CN114438457A - Mask plate structure, OLED display panel, manufacturing method of OLED display panel and display device - Google Patents

Mask plate structure, OLED display panel, manufacturing method of OLED display panel and display device Download PDF

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Publication number
CN114438457A
CN114438457A CN202111608990.3A CN202111608990A CN114438457A CN 114438457 A CN114438457 A CN 114438457A CN 202111608990 A CN202111608990 A CN 202111608990A CN 114438457 A CN114438457 A CN 114438457A
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China
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area
mask plate
opening area
display panel
oled display
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CN202111608990.3A
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李旺
李荣荣
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HKC Co Ltd
Changsha HKC Optoelectronics Co Ltd
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HKC Co Ltd
Changsha HKC Optoelectronics Co Ltd
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Priority to CN202111608990.3A priority Critical patent/CN114438457A/en
Publication of CN114438457A publication Critical patent/CN114438457A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/82Cathodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/82Cathodes
    • H10K50/822Cathodes characterised by their shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The invention provides a mask plate structure, an OLED display panel, a manufacturing method thereof and a display device, wherein the mask plate structure is used for forming a cathode film layer of the OLED display panel, the OLED display panel comprises a substrate, one side of the substrate is provided with a first pixel light-emitting area and a second pixel light-emitting area which are arranged at intervals, the first pixel light-emitting area and the second pixel light-emitting area are respectively provided with a plurality of pixel light-emitting units, the mask plate structure comprises a mask plate body, the mask plate body is provided with a first opening area, a second opening area and a communication port, and the first opening area is used for being arranged corresponding to the first pixel light-emitting area; the second opening area and the first opening area are arranged at intervals and are used for being arranged corresponding to the second pixel luminous area; and a communication port provided between the first opening area and the second opening area, partially communicating a lateral direction of the first opening area with a lateral direction of the second opening area. The scheme can reduce the area of the cathode material evaporated on the OLED display panel and improve the transparent display function of the OLED display panel.

