CN114470869A - Activated carbon adsorption method for trichlorosilane adsorption impurity removal - Google Patents

Activated carbon adsorption method for trichlorosilane adsorption impurity removal Download PDF

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Publication number
CN114470869A
CN114470869A CN202210049781.8A CN202210049781A CN114470869A CN 114470869 A CN114470869 A CN 114470869A CN 202210049781 A CN202210049781 A CN 202210049781A CN 114470869 A CN114470869 A CN 114470869A
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Prior art keywords
adsorption
column shell
adsorption column
adsorbent
pipe
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Pending
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CN202210049781.8A
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Chinese (zh)
Inventor
陈锦溢
杨金杯
余美琼
杨圳
聂晨曦
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Fujian Polytechnic Normal University
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Fujian Polytechnic Normal University
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Priority to CN202210049781.8A priority Critical patent/CN114470869A/en
Publication of CN114470869A publication Critical patent/CN114470869A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D15/00Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08Selective adsorption, e.g. chromatography
    • B01D15/10Selective adsorption, e.g. chromatography characterised by constructional or operational features
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D15/00Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08Selective adsorption, e.g. chromatography
    • B01D15/10Selective adsorption, e.g. chromatography characterised by constructional or operational features
    • B01D15/16Selective adsorption, e.g. chromatography characterised by constructional or operational features relating to the conditioning of the fluid carrier
    • B01D15/161Temperature conditioning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D15/00Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08Selective adsorption, e.g. chromatography
    • B01D15/10Selective adsorption, e.g. chromatography characterised by constructional or operational features
    • B01D15/20Selective adsorption, e.g. chromatography characterised by constructional or operational features relating to the conditioning of the sorbent material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D15/00Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08Selective adsorption, e.g. chromatography
    • B01D15/10Selective adsorption, e.g. chromatography characterised by constructional or operational features
    • B01D15/20Selective adsorption, e.g. chromatography characterised by constructional or operational features relating to the conditioning of the sorbent material
    • B01D15/203Equilibration or regeneration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D15/00Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08Selective adsorption, e.g. chromatography
    • B01D15/10Selective adsorption, e.g. chromatography characterised by constructional or operational features
    • B01D15/24Selective adsorption, e.g. chromatography characterised by constructional or operational features relating to the treatment of the fractions to be distributed
    • B01D15/245Adding materials to the effluents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0002Casings; Housings; Frame constructions
    • B01D46/0004Details of removable closures, lids, caps or filter heads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/24Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
    • B01D46/2403Particle separators, e.g. dust precipitators, using rigid hollow filter bodies characterised by the physical shape or structure of the filtering element
    • B01D46/2411Filter cartridges

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Silicon Compounds (AREA)

Abstract

The invention relates to an activated carbon adsorption method for trichlorosilane adsorption impurity removal, which comprises the following steps: the top and the bottom of the adsorption column shell are closed; an outer coil pipe is wound on the outer wall of the adsorption column shell; the upper part of the adsorption column shell is provided with an adsorbent inlet; the bottom of the adsorption column shell is provided with an adsorbent discharge port, the adsorbent discharge port is connected with an adsorbent discharge pipe, the lower part of the adsorption column shell is provided with a feeding pipe type distributor, the upper part of the adsorption column shell is provided with a discharging pipe type distributor, and the upper part of the adsorption column shell is provided with a tail gas outlet filter pipe; the invention replaces the original supporting plate filtering structure by combining the tubular distributor and the filtering cap, optimizes the adsorbent discharge structure, and has the advantages of high safety, easy disassembly, uniform liquid distribution and high interception efficiency.

