CN1144611C - Equipment for recovering arsenic particles contained in waste gas produced in epitaxial growth of semiconductor material - Google Patents

Abstract

The present invention relates to a device for recovering highly toxic substances, namely arsenic particles from waste gas produced in the epitaxial process of semiconductor materials. The device is composed of a sealing barrel, a water outlet, a separating plate, a gas inlet pipe, a barrel bottom, a rotary shaft, a flow-guiding plate, a centrifugal barrel, a barrel cover, a gas discharging pipe, a water inlet pipe, a spraying head, a sucking pump, stuffing and a motor. The device uses the opposite flow of water and waste gas, and increases contact by using the random arrangement of the stuffing. Thus, harmful steam of arsenic, etc. in the waste gas can be effectively condensed and carried away by the water to reduce the discharging quantity into the atmosphere. The water is introduced into the centrifugal barrel rotating at high speed by the flow-guiding plate, and solid microparticles suspending in the water are collected at the edge of the bottom of the centrifugal barrel under the function of centrifugal force. The water continuously flows into the centrifugal barrel through the flow-guiding plate, and overflows from the upper edge of the centrifugal barrel. The circular use of the sucking pump is realized, the centrifugal barrel can be regularly cleaned, and the harmful substances can be centralized, collected and processed.

Description

In the waste gas of epitaxial growth of semiconductor material arsenic particles contained reclaimer

The invention belongs to a kind of environment protection equipment, particularly relate to a kind of equipment that can effectively reclaim the waste gas produced middle extremely toxic substance arsenic particles of epitaxial growth of semiconductor material process.

At present, along with the development of electronic industrial technology, classes of semiconductors material preparation means have obtained develop rapidly, and particularly the epitaxial system of various semi-conducting materials is extensive use of by factory, scientific research institutions, universities and colleges laboratory.In many epitaxial materials, extensive work concentrates on the III-V family semiconductor material system that contains arsenic.In addition, arsenic also is chemical industry, the important source material of industries such as building materials and compound.As everyone knows, arsenic is a kind of extremely toxic substance, and there is clearly regulation in country to the processing of arsenic, and being strict with arsenic will recycle with solid-state form.At semiconductor epitaxial, in the production processes such as chemical industry, building materials, use arsenic under the hot conditions often, this enters atmosphere with regard to a large amount of arsenic steam of unavoidable generation, harmful health of human body, contaminated environment.Prior art sprays reactions such as making arsenic steam, is condensed into solid and precipitation by the strong oxidizer aqueous solution, can significantly reduce it to the aerial amount of entering.But often can not effectively collect for little, the lightweight particulate of volume.The very big sedimentation basin of design adding can make the molecule precipitation in the condensation cycle water piping system, but needs very big space, is difficult to realize in a lot of occasions.

The effectively collected volume that the objective of the invention is to overcome prior art is little, the problem of lightweight arsenic particles, provide a kind of and have manufacturing simple in structure, with low cost, easy, can effectively reclaim the equipment of the extremely toxic substance arsenic particles in the waste gas that the epitaxial growth of semiconductor material process produced.

To achieve these goals, the technical solution used in the present invention is to have designed employing circulation strong oxidizer aqueous solution spray additional high-speed centrifugal device to separate, collect solid-state microparticle equipment.It is by the external seal bucket, circulating water outlet, the dewatering outlet, dividing plate, air inlet pipe, the sealing bucket end, rotating shaft, deflector, centrifugal barrel, sealing bucket loam cake, blast pipe, water inlet pipe, seedpod of the lotus shower nozzle, self priming pump, filler, motor is formed, this equipment is that an external seal bucket is divided into two parts up and down with the dividing plate that has a lot of apertures, sealing bucket loam cake is reserved exhaust duct aperture and water inlet pore, the pertusate semicircle tubulose filler of the upper half-space filled sidewall of external seal bucket, seedpod of the lotus shower nozzle is installed on top at external seal bucket upper half-space, at the inner high speed rotating centrifugal bucket of installing of the lower half-space of external seal bucket, the centrifugal barrel profile is a truncated cone-shaped, the middle part, the bucket end of centrifugal barrel is tapered to upper process, and its vertex of a cone is higher than a barrel outer wall upper edge, vertex of a cone perforate is to link with rotating shaft, centrifugal barrel outer wall upper edge inwardly folds an eaves, be installed into tracheae in the external seal bucket lower half-space near the dividing plate place, circulating water outlet and dewatering outlet and rotation axis hole are installed in sealing bucket bottom, circulating water outlet connects by self priming pump with seedpod of the lotus shower nozzle, rotating shaft and motor link, air inlet pipe the mouth end below mounting guiding board, the aqueous solution is imported in the high speed rotating centrifugal bucket, deflector enters in the centrifugal barrel and as far as possible near the inner conical sidewall of high speed rotating centrifugal bucket, it is benefit that its gap can freely be flow through with loop solution.

