CN114535029A - Preparation method and preparation system of nano waterproof film - Google Patents
Preparation method and preparation system of nano waterproof film Download PDFInfo
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- CN114535029A CN114535029A CN202210177788.8A CN202210177788A CN114535029A CN 114535029 A CN114535029 A CN 114535029A CN 202210177788 A CN202210177788 A CN 202210177788A CN 114535029 A CN114535029 A CN 114535029A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 32
- 230000002209 hydrophobic effect Effects 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 238000000034 method Methods 0.000 claims abstract description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000003814 drug Substances 0.000 claims description 138
- 239000012530 fluid Substances 0.000 claims description 60
- 239000007789 gas Substances 0.000 claims description 30
- 229940079593 drug Drugs 0.000 claims description 29
- 239000012159 carrier gas Substances 0.000 claims description 24
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 14
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 13
- 238000001771 vacuum deposition Methods 0.000 claims description 13
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 10
- 239000002120 nanofilm Substances 0.000 claims description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 10
- 229910052786 argon Inorganic materials 0.000 claims description 7
- 239000001307 helium Substances 0.000 claims description 6
- 229910052734 helium Inorganic materials 0.000 claims description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 5
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 238000004132 cross linking Methods 0.000 claims description 3
- 230000002940 repellent Effects 0.000 claims description 3
- 239000005871 repellent Substances 0.000 claims description 3
- 238000004078 waterproofing Methods 0.000 claims 2
- 239000002253 acid Substances 0.000 abstract description 3
- 239000003513 alkali Substances 0.000 abstract description 3
- 238000005260 corrosion Methods 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
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- 238000006243 chemical reaction Methods 0.000 description 5
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/36—Successively applying liquids or other fluent materials, e.g. without intermediate treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/50—Multilayers
- B05D7/52—Two layers
- B05D7/54—No clear coat specified
Abstract
The invention is applicable to the technical field of film preparation, and provides a nano waterproof film, and a preparation method and a preparation system thereof. The preparation method of the nano waterproof film comprises the preparation of a waterproof layer and the preparation of a hydrophobic layer, wherein the waterproof layer is deposited on the surface of a substrate, and the hydrophobic layer is deposited above the waterproof layer. According to the invention, a multi-component multi-layer process is used, multiple components are naturally crosslinked to form a waterproof layer, the hydrophobic layer is repeatedly superposed on the waterproof layer to form the nano waterproof film, the preparation of the nano waterproof film consisting of multiple layers and with the thickness of each layer between 10 nm and 30nm on a substrate is realized, the nano waterproof film can prevent water and has a better hydrophobic effect, and the corrosion speed of the substrate can be reduced; the nano waterproof film is compounded by a plurality of components to achieve the required performances of water resistance, hydrophobicity, salt mist resistance, acid and alkali sweat resistance and the like, so that the preparation process of the nano waterproof film is simplified and practical.
Description
Technical Field
The invention belongs to the technical field of film preparation, and relates to a preparation method and a preparation system of a nano waterproof film, and the nano waterproof film prepared by the preparation method.
Background
The plasma vapor deposition method is widely applied to the surface coating of the substrate. The existing plasma vapor deposition method is only suitable for preparing the nano film with single component on the surface of the substrate, and cannot prepare the multi-component nano film. The single property of the components of the nano film causes the nano film to have poor waterproof performance.
Therefore, a nano waterproof film, a preparation method and a preparation system thereof are needed, so that the prepared nano waterproof film has multiple medicinal components and further has good waterproof performance.
Disclosure of Invention
The embodiment of the invention aims to provide a preparation method of a nano waterproof film, aiming at solving the problems of single component and poor waterproofness of the nano film.
The preparation method of the nano waterproof film comprises the following steps:
s1: and introducing carrier gas into a plurality of first medicine containers, wherein the carrier gas and the medicines in the first medicine containers are output from the first medicine containers to form mixed fluid, a part of the mixed fluid is selected to form first branch fluid, and the rest part of the mixed fluid forms second branch fluid.