Description

Activated carbon adsorption method for trichlorosilane adsorption impurity removal
Technical Field
The invention relates to the field of chemical equipment, in particular to an activated carbon adsorption method for trichlorosilane adsorption impurity removal.
Background
The polycrystalline silicon is used as a raw material for photovoltaic and electronic industries and is obtained by depositing rectified high-purity trichlorosilane and hydrogen in a reducing furnace under a high-temperature and high-pressure environment by adopting a vapor deposition method. Therefore, the content of trace impurities in the trichlorosilane material is a main factor influencing the quality of the polycrystalline silicon product. Boron is used as a main impurity in the trichlorosilane, and is mainly removed by adopting a rectification process and a method of carrying a large amount of trichlorosilane, and the method sacrifices the utilization rate of the trichlorosilane. In order to reduce material consumption, the original trichlorosilane which needs to be discharged outside needs to be adsorbed and boron removed by a coupling adsorption process, and then the trichlorosilane can be recycled. The modified coconut shell activated carbon for adsorbing and removing boron from trichlorosilane is prepared by activating and modifying under the high-temperature anoxic condition, has the advantages of high adsorption rate, large adsorption capacity and the like for boron impurities, is nonflammable, and has high safety.
The trichlorosilane system has the physical properties of flammability, explosiveness and need to isolate air and moisture, and puts higher requirements on the structure, the filling and the discharging modes of the adsorption column in order to ensure the safety of the production process. The fixed support plate, the magnetic ball filling of different specifications, the filter screen and other structures of the original adsorption column are difficult to adapt to the working condition. Therefore, it is required to develop an adsorption column structure and internals having high safety in use and loading and unloading, good distribution uniformity, high interception efficiency, and low maintenance cost.
Disclosure of Invention
Technical problem to be solved
In order to solve the problems in the prior art, the invention provides an activated carbon adsorption method for trichlorosilane adsorption impurity removal.
(II) technical scheme
In order to achieve the purpose, the invention adopts the main technical scheme that:
an activated carbon adsorption method for trichlorosilane adsorption impurity removal comprises the following steps: the activated carbon adsorption device comprises an adsorption column shell, wherein the top and the bottom of the adsorption column shell are closed; an outer coil pipe is wound on the outer wall of the adsorption column shell; the upper part of the adsorption column shell is provided with an adsorbent inlet; the adsorption column comprises an adsorption column shell and is characterized in that an adsorbent unloading port is formed in the bottom of the adsorption column shell, an adsorbent unloading pipe is connected to the adsorbent unloading port, a feeding pipe type distributor is arranged on the lower portion of the adsorption column shell, a discharging pipe type distributor is arranged on the upper portion of the adsorption column shell, and a tail gas outlet filter pipe is arranged on the upper portion of the adsorption column shell.
Furthermore, the feeding pipe type distributor comprises a feeding pipe type distribution pipeline and a filter cap which is arranged on the feeding pipe type distribution pipeline and used for intercepting, and the feeding pipe type distribution pipeline is connected with the material inlet of the adsorption column shell through a flange; the discharge pipe type distributor comprises a discharge pipe type distribution pipeline and a filter cap arranged on the discharge pipe type distribution pipeline and used for intercepting, and the discharge pipe type distribution pipeline is connected with a material outlet of the adsorption column shell through a flange.
Furthermore, the structure of the discharge pipe type distribution pipeline is symmetrical to that of the feed pipe type distribution pipeline, the feed pipe type distribution pipeline comprises a main pipe, and two ends of the main pipe are closed ends; a plurality of branch pipes are respectively arranged on two sides of the main pipe at intervals, the branch pipes are mutually and vertically communicated with the main pipe, and the tail ends of the branch pipes are closed; a plurality of branch pipes on the same side are fixed through a connecting plate; a plurality of sharp holes are arranged on each branch pipe at intervals, and each sharp hole is connected with a filter cap; the main pipe is connected with a material pipe for feeding or discharging.
Further, the filtering cap comprises a screw rod and a cap head connected with the screw rod, and the screw rod is connected with the orifice.
