CN114483531B - Horizontal exhaust method and horizontal exhaust table - Google Patents
Horizontal exhaust method and horizontal exhaust table Download PDFInfo
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- CN114483531B CN114483531B CN202111679111.6A CN202111679111A CN114483531B CN 114483531 B CN114483531 B CN 114483531B CN 202111679111 A CN202111679111 A CN 202111679111A CN 114483531 B CN114483531 B CN 114483531B
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- vacuum chamber
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- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000010438 heat treatment Methods 0.000 claims abstract description 21
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 17
- 239000010959 steel Substances 0.000 claims abstract description 17
- 238000001816 cooling Methods 0.000 claims abstract description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 24
- 229910052757 nitrogen Inorganic materials 0.000 claims description 9
- 108010083687 Ion Pumps Proteins 0.000 claims description 6
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 6
- 238000000605 extraction Methods 0.000 claims description 6
- 230000032683 aging Effects 0.000 abstract description 8
- 230000000740 bleeding effect Effects 0.000 abstract description 2
- 238000012360 testing method Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 230000002431 foraging effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002688 persistence Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/18—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use for specific elastic fluids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
Abstract
The application relates to the technical field of vacuum exhaust, in particular to a horizontal exhaust method and a horizontal exhaust table, wherein the horizontal exhaust method comprises the following steps: s1, providing an exhaust table, wherein the exhaust table is provided with a vacuum chamber; s2, placing the traveling wave tube in a vacuum chamber; s3, after the vacuum chamber is closed, vacuumizing the interior of the traveling wave tube, vacuumizing the vacuum chamber, and heating after the vacuum degree reaches a first set value; s4, stopping heating after the vacuum degree reaches a second set value, stopping vacuumizing the vacuum chamber, cooling, and opening the vacuum chamber after the temperature in the vacuum chamber reaches the set value; s5, mounting magnetic steel on the outer surface of the traveling wave tube, electrifying the traveling wave tube, and vacuumizing the interior of the traveling wave tube. The horizontal exhaust table comprises an oven, an inner vacuum assembly, an outer vacuum assembly and a supporting seat. The utility model provides an efficiency of evacuation of bleeding has been improved, has shortened the time of ageing exhaust.
Description
Technical Field
The application relates to the technical field of vacuum exhaust, in particular to a horizontal exhaust method and a horizontal exhaust table.
Background
The existing exhaust table generally comprises an oven, a vacuum assembly and the like, wherein the oven forms a vacuum chamber, and vacuum devices such as traveling wave tubes and the like can be placed in the vacuum chamber. After the vacuum chamber is closed, the vacuum assembly is pumped to exhaust the traveling wave tube. After a certain vacuum degree is reached, the oven is cooled, after the cooling is completed, the vacuum chamber is opened, the traveling wave tube is taken down from the exhaust table, and then the traveling wave tube is aged by adopting the titanium pump. This process takes a lot of time, the efficiency of pumping and evacuating is low, and the time for aging the exhaust gas is long.
Disclosure of Invention
In order to solve the technical problems, the application provides a horizontal exhaust method and a horizontal exhaust table, so that the efficiency of air suction and exhaust is improved, the time of aging exhaust is shortened, and the problems in the prior art are effectively solved.
In order to solve the above-mentioned problem, the present application provides a horizontal exhaust method, including:
s1, providing an exhaust table, wherein the exhaust table is provided with a vacuum chamber, and the vacuum chamber is provided with an inner vacuum exhaust port and an outer vacuum exhaust port;
s2, placing a traveling wave tube in the vacuum chamber, and enabling the interior of the traveling wave tube to be communicated with the inner vacuum exhaust port;
s3, after the vacuum chamber is closed, vacuumizing the interior of the traveling wave tube through the inner vacuum exhaust port, vacuumizing the vacuum chamber through the outer vacuum exhaust port, and heating after the vacuum degree reaches a first set value;
s4, stopping heating after the vacuum degree reaches a second set value, stopping vacuumizing the vacuum chamber, then cooling, and opening the vacuum chamber after the temperature in the vacuum chamber reaches the set value;
s5, mounting magnetic steel on the outer surface of the traveling wave tube, electrifying the traveling wave tube, and vacuumizing the interior of the traveling wave tube.