And S2, conveying the first branch fluid to a second medicine container and converting the first branch fluid into first medicine steam, sucking the first medicine steam into a vacuum cabin body, and depositing the first medicine steam on the surface of a base body arranged on the vacuum cabin body to form a waterproof layer.
S3: and conveying the second branch fluid to the second medicine container and converting the second branch fluid into second medicine steam, wherein the second medicine steam is sucked into the vacuum cabin body and deposited on the waterproof layer to form a hydrophobic layer.
S4: and (5) introducing connecting gas into the vacuum cabin body, and repeating the step S3 until the accumulated thickness of the hydrophobic layers reaches a threshold value.
Further, in step S1, the number of the first drug containers is 3, and the 3 drugs stored in the first drug containers are perfluoroethylene, silicon nitride and a hydrophobic component, respectively, and the hydrophobic component is one or two selected from perfluoroethylene and fluorocarbon wax.
Further, the first medicine container comprises perfluoroethylene, silicon nitride and a hydrophobic component in parts by mass: 10-20: 5-10: 15 to 30.
Further, the preparation method further includes a preprocessing step before step S2:
conveying the first branch fluid and/or the second branch fluid to a mixer, and conveying the mixture to the second medicine container after uniform mixing; and/or
Putting the substrate into a tray, pushing the substrate to the vacuum chamber body of the vacuum coating device, and vacuumizing the vacuum chamber body; and/or
And raising the temperature of the second medicine container to 150-200 ℃.
Further, the carrier gas in step S1 is argon gas, and the flow rate of the argon gas introduced into the first medicine container is 30 sccm.
Further, in the step S4, the connecting gas is helium, and the flow rate of the helium introduced into the vacuum chamber body is 15-20 sccm.
Another object of the embodiments of the present invention is to provide a waterproof nano-film. The nano waterproof film is prepared by the preparation method of the nano waterproof film.
Furthermore, the nano waterproof film comprises a waterproof layer and a hydrophobic layer, wherein the waterproof layer is deposited on the surface of the substrate and is formed by crosslinking perfluoroethylene and silicon nitride; the hydrophobic layer is deposited over the water repellent layer.
Another object of an embodiment of the present invention is to provide a system for preparing a nano waterproof film, including:
a carrier gas container for outputting a carrier gas;
a first drug container for storing a drug, receiving a carrier gas, and outputting a mixed fluid;
a second medicament container; the second medicine container is used for receiving a plurality of mixed fluids and converting the mixed fluids into medicine steam, and outputting the medicine steam;
a connecting gas container for outputting a connecting gas;
and the vacuum coating device is used for receiving the medicine vapor and the connecting gas and coating the surface of the substrate.
Advantageous effects
According to the invention, a multi-component multi-layer process is used, so that a plurality of medicine components are naturally crosslinked to form a waterproof layer, and the hydrophobic layer is repeatedly superposed on the waterproof layer to form the nano waterproof film, so that the preparation of the nano waterproof film consisting of multiple layers and with the thickness of each layer between 10 nm and 30nm on a substrate is realized, the nano waterproof film can prevent water and has a better hydrophobic effect, and the corrosion speed of the substrate can be reduced; the nano waterproof film is compounded by a plurality of medicine components to achieve the required performances of water resistance, hydrophobicity, salt mist resistance, acid and alkali sweat resistance and the like, so that the process for preparing the nano waterproof film is simplified and practical.
