CN114460110A - Servo system error compensation method - Google Patents
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- CN114460110A CN114460110A CN202210220140.4A CN202210220140A CN114460110A CN 114460110 A CN114460110 A CN 114460110A CN 202210220140 A CN202210220140 A CN 202210220140A CN 114460110 A CN114460110 A CN 114460110A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T11/00—2D [Two Dimensional] image generation
- G06T11/003—Reconstruction from projections, e.g. tomography
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/03—Investigating materials by wave or particle radiation by transmission
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
- G01N2223/1016—X-ray
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/646—Specific applications or type of materials flaws, defects
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
The invention discloses a servo system error compensation method, which belongs to the technical field of calibration of a motion mechanism, and is characterized in that X-rays are adopted to image a marker, the position of the characteristic of an imaged reference mark in an image is kept unchanged as a constraint condition, the horizontal position of an objective table, the height of the objective table, the inclination angle of a detector and the rotation angle of the detector are counted, a five-axis motion relation is established by adopting a polynomial fitting method, according to the motion relation, the horizontal position of the objective table is changed along with the height of the objective table, the inclination angle of the detector and the rotation angle, the vision field center is always kept unchanged under different amplification ratios and different visual angles, and an area of interest is imaged; the invention can establish the absolute position relation of the point object image in space, not only can meet the requirement of keeping the visual field center unchanged under different magnification ratios and different visual angles, but also can be applied to planar CT imaging, and can realize the three-dimensional imaging of the object to be measured without an additional planar CT module.
Description
Technical Field
The invention relates to the technical field of calibration of a motion mechanism, in particular to a servo system error compensation method.
Background
The X-ray inspection apparatus is primarily directed to integrated circuit package reliability inspection, inspecting the circuit and its package to check for the presence of defects in order to determine the cause of the defects. Chinese patent application No. CN201910592325.6 discloses an X-ray detection apparatus based on a five-axis motion platform, which can obtain a plurality of two-dimensional images or three-dimensional models of regions of interest from different viewing angles or projections. The servo system can allow the detector to move relatively in the spherical surface, and the sample moves linearly in a three-dimensional space along with the object stage.
Two-dimensional imaging of a region of interest is effective, but often provides insufficient information due to occlusion or the like, requiring imaging of the region of interest from different perspectives. However, in the actual operation process, due to the non-orthogonal axis error of the axis system and the error sources such as the non-concentric error of the spherical center of the detector spherical motion and the source center of the radiation source, the indication error, the detector installation error and the like, when the objective table moves highly and the detector rotates for detection, the focus area deviates from the center of the visual field, the focus area needs to be repositioned, and particularly when the magnification or the visual angle is adjusted greatly, the focus area deviates from the visual field completely and is difficult to reposition.
In order to solve this problem, there are two general solutions for conventional X-ray detection apparatuses. One method is that the height of the objective table and the inclination and rotation angles of the detector are adjusted by a small angle, then the horizontal position of the objective table is adjusted, so that the region of interest is always positioned in the center of the visual field, and the adjustment is repeated for several times, thereby realizing the imaging of the region of interest under the expected magnification ratio and inclination angle; the method is complex in adjustment, poor in user experience, and difficult to meet the automatic detection requirement during batch processing. Another approach is to rely on high precision mechanical systems for relatively high precision movement between the X-ray source, the region of interest, and the detector. This need for high precision mechanical equipment makes the X-ray detection apparatus expensive. Therefore, a servo system error compensation method is provided.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: how to solve the problem of compensating the system error of a servo system, realize that the center of a visual field is always kept unchanged under different magnification ratios and different visual angles, and image a region of interest, and the method for compensating the servo system error is provided.
The invention solves the technical problems through the following technical scheme, and the invention comprises the following steps:
s1: identifying a reference mark with a known geometric shape on the surface of the object stage by utilizing X-rays, and acquiring an image in real time;
s2: moving the height z of an objective table, a detector inclination angle theta and a detector rotation angle gamma, and keeping the position of the characteristic of the reference mark in the image unchanged through the horizontal position x and y of the objective table to obtain a sequence { x, y, z, theta, gamma };
s3: extracting a sequence { x, y, z, theta, gamma being 0} when gamma is 0, and respectively establishing the relation between x and y and z and theta by adopting a data fitting method:
wherein p isx00And py00Is a constant value fxAnd fyIs the corresponding fitting function;
s4: performing circle fitting on { x, y } in sequences with the same z and theta and different gamma to obtain a sequence { z, theta, xc,ycR }, where xcAnd ycThe x and y values corresponding to the fitted circle center are shown, and r is the radius of the fitted circle;
s5: r and gamma are established by adopting a data fitting method0Relationship between z and θ:
wherein, γ0To fit the initial angle of the circle, ydY is relative to y when γ is 0cOffset of (a), frAnd fydIs the corresponding fitting function;
s6: compensating for servo system errors using the fitted function, and dynamically correcting p if the stage moves horizontallyx00And py00：
If the height z of the objective table, the inclination angle theta of the detector and the rotation angle gamma of the detector are changed, the following steps are carried out:
wherein x isT、yTThe following position is formed after the height z of the objective table, the inclination angle theta of the detector and the rotation angle gamma of the detector are changed.
