CN114536158B - Processing method of quartz window of etching machine reaction chamber - Google Patents
Processing method of quartz window of etching machine reaction chamber Download PDFInfo
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- CN114536158B CN114536158B CN202210060741.3A CN202210060741A CN114536158B CN 114536158 B CN114536158 B CN 114536158B CN 202210060741 A CN202210060741 A CN 202210060741A CN 114536158 B CN114536158 B CN 114536158B
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- quartz window
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/06—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for producing matt surfaces, e.g. on plastic materials, on glass
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Abstract
The application discloses a processing method of a quartz window of an etching machine reaction cavity, which is used for processing a quartz window intermediate material, wherein the upper surface of the quartz window intermediate material is provided with a step hole penetrating through the quartz window intermediate material, the step hole is provided with a step surface, the lower surface of the quartz window intermediate material is a smooth flat surface, and the processing technology of the quartz window of the etching machine reaction cavity comprises a step surface processing step of processing the step surface and a flat surface processing step of processing the flat surface; the step surface processing step comprises: performing fire polishing on the hole wall of the stepped hole; processing the step surface by a metal cutter, and milling the step surface; filling the grinding fluid into the step hole to enable the grinding fluid to submerge the step surface; polishing the step surface by high-density fibers; the flat surface processing step comprises: processing the flat surface in a sand blasting mode to increase the roughness of the flat surface; and soaking the flat surface into a hydrogen fluoride solution, and removing a crushed layer formed on the flat surface due to sand blasting through the hydrogen fluoride solution.
Description
Technical Field
The invention relates to the field of etching machines. In particular to a method for processing a quartz window of a reaction chamber of an etching machine.
Background
In the current chip production link, an etching machine is an indispensable main device. The ICP etcher is one of the ICP etchers and mainly comprises a pre-vacuum chamber, a reaction chamber, a gas supply system and a vacuum system. In the reaction chamber, a quartz window is an important component.
The center hole of the existing quartz window is a stepped hole for carrying a nozzle and requiring sealing of the edge area. The regional step face of centre bore position generally carries out the fire polishing and handles, but the fire polishing is because the processing characteristics, step face surface can be because high temperature produces the ripple, the edge of step face and centre bore lateral wall can be because high temperature produces the arch, the turn-up, seriously influence the leakproofness of step face, can't satisfy sealed requirement, lead to the yields to reduce, in addition, quartz window bottom surface needs certain roughness, current quartz window bottom surface realizes increasing the roughness of quartz window bottom surface through machining, quartz window bottom surface can produce tiny broken layer, broken layer can peel off because of the gas impact in the reaction chamber, make and mix more impurity in the reaction chamber, and then influence the cleanliness factor in the reaction chamber.
Disclosure of Invention
Aiming at the problems, the invention provides a method for processing a quartz window of a reaction chamber of an etching machine.
The technical scheme adopted by the invention is as follows: a processing method of a quartz window of an etching machine reaction chamber is used for processing a quartz window intermediate material, the upper surface of the quartz window intermediate material is provided with a step hole penetrating through the quartz window intermediate material, the step hole is provided with a step surface, and the lower surface of the quartz window intermediate material is a smooth flat surface;
the step surface processing step comprises:
performing fire polishing on the hole wall of the stepped hole;
processing the step surface by a metal cutter, and milling the step surface;
filling the grinding fluid into the step hole to enable the grinding fluid to submerge the step surface; and
polishing the step surface by high-density fibers;
the flat surface processing step comprises:
processing the flat surface in a sand blasting mode to increase the roughness of the flat surface; and
and soaking the flat surface into a hydrogen fluoride solution, and removing a broken layer formed on the flat surface by sand blasting through the hydrogen fluoride solution.
Fire polishing is carried out on the step hole, the step surface and the edges of the step surface and the side wall are initially polished, then the step surface is ground by a metal cutter, then a high-density fiber felt is adopted to grind the step surface, when the edges of the step surface are ground, the bulges of the edges of the step surface and the side wall are eliminated, grinding fluid is added in the grinding process, and the grinding fluid plays roles of lubrication and buffering; after polishing is finished, the lower bottom surface of the quartz window is subjected to sand blasting to achieve the purpose of increasing the roughness of the lower bottom surface; after the sand blasting is finished, corroding a broken layer on the bottom surface of the quartz window, which is caused by the sand blasting, by using a hydrogen fluoride solution; and finally, cleaning the processed quartz window.
Preferably, the operation mode of fire polishing the hole wall of the stepped hole is as follows: and opening the flame polishing gun to be close to the stepped hole, and heating the hole wall of the stepped hole by flame.
The temperature of the outer flame of the flame is highest, and the outer flame is used for polishing, so that the polishing efficiency is effectively improved, and meanwhile, the energy is saved.
