CN114534917A - Gas purification device, system and method - Google Patents
Gas purification device, system and method Download PDFInfo
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- CN114534917A CN114534917A CN202111399221.7A CN202111399221A CN114534917A CN 114534917 A CN114534917 A CN 114534917A CN 202111399221 A CN202111399221 A CN 202111399221A CN 114534917 A CN114534917 A CN 114534917A
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
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Abstract
According to the gas purification device, the system and the method, the gas purification device comprises at least one electric field part and at least one filtering unit which are sequentially arranged along the gas flow direction, wherein the filtering unit is provided with a filtering medium containing an electret material; the filter medium can be electret by the electric field portion.
Description
Technical Field
The invention relates to a gas purification device, system and method
Background
Currently, there are some environments that require high cleanliness, for example, a clean room is a common manufacturing shop environment in a semiconductor manufacturing process, in order to avoid the pollution of particles, humidity, temperature, etc. to semiconductor materials, which further affects the yield and reliability of semiconductors. Generally, the air flow entering the clean room needs to be purified, and mainly comprises three-stage purification, namely primary purification, intermediate purification and high-efficiency purification. According to different purifying effects, different air filters are respectively used.
The primary purification usually uses a primary air filter, which mainly comprises non-woven fabric, nylon net, active carbon filter cotton, metal mesh net, etc., and is mainly used for filtering suspended particles with the particle size of more than 5 μm.
The medium-efficiency purification usually uses a medium-efficiency air filter which mainly consists of special non-woven fabrics, glass fibers and the like and is mainly used for filtering suspended particles with the particle size of 1-5 mu m.
High-efficiency air filters are generally used for high-efficiency purification, which are mainly composed of ultra-fine glass fiber paper and are mainly used for filtering suspended particles with a particle size of more than 0.5 μm, and even high-efficiency filters made of borosilicate microfibers such as HEPA filters can filter suspended particles with a particle size of more than 0.3 μm; the filter material of the ultra-high efficiency air filter U15 is ultra-fine glass fiber paper which can collect suspended particles with the particle size of more than 0.12 mu m.
The air purification process of the air intake of the clean room is usually completed outside the clean room, and the three-stage filtering device and the clean room are independently arranged, so that the occupied space is large and the construction cost is high. And the filter core materials of all stages of filters are polluted after being used for a period of time, the service life is short, and the filter core materials need to be replaced periodically, so that the cost of the filter equipment is increased. Meanwhile, the filter element has large filtering resistance, so that the power consumption of the air supply equipment is increased.
Disclosure of Invention
The invention aims to provide a gas purification device, a gas purification system and application, which are used for solving the problems of air purification efficiency and air resistance in the prior art.
In a first aspect of the present invention, there is provided a gas purifying apparatus for filtering and purifying gas, comprising:
at least one electric field device and at least one filter unit which are arranged in sequence along the gas flow direction,
wherein the filter unit has a filter medium formed of an electret material;
the filter medium can be electret by the electric field portion.
In one embodiment, the electric field portion has a gas flow passage through which the gas passes, the gas flow passage has a gas inlet through which the gas enters and a gas outlet through which the gas exits, and the electric field portion forms an electric field for filtering the gas in the gas flow passage.
In one embodiment, the position of the filter unit relative to the electric field portion is defined as follows: the minimum of the perpendicular distances from all of the gas outlets to the surface of the filter media receiving gas discharged from the gas outlets allows the filter media to be subjected to the electret.
In an embodiment, the minimum value is 200mm or less.
In one embodiment, the filtering unit can filter more than 99% of particles larger than or equal to 500nm in the gas.
In one embodiment, the electric field part is a first electric field part, the first electric field part includes a first discharge electrode and a first adsorption electrode, the first discharge electrode and the first adsorption electrode form the electric field, the first adsorption electrode is a honeycomb structure composed of a plurality of hollow tube bundles, the first discharge electrode is at least partially arranged in the hollow tube bundles of the first adsorption electrode, and the gas flow passage is formed between the first discharge electrode and the first adsorption electrode.
In one embodiment, the electric field portion is a second electric field portion, the second electric field portion includes a second discharge electrode and a second adsorption electrode that form the electric field, the second adsorption electrode includes at least one electric field unit, the electric field unit has a lateral wall that extends along the axial direction, the lateral wall surrounds and forms the passageway, the lateral wall is equipped with the second air inlet that supplies the gas to get into the passageway and supplies the gas to discharge the second gas outlet of passageway.
In an embodiment, the second electric field portion includes a plurality of electric field adsorption units, two adjacent electric field adsorption units share a side wall, and the plurality of electric field adsorption units are connected to form an integral structure.
In one embodiment, the electric field part has an electric field unit having an electric field intensity of less than 0.5 kv/mm.
In an embodiment, the electric field portion includes a first electric field portion and a second electric field portion, the first electric field portion and the second electric field portion are sequentially disposed along a gas flow direction, the first electric field portion is the first electric field portion, and the second electric field portion is the second electric field portion.
In an embodiment, the electric field device includes a second electric field portion and a first electric field portion, the second electric field portion and the first electric field portion are sequentially disposed along a gas flow direction, the first electric field portion is the first electric field portion, and the second electric field device is the second electric field portion.
In a second aspect of the present invention, there is provided a use of a gas purification apparatus for purifying a gas entering a semiconductor clean room, the gas purification apparatus being as described above.
In a third aspect of the present invention, there is provided a semiconductor clean room gas purification system comprising: a gas purification apparatus, wherein the gas purification apparatus is the gas purification apparatus described above.
In a third aspect of the present invention, there is provided a gas purification method comprising:
forming an electric field in a gas flow passage of the electric field portion;
allowing the gas to enter the gas flow channel for filtering to obtain purified gas;
the purified gas enters a filtering unit to be filtered to obtain treated gas,
wherein the filtering unit performs the filtering by a filtering medium formed of an electret material,
the electret material can be electret by the electric field section.
In one embodiment, the position of the filter unit relative to the electric field portion is defined as follows: the minimum of the perpendicular distances from all of the gas outlets to the surface of the filter medium receiving gas discharged from the gas outlets allows the filter medium to be electret.
In an embodiment, the minimum value is 200mm or less.
In one embodiment, the filtering unit can filter more than 99% of particles larger than or equal to 500nm in the gas.
According to an aspect of the present invention, there is provided a gas purifying apparatus for filtering and purifying gas, comprising: the gas filtering device comprises at least one electric field part, a first filtering unit and a second filtering unit which are sequentially arranged along the gas flow direction, wherein the first filtering unit and the second filtering unit are respectively provided with a first filtering medium and a second filtering medium which are formed by electret materials; the first filter medium and the second filter medium can be electret by the electric field unit, and the filter pore size of the second filter medium is larger than that of the first filter medium.
In one embodiment, the first filter medium has a filtration rating of any one of coarse filtration, medium filtration, or high-medium filtration.