Further, the heating temperature is 500-600 ℃, and before the vacuum chamber is opened, the external vacuumizing time of the traveling wave tube is 0.4-0.6 hours, and the internal vacuumizing time of the traveling wave tube is 0.4-0.6 hours.
Further, in S5, the time of evacuating the traveling wave tube is 5 hours to 6 hours.
Further, in S4, the cooling method is to introduce nitrogen gas into the vacuum chamber, and the nitrogen gas circulates in the vacuum chamber.
The application also provides a horizontal exhaust station, comprising:
the oven forms a vacuum chamber which can be opened or closed, the oven is provided with an inner vacuum exhaust port and an outer vacuum exhaust port which are communicated with the vacuum chamber, and a heating piece is arranged in the oven;
the inner vacuum assembly is provided with an inner vacuum extraction opening communicated with the inner vacuum exhaust opening;
the outer vacuum assembly is provided with an outer vacuum extraction opening communicated with the outer vacuum exhaust opening;
the support seat is arranged at the bottom of the oven and supports the two ends of the traveling wave tube so that the traveling wave tube is in a substantially horizontal state.
Further, the horizontal exhaust table further comprises a quick cooling assembly, and the quick cooling assembly is communicated with the oven to introduce nitrogen into the vacuum chamber.
Further, the oven comprises a separable box body and a bottom plate, the supporting seat is arranged on the bottom plate, the horizontal exhaust table further comprises a lifting piece, and the lifting piece drives the box body to move vertically.
Further, the inner vacuum assembly comprises a pre-vacuumizing piece and a main vacuumizing piece, wherein the pre-vacuumizing piece comprises a molecular pump and a dry pump which are connected in series, and the main vacuumizing piece is a getter ion pump; the outer vacuum assembly includes a mechanical pump and a molecular pump in series.
Further, the horizontal exhaust station still includes clamping assembly, clamping assembly locates the side of supporting seat, clamping assembly includes:
the sliding rail extends along the supporting seat;
the first telescopic rod extends vertically and is connected to the sliding rail in a sliding manner;
the second telescopic rod extends transversely and is fixed at the end part of the first telescopic rod;
the middle part of the rotating part is hinged to the end part of the second telescopic rod;
the two electric clamping jaws are respectively arranged at two ends of the rotating part, and the two electric clamping jaws are oppositely arranged;
the first control rod is arranged at the end part of the first telescopic rod and extends along the sliding rail;
and the second control rod is arranged at one end of the rotating part and extends along the sliding rail.
Further, the supporting seat is arranged at the bottom of the oven at intervals, the sliding rail is arranged on the side of the supporting seat, and the first telescopic rod is detachably arranged on the sliding rail.
The beneficial effects of this application lie in, at traveling wave tube surface mounting magnet steel to carry out the discharge test with traveling wave tube circular telegram back, at this moment, can carry out the evacuation of bleeding of high negative pressure value in the traveling wave tube through vacuum assembly persistence, can strike the gas that breaks away from traveling wave tube inner wall by the electron and take away fast, compare in the mode that the titanium pump limit was used for an aging limit to bleed in the current process of aging, the very big improvement of high-power vacuum assembly is taken advantage of the evacuation efficiency, has reduced the time of aging exhaust. Meanwhile, in the process of connecting the traveling wave tube on the exhaust table, the positions of the magnetic steels can be adjusted by testing the data of the emitter and the collector so as to adjust the track of electrons in the traveling wave tube and improve the air stripping effect on the inner wall of the traveling wave tube. The traveling wave tube can be subjected to preliminary test, and electronic dynamic exhaust is realized. The horizontal exhaust method and the horizontal exhaust table effectively solve the problems in the prior art.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute an undue limitation to the application. In the drawings:
fig. 1 is a schematic structural diagram of a horizontal exhaust table according to an embodiment of the present application.
Fig. 2 is a schematic view of a part of a horizontal exhaust table according to an embodiment of the present application.
Fig. 3 is a schematic structural view of a clamping assembly in one state according to an embodiment of the present application.
Fig. 4 is a schematic diagram of a partial side view of the embodiment of fig. 3.
Fig. 5 is a schematic structural view of a clamping assembly in another state according to an embodiment of the present application.
