CN114441548A - Clean room cleanliness monitoring device - Google Patents
Clean room cleanliness monitoring device Download PDFInfo
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- CN114441548A CN114441548A CN202210053841.3A CN202210053841A CN114441548A CN 114441548 A CN114441548 A CN 114441548A CN 202210053841 A CN202210053841 A CN 202210053841A CN 114441548 A CN114441548 A CN 114441548A
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- 230000003749 cleanliness Effects 0.000 title claims abstract description 65
- 238000012806 monitoring device Methods 0.000 title claims abstract description 22
- 238000012544 monitoring process Methods 0.000 claims abstract description 89
- 230000005540 biological transmission Effects 0.000 claims abstract description 72
- 238000009434 installation Methods 0.000 claims abstract description 47
- 238000010276 construction Methods 0.000 claims abstract description 39
- 238000012545 processing Methods 0.000 claims abstract description 9
- 230000007246 mechanism Effects 0.000 claims description 80
- 239000000428 dust Substances 0.000 claims description 47
- 239000002245 particle Substances 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 16
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- 238000013016 damping Methods 0.000 claims description 10
- 230000003139 buffering effect Effects 0.000 claims description 7
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- 238000012423 maintenance Methods 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
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- 239000004020 conductor Substances 0.000 description 3
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- 238000004140 cleaning Methods 0.000 description 2
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
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- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
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- G08C17/02—Arrangements for transmitting signals characterised by the use of a wireless electrical link using a radio link
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- G—PHYSICS
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- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The invention discloses a clean room cleanliness monitoring device, which comprises a plurality of monitoring systems, a data transmission system, a control system, a display system, a network transmission system and a mobile phone moving end, wherein the monitoring systems are arranged in each measuring area inside a clean room enclosure system through a nondestructive fixing device and are used for monitoring the cleanliness, the temperature and the humidity and supervising the site construction of each measuring area in a clean room, the data transmission system is used for data transmission, the control system is a central processing unit and is used for data processing, the data display system is arranged at an entrance and an exit of the clean room and is used for data display, when the device is used, the monitoring systems are arranged in each measuring area of the clean area through the nondestructive fixing device and are communicated through a wireless communicator, the cleanliness, the temperature and the humidity and the site construction environment of the corresponding measuring area in the clean area can be monitored in real time, and the clean room construction can be effectively controlled, the monitoring system has the characteristics of comprehensive monitoring and convenience in use and installation.
Description
Technical Field
The invention relates to the technical field of cleanliness control, in particular to a clean room cleanliness monitoring device.
Background
Clean rooms (Clean rooms), also known as Clean rooms, Clean rooms or Clean rooms; the main function of the clean room is indoor pollution control, and pollution sensitive parts cannot be produced in batches without the clean room; inside the FED-STD-2, a clean room is defined as a room with air filtration, distribution, optimization, construction materials and devices, where specific, regular operating procedures are used to control the airborne particle concentration to achieve the proper particle cleanliness level;
therefore, in order to ensure the cleanliness of the clean room, the clean room needs to be effectively managed and controlled in the construction process of the clean room, so that the aim of cleaning and managing the clean room is fulfilled by managing the field working process; in the prior art, the monitoring device for cleaning management is simple in composition, cannot timely and effectively carry out all-dimensional monitoring control on cleanliness in a clean room, and influences the monitoring of the cleanliness and the temperature and humidity in the clean room in the construction process, so that the construction quality of the clean room is influenced;
therefore, it is urgently needed to design a device which can be used for monitoring the cleanliness and the temperature and humidity in the clean room in real time in the construction process so as to monitor the temperature and humidity in the clean room in real time and improve the construction quality of constructors in the construction process.
Disclosure of Invention
In order to solve the problems, the invention aims to provide a clean room cleanliness monitoring device, which can realize real-time monitoring of cleanliness, temperature and humidity and site construction environment of corresponding measurement areas in a clean area by installing a monitoring system in each measurement area of the clean area through a nondestructive fixing device and communicating through a wireless communicator, is convenient for effective management and control of clean room construction, and has the characteristics of comprehensive monitoring and convenience in use and installation.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
a clean room cleanliness monitoring device comprises a plurality of monitoring systems, a data transmission system, a control system, a display system, a network transmission system and a mobile phone moving end;
the monitoring system is arranged in each measuring area at the inner side of the clean room maintenance system through a nondestructive fixing device and is used for monitoring the cleanliness, the temperature and the humidity of each measuring area in the clean room and supervising the site construction;
the data transmission system is a multi-channel wireless communicator and is used for transmitting clean area data detected by the monitoring system to the control system through wireless data transmission and transmitting a control command of the control system to the monitoring system;
the control system is a central processing unit and is used for receiving the data of the measuring area transmitted by the data transmission system, decoding the data, sending the decoded data packet to the data display system and controlling the monitoring system to act through a control command;
the data display system is a display arranged at the entrance and exit of the clean room, and the display is internally provided with upper computer software which is used for visually presenting the data sent by the control system and sending a control command to the control system through input;
the network transmission system is used for being connected with the mobile terminal and transmitting the cleanliness, the temperature and the humidity of the measurement area and the site construction condition to the mobile terminal of the mobile phone;
the mobile terminal of the mobile phone is used for checking cleanliness, temperature and humidity and field construction conditions of the clean room in the construction process in real time.
Preferably, the monitoring system comprises a dust particle counter, a temperature and humidity monitor, a camera and a PCL controller, wherein one input/output end of the PCL controller is connected with the central processing unit through a wireless communication device, and the other data input end of the PCL controller is respectively connected with the dust particle counter, the temperature and humidity monitor and the camera through control switches to control the dust particle counter, the temperature and humidity monitor and the camera to work; and the dust particle counter, the temperature and humidity monitor, the camera and the PCL controller are integrated through a nondestructive fixing device, the nondestructive fixing device is equidistantly arranged in the clean room measuring area, and the setting number of the nondestructive fixing device is not less than the number N of the measuring areaL；
Wherein N isL＝A0 . 5And A is the area of the flowing air interface in the clean room, which is vertical to the airflow direction.