Drawings
FIG. 1 is a schematic structural diagram of a system for preparing a nano waterproof film according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view taken along line G-G of FIG. 1;
fig. 3 is a flowchart of a method for preparing a nano waterproof film according to an embodiment of the present invention.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The chemical vapor deposition technology of plasma is characterized by that it utilizes low-temp. plasma as energy source, and the base body is placed on the cathode of glow discharge under the condition of low pressure, and utilizes the glow discharge to make the base body retain lower temp., then the proper quantity of reaction medicine component gas is introduced, and the medicine component gas is undergone the processes of a series of chemical reactions, such as plasma reaction, so that the nano film can be formed on the surface of base body. The substrate includes, but is not limited to, Printed Circuit Board Assembly (PCBA) and textiles. In the prior art, the nano-film formed on the surface of the substrate by plasma chemical vapor deposition is a single group of films. The water resistance of the film is poor due to the single property of the medicine component of the film. The invention provides a nano waterproof film and a preparation method thereof, which are used for preparing a multi-component multi-layer nano waterproof film so that the film can resist water and has higher hydrophobicity.
The embodiment provides a preparation system of a nanometer waterproof film. Referring to fig. 1 of the specification, the system 100 for preparing a nano waterproof film comprises a carrier gas container 1, a first medicine container 2, a second medicine container 3, a connecting gas container 4, a vacuum coating device 5 and a connecting pipe 6 for connecting any two containers or connecting any one of the containers and the vacuum coating device.
Wherein, the carrier gas container 1 is used for storing and outputting carrier gas; the first medicine container 2 is used for storing medicine, receiving carrier gas and outputting mixed fluid; the second medicine container 3 is used for receiving a plurality of mixed fluids and converting the mixed fluids into medicine steam, and outputting the medicine steam; the connecting gas container 4 is used for outputting connecting gas; the vacuum coating device 5 is used for receiving the medicine vapor and the connecting gas and coating the surface of the substrate.
Preferably, the second medicament container 3 comprises heating means for heating the second medicament container 3 to convert the mixed fluid located in the second medicament container 3 into a medicament vapour. Optionally, the temperature of the second medicament container 3 is 100-200 degrees celsius, and preferably, the temperature of the second medicament container 3 is 160 degrees celsius.
In order to mix the mixed fluids uniformly, the nano water-proof film manufacturing system 100 further includes a mixer 7. Optionally, the mixer 7 is an ultrasonic mixer.
Referring to fig. 1 of the specification, the first medicine container 2 includes a first medicine container 21, a first medicine container 22, and a first medicine container 23. The first drug container 21, the first drug container 22, and the first drug container 23 are connected to the mixer 7, and are communicated with the second drug container 3 through the mixer 7. The vacuum coating device 5 is connected to the second drug container 3 and the connecting gas container 4 at the same time.
Referring to the description and fig. 1 and 2, the vacuum coating device 5 includes a vacuum chamber 51, and a guide rail 52, a tray 53, a plasma radio-frequency electrode plate 54 and a liquid medicine pipeline which are arranged in the vacuum chamber 51. Wherein the vacuum chamber body 51 comprises a chamber door, a back wall and side walls. Wherein, the bin door and the back wall are correspondingly arranged and are arranged in front of the vacuum bin body 51. The side wall is used for connecting the back wall and the bin gate. The guide rail 52 is fixedly provided on the side wall, and the tray 53 is engaged with the guide rail 52 to move back and forth along the guide rail 52. The substrates can be placed on a tray 53 and fed along rails 52 into the vacuum chamber 51. Optionally, the material of the guide rail 52 is teflon. Optionally, the vacuum coating apparatus 5 further comprises a clamping assembly for securing the substrate to the tray 53. The plasma radio frequency electrode plate 54 comprises a positive electrode plate 541 and a negative electrode 542, wherein the positive electrode plate 541 is arranged on the back wall, and the negative electrode 542 is arranged on the side wall. The plasma rf electrode plate 54 is located above and/or below the guide rail 52 and the tray 53. The liquid medicine pipeline is welded on the back wall or the side wall and communicated with the connecting pipe 6 for leading the medicine steam and the connecting gas into the vacuum chamber body 51. Specifically, the vacuum coating device further comprises a vacuum pump for evacuating the vacuum chamber body 51.
