more of them.
The function of the electrolyte layer located between the two electron blocking layers in this embodiment is: provides chromotropic positive ions for the operation of the device, provides a required channel for the transmission of ions, and simultaneously isolates the electron transmission in the device. The electrolyte layer in the electrochromic device has high ionic conductivity and low electronic conductivity, and always assumes a transparent state. The types of the electrolyte include liquid electrolyte, gel electrolyte, and solid ceramic electrolyte, depending on the presence form of the electrolyte. Although the ionic conductivity of the solid ceramic electrolyte is relatively low compared to the first two, it has advantages of a wide electrochemically stable operation window and excellent weather resistance. Therefore, the present embodiment prefers a solid ceramic electrolyte as the electrolyte layer.
In one embodiment, the material of the electrolyte layer is selected from LiF, LiAlOx、LiPON、LiNbO3、LiTaO3Any one or more of them.
The transmittance and the interface performance of the whole device are influenced by the excessively thick electrolyte layer, and the dielectric performance of the device is influenced by the excessively thin electrolyte layer, so that the thickness of the electrolyte layer is determined to be 50-500 nm.
There are many factors influencing the operation of the multicolor inorganic all-solid-state electrochromic device, wherein the quantity of injected electric charge of the multicolor inorganic all-solid-state electrochromic device during operation is usually determined by the layer with smaller electric charge injection quantity in the two layers of electrochromic materials, and the quantity of injected electric charge of the device can limit the coloring depth of the device. Meanwhile, compared with a single-electrode electrochromic device, the complementary electrochromic device has the advantages that the device is colored more deeply due to charge balance in the color changing process of the bipolar material, and higher color contrast can be realized. Therefore, the electrochromic layer in this embodiment serves as a counter electrode layer, which not only can achieve charge balance, but also can implement multi-color state by performing color complementation with the multi-color electrochromic layer in the process of color change.
In one embodiment, the material of the electrochromic layer is selected from WO3、TiO2、Li4Ti5O12、MoO3Any one or more of them.
The thickness of the electrochromic layer is 100-300nm due to the charge balance of the multicolor ion storage layer and the electrochromic layer and the color coupling matching of the two polar functional layers.
The embodiment of the invention also provides a preparation method of the multicolor inorganic all-solid-state electrochromic device, which comprises the following steps:
S1, providing a substrate with a transparent bottom electrode layer on the surface;
s2, forming a multicolor ion storage layer on the transparent bottom electrode layer;
s3, forming a first electron blocking layer on the multicolor ion storage layer;
s4, forming an electrolyte layer on the first electron blocking layer;
s5, forming a second electron blocking layer on the electrolyte layer;
s6, forming an electrochromic layer on the second electron blocking layer;
s7, forming a transparent top electrode layer on the electrochromic layer to obtain the multicolor inorganic all-solid-state electrochromic device;
wherein the material of the multicolor ion storage layer is AxOySaid A isxOyIs a bipolar coloring material, wherein A is a metal element having multiple valence states.
In this embodiment, a multi-target magnetron sputtering technique is used to perform continuous and integrated deposition of multiple layers of films on a rigid or flexible substrate, and a multicolor inorganic all-solid-state electrochromic device is obtained in a vacuum environment, and the device has a structure including a transparent bottom electrode layer, a multicolor ion storage layer, a first electron blocking layer, an electrolyte layer, a second electron blocking layer, an electrochromic layer, and a transparent top electrode layer.
The invention mainly adopts the magnetron sputtering technology with easy control to prepare the multicolor inorganic all-solid-state electrochromic device with large area, variable colors, high light modulation amplitude and good uniformity.
In step S2, the multicolor electrochromic layer may be obtained by setting the gas pressure and the oxygen-argon ratio in a vacuum system by using a magnetron sputtering technique, and controlling the thickness of the film by controlling the deposition time.
In step S4, the electrolyte layer may be obtained by using a radio frequency reactive sputtering technique.
The invention is further illustrated by the following specific examples.