Wherein: 1. an oven; 101. a vacuum chamber; 102. a case; 103. a bottom plate; 2. a heating member; 3. an inner vacuum assembly; 4. an outer vacuum assembly; 5. a support base; 6. a rapid cooling assembly; 7. a lifting member; 8. a clamping assembly; 801. a slide rail; 802. a first telescopic rod; 803. a second telescopic rod; 804. an electric clamping jaw; 805. a first control lever; 806. a second control lever; 807. a rotating part; 9. a traveling wave tube.
Detailed Description
In order to more clearly explain the general concepts of the present application, reference is made to the following detailed description, taken in conjunction with the accompanying drawings.
It should be noted that in the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, however, the present application may be practiced in other ways than as described herein, and therefore the scope of the present application is not limited to the specific embodiments disclosed below.
In addition, in the description of the present application, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," etc. indicate or refer to an azimuth or a positional relationship based on that shown in the drawings, and are merely for convenience of description and to simplify the description, and do not indicate or imply that the apparatus or element in question must have a specific azimuth, be configured and operated in a specific azimuth, and therefore should not be construed as limiting the present application.
In this application, unless specifically stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. However, it is noted that a direct connection indicates that two bodies connected together do not form a connection relationship by an excessive structure, but are connected to form a whole by a connection structure. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
In this application, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
In the present application, there is provided a horizontal type exhaust method including:
s1, providing an exhaust table, wherein the exhaust table is provided with a vacuum chamber 101, and the vacuum chamber 101 is provided with an inner vacuum exhaust port and an outer vacuum exhaust port;
s2, placing the traveling wave tube 9 in the vacuum chamber 101, and enabling the interior of the traveling wave tube 9 to be communicated with an inner vacuum exhaust port;
s3, after the vacuum chamber 101 is closed, vacuumizing the traveling wave tube 9 through an inner vacuum exhaust port, vacuumizing the vacuum chamber 101 through an outer vacuum exhaust port, and heating after the vacuum degree reaches a first set value;
s4, stopping heating after the vacuum degree reaches a second set value, stopping vacuumizing the vacuum chamber 101, cooling, and opening the vacuum chamber 101 after the temperature in the vacuum chamber 101 reaches the set value;
s5, mounting magnetic steel on the outer surface of the traveling wave tube 9, electrifying the traveling wave tube 9, and vacuumizing the interior of the traveling wave tube 9.
According to the horizontal type exhaust method, after the oven 1 is closed, the interior vacuum exhaust port and the exterior vacuum exhaust port are used for vacuumizing respectively, so that the interior of the traveling wave tube 9, the outer wall of the traveling wave tube 9 and the inner wall of the oven 1 are exhausted. When the vacuum degree reaches the first set value, heating is started, and oxidation of the traveling wave tube 9 and other components in the vacuum chamber 101 by heating can be prevented. The heating can enable the gas on the wall of the traveling wave tube 9 to be desorbed, and the desorbed gas is extracted, so that the vacuum degree is improved.
After cooling, the oven 1 is opened, magnetic steel is arranged on the outer surface of the traveling wave tube 9, and discharge test is performed after the traveling wave tube 9 is electrified, at the moment, the traveling wave tube 9 can be continuously evacuated by pumping air with a high negative pressure value through the vacuum component, and air separated from the inner wall of the traveling wave tube 9 by electronic beating can be rapidly pumped away. Meanwhile, in the process of connecting the traveling wave tube 9 on the exhaust table, the positions of the magnetic steels can be adjusted by testing the data of the emitter and the collector so as to adjust the track of electrons in the traveling wave tube 9 and improve the air stripping effect on the inner wall of the traveling wave tube 9. The traveling wave tube 9 can be subjected to preliminary test to realize electronic dynamic exhaust.
In a preferred embodiment, more specifically, the heating temperature is 500-600 ℃, and before the vacuum chamber 101 is opened, the time for evacuating the outside of the traveling wave tube 9 is 0.4-0.6 hours, and the time for evacuating the inside of the traveling wave tube 9 is 0.4-0.6 hours.
In a preferred embodiment, further specifically, in S5, the time for evacuating the interior of the traveling wave tube 9 is 5 hours to 6 hours.
In a preferred embodiment, further specifically, in S4, the cooling method is to introduce nitrogen gas into the vacuum chamber 101, and the nitrogen gas circulates in the vacuum chamber 101. The nitrogen is formed by converting liquid nitrogen, and can absorb heat of the wall of the oven 1 and the wall of the traveling wave tube 9 in the conversion process so as to quickly reduce the temperature and improve the efficiency, and the nitrogen can not oxidize the traveling wave tube 9 and components in the oven 1.