In order to control the flow of the fluid, the system for preparing the nano water-proof film further comprises a valve 8 disposed on the connection pipe 6, including a valve 81 disposed on the connection pipe 6 connecting the first medicine container 21 and the mixer 7; a valve 82 provided on the connection tube 6 connecting the first medicine container 22 and the mixer 7; a valve 83 provided on the connecting tube 6 connecting the first medicine container 23 and the mixer 7, a valve 84 provided on the connecting tube 6 connecting the mixer 7 and the second medicine container 3; a valve 85 provided on the connection pipe 6 connecting the second medicine container 3 and the vacuum coating device 5; and a valve 86 provided on the connection pipe 6 connecting the gas container 4 and the vacuum coating apparatus 5.
When in use, step 1, the bin gate is opened, the substrate is placed on the tray 53, the substrate is placed in the vacuum bin body 51 along the guide rail 52, the bin gate is closed, and the vacuum bin body 51 is vacuumized. Meanwhile, the second medicine container 3 is preheated to reach the temperature of 100-200 ℃.
And 2, introducing carrier gas into the first medicine container 21 and the first medicine container 22, opening the valve 81 and the valve 82, and enabling the first medicine container 21 to output a first mixed fluid formed by the carrier gas and the medicines and the first medicine container 22 to output a second mixed fluid formed by the carrier gas and the medicines to enter the mixer 7.
And 3, closing the valve 81 and the valve 82, uniformly mixing the first mixed fluid and the second mixed fluid, opening the valve 84, and introducing the mixture of the first mixed fluid and the second mixed fluid into the second medicine container 3.
And 4, closing the valve 84, converting the mixture of the first mixed fluid and the second mixed fluid into first medicine vapor in the second medicine container 3, opening the valve 85, sucking the first medicine vapor into the vacuum cabin body 51, and depositing the first medicine vapor on the surface of the substrate to form a waterproof layer.
Step 5, valve 85 is closed and valve 83 is opened to allow the first drug container 23 to output a third mixed stream of carrier gas and drug into the mixer 7. The valve 83 is closed, after the third mixed fluid is uniformly mixed in the mixer 7, the valve 84 is opened, the third mixed fluid enters the second medicine container 3 to be converted into second medicine vapor, the valve 84 is closed, the valve 85 is opened, the second medicine vapor is sucked into the vacuum chamber body 51, and a hydrophobic layer is formed above the deposited waterproof layer.
And 6, closing the valve 85, opening the valve 86, introducing connecting gas into the vacuum bin body 51, closing the valve 86, repeating the step 5, and overlapping the hydrophobic layers above the hydrophobic layers until the accumulated thickness of the overlapped hydrophobic layers reaches a threshold value, wherein the connecting gas is used for forming a laminated structure.
The embodiment provides a preparation method of a nano waterproof film, and the specific flow refers to fig. 3 of the specification, specifically, the preparation method of the nano waterproof film comprises the following steps:
s1: and introducing carrier gas into the plurality of first medicine containers 2 for pressurization, outputting the carrier gas and the medicines in the first medicine containers 2 from the first medicine containers 2 to form mixed fluid, selecting a plurality of mixed fluids to form first branch fluid, and forming the rest mixed fluids into second branch fluid.
In one embodiment, the number of the first medicine containers 2 in the step S1 is 3, and the 3 first medicine containers 2 store the medicines of perfluoroethylene, silicon nitride and a hydrophobic component selected from one or two of perfluoroethylene and fluorocarbon wax, respectively. Preferably, the mass part ratio of the perfluoroethylene, the silicon nitride and the hydrophobic component in the first medicament container is as follows: 10-20: 5-10: 15 to 30. In other cases, the perfluoroethylene may be replaced with a monofunctional unsaturated fluorocarbon resin and the silicon nitride may be replaced with a polyfunctional unsaturated hydrocarbon derivative.