Preferably, the flame outer flame moves back and forth on the step surface and the side wall penetrating through the step hole at a speed of 1cm/s, and the fire polishing time is 1 to 2min.
Operating the flame polishing gun to move slowly to ensure that the stepped hole is heated uniformly; proper fire polishing duration ensures that quartz at the step surface is slightly melted and forms a relatively smooth surface after recondensation.
Preferably, the operation mode of milling the step surface is as follows: and grinding the step surface by a surface milling cutter.
The step surface is preliminarily ground through the surface milling cutter, the operation is convenient, and the grinding efficiency is high.
Preferably, the step hole is filled with the polishing liquid so that the polishing liquid passes over the step surface in an operation mode of: and placing the quartz window intermediate material on a polishing platform, wherein the upper surface of the polishing platform is smooth, and the grinding fluid is injected into the step hole after the lower surface of the step hole is tightly attached to the upper surface of the polishing platform.
During actual use, the lower surface of the quartz window is tightly attached to the upper surface of the polishing table, and a cavity with one sealed end is formed between the stepped hole of the quartz window and the upper surface of the polishing table, so that grinding fluid is injected into the cavity.
Preferably, the step surface is polished by the high-density fibers in the following operation mode: the method comprises the steps of placing a quartz window intermediate material on a polishing platform, connecting the high-density fiber material on a polishing head, connecting the polishing head with a processing spindle, wherein the diameter of the polishing head is smaller than that of a step hole, and further polishing the step surface through the polishing head.
And when in actual polishing, the polishing head extends into the step hole to polish the step surface.
Preferably, the high-density fiber felt sheet is a wool felt which is cut to be consistent with the shape of the polishing head.
The high-density fiber felt sheet is made of wool felt, so that the material is easy to obtain and the cost is low.
Preferably, the middle material of the quartz window is sleeved with a shielding piece, the shielding piece is provided with a through hole, the shielding piece covers the edge area of the lower surface of the middle material of the quartz window, the lower surface of the quartz window is exposed through the through hole, and the shielding piece is made of silica gel.
The silica gel material is soft, easily overlaps on the quartz window.
Preferably, the region of the lower surface of the quartz window intermediate material exposed through the through-hole is sandblasted using silicon carbide or quartz sand.
The surface of the workpiece obtains certain roughness through sand blasting, and meanwhile, the mechanical property of the surface of the workpiece is improved, and the fatigue resistance of the workpiece is also improved.
Preferably, the concentration of the hydrogen fluoride solution is 5%, after the sand blasting of the quartz window intermediate material is completed, the lower surface of the quartz window intermediate material is soaked in the hydrogen fluoride solution for 12 hours, and finally, the quartz window intermediate material is washed and cleaned by using clear water.
The hydrogen fluoride solution has good corrosion effect on quartz, and the aim of saving cost is fulfilled.
The invention has the beneficial effects that: performing fire polishing on the hole wall of the stepped hole; slightly melting quartz on the step surface, and re-condensing to form a relatively smooth surface; polishing the step surface by adopting a high-density fiber felt to realize fine polishing of the step surface; the surface of the workpiece has certain roughness by sand blasting, and meanwhile, the mechanical property of the surface of the workpiece is improved, and the fatigue resistance of the workpiece is also improved.
Description of the drawings:
FIG. 1 is a schematic view of a quartz window;
FIG. 2 is another angular schematic view of a quartz window;
figure 3 is a schematic view of the shield.
The figures are numbered:
1. a quartz window; 2. a stepped bore; 3. a step surface; 4. flat surface; 5. a shield.
The specific implementation mode is as follows:
the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 1 and fig. 2, a process for processing a quartz window 1 of an etcher reaction chamber is used for processing an intermediate material of the quartz window 1, the upper surface of the intermediate material of the quartz window 1 is provided with a step hole 2 penetrating through the intermediate material of the quartz window 1, the step hole 2 is provided with a step surface 3, and the lower surface of the intermediate material of the quartz window 1 is a smooth flat surface 4, and is characterized in that the process for processing the quartz window 1 of the etcher reaction chamber comprises a step surface 3 processing step for processing the step surface 3 and a flat surface 4 processing step for processing the flat surface 4;
the step surface 3 processing step comprises:
carrying out fire polishing on the hole wall of the stepped hole 2;
machining the step surface 3 through a metal cutter, and milling the step surface 3;
filling the grinding fluid into the step hole 2 to enable the grinding fluid to submerge the step surface 3; and
polishing the step surface 3 by high-density fibers;
the flat surface 4 processing steps comprise:
machining the flat surface 4 in a sand blasting mode to increase the roughness of the flat surface 4; and
the flat surface 4 is soaked in a hydrogen fluoride solution, and a crushed layer formed on the flat surface 4 by sand blasting is removed through the hydrogen fluoride solution.
