CN114543647A - Physical quantity detecting device - Google Patents

Physical quantity detecting device Download PDF

Info

Publication number
CN114543647A
CN114543647A CN202210153606.3A CN202210153606A CN114543647A CN 114543647 A CN114543647 A CN 114543647A CN 202210153606 A CN202210153606 A CN 202210153606A CN 114543647 A CN114543647 A CN 114543647A
Authority
CN
China
Prior art keywords
hall
physical quantity
detection device
angle
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210153606.3A
Other languages
Chinese (zh)
Inventor
刘春森
钟小军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Xingzhou Microelectronics Co ltd
Original Assignee
Jiangsu Xingzhou Microelectronics Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Xingzhou Microelectronics Co ltd filed Critical Jiangsu Xingzhou Microelectronics Co ltd
Priority to CN202210153606.3A priority Critical patent/CN114543647A/en
Publication of CN114543647A publication Critical patent/CN114543647A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

The present application relates to a detection apparatus of a physical quantity, including: the Hall unit, the magnetic collecting sheet, the Hall support plate, the packaging body and the secondary frame are arranged on the Hall support plate; the magnetic collecting sheet is a symmetrical structure; each Hall unit comprises a first Hall element and a second Hall element, and the magnetism collecting sheet is arranged on the Hall carrier plate; the Hall support plate is fixed on the secondary frame; different Hall units are arranged at different positions on the magnetism collecting sheet; the first Hall element and the second Hall element are respectively arranged at two mutually symmetrical positions on the magnetism collecting sheet; all the Hall units, the Hall support plate and the secondary side frame are packaged on the packaging body to form a structural body of the detection device for the target physical quantity; the target physical quantity is a displacement and/or an angle. The detection device for the physical quantity can be compatible with displacement detection and angle detection, and solves the problem of single physical quantity measurement in the prior art.