Alternatively, the carrier gas in step S1 may be argon or nitrogen. Argon gas, preferably argon gas, is introduced into the first medicament container 2 at a flow rate of 30sccm, and nitrogen gas have similar pressurizing effects.
And S2, conveying the first branch fluid to the second medicine container 3 and converting the first branch fluid into first medicine steam, sucking the first medicine steam into the vacuum cabin body 51, and depositing the first medicine steam on the surface of the base body arranged on the vacuum cabin body 51 to form a waterproof layer.
The first medicine vapor contains a plurality of medicine components, and in the film coating process, the plurality of medicine components are crosslinked and superposed on the surface of the substrate to form a film so as to form a waterproof layer. Because a plurality of medicine components participate in the film coating reaction, the film forming the waterproof layer has a plurality of functional groups, and has the combination property and the enhancement property corresponding to the performance of the waterproof layer. The drug components participating in the reaction can be adjusted according to the requirements, so that the aim of adjusting the performance of the waterproof layer is fulfilled.
The thickness of the waterproof layer can be adjusted by the output amount of the drug components in the first drug container 2 in step 1 and the deposition time on the surface of the substrate disposed on the vacuum chamber body 51 in step 2, and preferably, the thickness of the waterproof layer is 200 nm.
Optionally, the following preprocessing is performed before step S2:
and (3) conveying the first branch fluid and/or the second branch fluid to a mixer 7, uniformly mixing and then conveying to the second medicine container 3. The first branch fluid and/or the second branch fluid are mixed by the mixer 7 to become homogeneous fluid, so that the medicine in the homogeneous fluid is prevented from agglomerating, the homogeneous fluid is uniformly heated in the second container 3, and a film is uniformly formed on the surface of the substrate.
Putting the basal body into a tray 53 and pushing the basal body to a vacuum cabin body 51 of a vacuum film coating device 5, and vacuumizing the vacuum cabin body 51. By virtue of the pressure difference existing between the evacuated cartridge body 51 and the second medicament container 3, medicament vapour can be sucked into the evacuated cartridge body 51. In other cases, the medicine vapor may be blown into the vacuum chamber 51 by pressurizing with the carrier gas.
The temperature of the second medicine container 3 is raised to 150-200 ℃. The temperature of the second medicament container 3 may be adjusted according to the evaporation temperature of the medicament.
S3: and conveying the second branch fluid to the second medicine container and converting the second branch fluid into second medicine steam, wherein the second medicine steam is sucked into the vacuum cabin body and deposited on the waterproof layer to form a hydrophobic layer.
Likewise, the second drug vapor may include multiple drug components, thereby obtaining a composite hydrophobic membrane having multiple functions. Preferably, the thickness of the hydrophobic layer is 10-30 nm.
S4: and (3) introducing connecting gas into the vacuum cabin body, and repeating the step (3) until the accumulated thickness of the hydrophobic layers reaches a threshold value.
Wherein the connecting gas is used to form the plurality of hydrophobic layers into a stacked structure.
Optionally, in the step S4, the connecting gas is helium, and a flow rate of the helium introduced into the vacuum chamber body 51 is 15-20 sccm. Preferably, the threshold value is 300-500 nm.
The embodiment also provides a nano waterproof film. The nano waterproof film is prepared by adopting any one of the preparation methods of the nano waterproof film.
Further, the nanometer waterproof film comprises a waterproof layer and a hydrophobic layer. Wherein, the waterproof layer is deposited on the surface of the substrate and is formed by crosslinking perfluoroethylene and silicon nitride; a hydrophobic layer is deposited over the water repellent layer.
Further, the nanometer waterproof film comprises the following components in parts by weight:
10-20 parts of perfluoroethylene;
5-10 parts of silicon nitride;
15-30 parts of a hydrophobic component.
