CN114562594A - Self-locking starting and closing device for vacuum valve - Google Patents
Self-locking starting and closing device for vacuum valve Download PDFInfo
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- CN114562594A CN114562594A CN202111624458.0A CN202111624458A CN114562594A CN 114562594 A CN114562594 A CN 114562594A CN 202111624458 A CN202111624458 A CN 202111624458A CN 114562594 A CN114562594 A CN 114562594A
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- 230000007246 mechanism Effects 0.000 claims abstract description 17
- 230000005294 ferromagnetic effect Effects 0.000 claims description 8
- 238000007789 sealing Methods 0.000 abstract description 5
- 230000009471 action Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/44—Mechanical actuating means
- F16K31/52—Mechanical actuating means with crank, eccentric, or cam
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
Abstract
The invention discloses a self-locking starting and closing device of a vacuum valve, which comprises a frame and a cross rod driven by a driving cylinder, wherein the cross rod, a rotating block, a base, a connecting rod and a valve rod are connected with each other to form a connecting rod mechanism, the valve rod is used for connecting a valve of a vacuum chamber, the connecting rod mechanism is driven to act by the driving cylinder, the valve rod drives the valve to switch between an opening position and a closing position, and locking force is automatically generated when the valve is closed so as to resist the reverse acting force of the valve and prevent the accidental occurrence of vacuum sealing loss of the vacuum chamber caused by the factors such as insufficient power of the driving cylinder and the like of the valve.
Description
Technical Field
The invention relates to the technical field of vacuum valves, in particular to a self-locking starting and closing device of a vacuum valve.
Background
Wafer, TFT, MOCVD, PECVD, LCD glass substrates are often required to be processed in a vacuum chamber during the manufacturing process, the vacuum chamber usually comprises an openable/closable valve, the valve is driven by an opening and closing device to move, a processing object can enter and exit the vacuum chamber from the valve when the valve is opened, after the processing object is sent into the vacuum chamber, the valve is closed to enable the vacuum chamber to be in a sealed state, and then air is pumped to enable the vacuum chamber to be in a vacuum state. For the opening or closing of the valve, the prior art generally depends on the cylinder or oil cylinder to drive the transmission mechanism, the transmission mechanism drives the valve to open or close, when the valve is sealed with the vacuum chamber, in order to keep the airtight effect of the vacuum chamber, the cylinder or oil cylinder needs to continuously use the air pressure or oil pressure to tightly support the valve to the vacuum chamber, so as to prevent the valve from losing the sealing with the vacuum chamber. However, after the machine is used for a period of time, the abrasion problem is inevitably caused, and particularly, the air pressure or the oil pressure of the air cylinder or the oil cylinder is insufficient due to the problem of pipelines, so that the valve and the vacuum chamber lose the fit and the vacuum state cannot be maintained. On the other hand, the driving mechanism is driven by a power source, so that the contradiction between the requirement of quick start closing and the requirement of small action amplitude and particle generation reduction of the valve cannot be solved or needs to be solved at a higher cost. Chinese patent publication No. CN 104612488A, whose publication date is 2015, 5, 13, discloses a self-locking vacuum hatch door opening and closing device, which mainly comprises a frame, a driving cylinder, a linear slide rail, and a valve, wherein the driving cylinder is fixed on the frame, a connecting rod set is arranged between the driving cylinder and the valve, and the driving cylinder pushes the valve horizontally and upwardly towards the vacuum hatch door to seal the vacuum hatch door. However, the valve with the structure needs a multi-section connecting rod group structure and a linear sliding rail, the structure is complex, the connecting rod group cannot be guaranteed to be just positioned at a dead point, the structure volume and the cost can be increased, and the risk that the vacuum chamber loses vacuum tightness suddenly exists.
Disclosure of Invention
The invention aims to solve the problems that the air cylinder or the oil cylinder in the prior art is easy to have insufficient air pressure or oil pressure due to the problem of pipelines, so that the valve and the vacuum chamber lose sealing and the vacuum state cannot be maintained, and the vacuum chamber door opening and closing device in the prior art has the problems of complex structure, high cost and the possibility of sudden vacuum sealing loss of the vacuum chamber.