Preferably, the nondestructive fixing device comprises a fixing plate, a first integrated installation box, a temperature and humidity monitoring mechanism and a second integrated installation box;
the fixing plate is arranged on the upper side of the first integrated installation box through a mechanical telescopic rod and is connected with a ceiling or the ground of the clean room through a tie bolt;
the first integrated installation box is of a box body structure, a first hanging adjusting mechanism and a rotary connecting mechanism are integrated in an inner cavity of the first integrated installation box, wherein the first hanging adjusting mechanism penetrates through the side wall of the box body to be connected with the fixed plate, and the rotary connecting mechanism is arranged on the lower side of the first hanging adjusting mechanism;
the temperature and humidity monitoring mechanism is movably arranged on a piston rod of the rotary connecting mechanism and is matched with the rotary connecting mechanism for use;
the second integrated installation box is arranged at the lower end of the piston rod of the rotary connecting mechanism and connected with the rotary connecting mechanism through a flange, and a cleanliness monitoring mechanism is further arranged in the second integrated installation box.
Preferably, the middle part of the first integrated installation box is provided with a middle bedplate, the cavity of the first integrated installation box is divided into a cavity at the upper side of the middle bedplate and a cavity at the lower side of the middle bedplate by the middle bedplate, the first hanging and adjusting mechanism is integrated in the cavity at the upper side of the middle bedplate, the rotary connecting mechanism is integrated in the cavity at the lower side of the middle bedplate and comprises a rotary extension component and a second hanging and adjusting component, the rotary extension component comprises a hydraulic part, a first motor, a first straight gear, a second straight gear and a turntable, the hydraulic part is rotatably installed in the cavity at the lower side of the middle bedplate by a first bearing and a pressing sleeve, the second straight gear is arranged on the hydraulic part and is mutually meshed with the first straight gear, the first straight gear is arranged at the transmission end of the first motor and drives the hydraulic part to rotate by the first motor, a spline sleeve is further arranged on a piston rod of the hydraulic part, the spline sleeve is used with the spline shaft cooperation that sets up at the carousel center, the carousel sets up in the rotation inslot of well platen downside cavity downside, the second is hung and is hung adjusting part symmetry and install on the carousel, and uses with the cooperation of temperature and humidity monitoring mechanism.
Preferably, first string hang adjustment mechanism and second hang and hang adjusting part and all include second motor, third straight-tooth gear, fourth straight-tooth gear, first spooler and first stranded conductor, first spooler fixed mounting, the fourth straight-tooth gear sets up on one side antithetical couplet axle of first spooler, and uses with the cooperation of third straight-tooth gear, the third straight-tooth gear sets up the transmission end at the second motor, drives first spooler through the second motor and rotates, first stranded conductor is around establishing on first spooler, and is provided with first latch hook at the free end of first stranded conductor, first latch hook uses with the hook ring cooperation that sets up in fixed plate and temperature and humidity monitoring mechanism upper end.
Preferably, the temperature and humidity monitoring mechanism is movably sleeved on the piston rod and comprises a first limiting sleeve, a second limiting sleeve, a first pull rod and a second pull rod, the second limiting sleeve is movably sleeved in the first limiting sleeve, the lower end of the first limiting sleeve is matched with a first flange plate arranged at the end part of the piston rod for use, one end of the first pull rod is hinged to the first limiting sleeve, the other end of the first pull rod is provided with a temperature and humidity monitor, the middle hinged point of the first pull rod is connected with one end of the second pull rod, the other end of the second pull rod is hinged to the second limiting sleeve, and the relative distance of the temperature and humidity monitor is adjusted through the second hanging and hanging adjusting assembly; the lower tip of second spacing sleeve still is provided with the spacing ring, the spacing ring uses with the bulge loop cooperation that sets up in first spacing sleeve upper end, just the upper end of second spacing sleeve still is provided with first damping spring, first damping spring's lower extreme is connected with the buffering shock attenuation ring, the buffering shock attenuation ring uses with the bulge loop cooperation of first spacing sleeve upper end.
Preferably, cleanliness factor monitoring mechanism include that the third hangs and hangs adjusting part, gear train transmission assembly, dust particle counter installing frame, screw thread adjusting lever and dustproof subassembly, the third is hung and is hung the lower part cavity of hanging adjusting part integration at the integrated install bin of second, and uses with the cooperation of temperature and humidity monitoring mechanism, gear train transmission assembly sets up in the middle part cavity of lower part cavity upside, and hangs with the third and hang the adjusting part cooperation and use, the screw thread adjusting lever runs through the upper portion cavity of middle part cavity and middle part cavity upside, and rotates through the second bearing and install the both sides at middle part cavity and upper portion cavity, install dust particle counter in the dust particle counter installing frame, and the first threaded connection piece in both sides and the screw thread adjusting lever of dust particle counter installing frame are connected.
Preferably, the third hang and hang the adjusting part and include fifth straight-tooth gear, first electric telescopic handle, second spooler, sixth straight-tooth gear and third double-shaft motor, third double-shaft motor installs in the cavity of lower part, and two power output shafts of third double-shaft motor are connected with the fifth straight-tooth gear through first electric telescopic handle, the second spooler rotates and installs in the cavity of lower part, sixth straight-tooth gear sets up the drive end in one side of second spooler, and uses with the cooperation of fifth straight-tooth gear, still around being equipped with the second stranded wire on the second spooler, set up the second padlock hook at second stranded wire free end and set up the couple cooperation at temperature and humidity monitoring mechanism lower extreme and use, and still be provided with the second ring flange at the downside of cavity of lower part.