At first by water inlet pipe water filling in system, its amount should and slightly exceed the deflector lower end below the air inlet mouth of pipe when the present invention worked, and started self priming pump and made the water circulated sprinkling.Waste gas enters rising by air inlet pipe, pass the hole of dividing plate, and water is sprayed downwards by seedpod of the lotus shower nozzle.After water drops on the chaotic filler of arranging, will form random current and flow out from the dividing plate aperture.Gas rises and hindered by the chaotic filler of arranging, form random air-flow, water can fully contact with gas like this, and oxious component and water reaction, condensation, curing in the gas are reunited, flow into the lower half-space in the lump by dividing plate aperture and water, can not enter atmosphere.Water enters centrifugal barrel through deflector, because centrifugal barrel rotates at a high speed, under centrifugal action, the solid particle in the water will be thrown to the centrifugal barrel sidewall and further slide accumulation along conical outer wall.The deflector in invagination eaves and insertion centrifugal barrel of centrifugal barrel upper edge can make the water of new inflow be arranged with the separate solid particulate enough time of staying in centrifugal barrel.Along with the inflow of water, the water that has more poised state will be overflowed by the centrifugal barrel upper edge.To not have solid particle in the recirculated water like this,, realize the recovery of solid matter by the periodic cleaning centrifugal barrel.

Good effect of the present invention adopts water and waste gas reverse flow, sidewall by random arrangement has the plastic tubulature filler along the axis stripping and slicing of mouth to increase touch opportunity, make the effective condensations of harmful steam such as arsenic in the waste gas be carried away, reduce the atmosphere amount of entering by water.Water is introduced the centrifugal barrel of rotation at a high speed by deflector, will accumulate in the centrifugal barrel bottom margin at the solid-state microparticle of centrifugal action low suspension in water.Water not cracked ends deflector flows into centrifugal barrel and is overflowed by its upper edge, realizes recycling by self priming pump.By the periodic cleaning centrifugal barrel, but centralized collection is handled harmful substance.The effectively collected volume that has solved prior art is little, the problem of lightweight arsenic particles, provide a kind of have simple in structure, with low cost, make easily, can effectively reclaim the equipment of the extremely toxic substance arsenic particles in the waste gas that the epitaxial growth of semiconductor material process produced.

Further specify the present invention below in conjunction with accompanying drawing and embodiment.

Accompanying drawing 1 is a schematic diagram of the present invention, among the figure: external seal bucket 1, circulating water outlet 2, dewatering outlet 3, dividing plate 4, air inlet pipe 5, a sealing bucket end 6, rotating shaft 7, deflector 8. centrifugal barrel 9, a sealing bucket loam cake 10, blast pipe 11, water inlet pipe 12, seedpod of the lotus shower nozzle 13. self priming pump 14, filler 15, motor 16.