The invention adopts a specific technical scheme to realize the purpose that a self-locking starting and closing device of a vacuum valve comprises:
the frame comprises an edge seat, two side frames and a frame, and the edge seat, the two side frames and the frame enclose to form a shell of the self-locking starting and closing device;
the driving cylinder is arranged on the side seat, a driving shaft is arranged on the driving cylinder, and the extending direction of the driving shaft points to the frame;
a cross bar fixed to an end of the driving shaft;
the rotating block is integrally triangular, an arc-shaped through groove, a first hinge hole and a second hinge hole are formed in the rotating block, and the first hinge hole and the second hinge hole are respectively located at two corners of the triangle; one end of the arc-shaped through groove is positioned at the other corner of the triangle, the other end of the arc-shaped through groove is positioned between the first hinge hole and the second hinge hole, and one end of the cross rod is slidably arranged in the arc-shaped through groove;
the base is arranged on the inner side of the side frame and is hinged with the first hinge hole through a hinge shaft;
one end of the connecting rod is hinged with the second hinge hole through a hinge shaft;
one end of the valve rod is hinged with the other end of the connecting rod, the other end of the valve rod is connected with the valve, when the driving shaft stretches, the cross rod drives the rotating block to rotate around the base, and the rotating block rotates to drive the valve to be opened or closed through the connecting rod and the valve rod; when the valve is closed, the connecting line between the first hinge hole and the second hinge hole is on the same straight line with the axis of the connecting rod and the axis of the valve rod. The reaction force of the valve is linearly transmitted to the frame through the valve rod, the connecting rod, the rotating block and the base, so that the valve can be prevented from being automatically opened due to the reaction force of the valve.
The invention adopts the connecting rod transmission mechanism to switch between the valve opening position and the valve closing position, and utilizes the dead point clamping characteristic of the connecting rod mechanism to automatically generate locking force at the valve closing position so as to counteract the reaction of the valve and prevent the vacuum chamber from losing the vacuum sealing accident caused by insufficient power or disappearance and other reasons of the valve. On the other hand, the invention adopts the connecting rod transmission mechanism to switch between the two positions of valve opening and valve closing, and utilizes the quick return characteristic of the connecting rod mechanism to accelerate the opening during the opening and slowly close during the closing, thereby being capable of well meeting the requirements of high pneumatic closing speed and small closing action amplitude, changing the opening and closing speed by changing the parameters of the arc through groove and keeping the valve clamped at the dead point of the connecting rod. Therefore, the self-locking type vacuum cabin door starting and closing device solves the problems that the air cylinder or the oil cylinder in the prior art is easy to have insufficient air pressure or oil pressure due to pipeline problems, so that the valve and the vacuum cabin are not closed, the vacuum state cannot be maintained, the structure of the vacuum cabin door starting and closing device in the prior art is complex, the cost is high, and the vacuum cabin can suddenly lose vacuum tightness.
Preferably, the frame is of a rectangular structure, the two side frames are respectively arranged at two ends of the side seat, the side frame is located on the other side of the side frame relative to the side seat, the driving cylinder is arranged on a central line of the frame between the two side frames, the rotating block, the base, the connecting rod and the valve rod are all two pieces, the two sides of the axis of the driving shaft are symmetrically arranged, and the axis of the valve rod is parallel to the axis of the driving shaft. Although the rotating block and the base are arranged on one side, and the connecting rod and the valve rod can also complete the opening and closing operation of the valve, the symmetrical structure has the advantages of balanced stress and more flexible opening and closing of the valve.