Furthermore, the diameter of the cap head is 70mm, the filtering gap is 0.25mm, and the height of the cap head is 100 mm; the screw rod adopts external screw thread M32, and the height is 55 mm.
Furthermore, the tail end of the tail gas outlet filter pipe is closed, through holes are uniformly formed in the surface of the tail gas outlet filter pipe, then the tail gas outlet filter pipe is wrapped by a silk screen, the silk screen and the surface of the tail gas outlet filter pipe are welded according to a quincunx lattice, and the through holes are avoided by spot welding.
Further, the diameter of the through holes is 12mm, and the number of the through holes is 12; the screen is a double-layer 150 mesh screen.
Furthermore, the bottom of the adsorption column shell is of an inverted cone structure, and the cone angle of the adsorption column shell is 120 degrees; the adsorption column shell is characterized in that an adsorbent unloading opening is formed in the conical bottom of the inverted conical structure at the bottom of the adsorption column shell, an adsorbent unloading pipe is connected to the adsorbent unloading opening, and the central line of the adsorbent unloading pipe and the vertical line form an included angle of 120 degrees.
Furthermore, the central line of the adsorbent discharge pipe and the vertical line form an included angle of 120 degrees; the tail end of the adsorbent discharge pipe is welded with a vertically downward connecting pipe branch which forms an included angle of 90 degrees with the adsorbent discharge pipe, and the connecting pipe branch is externally connected with a Y-shaped filter of a 150-mesh wire mesh.
Further, the side of the adsorption column shell is connected with a liquid level meter.
(III) advantageous effects
The invention has the beneficial effects that: 1. the outer coil pipe structure of the adsorption column shell is convenient for temperature control of the adsorption column shell, and the feeding safety and the regeneration efficiency are improved.
2. The inverted cone structure and the adsorbent discharge pipe at the lower part of the adsorption column shell are designed, so that the discharge of the adsorbent is facilitated, and the residue is avoided.
3. The tail end of the adsorbent discharge pipe is welded with a vertically downward connecting pipe branch, so that all materials can be discharged before the adsorbent is discharged, and the operation safety is improved.
4. The structure that tubular distributor and filter cap combined together has replaced the backup pad, and equipment intensity is high, the dismantlement is convenient, has improved liquid distribution's homogeneity and interception efficiency simultaneously.
5. The columnar filtering structure adopted by the tail gas outlet improves the flux of gas and ensures the interception efficiency.
Drawings
FIG. 1 is a schematic structural diagram of one embodiment of the present invention;
FIG. 2 is a front view of a feed tube distributor configuration according to one embodiment of the present invention;
FIG. 3 is a top view of a feed tube distributor configuration according to one embodiment of the present invention;
FIG. 4 is a front view of a discharge tube distributor configuration according to one embodiment of the present invention;
FIG. 5 is a top view of a discharge tube distributor configuration according to one embodiment of the present invention;
FIG. 6 is a schematic diagram of a filter cap configuration according to one embodiment of the present invention;
FIG. 7 is a schematic view of the filter cap in an installed state according to one embodiment of the present invention;
FIG. 8 is a cross-sectional view of a structure of a tail gas outlet filter pipe according to an embodiment of the present invention;
fig. 9 is a schematic view of direction E in fig. 8.
Detailed Description
For the purpose of better explaining the present invention and to facilitate understanding, the present invention will be described in detail by way of specific embodiments with reference to the accompanying drawings.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "provided," "connected," and the like are to be construed broadly, such as "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
An activated carbon adsorption method for trichlorosilane adsorption impurity removal according to an embodiment of the present invention is shown in fig. 1, and includes: the activated carbon adsorption device comprises an adsorption column shell W1, wherein the top and the bottom of the adsorption column shell W1 are closed; an outer coil pipe W9 is wound on the outer wall of the adsorption column shell W1; the upper part of the adsorption column shell W1 is provided with an adsorbent inlet W7 for filling activated carbon adsorbent.
Specifically, as shown in fig. 1, the bottom of the adsorption column casing W1 is an inverted cone-shaped structure, and its cone angle is 120 °; an adsorbent discharge opening is formed in the cone bottom of the inverted cone structure at the bottom of the adsorption column shell W1, an adsorbent discharge pipe W5 is connected to the adsorbent discharge opening, and the central line of the adsorbent discharge pipe W5 forms an included angle of 120 degrees with the vertical line; the tail end of the adsorbent discharge pipe W5 is welded with a vertically downward connecting pipe branch which forms an included angle of 90 degrees with the adsorbent discharge pipe W5, and the connecting pipe branch is externally connected with a Y-shaped filter of a 150-mesh wire mesh.