Description

Mask plate structure, OLED display panel, manufacturing method of OLED display panel and display device
Technical Field
The invention relates to the technical field of display, in particular to a mask plate structure, an OLED display panel, a manufacturing method of the OLED display panel and a display device.
Background
The future development prospect of the transparent display technology is very optimistic, the transparent display technology breaks through the conventional technology, the interestingness of the product is increased, unprecedented convenience and visual impact are brought to people, and a new development direction is developed in some creative design display and interaction fields. In addition, the transparent display screen can meet the backlight requirement by using common ambient light, so that the energy consumption is greatly reduced, and the concept of low-carbon environmental protection and green energy conservation is fully embodied.
At present, generally make OLED display panel's negative pole through the mask plate, however, the area of current mask plate open area is greater than the area that can control the display area, because the negative pole material is low to the transmissivity of light for difficult realization transparent display function leads to transparent display effect not good enough.
Disclosure of Invention
The invention mainly aims to provide a mask plate structure, an OLED display panel, a manufacturing method of the OLED display panel and a display device, and aims to solve the technical problems that the area of an opening area is larger than that of an operable display area when the existing mask plate is subjected to evaporation, and a transparent display function is difficult to realize due to low transmittance of a cathode material to light.
In order to achieve the above object, the present invention provides a mask plate structure for forming a cathode film layer of an OLED display panel, where the OLED display panel includes a substrate, one side of the substrate has a first pixel light emitting area and a second pixel light emitting area arranged at an interval, the first pixel light emitting area and the second pixel light emitting area are respectively provided with a plurality of pixel light emitting units, the mask plate structure includes a mask plate body, and the mask plate body includes:
a first opening area for corresponding arrangement with the first pixel light emitting area;
a second opening area arranged at an interval with the first opening area and corresponding to the second pixel light emitting area; and the number of the first and second groups,
a communication port provided between the first opening area and the second opening area, partially communicating a lateral direction of the first opening area with a lateral direction of the second opening area.
Further, the mask body includes:
the first mask plate body is provided with the first opening area; and (c) a second step of,
the second mask plate body is stacked on the first mask plate body, and the second opening area is arranged on the second mask plate body;
wherein, one side that first open area is close to the second open area is provided with first intercommunication mouth, one side that the second open area is close to the first open area is provided with the second intercommunication mouth, first intercommunication mouth with the second intercommunication mouth is relative and at least partial overlapping, so that first intercommunication mouth with the second intercommunication mouth forms the intercommunication mouth.
Further, the first opening area and the second opening area are arranged in a long shape; and/or the presence of a gas in the gas,
the first communication ports are arranged in a plurality and are arranged at intervals along the length direction of the first opening area; and/or the presence of a gas in the gas,
the second communicating openings are arranged in a plurality, and the second communicating openings are arranged at intervals along the length direction of the second opening area.
Furthermore, the first opening area and the second opening area are respectively provided with a plurality of openings, and the first opening areas and the second opening areas are sequentially and alternately arranged.
In addition, the invention also provides a manufacturing method of the OLED display panel, which comprises the following steps:
providing a substrate, wherein one side of the substrate is provided with a first pixel light emitting area and a second pixel light emitting area which are arranged at intervals;
providing a first mask plate body, wherein a first opening area is arranged on the first mask plate body, and a first communication port is formed in the lateral part of the first opening area;
the first mask plate body is arranged on one side, provided with the pixel light-emitting units, of the substrate in an overlapping mode, the first opening area is placed corresponding to the first pixel light-emitting area, then cathode materials are evaporated for the first time, and after the first evaporation is completed, the first mask plate body is taken away;
providing a second mask plate body, wherein a second opening area is arranged on the second mask plate body, and a second communication port is formed in the lateral part of the second opening area;
and the second mask plate body is stacked on one side of the substrate, which is provided with the pixel light-emitting unit, the second opening area is placed corresponding to the second pixel light-emitting area, the second communication port is placed corresponding to the evaporation position of the first communication port, and then the cathode material is evaporated for the second time.
In addition, the invention also provides an OLED display panel, which comprises a substrate, wherein one side of the substrate is provided with a plurality of pixel light emitting areas which are arranged at intervals, each pixel light emitting area is provided with a plurality of pixel light emitting units, each pixel light emitting area is evaporated with a cathode film layer, an insulating area is formed between every two adjacent pixel light emitting areas, and the cathode film layer is evaporated on the local part of the insulating area so as to conduct the two adjacent pixel light emitting areas.
Further, the cathode film layers of the insulation region are arranged in multiple layers.
Furthermore, the cathode film layer of the light emitting area of the pixel is arranged in a single layer.
Further, the material of the cathode film layer of the pixel light emitting area and/or the insulating area is a magnesium-silver doped material.
In addition, the invention also provides a display device which comprises the OLED display panel.