Preferably, one side of the side frame, which is close to the side frame, is provided with a waist-shaped hole for fixing the base, one end of the side frame, which is close to the side frame, is provided with an adjusting screw, the front end of the adjusting screw is abutted to the base, and a guide mechanism for limiting the sliding direction of the base is arranged between the side frame and the base. The adjusting screw is matched with the waist-shaped hole to movably change the distance between the base and the frame so as to adapt to different valve sizes and adjust the action stroke of the valve. The guide mechanism is used for limiting the moving direction of the base and avoiding the influence on the normal work of the system caused by the deviation generated when the position of the base is adjusted.
Preferably, the rotary block is of a flat plate-shaped structure, the base is provided with an ear plate, the ear plate is provided with a shaft hole, and the base is hinged with the rotary block through the shaft hole in the ear plate.
Preferably, the groove walls on the two sides of the arc-shaped through groove are provided with guide convex strips, the end part of the cross rod is provided with a grooved wheel, the grooved wheel is provided with a groove matched with the guide convex strips, and the end part of the cross rod is in sliding connection with the arc-shaped through groove through the grooved wheel. The guide raised lines are arranged on the two side groove walls of the arc-shaped through groove of the rotating block, so that the grooved wheel can be limited, and the grooved wheel is prevented from being clamped in the arc-shaped through groove.
As preferred, the horizontal pole is perpendicular with the axis of drive shaft, and the horizontal pole is I-shaped structure, the middle part of horizontal pole and the tip fixed connection of drive shaft, and the both ends of horizontal pole are equipped with dodges the groove, dodge the width in groove and the thickness looks adaptation of rotatory piece. The middle of the transverse rod of the I-shaped structure is fixedly connected with the end part of the driving shaft, the avoidance grooves at the two ends of the transverse rod are used for avoiding the rotating block when the rotating block rotates, and part of the rotating block can enter the avoidance grooves, so that the rotating block is ensured to rotate flexibly.
Preferably, the connecting rod is of a double-layer structure and comprises a first connecting rod and a second connecting rod which are arranged in parallel, one ends of the first connecting rod and the second connecting rod are respectively hinged to the upper side and the lower side of the rotating block, the other ends of the first connecting rod and the second connecting rod are respectively hinged to the two sides of the valve rod, a valve rod hole is formed in the side seat, and the valve rod can be slidably arranged in the valve rod hole in a penetrating mode.
Preferably, the rotating block is embedded with a magnet, the magnet is positioned on the outer side edge between the first hinge hole and the second hinge hole, the base is provided with a ferromagnetic area mutually attracted with the magnet, and when the valve is closed, the magnet is close to or abutted against the ferromagnetic area. Although the connecting line between the first hinge hole and the second hinge hole, the axis of the connecting rod and the axis of the valve rod can be theoretically transmitted to the frame through the valve rod, the connecting rod, the rotary block and the base in the same straight line, so as to prevent the valve from being opened due to the reverse thrust of the valve, under the working conditions of vibration and the like in a working site, the locking of the mechanism can be gradually loosened due to the vibration, so that the valve is opened due to the reverse thrust of the valve, the invention embeds the magnet on the rotary block, and the base is provided with the ferromagnetic area mutually attracted with the magnet, so that the magnet is close to or abutted against the ferromagnetic area to be mutually attracted when the valve is closed, so that one side of the rotary block is adsorbed on the base, the adsorption can not influence the opening of the valve, but can prevent the connecting rod locking mechanism from automatically separating from the locking state due to the vibration and the like, the reliability of the system latch-up can thus be greatly improved.
Preferably, the frame is of a homogeneous integral structure, a piston cavity of the driving cylinder is arranged in the side seat, and cover plates are arranged on two sides of the frame. The frame of the homogeneous integral structure can improve the structural strength and the processing precision of the frame, and the piston cavity of the driving cylinder is arranged in the side seat, so that the side seat can be fully utilized as a cylinder body of the driving cylinder, the size is reduced, and the cost is reduced.
Preferably, the valve comprises a door frame, the door frame is connected with the outer side face of the side seat, a sliding groove parallel to the axis direction of the driving shaft is formed in the door frame, a valve plate is slidably arranged in the sliding groove and connected with a valve rod, an opening of the valve is formed in the sliding groove, and when the valve is closed, the valve rod drives the valve plate to close the opening.