Description

Physical quantity detecting device
Technical Field
The present application relates to the field of magnetic field sensor technology, and more particularly, to a physical quantity detection device.
Background
Hall-type displacement detection devices typically implement displacement measurement based on the hall effect, and hall-type angle detection devices typically implement angle measurement based on the hall effect, such as existing magnetic displacement sensors, magnetic rotary encoders, and the like.
The existing magnetic displacement sensor detects long-distance relative quantity and absolute quantity by reading a magnetic head and a magnetic grid ruler; the conventional magnetic rotary encoder detects an angle by sensing whether a ferromagnetic switching value is present or not. However, the above-described magnetic displacement sensor and magnetic rotary encoder have problems of complicated structure and measurement of a single physical quantity.
Disclosure of Invention
In view of the above, it is necessary to provide a detection device capable of simultaneously measuring physical quantities of displacement and angle in order to solve the above-described technical problems.
In a first aspect, the present application provides a device for detecting a physical quantity, comprising: the Hall unit, the magnetic collecting sheet, the Hall support plate, the packaging body and the secondary frame are arranged on the Hall support plate; the magnetic collecting sheet is a symmetrical structure; each Hall unit comprises a first Hall element and a second Hall element, and the magnetism collecting sheet is arranged on the Hall carrier plate; the Hall support plate is fixed on the secondary frame;
different Hall units are arranged at different positions on the magnetism collecting sheet;
the first Hall element and the second Hall element are respectively arranged at two mutually symmetrical positions on the magnetism collecting sheet;
all the Hall units, the Hall support plate and the secondary side frame are packaged on the packaging body to form a structural body of the detection device for the target physical quantity; the target physical quantity is a displacement and/or an angle.
In one embodiment, the first hall element is disposed at a top corner of the magnetic collecting piece, and the second hall element is disposed at a top corner of the magnetic collecting piece.
In one embodiment, the first hall element is disposed on a side of the magnetic-collecting sheet, and the second hall element is disposed on a side of the magnetic-collecting sheet.
In one embodiment, the detection device of the physical quantity further comprises a chip digital register, wherein the chip digital register is used for storing a calibration parameter obtained by calibrating the detection device of the physical quantity; the calibration parameter indicates a relationship between the displacement of the calibrated object and the output voltage of the detection device of the physical quantity, and a relationship between the angle of the calibrated object and the output voltage of the detection device of the physical quantity.
In one embodiment, the magnetic collecting sheets are silicon steel sheets.
In one embodiment, the magnetic flux collecting sheet is made of permalloy material.
In one embodiment, the thickness of the magnetic collecting sheet is 0.2 mm to 0.5 mm.
In one embodiment, the magnetic collecting sheet is one of an octagonal body and a regular quadrangular body.
In a second aspect, the present application further provides a method for detecting a physical quantity, where the method is applied to a device for detecting a physical quantity in the first aspect or any one of the possible implementation manners of the first aspect, and the method includes:
calibrating the displacement and the angle of the detection device of the physical quantity to obtain the calibrated detection device of the physical quantity;
determining a target Hall unit in a detection device of the calibrated physical quantity; the target Hall unit is used for measuring a target physical quantity;
and acquiring the physical quantity of the induction output of the target Hall unit.
In one embodiment, the displacement and angle calibration of the detecting device of the physical quantity comprises: determining the relationship between the displacement of the calibrated object and the output voltage of the physical quantity detection device according to the corresponding relationship between the magnetic field gradient change and the displacement and the corresponding relationship between the magnetic field gradient change and the voltage; the displacement is the moving distance of the calibrated object relative to the detecting device of the physical quantity in the horizontal and vertical directions in a plane; determining the relationship between the angle of the calibrated object and the output voltage of the detection device of the physical quantity according to the corresponding relationship between the magnetic field gradient change and the angle and the corresponding relationship between the magnetic field gradient change and the voltage; the angle is an angle at which the object to be calibrated rotates based on the central axis of the physical quantity detection device.
The detection device for the physical quantity comprises at least one Hall unit, a magnetic collecting sheet, a Hall carrier plate, a packaging body and a secondary frame; the magnetic collecting sheet is a symmetrical structure; each Hall unit comprises a first Hall element and a second Hall element, and the magnetism collecting sheet is arranged on the Hall carrier plate; the Hall support plate is fixed on the secondary frame; different Hall units are arranged at different positions on the magnetism collecting sheet; the first Hall element and the second Hall element are respectively arranged at two mutually symmetrical positions on the magnetism collecting sheet; all the Hall units, the Hall support plate and the secondary side frame are packaged on the packaging body to form a structural body of the detection device for the target physical quantity; the target physical quantity is a displacement and/or an angle. The detection device of the physical quantity is located in the magnetic field range generated by the detected object, and when the detected object is displaced or changed in angle, the magnetic field gradient where the Hall element in the detection device of the physical quantity is located is changed, so that the voltage of the Hall element is changed, and the physical quantity such as the displacement and the angle of the detected object can be measured based on the change of the Hall voltage. The application provides a detection device of physical quantity has set up hall element respectively in the different positions of magnetism collecting piece, and the hall element that sets up different positions on magnetism collecting piece is used for measuring the different physical quantities of testee, and the detection device of physical quantity that this application provided promptly can compatible displacement detection and angle detection, has solved the problem that current detection device measured single physical quantity. Compared with the existing detection devices such as a magnetic displacement sensor and a magnetic rotary encoder, the detection device for the physical quantity provided by the application is simple in structure and low in cost. In addition, if the magnetic field level that the measured object produced passes through hall element, hall element can not detect the magnetic field change, but the magnetism-collecting piece in this application can convert horizontal magnetic field into vertical direction's magnetic field based on the fringe effect to be detected by hall element, and further, the detection device of physical quantity can be based on the physical quantity such as the displacement of measured object, angle of the change of magnetic field after the conversion physical quantity. That is, the present application considers the case where the magnetic field level generated by the object to be measured passes through the hall element, and expands the application range of the detection device of the physical quantity.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments or the conventional technologies of the present application, the drawings used in the description of the embodiments or the conventional technologies will be briefly introduced below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a physical quantity detection apparatus according to an embodiment;
FIG. 2 is a schematic view illustrating a shape of a magnetism collecting sheet in the physical quantity detecting apparatus according to the embodiment;
FIG. 3 is a schematic diagram illustrating dimensions of a magnetism collecting sheet in the apparatus for detecting physical quantities according to an embodiment;
fig. 4 is another schematic structural diagram of a physical quantity detection device according to an embodiment;
fig. 5 is another schematic structural diagram of a physical quantity detection device according to an embodiment;
fig. 6 is another schematic structural diagram of a physical quantity detection device according to an embodiment;
fig. 7 is another schematic structural diagram of a physical quantity detection device according to an embodiment;
fig. 8 is another schematic structural view of a physical quantity detection device according to an embodiment;
fig. 9 is another schematic structural view of a physical quantity detection device according to an embodiment;
fig. 10 is another schematic structural view of a physical quantity detection device according to an embodiment;
fig. 11 is another schematic structural diagram of a physical quantity detection device according to an embodiment;
fig. 12 is another schematic structural view of a physical quantity detection device according to an embodiment;
fig. 13 is another schematic structural view of a physical quantity detection device according to an embodiment;
FIG. 14 is a graph illustrating the relationship between the displacement of the object under test and the magnetic field gradient in one embodiment;
fig. 15 is another schematic configuration diagram of a physical quantity detection apparatus according to an embodiment;
fig. 16 is a block diagram showing the structure of a physical quantity detecting device in one embodiment;
FIG. 17 is a diagram illustrating an internal structure of a computer device according to an embodiment.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is capable of embodiments in many different forms than those described herein and that modifications may be made by one skilled in the art without departing from the spirit and scope of the application and it is therefore not intended to be limited to the specific embodiments disclosed below.
The following describes the technical solutions of the present application and how to solve the technical problems with the technical solutions of the present application in detail with specific embodiments. The following several specific embodiments may be combined with each other, and details of the same or similar concepts or processes may not be repeated in some embodiments. Embodiments of the present application will be described below with reference to the accompanying drawings.
The numbering of the components as such, e.g., "first", "second", etc., is used herein only to distinguish the objects as described, and does not have any sequential or technical meaning. The term "connected" and "coupled" when used in this application, unless otherwise indicated, includes both direct and indirect connections (couplings). In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present application and for simplicity in description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be considered as limiting the present application.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
Hall-type displacement detection devices typically implement displacement measurement based on the hall effect, such as existing magnetic displacement sensors, which detect long-distance relative quantities and absolute quantities by reading a magnetic head and a magnetic grating scale; hall-type angle detecting devices, which typically perform angle measurement based on the hall effect, such as conventional magnetic rotary encoders, detect an angle by sensing a ferromagnetic switching value. However, the magnetic displacement sensor and the magnetic rotary encoder have complicated structures and higher cost, and can only measure a single physical quantity, namely, the magnetic displacement sensor can only detect displacement, the magnetic rotary encoder can only detect angles, and the magnetic displacement sensor and the magnetic rotary encoder have different structures and different measurement accuracies.
Based on this, this application provides a detection device of physical quantity, can compatible displacement detection and angle detection, simple structure easily realizes moreover.
In one embodiment, as shown in fig. 1, there is provided a detection apparatus of a physical quantity including: the Hall unit, the magnetic collecting sheet, the Hall support plate, the packaging body and the secondary frame are arranged on the Hall support plate; the magnetic collecting sheet is a symmetrical structure; each Hall unit comprises a first Hall element and a second Hall element, and the magnetism collecting sheet is arranged on the Hall carrier plate; the Hall support plate is fixed on the secondary frame; different Hall units are arranged at different positions on the magnetism collecting sheet; the first Hall element and the second Hall element are respectively arranged at two mutually symmetrical positions on the magnetism collecting sheet; all the Hall units, the Hall support plate and the secondary side frame are packaged on the packaging body to form a structural body of the detection device for the target physical quantity; the target physical quantity is a displacement and/or an angle.