Fire polishing is carried out on the step hole 2, the step surface 3 and the edges of the step surface 3 and the side wall are initially polished, then the step surface 3 is ground by a metal cutter, then the step surface 3 is ground by a high-density fiber felt, when the edges of the step surface 3 are ground, the bulges of the edges of the step surface 3 and the side wall are eliminated, grinding fluid is added in the grinding process, and the grinding fluid plays roles of lubrication and buffering; after polishing is finished, the lower bottom surface of the quartz window 1 is subjected to sand blasting to achieve the purpose of increasing the roughness of the lower bottom surface; after the sand blasting is finished, corroding a broken layer on the bottom surface of the quartz window 1 by using a hydrogen fluoride solution; and finally, cleaning the finished quartz window 1.
The operation mode of carrying out fire polishing on the hole wall of the stepped hole 2 is as follows: after the flame polishing gun is started, the flame polishing gun is close to the step hole 2, and the hole wall of the step hole 2 is heated through flame.
The temperature of the outer flame of the flame is highest, and the outer flame is used for polishing, so that the polishing efficiency is effectively improved, and meanwhile, the energy is saved.
The flame outer flame moves back and forth on the step surface 3 and the side wall penetrating through the step hole 2 at the speed of 1cm/s, and the fire polishing time is 1-2 min.
Operating the flame polishing gun to move slowly to ensure that the stepped hole 2 is heated uniformly; proper fire polishing duration ensures that quartz at the step surface 3 is slightly melted and forms a relatively smooth surface after recondensation.
The operation mode of milling the step surface 3 is as follows: and grinding the step surface 3 by a surface milling cutter.
The step face 3 is preliminarily ground by the face milling cutter, so that the grinding machine is convenient to operate and high in grinding efficiency.
The operation mode of filling the polishing liquid into the stepped hole 2 and making the polishing liquid flow over the stepped surface 3 is as follows: the middle material of the quartz window 1 is placed on a polishing platform, the upper surface of the polishing platform is flat, and grinding fluid is injected into the step hole 2 after the lower surface of the step hole 2 is tightly attached to the upper surface of the polishing platform.
During actual use, the lower surface of the quartz window 1 is tightly attached to the upper surface of the polishing table, and the stepped hole 2 of the quartz window 1 and the upper surface of the polishing table form a cavity with one sealed end, so that grinding fluid is injected into the cavity.
The operation mode of polishing the step surface 3 by the high-density fiber is as follows: the middle material of the quartz window 1 is placed on a polishing platform, the high-density fiber material is connected to a polishing head, the polishing head is connected with a processing spindle, the diameter of the polishing head is smaller than that of the step hole 2, and the step surface 3 is further polished to be flat through the polishing head.
And when in actual polishing, the polishing head extends into the step hole 2 to polish the step surface 3.
The high-density fiber felt sheet is wool felt which is cut to be consistent with the shape of the polishing head.
The high-density fiber felt sheet is made of wool felt, and is easy to obtain and low in cost.
As shown in fig. 3, the shielding piece 5 is sleeved on the middle material of the quartz window 1, the shielding piece 5 is provided with a through hole, the shielding piece 5 covers the edge area of the lower surface of the middle material of the quartz window 1, the lower surface of the quartz window 1 is exposed through the through hole, and the shielding piece 5 is made of silica gel.
The silica gel material is soft, and is easy to be sleeved on the quartz window 1.
The area of the lower surface of the intermediate material of the quartz window 1 exposed through the perforations is sandblasted using silicon carbide or quartz sand.
The surface of the workpiece has certain roughness by sand blasting, and meanwhile, the mechanical property of the surface of the workpiece is improved, and the fatigue resistance of the workpiece is also improved.
The concentration of the hydrogen fluoride solution is 5%, after the sand blasting of the intermediate material of the quartz window 1 is finished, the lower surface of the intermediate material of the quartz window 1 is soaked in the hydrogen fluoride solution for 12 hours, and finally the intermediate material of the quartz window 1 is washed and cleaned by clear water.
The hydrogen fluoride solution has good corrosion effect on quartz, and the aim of saving cost is fulfilled.
The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention, and all equivalent structural changes made by using the contents of the present specification and the drawings can be directly or indirectly applied to other related technical fields and are included in the scope of the present invention.