In one embodiment, the second filter media is PP cotton.
According to an aspect of the present invention, there is provided a gas purification system comprising: at least two gas purification devices arranged in sequence along the gas flow direction, wherein the gas purification devices are the gas purification devices.
According to one aspect of the invention, there is provided a use of a gas purification system for purifying a gas entering a semiconductor clean room, the gas purification system being as described above.
According to an aspect of the present invention, there is provided a gas purification method characterized by:
at least one electric field part and at least one filtering unit are sequentially arranged along the gas flow direction; forming an electric field in a gas flow passage of the electric field portion; allowing the gas to enter the gas flow channel for filtering to obtain purified gas; and enabling the purified gas to enter a filtering unit for filtering to obtain treated gas, wherein the filtering unit is used for filtering through a filtering medium formed by an electret material, and the electret material can be electret by the electric field part.
Drawings
Fig. 1 is an exploded schematic view of a gas purification apparatus according to a first embodiment of the present invention;
FIG. 2 is a perspective view of a first electric field portion according to a first embodiment of the present invention;
fig. 3 is a perspective view of a second electric field portion according to a first embodiment of the present invention;
FIG. 4 is a schematic front view of a second field portion including a sealing plate;
FIG. 5 is a schematic view of a gas purification apparatus according to a second embodiment of the present invention;
FIG. 6 is a schematic view showing the vertical distance from the gas outlet to the surface of the filter medium in the second embodiment;
fig. 7 is an exploded schematic view of a gas cleaning apparatus according to the fourth embodiment.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the objects, features and advantages of the invention can be more clearly understood. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but are merely intended to illustrate the spirit of the technical solution of the present invention.
In the following description, for the purposes of illustrating various disclosed embodiments, certain specific details are set forth in order to provide a thorough understanding of the various disclosed embodiments. One skilled in the relevant art will recognize, however, that the embodiments may be practiced without one or more of the specific details. In other instances, well-known devices, structures and techniques associated with this application may not be shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.
Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
In the following description, for the purposes of clearly illustrating the structure and operation of the present invention, directional terms will be used, but terms such as "front", "rear", "left", "right", "outer", "inner", "outer", "inward", "upper", "lower", etc. should be construed as words of convenience and should not be construed as limiting terms.
According to one aspect of the present invention, there is provided a gas purification system having at least one electric field device and at least one filter unit arranged in series in the direction of flow of a gas stream, both the electric field device and the filter unit being arranged in the gas flow path, and the filter unit being located in an electric field generated by the electric field device.
The electric field means comprise at least one first electric field means and/or second electric field means.
Example one
Fig. 1 is a perspective view of a gas purification system according to an embodiment of the present invention, and a gas purification apparatus 100 includes a housing 50, and an electric field portion, a filter unit 20, and an ozone removing unit 10, which are sequentially disposed in the housing 50 along an air flow direction C, in this embodiment, the electric field portion includes a first electric field portion 40 and a second electric field portion 30, and a gas flow passage is formed in the housing 50 from top to bottom.
In the embodiment, the first electric field part 40, the second electric field part 30, the first filter unit 20, and the ozone removing unit 10 are detachably provided in the housing 50.
First electric field portion 40 includes the frame and sets up the electric field portion in the frame, and electric field portion includes dust removal electric field negative pole 42 (first discharge electrode) and dust removal electric field positive pole (first adsorption pole) 41, the dust removal electric field negative pole with dust removal electric field positive pole is used for producing the ionization dust removal electric field, dust removal electric field positive pole is the honeycomb structure that is constituteed by a plurality of hollow tube bundles, dust removal electric field negative pole wear penetrate in the dust removal electric field positive pole. And a dedusting electric field flow channel is formed between the dedusting electric field anode and the dedusting electric field cathode.
As shown in fig. 2, the interior of the dedusting electric field anode 41 is composed of a honeycomb-shaped and hollow anode tube bundle, the hollow cross section of the dedusting electric field anode tube bundle adopts a circular shape or a polygonal shape, and the polygonal shape is a hexagon or a trilateral shape. In the examples, the cross-sectional shape of the anode tube bundle was hexagonal. The dedusting electric field cathode 42 includes a plurality of electrode bars, which are inserted through each anode tube bundle in the anode tube bundle group in a one-to-one correspondence manner, wherein the electrode bars are in a needle shape, a polygonal shape, a burr shape, a threaded rod shape or a columnar shape.
In one embodiment, the ratio of the dust deposition area of the dust removal electric field anode to the discharge area of the dust removal electric field cathode is 1.667: 1-1680: 1.
in the embodiment, the dedusting electric field cathode 42 is installed on the supporting plate 43, and the supporting plate 43 is connected with the dedusting electric field anode 41 through an insulating mechanism. The insulating mechanism is used for realizing the insulation between the support plate 43 and the dedusting electric field anode 41. In an embodiment of the present invention, the dedusting electric field anode 41 includes a first anode portion 412 and a second anode portion 411, that is, the first anode portion 412 is close to the inlet of the dedusting electric field device, and the second anode portion 411 is close to the outlet of the dedusting electric field device. The supporting plate and the insulating mechanism are arranged between the first anode part 412 and the second anode part 411, that is, the insulating mechanism is arranged between the dust removing electric field cathodes 42 or between the dust removing electric field cathodes 42, so that the supporting plate and the insulating mechanism can well support the dust removing electric field cathodes 42 and fix the dust removing electric field cathodes 42 relative to the dust removing electric field anodes 41, and a set distance is kept between the dust removing electric field cathodes 42 and the dust removing electric field anodes 41.
As shown in fig. 2, the second anode portion 411 includes a plurality of anode tube bundles 411a, the anode tube bundles 411a and the dust-removing field cathode 42 are electrically connected to two electrodes of a power supply, respectively, the power supply is a dc power supply, in this embodiment, the anode tube bundles 411a have a positive potential, and the dust-removing field cathode 42 has a negative potential.
The dc power supply may specifically be a dc high voltage power supply. An electric discharge dust removing electric field, which is a static dust removing electric field, is formed between the anode tube bundle 411a and the dust removing electric field cathode 42. In this example, the voltage between the anode and the cathode was 6 kv.
In this embodiment, the anode tube bundle 411a is in the shape of a hollow regular hexagon tube, the cathode 42 of the dust removing electric field is in the shape of a rod, and the cathode 42 of the dust removing electric field is inserted into the anode tube bundle 411 a.
In this embodiment, the first electric-field portion 40 has an outer dimension of 204 × 570 × 1170 mm.
In one embodiment, the dedusting electric field anode 41 may have only one anode portion.
The second electric field portion 30 includes a frame and a second discharge electrode and a second adsorption electrode provided in the frame.