The invention has the beneficial effects that:
1. when the driving cylinder drives the valve to the locking position, the connecting line of the first hinge hole and the second hinge hole is in a linear arrangement with the axis of the connecting rod and the axis of the valve rod, so that the reaction force generated by the valve is linearly transmitted to the frame through the valve rod, the connecting rod, the rotating block and the base, the purpose of automatically locking the valve is achieved, and the problem that the driving cylinder needs additional power for locking when the driving cylinder is at the closing position of the valve is solved.
2. The invention changes the parameters of the arc through groove to change the opening and closing speed and can keep the valve clamped at the dead point of the connecting rod.
3. An adjusting screw is arranged between the base and the frame, and the distance between the base and the frame can be movably changed to adapt to different valve sizes and adjust the action stroke.
4. The rotary block and the base of the invention enhance the attraction force of the valve closing position through the magnet, can prevent the connecting rod locking mechanism from automatically separating from the locking state due to vibration and the like, and greatly improves the reliability of the system.
Drawings
FIG. 1 is a schematic perspective view of an activation closure of the present invention;
FIG. 2 is a schematic view of the actuator closure assembly of the present invention in a closed valve configuration;
FIG. 3 is a partial exploded perspective view of the actuator closure assembly of the present invention in the closed position of the valve;
FIG. 4 is a schematic view of a block and sheave arrangement for actuating the closure device of the present invention;
fig. 5 is a schematic view of the start closing device of the present invention in a valve open state.
In the figure: 10. the sliding type valve comprises a frame, 11 side seats, 12 side frames, 13 side frames, 20 driving cylinders, 21 driving shafts, 30 transverse rods, 31 grooved wheels, 32 avoidance grooves, 40 base seats, 41 adjusting screws, 42 kidney-shaped holes, 43 lug plates, 44 shaft holes, 50 rotating blocks, 51 arc-shaped through grooves, 52 first hinge holes, 53 second hinge holes, 54 guiding convex strips, 60 connecting rods, 61 first connecting rods, 62 second connecting rods, 70 valve rods, 71 valve rod holes, 80 valves, 81 door frames, 82 valve plates, 83 sliding grooves and 84 openings.
Detailed Description
The following provides a further description of embodiments of the present invention by way of examples and with reference to the accompanying drawings.
Example 1
In embodiment 1 shown in fig. 1, a self-locking type starting closing device for a vacuum valve comprises:
the frame 10, the frame is the rectangle structure of homogeneity an organic whole, including limit seat 11, both sides frame 12 and frame 13, and both sides frame is located the both ends department of limit seat respectively, and the frame is located the opposite side of side frame for the limit seat, limit seat and both sides frame and frame enclose to close and constitute the casing of starting closing device from locking-type, and the frame both sides all are equipped with apron (not drawn in the picture).
The driving cylinder 20 is an air cylinder and is arranged on the side seat, a driving shaft 21 is arranged on the driving cylinder, and the extending direction of the driving shaft points to the side frame; the driving cylinder is arranged on the center line of the frame between the two side frames, the piston cavity of the driving cylinder is arranged in the side seat, the side seat is used as a cylinder barrel of the driving cylinder, and the driving shaft is coaxial with the driving cylinder;
the transverse rod 30 is perpendicular to the axis of the driving shaft, fixed at the end part of the extending end of the driving shaft and fixed through a nut, a grooved wheel 31 is arranged at the end part of the transverse rod, the transverse rod is in an I-shaped structure, and the middle part of the transverse rod is fixedly connected with the end part of the driving shaft;
the rotary block 50 is of a flat-plate-shaped structure and is integrally triangular, an arc-shaped through groove 51, a first hinge hole 52 and a second hinge hole 53 are formed in the rotary block, and the first hinge hole and the second hinge hole are respectively located at two corners of the triangle; one end of the arc-shaped through groove is positioned at the other corner of the triangle, the other end of the arc-shaped through groove is positioned between the first hinge hole and the second hinge hole, and one end of the cross rod is slidably arranged in the arc-shaped through groove; guide convex strips 54 are arranged on the two side groove walls of the arc-shaped through groove, a groove (see figure 4) matched with the guide convex strips is arranged on a grooved wheel of the cross rod, and the end part of the cross rod is connected with the arc-shaped through groove in a sliding manner through the grooved wheel; avoidance grooves 32 are formed in the two ends of the cross rod, and the width of the avoidance grooves is matched with the thickness of the rotating block.