Claims (10)
1. A processing method of a quartz window of an etching machine reaction chamber is used for processing a quartz window intermediate material, the upper surface of the quartz window intermediate material is provided with a step hole penetrating through the quartz window intermediate material, the step hole is provided with a step surface, and the lower surface of the quartz window intermediate material is a smooth flat surface;
the step surface processing step comprises:
carrying out fire polishing on the hole wall of the stepped hole;
processing the step surface by a metal cutter, and milling the step surface;
filling the grinding fluid into the step hole to enable the grinding fluid to submerge the step surface; and
polishing the step surface by high-density fibers;
the flat surface processing step comprises:
processing the flat surface in a sand blasting mode to increase the roughness of the flat surface; and
and soaking the flat surface into a hydrogen fluoride solution, and removing a broken layer formed on the flat surface by sand blasting through the hydrogen fluoride solution.
2. The method for processing the quartz window of the reaction chamber of the etching machine as claimed in claim 1, wherein the operation mode of fire polishing the hole wall of the stepped hole is as follows: and (4) opening the flame polishing gun, enabling the flame polishing gun to be close to the stepped hole, and heating the hole wall of the stepped hole through flame.
3. The method as claimed in claim 2, wherein the flame is moved back and forth on the step surface and the sidewall of the through step hole at a speed of 1cm/s, and the duration of the fire polishing is 1 to 2min.
4. The method for processing the quartz window of the reaction chamber of the etching machine as claimed in claim 1, wherein the operation mode of milling the step surface is as follows: and grinding the step surface by a surface milling cutter.
5. The method for processing the quartz window of the reaction chamber of the etching machine as claimed in claim 1, wherein the step hole is filled with the grinding fluid, and the operation mode of enabling the grinding fluid to sink the step surface is as follows: and placing the quartz window intermediate material on a polishing platform, wherein the upper surface of the polishing platform is smooth, and the grinding fluid is injected into the step hole after the lower surface of the step hole is tightly attached to the upper surface of the polishing platform.
6. The method for processing the quartz window of the reaction chamber of the etching machine as claimed in claim 1, wherein the polishing of the step surface by the high-density fiber is performed by: placing the quartz window intermediate material on a polishing platform, connecting the high-density fiber material on a polishing head, wherein the polishing head is connected with a processing spindle, the diameter of the polishing head is smaller than that of the step hole, and further polishing the step surface through the polishing head.
7. The method for processing the quartz window of the reaction chamber of the etching machine as claimed in claim 6, wherein the high-density fiber is wool felt which is cut to be consistent with the shape of the polishing head.
8. The processing method of the quartz window of the reaction chamber of the etching machine, as recited in claim 1, wherein a shielding member is sleeved on the quartz window middle material, the shielding member has a through hole, the shielding member covers an edge area of a lower surface of the quartz window middle material, the lower surface of the quartz window is exposed through the through hole, and the shielding member is made of silica gel.
9. The method as claimed in claim 8, wherein the area of the lower surface of the quartz window intermediate material exposed through the through hole is sandblasted using silicon carbide or quartz sand.
10. The processing method of the quartz window of the reaction chamber of the etching machine, as recited in claim 1, wherein the concentration of the hydrogen fluoride solution is 5%, after the sand blasting of the quartz window intermediate material is completed, the lower surface of the quartz window intermediate material is soaked in the hydrogen fluoride solution for 12h, and finally the quartz window intermediate material is washed and cleaned by clean water.
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| CN202210060741.3A CN114536158B (en) | 2022-01-19 | 2022-01-19 | Processing method of quartz window of etching machine reaction chamber |
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| CN202210060741.3A CN114536158B (en) | 2022-01-19 | 2022-01-19 | Processing method of quartz window of etching machine reaction chamber |
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| CN114536158B true CN114536158B (en) | 2023-03-31 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS57164279A (en) * | 1981-04-01 | 1982-10-08 | Nippon Steel Corp | Fire resistant lining |
| JPH06350376A (en) * | 1993-01-25 | 1994-12-22 | Matsushita Electric Ind Co Ltd | Piezoelectric device air-tightly sealed and air-tight sealing package |
| JP4034543B2 (en) * | 2001-09-25 | 2008-01-16 | 東京エレクトロン株式会社 | Method of processing quartz member for plasma processing apparatus, quartz member for plasma processing apparatus, and plasma processing apparatus mounted with quartz member for plasma processing apparatus |
| JP2008270595A (en) * | 2007-04-23 | 2008-11-06 | Texas Instr Japan Ltd | Reaction product peeling preventive structure and manufacturing method thereof, and manufacturing method of semiconductor device using the structure |
| US11017984B2 (en) * | 2016-04-28 | 2021-05-25 | Applied Materials, Inc. | Ceramic coated quartz lid for processing chamber |
| CN111940394B (en) * | 2020-07-17 | 2022-01-21 | 上海富乐德智能科技发展有限公司 | Quartz component regeneration cleaning method of semiconductor high-order process APC device |
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