The magnetic collecting sheet may be made of soft magnetic nickel material, permalloy material, etc. The soft magnetic nickel material is a material with high magnetic conductivity, for example, a silicon steel sheet in the soft magnetic nickel material has high magnetic conductivity, so that the magnetic collection sheet formed by the material can improve the range of the detected gradient change of the magnetic field, and further, the range of the detection device of the physical quantity is improved. Most preferably, the magnetic collecting sheets can be directly made of silicon steel sheets. Optionally, the magnetism collecting sheet may also be made of permalloy material, and since this type of material also has high magnetic permeability, the magnetism collecting sheet made of this type of material may also correspondingly increase the range of the detection device for forming the physical quantity. And the high magnetic conductivity avoids the phenomena of temperature concentration, stress concentration and the like caused by the magnetic saturation of the magnetic collecting sheet, and ensures the measurement precision and the measurement stability of the detection device of the physical quantity. In addition, compared with the problem that the detection range of the traditional magnetism collecting sheet used as a magnetic sensor is small by adopting the electroplating, sputtering or magnetic foil process, the structure of the magnetism collecting sheet made of the existing material can be directly processed and then packaged to the detection device of the physical quantity in practical application, the conversion efficiency of the detection device of the physical quantity provided by the embodiment on the horizontal magnetic field component can be improved by hundreds of times, and the detection range of the detection device of the physical quantity can be greatly improved. The traditional magnetic collecting sheet adopting the electroplating or magnetic foil process is small in detection range, the magnetic collecting sheet is often cut off to improve the detection range, materials such as soft magnetic iron nickel and permalloy are directly adopted as the magnetic collecting sheet in the embodiment of the application, and the self characteristics of the materials can meet the requirement of large range, for example, the saturation magnetic induction intensity of a silicon steel sheet can reach 2000mT, the coercive force can reach 40A/m, the initial magnetic permeability is 1500H/m, the maximum magnetic permeability reaches 20000H/m, the resistivity reaches 50 mu omega/cm, and the Curie temperature can reach 750K; the permalloy has the advantages that the saturation magnetic induction intensity can reach 740mT, the coercive force can reach 2.4A/m, the initial magnetic permeability is 40000H/m, the maximum magnetic permeability reaches 200000H/m, the resistivity reaches 60 mu omega/cm, and the Curie temperature can reach 450K, so that the magnetic collecting sheet does not need to be cut off, and the process complexity of the physical quantity detection device is reduced.
Optionally, the magnetic collecting sheet adopts a symmetrical structure, as shown in fig. 2, it may be an octagonal body, or a regular quadrilateral body. Wherein, the regular quadrangle is shown in fig. 2a, and the octagon is shown in fig. 2 b. Since the size of the magnetism collecting sheet affects the size and the detection range of the detection device for the physical quantity, the size of the magnetism collecting sheet may be determined according to the size of the detection device for the actual physical quantity, may be determined according to the range of the detection device for the physical quantity, or may be determined according to the number of the hall elements, which is not limited to this. It should be noted that, when the magnetism collecting sheet is an octagon, the side length of the short side on which the hall element is placed should be less than or equal to the shortest side length of the opposite side, for example, as shown in fig. 3, in one application, the side length of the short side on which the hall element is placed may be 0.21 mm, and the shortest side length of the opposite side of the short side on which the hall element is placed may be 1.1 mm.
The detection means of the physical quantity comprise at least one hall cell. When the detection device of the physical quantity comprises a Hall unit, the Hall unit can be arranged at any position on the magnetism collecting sheet, and because only one physical quantity can be detected by one Hall unit at the same time, the detection device of the physical quantity can only detect one physical quantity of a detected object at the same time, such as displacement or angle; when the detection device for the physical quantity comprises a plurality of hall units, different hall units can detect different physical quantities, and the detection device for the physical quantity can simultaneously detect different physical quantities of the detected object, such as displacement and angle. Moreover, different hall elements are arranged at different positions of the magnetic collecting sheet, for example, hall elements on the upper and lower corners of the quadrangular body shown in fig. 1 constitute one hall element, hall elements on the left and right corners constitute one hall element, hall elements on the upper left and right sides constitute one hall element, and hall elements on the lower left and right sides constitute one unit.
Each Hall unit comprises a first Hall element and a second Hall element, and the two Hall elements of the same Hall unit are arranged at two mutually symmetrical positions of the magnetic collecting sheet. The two symmetrical positions can be the edge positions of the magnetic collecting sheet, specifically, the edge positions can be the positions on any one edge of the magnetic collecting sheet, and the positions of the top corners of the magnetic collecting sheet can also be the positions of the top corners of the magnetic collecting sheet. For example, as shown in fig. 1, the first hall element and the second hall element may be disposed at opposite corners of the magnetic flux collecting plate of the regular tetragonal body, or may be disposed at corresponding positions of the opposite sides.
The first hall element or the second hall element in each hall unit may be the same type of hall element, and both realize detection of the physical quantity based on the hall effect. Specifically, if a physical quantity (for example, a displacement or an angle) of the object to be measured changes, a magnetic field gradient detected by the first hall element or the second hall element of each hall unit disposed on the magnetism collecting plate in the detection device of the physical quantity changes, and further, the change of the magnetic field gradient changes the hall voltage. Therefore, when the detection device of the physical quantity detects the displacement of the measured object, the corresponding change of the magnetic field gradient can be determined according to the relation between the Hall voltage and the gradient and the change of the Hall voltage, and then the displacement of the measured object can be determined according to the relation between the magnetic field gradient and the position of the measured object and the change of the magnetic field gradient; when the detection device of the physical quantity detects the angle change of the object to be detected, the change of the corresponding magnetic field gradient can be determined according to the relation between the Hall voltage and the gradient and the change of the Hall voltage, and then the angle change of the object to be detected can be determined according to the relation between the magnetic field gradient and the angle of the object to be detected and the change of the magnetic field gradient. The hall units at different positions are used for detecting different physical quantities, for example, the hall units at the vertex angles of the magnetosphere can be set to detect the displacement of the object to be detected, the hall units at the edges of the magnetosphere can be set to detect the angular change of the object to be detected, the above is only an example. In the physical quantity detection device, one or more hall elements for detecting the same physical quantity may be provided, but the present invention is not limited thereto.
The Hall carrier plate can be fixed on the secondary frame and is used as a magnetic collecting sheet and a carrier of a Hall element in the Hall unit; the hall carrier may be a semiconductor chip. The secondary frame includes a plurality of secondary pins to which an external circuit for amplifying, converting, and the like, a detected voltage signal can be connected. The dimensions of the hall carrier plate and the secondary frame may be set according to the size of the package of the device for actually detecting physical quantities, which is not limited to this.
The packaging body is used for packaging the magnetic collecting sheet, the Hall element in the Hall unit, the Hall carrier plate and the secondary frame into a structural body. The size of the package can be set according to the current detection device and the practical application requirements, which is not limited in this respect.
For example, as shown in fig. 4, the detection device for physical quantity is placed on an XY plane, the magnetic collecting sheet is a regular quadrilateral body with a symmetrical structure, two opposite vertex angles of the magnetic collecting sheet are respectively parallel to an X axis and a Y axis, and the magnetic collecting sheet is placed on the hall carrier plate, a direction of a magnetic field generated by the object to be detected is a positive direction of the Y axis, and magnetic lines of force surround the magnetic collecting sheet on the hall carrier plate, so that a hall element on the magnetic collecting sheet can induce a magnetic field gradient to generate. When the physical quantity detection device is used for detecting the displacement of a detected object, a Hall unit can be arranged on the magnetism collecting sheet, and a first Hall element and a second Hall element of the Hall unit are respectively arranged on two vertex angles of the magnetism collecting sheet close to the secondary side pin (namely on two vertex angles of which the vertex angle lines are parallel to the Y axis). When the measured object is displaced along the positive direction or the negative direction of the Y axis, the magnetic field gradients detected by the first Hall element and the second Hall element are changed, so that the Hall voltages of the first Hall element and the second Hall element are changed. Therefore, the detection device of the physical quantity can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the change of the hall voltage of the first hall element and the second hall element, and further determine the displacement of the object to be measured according to the relationship between the magnetic field gradient and the position of the object to be measured and the change of the magnetic field gradient. For example, the detecting device shown in fig. 4 is used for detecting the displacement of the detected object in the Y-axis direction, similarly, the detecting device shown in fig. 5 is used for detecting the displacement of the detected object in the X-axis direction, and similarly, the detecting device shown in fig. 6 is used for simultaneously detecting the displacements of the detected object in the X-axis direction and the Y-axis direction.
As shown in fig. 7, when the detecting device for physical quantity is used to detect the angle change of the object to be detected, two hall elements, namely, a first hall element and a second hall element, may be respectively disposed on two opposite sides of the magnetic collecting sheet of the quadrilateral body, the first hall element of the first hall element being disposed on any one side of the magnetic collecting sheet, and the second hall element being disposed on the opposite side of the side; the first Hall element of the second Hall unit is arranged on any adjacent edge of the first Hall element of the first Hall unit, and the second Hall element is arranged on the opposite edge of the adjacent edge. In actual measurement, when an object to be measured rotates in an XY plane, magnetic field gradients detected by the first hall element and the second hall element of the two hall units will change, so that hall voltages of the hall elements change. Therefore, the detection device of the physical quantity can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the change of the hall voltage of the first hall element and the second hall element of the two hall units, and further determine the rotation angle of the object to be measured according to the relationship between the magnetic field gradient and the angle of the object to be measured and the change of the magnetic field gradient. For example, the detecting device shown in fig. 7 is used for detecting the rotation angle of the detected object in the positive direction (clockwise direction), and similarly, the detecting device shown in fig. 8 is used for detecting the rotation angle of the detected object in the negative direction (counterclockwise direction), and similarly, the detecting device shown in fig. 9 is used for simultaneously detecting the rotation angles of the detected object in all directions.