Examples
Preparation area of 10X 10cm2The multicolor inorganic all-solid-state electrochromic device of (1) has a structure as shown in fig. 1, wherein TC 1 represents a transparent bottom electrode layer, EC 1 represents a multicolor ion storage layer, EB1 represents a first electron blocking layer, EL represents an electrolyte layer, EB2 represents a second electron blocking layer, EC 2 represents an electrochromic layer, and TC 2 represents a transparent top electrode layer.
And placing the ITO conductive glass in a vacuum chamber, and performing continuous deposition of the multilayer film by using a magnetron sputtering deposition technology.
Firstly, preparing a multicolor ion storage layer, taking 3 inches of metal vanadium as a target material, controlling the proportion of oxygen to argon to be 5sccm to 45sccm, controlling the air pressure to be 0.3pa, controlling the power to be 150W, and enabling the substrate to be in a uniform rotation state all the time in the deposition process to obtain the uniform multicolor ion storage layer. Preparing a first electron barrier layer on the multicolor ion storage layer, using metal tantalum as a target material, setting the air pressure to be 0.3Pa, the power to be 150W and the oxygen concentration to be O in the sputtering process 2A uniform and dense tantalum oxide thin film was obtained in a mixed atmosphere of 5:45 (flow ratio). The electrolyte layer is prepared from LiNbO3The ceramic material is used as a target material, the deposition pressure is 0.5pa, the proportion of oxygen to argon is 5sccm:95sccm, and the radio frequency power is 130W, so that the electrolyte layer with high ionic conductivity is obtained. And depositing a second electron blocking layer on the basis of the electrolyte layer, wherein the preparation parameters of the second electron blocking layer are consistent with those of the first electron blocking layer. The electrochromic layer is obtained by magnetron reactive sputtering, in the preparation process of the film, the air pressure is controlled to be 2.0pa, the flow ratio of oxygen to argon is 1:3, the sputtering power is 200W, the distance from the central position of the target to the substrate is 13cm, and transparent WO is obtained3A film. The resistance of the transparent top electrode layer has great influence on the voltage application of the deviceThe large, low and uniform surface resistance is crucial to uniform coloring and fading of the device, the pressure in the deposition process is adjusted to be 0.3Pa, the proportion of oxygen and argon is 0.6sccm:78.4sccm, the sputtering power is 80W, and the transparent ITO film with the surface sheet resistance lower than 100 omega/sq is obtained.
The obtained multicolor inorganic all-solid-state electrochromic device is placed in a two-electrode system, and coloring and fading of the device are carried out by applying positive and negative voltages. By means of the simultaneous combination of the electrochemical workstation and the spectrograph, the visible light and near infrared ray transmissivity spectrums are recorded in the fading state and the coloring state of the device. As shown in fig. 2, the multicolor inorganic all-solid-state electrochromic device has excellent modulation capability in the whole wavelength band, the light modulation amplitude of the device at 550nm reaches 58%, and the transparency of the device in a faded state reaches as high as 72%.
The prepared multicolor inorganic all-solid-state electrochromic device is placed in a colorimeter, and the color change of the device is controlled by utilizing a Shanghai Chenghua electrochemical workstation. Under the action of different voltages, the color of the device is recorded by a colorimeter, and the device can realize the back-and-forth switching of three color systems of yellow, green and blue, as shown in fig. 3.
In conclusion, the invention provides a multicolor inorganic all-solid-state electrochromic device and a preparation method thereof. The multicolor inorganic all-solid-state electrochromic device mainly comprises a transparent electrode layer, a multicolor electrochromic layer, an electrolyte layer (also called an ion conducting layer), an electron blocking layer and an ion storage layer. By utilizing the characteristic that the multicolor electrochromic layer presents multicolor when ions and electrons are injected/extracted together, the multicolor ion storage layer is matched with the transparent electrochromic layer with electrochemical activity and single color change, and finally the multicolor change performance of the inorganic all-solid-state electrochromic device capable of converting yellow, green and blue is realized. The multicolor inorganic all-solid-state electrochromic device prepared by the invention has super large optical modulation amplitude, is easy to uniformly prepare in a large area, and has good stability and simple preparation process. The invention effectively solves the technical problem of single color of the traditional inorganic all-solid-state electrochromic device.