The application also provides a horizontal exhaust table, which comprises an oven 1, an inner vacuum assembly 3, an outer vacuum assembly 4 and a supporting seat 5 as shown in fig. 1 to 5. The oven 1 forms a vacuum chamber 101, the vacuum chamber 101 can be opened or closed, the oven 1 is provided with an inner vacuum exhaust port and an outer vacuum exhaust port which are communicated with the vacuum chamber 101, and a heating piece 2 is arranged in the oven 1; the inner vacuum assembly 3 is provided with an inner vacuum extraction port communicated with an inner vacuum exhaust port; the outer vacuum assembly 4 is provided with an outer vacuum extraction opening communicated with an outer vacuum exhaust opening; the supporting seat 5 is arranged at the bottom of the oven 1, and the supporting seat 5 supports two ends of the traveling wave tube 9 so that the traveling wave tube 9 is in a substantially horizontal state.
The horizontal exhaust station provided by the application, the support seat 5 can enable the traveling wave tube 9 to be in a substantially horizontal state, so that the traveling wave tube 9 is conveniently connected with an internal vacuum exhaust port, the internal vacuum assembly 3 is used for vacuumizing the interior of the traveling wave tube 9, more importantly, the support seat 5 provides conditions for dynamic exhaust, magnetic steel is conveniently installed on the outer surface of the traveling wave tube 9, and the traveling wave tube 9 is electrified for discharge testing. At this time, the inner vacuum component 3 can continuously exhaust and empty the traveling wave tube 9 with high negative pressure value, and the gas separated from the inner wall of the traveling wave tube 9 by the electronic impact can be rapidly exhausted, compared with the existing mode of exhausting by aging the titanium pump in the aging process, the high-power vacuum component greatly improves the efficiency of exhausting and empty, and shortens the time of aging and exhausting. Meanwhile, in the process of connecting the traveling wave tube 9 on the exhaust table, the positions of the magnetic steels can be adjusted by testing the data of the emitter and the collector so as to adjust the track of electrons in the traveling wave tube 9 and improve the air stripping effect on the inner wall of the traveling wave tube 9. The traveling wave tube 9 can be subjected to preliminary test to realize electronic dynamic exhaust.
The specific structure of the heating element 2 is not limited in this application, and a heating structure in the prior art may be used. In addition, the traveling wave tube 9 being in a substantially horizontal state means that a slight inclination angle is formed between the traveling wave tube 9 and the horizontal plane due to an error.
In a preferred embodiment, further specifically, the horizontal exhaust station further comprises a rapid cooling assembly 6, and the rapid cooling assembly 6 is communicated with the oven 1 to introduce nitrogen into the vacuum chamber 101. The nitrogen is formed by converting liquid nitrogen, and can absorb heat of the wall of the oven 1 and the wall of the traveling wave tube 9 in the conversion process so as to quickly reduce the temperature and improve the efficiency, and the nitrogen can not oxidize the traveling wave tube 9 and components in the oven 1.
In a preferred embodiment, further specifically, the oven 1 comprises a separable box 102 and a bottom plate 103, the support base 5 is disposed on the bottom plate 103, and the horizontal exhaust station further comprises a lifting member 7, and the lifting member 7 drives the box 102 to move vertically. The lifting member 7 drives the case 102 to move downward, so that the case 102 and the bottom plate 103 are covered together to close the vacuum chamber 101. The elevating member 7 drives the case 102 upward, and can separate the case 102 from the bottom plate 103 to open the vacuum chamber 101. After the box 102 moves upwards, the operation space is large, so that the traveling wave tube 9 and other components are convenient to arrange, and the traveling wave tube 9 is also convenient to take off from the bottom plate 103. Particularly, during dynamic exhaust, the magnetic steel is convenient to install and adjust in position.
The specific structure of the lifter 7 is not limited in this application. In the preferred embodiment, the lifting member 7 comprises a motor, a gear reducer, a left and right bevel gear pair, and two sets of lead screw nut pairs. The specific structure of the lifting member 7 is not shown in the drawings, and the person skilled in the art can select the structural form of the lifting member 7 according to the need.