Further, a liquid level meter W8 is connected to a side edge of the adsorption column casing W1 for observing the height of the liquid-phase material in the adsorption column casing W1.
Specifically, as shown in fig. 2-5, a feed pipe type distributor W2 is arranged at the lower part of the adsorption column shell W1, a discharge pipe type distributor W3 is arranged at the upper part of the adsorption column shell W1, the feed pipe type distributor W2 comprises a feed pipe type distribution pipeline and a filter cap W6 arranged on the feed pipe type distribution pipeline for interception, and the feed pipe type distribution pipeline is connected with the material inlet of the adsorption column shell W1 through a flange; the discharge pipe type distributor W3 comprises a discharge pipe type distribution pipeline and a filter cap W6 arranged on the discharge pipe type distribution pipeline for interception, and the discharge pipe type distribution pipeline is connected with the material outlet of the adsorption column shell W1 through a flange; the structure of the discharge pipe type distribution pipeline is symmetrical to that of the feed pipe type distribution pipeline, the feed pipe type distribution pipeline comprises a main pipe 21, and two ends of the main pipe 21 are closed ends; a plurality of branch pipes 22 are respectively arranged on two sides of the main pipe 21 at intervals, the branch pipes 22 are mutually and vertically communicated with the main pipe 21, and the tail ends of the branch pipes 22 are closed; a plurality of branch pipes 22 on the same side are fixed through a connecting plate 23; a plurality of sharp holes are arranged on each branch pipe 22 at intervals, and each sharp hole is connected with a filter cap W6; the main pipe 21 is connected with a material pipe 24 for feeding or discharging.
Further, as shown in fig. 6 and 7, the filter cap W6 includes a screw rod 61 and a cap head 62 connected with the screw rod, the screw rod 61 is connected with the orifice; the diameter of the cap head 62 is 70mm, the filtering gap is 0.25mm, and the height of the cap head 62 is 100 mm; the screw rod 61 adopts external threads M32 and has a height of 55 mm.
Specifically, as shown in fig. 8 and 9, the upper portion of the adsorption column casing W1 is provided with a tail gas outlet filter tube W4, the tail end of the tail gas outlet filter tube W4 is closed, through holes 41 are uniformly distributed on the surface of the tail gas outlet filter tube W4, then the tail gas outlet filter tube W4 is wrapped by a wire mesh 42, the wire mesh 42 and the surface of the tail gas outlet filter tube W4 are welded according to a quincunx lattice, and spot welding is performed to avoid the through holes.
Further, the diameter of the through holes 41 is 12mm, 12 through holes 41 are uniformly distributed in the radial direction of the exhaust gas outlet filter pipe W4, and the surface of the exhaust gas outlet filter pipe W4 is wrapped by a double-layer 150-mesh wire mesh 42.
When the activated carbon adsorbent is used, firstly, the activated carbon adsorbent is filled into the adsorption column shell W1 by using the adsorbent inlet W7, and the filling amount of the activated carbon adsorbent is 80% of the total volume of the adsorption column shell W1; after the filling, hot nitrogen gas at 120 ℃ is introduced into the outer coil pipe W9 for drying, so that the moisture content in the activated carbon adsorbent is ensured to be lower than 10 ppm; then uniformly distributing the low-temperature trichlorosilane through a feeding pipe type distributor W2, and then passing through an activated carbon adsorbent bed layer for adsorption and boron removal; separating the adsorbed trichlorosilane from the activated carbon adsorbent by a discharge pipe type distributor W3, and discharging the trichlorosilane.
In this embodiment, the temperature of the adsorption column casing W1 is adjusted by the outer coil W9; the height of the liquid-phase material in the adsorption column shell W1 is observed by a liquid level meter W8; the tail gas accumulated in the adsorption column shell W1 is decompressed through a tail gas outlet filter pipe W4 at irregular intervals; when the activated carbon adsorbent is saturated in adsorption and needs to be replaced, the trichlorosilane material is discharged through a connecting pipe at the tail end of the adsorbent discharging pipe W5, the adsorbent bed layer is swept by nitrogen from top to bottom, tail gas is discharged through the connecting pipe, and the activated carbon adsorbent can be discharged after replacement is finished.
The above description is only a preferred embodiment of the present invention, and all equivalent changes and modifications made in accordance with the claims of the present invention should be covered by the present invention.