Preferably, the gear set transmission assembly comprises a first helical gear, a first transmission rod and a second transmission rod which are arranged on the third double-shaft motor transmission rod, the first transmission rod is vertically arranged between the lower cavity and the middle cavity, and the lower end of the first transmission rod is provided with a second bevel gear through a second electric telescopic rod, the second bevel gear is matched with the first bevel gear for use, and the upper end of the first transmission rod is provided with a third bevel gear, the second transmission rod is horizontally arranged in the middle cavity through a rotary connecting seat, and a fourth bevel gear is arranged at the inner side end of the second transmission rod and is matched with the third bevel gear, and a fifth helical gear is further arranged at the outer side end of the second transmission rod, the fifth helical gear is matched with a sixth helical gear arranged on the threaded adjusting rod for use, and the threaded adjusting rod is driven to rotate by a third double-shaft motor.
Preferably, the dustproof assembly comprises a draw bar and a dustproof plate, the dustproof plate is symmetrically arranged at the upper end of the upper cavity and moves along a movable groove on the second integrated installation box under the action of the draw bar, the draw bar moves along a abdicating groove arranged on the second integrated installation box, one end of the draw bar is connected with a tail end hinge seat of the dustproof plate, the other end of the draw bar is hinged with a second threaded connection block, and the second threaded connection block is in threaded connection with the threaded adjusting rod; and the top of the dust particle counter mounting frame is also provided with a camera.
The invention has the beneficial effects that: the invention discloses a clean room cleanliness monitoring device, compared with the prior art, the invention has the improvement that:
(1) the invention designs a clean room cleanliness monitoring device, which comprises a plurality of monitoring systems, a data transmission system, a control system, a display system, a network transmission system and a mobile phone mobile terminal, wherein when the clean room cleanliness monitoring device is used, the monitoring systems are installed in each measuring area of a clean area by utilizing a nondestructive fixing device, the cleanliness, the temperature and the humidity of each measuring area in a clean room and the field construction condition are monitored in real time, meanwhile, a wireless communicator is utilized for communication, the cleanliness, the temperature and the humidity in the measuring areas and the field construction condition are visualized, and the areas with the cleanliness and the temperature and the humidity exceeding the standard are alarmed, so that project managers can effectively control the clean room construction, the construction quality is improved, and the clean room cleanliness monitoring device has the advantages of comprehensive monitoring, and convenience in use and installation;
(2) simultaneously, harmless fixing device can be at the subaerial installation of toilet's furred ceiling or toilet, and can realize through swivelling joint mechanism, humiture monitoring machine and cleanliness factor monitoring mechanism that operation radius, operation height and operation direction are adjustable, comes to carry out all-round monitoring to survey district's environment, and then effectively avoids the operation blind area, guarantees engineering construction quality, has to cover comprehensively, monitoring effect's advantage.
Drawings
Fig. 1 is a control schematic diagram of the clean room cleanliness monitoring device of the present invention.
Fig. 2 is a control schematic diagram of the monitoring system of the present invention.
FIG. 3 is a schematic structural view of the nondestructive mounting apparatus of the present invention.
Fig. 4 is a cross-sectional view of a non-destructive fixation device of the present invention.
FIG. 5 is a cross-sectional view of a first integrated mounting enclosure of the present invention.
Fig. 6 is a schematic structural view of the temperature and humidity monitoring mechanism according to the present invention.
Figure 7 is a cross-sectional view of a first stop sleeve and a second stop sleeve of the present invention.
Fig. 8 is a top view of the turntable of the present invention.
FIG. 9 is a cross-sectional view of a second integrated mounting box of the present invention.
Fig. 10 is a schematic structural view of a third hanging and adjusting assembly of the present invention.
Fig. 11 is a schematic structural view of the dustproof assembly of the present invention.
FIG. 12 is a diagram showing the lifting effect of the nondestructive fixing device of the present invention on a ceiling pipeline support.
FIG. 13 is a view showing the effect of the nondestructive fixing device of the present invention mounted on the clean room floor.
FIG. 14 is a view showing the effect of the nondestructive fixing device of the present invention mounted on a clean room lattice beam.
Wherein: 1. the device comprises a fixed plate, 11, a tie bolt, 12, a mechanical telescopic rod, 2, a first integrated installation box, 21, an upper cavity of a middle table plate, 22, a lower cavity of the middle table plate, 23, a rotating groove, 3, a first hanging and adjusting mechanism, 31, a second motor, 32, a third spur gear, 33, a fourth spur gear, 34, a first stranded wire, 35, a first winder, 36, a first hanging and locking hook, 4, a rotating connecting mechanism, 41, a hydraulic part, 42, a first motor, 43, a first straight gear, 44, a first bearing, 45, a pressing sleeve, 46, a second straight gear, 47, a spline sleeve, 48, a piston rod, 49, a rotating disc, 491, a second hanging and adjusting assembly, 492, a spline shaft, 493, a first stranded wire transmission hole, 40, a first flange, 5, a temperature and humidity monitoring mechanism, 51, a first limiting sleeve, 52, a second limiting sleeve, 53, a first pull rod, 54, a second pull rod, 55. the temperature and humidity monitoring device comprises a shackle, a 56 limiting ring, a 57 buffering damping ring, a 58 first damping spring, a 6 temperature and humidity monitoring device, a 7 second integrated installation box, a 71 upper cavity, a 72 middle cavity, a 73 lower cavity, a 74 abdication groove, a 75 second flange plate, a 76 movable groove, 8 cleanliness monitoring mechanisms, 81, a third sling adjusting component, 811, a fifth straight gear, 812, a first electric telescopic rod, 813, a first helical gear, 814, a second winder, 815, a sixth straight gear, 816, a third double-shaft motor, 817, a second stranded wire, 818, a second sling lock hook, 82, a gear set transmission component, 821, a second bearing, 822, a sixth helical gear, 823, a fifth helical gear, 824, a second transmission rod, 825, a rotating connection seat, 826, a fourth helical gear, 827, a third helical gear, 828, a second helical gear, 829 a first transmission rod, 820. the dust particle counter comprises a first electric telescopic rod, a second electric telescopic rod, 83, a dust particle counter installation frame, 831, a first threaded connection block, 84, a threaded adjusting rod, 85, a dust prevention assembly, 851, a traction rod, 852, a second threaded connection block, 86, a dust particle counter, 87, a dust prevention plate, 88, a camera, 9, a ceiling, 91, a clean room floor and 92, a lattice beam.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following further describes the technical solution of the present invention with reference to the drawings and the embodiments.