In the scheme, the first opening area is arranged corresponding to the first pixel luminous area, the second opening area is arranged corresponding to the second pixel luminous area, namely, when cathode materials are evaporated, only the positions, corresponding to the first opening area and the second opening area, on the substrate are evaporated, and meanwhile, the lateral direction of the first opening area is locally communicated with the lateral direction of the second opening area through the communication port, so that the first pixel luminous area and the second pixel luminous area can be electrically connected with each other after evaporation; because the lateral direction of the first opening area is locally communicated with the lateral direction of the second opening area, the mask plate body is provided with a shielding area corresponding to the substrate so as to shield part of cathode materials from being evaporated on the substrate, thereby reducing the area of the cathode materials evaporated on the OLED display panel, improving the transparent display function of the OLED display panel and effectively improving the cathode boundary of the OLED display panel.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic structural view of a first mask body (partial) in the mask structure according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a second mask body (local) in the mask structure according to an embodiment of the present invention;
fig. 3 is a schematic structural view of the first mask body in fig. 1 stacked on (a local part of) the OLED display panel;
fig. 4 is a schematic structural view of the second mask body in fig. 2 stacked on (part of) the OLED display panel;
FIG. 5 is a schematic structural diagram of an OLED display panel according to an embodiment of the present invention without (partially) evaporating a cathode material;
fig. 6 is a schematic structural diagram of the OLED display panel in fig. 5 after (partially) evaporating a cathode material.
The reference numbers illustrate:
reference numerals Name (R) Reference numerals Name (R)
1 First mask plate body 201 Substrate
1a First opening region 210 Pixel luminous area
1b First communication port 211 First pixel luminous area
2 Second mask plate body 212 Second pixel luminous area
2a Second open area 230 Insulating region
2b Second communicating port 240 Pixel light emitting unit
200 OLED display panel 250 Cathode film layer
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, if directional indication is involved in the embodiment of the present invention, the directional indication is only used for explaining the relative positional relationship, the motion situation, and the like between the components in a certain posture, and if the certain posture is changed, the directional indication is changed accordingly.
In addition, if there is a description of "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
The invention mainly aims to provide a mask plate structure, an OLED display panel, a manufacturing method of the OLED display panel and a display device, and aims to solve the technical problem that the area of an opening area of the existing mask plate is larger than that of a controllable display area during evaporation, and the transparent display function is difficult to realize due to low transmittance of a cathode material to light. Fig. 1 to 4 show an embodiment of a mask plate structure according to the present invention. Fig. 5 and 6 show an OLED display panel according to an embodiment of the invention.
Referring to fig. 1 and 2, the mask plate structure provided by the present invention is used for forming a cathode film layer of an OLED display panel 200, where the OLED display panel 200 includes a substrate 201, one side of the substrate 201 has a first pixel light emitting region 211 and a second pixel light emitting region 212 that are arranged at an interval, the first pixel light emitting region 211 and the second pixel light emitting region 212 are respectively provided with a plurality of pixel light emitting units 240, and the mask plate structure includes a mask plate body, and the mask plate body has a first opening region 1a, a second opening region 2a, and a communication opening. The first opening region 1a is disposed corresponding to the first pixel light emitting region 211; the second opening region 2a and the first opening region 1a are disposed at an interval and are used to be disposed corresponding to the second pixel light emitting region 212; the communication port is provided between the first open area 1a and the second open area 2a, partially communicating the lateral direction of the first open area 1a with the lateral direction of the second open area 2 a.
In this embodiment, the first opening region 1a is disposed corresponding to the first pixel light emitting region 211, and the second opening region 2a is disposed corresponding to the second pixel light emitting region 212, that is, when depositing a cathode material, only the positions on the substrate 201 corresponding to the first opening region 1a and the second opening region 2a are deposited, and meanwhile, the lateral direction of the first opening region 1a is partially communicated with the lateral direction of the second opening region 2a through the communication port, so that after deposition, the first pixel light emitting region 211 and the second pixel light emitting region 212 can be electrically connected to each other; because the lateral direction of the first opening area 1a is locally communicated with the lateral direction of the second opening area 2a, the mask plate body corresponds to the substrate 201 and is provided with a shielding area so as to shield part of cathode materials from being evaporated on the OLED display panel 200, thereby reducing the area of the cathode materials evaporated on the OLED display panel 200, improving the transparent display function of the OLED display panel 200 and effectively improving the cathode boundary of the OLED display panel 200.
Further, referring to fig. 2 and 4, the mask body includes a first mask body 1 and a second mask body 2, and the first mask body 1 is provided with the first opening region 1 a; the second mask plate body 2 is arranged on the first mask plate body 1 in a stacked mode, and a second opening area 2a is formed in the second mask plate body; wherein a side of the first open area 1a adjacent to the second open area 2a is provided with a first communication port 1b, a side of the second open area 2a adjacent to the first open area 1a is provided with a second communication port 2b, and the first communication port 1b and the second communication port 2b are opposed to and at least partially overlap, so that the first communication port 1b and the second communication port 2b form the communication port.
In this embodiment, the first communication port 1b and the second communication port 2b at least partially overlap each other, which means that an orthographic projection of the first communication port 1b on the second mask body 2 at least partially overlaps the second communication port 2 b. In this way, when performing the evaporation operation, two layers of cathode materials are evaporated in the region of the OLED display panel 200 corresponding to the overlapping region of the first communication port 1b and the second communication port 2b, so as to reduce the cathode voltage drop.
In addition, the orthographic projection of the first opening region 1a on the second mask body 2 falls outside the second opening region 2a, and similarly, the orthographic projection of the second opening region 2a on the first mask body 1 falls outside the first opening region 1a, so that repeated evaporation of cathode materials on the first pixel region and the second pixel region is avoided.