Referring to fig. 3, the second adsorption pole includes eight electric field adsorption units, which are a first electric field adsorption unit 810, a second electric field adsorption unit 820, a third electric field adsorption unit 830, a fourth electric field adsorption unit 840, a fifth electric field adsorption unit 850, a sixth electric field adsorption unit 860, a seventh electric field adsorption unit 870, and an eighth electric field adsorption unit 880, the eight electric field adsorption units are adjacently arranged in the left-right direction, the adjacent electric field adsorption units share a sidewall, a cross-section of a channel of each electric field adsorption unit, which is surrounded by the sidewall and is perpendicular to the axial direction, is a regular triangle, in other embodiments, the number of the electric field adsorption units is not limited to this, and the number of the electric field adsorption units can be adjusted according to the actual air volume of the gas to be purified, moreover, the arrangement mode of the electric field adsorption units can be that the electric field adsorption units are adjacently arranged and/or not adjacently arranged in any direction of up, down, left, right, front and back. In this embodiment, the eight electric field adsorption units have the same structure and shape for the convenience of production and processing, however, in other embodiments, the structures, and sizes of the electric field adsorption units may be different or partially the same according to the storage condition of the device space or other factors.
In other embodiments, a cross section perpendicular to the axial direction, which is surrounded by the side walls, of the channel of the electric field adsorption unit is a polygon, and the polygon may be any one of a quadrangle, a pentagon, or a hexagon.
The shape of the air inlet hole and/or the air outlet hole is circular, oval or polygonal, preferably, the polygonal comprises any one or more of a triangle, a quadrangle, a pentagon and a hexagon.
Referring to fig. 3, the second discharge electrode 809 includes a discharge electrode 819, a discharge electrode 829, a discharge electrode 839, a discharge electrode 849, a discharge electrode 859, a discharge electrode 869, a discharge electrode 879, and a discharge electrode 889, each discharge electrode is disposed in the channel of the corresponding electric field unit, and since the cross section of the channel of each electric field unit, which is surrounded by the side wall and is perpendicular to the axial direction, is a regular triangle, the second discharge electrode 809 is preferably disposed parallel to the side wall of the channel and passes through the center of the inscribed circle of the cross section of the corresponding electric field unit, where the discharge efficiency is highest. For example, the discharge electrodes 819 are disposed in the channel of the first electric field unit 810, and are preferably disposed parallel to the sidewalls of the channel and pass through the center of a circle inscribed in the cross-section of the first electric field unit 810, and so on for the other discharge electrodes in relation to the electric field unit.
Referring to fig. 3, the configuration of the first electric field adsorption unit 810 and the second electric field adsorption unit 820 will be described as an example, and the configuration of the other electric field adsorption units will be analogized. The first electric field adsorption unit 810 comprises a side wall 812 extending along the axial direction, the side wall 812 comprises a first side wall 8121, a second side wall 8122 and a third side wall 8123, the first side wall 8121, the second side wall 8122 and the third side wall 8123 surround to form a first channel 811, a first air inlet hole 813 (an air inlet) for air to enter the channel 811 and a first air outlet hole 814 (an air outlet) for air to be discharged from the first channel 811 are arranged on the side wall 812, the first air inlet hole 813 and the first air outlet hole 814 are multiple in number, the multiple first air inlet holes 813 are uniformly arranged in two rows along the axial direction on the first side wall 8121, the multiple first air outlet holes 814 are uniformly arranged in two rows along the axial direction on the second side wall 8122, no air inlet holes or air outlet holes are distributed on the third side wall 8123, and the hole centers of the first air inlet holes 813 and the hole centers of the first air outlet holes 814 are arranged on different planes perpendicular to the axial direction. The first electric field unit 810 and the second electric field unit 810 share the second side wall 8122, two surfaces of the second side wall 8122 respectively face the first channel 811 of the first electric field unit 810 and the second channel 821 of the second electric field unit 820, that is, the first air outlet 814 on the second side wall 8122 of the first electric field unit 810 is used as a second air inlet of the second side wall 8122 of the second electric field unit 820, so as to ensure that the gas directly enters the second electric field unit 820 from the first electric field unit 810, a plurality of second air outlets 824 uniformly arranged in two rows along the axial direction are formed in the fourth side wall 8222 of the second electric field unit 820, and air inlets and/or air outlets are not formed in the fifth side wall 8223 of the second electric field unit 820.
The shape of the air inlet hole and/or the air outlet hole is circular, oval or polygonal, preferably, the polygonal comprises any one or more of a triangle, a quadrangle, a pentagon and a hexagon.
In an embodiment, the air inlet holes and/or the air outlet holes are circular, and the side wall is made of a material containing stainless steel and/or aluminum.
Referring to fig. 3, in the embodiment, all the electric field adsorption units are electrically connected to the same pole of the power supply, and all the discharge electrodes are electrically connected to the other pole of the power supply, for example, taking the first electric field adsorption unit 810 and the second electric field adsorption unit 820 as an example, the first electric field adsorption unit 810 is electrically connected to the anode of the power supply, and the discharge electrode 819 is electrically connected to the cathode of the power supply; the second absorption electric field unit 820 is electrically connected to the anode of the power supply, and the discharge electrode 829 is electrically connected to the cathode of the power supply. The first electric field adsorption unit 810 and the discharge electrode 819 form a first electric field, and the second electric field adsorption unit 820 and the discharge electrode 829 form a second electric field. However, in other embodiments, the plurality of electric field absorption units are divided into two groups, two groups of electric field absorption units are combined together in more than two rows, each row of electric field absorption units is in the same group, the first group of electric field absorption units is electrically connected with the anode of the power supply, and the corresponding first group of discharge electrodes is electrically connected with the cathode of the power supply; the second group of electric field adsorption units are electrically connected with the cathode of the power supply, and the corresponding second group of discharge electrodes are electrically connected with the anode of the power supply. When the airflow passes through the electric field formed by the first group of electric field adsorption units and the first group of discharge electrodes and the electric field formed by the second group of electric field adsorption units and the second group of discharge electrodes, particles in the gas are respectively provided with negative charges and positive charges, the particles with the negative charges in the gas are deposited on the first group of electric field units, and the particles easy to be provided with the positive charges in the gas are deposited on the second group of electric field units, so that the dust removal efficiency is improved.
It should be noted that the gas does not flow along the axial direction of the channel, and it is understood that the gas does not flow from one end of the channel to the other end of the channel along the axial direction of the channel; the gas enters the channel through the gas inlet hole and then is discharged out of the channel through the gas outlet hole.
It should be noted that, the electric field adsorption unit can be used as an adsorption pole of an electric field device, a discharge pole of the electric field device discharges and ionizes, after particulate matters in gas are combined with charged ions, the particulate matters in the gas are charged, the charged particulate matters move to the adsorption pole and are deposited on the adsorption pole, when the gas enters in a direction which is not parallel to a side wall of the electric field unit, namely the gas entering direction is not perpendicular to the ion flow direction in the electric field, compared with an electric field in which the gas entering direction is perpendicular to the ion flow direction, the electric field adsorption unit increases the staying time of the gas in the electric field, can improve the charging efficiency of the particulate matters, and deposits more particulate matters on the adsorption pole, thereby improving the dust removal efficiency.