The base 40 is arranged on the inner side of the side frame and is hinged with the first hinge hole through a hinge shaft; a waist-shaped hole 42 for fixing the base is formed in one side, close to the side frame, of the side frame, an adjusting screw 41 (see fig. 2) is arranged at one end, close to the side frame, of the side frame, the front end of the adjusting screw is abutted to the base, and a guide mechanism for limiting the sliding direction of the base is arranged between the side frame and the base; be equipped with otic placode 43 on the base, be equipped with shaft hole 44 on the otic placode, the base pass through the shaft hole on the otic placode with rotatory piece is articulated.
A connecting rod 60, one end of which is hinged to the second hinge hole through a hinge shaft, the connecting rod of the embodiment is a double-layer structure and comprises a first connecting rod 61 and a second connecting rod 62 which are arranged in parallel, and one ends of the first connecting rod and the second connecting rod are respectively hinged to the upper side and the lower side of the rotating block; the other ends of the first connecting rod and the second connecting rod are respectively hinged to two sides of the valve rod;
and one end of the valve rod 70 is hinged with the other end of the connecting rod, the other end of the valve rod is connected with the valve 80, a valve rod hole 71 is formed in the side seat, and the valve rod can be slidably arranged in the valve rod hole in a penetrating manner. When the driving shaft stretches, the cross rod drives the rotating block to rotate around the base, and the rotating block rotates to drive the valve to open or close through the connecting rod and the valve rod; when the valve is closed, the connecting line between the first hinge hole and the second hinge hole is on the same straight line with the axis of the connecting rod and the axis of the valve rod (see figure 3).
The valve comprises a door frame 81 (see figure 5), the door frame is connected with the outer side surface of the side seat, a sliding groove 83 parallel to the axis direction of the driving shaft is arranged in the door frame, a valve plate 82 is arranged in the sliding groove in a sliding mode, the valve plate is connected with a valve rod, an opening 84 of the valve is arranged in the sliding groove, and when the valve is closed, the valve rod drives the valve plate to close the opening.
The rotatory piece of this embodiment, base, connecting rod and valve rod are two the axis bilateral symmetry of drive shaft sets up, the axis of valve rod is parallel with the axis of drive shaft.
Example 2
The rotating block of embodiment 2 is embedded with a magnet, the magnet is located on the outer side between the first hinge hole and the second hinge hole, the base is provided with a ferromagnetic area attracting the magnet, when the valve is closed, the magnet is close to or abutted to the ferromagnetic area to generate an adsorption force so as to avoid loosening the locking mechanism under working conditions such as vibration, and the rest is the same as that of embodiment 1.
When the valve is opened, the driving shaft of the driving cylinder extends towards the frame, the transverse rod drives the rotating block to rotate towards one side of the frame around the base, the rotating block rotates to pull the connecting rod to move towards one side of the frame, meanwhile, the connecting rod drives the valve rod to move towards one side of the frame and drives the valve plate to move towards one side of the edge seat in the sliding groove, and therefore the valve plate is separated from an opening of the valve, and the valve is in an opening state (see figure 5).