Further, the first opening area 1a and the second opening area 2a are arranged in a long shape; and/or a plurality of first communication ports 1b are arranged, and the plurality of first communication ports 1b are arranged at intervals along the length direction of the first opening area 1 a; and/or a plurality of the second communication ports 2b are provided, and the plurality of the second communication ports 2b are provided at intervals in the longitudinal direction of the second opening area 2 a.
Preferably, in this embodiment, the first opening area 1a and the second opening area 2a extend in the same direction and are elongated, the plurality of first communication ports 1b are arranged at intervals along the longitudinal direction of the first opening area 1a, and the plurality of second communication ports 2b are arranged at intervals along the longitudinal direction of the second opening area 2 a. Therefore, on one hand, the electric connection between the first pixel area and the second pixel area is more reliable, and on the other hand, the first pixel area and the second pixel area are conducted through a plurality of double-layer cathode materials, so that the cathode voltage drop is further reduced.
It can be understood that, when the first pixel area and the second pixel area are respectively provided with a plurality of openings, the first opening area 1a and the second opening area 2a are respectively provided with a plurality of openings, and the plurality of first opening areas 1a and the plurality of second opening areas 2a are sequentially and alternately arranged, so as to improve the universality of the mask plate structure.
In addition, the invention also provides a manufacturing method of the OLED display panel 200, which includes the following steps:
providing a substrate 201, wherein one side of the substrate 201 is provided with a first pixel light emitting area 211 and a second pixel light emitting area 212 which are arranged at intervals;
providing a first mask plate body 1, wherein a first opening area 1a is arranged on the first mask plate body, and a first communication port 1b is formed in the lateral part of the first opening area 1 a;
the first mask plate body 1 is arranged on one side of the substrate 201, where the pixel light-emitting unit 240 is arranged, in an overlapping manner, the first opening area 1a is placed corresponding to the first pixel light-emitting area 211, then cathode materials are evaporated for the first time, and after the first evaporation is finished, the first mask plate body 1 is taken away;
providing a second mask plate body 2, wherein a second opening area 2a is arranged on the second mask plate body, and a second communication port 2b is formed in the lateral part of the second opening area 2 a;
the second mask body 2 is stacked on the side of the substrate 201 where the pixel light-emitting unit 240 is disposed, the second opening region 2a is placed corresponding to the second pixel light-emitting region 212, the second communication port 2b is placed corresponding to the evaporation position of the first communication port 1b, and then the cathode material is evaporated for the second time.
It should be noted that the first pixel light emitting area 211 and the second pixel light emitting area 212 are substantially the same, and each of the first pixel light emitting area 211 and the second pixel light emitting area 212 is provided with a plurality of pixel light emitting units 240, the first opening area 1a may correspond to the first pixel light emitting area 211 or the second pixel light emitting area 212, and the second opening area 2a may correspond to the first pixel light emitting area 211 or the second pixel light emitting area 212.
In addition, referring to fig. 5 and fig. 6, the present invention further provides an OLED display panel 200, where the OLED display panel 200 includes a substrate 201, one side of the substrate 201 has a plurality of pixel light emitting areas 210 arranged at intervals, each pixel light emitting area 210 has a plurality of pixel light emitting units 240, each pixel light emitting area 210 is evaporated with a cathode film layer 250, an insulating area 230 is formed between two adjacent pixel light emitting areas 210, and a part of the insulating area 230 is evaporated with the cathode film layer 250 to connect the two adjacent pixel light emitting areas 210. Specifically, the plurality of pixel light emitting areas 210 include a first pixel light emitting area 211 and a second pixel light emitting area 212 which are arranged at intervals, the first pixel light emitting area 211 and the second pixel light emitting area 212 are respectively provided with a plurality of pixel light emitting units 240,
in this embodiment, the insulating region 230 is formed between two adjacent pixel light emitting regions 210, and a cathode material is evaporated on a part of the insulating region 230, so that the two adjacent pixel light emitting regions 210 are mutually conducted, and meanwhile, the insulating region 230 is prevented from being evaporated on the whole to form the cathode material, thereby reducing the area of the cathode material of the OLED display panel 200 and improving the transparency of the OLED display panel 200.
Further, in order to reduce the cathode voltage drop of the OLED display panel 200 and ensure the display stability, in this embodiment, the cathode film layer 250 of the insulating region 230 is provided in multiple layers, specifically, based on the scheme that the mask plate body includes the first mask plate body 1 and the second mask plate body 2. The first mask body 1 is provided with a first opening area 1 a; the second mask plate body 2 is arranged on the first mask plate body 1 in a stacked mode, and a second opening area 2a is formed in the second mask plate body; a first communication port 1b is disposed on a side of the first open area 1a close to the second open area 2a, a second communication port 2b is disposed on a side of the second open area 2a close to the first open area 1a, the first communication port 1b and the second communication port 2b are opposite and at least partially overlapped, so that the first communication port 1b and the second communication port 2b form the communication port ", and the cathode film layer 250 of the insulating area 230 is disposed in a double layer. In addition, the cathode film layer 250 of the pixel light emitting area 210 is disposed in a single layer. Wherein, the material of the pixel light emitting region 210 and/or the cathode film layer 250 of the insulating region 230 is a magnesium-silver doped material.
In addition, in order to achieve the above object, the present invention further provides a display device, which includes the OLED display panel 200 according to the above technical solution. It should be noted that, the detailed structure of the OLED display panel 200 of the display device can refer to the above embodiment of the OLED display panel 200, and is not described herein again; since the OLED display panel 200 is used in the display device of the present invention, embodiments of the display device of the present invention include all technical solutions of all embodiments of the OLED display panel 200, and the achieved technical effects are also completely the same, and are not described herein again.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims (10)