In a preferred embodiment, further specifically, the inner vacuum assembly 3 comprises a pre-evacuation member comprising a molecular pump and a dry pump, and a main evacuation member comprising a getter ion pump; the outer vacuum assembly 4 includes a mechanical pump and a molecular pump.
When the interior of the traveling wave tube 9 is vacuumized, the molecular pump and the dry pump firstly vacuumize the interior of the traveling wave tube 9, and when the interior of the traveling wave tube 9 reaches a certain vacuum degree, the getter ion pump is started to vacuumize the interior of the traveling wave tube 9. The getter ion pump can ionize gas molecules and convey the gas molecules to the adsorption surface of the pump under the action of an electromagnetic field or an electric field so as to be trapped by the getter, thereby improving the vacuumizing effect. In the outer vacuum assembly 4, the mechanical pump and the molecular pump can improve the efficiency of pumping the gas of the vacuum chamber 101.
The specific structures of the molecular pump, the dry pump, the getter ion pump, the mechanical pump, and the molecular pump are not shown in the drawings, and those skilled in the art can use the structures and connection methods in the prior art.
In a preferred embodiment, further specifically, the horizontal exhaust station further includes a clamping assembly 8, the clamping assembly 8 is disposed at a side of the support base 5, and the clamping assembly 8 includes a sliding rail 801: a first telescopic link 802, a second telescopic link 803, a rotating portion 807, a motorized jaw 804, a first lever 805, a second lever 806. The sliding rail 801 extends along the supporting seat 5; the first telescopic rod 802 extends vertically and is connected to the sliding rail 801 in a sliding manner; a second telescoping rod 803 extends in the lateral direction and is fixed to the end of the first telescoping rod 802; the middle part of the rotating part 807 is hinged to the end part of the second telescopic rod 803; the two motorized clamping jaws 804 are respectively arranged at two ends of the rotating part 807; the first control rod 805 is fixed to an end of the first telescopic rod 802 and extends along the sliding rail 801; the second lever 806 is fixed to one end of the rotating portion 807 and extends along the slide rail 801.
When the magnetic steel is installed, the two electric clamping jaws 804 can respectively clamp the semi-annular magnetic steel, a worker can hold the first control rod 805 to push the first telescopic rod 802 to move to a specific position along the sliding rail 801 and vertically adjust the telescopic degree of the first telescopic rod 802 through the first control rod 805 so as to adjust the height of the rotating part 807, in addition, the worker can hold the second control rod 806 to transversely adjust the telescopic degree of the second telescopic rod 803 so as to adjust the distance between the rotating part 807 and the traveling wave tube 9, and the rotating angle of the rotating part 807 can be adjusted through the second control rod 806 so as to adjust the magnetic steel to a proper position, and the electric clamping jaws 804 are started to install the magnetic steel on the outer surface of the traveling wave tube 9. The staff passes through clamping assembly 8 installation, adjusts the position of magnet steel, and convenient operation can reduce the restriction of space to the staff, can improve the accuracy of installation moreover, can prevent in addition that the staff's hand from touching wire or other parts that have the installation hidden danger, improves the security.
It should be noted that, the specific structure of the electric clamping jaw 804 is not limited in this embodiment, and the electric clamping jaw 804 may be configured in the prior art, and may clamp or unclamp the magnetic steel and move toward the traveling wave tube 9.
More specifically, the support seats 5 are disposed at the bottom of the oven 1 at intervals, the side of the support seats 5 is provided with a sliding rail 801, and the first telescopic rod 802 is detachably mounted on the sliding rail 801. The first telescopic rod 802 can be detached from the sliding rail 801, and only the sliding rail 801 is left on the bottom plate 103, so that the electric clamping jaw 804 can be prevented from being damaged by heat in the process of heating and exhausting.
Note that, in this embodiment, the first telescopic link 802 and the sliding rail 801 are not limited to being detachable. For example, the sliding rail 801 is provided with a sliding groove, and the first telescopic rod 802 forms a sliding block, and the sliding block can slide in the sliding groove and can be detached from the sliding groove.
In this specification, each embodiment is described in a progressive manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment mainly describes differences from other embodiments. In particular, for system embodiments, since they are substantially similar to method embodiments, the description is relatively simple, as relevant to see a section of the description of method embodiments.
The foregoing is merely exemplary of the present application and is not intended to limit the present application. Various modifications and changes may be made to the present application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc. which are within the spirit and principles of the present application are intended to be included within the scope of the claims of the present application.