On the contrary, when the valve is closed, the driving shaft of the driving cylinder retracts towards the side seat (see fig. 1), the transverse rod drives the rotating block to rotate towards one side of the side seat around the base, the rotating block rotates to push the connecting rod to move towards one side of the side seat, meanwhile, the connecting rod pushes the valve rod to move towards one side of the side seat and drive the valve plate to move towards one side of the side seat away from the side seat in the sliding groove, and then the valve plate covers the opening of the valve, and the valve is in a closed state. When the valve is in a closed state, the connecting line between the first hinge hole and the second hinge hole, the axis of the connecting rod and the axis of the valve rod are on the same straight line, and the reaction force of the valve is linearly transmitted to the frame through the valve rod, the connecting rod, the rotating block and the base, so that the valve can be prevented from being automatically opened due to the reaction force of the valve, and the accidental occurrence that the vacuum chamber loses vacuum tightness due to the factors such as insufficient power of the driving cylinder is prevented.
In addition to the above embodiments, the technical features or technical data of the present invention may be reselected and combined to form new embodiments within the scope of the claims and the specification of the present invention, which are all realized by those skilled in the art without creative efforts, and thus, the embodiments of the present invention not described in detail should be regarded as specific embodiments of the present invention and are within the protection scope of the present invention.
Claims (10)
1. A self-locking type starting and closing device of a vacuum valve is characterized by comprising:
the frame (10) comprises an edge seat (11), two side frames (12) and a frame (13), and the edge seat, the two side frames and the frame enclose to form a shell of the self-locking starting and closing device;
the driving cylinder (20) is arranged on the side seat, a driving shaft (21) is arranged on the driving cylinder, and the extending direction of the driving shaft points to the frame;
a cross bar (30) fixed to an end of the drive shaft;
the rotary block (50) is integrally triangular, an arc-shaped through groove (51), a first hinge hole (52) and a second hinge hole (53) are formed in the rotary block, and the first hinge hole and the second hinge hole are respectively located at two corners of the triangle; one end of the arc-shaped through groove is positioned at the other corner of the triangle, the other end of the arc-shaped through groove is positioned between the first hinge hole and the second hinge hole, and one end of the cross rod is slidably arranged in the arc-shaped through groove;
the base (40) is arranged on the inner side of the side frame and is hinged with the first hinge hole through a hinge shaft;
a connecting rod (60), one end of which is hinged with the second hinge hole through a hinge shaft; and
one end of the valve rod (70) is hinged with the other end of the connecting rod, the other end of the valve rod is connected with a valve (80), when the driving shaft stretches, the cross rod drives the rotating block to rotate around the base, and the rotating block rotates to drive the valve to open or close through the connecting rod and the valve rod; when the valve is closed, the connecting line between the first hinge hole and the second hinge hole is on the same straight line with the axis of the connecting rod and the axis of the valve rod.
2. The self-locking type starting and closing device of a vacuum valve as claimed in claim 1, wherein the frame is of a rectangular structure, two side frames are respectively arranged at two ends of the side seat, the side frame is arranged at the other side of the side frame opposite to the side seat, the driving cylinder is arranged on a central line of the frame between the two side frames, the rotating block, the base, the connecting rod and the valve rod are all two pieces, the two pieces are symmetrically arranged at two sides of an axis of the driving shaft, and an axis of the valve rod is parallel to the axis of the driving shaft.
3. The self-locking type starting and closing device of the vacuum valve as claimed in claim 1, wherein a waist-shaped hole (42) for fixing the base is formed in one side of the side frame close to the side frame, an adjusting screw (41) is arranged at one end of the side frame close to the side frame, the front end of the adjusting screw is abutted against the base, and a guide mechanism for limiting the sliding direction of the base is arranged between the side frame and the base.
4. The self-locking type starting and closing device of the vacuum valve as claimed in claim 1, wherein the rotating block is of a flat plate structure, the base is provided with an ear plate (43), the ear plate is provided with a shaft hole (44), and the base is hinged with the rotating block through the shaft hole on the ear plate.
5. The self-locking type starting and closing device of the vacuum valve as claimed in claim 4, wherein the two side walls of the arc-shaped through groove are provided with guiding convex strips (54), the end part of the cross bar is provided with a grooved wheel (31), the grooved wheel is provided with a groove matched with the guiding convex strips, and the end part of the cross bar is in sliding connection with the arc-shaped through groove through the grooved wheel.