1. The utility model provides a mask plate structure for form OLED display panel's negative pole rete, OLED display panel includes the base plate, base plate one side has the first pixel that is the interval setting and sends out the light zone and the second pixel sends out the light zone, first pixel send out the light zone and the second pixel sends out the light zone and respectively is equipped with a plurality of pixel luminescence units, a serial communication port, mask plate structure includes the mask plate body, the mask plate body has:
a first opening area for corresponding arrangement with the first pixel light emitting area;
a second opening region spaced from the first opening region and arranged corresponding to the second pixel light emitting region; and the number of the first and second groups,
a communication port provided between the first opening area and the second opening area, partially communicating a lateral direction of the first opening area with a lateral direction of the second opening area.
2. A mask structure according to claim 1, wherein the mask body comprises:
the first mask plate body is provided with the first opening area; and the number of the first and second groups,
the second mask plate body is stacked on the first mask plate body, and the second opening area is arranged on the second mask plate body;
wherein, one side that first open area is close to the second open area is provided with first intercommunication mouth, one side that the second open area is close to the first open area is provided with the second intercommunication mouth, first intercommunication mouth with the second intercommunication mouth is relative and at least partial overlapping, so that first intercommunication mouth with the second intercommunication mouth forms the intercommunication mouth.
3. A mask structure according to claim 2, wherein the first open area and the second open area are arranged in a long shape; and/or the presence of a gas in the gas,
the first communication ports are arranged in a plurality and are arranged at intervals along the length direction of the first opening area; and/or the presence of a gas in the gas,
the second communicating openings are arranged in a plurality, and the second communicating openings are arranged at intervals along the length direction of the second opening area.
4. A mask structure according to claim 1, wherein the first opening region and the second opening region are respectively provided in plural, and the plural first opening regions and the plural second opening regions are alternately arranged in sequence.
5. The manufacturing method of the OLED display panel is characterized by comprising the following steps of:
providing a substrate, wherein one side of the substrate is provided with a first pixel light emitting area and a second pixel light emitting area which are arranged at intervals;
providing a first mask plate body, wherein a first opening area is arranged on the first mask plate body, and a first communication port is formed in the lateral part of the first opening area;
the first mask plate body is arranged on one side, provided with the pixel light-emitting units, of the substrate in an overlapping mode, the first opening area is placed corresponding to the first pixel light-emitting area, then cathode materials are evaporated for the first time, and after the first evaporation is completed, the first mask plate body is taken away;
providing a second mask plate body, wherein a second opening area is arranged on the second mask plate body, and a second communication port is formed in the lateral part of the second opening area;
and the second mask plate body is stacked on one side of the substrate, which is provided with the pixel light-emitting unit, the second opening area is placed corresponding to the second pixel light-emitting area, the second communication port is placed corresponding to the evaporation position of the first communication port, and then the cathode material is evaporated for the second time.
6. The OLED display panel comprises a substrate, wherein one side of the substrate is provided with a plurality of pixel light emitting areas which are arranged at intervals, and each pixel light emitting area is provided with a plurality of pixel light emitting units.
7. The OLED display panel of claim 6, wherein the cathode film layers of the insulating region are arranged in a plurality of layers.
8. The OLED display panel of claim 6, wherein the cathode film layer of the light emitting region of the pixel is disposed in a single layer.
9. The OLED display panel of claim 6, wherein a material of the cathode film layer of the pixel light emitting region and/or the insulating region is a magnesium silver doped material.
10. A display device comprising the OLED display panel according to any one of claims 6 to 9.
CN202111608990.3A 2021-12-27 2021-12-27 Mask plate structure, OLED display panel, manufacturing method of OLED display panel and display device Pending CN114438457A (en)

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Application Number Priority Date Filing Date Title
CN202111608990.3A CN114438457A (en) 2021-12-27 2021-12-27 Mask plate structure, OLED display panel, manufacturing method of OLED display panel and display device

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Application Number Priority Date Filing Date Title
CN202111608990.3A CN114438457A (en) 2021-12-27 2021-12-27 Mask plate structure, OLED display panel, manufacturing method of OLED display panel and display device

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CN114438457A true CN114438457A (en) 2022-05-06

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Application publication date: 20220506