CN114545421A - Device and method for detecting and controlling TFT-LCD substrate glass offset - Google Patents
Device and method for detecting and controlling TFT-LCD substrate glass offset Download PDFInfo
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- CN114545421A CN114545421A CN202210178285.2A CN202210178285A CN114545421A CN 114545421 A CN114545421 A CN 114545421A CN 202210178285 A CN202210178285 A CN 202210178285A CN 114545421 A CN114545421 A CN 114545421A
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- substrate glass
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- detecting
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- 239000011521 glass Substances 0.000 title claims abstract description 85
- 239000000758 substrate Substances 0.000 title claims abstract description 84
- 238000000034 method Methods 0.000 title claims abstract description 16
- 230000001105 regulatory effect Effects 0.000 claims abstract description 31
- 230000001276 controlling effect Effects 0.000 claims abstract description 21
- 238000001514 detection method Methods 0.000 claims description 12
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 2
- 238000000137 annealing Methods 0.000 abstract description 7
- 239000005357 flat glass Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- 230000006837 decompression Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000002401 inhibitory effect Effects 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 238000007500 overflow downdraw method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/02—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems using reflection of acoustic waves
- G01S15/06—Systems determining the position data of a target
- G01S15/08—Systems for measuring distance only
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B11/00—Automatic controllers
- G05B11/01—Automatic controllers electric
- G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
- G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P.I., P.I.D.
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Abstract
The invention discloses a device and a method for detecting and controlling TFT-LCD substrate glass offset, comprising a sensor, an air source, a pressure reducing valve, an adjusting valve, a nozzle, a PID controller and substrate glass; a sensor is arranged on one side of the substrate glass, a PID controller is arranged at the other end of the sensor, the output end of the sensor is connected with a data receiving module provided with the PID controller, an air source is also arranged on the other branch, the air source is connected with a nozzle, the air source is connected with the nozzle through an adjusting valve, a pressure reducing valve is arranged between the air source and the adjusting valve, and an outlet of the air source is connected with an inlet of the pressure reducing valve; when the pressure-reducing valve is used, firstly, a set value is set through the PID controller, and the outlet end pressure of the pressure-reducing valve is set according to the regulating valve; when the distance between the substrate glass and the sensor deviates from a set value, the regulating valve carries out corresponding regulation; the device can detect the horizontal position offset of the substrate glass at the outlet of the annealing furnace in real time, and simultaneously controls, adjusts and inhibits the larger offset.
Description
Technical Field
The invention relates to the field of TFT-LCD substrate glass manufacturing, in particular to a device and a method for detecting and controlling TFT-LCD substrate glass offset.
Background
When the plate glass is produced by the overflow down-draw method, the substrate glass flows out of the lehr downward in the direction perpendicular to the ground in the lehr. Due to factors such as vibration of the drawing device, temperature change of the substrate glass itself, and cutter force for cutting the glass, the substrate glass may be deviated in a certain horizontal direction in the annealing furnace. When the offset is small, the product produced is not adversely affected. However, when the offset is large, the substrate glass may be deformed or even the material may be blocked in the furnace.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a device and a method for detecting and controlling the offset of TFT-LCD substrate glass, which can detect the horizontal position offset of the substrate glass at the outlet of an annealing furnace in real time and control and regulate the device and the method for inhibiting the larger offset.
The invention is realized by the following technical scheme: a device for detecting and controlling TFT-LCD substrate glass offset comprises a sensor, an air source, a pressure reducing valve, an adjusting valve, a nozzle, a PID controller and substrate glass; a sensor is arranged on one side of the substrate glass, a PID controller is arranged at the other end of the sensor, and the output end of the sensor is connected with a data receiving module of the PID controller; wherein the content of the first and second substances,
still be provided with the air supply on another branch of this device, the air supply is connected with the nozzle, connect through the governing valve between air supply and the nozzle, be provided with the relief pressure valve between air supply and the governing valve, the exit of air supply and the entry linkage setting of relief pressure valve.
Further, a detection port of the sensor is arranged perpendicular to the substrate glass; the sensor and the substrate glass are not in contact.
Further, the distance between the sensor and the substrate glass is set within the range of 100-300 mm.