6. The self-locking type starting and closing device of the vacuum valve as claimed in claim 5, wherein the cross bar is perpendicular to the axis of the driving shaft, the cross bar is of an I-shaped structure, the middle part of the cross bar is fixedly connected with the end part of the driving shaft, avoidance grooves (32) are arranged at two ends of the cross bar, and the width of the avoidance grooves is matched with the thickness of the rotating block.
7. The self-locking type starting and closing device of the vacuum valve as claimed in claim 5, wherein the connecting rod is a double-layer structure and comprises a first connecting rod (61) and a second connecting rod (62) which are arranged in parallel, one end of the first connecting rod and one end of the second connecting rod are respectively hinged to the upper side and the lower side of the rotating block, the other end of the first connecting rod and the other end of the second connecting rod are respectively hinged to the two sides of the valve rod, a valve rod hole (71) is formed in the side seat, and the valve rod is slidably inserted into the valve rod hole.
8. The self-locking type starting and closing device of a vacuum valve as claimed in claim 1, wherein the rotary block is embedded with a magnet, the magnet is positioned on the outer side edge between the first hinge hole and the second hinge hole, the base is provided with a ferromagnetic area mutually attracted with the magnet, and when the valve is closed, the magnet is close to or abutted against the ferromagnetic area.
9. The self-locking type starting and closing device of a vacuum valve as claimed in claim 1, wherein the frame is of a homogeneous and integral structure, the piston cavity of the driving cylinder is arranged in the side seat, and both sides of the frame are provided with cover plates.
10. The vacuum valve self-locking type starting and closing device as claimed in any one of claims 1 to 9, wherein the valve comprises a door frame (81) connected with the outer side surface of the side seat, a sliding groove (83) parallel to the axial direction of the driving shaft is arranged in the door frame, a valve plate (82) is slidably arranged in the sliding groove, the valve plate is connected with a valve rod, an opening (84) of the valve is arranged in the sliding groove, and when the valve is closed, the valve rod drives the valve plate to close the opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111624458.0A CN114562594B (en) | 2021-12-28 | Self-locking starting and closing device for vacuum valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111624458.0A CN114562594B (en) | 2021-12-28 | Self-locking starting and closing device for vacuum valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114562594A true CN114562594A (en) | 2022-05-31 |
| CN114562594B CN114562594B (en) | 2024-06-04 |
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|---|---|---|---|---|
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| EP2878870A1 (en) * | 2013-11-29 | 2015-06-03 | King Lai Hygienic Materials Co., Ltd. | Self-lockable opening and closing mechanism for vacuum cabin door |
| CN204805692U (en) * | 2015-06-17 | 2015-11-25 | 川北真空科技(北京)有限公司 | Valve auto -lock structure |
| CN207660434U (en) * | 2017-12-13 | 2018-07-27 | 中船重工中南装备有限责任公司 | A kind of hatch door headstock gear and the hatch door with the headstock gear |
| CN212177915U (en) * | 2020-03-17 | 2020-12-18 | 常州捷佳创精密机械有限公司 | Valve assembly and vacuum pumping device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4065097A (en) * | 1976-05-17 | 1977-12-27 | Airco, Inc. | Slot sealing valve for vacuum coating apparatus |
| EP2878870A1 (en) * | 2013-11-29 | 2015-06-03 | King Lai Hygienic Materials Co., Ltd. | Self-lockable opening and closing mechanism for vacuum cabin door |
| CN204805692U (en) * | 2015-06-17 | 2015-11-25 | 川北真空科技(北京)有限公司 | Valve auto -lock structure |
| CN207660434U (en) * | 2017-12-13 | 2018-07-27 | 中船重工中南装备有限责任公司 | A kind of hatch door headstock gear and the hatch door with the headstock gear |
| CN212177915U (en) * | 2020-03-17 | 2020-12-18 | 常州捷佳创精密机械有限公司 | Valve assembly and vacuum pumping device |
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