After the clean room is decorated by the maintenance system, the cleanliness in the clean room cannot be monitored in real time and effectively, so that the cleanliness management and control in the construction process are realized, and the construction quality is influenced.
Referring to fig. 1-14, a clean room cleanliness monitoring device includes a plurality of monitoring systems, a data transmission system, a control system, a display system, a network transmission system and a mobile phone terminal;
the monitoring system is arranged in each measuring area at the inner side of the clean room maintenance system through a nondestructive fixing device and is used for monitoring the cleanliness, the temperature and the humidity of each measuring area in the clean room and supervising the site construction;
the data transmission system is a multi-channel wireless communicator and is used for transmitting clean area data detected by the monitoring system to the control system through wireless data transmission and transmitting a control command of the control system to the monitoring system;
the control system is a central processing unit and is used for receiving the data of the measuring area transmitted by the data transmission system, decoding the data, sending the decoded data packet to the data display system, and controlling the action of the monitoring system through a control command to monitor the measuring area;
the data display system is a display arranged at an entrance and an exit of the clean room, and the display is internally provided with upper computer software which is used for visually displaying data sent by the control system, inputting a control command to the control system in the data display system, controlling the operation of the whole program and monitoring the internal environment of the clean room;
the network transmission system is used for being connected with the mobile terminal and transmitting the cleanliness, the temperature and the humidity and the field construction condition of the measurement area to the mobile terminal of the mobile phone through 4G or 5G signals, so that construction management personnel can monitor the construction condition and the cleanliness condition in the measurement area of the clean room in real time, and a field construction plan can be made or changed in time;
the mobile phone mobile terminal is used for checking cleanliness, temperature and humidity and field construction conditions of the clean room in the construction process in real time, and is convenient for field clean management.
Preferably, in order to conveniently monitor the cleanliness of the corresponding measuring area, the monitoring system comprises a dust particle counter, a temperature and humidity monitor, a camera and a PCL controller, wherein an input/output end of the PCL controller is in wireless communication with the cameraThe other data input end is respectively connected with the dust particle counter, the temperature and humidity monitor and the camera through the control switch to control the dust particle counter, the temperature and humidity monitor and the camera to work; and the dust particle counter, the temperature and humidity monitor, the camera and the PCL controller are integrated through a nondestructive fixing device, the nondestructive fixing device is equidistantly arranged in the clean room measuring area, and the setting number of the nondestructive fixing device is not less than the number N of the measuring areaL；
Wherein N isL＝A0 . 5And A is the area of the flowing air interface in the clean room, which is vertical to the airflow direction.
Preferably, in order to facilitate threshold value alarm of cleanliness and temperature and humidity in the measurement area, an alarm system is further embedded in the data display system, when the data display system is used, control threshold values of the cleanliness and the temperature and humidity of the clean room are input into the data display system, when the cleanliness and the temperature and humidity monitored on site exceed set threshold values, the alarm system is triggered, alarm is conducted on a display screen by the aid of the alarm system, and accordingly constructors can monitor the data conveniently and timely.
Preferably, simultaneously for avoiding influencing ground construction and lightening the weight that the furred ceiling bore, according to the site operation condition, harmless fixing device can select fixed modes such as installation on hanging, ground (by construction area space size and decide, the space undersize may influence the construction) or on the lattice roof beam on the furred ceiling, or can combine several above-mentioned setting modes to set up again.
Preferably, the nondestructive fixing device comprises a fixing plate 1, a first integrated installation box 2, a temperature and humidity monitoring mechanism 5 and a second integrated installation box 7;
the fixing plate 1 is arranged on the upper side of the first integrated installation box 2 through a mechanical telescopic rod 12 and is connected with a clean room ceiling or the ground through a tie bolt 11, when the clean room cleanliness monitoring device is suspended on the lower side of the clean room ceiling, the mechanical telescopic rod 12 can extend along with the downward suspension of the first integrated installation box 2, meanwhile, the torque of the first integrated installation box 2 is limited, and when the clean room cleanliness monitoring device is fixed, the mechanical telescopic rod 12 is completely retracted and can be used as a bottom support of the first integrated installation box 2;
the first integrated installation box 2 is of a box body structure, a first hanging adjusting mechanism 3 and a rotary connecting mechanism 4 are integrally installed in an inner cavity of the first integrated installation box 2, wherein the first hanging adjusting mechanism 3 penetrates through the side wall of the box body to be connected with the fixed plate 1, namely the fixed plate 1 is connected with the first integrated installation box 2 through the first hanging adjusting mechanism 3, and when the device is suspended on the lower side of a ceiling of a clean room, the relative distance between the fixed plate 1 and the first integrated installation box 2 can be adjusted through the first hanging adjusting mechanism 3; the rotary connecting mechanism 4 is arranged on the lower side of the first hanging and adjusting mechanism 3 and is used for connecting and driving the lower side structure to rotate;
the temperature and humidity monitoring mechanism 5 is movably arranged on a piston rod of the rotary connecting mechanism 4, is matched with the rotary connecting mechanism 4 for use, is provided with a temperature and humidity monitor 6 on the temperature and humidity monitoring mechanism 5, and monitors the temperature and humidity in the clean room through the temperature and humidity monitor 6 when in use;
the second integrated installation box 7 is arranged at the lower end of a piston rod of the rotary connecting mechanism 4 and is in flange connection with the rotary connecting mechanism 4, a cleanliness monitoring mechanism 8 is further arranged in the second integrated installation box 7, and a dust particle counter 86 and a camera 88 are respectively arranged in the cleanliness monitoring mechanism 8 and are respectively used for monitoring the cleanliness and the site construction condition in the clean room.