It should also be noted that when the centers of the inlet holes and the outlet holes are arranged on different planes perpendicular to the axial direction, the flow direction of the gas in the channel can be disordered, the retention time of the gas in an electric field is further increased, the frequency of contact with a discharge electrode at a short distance is increased, and the charging efficiency and the charging quantity of particles are improved; and when the gas forms a cyclone flow direction, the separation of large particles is facilitated, and the dust removal efficiency can be effectively improved by integrating the two points. In addition, it should be noted that the central line of at least one of the side walls extending along the channel direction is not provided with an air inlet or an air outlet, so that the area of the central line is not damaged, and after the particulate matters are charged, the particulate matters are directly adsorbed to the position near the central line of the adsorption electrode, thereby increasing the adsorption capacity of the particulate matters on the adsorption electrode and further improving the dust removal efficiency. The particulate matter includes, but is not limited to, solid particles, liquid droplets, solid particles with liquid attached thereto, aerosol, plasma solid particles or liquid droplets, and the like, and may also be microorganisms such as bacteria, fungi, and the like.
Referring to fig. 3, the gas flow direction of the first electric field adsorption unit 810 and the second electric field adsorption unit 820 is taken as an example, and the gas flow direction of the other electric field adsorption units is repeated. The gas enters the first electric field through the first gas inlet hole 813, then enters the second electric field through the first gas outlet hole 814, and finally is discharged through the second gas outlet hole 824. Because the centers of the first air inlet holes 813 and the first air outlet holes 814 are arranged on different planes perpendicular to the axial direction and the centers of the second air inlet holes (in this embodiment, the second air inlet holes are the first air outlet holes 814) and the second air outlet holes 824 are arranged on different planes perpendicular to the axial direction, the flow direction of the gas passing through the first electric field and the second electric field is disordered, the residence time of the gas in the two electric fields is further increased, the frequency of contact with the discharge electrodes 819 and 829 in a short distance is increased, and the gas ionization efficiency is higher at a position closer to the discharge electrode 809, so that the particulate matter electrification efficiency and the electrification amount are improved; and when the gas forms a cyclone flow direction, the separation of large particles is facilitated, and the two points are integrated, so that the dust removal efficiency is effectively improved. In other embodiments, the fifth sidewall 8223 of the second electric field adsorption unit 820 is provided with an air inlet, so that the air flows of the second electric field adsorption unit 820 and the third electric field adsorption unit 830 are communicated, and the air can flow from the third electric field adsorption unit 830 to the second electric field adsorption unit 820. However, in other embodiments, the side wall of each electric field unit can be provided with an air inlet hole or an air outlet hole, so that the gas of each electric field unit can be sourced from a plurality of adjacent electric field units and can also flow to the plurality of adjacent electric field units, the gas flow direction is highly disordered, the gas flow passing through the vicinity of the discharge electrode is increased, the charging efficiency and the charging quantity of particles in the gas are increased, and the dust removal efficiency is improved.
In this embodiment, discharge electrode 819 in second discharge electrode 809 is described as an example, discharge electrode 819 is an elongated needle-like conductor, and in other embodiments, discharge electrode 819 may be a polygonal, burr-like, screw-rod-like, or columnar conductor. In this embodiment, the diameter of discharge electrode 819 is 0.1-10mm, and preferably, the diameter of discharge electrode 819 is 0.2-5 mm.
In one embodiment, discharge electrodes 819 are in the form of elongated strips and are fabricated from any one of 304 stainless steel, titanium, tungsten, and iridium.
Fig. 4 is a schematic front view of the second electric field device, the frame includes a first sealing plate 81 and a second sealing plate 82, the second electric field device 30 includes a first sealing plate 81, a second sealing plate 82 and an electric field adsorption device 800, the first sealing plate 81 and the second sealing plate 82 are respectively connected to two ends of the electric field adsorption device 800, that is, to two ends of each electric field unit in the electric field adsorption device 800, and are sealed to ensure that gas only enters and exits from an air inlet or an air outlet of each electric field unit.
In this embodiment, for example, the discharge electrode 819 is made of iridium, and the outer dimension of the second electric field device 30 is 88.5 × 570 × 1170 mm.
In the embodiment, the dust removing electric field flow channel (gas flow channel) in the first electric field device 40 is perpendicular to the channel formed by the surrounding of the side wall in the electric field unit of the second electric field device 30.
The filter unit 20 is an ultra-high efficiency air filter capable of filtering particles of 500nm or more, preferably 300nm or more, in a gas by 99%, for example, a high efficiency air particle filter (HEPA) or an ultra-low efficiency air filter (ULPA).
The filter unit 20 has an electret material.
In this embodiment, the filter unit 20 is a U15 filter with a physical size of 96 × 570 × 1170 mm.
In one embodiment the distance between the first electric field device 40 and the second electric field device 30 is 3-15mm and the distance between the second electric field device 30 and the filter unit 20 is 2-25 mm.
During operation, the electric field device continuously electrifies the filter unit 20, so that the filter unit always maintains a high adsorption performance.
On the one hand, because the filter unit can keep higher electret state for a long time, even increase filter aperture does not influence adsorption effect yet, on the other hand, increase filter aperture makes the ventilation resistance reduce, under the same wind speed condition, the energy consumption of fan can greatly reduced.
Example 2
As shown in fig. 5, the gas purifying apparatus 200 provided in the present embodiment is used for purifying gas, and includes: at least one electric field part 210 and at least one filter unit 220 sequentially arranged in a gas flow direction.
The electric field part 210 has a gas flow passage 211 through which the gas passes, the gas flow passage having a gas inlet through which the gas enters and a gas outlet through which the gas exits. The gas inlet can be one or more holes, and the gas outlet can also be one or more, as shown in fig. 5, the electric field gas inlet is provided with a plurality of gas inlets, and the electric field gas outlet is also provided with a plurality of gas outlets.
The electric field unit 210 forms an electric field in the gas flow path 211, and purifies the gas passing through the gas flow path 211 by the electric field, and the electric field purified gas is well known in the art: through letting the one pole that forms the electric field, carry out the ionization to the gas that passes through, and make the particulate matter in the gas electrified to can let this kind of electrified particulate matter be adsorbed by another pole. For example, if one electrode is connected with negative electricity and the other electrode is connected with positive electricity, the negatively-connected electrode ionizes the gas to make the particles in the gas negatively charged, so that the particles can be adsorbed and removed by the positively-charged electrode.
The filtering unit 220 filters the gas filtered by the electric field part 210 through a filtering medium formed of an electret material, specifically, the gas exhausted from the electric field gas outlet, and the filtering medium can be electret by the electric field part 210, that is: the filter unit 220 is disposed at a position that allows the filter medium to be charged by the electric field device 210, or the filter medium to obtain charged ions generated by the electric field device 210 ionizing the gas, thereby being electret. In this embodiment, the filter media may be a mesh, a layer, a filter element, or the like.