As shown in fig. 10, when the detection device for physical quantities is used to detect the displacement and the angle change of the object to be detected, four hall units may be disposed at two opposite corners and two opposite sides of the magnetic sheet, a first hall unit formed by hall elements disposed at corners where the opposite corners are parallel to the Y axis (i.e., two hall elements disposed at corners near the pins of the second side) is used to detect the displacement of the object to be detected in the Y axis direction, a second hall unit formed by two hall elements disposed at corners where the opposite corners are parallel to the X axis (i.e., two hall elements disposed at corners far from the pins of the second side) is used to detect the displacement of the object to be detected in the X axis direction, and a third hall unit and a fourth hall unit disposed at the sides of the magnetic sheet are used to detect the angle change of the object to be detected in the XY plane. When the object to be measured is displaced along the positive direction or the negative direction of the Y axis, the magnetic field gradients detected by the first hall element and the second hall element of the first hall unit will change, so that the hall voltages of the two hall elements change. Therefore, the detection device of the physical quantity can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the change of the hall voltage of the first hall element and the second hall element of the first hall unit, and further determine the displacement of the measured object in the Y-axis direction according to the relationship between the magnetic field gradient and the position of the measured object and the change of the magnetic field gradient. When the object to be measured is displaced along the positive direction or the negative direction of the X axis, the magnetic field gradients detected by the first Hall element and the second Hall element of the second Hall unit will be changed, so that the Hall voltages of the first Hall element and the second Hall element are changed. Therefore, the detection device of the physical quantity can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the change of the hall voltage of the first hall element and the second hall element of the second hall unit, and further determine the displacement of the measured object in the X-axis direction according to the relationship between the magnetic field gradient and the position of the measured object and the change of the magnetic field gradient. When the object to be measured rotates in the XY plane, the magnetic field gradients detected by the first Hall elements and the second Hall elements of the third Hall unit and the fourth Hall unit will change, so that the Hall voltages of the Hall elements change. Therefore, the physical quantity detection device can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the changes of the hall voltages of the first hall element and the second hall element of the third hall unit and the fourth hall unit, and further determine the rotation angle of the measured object according to the relationship between the magnetic field gradient and the angle of the measured object and the changes of the magnetic field gradient.
In practical application, the magnetic collecting sheets are arranged at different positions, the Hall units arranged on the magnetic collecting sheets have different physical quantities measured, the conversion rates of corresponding horizontal magnetic fields are different, and further the detection measuring ranges of the detection devices of the physical quantities are different. Based on the physical quantity detection device with the structure form shown in fig. 10, this embodiment further provides a possible implementation manner, as shown in fig. 11, the physical quantity detection device is placed on an XY plane, the magnetic collecting sheet is a regular quadrilateral body with a symmetrical structure, four sides of the magnetic collecting sheet are placed on the hall carrier plate in parallel to an X axis and a Y axis, a direction of a magnetic field generated by the object to be detected is a positive direction of the Y axis, and magnetic lines of force surround the magnetic collecting sheet on the hall carrier plate, so that a hall element on the magnetic collecting sheet can induce generation of a magnetic field gradient. . When the detection device using the physical quantity detects the displacement and the angle change of the measured object, four Hall units can be arranged at two opposite vertex angles and two opposite sides of the magnetism collecting sheet, a first Hall unit formed by two Hall elements placed on the side parallel to the X axis is used for detecting the displacement of the measured object in the Y axis direction, a second Hall unit formed by two Hall elements placed on the side parallel to the Y axis is used for detecting the displacement of the measured object in the X axis direction, and a third Hall unit and a fourth Hall unit which are positioned at the vertex angles of the magnetism collecting sheet are used for detecting the angle change of the measured object in the XY plane. When the object to be measured is displaced along the positive direction or the negative direction of the Y axis, the magnetic field gradients detected by the first hall element and the second hall element of the first hall unit will change, so that the hall voltages of the two hall elements change. Therefore, the detection device of the physical quantity can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the change of the hall voltage of the first hall element and the second hall element of the first hall unit, and further determine the displacement of the measured object in the Y-axis direction according to the relationship between the magnetic field gradient and the position of the measured object and the change of the magnetic field gradient. When the object to be measured is displaced along the positive direction or the negative direction of the X axis, the magnetic field gradients detected by the first Hall element and the second Hall element of the second Hall unit will be changed, so that the Hall voltages of the first Hall element and the second Hall element are changed. Therefore, the detection device of the physical quantity can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the change of the hall voltage of the first hall element and the second hall element of the second hall unit, and further determine the displacement of the measured object in the X-axis direction according to the relationship between the magnetic field gradient and the position of the measured object and the change of the magnetic field gradient. When the object to be measured rotates in the XY plane, the magnetic field gradients detected by the first Hall elements and the second Hall elements of the third Hall unit and the fourth Hall unit will change, so that the Hall voltages of the Hall elements change. Therefore, the detection device of the physical quantity can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the changes of the hall voltages of the first hall element and the second hall element of the third hall unit and the fourth hall unit, and further determine the rotation angle of the object to be measured according to the relationship between the magnetic field gradient and the angle of the object to be measured and the changes of the magnetic field gradient.
In practical applications, the magnetic collecting sheet has different shapes and different corresponding conversion rates, and based on the package body in the structural form shown in fig. 10, this embodiment further provides a possible implementation manner, as shown in fig. 12, the magnetic collecting sheet in the apparatus is an octagonal body, and four sides of the magnetic collecting sheet are symmetrically arranged for short sides and four sides of the magnetic collecting sheet are symmetrically arranged for long sides. The detection device of the physical quantity is placed on an XY plane, the magnetic collecting sheet is an octagon body with a symmetrical structure, four short sides of the octagon body are respectively parallel to an X axis and a Y axis and are placed on the Hall support plate, a connecting line between the two short sides is respectively parallel to the X axis and the Y axis, and the direction of a magnetic field generated by a detected object is the positive direction of the Y axis. When the detection device of the physical quantity is used for detecting the displacement and the angle change of the detected object, four Hall units can be respectively arranged on two short opposite sides and two long opposite sides of the magnetism collecting sheet, a first Hall unit formed by two Hall elements placed on the short side parallel to the X axis is used for detecting the displacement of the detected object in the Y axis direction, a second Hall unit formed by two Hall elements placed on the short side parallel to the Y axis is used for detecting the displacement of the detected object in the X axis direction, and a third Hall unit and a fourth Hall unit which are positioned on the long side of the magnetism collecting sheet are used for detecting the angle change of the detected object in the XY plane. When the object to be measured is displaced along the positive direction or the negative direction of the Y axis, the magnetic field gradients detected by the first hall element and the second hall element of the first hall unit will change, so that the hall voltages of the two hall elements change. Therefore, the detection device of the physical quantity can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the change of the hall voltage of the first hall element and the second hall element of the first hall unit, and further determine the displacement of the measured object in the Y-axis direction according to the relationship between the magnetic field gradient and the position of the measured object and the change of the magnetic field gradient. When the object to be measured is displaced along the positive direction or the negative direction of the X axis, the magnetic field gradients detected by the first Hall element and the second Hall element of the second Hall unit will be changed, so that the Hall voltages of the first Hall element and the second Hall element are changed. Therefore, the detection device of the physical quantity can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the change of the hall voltage of the first hall element and the second hall element of the second hall unit, and further determine the displacement of the measured object in the X-axis direction according to the relationship between the magnetic field gradient and the position of the measured object and the change of the magnetic field gradient. When the object to be measured rotates in the XY plane, the magnetic field gradients detected by the first Hall elements and the second Hall elements of the third Hall unit and the fourth Hall unit will change, so that the Hall voltages of the Hall elements change. Therefore, the detection device of the physical quantity can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the changes of the hall voltages of the first hall element and the second hall element of the third hall unit and the fourth hall unit, and further determine the rotation angle of the object to be measured according to the relationship between the magnetic field gradient and the angle of the object to be measured and the changes of the magnetic field gradient.
Based on the above-mentioned octagon body structure, when the locating place of octagon body changes, the corresponding conversion rate is also different, and this embodiment still provides in a possible implementation, as shown in fig. 13, this detection device of physical quantity places on the XY plane, and the magnetic-collecting piece is the octagon body of symmetrical structure, and its four long limits are on a parallel with X axle and Y axle respectively, and place on the hall support plate to and the line between two long limits is on a parallel with X axle and Y axle respectively, and the magnetic field direction that the measured object produced is the Y axle positive direction. When the detection device of the physical quantity is used for detecting the displacement and the angle change of the detected object, four Hall units can be arranged on two short opposite sides and two long opposite sides of the magnetism collecting sheet, a first Hall unit formed by two Hall elements which are placed on the long side parallel to the X axis is used for detecting the displacement of the detected object in the Y axis direction, a second Hall unit formed by two Hall elements which are placed on the long side parallel to the Y axis is used for detecting the displacement of the detected object in the X axis direction, and a third Hall unit and a fourth Hall unit which are positioned on the short side of the magnetism collecting sheet are used for detecting the angle change of the detected object in the XY plane. When the object to be measured is displaced along the positive direction or the negative direction of the Y axis, the magnetic field gradients detected by the first hall element and the second hall element of the first hall unit will change, so that the hall voltages of the two hall elements change. Therefore, the detection device of the physical quantity can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the change of the hall voltage of the first hall element and the second hall element of the first hall unit, and further determine the displacement of the measured object in the Y-axis direction according to the relationship between the magnetic field gradient and the position of the measured object and the change of the magnetic field gradient. When the object to be measured is displaced along the positive direction or the negative direction of the X axis, the magnetic field gradients detected by the first Hall element and the second Hall element of the second Hall unit will be changed, so that the Hall voltages of the first Hall element and the second Hall element are changed. Therefore, the detection device of the physical quantity can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the change of the hall voltage of the first hall element and the second hall element of the second hall unit, and further determine the displacement of the measured object in the X-axis direction according to the relationship between the magnetic field gradient and the position of the measured object and the change of the magnetic field gradient. When the object to be measured rotates in the XY plane, the magnetic field gradients detected by the first Hall elements and the second Hall elements of the third Hall unit and the fourth Hall unit will change, so that the Hall voltages of the Hall elements change. Therefore, the detection device of the physical quantity can determine the change of the detected magnetic field gradient according to the relationship between the hall voltage and the magnetic field gradient and the changes of the hall voltages of the first hall element and the second hall element of the third hall unit and the fourth hall unit, and further determine the rotation angle of the object to be measured according to the relationship between the magnetic field gradient and the angle of the object to be measured and the changes of the magnetic field gradient.
