CN114526699A - Method, device and equipment for correcting positioning error - Google Patents
Method, device and equipment for correcting positioning error Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
Abstract
The invention discloses a method, a device and equipment for correcting positioning errors, which are used for correcting the positioning errors generated by the cooperative work of a plurality of working groups, realizing the precise cooperative work of the plurality of working groups and improving the working efficiency. The method comprises the following steps: acquiring error compensation values of a plurality of grid points closest to a working point on a workbench from an error compensation set, wherein the error compensation set comprises error compensation values of a plurality of working groups at different grid points, the error compensation values are determined by position images of mark points of the plurality of working groups and grid points on a standard plate shot by a camera, and the standard plate is positioned on the workbench and covers a working area of the workbench; correcting the coordinates of the plurality of work groups moved to the work point according to the error compensation values of the plurality of grid points.
Description
Technical Field
The present invention relates to the field of precision equipment cooperation technologies, and in particular, to a method, an apparatus, and a device for correcting a positioning error.
Background
The modern manufacturing industry generally adopts an X-Y motion workbench as an automatic device, and the positioning precision of X-Y plane motion of the workbench determines the performance of the automatic device and the precision of processing detection. The conventional method for ensuring the positioning accuracy is to use a rotary encoder as a positioning feedback device, but the rotary encoder cannot compensate for the errors such as the non-uniformity and the reverse clearance caused by the lead screw. The linear grating feedback can compensate precision loss caused by errors such as unevenness and reverse clearance caused by a lead screw to a certain extent, but positioning errors can be introduced due to expansion or contraction of an X-Y moving workbench or a grating caused by temperature influence or verticality of an X axis and a Y axis during installation, and the introduced positioning errors cannot be effectively compensated by the grating or an encoder.
The conventional method for correcting the positioning error is to use a laser interferometer for correction. For a common X-Y motion workbench, at least two groups of linear errors need to be measured, and the error value of any point in a plane can be determined only by two groups of linear errors and perpendicularity errors, so that the error measurement process is complicated. When the equipment specification is larger, the workbench can not be regarded as an ideal rigid body, the number of times of measurement is more, and the error measurement work is more complicated. When the system needs to be restored to precision on the user site after being transported or operated for a long time, the correction by the laser interferometer is more difficult due to the limitations of site temperature, vibration, space and the like.
In particular, when the apparatus has a plurality of workgroups and the workgroups are required to work in concert, the use of a laser interferometer can account for the alignment of the individual workgroups in the X-Y plane. But there is no ability for precise kinematic fits between multiple workgroups.
Disclosure of Invention
The invention provides a method, a device and equipment for correcting a positioning error, which are used for correcting the positioning error generated by the cooperative work of a plurality of working groups, realizing the precise cooperative work of the plurality of working groups and improving the working efficiency.
In a first aspect, an embodiment of the present invention provides a method for correcting a positioning error, where the method includes:
acquiring error compensation values of a plurality of grid points closest to a working point on a workbench from an error compensation set, wherein the error compensation set comprises error compensation values of a plurality of working groups at different grid points, the error compensation values are determined by position images of mark points of the plurality of working groups and grid points on a standard plate shot by a camera, and the standard plate is positioned on the workbench and covers a working area of the workbench;
correcting the coordinates of the plurality of work groups moved to the work point according to the error compensation values of the plurality of grid points.
As an alternative embodiment, the error compensation value is determined by:
if the camera and the working groups move to the grid point to be measured, and the visual field of the camera comprises the mark points of the working groups and the grid point to be measured, determining error compensation values of the mark points of the working groups relative to the center of the grid point to be measured according to position images of the mark points of the working groups and the grid point to be measured on the standard plate, which are shot by the camera, wherein the mark points are located on the transparent material of the working groups.
As an optional implementation manner, before the camera and the plurality of workgroups move to the grid point to be measured, the method further includes:
determining initial coordinates of a plurality of workgroups, wherein the initial coordinates are determined when the center of the field of view of the camera and the landmark points of the plurality of workgroups are aligned with a central grid point on the standard plate;
determining the working group standard coordinates of the working groups respectively moving to the grid points to be measured according to the initial coordinates of the working groups;
determining error compensation values of the mark points of the plurality of working groups relative to the center of the grid point to be measured, including:
and when the mark points of the plurality of working groups are positioned in the corresponding working group standard coordinates, determining error compensation values of the plurality of working groups relative to the centers of the grid points to be detected.
As an optional implementation manner, the determining an error compensation value of the landmark points of the plurality of working groups with respect to the center of the grid point to be measured further includes:
and determining a camera error compensation value of the center of the visual field of the camera relative to the center of the grid point to be measured.
As an alternative embodiment, the camera has a fixed relative positional relationship with at least one workgroup; further comprising:
correcting the coordinates of the center of the field of view of the camera according to the camera error compensation values of the camera at different grid points;
and correcting the coordinates of at least one working group with a fixed relative position relation with the camera according to the corrected coordinates of the camera and the fixed relative position relation.
As an optional implementation, the correcting the coordinates of the plurality of working groups moved to the working point according to the error compensation values of the plurality of grid points includes:
and correcting the coordinates of each working group moved to the working points according to the coordinates of each working group at a plurality of grid points and the corresponding error compensation values based on the linear equal-ratio scaling characteristics of the positioning errors.
The positioning error correction method provided by the embodiment of the invention is simple and easy to realize, an error compensation table is generated by measuring the positioning errors moving to different working points when different working part groups work cooperatively in advance, and the positioning errors at the actual working points are obtained from the error compensation table during working; therefore, the precise cooperation of different working part groups is ensured, and the working efficiency is high.