Further, in the step S1, the reference mark with the known geometric shape is a metal ball.
Further, in step S2, the fiducial marker is characterized by a geometric center, a center of mass, and a minimum circumscribing circle center.
Further, in the steps S3 and S5, the data fitting method is polynomial fitting, neural network fitting, or the like.
Compared with the prior art, the invention has the following advantages: the servo system error compensation method is suitable for an X-ray detection device based on a five-axis motion platform, metal microspheres are used as markers, X-rays are used for imaging the markers, the position of the imaged circle center in a visual field is not changed and is used as a constraint condition, the horizontal position of an objective table, the height of the objective table, the inclination angle of a detector and the rotation angle of the detector are counted, a five-axis motion relation is established by adopting a polynomial fitting method, according to the motion relation, the horizontal position of the objective table is changed along with the height of the objective table, the inclination angle of the detector and the rotation angle, the visual field center is always kept unchanged under different amplification ratios and different visual angles, and an area of interest is imaged; the absolute position relation of the point object image in space can be established, the requirement that the visual field center is always kept unchanged under different magnification ratios and different visual angles can be met, and the method can be applied to planar CT imaging, and can realize three-dimensional imaging of a measured object without an additional planar CT module; the servo system error is compensated by adopting a software method, additional high-precision mechanical equipment and detection equipment are not needed, the cost performance is high, and the method is worthy of popularization and application.
Drawings
FIG. 1 is a flow chart of data acquisition and fitting of a servo system error compensation method according to a second embodiment of the present invention;
FIG. 2 is a flowchart illustrating an error compensation method of a servo system according to a second embodiment of the present invention;
FIG. 3a shows a diagram fx(z, θ) data fitting results schematic;
FIG. 3b is a schematic diagram of the data fitting residuals of FIG. 3 a;
FIG. 4A shows a diagram fy(z, θ) data fitting results schematic;
FIG. 4A is a schematic diagram of the data fit residuals of FIG. 4A;
FIG. 4B shows a diagram f according to a second embodiment of the present inventionr(z, θ) data fitting results schematic;
FIG. 4B is a schematic diagram of the data fit residuals of FIG. 4B;
FIG. 4C shows a diagram f in the second embodiment of the present inventionyd(z, θ) data fitting results schematic;
fig. 4C is a schematic diagram of the data fit residuals in fig. 4C.
Detailed Description
The following examples are given for the detailed implementation and specific operation of the present invention, but the scope of the present invention is not limited to the following examples.
Example one
The embodiment provides a technical scheme: a servo system error compensation method, comprising the steps of:
s1: identifying a reference mark with a known geometric shape on the surface of the object stage by using X-rays, and acquiring an image in real time, wherein the image comprises the reference mark;
s2: moving the height z of an objective table, the inclination angle theta of a detector and the rotation angle gamma of the detector, and keeping the position of the characteristic of the reference mark in the image unchanged by adjusting the horizontal position x and y of the objective table to obtain a sequence { x, y, z, theta, gamma };
s3: extracting a sequence { x, y, z, theta, gamma being 0} when gamma is 0, and respectively establishing the relation between x and y and z and theta by adopting a data fitting method:
wherein p isx00And py00Is a constant value fxAnd fyIs the corresponding fitting function;
s4: performing circle fitting on { x, y } in sequences with the same z and theta and different gamma to obtain a sequence { z, theta, xc,ycR }, where xcAnd ycThe x and y values corresponding to the fitted circle center are shown, and r is the radius of the fitted circle;
s5: r and gamma are established by adopting a data fitting method0Relationship between z and θ:
wherein, γ0To fit the initial angle of the circle, ydY is relative to y when γ is 0cOffset of (a), frAnd fydIs the corresponding fitting function;
s6: compensating for servo system errors using the fitted function, and dynamically correcting p if the stage moves horizontallyx00And py00：
If the height z of the objective table, the inclination angle theta of the detector and the rotation angle gamma of the detector are changed, the height of the objective table, the inclination angle theta of the detector and the rotation angle gamma of the detector are changed
Wherein x isT、yTThe following position is the changed height z of the objective table, the inclination angle theta of the detector and the rotation angle gamma of the detector.