The detection device for the physical quantity comprises at least one Hall unit, a magnetic collecting sheet, a Hall carrier plate, a packaging body and a secondary frame; the magnetic collecting sheet is a symmetrical structure; each Hall unit comprises a first Hall element and a second Hall element, and the magnetism collecting sheet is arranged on the Hall carrier plate; the Hall support plate is fixed on the secondary frame; different Hall units are arranged at different positions on the magnetism collecting sheet; the first Hall element and the second Hall element are respectively arranged at two mutually symmetrical positions on the magnetism collecting sheet; all the Hall units, the Hall support plate and the secondary side frame are packaged on the packaging body to form a structural body of the detection device for the target physical quantity; the target physical quantity is a displacement and/or an angle. The detection device of the physical quantity is located in the magnetic field range generated by the detected object, and when the detected object is displaced or changed in angle, the magnetic field gradient where the Hall element in the detection device of the physical quantity is located is changed, so that the voltage of the Hall element is changed, and the physical quantity such as the displacement and the angle of the detected object can be measured based on the change of the Hall voltage. The application provides a detection device of physical quantity has set up hall element respectively in the different positions of magnetism collecting piece, and the hall element that sets up different positions on magnetism collecting piece is used for measuring the different physical quantities of testee, and the detection device of physical quantity that this application provided promptly can compatible displacement detection and angle detection, has solved the problem that current detection device measured single physical quantity. Compared with the existing detection devices such as a magnetic displacement sensor and a magnetic rotary encoder, the detection device for the physical quantity provided by the application is simple in structure and low in cost. In addition, if the magnetic field level that the measured object produced passes through hall element, hall element can not detect the magnetic field change, but the magnetism-collecting piece in this application can convert horizontal magnetic field into vertical direction's magnetic field based on the fringe effect to be detected by hall element, and further, the detection device of physical quantity can be based on the physical quantity such as the displacement of measured object, angle of the change of magnetic field after the conversion physical quantity. That is, the present application considers the case where the magnetic field level generated by the object to be measured passes through the hall element, and expands the application range of the detection device of the physical quantity. Furthermore, the application provides multiple mode of setting up the hall unit, and the hall unit sets up the position difference, and the physics of detection is different, specifically can detect single direction, also can detect multi-directional displacement and angle, and specific detection device can be according to the nimble setting of practical application demand, and consequently, the detection device's that this application provided range is very wide, and can use in a flexible way.
In practical applications, the thickness of the magnetic collecting sheet may also affect the conversion rate of the magnetic collecting sheet. In one embodiment, the thickness of the magnetism collecting sheet can be any value between 0.2 mm and 0.5 mm, and the edge effect of the magnetism collecting sheet can be enhanced when the thickness is within the value range, so that more magnetic fields in the horizontal direction are converted into magnetic fields in the vertical direction, the range of the detected magnetic field gradient change is enlarged, and the measuring range of the physical quantity detection device is improved. For example, in practical applications, the thickness of the magnetic collecting sheet can be 0.26 mm optimally through experiments.
The above embodiments relate to a scheme in which the physical quantity detection device determines the physical quantity of the object to be measured based on the relationship between the magnetic field change and the physical quantity such as the relationship between the hall voltage and the magnetic field change, the displacement, the angle, and the like. In another embodiment of the present application, the relationship among the hall voltage, the change of the magnetic field, and the physical quantity may be directly stored in the physical quantity detection device, so that when the physical quantity detection device detects the physical quantity, the physical quantity of the object to be detected may be automatically determined directly according to the change of the hall voltage and the relationship among the hall voltage, the change of the magnetic field, and the physical quantity.
In a specific implementation, the detection device for the physical quantity may further include a chip digital register, and after the detection device for the physical quantity is calibrated, the obtained calibration parameters may be stored in the chip digital register. When the physical quantity detection device is used for detecting the detected object, the chip digital register can directly acquire the output voltage of the Hall element in the corresponding Hall unit, and the physical quantity of the detected object is determined according to the acquired Hall voltage and the calibration parameters.
The calibration parameter indicates a relationship between the displacement of the object to be calibrated and the output voltage of the detection device of the physical quantity, and a relationship between the angle of the object to be calibrated and the output voltage of the detection device of the physical quantity.
In the embodiment of the application, the detection device of the physical quantity can further comprise a chip digital register, and the chip digital register is used for storing the calibration parameters of the calibration object, and directly determining the physical quantity of the detected object according to the Hall voltage and the calibration parameters, so that the detection sensitivity of the detection device of the physical quantity is improved.
Based on the problem that the magnetic sensor can only measure a single physical quantity in the prior art, the application also provides a physical quantity detection method. Fig. 14 is a schematic flow chart of a method for detecting a physical quantity according to an embodiment of the present application, including the following steps:
and 1401, calibrating the displacement and the angle of the detection device of the physical quantity to obtain the calibrated detection device of the physical quantity.
In order to determine the physical quantity of the measured object by using the detection device of the physical quantity, the detection device of the physical quantity is calibrated first.
In the specific implementation, the displacement calibration and the angle calibration can be respectively carried out on the physical quantity of the measured object. The displacement calibration is carried out on the detection device of the physical quantity, and the relationship between the displacement of the calibrated object and the output voltage of the detection device of the physical quantity can be determined according to the corresponding relationship between the magnetic field gradient change and the displacement and the corresponding relationship between the magnetic field gradient change and the voltage. Specifically, the relative distance between the object to be calibrated and the magnetism collecting plate may be determined, and the magnetic field generated by the object to be calibrated may have stable voltage signal output at the farthest distance from the magnetism collecting plate and the detection sensitivity of the physical quantity detection device may be determined. Then determining the key characteristic points to be calibrated, and determining the relationship between the displacement of the calibrated object and the Hall voltage according to the displacement and voltage output of the calibrated object at each key characteristic point, wherein the relationship between the displacement of the calibrated object and the Hall voltage can be represented by a function and stored in a chip digital register in the physical quantity detection device.
The angle calibration is carried out on the detection device of the physical quantity, and the relationship between the displacement of the calibrated object and the output voltage of the detection device of the physical quantity can be determined according to the corresponding relationship between the magnetic field gradient change and the angle change and the corresponding relationship between the magnetic field gradient change and the voltage. Specifically, the angle between the object to be calibrated and the magnetism collecting plate may be determined, and the magnetic field generated by the object to be calibrated may have stable voltage signal output at the limit angle of the magnetism collecting plate and the detection sensitivity of the physical quantity detecting device may be determined. Then determining the key characteristic angle to be calibrated, determining the relation between the angle change of the calibrated object and the Hall voltage according to the angle change and the voltage output of the calibrated object at each key characteristic angle, wherein the relation between the angle change of the calibrated object and the Hall voltage can be represented by a function and is stored in a chip digital register in the detection device of the physical quantity.
Wherein the displacement is a moving distance of the object to be calibrated in the horizontal and vertical directions in the plane relative to the detection device of the physical quantity; the angle is an angle at which the object to be calibrated rotates based on the central axis of the physical quantity detection device; the functional representation of the relation between the displacement of the calibrated object and the Hall voltage can be one section, two sections or three sections; the functional representation of the relation between the angle change of the calibrated object and the Hall voltage can be one section, two sections or three sections. The relationship between the displacement of the detected object and the magnetic field gradient can be as shown in fig. 15, where the Y-axis represents the distance between the magnetic collecting sheet and the object to be calibrated, the X-axis represents the magnetic field gradient value in the direction of the Y-axis relative position, and Φ represents the initial angle of the object to be calibrated relative to the magnetic collecting sheet.
1402, determining a target Hall unit in the calibrated physical quantity detection device; the target hall unit is used to measure a target physical quantity.