Embodiment: entire equipment adopts all-metal construction.Select for use sheet iron to roll that the lower edge is welded to connect flange on the metal external seal bucket 1, and in sidewall bottom weld cycle water out 2 and dewatering outlet 3.Get a sheet iron and be cut into the diameter disk identical and make dividing plate 4, bore a lot of apertures thereon so that current and gas flow and be welded in the external seal bucket 1 position on the upper side, middle part with external seal bucket 1 internal diameter.Be installed into tracheae 5 in external seal bucket 1 lower half-space near the dividing plate place.The sealing bucket end 6, made by circular metal plate, end hole, and interior folder rubber blanket closely is connected in case leak-stopping water with external seal bucket 1 flange with screw.In the base plate centre-drilling hole at the end 6 of sealing bucket, in order to rotating shaft 7 is installed.Roll conical baffle 8 with metallic plate, the conical bottom diameter is identical with external seal bucket 1 internal diameter, and circular cone top opening diameter is suitable, and the appropriate location major part upwards is welded in the external seal bucket 1 below air inlet pipe.The preparation of centrifugal barrel 9 is to make two conically shapeds that tapering in different size is identical by metal plate coils, at the bottom of big one diameter dimension less than a sealing bucket internal diameter, height so that deflector 8 lower ends can enter in the bucket is advisable.The end diameter of a little awl tube is suitable, highly is not less than the air inlet pipe position.Size two parallel sidewalls, major parts are welded into bucket with annular metal sheet.The very useful metallic plate sealing-in of conelet tube, and boring thereon are in order to connecting rotating shaft.A metallic plate ring is welded in centrifugal barrel 9 outer wall upper edges, constitutes inside eaves.Sealing bucket loam cake 10 usefulness metallic plates roll and form, the vertex of a cone opening tracheae 11 that runs in.Sidewall welds water inlet pipe 12 and seedpod of the lotus shower nozzle 13 respectively, and shower nozzle is connected by self priming pump 14 usefulness pipelines with circulating water outlet 2.Rive and sidewall has the plastic tubulature filler 15 of opening can select for use the hai roll of hair-waving usefulness cut to obtain along the axle center along axis.Top cover is fixedlyed connected with screw in case leak-stopping water by interior folder rubber blanket with external seal bucket 1.Rotating shaft one end and centrifugal barrel 9 are fixing, pass the sealing bucket end 6, and the other end connects with motor 16.Rotation axis seal adopts the Wilson seal structure, with guarantee axle freely rotate and non-leakage.

Claims (1)

1, a kind of chemical gas-phase precipitation system exhaust treatment system that is used for, in the waste gas of epitaxial growth of semiconductor material arsenic particles contained reclaimer, it is characterized in that: it comprises external seal bucket (1), circulating water outlet (2), dewatering outlet (3), dividing plate (4), air inlet pipe (5), the sealing bucket end (6), rotating shaft (7), deflector (8), centrifugal barrel (9), sealing bucket loam cake (10), blast pipe (11), water inlet pipe (12), seedpod of the lotus shower nozzle (13), self priming pump (14), filler (15), motor (16), external seal bucket (1) is divided into two parts up and down with the dividing plate (4) that has a lot of apertures, sealing bucket loam cake (10) is reserved the pertusate semicircle tubulose filler of upper half-space filled sidewall (15) of steam vent (11) and water inlet pipe (12) external seal bucket (1), seedpod of the lotus shower nozzle (13) is installed on top at external seal bucket (1) upper half-space, at the inner high speed rotating centrifugal bucket (9) of installing of the lower half-space of external seal bucket (1), centrifugal barrel (9) profile is a truncated cone-shaped, the middle part, the bucket end of centrifugal barrel (9) is tapered to upper process, and the vertex of a cone is higher than a barrel outer wall upper edge, vertex of a cone perforate is to link with rotating shaft (7), centrifugal barrel (9) outer wall upper edge inwardly folds an eaves, locate to be installed into tracheae (5) in external seal bucket (1) lower half-space near dividing plate (4), in outside circulating water outlet (2) and dewatering outlet (3) and rotating shaft (7) hole of installing of the sealing bucket end (6), circulating water outlet (2) connects by self priming pump (14) with seedpod of the lotus shower nozzle (13), rotating shaft (7) and motor (16) connection, air inlet pipe (5) the mouth end below mounting guiding board (8), the aqueous solution is imported in the high speed rotating centrifugal bucket (9), deflector (8) should enter in the bucket and as far as possible near the inner conical sidewall of high speed rotating centrifugal bucket (9), it is benefit that its gap can freely be flow through with loop solution.

Images