Claims (7)

1. An activated carbon adsorption method for trichlorosilane adsorption impurity removal is characterized by comprising the following steps: the activated carbon adsorption device comprises an adsorption column shell (W1), and the top and the bottom of the adsorption column shell (W1) are closed; an outer coil (W9) is wound on the outer wall of the adsorption column shell (W1); the upper part of the adsorption column shell (W1) is provided with an adsorbent inlet (W7); an adsorbent discharge port is formed in the bottom of the adsorption column shell (W1), an adsorbent discharge pipe (W5) is connected to the adsorbent discharge port, a feed pipe type distributor (W2) is arranged at the lower part of the adsorption column shell (W1), a discharge pipe type distributor (W3) is arranged at the upper part of the adsorption column shell (W1), and a tail gas outlet filter pipe (W4) is arranged at the upper part of the adsorption column shell (W1);
the feed pipe type distributor (W2) comprises a feed pipe type distribution pipeline and a filter cap (W6) which is arranged on the feed pipe type distribution pipeline and used for intercepting, and the feed pipe type distribution pipeline is connected with the material inlet of the adsorption column shell (W1); the discharge pipe type distributor (W3) comprises a discharge pipe type distribution pipeline and a filter cap (W6) arranged on the discharge pipe type distribution pipeline and used for intercepting, and the discharge pipe type distribution pipeline is connected with a material outlet of the adsorption column shell (W1);
the bottom of the adsorption column shell (W1) is of an inverted cone structure, and the cone angle of the adsorption column shell is 120 degrees; an adsorbent discharge port is formed in the conical bottom of the inverted conical structure at the bottom of the adsorption column shell (W1), an adsorbent discharge pipe (W5) is connected to the adsorbent discharge port, and the central line of the adsorbent discharge pipe (W5) forms an included angle of 120 degrees with the vertical line;
the central line of the adsorbent discharge pipe (W5) forms an included angle of 120 degrees with the vertical line; the tail end of the adsorbent discharge pipe (W5) is welded with a vertically downward connecting pipe branch which forms an included angle of 90 degrees with the adsorbent discharge pipe, and the connecting pipe branch is externally connected with a Y-shaped filter of a 150-mesh wire mesh;
during adsorption, the activated carbon adsorbent is firstly filled into the adsorption column shell (W1) by the adsorbent inlet (W7), and the filling amount of the activated carbon adsorbent is 80% of the total volume of the adsorption column shell (W1); after the filling, hot nitrogen gas at 120 ℃ is introduced into the outer coil pipe (W9) for drying, so that the moisture content in the activated carbon adsorbent is ensured to be lower than 10 ppm; then uniformly distributing the low-temperature trichlorosilane through a feed pipe type distributor (W2) and then passing through an activated carbon adsorbent bed layer for adsorption and boron removal; separating the adsorbed trichlorosilane from the activated carbon adsorbent by a discharge pipe type distributor (W3), and discharging the trichlorosilane.
2. The activated carbon adsorption method for trichlorosilane adsorption impurity removal according to claim 1, wherein the structure of the discharge pipe type distribution pipeline is symmetrical to that of the feed pipe type distribution pipeline, the feed pipe type distribution pipeline comprises a main pipe (21), and two ends of the main pipe (21) are closed ends; a plurality of branch pipes (22) are respectively arranged on two sides of the main pipe (21) at intervals, the branch pipes (22) are mutually and vertically communicated with the main pipe (21), and the tail ends of the branch pipes (22) are closed; a plurality of branch pipes (22) on the same side are fixed through a connecting plate (23); a plurality of sharp holes are arranged on each branch pipe (22) at intervals, and each sharp hole is connected with a filter cap (W6); the main pipe (21) is connected with a material pipe (24) for feeding or discharging.