Further, the sensor is arranged on a mounting bracket, and the mounting bracket is fixedly arranged.
Further, the sensor is arranged as a reflection type ultrasonic distance sensor.
Further, the air source is compressed and purified air, and the pressure value of the air source is more than or equal to 0.2MPa and less than or equal to 1.0 MPa.
Further, the pressure reducing valve is set as a precision gas pressure reducing valve; the decompression range of the decompression valve is more than or equal to 0.8 MPa.
Further, the PID controller is a single-loop closed-loop automatic regulator.
The invention also provides a method for detecting and controlling the glass offset of the TFT-LCD substrate based on the device, which comprises the following steps: firstly, setting a set value through a PID controller, and setting the pressure of an outlet end of a reducing valve according to a regulating valve; when the distance between the substrate glass and the sensor deviates from a set value, the regulating valve performs corresponding regulation.
Furthermore, when the regulating valve is used for regulating; when the actual distance between the substrate glass and the sensor is smaller than the set distance value between the substrate glass and the sensor, the PID controller controls the output of the regulating valve to increase the air injection amount of the nozzle; and when the actual distance between the substrate glass and the sensor is greater than the set distance value between the substrate glass and the sensor, the PID controller controls the output of the regulating valve to reduce the air injection amount of the nozzle.
Compared with the prior art, the invention has the following beneficial technical effects:
1. the influence of the offset generated in the horizontal direction of the substrate glass in the annealing furnace is directly solved, and meanwhile, the deformation of the substrate glass and the blocking phenomenon in the annealing furnace are prevented by effectively controlling the offset.
2. This device adjusts detection control device through stable structure, simultaneously, can real time monitoring offset what, carry out concrete regulation according to the offset, can realize carrying out accurate controlled quantity regulation under the condition that does not influence other operations.
3. This device is through carrying out reasonable control to the distance between sensor and the base plate glass, including the setting of PID controller, guarantee that the measuring value of governing valve and sensor forms closed loop control circuit, can guarantee to pass through the nozzle when the compressed air of certain flow sprays base plate glass on the surface, can produce certain thrust to the base plate glass surface, the size of thrust is proportional with gas flow's size, the measuring value signal input computer control system of controlling distance, adjust according to the measuring value in real time again, great reduction the disability rate of base plate glass in process of production.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the embodiments or technical descriptions will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a system diagram of an apparatus for detecting and controlling a glass shift amount of a TFT-LCD substrate according to an embodiment of the present invention.
FIG. 2 is a closed-loop control circuit diagram of a PID controller of an apparatus for detecting and controlling a TFT-LCD substrate glass shift amount according to an embodiment of the invention.
Fig. 3 is a flowchart of a control process of a PID controller according to an embodiment of the present invention.
In the figure: sensor 1, mounting bracket 2, gas source 3, pressure reducing valve 4, regulating valve 5, nozzle 6, PID controller 7, substrate glass 8, set value (SP), actual distance (PV) of substrate glass 8 from sensor 1, output (MV) of PID controller to regulating valve.
Detailed Description
In the following, only certain exemplary embodiments are briefly described. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly above and obliquely above the second feature, or simply meaning that the first feature is at a lesser level than the second feature.
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
The invention provides a method and a device for detecting horizontal offset and inhibiting the offset in the process of manufacturing flat glass by an overflow downdraw method. The device can accurately detect the horizontal offset of the substrate glass, takes the offset detection value as a control target, and reduces or even eliminates the large offset of the substrate glass in the horizontal direction through the restraining device.
In order to achieve the above object, in a preferred embodiment of the present invention, there is provided an apparatus for detecting an offset amount of a substrate glass, including a sensor and a mounting bracket. The sensor 1 is preferably an ultrasonic sensor, a mounting bracket 2 horizontally mounts the sensor 1 on the side surface of the substrate glass 8 at the outlet of the annealing furnace, the axial direction of the sensor 1 is vertical to the substrate glass 8, the detection end of the sensor 1 is not contacted with the substrate glass 8, the sensor 1 is connected with a power supply and used for supplying power to the sensor 1, and the distance detection value signals of the sensor 1 and the substrate glass 8 are input into a computer control system.