Preferably, in order to install the first hanging and adjusting mechanism 3 and the rotating connecting mechanism 4, a middle bedplate is arranged in the middle of the first integrated installation box 2, the cavity of the first integrated installation box 2 is divided into a middle bedplate upper cavity 21 and a middle bedplate lower cavity 22 through the middle bedplate, the first hanging and adjusting mechanism 3 is installed in the middle bedplate upper cavity 21 in an integrated mode, and the outer sides of the middle bedplate upper cavity 21 and the middle bedplate lower cavity 22 are arranged at the access hole.
Preferably, the rotary connecting mechanism 4 is integrated in the cavity 22 at the lower side of the middle platen, and includes a rotary extension assembly and a second hanging adjustment assembly 491, the rotary extension assembly includes a hydraulic part 41, a first motor 42, a first spur gear 43, a second spur gear 46 and a rotary table 49, the hydraulic part 41 is rotatably installed in the cavity 22 at the lower side of the middle platen through a first bearing 44 and a pressing sleeve 45, the second spur gear 46 is arranged on the hydraulic part 41 and is mutually engaged with the first spur gear 43, the first spur gear 43 is arranged at a transmission end of the first motor 42, when in use, the first motor 42 drives the hydraulic part 41 to rotate, and further drives the following installation structure to rotate, so as to perform omnibearing monitoring; still be provided with spline sleeve 47 on the piston rod 48 of hydraulic pressure spare 41, spline sleeve 47 uses with the spline shaft 492 cooperation that sets up at carousel 49 center, carousel 49 rotates to set up in the rotating groove 23 of well platen downside cavity 22 downside, drives carousel 49 through first motor 42 and rotates, the second hangs and hangs adjusting part 491 symmetry and installs on carousel 49, and uses with the cooperation of temperature and humidity monitoring mechanism 5.
Preferably, the first hanging and hanging adjusting mechanism 3 and the second hanging and hanging adjusting assembly 491 are of the same structure, and each of the first hanging and hanging adjusting mechanism 3 and the second hanging and hanging adjusting assembly 491 comprises a second motor 31, a third spur gear 32, a fourth spur gear 33, a first winder 35 and a first twisted wire 34, the first winder 35 is fixedly installed in the cavity 22 at the lower side of the middle bedplate or on the rotary table 49, the fourth spur gear 33 is arranged on a coupling shaft at one side of the first winder 35 and is meshed with the third spur gear 32, the third spur gear 32 is arranged at a transmission end of the second motor 31, when the first hanging and hanging adjusting mechanism is used, the second motor 31 drives the first winder 35 to rotate, the first twisted wire 34 is wound on the first winder 35, a first hanging and hanging hook 36 is arranged at a free end of the first twisted wire 34, the first hanging and hanging hook 36 is matched with a hanging and hanging ring 55 arranged at the upper end of the fixing plate 1 and the temperature and humidity monitoring mechanism 5, that is used when the first hanging and hanging hook 36 is connected with the hanging ring 55 arranged on the fixing plate 1, realize being connected of fixed plate 1 and first integrated install bin 2 for relative distance between adjustment fixed plate 1 and the first integrated install bin 2, when first latch hook 36 is connected with the shackle 55 of setting on humiture monitoring mechanism 5, realize being connected of first integrated install bin 2 and humiture monitoring mechanism 5, be used for adjusting the distance between two humiture monitors 6 of symmetry setting, realize the adjustment to the monitoring radius.
Preferably, the temperature and humidity monitoring mechanism 5 is movably sleeved on the piston rod 48 and comprises a first limiting sleeve 51, a second limiting sleeve 52, a first pull rod 53 and a second pull rod 54, the second limiting sleeve 52 is movably sleeved in the first limiting sleeve 51 and is connected with the first limiting sleeve 51 in a clamping manner, the lower end of the first limiting sleeve 51 is matched with the first flange plate 40 arranged at the end part of the piston rod 48 for use, the first limiting sleeve 51 is limited by using the first flange plate 40, one end of the first pull rod 53 is hinged with the first limiting sleeve 51, the other end of the first pull rod 53 is provided with the temperature and humidity monitor 6 for monitoring the temperature and humidity in the clean room, the middle hinged point of the first pull rod 53 is connected with one end of the second pull rod 54, the other end of the second pull rod 54 is hinged with the second limiting sleeve 52, and when in use, the second hanging and hanging adjusting component is used for adjusting the relative position 491 between the first limiting sleeve 51 and the second limiting sleeve 52 The distance, and then realize the relative distance's of humiture monitor 6 on two first pull rods 53 adjustment, its monitoring radius of adjustment promptly.
Preferably, for realizing the dislocation connection between first limiting sleeve 51 and the second limiting sleeve 52, the lower tip of second limiting sleeve 52 still be provided with spacing ring 56, spacing ring 56 uses with the bulge loop cooperation that sets up in first limiting sleeve 51 upper end, prevents that second limiting sleeve 52 from pulling out at tensile in-process, and does not carry out the shock attenuation when using, avoids damaging humiture monitor 6 the upper end of second limiting sleeve 52 still is provided with first damping spring 58, the lower extreme and the buffering damping ring 57 of first damping spring 58 are connected, buffering damping ring 57 uses with the bulge loop cooperation of first limiting sleeve 51 upper end, and the shock attenuation is carried out to the adjustment process, avoids damaging humiture monitor 6.