In a specific implementation, since different hall units on the magnetism collecting sheet are used for detecting different physical quantities, when a calibrated physical quantity detection device is used for detecting a target physical quantity (displacement or angle), a target hall unit for detecting the target physical quantity is determined first. For example, the target hall cell may be determined according to a calibration process of the detection device of the physical quantity. Namely, if the detection device of the physical quantity obtains a calibration parameter through the relationship between the output voltage and the displacement of the first hall unit in the displacement calibration process, the first hall unit is the target hall unit when the displacement of the measured object is detected; in the angle calibration process, the physical quantity detection device obtains the calibration parameters through the relationship between the output voltages and the angle changes of the third Hall unit and the fourth Hall unit, and when the angle of the measured object is detected, the third Hall unit and the fourth Hall unit are the target Hall units.
And step 1403, acquiring the physical quantity of the sensing output of the target Hall unit.
In specific implementation, after the target hall unit is determined, the physical quantity sensed and output by the target hall unit, that is, the output voltage of the target hall unit, can be obtained, and then the physical quantity of the measured object is determined according to the output voltage of the target hall unit and the calibration parameters stored in the chip digital register.
The method for detecting the physical quantity provided by the embodiment of the application firstly calibrates the displacement and the angle of the detection device of the physical quantity, and stores a calibration result in the detection device of the physical quantity, so that the calibrated detection device of the physical quantity is obtained. And then determining a target Hall unit for detecting the target physical quantity and the output voltage of the target Hall unit, and determining the physical quantity of the object to be detected according to the output voltage of the target Hall unit and the calibration parameters stored in the chip digital register. Therefore, the physical quantity of the detected object is detected by the detection device adopting the physical quantity, so that displacement detection and angle detection are compatible, and the problem of measuring a single physical quantity is solved.
It should be understood that, although the steps in the flowcharts related to the embodiments described above are shown in sequence as indicated by the arrows, the steps are not necessarily performed in sequence as indicated by the arrows. The steps are not performed in the exact order shown and described, and may be performed in other orders, unless explicitly stated otherwise. Moreover, at least a part of the steps in the flowcharts related to the embodiments described above may include multiple steps or multiple stages, which are not necessarily performed at the same time, but may be performed at different times, and the execution order of the steps or stages is not necessarily sequential, but may be rotated or alternated with other steps or at least a part of the steps or stages in other steps.
Based on the same inventive concept, the embodiment of the present application further provides a physical quantity detection device for implementing the above-mentioned physical quantity detection method. The implementation scheme for solving the problem provided by the device is similar to the implementation scheme described in the above method, so that specific limitations in the following embodiments of the device for detecting one or more physical quantities may refer to the limitations in the above method for detecting physical quantities, and are not described herein again.
In one embodiment, as shown in fig. 16, there is provided a detection apparatus of a physical quantity, including: calibration module, confirm the module and obtain the module, wherein:
a calibration module 1601, configured to calibrate a displacement and an angle of the detection device of the physical quantity to obtain a calibrated detection device of the physical quantity;
a determining module 1602, configured to determine a target hall unit in the calibrated detection apparatus for physical quantities; the target Hall unit is used for measuring a target physical quantity;
an obtaining module 1603, configured to obtain a physical quantity output by the target hall cell.
In one embodiment, the displacement and angle calibration of the detection device of the physical quantity comprises: determining the relationship between the displacement of the calibrated object and the output voltage of the physical quantity detection device according to the corresponding relationship between the magnetic field gradient change and the displacement and the corresponding relationship between the magnetic field gradient change and the voltage; the displacement is the moving distance of the calibrated object relative to the detecting device of the physical quantity in the horizontal and vertical directions in a plane; determining the relationship between the angle of the calibrated object and the output voltage of the detection device of the physical quantity according to the corresponding relationship between the magnetic field gradient change and the angle and the corresponding relationship between the magnetic field gradient change and the voltage; the angle is an angle at which the object to be calibrated rotates based on the central axis of the physical quantity detection device.
The respective modules in the above-described detection apparatus of physical quantities may be entirely or partially implemented by software, hardware, and a combination thereof. The modules can be embedded in a hardware form or independent from a processor in the computer device, and can also be stored in a memory in the computer device in a software form, so that the processor can call and execute operations corresponding to the modules.
In one embodiment, a computer device is provided, which may be a terminal, and its internal structure diagram may be as shown in fig. 17. The computer device comprises a processor, a memory, and a communication interface connected by a system bus. Wherein the processor of the computer device is configured to provide computing and control capabilities. The memory of the computer device comprises a nonvolatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of an operating system and computer programs in the non-volatile storage medium. The communication interface of the computer device is used for carrying out wired or wireless communication with an external terminal, and the wireless communication can be realized through WIFI, a mobile cellular network, NFC (near field communication) or other technologies. The computer program is executed by a processor to implement a method of detecting a physical quantity.
Those skilled in the art will appreciate that the architecture shown in fig. 17 is merely a block diagram of some of the structures associated with the disclosed aspects and is not intended to limit the computing devices to which the disclosed aspects apply, as particular computing devices may include more or less components than those shown, or may combine certain components, or have a different arrangement of components.
In one embodiment, a computer device is provided, comprising a memory and a processor, the memory having a computer program stored therein, the processor implementing the following steps when executing the computer program:
calibrating the displacement and the angle of the detection device of the physical quantity to obtain the calibrated detection device of the physical quantity;
determining a target Hall unit in a calibrated physical quantity detection device; the target Hall unit is used for measuring a target physical quantity;
and acquiring the physical quantity of the induction output of the target Hall unit.
In one embodiment, the processor, when executing the computer program, further performs the steps of:
determining the relationship between the displacement of the calibrated object and the output voltage of the physical quantity detection device according to the corresponding relationship between the magnetic field gradient change and the displacement and the corresponding relationship between the magnetic field gradient change and the voltage; the displacement is the moving distance of the calibrated object relative to the detecting device of the physical quantity in the horizontal and vertical directions in a plane; determining the relationship between the angle of the calibrated object and the output voltage of the physical quantity detection device according to the corresponding relationship between the magnetic field gradient change and the angle and the corresponding relationship between the magnetic field gradient change and the voltage; the angle is an angle at which the object to be calibrated rotates based on the central axis of the physical quantity detection device.
In one embodiment, a computer-readable storage medium is provided, having a computer program stored thereon, which when executed by a processor, performs the steps of:
calibrating the displacement and the angle of the detection device of the physical quantity to obtain the calibrated detection device of the physical quantity;
determining a target Hall unit in a calibrated physical quantity detection device; the target Hall unit is used for measuring a target physical quantity;
and acquiring the physical quantity of the induction output of the target Hall unit.
In one embodiment, the computer program when executed by the processor further performs the steps of:
determining the relationship between the displacement of the calibrated object and the output voltage of the physical quantity detection device according to the corresponding relationship between the magnetic field gradient change and the displacement and the corresponding relationship between the magnetic field gradient change and the voltage; the displacement is the moving distance of the calibrated object relative to the detecting device of the physical quantity in the horizontal and vertical directions in a plane; determining the relationship between the angle of the calibrated object and the output voltage of the detection device of the physical quantity according to the corresponding relationship between the magnetic field gradient change and the angle and the corresponding relationship between the magnetic field gradient change and the voltage; the angle is an angle at which the object to be calibrated rotates based on the central axis of the physical quantity detection device.
In one embodiment, a computer program product is provided, comprising a computer program which, when executed by a processor, performs the steps of:
calibrating the displacement and the angle of the detection device of the physical quantity to obtain the calibrated detection device of the physical quantity;
determining a target Hall unit in a calibrated physical quantity detection device; the target Hall unit is used for measuring a target physical quantity;
and acquiring the physical quantity of the induction output of the target Hall unit.
In one embodiment, the computer program when executed by the processor further performs the steps of:
determining the relationship between the displacement of the calibrated object and the output voltage of the physical quantity detection device according to the corresponding relationship between the magnetic field gradient change and the displacement and the corresponding relationship between the magnetic field gradient change and the voltage; the displacement is the moving distance of the calibrated object relative to the detecting device of the physical quantity in the horizontal and vertical directions in a plane; determining the relationship between the angle of the calibrated object and the output voltage of the detection device of the physical quantity according to the corresponding relationship between the magnetic field gradient change and the angle and the corresponding relationship between the magnetic field gradient change and the voltage; the angle is an angle at which the object to be calibrated rotates based on the central axis of the physical quantity detection device.
It will be understood by those skilled in the art that all or part of the processes of the methods of the embodiments described above can be implemented by hardware instructions of a computer program, which can be stored in a non-volatile computer-readable storage medium, and when executed, can include the processes of the embodiments of the methods described above. Any reference to memory, databases, or other media used in the embodiments provided herein can include at least one of non-volatile and volatile memory. The nonvolatile Memory may include Read-Only Memory (ROM), magnetic tape, floppy disk, flash Memory, optical Memory, high-density embedded nonvolatile Memory, resistive Random Access Memory (ReRAM), Magnetic Random Access Memory (MRAM), Ferroelectric Random Access Memory (FRAM), Phase Change Memory (PCM), graphene Memory, and the like. Volatile Memory can include Random Access Memory (RAM), external cache Memory, and the like. By way of illustration and not limitation, RAM can take many forms, such as Static Random Access Memory (SRAM) or Dynamic Random Access Memory (DRAM), among others. The databases referred to in various embodiments provided herein may include at least one of relational and non-relational databases. The non-relational database may include, but is not limited to, a block chain based distributed database, and the like. The processors referred to in the embodiments provided herein may be general purpose processors, central processing units, graphics processors, digital signal processors, programmable logic devices, quantum computing based data processing logic devices, etc., without limitation.
The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present application. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (10)