Meanwhile, the invention can restrain the horizontal offset of the substrate glass, and comprises a nozzle 6 with high-pressure air effect, a pressure reducing valve 4, an adjusting valve 5 with air flow effect and a mounting bracket 2. Specifically, by horizontally mounting the nozzle 6 on one side of the substrate glass 8 through the mounting bracket 2 at the outlet of the annealing furnace, the axial direction of the nozzle 6 is perpendicular to the substrate glass 8, the nozzle 6 is not in contact with the substrate glass 8, and after the high-pressure air is decompressed by the decompression valve 4, the high-pressure air is connected into the nozzle 6 through the regulating valve 5 for regulating the gas flow. The air flow jetted by the nozzle 6 acts on the surface of the substrate glass 8 to generate a certain pressure on the surface of the substrate glass 8, the flow rate of the air flow of the nozzle 6 is controlled by the flow rate regulating valve 5, and when the flow rate regulating valve 5 regulates the air flow rate, the pressure of the nozzle 6 on the substrate glass 8 is changed.
The device comprises: an ultrasonic sensor for analog quantity output; a mounting bracket for the sensor; purifying a compressed air source; a pressure reducing valve; a gas flow regulating valve; a nozzle; and the single-loop closed-loop controller has a PID control function.
In a preferred embodiment of the present invention, the method for detecting and controlling the offset of the TFT-LCD substrate glass, specifically, the detection principle of the sensor 1, detects the linear distance between the sensor and the measured object by the transmission of ultrasonic waves and the reflection of the ultrasonic waves to the surface of the measured object, and the specific parameters include: the detection distance range is 50-300 mm; ultrasonic frequency: 500 KHz; detection resolution ratio: less than or equal to 0.2 mm; response time: less than or equal to 100 mS; when compressed air with a certain flow is sprayed onto the surface of the substrate glass through the nozzle, certain thrust is generated on the surface of the substrate glass 8, the magnitude of the thrust is proportional to the magnitude of the gas flow, and the pressure of a compressed air source is less than or equal to 1.0 MPa; the gas nozzle is not in contact with the surface of the substrate glass; the direction of the gas nozzle is vertical to the surface of the substrate glass; the gas flow regulating valve is a pneumatic or electric flow regulating valve; gas flow regulating range: 10L/Min-100L/Min; the detection value of the ultrasonic sensor is input into the PID controller, the PID controller outputs and controls the opening of the gas flow regulating valve, and the opening of the flow regulating valve and the detection value of the ultrasonic sensor form a closed-loop control loop.
The sensor 1 provided by the invention is preferably a reflection type ultrasonic distance sensor; the gas source 3 is compressed and purified air, and the pressure value is more than or equal to 0.2MPa and less than or equal to 1.0 MPa; the pressure reducing valve 4 is a pressure reducing valve for precision gas; the decompression range is more than or equal to 0.8 MPa; the regulating valve 5 is a gas flow regulating valve; the PID controller 7 is a single-loop closed-loop automatic regulator.
In a specific control process, a process person sets a control target value (SP) on the PID controller according to the normal distance of the ultrasonic sensor from the substrate glass, for example: when the substrate glass flows down, the optimal distance between the surface of the substrate glass and the surface of the detection end of the ultrasonic sensor is 200mm, and the control target set value (SP) of the PID controller can be set to be 200 mm; adjusting the pressure at the outlet end of the high-pressure air reducing valve, wherein the pressure value is the working use pressure of the gas flow regulating valve and the value of the pressure value meets the use pressure range of the gas flow regulating valve; when the system works, when the distance (PV) between the flowing substrate glass and the ultrasonic sensor is smaller than a set value (SP), the output (MV) from the PID controller to the gas flow regulating valve is increased, the opening of the regulating valve is increased, the gas flow sprayed out from the gas nozzle is increased, the pressure acting on the surface of the substrate glass is increased, the substrate glass is pushed away by the pressure, and the distance (PV) between the surface of the substrate glass and the ultrasonic sensor is increased; when the distance (PV) between the flowing substrate glass and the ultrasonic sensor is larger than a set value (SP), the output (MV) from the PID controller to the gas flow regulating valve is reduced, the opening of the regulating valve is reduced, the gas flow sprayed out from the gas nozzle is reduced, the pressure acting on the surface of the substrate glass is reduced, the substrate glass is pushed away by the pressure, the substrate glass approaches the ultrasonic sensor under the action of gravity, and the distance (PV) between the surface of the substrate glass and the ultrasonic sensor is reduced.