In a second aspect, embodiments of the present invention provide a calibration plate, wherein grid points with mark patterns are distributed on the calibration plate, and the calibration plate is used for measuring error compensation values when a plurality of working groups move to the grid points.
In a third aspect, an apparatus for correcting a positioning error provided in an embodiment of the present invention includes:
an acquisition unit configured to acquire error compensation values of a plurality of grid points closest to a working point on a table from an error compensation set including error compensation values of a plurality of working groups at different grid points, the error compensation values being determined by position images of mark points of the plurality of working groups and grid points on a standard board that is located on the table and covers a working area of the table, the mark points being photographed by a camera;
a correction unit for correcting the coordinates of the plurality of work groups moved to the work point according to the error compensation values of the plurality of grid points.
As an alternative embodiment, the error compensation value is determined by:
if the camera and the working groups move to the grid points to be measured and the visual field of the camera comprises the mark points of the working groups and the grid points to be measured, determining error compensation values of the mark points of the working groups relative to the centers of the grid points to be measured according to position images of the mark points of the working groups and the grid points to be measured on a standard plate shot by the camera, wherein the mark points are located on the transparent materials of the working groups.
As an optional implementation manner, before the camera and the plurality of workgroups move to the grid point to be measured, the acquiring unit is further configured to:
determining initial coordinates of a plurality of workgroups, wherein the initial coordinates are determined when the center of the field of view of the camera and the index points of the plurality of workgroups are aligned with a central grid point on the standard plate;
determining the working group standard coordinates of the working groups respectively moving to the grid points to be measured according to the initial coordinates of the working groups;
determining error compensation values of the mark points of the plurality of working groups relative to the center of the grid point to be measured, including:
and when the mark points of the plurality of working groups are positioned in the corresponding working group standard coordinates, determining error compensation values of the plurality of working groups relative to the centers of the grid points to be detected.
As an optional implementation manner, the obtaining unit is further configured to:
and determining a camera error compensation value of the center of the visual field of the camera relative to the center of the grid point to be measured.
As an alternative embodiment, the camera has a fixed relative positional relationship with at least one workgroup; the correction unit is further configured to:
correcting the coordinates of the center of the field of view of the camera according to the camera error compensation values of the camera at different grid points;
and correcting the coordinates of at least one working group with a fixed relative position relation with the camera according to the corrected coordinates of the camera and the fixed relative position relation.
As an optional implementation, the correction unit is specifically configured to:
and correcting the coordinates of each working group moved to the working points according to the coordinates of each working group at a plurality of grid points and the corresponding error compensation values based on the linear equal-ratio scaling characteristics of the positioning errors.
In a fourth aspect, an embodiment of the present invention further provides a device for correcting a positioning error, where the device includes a processor and a memory, where the memory is used to store a program executable by the processor, and the processor is used to read the program in the memory and execute the following steps:
acquiring error compensation values of a plurality of grid points closest to a working point on a workbench from an error compensation set, wherein the error compensation set comprises error compensation values of a plurality of working groups at different grid points, the error compensation values are determined by position images of mark points of the plurality of working groups and grid points on a standard plate shot by a camera, and the standard plate is positioned on the workbench and covers a working area of the workbench;
correcting the coordinates of the plurality of work groups moved to the work point according to the error compensation values of the plurality of grid points.
As an alternative embodiment, the error compensation value is determined by:
if the camera and the working groups move to the grid point to be measured, and the visual field of the camera comprises the mark points of the working groups and the grid point to be measured, determining error compensation values of the mark points of the working groups relative to the center of the grid point to be measured according to position images of the mark points of the working groups and the grid point to be measured on the standard plate, which are shot by the camera, wherein the mark points are located on the transparent material of the working groups.
As an optional implementation manner, before the camera and the plurality of workgroups move to the grid point to be measured, the processor is further configured to execute:
determining initial coordinates of a plurality of workgroups, wherein the initial coordinates are determined when the center of the field of view of the camera and the index points of the plurality of workgroups are aligned with a central grid point on the standard plate;
determining the working group standard coordinates of the working groups which are respectively moved to the grid points to be measured according to the initial coordinates of the working groups;
determining error compensation values of the mark points of the plurality of working groups relative to the center of the grid point to be measured, including:
and when the mark points of the plurality of working groups are positioned in the corresponding working group standard coordinates, determining error compensation values of the plurality of working groups relative to the centers of the grid points to be detected.
As an optional implementation, the processor is further configured to perform:
and determining a camera error compensation value of the center of the visual field of the camera relative to the center of the grid point to be measured.
As an alternative embodiment, the camera has a fixed relative positional relationship with at least one workgroup; the processor is further configured to perform:
correcting the coordinates of the center of the field of view of the camera according to the camera error compensation values of the camera at different grid points;
and correcting the coordinates of at least one working group with a fixed relative position relation with the camera according to the corrected coordinates of the camera and the fixed relative position relation.
As an optional implementation, the processor is configured to perform:
and correcting the coordinates of each working group moved to the working point according to the coordinates of each working group at a plurality of grid points and the corresponding error compensation values based on the linear proportional scaling characteristics of the positioning error.
In a fifth aspect, an embodiment of the present invention further provides a computer storage medium, on which a computer program is stored, where the computer program is used to implement the steps of the method in the first aspect when executed by a processor.
These and other aspects of the present application will be more readily apparent from the following description of the embodiments.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.
Fig. 1 is a flowchart of a method for correcting a positioning error according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a positioning error correction according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a standard board according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a calculated error compensation value according to an embodiment of the present invention;
fig. 5 is a schematic view of a working scenario provided in an embodiment of the present invention;
FIG. 6 is a schematic diagram of a method for preparing an error measurement according to an embodiment of the present invention;
FIG. 7A is a schematic side view of an initial position calibration and error measurement provided by an embodiment of the present invention;
FIG. 7B is a schematic view of a camera field of view for initial position calibration and error measurement according to an embodiment of the present invention;
fig. 8 is a schematic diagram of an error measurement-selection grid point to be measured according to an embodiment of the present invention;
FIG. 9 is a schematic diagram of an error compensation application according to an embodiment of the present invention;
FIG. 10A is a schematic diagram of a coordinate relationship between an actual substrate and an ideal substrate according to an embodiment of the present invention;
FIG. 10B is a schematic diagram of a coordinate relationship between an actual substrate and an ideal substrate according to an embodiment of the present invention;
fig. 11 is a schematic diagram illustrating obtaining of grid point error compensation values according to an embodiment of the present invention;
FIG. 12 is a flowchart illustrating an embodiment of a positioning error correction method according to the present invention;
FIG. 13 is a schematic diagram of an apparatus for correcting positioning errors according to an embodiment of the present invention;
fig. 14 is a schematic diagram of a positioning error correction apparatus according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The term "and/or" in the embodiments of the present invention describes an association relationship of associated objects, and indicates that three relationships may exist, for example, a and/or B may indicate: a exists alone, A and B exist simultaneously, and B exists alone. The character "/" generally indicates that the former and latter associated objects are in an "or" relationship.
The application scenario described in the embodiment of the present invention is for more clearly illustrating the technical solution of the embodiment of the present invention, and does not form a limitation on the technical solution provided in the embodiment of the present invention, and it can be known by a person skilled in the art that with the occurrence of a new application scenario, the technical solution provided in the embodiment of the present invention is also applicable to similar technical problems. In the description of the present invention, the meaning of "a plurality" is two or more, unless otherwise specified.
Example 1
The modern manufacturing industry generally adopts an X-Y motion workbench as an automatic device, and the positioning precision of X-Y plane motion of the workbench determines the performance of the automatic device and the precision of processing detection. In order to solve the positioning error caused by the expansion or contraction of an X-Y motion workbench or a grating under the influence of temperature, or the verticality problem of an X axis and a Y axis during installation, and the like, the method for calculating the positioning error in the prior art only compensates for the positioning error of one working part group, but under the condition that a plurality of working part groups need to work cooperatively in actual work, the positioning error precision measured by the method for compensating the positioning error of one working part group is difficult to guarantee.
Due to the continuous change of environmental conditions and the influence of various accidental factors, different results can be obtained by measuring the same physical quantity for multiple times in a short time. A plurality of physical quantities are measured at a moment with a long interval, and the measurement results are more dispersed, so that the positioning error interference factors calculated in the prior art are more, and the accuracy of the measured positioning error is unreliable.
In order to solve the technical problem that the accuracy of the measured positioning error is not reliable under the condition that a plurality of working groups work simultaneously in the prior art, the embodiment of the invention provides a method for correcting the positioning error, which can cope with the movement of the plurality of working groups relative to a workpiece. It is easy to understand that if a plurality of physical quantities can be measured at the same time under a certain equipment state, then the several physical quantities can be considered to be measured under the "same equipment state", that is, obtained when a plurality of working groups work together, then the relative error factor is reduced, the interference factor of the measurement process is less, and the measured positioning error is more reliable.
As shown in fig. 1, a method for correcting a positioning error according to an embodiment of the present invention includes the following steps:
As shown in fig. 2, an exemplary schematic diagram of positioning error correction is provided in the embodiment of the present invention, in which, taking an example that two working groups are required to complete in cooperation during actual working, after a working point is determined, the working group 203 and the working group 204 are controlled to move to a working point 202 in a working area 201 on a table 200, error compensation values of a plurality of grid points corresponding to the working point are obtained from an error compensation set, coordinates of the two working groups are corrected by using the plurality of error compensation values, and finally, corrected actual coordinates are obtained, so as to implement precise cooperative working between multiple components.
The specific calibration steps are as follows:
1) acquiring error compensation values of a plurality of grid points closest to the working point;
it should be noted that, in actual work, there is no standard board on the workbench, the standard board is placed on the workbench only when the error compensation value needs to be determined, and after the error compensation set is determined, the standard board is removed to enable the working group to work normally.
As shown in fig. 3, in the schematic diagram of a standard board provided in this embodiment, grid points 301 with a mark pattern are distributed on a standard board 300, wherein each grid point is uniformly distributed along the X-axis and the Y-axis, the distance between any two adjacent grid points on the X-axis is fixed to be L, and the distance between any two adjacent grid points on the Y-axis is fixed to be L. The X-axis direction of the grid points is the same as the X-axis direction of the working points, and the Y-axis direction of the grid points is the same as the Y-axis direction of the working points.
As shown in fig. 4, the 4 grid points closest to the working point 401 on the table 400 are a grid point 402, a grid point 403, a grid point 404, and a grid point 405, respectively; the error compensation values at the 4 grid points are a1, a2, A3, a4, respectively, wherein the error compensation values include an error compensation value for the X-axis coordinate and an error compensation value for the Y-axis coordinate.
2) And correcting the coordinates of each working group moved to the working points according to the coordinates of each working group at a plurality of grid points and the corresponding error compensation values based on the linear equal-ratio scaling characteristics of the positioning errors.
In implementation, an X-axis error offset coefficient alpha 1 and a Y-axis error offset coefficient alpha 2 are calculated according to coordinates of grid points; and carrying out error compensation on the coordinates of each working group according to the alpha 1 and the alpha 2 and the error compensation values of the grid points, and determining the corrected actual coordinates of each working group.
The embodiment of the invention provides a method for determining an error compensation set, wherein the error compensation set comprises error compensation values of a plurality of working groups at different grid points, the error compensation values are determined through position images of mark points of the plurality of working groups and grid points on a standard plate shot by a camera, and the standard plate is positioned on a workbench and covers a working area of the workbench.
As an alternative embodiment, the error compensation value is determined by:
if the camera and the working groups move to the grid point to be measured, and the visual field of the camera comprises the mark points of the working groups and the grid point to be measured, determining error compensation values of the mark points of the working groups relative to the center of the grid point to be measured according to position images of the mark points of the working groups and the grid point to be measured on the standard plate, which are shot by the camera, wherein the mark points are located on the transparent material of the working groups.
Optionally, the embodiment of the present invention may further control the camera and the plurality of workgroups to move, so that the camera and the plurality of workgroups can move to the grid point to be measured, and the field of view of the camera includes the mark points of the plurality of workgroups and the grid point to be measured. The method for correcting the positioning error provided by the embodiment of the invention can be applied to equipment for controlling the movement of the camera and the working group.
It should be noted that, in this embodiment, the error compensation value of each grid point to be measured is determined, a plurality of work groups and the camera are controlled to move to each grid point to be measured, then, the position images of a plurality of working groups and the grid points to be measured, which are shot by a camera, are utilized to analyze and calculate the deviation value (error compensation value) of the mark point of each working group relative to the center of the grid point to be measured, because a plurality of working groups are required to move to the grid point to be tested in the test process in the embodiment of the invention, the deviation value of each working group relative to the center of the grid point to be tested is judged, because the offset value needs to be shot and calculated by a camera, in order to avoid the phenomenon that a plurality of working groups and the center of the grid point to be detected are overlapped, an accurate offset value cannot be obtained from a shot picture, and the mark point on each working group is positioned on the transparent material in the embodiment of the invention, so that the shooting is convenient.
As an optional implementation manner, in this embodiment, a plurality of grid points to be tested may be selected and set, or all grid points on the standard board may be used as the grid points to be tested, and in order to save the testing cost and improve the testing efficiency, the grid points to be tested may be determined in the following manner:
and selecting the grid points to be measured from the standard plate according to the mode of respectively setting a plurality of grid points at intervals in the X-axis direction and the Y-axis direction.
As an optional implementation manner, before the camera and the plurality of workgroups move to the grid point to be measured, the method further includes the following steps:
step 1: determining initial coordinates of a plurality of workgroups, wherein the initial coordinates are determined when the center of the field of view of the camera and the index points of the plurality of workgroups are aligned with a central grid point on the standard plate;
it should be noted that the initial coordinates may be manually calibrated by manually controlling the movement of the workgroups, specifically, by controlling the plurality of workgroups and the movement of the camera to the central grid point on the standard board, and by observing the picture captured by the camera to control the mark points of the plurality of workgroups and the center of the camera view to align with the central grid point on the standard board, the initial coordinates of each workgroup and the camera are determined by the picture captured by the camera during alignment.
Optionally, in this embodiment, the central grid point on the standard plate may be manually pre-calibrated, and the selection reference of the central grid point is the grid point close to the central position of the standard plate.
It should be noted that, since a plurality of workgroups need to be moved to the central grid point, the initial coordinates of the workgroup measured at this time may be the axial coordinates of the workgroup.
Step 2: and determining the working group standard coordinates of the working groups respectively moving to the grid points to be measured according to the initial coordinates of the working groups.
After the initial coordinates are calibrated, the distance between each grid point to be measured and the initial grid point in the X-axis direction and the Y-axis direction can be calculated based on the characteristic that the adjacent grid points to be measured on the standard plate have fixed intervals in the X-axis direction and the Y-axis direction, so that the coordinates of each working group moving to the grid points to be measured are determined based on the initial coordinates.
And step 3: and when the mark points of the plurality of working groups are positioned in the corresponding working group standard coordinates, determining error compensation values of the plurality of working groups relative to the centers of the grid points to be detected.
Through the steps, an error compensation set can be established, and each working group in the set corresponds to an error compensation value on each grid point to be measured.
As an optional implementation manner, in the embodiment of the present invention, a camera may be used as a working component, and a camera error compensation value of a center of a field of view of the camera with respect to a center of the grid point to be measured is determined.
As an alternative embodiment, the camera has a fixed relative positional relationship with at least one workgroup; then, according to the measured error compensation value of the camera at each grid point to be measured, determining the error compensation value of the working group having a fixed position relation with the camera at each grid point to be measured, which can save the moving device for controlling the movement of the working group, wherein the moving device includes, but is not limited to, a device provided with a slide rail and a pulley, and the specific correction manner is as follows:
1) correcting the coordinates of the center of the field of view of the camera according to the camera error compensation values of the camera at different grid points;
2) and correcting the coordinates of at least one working group with a fixed relative position relation with the camera according to the corrected coordinates of the camera and the fixed relative position relation.
The following describes a method for correcting a positioning error provided in this embodiment in detail by taking a scene in which two workgroups are provided and one workgroup has a fixed position relationship with a camera as an example.
As shown in fig. 5, the working scenario of the present embodiment includes:
1) a work table 500 for carrying a work, a work area 501;
2) the camera comprises a motion group 1 capable of moving in the X-axis and Y-axis directions, and a camera which has a fixed relative position relationship with the motion group 1 in the X-axis and Y-axis directions and can move in the Z-axis direction; and a working group 1 which has a fixed relative position relation with the camera in the X-axis direction and the Y-axis direction and can move in the Z-axis direction;
the motion group 1 is used for driving the camera and the working group 1 to move on an X axis and a Y axis.
The landmark point at the center of the camera field of view is RefPoint 1.
The fixed deviation of the working group 1 with respect to the center of the camera field of view is (Xoft, Yoft).
3) The motion group 2 that can move in X axle and Y axle direction has fixed relative position relation and can be at the work group 2 of Z axle direction at X axle and Y axle direction and motion group 2, is fixed with transparent material on the work group 2, has the mark point of mark pattern on the transparent material, and the mark point of work group 2 is RefPoint 2.
It should be noted that the X-axis direction of the camera and the working group 1 is parallel to the X-axis direction of the working group 2, and the Y-axis direction of the camera and the working group 1 is parallel to the Y-axis direction of the working group 2; the Z-axis direction of the camera motion is vertical to the plane formed by the X-axis and the Y-axis, the Z-axis direction of the working set 1 motion is vertical to the plane formed by the X-axis and the Y-axis, and the Z-axis direction of the working set 2 motion is vertical to the plane formed by the X-axis and the Y-axis.
As shown in fig. 6, a schematic view of a standard plate 600 placed on a table 601 in preparation for error measurement.
1) Grid points with mark patterns are uniformly distributed on the standard plate, wherein the mark points of the grid points are RefPoint3 and are placed in the working area of the workbench 601; the standard plate can cover the working area of the workbench;
2) RefPoint3 is uniformly distributed on the standard board along the X-axis direction and the Y-axis direction of the motion group 1 and the motion group 2; the distance between the centers of any two adjacent RefPoint3 is fixed to be L;
3) RefPoint3 on the standard plate closest to the X-axis negative direction and the Y-axis negative direction is the (0,0) -th RefPoint 3.
As shown in fig. 7A-7B, the initial position calibration and error measurement are schematically illustrated, wherein fig. 7A is a schematic side view of the initial position calibration and error measurement, and fig. 7B is a schematic view of a camera view of the initial position calibration and error measurement, and the specific operation steps are as follows:
1) the standard plate is fixedly placed on the workbench, the X-axis direction of a grid point RefPoint3 array on the standard plate is parallel to the X-axis direction of a motion group (working group), and the Y-axis direction of a RefPoint3 array is parallel to the Y-axis direction of the motion group (working group);
2) controlling the camera and the working group 2 to move to the central position of the standard plate through the motion group 1 and the motion group 2 respectively, and adjusting the camera and the working group 2 to move in the Z-axis direction, so that the visual field of the camera can see the (Mo, No) th RefPoint3 on the standard plate and the RefPoint2 on the working group 2 clearly;
3) adjusting the camera and the working group 2 to move in an X-Y plane so that the center of the camera view, RefPoint2 on the working group 2 and the center of RefPoint3 (Mo, No) are completely aligned, and recording the axis coordinates (Xo1, Yo1) of the movement group 1 at the moment, wherein the axis coordinates of the movement group 2 are (Xo2, Yo 2);
that is, when the axis coordinates of motion group 1 are (Xo1, Yo1) and the axis coordinates of motion group 2 are (Xo2, Yo2), the camera view center and RefPoint2 and the (Mo, No) th RefPoint center are perfectly aligned.
As shown in fig. 8, a schematic diagram of error measurement-selection of a grid point to be measured includes the following specific screening modes:
based on the grid point distribution mode being array distribution, and the distance between the central points of two adjacent mark points RefPoint3 on the X axis or the Y axis being fixed to L, the displacement deviation (Xmi, Yni) of the (Mi, Ni) th RefPoint3 with respect to the (Mo, No) th RefPoint3 satisfies the following formula:
Xmi＝(Mi-Mo)*L；
Yni＝(Ni-No)*L；
specifically, in the manner shown in fig. 8, several refpoints 3 may be selected as grid points to be measured on the standard board 801 on the workbench 800. The embodiment of the invention does not limit the method for selecting the grid point to be measured.
The specific measurement steps of the error measurement are as follows:
1) if the error compensation value of the (Mi, Ni) th grid point to be measured is measured, the displacement deviation of the (Mi, Ni) th grid point to be measured relative to the (Mo, No) RefPoint3 is (Xmi, Yni), where:
Xmi＝(Mi-Mo)*L；
Yni＝(Ni-No)*L。
2) controlling motion group 1 to move to (Xo1+ Xmi, Yo1+ Yni), controlling motion group 2 to move to (Xo2+ Xmi, Yo2+ Yni);
3) adjusting the camera and the working group 2 to move in the Z direction, so that the measurement point RefPoint3 and RefPoint2 of the working group 2 can be seen clearly in the field of view of the camera at the same time, as shown in the initial position calibration and error measurement schematic diagrams of fig. 7A-7B;
4) taking a picture by a camera and measuring;
acquiring error compensation values (e1x _ i, e1y _ i) of the center of the camera view relative to RefPoint3 at the moment; and the error compensation value (e2x _ i, e2y _ i) of RefPoint2 with respect to RefPoint3 at this time;
and (3) repeatedly executing the operations 1) to 4) at all the grid points to be measured until the error compensation values of all the grid points to be measured are measured, and generating a positioning error compensation table according to the error compensation values of all the grid points to be measured.
Wherein, the positioning error compensation table is shown as the following table:
in this embodiment, since the motion set and the working set have a fixed relative position relationship, the error compensation value of the working set can be determined by the error compensation value at the axial position of the motion set.
As shown in fig. 9, the error compensation application is schematically illustrated, and the specific steps of the error compensation application are as follows:
during actual work, the standard plate is removed from the working area 901 of the workbench 900, and the actual workpiece is placed in the working area;
RefPoint1 of the working group 1 and RefPoint2 of the working group 2 need to be aligned to the working point 902 of the actual workpiece at the same time to assist in working; assuming that the displacement deviation of the actual working point relative to the center of the (Mo, No) th RefPoint3 is (Xmr, Ynr);
when the device has no error at all, the motion group 1 moves to (Xo1+ Xmr-Xoft, Yo1+ Ynr-Yoft), and the motion group 2 moves to (Xo2+ Xmr, Yo2+ Ynr), the RefPoint1 of the working group 1 and the RefPoint2 of the working group 2 are completely aligned, but if there is a positioning error, precise cooperation can be realized by the following operations:
1) acquiring A, B, C, D of 4 grid points to be measured near the actual working point from the error compensation table; the distribution relationship between the grid points to be measured and the actual working points is shown in fig. 11.
2) And linearly calculating the coordinates of each working group at the actual working point according to the error compensation value of each working group at each grid point to be detected.
Wherein, the coordinates of the camera at the actual working point are (X1d, Y1d), that is, the axial position of the camera controlled by the motion group 1 at the actual working point is (X1d, Y1 d); the coordinate of the working group 2 at the actual working point is (X2d, Y2d), that is, the axial position of the working group 2 at the time of controlling the working group 2 at the actual working point is (X2d, Y2 d).
Specifically, the coordinates of the camera at the 4 grid points are (X1_ i1, Y1_ i1), (X1_ i2, Y1_ i2), (X1_ i3, Y1_ i3), (X1_ i4, and Y1_ i4), respectively; correspondingly, the error compensation values of the cameras at the 4 grid points are (e1x _ i1, e1y _ i1), (e1x _ i2, e1y _ i2), (e1x _ i3, e1y _ i3), (e1x _ i4, e1y _ i 4);
similarly, the coordinates of the working group 2 at the 4 grid points are (X2_ i1, Y2_ i1), (X2_ i2, Y2_ i2), (X2_ i3, Y2_ i3), (X2_ i4, and Y2_ i4), respectively; correspondingly, the error compensation values of the working group 2 at the 4 grid points are (e2x _ i1, e2y _ i1), (e2x _ i2, e2y _ i2), (e2x _ i3, e2y _ i3), (e2x _ i4, and e2y _ i4), respectively.
The embodiment corrects the coordinates of the working group by using the error compensation values and the coordinates of a plurality of grid points, and the specific principle is as follows based on the linear equal-ratio scaling characteristic of the positioning error.
As shown in fig. 10A to 10B, schematic diagrams of coordinate relationships between the actual substrate and the ideal substrate are shown, in which the offset amount of the working point Padn (XPadn, YPadn) on the actual substrate 1000 with respect to the reference point Padnj on the ideal substrate 1001 in the X-axis and Y-axis directions is (XPadn _ ofs, YPadn _ ofs); the lengths of the ideal substrate in the X-axis and Y-axis directions are (Xglass _ length, Yglass _ width), respectively.
The four Mark points selected on the actual substrate are Mark1(Xp1, Yp1), Mark2(Xp2, Yp2), Mark3(Xp3, Yp3) and Mark4(Xp4, Yp4), and the four Mark points selected on the actual substrate correspond to the four Mark points on the ideal substrate one by one, wherein the four Mark points on the ideal substrate are Mark1j (0,0), Mark2j (Xglass _ length,0), Mark3j (0, Yglass _ width) and Mark4j (Xglass _ length, Yglass _ width).
Correcting the coordinate of any working point R on the actual substrate by the following formula to obtain corrected coordinates (X, Y);
X＝(1-α1)(1-α2)Xp1+α1×(1-α2)Xp2+(1-α1)α2×Xp3+α1×α2×Xp4；
Y＝(1-α1)(1-α2)Yp1+α1(1-α2)Yp2+(1-α1)α2×Yp3+α1×α2×Yp4。
the calibration method in the embodiment of the present invention is described in detail below by taking the error compensation values of 4 grid points corresponding to the working points and 2 working groups working together as an example, where the calibration coordinates of any point are determined based on the linear scaling characteristics of the positioning error according to the ideal coordinates and the actual coordinates of the 4 points.
As shown in the grid point error compensation value acquisition diagram of fig. 11, the axial positions (X1D, Y1D) of the working group 1 and the axial positions (X2D, Y2D) of the working group 2 at the actual working point 1100 (corrected working point) are linearly calculated from the errors at 4 grid points (grid point a, grid point B, grid point C, grid point D), and the coordinates of the working group 1 at the 4 grid points are (X1_ i1, Y1_ i1), (X1_ i2, Y1_ i2), (X1_ i3, Y1_ i3), (X1_ i4, Y1_ i4), respectively; correspondingly, the error compensation values of the working group 1 at the 4 grid points are (e1x _ i1, e1y _ i1), (e1x _ i2, e1y _ i2), (e1x _ i3, e1y _ i3), (e1x _ i4, e1y _ i 4); similarly, the coordinates of the working group 2 at the 4 grid points are (X2_ i1, Y2_ i1), (X2_ i2, Y2_ i2), (X2_ i3, Y2_ i3), (X2_ i4, and Y2_ i4), respectively; correspondingly, the error compensation values of the working group 2 at the 4 grid points are (e2x _ i1, e2y _ i1), (e2x _ i2, e2y _ i2), (e2x _ i3, e2y _ i3), (e2x _ i4, e2y _ i 4); the specific calculation method is as follows:
X1d＝(1-α1)*(1-α2)*(X1_i1-e1x_i1)+α1*(1-α2)*(X1_i2-e1x_i2)+(1-α1)*α2*(X1_i3-e1x_i3)+α1*α2*(X1_i4-e1x_i4)-Xoft；
Y1d＝(1-α1)*(1-α2)*(Y1_i1-e1y_i1)+α1*(1-α2)*(Y1_i2-e1y_i2)+(1-α1)*α2*(Y1_i3-e1y_i3)+α1*α2*(Y1_i4-e1y_i4)-Yoft；
X2d＝(1-α1)*(1-α2)*(X2_i1-e2x_i1)+α1*(1-α2)*(X2_i2-e2x_i2)+(1-α1)*α2*(X2_i3-e2x_i3)+α1*α2*(X2_i4-e2x_i4)；
Y2d＝(1-α1)*(1-α2)*(Y2_i1-e2y_i1)+α1*(1-α2)*(Y2_i2-e2y_i2)+(1-α1)*α2*(Y2_i3-e2y_i3)+α1*α2*(Y2_i4-e2y_i4)；
α1＝(Xo1+Xmr-X1_i1)/(X1_i2-X1_i1)＝(Xo2+Xmr–X2_i1)/(X2_i2-X2_i1)；
α2＝(Yo1+Ynr-Y1_i1)/(Y1_i3-Y1_i1)＝(Yo2+Ynr–Y2_i1)/(Y2_i3-Y2_i1)。
3) and controlling the motion group 1 to move to (X1d, Y1d) and controlling the motion group 2 to move to (X2d, Y2d), so as to realize precise cooperative work of the work group 1 and the work group 2.
As shown in fig. 12, an embodiment of the present invention further provides a specific implementation process of positioning error correction, where the specific implementation steps of the process are as follows:
and step 1205, based on the linear scaling characteristic of the positioning error, correcting the coordinates of each working group moving to the working point according to the coordinates of each working group at a plurality of grid points and the corresponding error compensation value.
The embodiment of the invention also provides a standard plate, wherein grid points with marked patterns are distributed on the standard plate, and the standard plate is used for measuring error compensation values of a plurality of working groups moving to the grid points. The schematic diagram of the standard plate is shown in fig. 3, and grid points 301 with a marked pattern are distributed on the standard plate 300.
Example 2
Based on the same inventive concept, the embodiment of the present invention further provides a device for correcting a positioning error, and since the device is the device in the method in the embodiment of the present invention, and the principle of the device for solving the problem is similar to that of the method, the implementation of the apparatus may refer to the implementation of the method, and repeated details are not repeated.
As shown in fig. 13, the apparatus includes:
an acquisition unit 1300 configured to acquire error compensation values of a plurality of grid points closest to a working point on a table from an error compensation set including error compensation values of a plurality of working groups at different grid points, the error compensation values being determined by position images of mark points of the plurality of working groups and grid points on a standard board that is located on the table and covers a working area of the table, the mark points being photographed by a camera;
a correcting unit 1301, configured to correct the coordinates of the plurality of working groups moved to the working point according to the error compensation values of the plurality of grid points.
As an alternative embodiment, the error compensation value is determined by:
if the camera and the working groups move to the grid point to be detected, and the vision center of the camera comprises the mark points of the working groups and the grid point to be detected, determining error compensation values of the mark points of the working groups relative to the center of the grid point to be detected according to position images of the mark points of the working groups and the grid point to be detected on the standard plate, which are shot by the camera, wherein the mark points are located on the transparent material of the working groups.
As an optional implementation manner, before the camera and the plurality of workgroups move to the grid point to be measured, the acquiring unit is further configured to:
determining initial coordinates of a plurality of workgroups, wherein the initial coordinates are determined when the center of the field of view of the camera and the index points of the plurality of workgroups are aligned with a central grid point on the standard plate;
determining the working group standard coordinates of the working groups respectively moving to the grid points to be measured according to the initial coordinates of the working groups;
determining error compensation values of the mark points of the plurality of working groups relative to the center of the grid point to be measured, including:
and when the mark points of the plurality of working groups are positioned in the corresponding working group standard coordinates, determining error compensation values of the plurality of working groups relative to the centers of the grid points to be detected.
As an optional implementation manner, the obtaining unit is further configured to:
and determining a camera error compensation value of the center of the visual field of the camera relative to the center of the grid point to be measured.
As an alternative embodiment, the camera has a fixed relative positional relationship with at least one workgroup; the correction unit is further configured to:
correcting the coordinates of the center of the field of view of the camera according to the camera error compensation values of the camera at different grid points;
and correcting the coordinates of at least one working group with a fixed relative position relation with the camera according to the corrected coordinates of the camera and the fixed relative position relation.
As an optional implementation, the correction unit is specifically configured to:
and correcting the coordinates of each working group moved to the working points according to the coordinates of each working group at a plurality of grid points and the corresponding error compensation values based on the linear equal-ratio scaling characteristics of the positioning errors.
Example 3
Based on the same inventive concept, the embodiment of the present invention further provides a device for correcting a positioning error, and since the device is a device in the method in the embodiment of the present invention, and a principle of the device for solving the problem is similar to that of the method, the implementation of the device may refer to the implementation of the method, and repeated parts are not described again.
As shown in fig. 14, the apparatus comprises a processor 1400 and a memory 1401, the memory being adapted to store programs executable by the processor, the processor being adapted to read the programs in the memory and to perform the following steps:
acquiring error compensation values of a plurality of grid points closest to a working point on a workbench from an error compensation set, wherein the error compensation set comprises error compensation values of a plurality of working groups at different grid points, the error compensation values are determined by position images of mark points of the plurality of working groups and grid points on a standard plate shot by a camera, and the standard plate is positioned on the workbench and covers a working area of the workbench;
correcting the coordinates of the plurality of work groups moved to the work point according to the error compensation values of the plurality of grid points.
As an alternative embodiment, the error compensation value is determined by:
if the camera and the working groups move to the grid point to be detected, and the vision center of the camera comprises the mark points of the working groups and the grid point to be detected, determining error compensation values of the mark points of the working groups relative to the center of the grid point to be detected according to position images of the mark points of the working groups and the grid point to be detected on the standard plate, which are shot by the camera, wherein the mark points are located on the transparent material of the working groups.
As an optional implementation manner, before the camera and the plurality of workgroups move to the grid point to be measured, the processor is further configured to execute:
determining initial coordinates of a plurality of workgroups, wherein the initial coordinates are determined when the center of the field of view of the camera and the index points of the plurality of workgroups are aligned with a central grid point on the standard plate;
determining the working group standard coordinates of the working groups respectively moving to the grid points to be measured according to the initial coordinates of the working groups;
determining error compensation values of the mark points of the plurality of working groups relative to the center of the grid point to be measured, including:
and when the mark points of the plurality of working groups are positioned in the corresponding working group standard coordinates, determining error compensation values of the plurality of working groups relative to the centers of the grid points to be detected.
As an optional implementation, the processor is further configured to perform:
and determining a camera error compensation value of the center of the visual field of the camera relative to the center of the grid point to be measured.
As an alternative embodiment, the camera has a fixed relative positional relationship with at least one workgroup; the processor is further configured to perform:
correcting the coordinates of the center of the field of view of the camera according to the camera error compensation values of the camera at different grid points;
and correcting the coordinates of at least one working group with a fixed relative position relation with the camera according to the corrected coordinates of the camera and the fixed relative position relation.
As an optional implementation, the processor is configured to perform:
and correcting the coordinates of each working group moved to the working points according to the coordinates of each working group at a plurality of grid points and the corresponding error compensation values based on the linear equal-ratio scaling characteristics of the positioning errors.
Based on the same inventive concept, an embodiment of the present invention further provides a computer storage medium, on which a computer program is stored, which when executed by a processor implements the steps of the following method:
acquiring error compensation values of a plurality of grid points closest to a working point on a workbench from an error compensation set, wherein the error compensation set comprises error compensation values of a plurality of working groups at different grid points, the error compensation values are determined by position images of mark points of the plurality of working groups and grid points on a standard plate shot by a camera, and the standard plate is positioned on the workbench and covers a working area of the workbench;
correcting the coordinates of the plurality of work groups moved to the work point according to the error compensation values of the plurality of grid points.
As will be appreciated by one skilled in the art, embodiments of the present invention may be provided as a method, system, or computer program product. Accordingly, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present invention may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, optical storage, and the like) having computer-usable program code embodied therein.
The present invention is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the invention. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. A method of positioning error correction, the method comprising:
acquiring error compensation values of a plurality of grid points closest to a working point on a workbench from an error compensation set, wherein the error compensation set comprises error compensation values of a plurality of working groups at different grid points, the error compensation values are determined by position images of mark points of the plurality of working groups and grid points on a standard plate shot by a camera, and the standard plate is positioned on the workbench and covers a working area of the workbench;
correcting the coordinates of the plurality of work groups moved to the work point according to the error compensation values of the plurality of grid points.
2. The method of claim 1, wherein the error compensation value is determined by:
if the camera and the working groups move to the grid point to be measured, and the visual field of the camera comprises the mark points of the working groups and the grid point to be measured, determining error compensation values of the mark points of the working groups relative to the center of the grid point to be measured according to position images of the mark points of the working groups and the grid point to be measured on the standard plate, which are shot by the camera, wherein the mark points are located on the transparent material of the working groups.
3. The method of claim 2, wherein before the camera and the plurality of workgroups move to the grid point to be measured, further comprising:
determining initial coordinates of a plurality of workgroups, wherein the initial coordinates are determined when the center of the field of view of the camera and the index points of the plurality of workgroups are aligned with a central grid point on the standard plate;
determining the working group standard coordinates of the working groups respectively moving to the grid points to be measured according to the initial coordinates of the working groups;
determining error compensation values of the mark points of the plurality of working groups relative to the center of the grid point to be measured, including:
and when the mark points of the plurality of working groups are positioned in the corresponding working group standard coordinates, determining error compensation values of the plurality of working groups relative to the centers of the grid points to be detected.
4. The method of claim 2, wherein the determining the error compensation value of the landmark points of the plurality of workgroups relative to the center of the grid point to be measured further comprises:
and determining a camera error compensation value of the center of the visual field of the camera relative to the center of the grid point to be measured.
5. The method of claim 4, wherein the camera has a fixed relative positional relationship with at least one workgroup; further comprising:
correcting the coordinates of the center of the field of view of the camera according to the camera error compensation values of the camera at different grid points;
and correcting the coordinates of at least one working group with a fixed relative position relation with the camera according to the corrected coordinates of the camera and the fixed relative position relation.
6. The method of claim 1, wherein said correcting coordinates of said plurality of working groups moved to said working point according to error compensation values of said plurality of grid points comprises:
and correcting the coordinates of each working group moved to the working points according to the coordinates of each working group at a plurality of grid points and the corresponding error compensation values based on the linear equal-ratio scaling characteristics of the positioning errors.
7. A reticle based on the method according to any one of claims 1 to 6, wherein the reticle has grid points with a pattern of marks distributed thereon, the reticle being adapted to measure the error compensation values for a plurality of working groups moved to the grid points.
8. An apparatus for correcting a positioning error, the apparatus comprising:
an acquisition unit configured to acquire error compensation values of a plurality of grid points closest to a working point on a table from an error compensation set including error compensation values of a plurality of working groups at different grid points, the error compensation values being determined by position images of a mark point of the plurality of working groups and a grid point on a standard board that is located on the table and covers a working area of the table, the mark point being photographed by a camera;
a correction unit for correcting the coordinates of the plurality of work groups moved to the work point according to the error compensation values of the plurality of grid points.
9. An apparatus for positioning error correction, comprising a processor and a memory, said memory storing a program executable by said processor, said processor being adapted to read said program from said memory and to perform the steps of the method according to any one of claims 1 to 6.
10. A computer storage medium having a computer program stored thereon, the program, when executed by a processor, implementing the steps of the method according to any one of claims 1 to 6.
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