In the prior art, if only the filtering unit 220 is used for purification, the purifying mode of the filtering unit 220 is as follows: the filtration is realized through aperture blocking, route staggering and rapid gas velocity impact. If the gas purification system in the embodiment is adopted in an environment with high requirements on gas purification and filtration, such as a semiconductor, in which the removal effect on particles with a size of more than 10nm is difficult to improve, the electric field part can provide an electret for the filtration unit, so that the filtration unit can increase the purification effect in addition to the purification mode, and the electret is matched with the upper electric field part, compared with the prior art, the gas purification system can better remove the particles with a size of more than 10nm, and is more suitable for the environment with high requirements;
in a scene with low requirement on the wind speed, the higher the wind speed of the filtering unit is, the higher the gas speed is, so that the filtering effect is better, and the higher energy consumption operation must be kept.
It can be seen that, because the existence of electric field portion 210, and this electric field portion 210 can carry out the electret to the filter media, so in operation, electric field portion 210 can continuously carry out the electret to the filter media, thereby make the filter media compare the situation that can not be lasted the electret, can continuously exert more effective filter effect, thus, compare prior art, reduce the use energy consumption, reduce use cost, and once purify through electric field portion 210 first, can prolong the life of filter media, reduce the change number of times, thereby reduce use cost, also reduce the secondary pollution to the environment after the change simultaneously.
In order to realize the electret, the position of the filter unit 220 relative to the electric field portion 210 may be defined as follows: the minimum of the perpendicular distances from all of the electric field gas outlets to the surface of the filter medium receiving the gas discharged from the electric field gas outlets allows the filter medium to be subjected to the electret.
Specifically, as shown in fig. 6, the arrows indicate the gas flow direction, after the gas exits from the gas outlet 13, the filter medium receives the gas from the surface a for filtering, and then the gas exits from the surface B, and the minimum L in the vertical distance from all the gas outlets 13 to the surface a enables the filter medium to be electret, that is, enables the filter medium to obtain the charged ions for being electret. In some embodiments, the gas outlets 13 are not in a plane, and the vertical distance from all the gas outlets to the surface a is long or short, and the shortest vertical distance is the minimum value mentioned above.
The specific value of the minimum value may be set according to the above rule after integrating the compact size, the power consumption, the usage mode, and the like in practice, and in the present embodiment, the minimum value is 200mm or less.
In the present embodiment, the specific structure of the electric field device is the same as that of each electric field section in embodiment 1.
In this embodiment, the filtering unit 220 can filter particles of 500nm or more, preferably 300nm or more, in the gas by 99%, for example, a High Efficiency Particulate Air (HEPA) filter or an ultra-high efficiency air (ULPA) filter. By combining such a filtering unit 220 with the electric field part 210, the efficiency of filtering particles of 10nm can exceed 99%.
Therefore, the gas purification device 200 of the present embodiment is used in a semiconductor clean room, and can reduce energy consumption, prolong the service life of the filtering unit 220, reduce the use cost, reduce the secondary pollution to the environment after the filtering unit 220 is replaced, and filter 10nm particles with efficiency exceeding 99%.
The embodiment also provides an air purification system for the semiconductor clean room, which comprises the air purification device 200, so that the investment of primary and intermediate filtration in the purification of the existing semiconductor clean room can be reduced, the purification requirement can be met, and the occupied area and the investment cost are further reduced.
The embodiment also provides a gas purification method, which is characterized by comprising the following steps:
at least one electric field part and at least one filtering unit are sequentially arranged along the gas flow direction;
forming an electric field in a gas flow channel of an electric field device;
allowing the gas to enter the gas flow channel for electrostatic filtration to obtain primary filtered gas;
the primary filtered gas enters a filtering unit for electret filtering to obtain treated gas,
wherein the filtration unit performs the electret filtration through an electret material,
the electret material can be electret by the electric field section.
In embodiments 1 and 2, the gas purification apparatus includes an electric field section in combination of: be first electric field portion and second electric field portion along the air current direction in proper order, in the reality:
the electric field part can be a first electric field part or a plurality of first electric field parts which are arranged in the direction of the airflow;
the electric field part can also be a second electric field part or a plurality of second electric field parts which are arranged in the airflow direction;
the electric field part may also be a second electric field part and a first electric field part which are sequentially arranged along the airflow direction.
Comparative example 1
The experimental conditions are as follows: the gas purification system comprises a filter unit, wherein the filter unit adopts a high-efficiency filter (model: U15), and the thickness of a single-layer filter element is as follows: 96 mm. The voltage of the ventilation fan is 220V, and the current is 1.006A.
Test examples
The experimental conditions are as follows: the gas filtration experiment was carried out according to the above described different electric field combinations + filtration units, the filtration unit 20 being a high efficiency filter (model: U15), single layer cartridge thickness: 96 mm. The ventilation fan power is 150W.
The comparative example and the test example adopt detection: the average number of particles of 10-100nm before and after gas treatment was measured using a U.S. TSI dust detector. The filtering effect is judged by the numerical value.
As a result, the following were found:
(1) the filter effect of the test example is better than that of a comparative example under the same wind speed, so that the various combined electric fields and the filter units are sequentially arranged along the direction of the processing gas, and the comparative example is more suitable than that of the comparative example in the environment with high cleanliness required by the production of semiconductors and the like;
(2) when the test example adopts low wind speed, compared with the high wind speed of the comparative example, the same filtering effect can be achieved, but the finishing use power consumption of the test example is larger than the comparative example, so that under the scene with low requirement on the speed of the processing gas, the combined electric fields and the filtering units can be adopted to be sequentially arranged along the direction of the processing gas, the same effect as the comparative example can be achieved at lower wind speed, the use cost after use is low, the replacement frequency of the filtering units is reduced, and the use cost is further reduced.
In one embodiment, the gas purification system includes a housing 50, and a second electric field section 30, a first electric field section 40, and a filter unit 20 sequentially disposed in the housing 50 in a flow direction along an air flow direction C.
In one embodiment, the gas purification system includes a housing 50, and a first electric field portion 40, a filter unit 20, sequentially disposed in the housing 50 in an airflow direction along an airflow direction C, depending on spatial conditions or other factors.
The gas purification device of the embodiment adopts the electric field part and the filter unit to be matched for use, so that the use energy consumption can be reduced, the pretreatment of the electric field part on the gas reduces the large particles in the gas flowing through the filter unit, the service life of the filter unit is prolonged, and the use cost is reduced.
In another aspect of the present invention, there is provided an air purifying method including the steps of:
at least one electric field part and at least one filtering unit are sequentially arranged along the air flow direction, and the filtering unit can be electret by the electric field part.