Preferably, in order to inspect the cleanliness in the clean room and the site construction environment, the cleanliness monitoring mechanism 8 includes a third hanging and adjusting assembly 81, a gear set transmission assembly 82, a dust particle counter mounting frame 83, a screw thread adjusting rod 84 and a dustproof assembly 85; the third hanging and adjusting assembly 81 is integrally installed in the lower cavity 73 of the second integrated installation box 7 and is matched with the temperature and humidity monitoring mechanism 5 for use, and when the device is installed on the ground, the third hanging and adjusting assembly 81 pulls the first limiting sleeve 51 to move so as to adjust the working radius of the temperature and humidity monitor 6; gear train transmission assembly 82 sets up in the middle part cavity 72 of lower part cavity 73 upside, and hangs with the third and hang adjusting part 81 cooperation and use, screw thread adjusting rod 84 runs through middle part cavity 72 and the upper portion cavity 71 of middle part cavity 72 upside, and rotates through second bearing 821 and install the both sides at middle part cavity 72 and upper portion cavity 71, install dust particle counter 86 in the dust particle counter installing frame 83, and the both sides of dust particle counter installing frame 83 are provided with first threaded connection piece 831, first threaded connection piece 831 is connected with screw thread adjusting rod 84, when screw thread adjusting rod 84 rotates, adjusts the extension length of dust particle counter installing frame 83, utilizes the cavity of the integrated installing box 7 of second to protect dust particle counter 86 when non-use state.
Preferably, in order to adjust the working radius of the temperature and humidity monitor 6, the third hanging and adjusting assembly 81 includes a fifth spur gear 811, a first electric telescopic rod 812, a second wire winder 814, a sixth spur gear 815 and a third double-shaft motor 816, the third double-shaft motor 816 is installed in the lower cavity 73, two power output shafts of the third double-shaft motor 816 are connected with the fifth spur gear 811 through the first electric telescopic rod 812 (the first electric telescopic rod 812 can be extended or shortened as required to implement differentiation work), the second wire winder 814 is rotatably installed in the lower cavity 73, the sixth spur gear 815 is arranged at a driving end of one side of the second wire winder 814 and is engaged with the fifth spur gear 811, a second twisted wire 817 is wound around the second wire winder 814, the second hanging hook 818 arranged at a free end of the second twisted wire 817 is used in cooperation with the hanging hook ring 55 arranged at the lower end of the temperature and humidity monitoring mechanism 5, and the lower side of the lower cavity 73 is also provided with a second flange plate 75, when the device is used, the first flange plate 40 and the second flange plate 75 are connected by using bolts, the second integrated installation box is installed below the first integrated installation box, and when the device is installed on the ground, the working radius of the temperature and humidity monitor 6 is adjusted by pulling the first limiting sleeve 51 to move through the third hanging and hanging adjusting assembly 81.
Preferably, in order to drive the dust particle counter mounting frame 83 to move in the upper cavity 71, so as to extend the dust particle counter 86 in use, and retract the dust particle counter 86 in non-use, thereby preventing the contamination and damage of the dust particle counter 86, the gear train transmission assembly 82 comprises a first bevel gear 813, a first transmission rod 829 and a second transmission rod 824 which are arranged on a transmission rod of the third two-shaft motor 816, the first transmission rod 829 is vertically arranged between the lower cavity 73 and the middle cavity 72, the lower end of the first transmission rod 829 is provided with a second bevel gear 828 through a second electric telescopic rod 820 (the second electric telescopic rod 820 can be extended or shortened as required to realize differentiation work), the second bevel gear 828 is used in cooperation with the first bevel gear 813, and the upper end of the first transmission rod 829 is provided with a third bevel gear 827, the second transmission rod 824 is horizontally arranged in the middle cavity 72 through a rotation connecting seat 825, and a fourth bevel gear 826 is arranged at the inner end of the second transmission rod 824, the fourth bevel gear 826 is matched with a third bevel gear 827 for use, a fifth bevel gear 823 is further arranged at the outer end of the second transmission rod 824, and the fifth bevel gear 823 is matched with a sixth bevel gear 822 arranged on the screw thread adjusting rod 84 for use, namely, in the use process, the screw thread adjusting rod 84 is driven to rotate through the rotation of the third double-shaft motor 816, so that the dust particle counter mounting frame 83 is driven to move in the upper cavity 71, the dust particle counter 86 is extended out in the use process, the dust particle counter 86 is retracted in the non-use process, the pollution and the damage of the dust particle counter 86 are avoided, and the dust particle counter 86 is protected.
Preferably, the dust-proof assembly 85 comprises a drawbar 851 and dust-proof plates 87, the dust-proof plates 87 are symmetrically arranged at the upper end of the upper cavity 71 and move along the movable groove 6 on the second integrated mounting box 7 under the action of the drawbar 851, the drawbar 851 moves along the abdicating groove 74 on the second integrated mounting box 7, one end of the drawbar 851 is connected with a tail end hinged seat of the dust-proof plate 87, the other end of the drawbar 851 is connected with a second threaded connecting block 852 in a hinged manner, the second threaded connecting block 852 is in threaded connection with the threaded adjusting rod 84, namely, the relative height of the second threaded connecting block is adjusted by the rotation of the threaded adjusting rod 84, and the traction action of the drawbar 851 drives the two dust-proof plates 87 to extend and close, so as to protect the dust particle counter 86 and ensure the accuracy of data acquisition.
Preferably, for carrying out real-time supervision to the internal environment and the work progress of toilet the top of dust particle counter installing frame 83 still installs camera 88, dust guard 87 also plays the protection lease to camera 88.