In the embodiment, a multi-component multi-layer process is used, so that a plurality of medicine components are naturally crosslinked to form a waterproof layer, and the hydrophobic layer is repeatedly superposed on the waterproof layer to form the nano waterproof film, so that the preparation of the nano waterproof film consisting of multiple layers and with the thickness of each layer being less than 10 nanometers on the substrate is realized, the nano waterproof film can prevent water and has a better hydrophobic effect, and the corrosion speed of the substrate can be reduced; the nano waterproof film is compounded by a plurality of medicine components to achieve the required performances of water resistance, hydrophobicity, salt mist resistance, acid and alkali sweat resistance and the like, so that the process for preparing the nano waterproof film is simplified and practical.
The above description is intended to be illustrative of the preferred embodiment of the present invention and should not be taken as limiting the invention, but rather, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.
Claims (10)
1. The preparation method of the nanometer waterproof film is characterized by comprising the following steps of:
s1: introducing carrier gas into a plurality of first medicine containers, wherein the carrier gas and the medicines in the first medicine containers are output from the first medicine containers to form mixed fluid, a part of the mixed fluid is selected to form first branch fluid, and the rest part of the mixed fluid forms second branch fluid;
s2, conveying the first branch fluid to a second medicine container and converting the first branch fluid into first medicine steam, sucking the first medicine steam into a vacuum cabin body, and depositing the first medicine steam on the surface of a base body arranged on the vacuum cabin body to form a waterproof layer;
s3: delivering the second branch fluid to the second medicine container and converting the second branch fluid into second medicine steam, wherein the second medicine steam is sucked into the vacuum cabin body and deposited on the waterproof layer to form a hydrophobic layer;
s4: and (5) introducing connecting gas into the vacuum cabin body, and repeating the step S3 until the accumulated thickness of the hydrophobic layers reaches a threshold value.
2. The method for preparing a nano waterproof film according to claim 1, wherein the number of the first drug containers in step S1 is 3, and the 3 drugs stored in the first drug containers are perfluoroethylene, silicon nitride and a hydrophobic component, respectively, and the hydrophobic component is one or two selected from perfluoroethylene and fluorocarbon wax.
3. The preparation method of the nano waterproof film as claimed in claim 2, wherein the first medicament container comprises the following components in parts by mass: 10-20: 5-10: 15 to 30.
4. The method for preparing a nano waterproof film according to claim 1, further comprising a pretreatment step before step S2:
conveying the first branch fluid and/or the second branch fluid to a mixer, and conveying the mixture to the second medicine container after uniform mixing; and/or
Putting the substrate into a tray, pushing the substrate to the vacuum chamber body of the vacuum coating device, and vacuumizing the vacuum chamber body; and/or
And raising the temperature of the second medicine container to 150-200 ℃.
5. The method for preparing a waterproof nano-film as claimed in claim 1, wherein the carrier gas in step S1 is argon gas, and the flow rate of the argon gas introduced into the first drug container is 30 sccm.
6. The method for preparing a waterproof nano-film as claimed in claim 1, wherein the connecting gas in step S4 is helium, and the flow rate of the helium introduced into the vacuum chamber body is 15-20 sccm.
7. A nano waterproof film, characterized by being prepared by the method for preparing a nano waterproof film according to any one of claims 1 to 6.
8. The waterproofing nanomembrane of claim 7, comprising:
the waterproof layer is deposited on the surface of the substrate and is formed by crosslinking perfluoroethylene and silicon nitride;
a hydrophobic layer deposited over the water repellent layer.
9. The waterproofing nanomembrane of claim 8, wherein said hydrophobic layer comprises a fluorocarbon wax.
10. A preparation system of a nanometer waterproof film is characterized by comprising the following components:
a carrier gas container for outputting a carrier gas;
a first drug container for storing a drug, receiving a carrier gas, and outputting a mixed fluid;
a second medicament container; the second medicine container is used for receiving a plurality of mixed fluids and converting the mixed fluids into medicine steam, and outputting the medicine steam;
a connecting gas container for outputting a connecting gas;
and the vacuum coating device is used for receiving the medicine vapor and the connecting gas and coating the surface of the substrate.
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