When the electric field portion adopts first electric field portion, first electric field portion is including dust removal electric field negative pole and dust removal electric field positive pole, dust removal electric field negative pole with dust removal electric field positive pole is used for producing the ionization dust removal electric field, dust removal electric field positive pole is the honeycomb structure that is constituteed by a plurality of hollow tube bundles.
When electric field portion adopted second electric field portion, second electric field portion includes discharge electrode and adsorption electrode, the overall structure that the adsorption electrode constitutes for connecting by a plurality of electric field units, the discharge electrode wears to locate in the passageway of electric field unit, form the electric field between discharge electrode and the electric field unit.
The electric field portion includes first electric field portion and second electric field portion, first electric field portion with second electric field portion sets gradually along the air current direction.
The filtering unit comprises a filtering unit 20 which adopts an ultra-high efficiency air filter.
The dedusting electric field flow channel in the first electric field part 40 is arranged to be perpendicular to the channel formed by the surrounding of the side wall in the electric field unit of the second electric field part 30.
The distance between the first electric field part 40 and the second electric field part 30 is set to be 3-15mm, and the distance between the second electric field part 30 and the filter unit 20 is set to be 2-25 mm.
EXAMPLE III
The gas purification device of this embodiment, including three electric field portion and a filter unit that set gradually along the gas flow direction, first electric field portion 40 in embodiment one is all adopted to three electric field portion, as shown in fig. 2, first electric field portion includes dust removal electric field negative pole 42 (first discharge electrode) and dust removal electric field positive pole (first adsorption electrode) 41, dust removal electric field positive pole 41 includes first anode portion 412 and second anode portion 411, first anode portion 412 is the same with second anode portion 411 size, in fig. 2, second anode portion 411 includes a plurality of anode tube bundles 411a, the length of anode tube bundle 411a is 60mm, its cross-section is honeycomb shape, the inscribe circle diameter is R23 mm, the diameter of dust removal negative pole 42 is 1 mm.
One anode tube bundle 411a and one dedusting electric field cathode in the anode tube bundle 411a form one electric field unit, the first electric field part in this embodiment uses a direct current power supply, and the electric field strength E of the electric field unit is equal to voltage/0.5R.
The filtering unit adopts an air filter with a filtering grade of high and medium efficiency filtering grade F6, the thickness of the air filter is 70mm, and the distance from the surface of the air filter with the grade F6 to the outlet of the electric field part is 20 mm.
Experiments prove that the quality of the gas treated by the electric field part of the embodiment is excellent under the voltage and current conditions of table 1 of the embodiment, and the gas treated by the electric field part of the embodiment has no adverse effect on human beings working and living for a long time under the environment.
Table 1 shows the following experimental data obtained by testing the gas purification apparatus at different wind speeds and different voltages.
TABLE 1
In table 1: e denotes the electric field strength of the electric field unit.
As can be seen from table 1:
when the wind speed is 0.5m/s and 0.7m/s, the dust removal efficiency of the filter unit is much higher than that of the filter unit when the wind speed is 0.3m/s, which indicates that the wind speed is high, the dust removal effect is good, but the energy consumption is high.
When the wind speed is 0.3m/s, the dust removal efficiency of the superposition of the electric field and the filter unit is much higher than that of the dust removal efficiency of the superposition of the electric field and the filter unit without the electric field.
When the wind speed is 0.5m/s and 0.7m/s, the particle number of 0.3 mu m is detected, and the dust removal efficiency of the superimposed electric field and the filter unit is more than 98% compared with the data of the original environment.
The electric field intensity of the electric field unit is between 0.4 and 0.5.
Example four
Fig. 7 is a schematic perspective view of a gas purification apparatus according to an embodiment of the present invention, which includes a housing, and an electric field part, a first filter unit, and a second filter unit sequentially disposed in the housing 710 in a gas flow direction D, wherein a gas flow passage is formed in the housing from top to bottom.
The electric field part may be a first electric field part and a second electric field part in sequence along the direction of the air flow, or
The electric field part can also be a second electric field part and a first electric field part which are sequentially arranged along the airflow direction, or
The electric field part can be a first electric field part or a plurality of first electric field parts which are arranged in the direction of the airflow;
the electric field part can also be a second electric field part or a plurality of second electric field parts arranged in the airflow direction; the first electric field part and the second electric field part are the first electric field part and the second electric field part in the first embodiment.
In an embodiment, the electric field portion 740 is the first electric field portion as shown in fig. 2 in the first embodiment, and the electric field portion 740, the first filter unit 720 and the second filter unit 730 are detachably disposed in the housing 710.
In one embodiment, the electric field portion 740 may also be one or more second electric field portions.
In one embodiment, one anode tube bundle 411a in the first electric field portion and one de-dusting electric field cathode located in the anode tube bundle 411a constitute one electric field unit having an electric field strength of less than 0.5 kv/mm.
In one embodiment, one electric field adsorption unit in the second electric field part and one discharge electrode in the electric field adsorption unit form one electric field unit, and the electric field intensity of the electric field unit is less than 0.5 kv/mm.
In one embodiment, the gas cleaning device further comprises a fan disposed before the electric field portion 740 in the airflow direction D for accelerating the flow of the gas.
In one embodiment, the first filter media has a filtration rating of any one of coarse filtration (G1-G3), medium filtration (G4, F5), or high-medium filtration (F6-F9).
In this embodiment, the filtration grade of the first filter medium is high-medium efficiency filtration grade F6. Air filters used in the examples: F6/A714 (Filter element is electret material)
The second filter unit 730 includes a second filter medium formed of an electret material; the second filter medium can be electret by the electric field portion 740, and the filter pore size of the second filter medium is larger than that of the first filter medium.
In this embodiment, the second filter medium is made of PP cotton, which is commonly called cotton wool, hollow cotton, or filling cotton, and is made of polypropylene fiber for artificial chemical fiber. The PP cotton has electret property.
In one embodiment, the gas enters the electric field portion 740, and the gas passing through the gas flow channel is purified by the electric field, and the electric field purified gas is known in the art: through letting the one pole that forms the electric field, carry out the ionization to the gas that passes through, and make the particulate matter in the gas electrified to can let this kind of electrified particulate matter be adsorbed by another pole. For example, when one electrode is negatively charged and the other electrode is positively charged, the negatively charged one electrode ionizes the gas and then negatively charges the particles in the gas, so that the particles can be adsorbed and removed by the positively charged other electrode, and the large and medium particles in the gas are removed by the purification of the electric field portion 740.
During operation, the electric field part 740 ionizes the gas passing through the gas channel to generate positive and negative particles, so that the first filter medium and the second filter medium are electret, and the first filter unit 720 and the second filter unit 730 are continuously electret, so that the first filter unit 720 and the second filter unit 730 always keep high adsorption performance, and medium and small micro-particles in the gas can be further removed.
The gas is purified by the electric field part 740 and filtered by the first and second filter units 720 and 730, and finally, fresh air comes out.