The clean room cleanliness monitoring device disclosed by the invention has the following principle: firstly, the monitoring system, the data transmission system, the control system and the display system are arranged in a clean room, and are debugged after the arrangement is finished, then the temperature and humidity monitor 6, the dust particle counter 86 and the camera 88 of the monitoring system are used for carrying out partition acquisition on the field condition of the clean room, and after the acquisition, the data are transmitted to a central processing unit through a multi-channel wireless communicator, and the central processing unit decodes the data, sends the decoded data packet to the data display system and displays the data by using the data display system; meanwhile, data information is transmitted to a mobile phone terminal through a network transmission system, and cleanliness, temperature and humidity and field construction conditions of the clean room in the construction process are displayed by using the mobile phone terminal;
in the data acquisition process, the nondestructive fixing device comprises 3 optional fixing modes, specifically comprising suspension on a suspended ceiling only, installation on the ground only and arrangement on the ground and the suspended ceiling.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. The utility model provides a clean room cleanliness factor monitoring devices which characterized in that: the system comprises a plurality of monitoring systems, a data transmission system, a control system, a display system, a network transmission system and a mobile phone mobile terminal;
the monitoring system is arranged in each measuring area at the inner side of the clean room maintenance system through a nondestructive fixing device and is used for monitoring the cleanliness, the temperature and the humidity of each measuring area in the clean room and supervising the site construction;
the data transmission system is a multi-channel wireless communicator and is used for transmitting clean area data detected by the monitoring system to the control system through wireless data transmission and transmitting a control command of the control system to the monitoring system;
the control system is a central processing unit and is used for receiving the data of the measuring area transmitted by the data transmission system, decoding the data, sending the decoded data packet to the data display system and controlling the monitoring system to act through a control command;
the data display system is a display arranged at the entrance and exit of the clean room, and the display is internally provided with upper computer software which is used for visually presenting the data sent by the control system and sending a control command to the control system through input;
the network transmission system is used for being connected with the mobile terminal and transmitting the cleanliness, the temperature and the humidity of the measurement area and the site construction condition to the mobile terminal of the mobile phone;
the mobile terminal of the mobile phone is used for checking cleanliness, temperature and humidity and field construction conditions of the clean room in the construction process in real time.
2. A clean room cleanliness monitoring apparatus according to claim 1, wherein: the monitoring system comprises a dust particle counter, a temperature and humidity monitor, a camera and a PCL controller, wherein one input/output end of the PCL controller is connected with the central processing unit through a wireless communicator, and the other data input end of the PCL controller is respectively connected with the dust particle counter, the temperature and humidity monitor and the camera through control switches to control the dust particle counter, the temperature and humidity monitor and the camera to work; and the dust particleThe sub-counter, the temperature and humidity monitor, the camera and the PCL controller are integrated through a lossless fixing device, the lossless fixing device is arranged in the clean room measuring area at equal intervals, and the setting number of the lossless fixing device is not less than the number N of the measuring areaL；
Wherein N isL＝A0.5And A is the area of the flowing air interface in the clean room, which is vertical to the airflow direction.
3. A clean room cleanliness monitoring apparatus according to claim 1, wherein: the nondestructive fixing device comprises a fixing plate (1), a first integrated installation box (2), a temperature and humidity monitoring mechanism (5) and a second integrated installation box (7);
the fixing plate (1) is arranged on the upper side of the first integrated installation box (2) through a mechanical telescopic rod (12) and is connected with a ceiling or the ground of the clean room through a tie bolt (11);
the first integrated installation box (2) is of a box body structure, a first hanging and hanging adjusting mechanism (3) and a rotary connecting mechanism (4) are integrated in an inner cavity of the first integrated installation box (2), wherein the first hanging and hanging adjusting mechanism (3) penetrates through the side wall of the box body to be connected with the fixed plate (1), and the rotary connecting mechanism (4) is arranged on the lower side of the first hanging and hanging adjusting mechanism (3);
the temperature and humidity monitoring mechanism (5) is movably arranged on a piston rod of the rotary connecting mechanism (4) and is matched with the rotary connecting mechanism (4) for use;
the second integrated installation box (7) is arranged at the lower end of a piston rod of the rotary connecting mechanism (4) and is connected with the rotary connecting mechanism (4) through a flange, and a cleanliness monitoring mechanism (8) is further arranged in the second integrated installation box (7).
4. A clean room cleanliness monitoring apparatus according to claim 3, wherein: the middle part of the first integrated installation box (2) is provided with a middle bedplate, a cavity of the first integrated installation box (2) is divided into a middle bedplate upper side cavity (21) and a middle bedplate lower side cavity (22) through the middle bedplate, the first hanging and lifting adjusting mechanism (3) is integrated in the middle bedplate upper side cavity (21), the rotary connecting mechanism (4) is integrated in the middle bedplate lower side cavity (22) and comprises a rotary extension component and a second hanging and lifting adjusting component (491), the rotary extension component comprises a hydraulic part (41), a first motor (42), a first straight gear (43), a second straight gear (46) and a rotary table (49), the hydraulic part (41) is rotatably installed in the middle bedplate lower side cavity (22) through a first bearing (44) and a pressing sleeve (45), the second straight gear (46) is arranged on the hydraulic part (41) and is meshed with the first straight gear (43), first straight gear (43) set up the transmission end in first motor (42), drive hydraulic part (41) through first motor (42) and rotate, still be provided with spline sleeve (47) on piston rod (48) of hydraulic part (41), spline sleeve (47) are used with the integral key shaft (492) cooperation that sets up at carousel (49) center, carousel (49) set up in rotation groove (23) of well platen downside cavity (22) downside, the second is hung and is hung adjusting part (491) symmetry and install on carousel (49), and use with humiture monitoring mechanism (5) cooperation.
5. The clean room cleanliness monitoring device according to claim 4, wherein: the first hanging and hanging adjusting mechanism (3) and the second hanging and hanging adjusting component (491) respectively comprise a second motor (31), a third straight gear (32), a fourth straight gear (33), a first winder (35) and a first stranded wire (34), the first winder (35) is fixedly installed, the fourth spur gear (33) is arranged on a coupling shaft at one side of the first winder (35), and is matched with a third straight gear (32) for use, the third straight gear (32) is arranged at the transmission end of the second motor (31), the first winder (35) is driven to rotate by the second motor (31), the first stranded wire (34) is wound on the first winder (35), and a first hooking and locking hook (36) is arranged at the free end of the first twisted wire (34), the first hooking hook (36) is matched with a hooking ring (55) arranged at the upper ends of the fixing plate (1) and the temperature and humidity monitoring mechanism (5) for use.