1. A detection apparatus of a physical quantity, characterized by comprising: the Hall unit, the magnetic collecting sheet, the Hall support plate, the packaging body and the secondary frame are arranged on the Hall support plate; the magnetic collecting sheet is a symmetrical structure; each Hall unit comprises a first Hall element and a second Hall element, and the magnetic collecting sheet is arranged on the Hall carrier plate; the Hall support plate is fixed on the secondary frame;
different Hall units are arranged at different positions on the magnetism collecting sheet;
the first Hall element and the second Hall element are respectively arranged at two mutually symmetrical positions on the magnetism collecting sheet;
all the Hall units, the Hall support plate and the secondary side frame are packaged on the packaging body to form a structural body of the detection device of the target physical quantity; the target physical quantity is a displacement and/or an angle.
2. The physical quantity detection apparatus according to claim 1, wherein the first hall element is provided at a vertex angle of the magnetism collecting sheet, and the second hall element is provided at a vertex angle of the magnetism collecting sheet.
3. The apparatus for detecting a physical quantity according to claim 1, wherein said first hall element is provided on a side of said magnetism collecting plate, and said second hall element is provided on a side of said magnetism collecting plate.
4. The apparatus for detecting a physical quantity according to claim 1, further comprising a chip digital register for storing calibration parameters for calibrating the apparatus for detecting a physical quantity; the calibration quantity indicates a relationship between the displacement of the calibrated object and the output voltage of the detecting means of the physical quantity, and a relationship between the angle of the calibrated object and the output voltage of the detecting means of the physical quantity.
5. The apparatus for detecting physical quantity according to claim 2, wherein said magnetism collecting sheet is a silicon steel sheet.
6. The physical quantity sensing device according to claim 1, wherein said magnetism collecting plate is made of permalloy material.
7. The apparatus for detecting a physical quantity according to claim 1, wherein a thickness of the magnetism collecting sheet takes any value between 0.2 mm and 0.5 mm.
8. The physical quantity detection device according to claim 1, wherein the magnetism collecting sheet is one of an octagonal body and a regular tetragonal body.
9. A method for detecting a physical quantity, which is applied to a device for detecting a physical quantity according to any one of claims 1 to 6, the method comprising:
calibrating the displacement and the angle of the detection device of the physical quantity to obtain a calibrated detection device of the physical quantity;
determining a target Hall unit in the calibrated physical quantity detection device; the target Hall unit is used for measuring a target physical quantity;
and acquiring the physical quantity of the induction output of the target Hall unit.
10. The method for detecting physical quantities according to claim 9, wherein said performing displacement and angle calibration of the means for detecting physical quantities comprises:
determining the relationship between the displacement of the calibrated object and the output voltage of the physical quantity detection device according to the corresponding relationship between the magnetic field gradient change and the displacement and the corresponding relationship between the magnetic field gradient change and the voltage; the displacement is the moving distance of the calibrated object relative to the detection device of the physical quantity in the horizontal and vertical directions in a plane;
determining the relation between the angle of the calibrated object and the output voltage of the physical quantity detection device according to the corresponding relation between the magnetic field gradient change and the angle and the corresponding relation between the magnetic field gradient change and the voltage; the angle is an angle at which the target object rotates based on a central axis of the physical quantity detection device.
CN202210153606.3A 2022-02-18 2022-02-18 Physical quantity detecting device Pending CN114543647A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210153606.3A CN114543647A (en) 2022-02-18 2022-02-18 Physical quantity detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210153606.3A CN114543647A (en) 2022-02-18 2022-02-18 Physical quantity detecting device