It will be understood that the invention is not limited to the examples described above, but that modifications and variations will occur to those skilled in the art in light of the above teachings, and that all such modifications and variations are considered to be within the scope of the invention as defined by the appended claims.
Claims (10)
1. A multicolor inorganic all-solid-state electrochromic device is characterized by comprising a substrate, a transparent bottom electrode layer, a multicolor ion storage layer, a first electron barrier layer, an electrolyte layer, a second electron barrier layer, an electrochromic layer and a transparent top electrode layer which are sequentially stacked;
wherein the material of the multicolor ion storage layer is AxOySaid A isxOyIs a bipolar coloring material, wherein A is a metal element having multiple valence states.
2. The multi-colored inorganic all-solid-state electrochromic device according to claim 1, wherein the material of the multi-colored ion storage layer is selected from V2O5、Co3O4、Rh2O3Any one or more of;
the thickness of the multicolor ion storage layer is 100-400 nm.
3. The multi-color inorganic all-solid-state electrochromic device according to claim 1, wherein the material of the transparent bottom electrode layer is selected from any one or more of indium tin oxide, aluminum-doped zinc oxide, fluorine-doped tin oxide, gallium-doped zinc oxide, indium-doped zinc oxide; or the transparent bottom electrode layer is selected from a metal transparent film or a metal grid material film;
The transparent top electrode layer is made of any one or more of indium tin oxide, aluminum-doped zinc oxide, fluorine-doped tin oxide, gallium-doped zinc oxide and indium-doped zinc oxide; alternatively, the transparent top electrode layer is selected from a metal transparent film or a metal mesh material film.
4. The multicolor inorganic all-solid-state electrochromic device according to claim 1, wherein the transparent bottom electrode layer has a sheet resistance value of 10-20 Ω/sq, and the transmittance of the transparent bottom electrode layer is higher than 80% at a wavelength of 550 nm;
the square resistance value of the transparent top electrode layer is 20-100 omega/sq, and the transmittance of the transparent top electrode layer is higher than 80% at the wavelength of 550 nm.
5. The multi-color inorganic all-solid-state electrochromic device according to claim 1, wherein the thickness of the first electron blocking layer is 20-50nm and the thickness of the second electron blocking layer is 20-50 nm.
6. The multi-color inorganic all-solid-state electrochromic device according to claim 1, wherein the material of the first electron blocking layer and the material of the second electron blocking layer are independently selected from SiO2、Si3N4、Ta2O5、ZrO2、Nb2O5Any one or more of them.
7. The multi-color inorganic all solid state electrochromic device according to claim 1, wherein the material of said electrolyte layer is selected from LiF, LiAlO x、LiPON、LiNbO3、LiTaO3And the electrolyte layer has a thickness of 50 to 500 nm.
8. The multi-color inorganic all-solid-state electrochromic device according to claim 1, wherein the material of the electrochromic layer is selected from WO3、TiO2、Li4Ti5O12、MoO3Any one or more of them.
9. The multi-color inorganic all-solid-state electrochromic device according to claim 1, wherein the thickness of the electrochromic layer is 100-300 nm.
10. A method of making a multi-colored inorganic all-solid-state electrochromic device according to any one of claims 1 to 9, comprising the steps of:
providing a substrate with a transparent bottom electrode layer on the surface;
forming a multicolor ion storage layer on the transparent bottom electrode layer;
forming a first electron blocking layer on the multicolor ion storage layer;
forming an electrolyte layer on the first electron blocking layer;
forming a second electron blocking layer on the electrolyte layer;
forming an electrochromic layer on the second electron blocking layer;
forming a transparent top electrode layer on the electrochromic layer to obtain the multicolor inorganic all-solid-state electrochromic device;
wherein the material of the multicolor ion storage layer is AxOySaid A is xOyThe coloring material is a bipolar coloring material, wherein A is a metal element with multiple valence states.
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