In the embodiment, the first filter medium of the high and medium efficiency filter F6 grade is matched with PP cotton, and experiments show that the filter effect can reach the filter grade H14, so that the filter effect is more than 2 after 1+1 matching.
In other embodiments, the highest filtration grade, H14, can be achieved if a grade G or F is used with PP cotton, and the filtration grade F9 can be used with PP cotton, even the filtration grade U15.
Further, the present embodiment is configured such that the gas passes through the first filter unit 720 and then passes through the second filter unit 730. Because the PP cotton has large filter pore diameter, the flowing resistance of the gas cannot be increased, and the flowing of the gas cannot be influenced. In addition, the flow rate of the gas passing through the first filtering unit 20 is reduced, and when the gas passes through the second filtering unit 730, the middle and small particles are easily adsorbed by the PP cotton.
The problem of air purification efficiency and air resistance has been solved better to this embodiment, and F6 filter medium + the cotton filter medium combination of PP plays the key role.
Compared with the filtering medium with the filtering grade of H14, the embodiment not only solves the problems of large wind resistance and high energy consumption of the original H14 filtering medium, but also solves the problem of short service life of the original purifying module adopting the filtering medium H14.
The first filter unit 720 and the second filter unit 730 are used in combination to achieve 99% filtration of particles greater than or equal to 500nm, preferably greater than or equal to 300nm, in the gas. In the prior art, if only the first filtering unit 720 and the second filtering unit 730 are used for physical purification, the purification method is as follows: the filtration is realized through aperture blocking, route staggering and rapid gas velocity impact. If the gas purification system in the embodiment is adopted in an environment with high requirements on gas purification and filtration, such as a semiconductor, in which the removal effect on particles with a size of more than 10nm is difficult to improve, the electric field device can provide an electret for the filtration unit, so that the filtration unit can increase the purification effect in addition to the purification mode, and the electret is matched with the electric field device, compared with the prior art, the gas purification system can better remove the particles with a size of more than 10nm, and is more suitable for the environment with high requirements;
since the faster the wind speed of the filtering unit, the faster the gas speed impacts, the better the filtering effect, the faster the wind speed, the higher energy consumption needs to be consumed.
It can be seen that, because the existence of electric field portion 740, can carry out the electret to filter media, so in operation, electric field portion 740 can continuously carry out the electret to filter media, thereby make filter media compare the situation that can not be lasted the electret, can continuously exert more effective filter effect, thus, compare prior art, reduce and use the energy consumption, reduce use cost, and once purify through electric field portion 740 in advance, can also prolong filter media's life, reduce the change number of times, thereby reduce use cost, also reduce the secondary pollution to the environment after the change simultaneously.
Further, because the filtering unit can keep a higher electret state for a long time, the adsorption effect is not influenced even if the filtering aperture is increased, on the other hand, the ventilation resistance is reduced by increasing the filtering aperture, and under the condition of the same wind speed, the energy consumption of the fan can be greatly reduced.
In order to realize electret of the filter medium, the positions of the first filter unit 720 and the second filter unit 730 relative to the electric field part 740 may be defined as follows: the minimum of the vertical distances of all of the gas outlets to the surface of the filter media receiving gas discharged from the gas outlets allows the filter media to be subjected to the electret.
Specifically, as shown in fig. 6, the arrows indicate the gas flow direction, after the gas exits from the gas outlet 13, the filter medium receives the gas from the surface a for filtering, and then the gas exits from the surface B, and the minimum value L in the vertical distance from all the gas outlets 13 to the surface a enables the filter medium to be electret, that is, enables the filter medium to obtain the charged ions for being electret. In some embodiments, the gas outlets 13 are not in a plane, and the vertical distance from all the gas outlets to the surface a is long or short, and the shortest vertical distance is the minimum value mentioned above.
The specific value of the minimum value may be set according to the above rule after integrating the compact size, the power consumption, the usage mode, and the like in practice, and in the present embodiment, the minimum value is 200mm or less.
In the present embodiment, the first filter unit 20 and the second filter unit 30 are used together to filter 99% of the particles with a size greater than or equal to 500nm in the gas, preferably, to filter particles with a size greater than or equal to 300nm, and the efficiency of filtering 10nm particles can exceed 99% by combining such filter units with the electric field unit. Through many times of experiments, this embodiment is in-service use, and purifying effect is better, and the windage is low, and the energy consumption is low, and use cost also reduces thereupon.
Therefore, the gas purification system of the embodiment is used in a semiconductor clean room, can reduce the energy consumption, prolong the service life of the filter unit, reduce the use cost, reduce the secondary pollution to the environment after the filter unit is replaced, and can filter 10nm particles with the efficiency of more than 99%.
The present embodiment provides a gas purification system, including: at least two gas purification devices arranged in sequence along the gas flow direction, wherein the gas purification devices are the gas purification devices.
The present embodiment provides an application of a gas purification system for purifying gas entering a clean room, wherein the gas purification system is the gas purification system described above.
Therefore, the investment of primary and intermediate filtration in the purification of the existing clean room can be reduced, the purification requirement can be met, and the occupied area and the investment cost are further reduced.
EXAMPLE five
The gas purification device of this embodiment, including three electric field portion and two filter unit that set gradually along the gas flow direction, first electric field portion 40 in the first embodiment is all adopted to three electric field portion, as shown in fig. 2, first electric field portion includes dust removal electric field negative pole 42 (first discharge electrode) and dust removal electric field positive pole (first adsorption electrode) 41, dust removal electric field positive pole 41 includes first anode portion 412 and second anode portion 411, first anode portion 412 is the same with second anode portion 411 size, in fig. 2, second anode portion 411 includes a plurality of anode tube bundles 411a, the length of anode tube bundle 411a is 60mm, its cross-section is honeycomb shape, the inscribe circle diameter is R23 mm, the diameter of dust removal electric field negative pole 42 is 1 mm.
One anode tube bundle 411a and one dedusting electric field cathode in the anode tube bundle 411a form one electric field unit, the first electric field part in this embodiment uses a direct current power supply, and the electric field strength E of the electric field unit is equal to voltage/0.5R.
The two filter units respectively adopt the first filter unit 720 and the second filter unit 730 in the fourth embodiment.
The first filter unit 720 adopts an air filter with a filter grade of high and medium efficiency filter F6 grade, and the filter medium of the second filter unit 730 is PP cotton.
The distance from the surface of the first filter unit 720 to the outlet of the electric field part is 20mm, the distance from the surface of the second filter unit 730 to the outlet of the electric field part is 100mm, and the distance from the surface of the second filter unit 730 to the outlet of the first filter unit 720 is 10 mm.
Wherein the thickness of the first filter unit 720 is 70 mm.
Experiments prove that the quality of the gas treated by the electric field part of the present embodiment is excellent under the voltage and current conditions of table 2 of the present embodiment, and the gas treated by the electric field part of the present embodiment has no adverse effect on human life and work for a long time under the environment.