Publications (1)

Publication Number Publication Date
CN114543647A true CN114543647A (en) 2022-05-27

Family

ID=81674743

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210153606.3A Pending CN114543647A (en) 2022-02-18 2022-02-18 Physical quantity detecting device

Country Status (1)

Country Link
CN (1) CN114543647A (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002368304A (en) * 2001-06-07 2002-12-20 Asahi Kasei Electronics Co Ltd Hall element
JP2003106865A (en) * 2001-10-01 2003-04-09 Asahi Kasei Electronics Co Ltd Hall sensor and displacement detector
US20130253864A1 (en) * 2012-03-22 2013-09-26 Asahi Kasei Microdevices Corporation Magnetic-Field Direction Measuring Apparatus, Rotation Angle Measuring Apparatus, and Magnetic-Field Measuring Apparatus
US20170089728A1 (en) * 2015-09-28 2017-03-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Integrated circuit arrangement for a position sensor
US20170089724A1 (en) * 2015-09-28 2017-03-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Position detector
CN112393747A (en) * 2019-08-19 2021-02-23 英飞凌科技股份有限公司 Redundant Hall angle measurement in a chip
CN113572312A (en) * 2021-07-01 2021-10-29 上海大学 Linear Hall angle and displacement integrated detection device and method based on homopolar permanent magnet birotor
CN215118942U (en) * 2021-05-21 2021-12-10 江苏兴宙微电子有限公司 Hall current sensor packaging structure

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002368304A (en) * 2001-06-07 2002-12-20 Asahi Kasei Electronics Co Ltd Hall element
JP2003106865A (en) * 2001-10-01 2003-04-09 Asahi Kasei Electronics Co Ltd Hall sensor and displacement detector
US20130253864A1 (en) * 2012-03-22 2013-09-26 Asahi Kasei Microdevices Corporation Magnetic-Field Direction Measuring Apparatus, Rotation Angle Measuring Apparatus, and Magnetic-Field Measuring Apparatus
US20170089728A1 (en) * 2015-09-28 2017-03-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Integrated circuit arrangement for a position sensor
US20170089724A1 (en) * 2015-09-28 2017-03-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Position detector
CN112393747A (en) * 2019-08-19 2021-02-23 英飞凌科技股份有限公司 Redundant Hall angle measurement in a chip
CN215118942U (en) * 2021-05-21 2021-12-10 江苏兴宙微电子有限公司 Hall current sensor packaging structure
CN113572312A (en) * 2021-07-01 2021-10-29 上海大学 Linear Hall angle and displacement integrated detection device and method based on homopolar permanent magnet birotor

Similar Documents

Publication Publication Date Title
US9478732B2 (en) Thin-film magnetoresistance sensing element, combination thereof, and electronic device coupled to the combination
US10989769B2 (en) Magneto-resistive structured device having spontaneously generated in-plane closed flux magnetization pattern
US7956610B2 (en) Sensor for sensing a magnetic field direction, magnetic field direction sensing, method for producing magnetic field sensors, and write-in apparatus for producing magnetic field sensors
CN103389479B (en) The dynamic-range sensor improved
US20160291097A1 (en) Tunneling magneto-resistor device for sensing a magnetic field
CN112834013B (en) Method and system for calibrating unbalanced load error of weighing sensor, goods shelf and article monitoring method
CN112985570B (en) Calibration method and system for sensor of weighing goods shelf
US11774484B1 (en) Wire voltage measurement method and apparatus based on electric field sensor
CN215639260U (en) Magnetic resistance circuit structure and angle sensor
CN114487966A (en) Current sensor magnetic field sensing chip position calibration method based on gradient descent method
ITTO20111072A1 (en) MAGNETIC FIELD SENSOR INCLUDING AN MAGNETIC SENSOR ANISOTROPO MAGNET AND A HALL MAGNETIC SENSOR
CN107643041A (en) Displacement detector
JP2018115929A (en) Electric current sensor signal correction method, and electric current sensor
EP3882647B1 (en) Linear bridges having nonlinear elements
CN114543647A (en) Physical quantity detecting device
CN211404455U (en) Overlay precision measuring device
CN114545305A (en) Physical quantity detecting device
JP6947194B2 (en) Signal processing circuit and magnetic sensor system
JP6148440B2 (en) Sensor signal processing apparatus and sensor signal processing method
George et al. Detailed study on error characteristics of core-less hall-effect current transducer
CN111780798B (en) Hall sensor and method for detecting stress influence degree of Hall sensor
CN114441832A (en) Wire current determination method, device, computer equipment and storage medium
US11249131B2 (en) Test apparatus and testing method using the same
CN108469595B (en) Magnetic field sensing device and sensing method
CN115963437B (en) Multi-range magnetic sensor, magnetic field measuring method and conductor preparation method

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination