CN114509482A - NO (nitric oxide)xSensor chip performance analysis method and system - Google Patents
NO (nitric oxide)xSensor chip performance analysis method and system Download PDFInfo
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- CN114509482A CN114509482A CN202111680305.8A CN202111680305A CN114509482A CN 114509482 A CN114509482 A CN 114509482A CN 202111680305 A CN202111680305 A CN 202111680305A CN 114509482 A CN114509482 A CN 114509482A
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Abstract
The invention discloses a method and a system for analyzing the performance of a NOx sensor chip, which comprise the following steps: and (3) placing the sensor chip in an air atmosphere, and respectively carrying out electrode activation on the three working loops of the chip through cyclic voltammetry. Placing the sensor chip in an air atmosphere, carrying out cyclic voltammetry test between the common electrode and the first working electrode, and determining the working voltage E0 of the main pump; carrying out cyclic voltammetry test between the common electrode and the second working electrode to determine the working voltage E1 of the auxiliary pump; a cyclic voltammetry test was performed between the common electrode and the test electrode to determine the test voltage E2. Placing the chip in a NOx environment, and applying a main pump working voltage E0 to a first working circuit to form a main pump working current Ip 0; applying an auxiliary pump working voltage E1 to the second working circuit to form an auxiliary pump working current Ip 1; the main pump operating voltage E2 is applied to the test loop, resulting in a test current Ip 2. And judging that the chip is qualified when the effective current signals formed by the three loops can meet the design requirements of the sensor chip.
Description
Technical Field
The invention relates to a method and a system for analyzing the performance of a NOx sensor chip, and belongs to the technical field of gas sensors.
Background
With the publication of the pollutant emission standard of motor vehicles in the sixth stage of China, the environmental protection consciousness of people is continuously improved, and the emission of harmful components in automobile exhaust is more and more severe. The vehicle NOx sensor is used as a detection means of NOx in tail gas, and can timely and effectively monitor high-temperature tail gas. The sensor chip is used as a core element for detecting the performance of NOx, and the performance of the sensor chip directly determines the detection capability of the sensor. When the sensor chip works, the sensor chip consists of three working loops, and each working loop forms a three-electrode working system comprising a working electrode, a counter electrode and a reference electrode. When the chip works, the sensor detects NOx according to the sequence of the first loop, the second loop and the test loop. However, due to the limitations of structure, process level, etc., the vehicle NOx gas sensor is currently monopolized by foreign manufacturers, and the electrical performance of the sensor lacks a measurement and evaluation method and process, so that in order to meet the requirements of performance evaluation and analysis of the sensor, a reasonable detection method and process need to be established to guide the research work of the sensor.
Disclosure of Invention
The invention aims to provide a method for analyzing the performance of a NOx sensor chip, which can enable the sensor chip to quickly enter an optimal working state, can determine different optimal working conditions aiming at different chips and is used for measuring and evaluating the performance of the ceramic NOx sensor chip for vehicles.
Another object of the present invention is to provide a NOx sensor chip performance detection system suitable for use in the method.
In order to achieve the purpose, the invention adopts the following technical scheme:
a performance analysis method of a NOx sensor chip is characterized by comprising the following steps:
(1) placing the sensor chip in air, wherein the content of NOx in the air atmosphere is 0; performing cyclic voltammetry test between the common electrode and the first working electrode, forming a V-i0 curve in a loop, and measuring a voltage value E0 corresponding to a saturation current i0 as a main pump working voltage; performing cyclic voltammetry test between the common electrode and the second working electrode, forming a V-i1 curve in a loop, and measuring a voltage E1 corresponding to a saturation current i1 as an auxiliary pump working voltage; performing cyclic voltammetry test between the common electrode and the test electrode, forming a V-i2 curve in a loop, and measuring a voltage E2 corresponding to a saturation current i2 as a test voltage;
(2) the sensor chip is placed in an air atmosphere to work, a main pump working voltage E0, an auxiliary pump working voltage E1 and a test voltage E2 are applied to the common electrode, the first working electrode, the second working electrode and the test electrode respectively, and a main pump working current Ip0, an auxiliary pump working current Ip1 and a test current Ip2 are measured;
(3) putting the sensor chip into an NOx atmosphere for working, wherein the oxygen content in the NOx atmosphere is 0, and the NO content is 1000 ppm; respectively applying a main pump working voltage E0, an auxiliary pump working voltage E1 and a test voltage E2 between the common electrode and the first working electrode, the second working electrode and the test electrode, and measuring a main pump working current Ip0, an auxiliary pump working current Ip1 and a test current Ip 2;
(4) and when the main pump working voltage E0, the auxiliary pump working voltage E1 and the test voltage E2, the main pump working current Ip0, the auxiliary pump working current Ip1 and the test current Ip2 simultaneously meet the design requirements of the chip, the chip is judged to be qualified, and otherwise, the chip is judged to be unqualified.
Further, in the step (1), the sensor chip is first placed in an air atmosphere, activation tests are performed on the three circuits for 0.5 hour, and after the activation, measurements of the main pump operating voltage E0, the auxiliary pump operating voltage E1, and the test voltage E2 are performed. The activation test adopts cyclic voltammetry, the test voltage is-0.8V, the scanning rate is 0.1V/s, and the number of scanning turns is 100.
Further, in the step (1), the sensor chip is placed in an air atmosphere, and the chip is heated at a high temperature until the temperature reaches 650-850 ℃.
Further, when the sensor chip is tested, air and NOx standard gas are alternately introduced, and the working current is monitored all the time, namely, the step (2) and the step (3) are taken as a period, a plurality of periods are repeatedly carried out, and the average value of each working current obtained in the step (2) and the step (3) is respectively calculated. The NOx standard gas had an oxygen content of 0 and an NO content of 1000 ppm. By alternately introducing air and NOx standard gas, the current change trend of the sensor in different atmospheres can be obviously observed, and a dynamic response curve is obtained. Preferably, the process is repeated for 2-4 cycles and the resulting operating current is averaged.
Further, after the sensor chip is activated, in an air atmosphere, cyclic voltammetry tests are respectively carried out on the first working circuit, the second working circuit and the testing circuit, the testing voltage is-0.8V, and when the voltage is-0.5V, the chip is qualified when the working current is in the following range: the range of the main pump working current Ip0 is 1-6 mA, the range of the auxiliary pump working current Ip1 is 0.1-3 mA, and the range of the test current Ip2 is 0.1-3 mA.
Further, after the sensor is subjected to cyclic voltammetry, the sensor is placed in a NOx atmosphere, a main pump working voltage E0, an auxiliary pump working voltage E1 and a test voltage E2 are applied, and the chip is qualified when the working current is within the following range: the range of the main pump working current Ip0 is 0-4 mA, the range of the auxiliary pump working current Ip1 is 0-100 muA, and the range of the test current Ip2 is 0-100 muA.
Correspondingly, the invention provides a performance detection system of a NOx sensor chip, which comprises the following three parts:
the air distribution device is used for dynamically providing an air atmosphere and an NOx atmosphere; the NOx content in the air atmosphere is 0; the oxygen content in the NOx atmosphere is 0, and the NOx content is 1000 ppm; the gas distribution flow is 0-1000 mL/min;
the detection chamber is used for providing a stable heating and sealing cavity for the sensing chip; the cavity is heated to the temperature of 650-850 ℃; the sealed cavity is connected with a gas distribution system;
the electronic control unit is connected with the sensor chip and used for outputting a voltage signal and controlling the chip to work, extracting a current signal when the chip works and judging whether the performance of the chip to be tested meets the design requirement or not; the electric control unit comprises a host system and is connected with the gas distribution device to control the detection atmosphere.
The invention has the advantages that:
1. the invention relates to a performance analysis process of a sensor chip, which comprises the steps of respectively carrying out cyclic voltammetry on three working loops through cyclic voltammetry activation testing, so that voltage and current signals of the loops can be quickly stabilized, and the sensor chip can quickly enter the optimal working state.
2. The invention relates to a performance analysis process of a sensor chip, which comprises the steps of determining a main pump working voltage E0, an auxiliary pump working voltage E1 and a test voltage E2 through cyclic voltammetry testing, and can determine an optimal working condition in a targeted manner.
3. The test system can test chips without heating electrodes, and can test non-standard samples.
4. The invention relates to the test of a sensor chip in air and NOx atmosphere, the test result has contrast, and various chip performance analysis indexes and single electrode working performance analysis indexes are provided. By comparing the operating current ranges of the curves of V-i0, V-i1 and V-i2 in the air, whether the single electrode can work normally can be determined. When the V range is 0 to-0.8V, the i0 range is 1-6 mA, and the i1 range is 0.1-3 mA; the range of i2 is 0.1-3 mA, each loop is conducted, and the chip is qualified.
Drawings
Fig. 1 is a schematic diagram of a structure and an operating principle of a NOx sensor chip.
FIG. 2 is a schematic diagram of a NOx sensor chip detection system.
FIG. 3 is a flow chart illustrating a method for analyzing the performance of a NOx sensor chip.
FIG. 4 is a graph of the NOx sensor chip V-i0, V-i1, V-i 2.
Detailed Description
The invention is further illustrated by the following examples.
NOx sensor chip structure and theory of operation:
the sensor chip is a three-chamber structure, as shown in fig. 1. The specific working principle is as follows: when the device works, the reference electrode is in contact with air; a main pump working voltage E0, an auxiliary pump working voltage E1 and a test voltage E2 are applied respectively, and the stability of the applied voltage is ensured through feedback (V0, V1, V2 and Vref); after the gas is introduced, the main pump working circuit and the auxiliary pump working circuit finish the decomposition of impurity gas and oxygen, and finally the gas component at the testing electrode is NOx; the NOx gas reacts with the active ingredients in the test electrode to be decomposed into oxygen and nitrogen, and the NOx content is monitored by detecting the pumping current Ip2 of the oxygen generated by the decomposition.
Example 1
A performance detection system of a NOx sensor chip is specifically shown in FIG. 2 and comprises the following three parts:
the air distribution device is used for dynamically providing an air atmosphere and an NOx atmosphere; the NOx content in the air atmosphere is 0; the oxygen content in the NOx atmosphere is 0, and the NOx content is 1000 ppm; the gas distribution flow is 0-1000 mL/min;
the detection chamber is used for providing a stable heating and sealing cavity for the sensing chip; the heating temperature range of the heating cavity is 650-850 ℃; the sealed cavity is connected with a gas distribution system;
the electronic control unit is connected with the sensor chip and used for outputting a voltage signal and controlling the chip to work, extracting a current signal when the chip works and judging whether the performance of the chip to be tested meets the design requirement or not; the electric control unit comprises a host system and is connected with the gas distribution device to control the detection atmosphere.
As shown in fig. 3, a method for analyzing the performance of a NOx sensor chip specifically includes the following steps:
1. connecting a chip to be tested with an electric control unit, and placing the chip to be tested into a detection chamber;
2. connecting the detection chamber with a gas distribution device, and controlling the gas flow to be 500 mL/min;
3. placing the sensor chip in an air atmosphere, and heating to 750 ℃;
4. performing cyclic voltammetry test between the common electrode and the first working electrode through an electric control unit for 100 circles; performing cyclic voltammetry test between the common electrode and the second working electrode for 100 circles; performing cyclic voltammetry test between the common electrode and the test electrode for 100 circles;
5. performing cyclic voltammetry testing on the first loop through an electric control unit to obtain a V-i0 curve, wherein a saturated current i0 corresponds to a voltage value E0 as a main pump working voltage; performing cyclic voltammetry testing on the second loop to obtain a V-i1 curve, wherein the voltage E1 corresponding to the saturation current i1 is used as the working voltage of the auxiliary pump; and (3) performing cyclic voltammetry test on the test loop to obtain a V-i2 curve, wherein the saturation current i2 corresponds to the voltage E2 as a test voltage. As shown in FIG. 4, E0 is 0.3-0.4V, E1 is 0.35-0.45V, and E2 is 0.4-0.5V.
6. The sensor chip is placed in an air atmosphere to work, a main pump working voltage E0, an auxiliary pump working voltage E1 and a test voltage E2 are applied to the common electrode, the first working electrode, the second working electrode and the test electrode respectively, and a main pump working current Ip0, an auxiliary pump working current Ip1 and a test current Ip2 are measured. Wherein Ip0 is 1-6 mA, Ip1 is 0.1-3 mA, and Ip2 is 0.1-100 μ A.
7. An NOx atmosphere in which the oxygen content is 0 and the NO content is 1000ppm (NOx standard gas); and (3) putting the sensor chip into a NOx atmosphere for working, applying a main pump working voltage E0, an auxiliary pump working voltage E1 and a test voltage E2 between the common electrode and the first working electrode, the second working electrode and the test electrode respectively, and measuring a main pump working current Ip0, an auxiliary pump working current Ip1 and a test current Ip 2. Wherein, the chip is qualified when Ip0 is 0-4 mA, Ip1 is 0-100 muA, and Ip2 is 0-100 muA.
8. When the sensor chip is tested, air and NOx standard gas are alternately introduced, and the working current is monitored all the time.
9. When the chip works, the main pump working voltage E0, the auxiliary pump working voltage E1 and the test voltage E2 are measured, and when the measured main pump working current Ip0, the measured auxiliary pump working current Ip1 and the measured test current Ip2 all meet the design requirements, the chip is judged to be qualified, otherwise, the chip is judged to be unqualified.
10. In the air atmosphere, carrying out cyclic voltammetry tests on the first working loop, the second working loop and the test loop, wherein the test voltage is-0.8V, and when the voltage is-0.5V, the chip is qualified when the working current is in the following range: the range of the main pump working current Ip0 is 1-6 mA, the range of the auxiliary pump working current Ip1 is 0.1-3 mA, and the range of the test current Ip2 is 0.1-100 muA.
11. Respectively applying a main pump working voltage E0, an auxiliary pump working voltage E1 and a test voltage E2 to the NOx atmosphere, wherein the chip is qualified when the working current is in the following range: the range of the main pump working current Ip0 is 0-4 mA, the range of the auxiliary pump working current Ip1 is 0-100 muA, and the range of the test current Ip2 is 0-100 muA.
Claims (8)
1. A method for analyzing the performance of a NOx sensor chip is characterized by comprising the following steps:
(1) placing the sensor chip in an air atmosphere, wherein the NOx content in the air atmosphere is 0; performing cyclic voltammetry test between the common electrode and the first working electrode, forming a V-i0 curve in a loop, and measuring a voltage value E0 corresponding to a saturation current i0 as a main pump working voltage; performing cyclic voltammetry test between the common electrode and the second working electrode, forming a V-il curve by a loop, and measuring a voltage E1 corresponding to a saturation current i1 as an auxiliary pump working voltage; performing cyclic voltammetry test between the common electrode and the test electrode, forming a V-i2 curve in a loop, and measuring a voltage E2 corresponding to a saturation current i2 as a test voltage;
(2) the sensor chip is placed in an air atmosphere to work, a main pump working voltage E0, an auxiliary pump working voltage E1 and a test voltage E2 are applied to the common electrode, the first working electrode, the second working electrode and the test electrode respectively, and a main pump working current Ip0, an auxiliary pump working current Ip1 and a test current Ip2 are measured;
(3) putting the sensor chip into an NOx atmosphere for working, wherein the oxygen content in the NOx atmosphere is 0, and the NO content in the NOx atmosphere is 1000 ppm; respectively applying a main pump working voltage E0, an auxiliary pump working voltage E1 and a test voltage E2 between the common electrode and the first working electrode, the second working electrode and the test electrode, and measuring a main pump working current Ip0, an auxiliary pump working current Ip1 and a test current Ip 2;
(4) and when the main pump working voltage E0, the auxiliary pump working voltage E1 and the test voltage E2, the main pump working current Ip0, the auxiliary pump working current Ip1 and the test current Ip2 simultaneously meet the design requirements of the chip, the chip is judged to be qualified, and otherwise, the chip is judged to be unqualified.
2. The method for analyzing the performance of the NOx sensor chip according to claim 1, wherein in the step (1), the sensor chip is firstly placed in an air atmosphere, the cyclic voltammetry activation test is performed for 0.5 hour for each of the three circuits, and the measurement of the main pump working voltage E0, the auxiliary pump working voltage E1 and the test voltage E2 is performed after the activation.
3. The method for analyzing the performance of the NOx sensor chip according to claim 2, wherein in the step (1), the sensor chip is placed in an air atmosphere, and the chip is heated at a high temperature to a temperature of 650 to 850 ℃.
4. The method for analyzing the performance of the NOx sensor chip according to claim 1, wherein during the test of the sensor chip, air and the NOx standard gas are alternately introduced, and the monitoring of the operating current is performed all the time, that is, the step (2) and the step (3) are taken as one cycle, a plurality of cycles are repeatedly performed, and the average value of the operating currents obtained in the step (2) and the step (3) is calculated respectively.
5. The method for analyzing the performance of the NOx sensor chip according to claim 4, wherein the repeating is performed for 2 to 4 cycles.
6. The method for analyzing the performance of the NOx sensor chip according to claim 1, wherein after the sensor chip is activated, a cyclic voltammetry test is performed on the first working circuit, the second working circuit and the test circuit in an air atmosphere, the test voltage is-0.8 to 0.8V, and when the test voltage is-0.5V, the chip is qualified when the working current is within the following range: the range of the main pump working current Ip0 is 1-6 mA, the range of the auxiliary pump working current Ip1 is 0.1-3 mA, and the range of the test current Ip2 is 0.1-3 mA.
7. The method for analyzing the performance of the NOx sensor chip as claimed in claim 1, wherein after the sensor is subjected to cyclic voltammetry, the sensor is placed in a NOx atmosphere, a main pump working voltage E0, an auxiliary pump working voltage E1 and a test voltage E2 are applied, and the chip is qualified when the working current is within the following range: the range of the main pump working current Ip0 is 0-4 mA, the range of the auxiliary pump working current Ip1 is 0-100 muA, and the range of the test current Ip2 is 0-100 muA.
8. A performance detection system of a NOx sensor chip is characterized by comprising the following three parts:
the air distribution device is used for dynamically providing an air atmosphere and an NOx atmosphere; the NOx content in the air atmosphere is 0; the oxygen content in the NOx atmosphere is 0, and the NOx content is 1000 ppm; the gas distribution flow is 0-1000 mL/min;
the detection chamber is used for providing a stable heating and sealing cavity for the sensing chip; the heating temperature range of the cavity is 650-850 ℃; the sealed cavity is connected with a gas distribution system;
the electronic control unit is connected with the sensor chip and used for outputting a voltage signal and controlling the chip to work, extracting a current signal when the chip works and judging whether the performance of the chip to be tested meets the design requirement; the electric control unit comprises a host system and is connected with the gas distribution device to control the detection atmosphere.
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