Table 2 shows the following experimental data obtained by testing the gas purification apparatus at different wind speeds and different voltages.
TABLE 2
In table 2: e denotes the electric field strength of the electric field unit.
As can be seen from table 2:
when the wind speed is 0.3m/s and 0.5m/s, the dust removal efficiency can reach 100% by using the superposition of the electric field and the filter unit, wherein the detection quantity of 0.3 mu m particles is 0, and the dust removal device is particularly suitable for places with extremely high requirements on environment, such as laboratories, electronic component factories and the like.
The electric field intensity of the electric field unit is between 0.3 and 0.5.
The above-described embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. A gas purification device for filtering and purifying gas, comprising:
at least one electric field part and at least one filtering unit which are arranged in sequence along the gas flow direction,
wherein the filter unit has a filter media containing an electret material;
the filter medium can be electret by the electric field portion.
2. The gas purification apparatus according to claim 1, wherein:
wherein the electric field part has a gas flow passage through which the gas passes,
the gas channel is provided with a gas inlet for gas to enter and a gas outlet for gas to exit,
the electric field part is provided with an electric field which is formed in the gas flow passage and is used for ionizing and dedusting the gas.
3. The gas purification apparatus according to claim 2, wherein:
wherein, the setting position of the filter unit relative to the electric field part is limited as follows: the minimum of the perpendicular distances from all of the gas outlets to the surface of the filter media receiving gas discharged from the gas outlets allows the filter media to be subjected to the electret.
4. A gas cleaning device according to claim 3, characterized in that:
wherein the minimum value is 200mm or less.
5. The gas purification apparatus according to claims 1 to 4, wherein:
wherein the electric field part is a first electric field part, the first electric field part comprises a first discharge electrode and a first adsorption electrode which form the electric field, the first adsorption electrode is a honeycomb structure formed by a plurality of hollow tube bundles, at least part of the first discharge electrode is arranged in the hollow tube bundles of the first adsorption electrode, and the gas flow channel is formed between the first discharge electrode and the first adsorption electrode, or
Electric field portion is second electric field portion, second electric field portion is including forming the second discharge electrode and the second adsorption electrode of electric field, the second adsorption electrode includes a plurality of electric field adsorption units, electric field adsorption unit has along the axial extension's lateral wall, the lateral wall encircles and forms the passageway, the lateral wall is equipped with the confession gas and gets into the second air inlet and the gas discharge of passageway the second gas outlet of passageway, adjacent two electric field adsorption unit shares a lateral wall, and is a plurality of electric field adsorption unit connects and constitutes overall structure, or
The electric field portion includes the first electric field portion and the second electric field portion.
6. The gas purification apparatus according to claim 5, comprising:
a first filtering unit and a second filtering unit which are arranged in sequence along the gas flow direction,
wherein the first filter unit and the second filter unit respectively have a first filter medium and a second filter medium formed of electret materials; the first filter medium and the second filter medium can be electret by the electric field part, and the filter pore size of the second filter medium is larger than that of the first filter medium.
7. The gas purification apparatus according to claim 6, wherein:
the filtration grade of the first filter medium is any one of coarse filtration, medium-efficiency filtration or high-medium-efficiency filtration,
the second filter medium is PP cotton.
8. Use of a gas purification system, characterized in that:
the gas purification device is used for purifying gas entering a semiconductor clean room, and the gas purification system is the gas purification device in any one of claims 1 to 7.
9. A method of purifying a gas, comprising:
at least one electric field part and at least one filtering unit are sequentially arranged along the gas flow direction;
forming an electric field in a gas flow passage of the electric field portion;
allowing the gas to enter the gas flow channel for filtering to obtain purified gas;
the purified gas enters a filtering unit to be filtered to obtain treated gas,
wherein the filtering unit performs the filtering by a filtering medium formed of an electret material,
the electret material can be electret by the electric field section.
10. The gas purification method according to claim 9, wherein:
the arrangement position of the filter unit relative to the electric field part is defined as follows: a minimum of the vertical distances from all of the gas outlets to the surface of the filter media receiving the gas discharged from the gas outlets allows the filter media to be subjected to the electret,
the minimum value is less than or equal to 200 mm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2020113043142 | 2020-11-19 | ||
| CN202011304314 | 2020-11-19 | ||
| CN202111034626 | 2021-09-03 | ||
| CN2021110346260 | 2021-09-03 |
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| CN114534917A true CN114534917A (en) | 2022-05-27 |
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| CN202111399221.7A Pending CN114534917A (en) | 2020-11-19 | 2021-11-19 | Gas purification device, system and method |
| CN202122877478.0U Active CN217550066U (en) | 2020-11-19 | 2021-11-19 | Gas purification device and system |
| CN202180072561.0A Pending CN116710208A (en) | 2020-11-19 | 2021-11-19 | Gas purification device, system and method |
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| CN202122877478.0U Active CN217550066U (en) | 2020-11-19 | 2021-11-19 | Gas purification device and system |
| CN202180072561.0A Pending CN116710208A (en) | 2020-11-19 | 2021-11-19 | Gas purification device, system and method |
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| WO (1) | WO2022105889A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61138550A (en) * | 1984-12-12 | 1986-06-26 | Matsushita Electric Ind Co Ltd | Air filter |
| CN104226477A (en) * | 2013-06-18 | 2014-12-24 | 珠海格力电器股份有限公司 | Air purifier and purification method thereof |
| CN204583486U (en) * | 2015-01-21 | 2015-08-26 | 杭州明旺环保科技有限公司 | The honeycomb electric field dedusting structure of electrostatic kitchen purification device |
| CN105983486B (en) * | 2015-01-28 | 2018-11-20 | 上海思奈环保科技有限公司 | A kind of air cleaning high-pressure ion electret purification device and air cleaning unit |
| CN106524253A (en) * | 2016-11-08 | 2017-03-22 | 广东美的厨房电器制造有限公司 | Extractor hood and high voltage static module thereof |
| CN107051735B (en) * | 2017-05-09 | 2018-12-04 | 中国科学院过程工程研究所 | A kind of high-effective dust-removing block preparation method |
| CN107377225A (en) * | 2017-09-06 | 2017-11-24 | 维睿空气系统产品（深圳）有限公司 | Micro- electrostatic filter |
| CN107860066B (en) * | 2017-11-24 | 2023-06-27 | 复旦大学 | Full-automatic roll-to-roll air purification device and pole-standing method |
| CN211385413U (en) * | 2019-12-17 | 2020-09-01 | 上海永健仪器设备有限公司 | Air return box type electret electrostatic air purification device |
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- 2021-11-19 CN CN202111399221.7A patent/CN114534917A/en active Pending
- 2021-11-19 CN CN202122877478.0U patent/CN217550066U/en active Active
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| CN217550066U (en) | 2022-10-11 |
| CN116710208A (en) | 2023-09-05 |
| WO2022105889A1 (en) | 2022-05-27 |
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