While there have been shown and described what are at present considered the fundamental principles and essential features of the invention and its advantages, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art. The above-mentioned contents are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modification made on the basis of the technical idea of the present invention falls within the protection scope of the claims of the present invention.
Claims (10)
1. A device for detecting and controlling TFT-LCD substrate glass offset is characterized by comprising a sensor (1), an air source (3), a pressure reducing valve (4), an adjusting valve (5), a nozzle (6), a PID controller (7) and substrate glass (8); a sensor (1) is arranged on one side of the substrate glass (8), a PID controller (7) is arranged at the other end of the sensor (1), and the output end of the sensor (1) is connected with a data receiving module of the PID controller (7); wherein the content of the first and second substances,
still be provided with air supply (3) on another branch of this device, air supply (3) and nozzle (6) are connected, connect through governing valve (5) between air supply (3) and nozzle (6), be provided with relief pressure valve (4) between air supply (3) and governing valve (5), the export of air supply (3) and the entry linkage setting of relief pressure valve (4).
2. The device for detecting and controlling the offset of TFT-LCD substrate glass according to claim 1, characterized in that the detection port of the sensor (1) is arranged perpendicular to the substrate glass (8); the sensor (1) and the substrate glass (8) are not in contact.
3. The device for detecting and controlling the offset of TFT-LCD substrate glass according to claim 1, characterized in that the distance between the sensor (1) and the substrate glass (8) is set in the range of 100-300 mm.
4. The device for detecting and controlling the offset of TFT-LCD substrate glass according to claim 1, characterized in that the sensor (1) is arranged on a mounting bracket (2), and the mounting bracket (2) is fixedly arranged.
5. The device for detecting and controlling the offset of TFT-LCD substrate glass according to claim 1, characterized in that the sensor (1) is configured as a reflective ultrasonic distance sensor.
6. The device for detecting and controlling the offset of the TFT-LCD substrate glass according to claim 1, wherein the air source (3) is compressed and purified air, and the pressure value of the air source (3) is greater than or equal to 0.2MPa and less than or equal to 1.0 MPa.
7. The device for detecting and controlling the offset of TFT-LCD substrate glass according to claim 1, characterized in that the pressure reducing valve (4) is set as a precision gas pressure reducing valve; the pressure reducing range of the pressure reducing valve (4) is more than or equal to 0.8 MPa.
8. The device for detecting and controlling the offset of TFT-LCD substrate glass according to claim 1, characterized in that the PID controller (7) is a single-loop closed-loop automatic regulator.
9. A method based on the device for detecting and controlling the glass offset of the TFT-LCD substrate comprises the following steps: firstly, a set value (SP) is set through a PID controller (7), and the outlet end pressure of a reducing valve (4) is set according to a regulating valve (5); when the distance between the substrate glass and the sensor deviates from a set value (SP), the adjusting valve (5) performs corresponding adjustment.
10. The method for detecting and controlling the offset of TFT-LCD substrate glass according to claim 1, characterized in that when the adjusting valve (5) is used for adjustment; when the actual distance (PV) between the substrate glass and the sensor is smaller than the set distance value (SP) between the substrate glass and the sensor, the PID controller (7) controls the output of the regulating valve (5) to increase the air injection amount of the nozzle (6); when the actual distance (PV) between the substrate glass (8) and the sensor (1) is larger than the distance set value (SP) between the substrate glass and the sensor, the PID controller (7) controls the output of the regulating valve (5) to reduce the air injection amount of the nozzle (6).
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CN202210178285.2A CN114545421A (en) | 2022-02-24 | 2022-02-24 | Device and method for detecting and controlling TFT-LCD substrate glass offset |
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CN202210178285.2A CN114545421A (en) | 2022-02-24 | 2022-02-24 | Device and method for detecting and controlling TFT-LCD substrate glass offset |
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2022
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JP2005055207A (en) * | 2003-08-06 | 2005-03-03 | Olympus Corp | Inspection device having flattening function of substrate |
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