Claims (9)
1. A horizontal exhaust method, comprising:
s1, providing an exhaust table, wherein the exhaust table is provided with a vacuum chamber, and the vacuum chamber is provided with an inner vacuum exhaust port and an outer vacuum exhaust port;
s2, placing a traveling wave tube in the vacuum chamber, and enabling the interior of the traveling wave tube to be communicated with the inner vacuum exhaust port;
s3, after the vacuum chamber is closed, vacuumizing the interior of the traveling wave tube through the inner vacuum exhaust port, vacuumizing the vacuum chamber through the outer vacuum exhaust port, and heating after the vacuum degree reaches a first set value;
s4, stopping heating after the vacuum degree reaches a second set value, stopping vacuumizing the vacuum chamber, then cooling, and opening the vacuum chamber after the temperature in the vacuum chamber reaches the set value;
s5, mounting magnetic steel on the outer surface of the traveling wave tube, electrifying the traveling wave tube, and vacuumizing the interior of the traveling wave tube.
2. The horizontal exhausting method according to claim 1, wherein the heating temperature is 500 ℃ to 600 ℃, and the time for evacuating the outside of the traveling wave tube is 0.4 hours to 0.6 hours and the time for evacuating the inside of the traveling wave tube is 0.4 hours to 0.6 hours before the vacuum chamber is opened.
3. The horizontal exhausting method according to claim 1, wherein in S5, the time for evacuating the interior of the traveling wave tube is 5 hours to 6 hours.
4. The horizontal exhausting method according to claim 1, wherein in S4, the cooling method is to introduce nitrogen gas into the vacuum chamber, and the nitrogen gas circulates in the vacuum chamber.
5. A horizontal exhaust station, comprising:
the oven forms a vacuum chamber which can be opened or closed, the oven is provided with an inner vacuum exhaust port and an outer vacuum exhaust port which are communicated with the vacuum chamber, and a heating piece is arranged in the oven;
the inner vacuum assembly is provided with an inner vacuum extraction opening communicated with the inner vacuum exhaust opening;
the outer vacuum assembly is provided with an outer vacuum extraction opening communicated with the outer vacuum exhaust opening;
the support seat is arranged at the bottom of the oven and supports two ends of the traveling wave tube so that the traveling wave tube is in a substantially horizontal state;
the horizontal exhaust table also comprises a clamping assembly, the clamping assembly is arranged on the side of the supporting seat, and the clamping assembly comprises:
the sliding rail extends along the supporting seat;
the first telescopic rod extends vertically and is connected to the sliding rail in a sliding manner;
the second telescopic rod extends transversely and is fixed at the end part of the first telescopic rod;
the middle part of the rotating part is hinged to the end part of the second telescopic rod;
the two electric clamping jaws are respectively arranged at two ends of the rotating part, and the two electric clamping jaws are oppositely arranged;
the first control rod is arranged at the end part of the first telescopic rod and extends along the sliding rail;
and the second control rod is arranged at one end of the rotating part and extends along the sliding rail.
6. The horizontal exhaust station of claim 5 further comprising a rapid cooling assembly in communication with the oven for introducing nitrogen into the vacuum chamber.
7. The horizontal exhaust station of claim 5 wherein the oven comprises a separable housing and a base plate, the support base being disposed in the base plate, the horizontal exhaust station further comprising a lifter that drives the housing to move vertically.
8. The horizontal exhaust station of claim 5, wherein the inner vacuum assembly comprises a pre-evacuation element comprising a molecular pump and a dry pump in series and a main evacuation element being a getter ion pump; the outer vacuum assembly includes a mechanical pump and a molecular pump in series.
9. The horizontal exhaust station according to claim 5, wherein a plurality of support seats are arranged at the bottom of the oven at intervals, the slide rails are arranged on the sides of the support seats, and the first telescopic rods are detachably mounted on the slide rails.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111679111.6A CN114483531B (en) | 2021-12-31 | 2021-12-31 | Horizontal exhaust method and horizontal exhaust table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111679111.6A CN114483531B (en) | 2021-12-31 | 2021-12-31 | Horizontal exhaust method and horizontal exhaust table |
Publications (2)
| Publication Number | Publication Date |
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| CN114483531A CN114483531A (en) | 2022-05-13 |
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