In this embodiment, in the steps S3 and S5, the data fitting method is a polynomial fitting, a neural network fitting, or the like.
In this embodiment, in the step S1, the reference mark with the known geometric shape is a metal ball.
In this embodiment, in the step S2, the reference mark is characterized by a minimum circumscribed circle center.
In this embodiment, the stage is movable in two axes (x and y axes, which are perpendicular to each other) in the horizontal direction and in the vertical direction (z axis) under the control of a servo system.
Example two
Data acquisition and processing are carried out according to the method shown in figure 1, the variation range of the height z of the objective table is 20-50 mm, the range of the inclination angle theta of the detector is 0-45 degrees, the range of the rotation angle gamma of the detector is-180 degrees, and the sampling data are processed by adopting a polynomial fitting method and a circle fitting method to obtain fx、fy、frAnd fydThe function, the fitting of which is shown in fig. 3a, 4B, 4C, the fitting residual is shown in fig. 3B, 4A, 4B, 4C, the residual is less than 50 μm, illustrating the effectiveness of the method.
To sum up, the error compensation method for the servo system in the above embodiment is applicable to an X-ray detection device based on a five-axis motion platform, and is implemented by using a metal microsphere as a marker, imaging the marker by using X-rays, taking the position of the imaged circle center in the field of view as a constraint condition, counting the horizontal position of an object stage, the height of the object stage, the inclination angle of a detector and the rotation angle, establishing a five-axis motion relationship by using a polynomial fitting method, and according to the motion relationship, enabling the horizontal position of the object stage to follow the change of the height of the object stage, the inclination angle of the detector and the rotation angle, so as to realize that the center of the field of view is always kept unchanged at different magnification ratios and different viewing angles, and imaging a region of interest; the absolute position relation of the point object image in space can be established, the requirement that the visual field center is always kept unchanged under different magnification ratios and different visual angles can be met, and the method can be applied to planar CT imaging, and can realize three-dimensional imaging of a measured object without an additional planar CT module; the servo system error is compensated by adopting a software method, additional high-precision mechanical equipment and detection equipment are not needed, the cost performance is high, and the method is worthy of popularization and application.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (4)
1. A servo system error compensation method, comprising the steps of:
s1: identifying a reference mark with a known geometric shape on the surface of the object stage by utilizing X-rays, and acquiring an image in real time;
s2: moving the height z of an objective table, the inclination angle theta of a detector and the rotation angle gamma of the detector, and keeping the position of the characteristic of the reference mark in the image unchanged by adjusting the horizontal position x and y of the objective table to obtain a sequence { x, y, z, theta, gamma };
s3: extracting a sequence { x, y, z, theta, gamma being 0} when gamma is 0, and respectively establishing the relation between x and y and z and theta by adopting a data fitting mode:
wherein p isx00And py00Is a constant value fxAnd fyIs the corresponding fitting function;
s4: performing circle fitting on { x, y } in sequences with the same z and theta and different gamma to obtain a sequence { z, theta, xc,ycR }, where xcAnd ycThe x and y values corresponding to the fitted circle center are shown, and r is the radius of the fitted circle;
s5: r and gamma are established by adopting a data fitting mode0Relationship between z and θ:
wherein, γ0To fit the initial angle of the circle, ydY is relative to y when γ is equal to 0cOffset of (a), frAnd fydIs a corresponding fitting function;
s6: compensating for servo system errors using the fitted function, and dynamically correcting p if the stage moves horizontallyx00And py00：
If the height z of the objective table, the inclination angle theta of the detector and the rotation angle gamma of the detector are changed, the following steps are carried out:
wherein x isT、yTThe follow-up position is the position after the height z of the objective table, the inclination angle theta of the detector and the rotation angle gamma of the detector are changed.
2. A servo system error compensation method according to claim 1, wherein: in step S1, the reference mark with known geometry is a metal ball.
3. A servo system error compensation method according to claim 1 or 2, wherein: in step S2, the fiducial marker is characterized by a geometric center, a center of mass, and a minimum circumscribing circle center.
4. A servo system error compensation method according to claim 1, wherein: in the steps S3 and S5, the data fitting method is a polynomial fitting method or a neural network fitting method.
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