3. The activated carbon adsorption method for trichlorosilane adsorption impurity removal according to claim 2, wherein the filter cap (W6) comprises a screw rod (61) and a cap head (62) connected with the screw rod, and the screw rod (61) is connected with an orifice.
4. The activated carbon adsorption method for trichlorosilane adsorption impurity removal according to claim 3, wherein the diameter of the cap head (62) is 70mm, the filtering gap is 0.25mm, and the height of the cap head (62) is 100 mm; the screw rod (61) adopts external threads M32, and the height is 55 mm.
5. The activated carbon adsorption method for trichlorosilane adsorption impurity removal according to claim 1, wherein the tail end of the tail gas outlet filter pipe (W4) is closed, through holes (41) are uniformly distributed on the surface of the tail gas outlet filter pipe (W4), the tail gas outlet filter pipe is wrapped by a silk screen (42), the silk screen (42) and the surface of the tail gas outlet filter pipe (W4) are welded according to a quincunx lattice, and spot welding is performed to avoid the through holes.
6. The activated carbon adsorption method for trichlorosilane adsorption impurity removal according to claim 5, wherein the diameter of the through holes (41) is 12mm, and the number of the through holes (41) is 12; the screen (42) is a double-layer 150 mesh screen.
7. The activated carbon adsorption method for trichlorosilane adsorption impurity removal according to claim 1, wherein a liquid level meter (W8) is connected to the side edge of the adsorption column shell (W1).
CN202210049781.8A 2022-01-17 2022-01-17 Activated carbon adsorption method for trichlorosilane adsorption impurity removal Pending CN114470869A (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2058182U (en) * 1989-03-20 1990-06-13 陈海林 Water purifier
CN201596378U (en) * 2010-01-22 2010-10-06 上海远跃轻工机械有限公司 Absorbent resin column
CN203483913U (en) * 2013-09-11 2014-03-19 国家电网公司 Power oil absorption tank capable of regenerating absorbent
CN106573182A (en) * 2014-10-09 2017-04-19 瓦克化学股份公司 Purification of chlorosilanes by means of distillation and adsorption
CN206624652U (en) * 2017-04-06 2017-11-10 洛阳中硅高科技有限公司 A kind of device for preparing electron level trichlorosilane
CN212651564U (en) * 2020-06-03 2021-03-05 江苏汇金环保科技有限公司 Chemical plant organic waste gas treatment system
CN215462188U (en) * 2021-08-06 2022-01-11 北京四环制药有限公司 Adsorption tank and complete equipment for treating bovine brain ganglioside extract

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2058182U (en) * 1989-03-20 1990-06-13 陈海林 Water purifier
CN201596378U (en) * 2010-01-22 2010-10-06 上海远跃轻工机械有限公司 Absorbent resin column
CN203483913U (en) * 2013-09-11 2014-03-19 国家电网公司 Power oil absorption tank capable of regenerating absorbent
CN106573182A (en) * 2014-10-09 2017-04-19 瓦克化学股份公司 Purification of chlorosilanes by means of distillation and adsorption
CN206624652U (en) * 2017-04-06 2017-11-10 洛阳中硅高科技有限公司 A kind of device for preparing electron level trichlorosilane
CN212651564U (en) * 2020-06-03 2021-03-05 江苏汇金环保科技有限公司 Chemical plant organic waste gas treatment system
CN215462188U (en) * 2021-08-06 2022-01-11 北京四环制药有限公司 Adsorption tank and complete equipment for treating bovine brain ganglioside extract

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