6. The clean room cleanliness monitoring device according to claim 4, wherein: the temperature and humidity monitoring mechanism (5) is movably sleeved on the piston rod (48) and comprises a first limiting sleeve (51), a second limiting sleeve (52), a first pull rod (53) and a second pull rod (54), the second limit sleeve (52) is movably sleeved in the first limit sleeve (51), and the lower end of the first limit sleeve (51) is matched with a first flange (40) arranged at the end part of the piston rod (48) for use, one end of the first pull rod (53) is hinged with the first limiting sleeve (51), the other end of the first pull rod (53) is provided with a temperature and humidity monitor (6), the middle hinged point of the first pull rod (53) is connected with one end of the second pull rod (54), the other end of the second pull rod (54) is hinged with the second limit sleeve (52), the relative distance of the temperature and humidity monitor (6) is adjusted through the second hanging and hanging adjusting assembly (491); the lower tip of second spacing sleeve (52) still is provided with spacing ring (56), spacing ring (56) and the bulge loop cooperation that sets up in first spacing sleeve (51) upper end use, just the upper end of second spacing sleeve (52) still is provided with first damping spring (58), the lower extreme and the buffering shock attenuation ring (57) of first damping spring (58) are connected, buffering shock attenuation ring (57) and the bulge loop cooperation use of first spacing sleeve (51) upper end.
7. A clean room cleanliness monitoring apparatus according to claim 3, wherein: the cleanliness monitoring mechanism (8) comprises a third hanging and hanging adjusting component (81), a gear set transmission component (82), a dust particle counter installing frame (83), a thread adjusting rod (84) and a dustproof component (85), the third hanging and hanging adjusting component (81) is integrated in a lower cavity (73) of a second integrated installing box (7) and is matched with a temperature and humidity monitoring mechanism (5) for use, the gear set transmission component (82) is arranged in a middle cavity (72) on the upper side of the lower cavity (73) and is matched with the third hanging and hanging adjusting component (81) for use, the thread adjusting rod (84) penetrates through the middle cavity (72) and an upper cavity (71) on the upper side of the middle cavity (72) and is rotatably installed on two sides of the middle cavity (72) and the upper cavity (71) through a second bearing (821), and a dust particle counter (86) is installed in the dust particle counter installing frame (83), and the first threaded connection blocks (831) on two sides of the dust particle counter mounting frame (83) are connected with the threaded adjusting rod (84).
8. The clean room cleanliness monitoring device according to claim 7, wherein: the third hanging and hanging adjusting assembly (81) comprises a fifth straight gear (811), a first electric telescopic rod (812), a second wire winder (814), a sixth straight gear (815) and a third double-shaft motor (816), the third double-shaft motor (816) is installed in a lower cavity (73), two power output shafts of the third double-shaft motor (816) are connected with the fifth straight gear (811) through the first electric telescopic rod (812), the second wire winder (814) is rotatably installed in the lower cavity (73), the sixth straight gear (815) is arranged at a driving end on one side of the second wire winder (814) and is matched with the fifth straight gear (811) for use, a second stranded wire (817) is further wound on the second wire winder (814), and a second hanging and locking hook (818) arranged at the free end of the second stranded wire (817) is matched with a hanging and hooking ring (55) arranged at the lower end of the temperature and humidity monitoring mechanism (5) for use, and a second flange (75) is also provided on the lower side of the lower cavity (73).
9. A clean room cleanliness monitoring apparatus according to claim 8, wherein: the gear set transmission assembly (82) comprises a first bevel gear (813), a first transmission rod (829) and a second transmission rod (824) which are arranged on a transmission rod of a third double-shaft motor (816), the first transmission rod (829) is vertically arranged between a lower cavity (73) and a middle cavity (72), the lower end of the first transmission rod (829) is provided with a second bevel gear (828) through a second electric telescopic rod (820), the second bevel gear (828) is matched with the first bevel gear (813) for use, a third bevel gear (827) is arranged at the upper end of the first transmission rod (829), the second transmission rod (824) is horizontally arranged in the middle cavity (72) through a rotating connecting seat (825), a fourth bevel gear (826) is arranged at the inner side end of the second transmission rod (824), and the fourth bevel gear (826) is matched with the third bevel gear (827) for use, and a fifth helical gear (823) is further arranged at the outer side end of the second transmission rod (824), the fifth helical gear (823) is matched with a sixth helical gear (822) arranged on the screw thread adjusting rod (84) for use, and the screw thread adjusting rod (84) is driven to rotate through a third double-shaft motor (816).
10. A clean room cleanliness monitoring apparatus according to claim 8, wherein: the dustproof assembly (85) comprises a draw bar (851) and a dustproof plate (87), the dustproof plate (87) is symmetrically arranged at the upper end of the upper cavity (71) and moves along a movable groove (76) on the second integrated mounting box (7) under the action of the draw bar (851), the draw bar (851) moves along a yielding groove (74) arranged on the second integrated mounting box (7), one end of the draw bar (851) is hinged with the tail end of the dustproof plate (87), the other end of the draw bar (851) is hinged with a second threaded connecting block (852), and the second threaded connecting block (852) is in threaded connection with the threaded adjusting rod (84); and a camera (88) is also mounted on the top of the dust particle counter mounting frame (83).
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| CN202210053841.3A CN114441548B (en) | 2022-01-18 | 2022-01-18 | Clean room cleanliness monitoring device |
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| CN202210053841.3A CN114441548B (en) | 2022-01-18 | 2022-01-18 | Clean room cleanliness monitoring device |
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| CN116930022A (en) * | 2023-09-15 | 2023-10-24 | 北京中邦兴业科技有限公司 | Clean room particulate matter concentration monitoring device and monitoring method |
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