CN114435813A - Wafer cassette storage and transportation system - Google Patents
Wafer cassette storage and transportation system Download PDFInfo
- Publication number
- CN114435813A CN114435813A CN202011214845.2A CN202011214845A CN114435813A CN 114435813 A CN114435813 A CN 114435813A CN 202011214845 A CN202011214845 A CN 202011214845A CN 114435813 A CN114435813 A CN 114435813A
- Authority
- CN
- China
- Prior art keywords
- axis
- driving mechanism
- belt
- pulley
- storage frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 94
- 230000005540 biological transmission Effects 0.000 claims description 48
- 239000012636 effector Substances 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 26
- 239000003638 chemical reducing agent Substances 0.000 description 15
- 230000001360 synchronised effect Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/16—Special arrangements of articles in storage spaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/16—Special arrangements of articles in storage spaces
- B65G1/20—Articles arranged in layers with spaces between articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/902—Devices for picking-up and depositing articles or materials provided with drive systems incorporating rotary and rectilinear movements
Abstract
The invention belongs to the technical field of electronic semiconductor production, and particularly relates to a wafer box storage and transportation system. The film box storage and transportation robot comprises a film box storage and transportation robot and a film box storage frame, wherein one side of the film box storage frame is sequentially provided with a sky parking position, a buffer position and a manual position from top to bottom, and the other side of the film box storage frame is provided with loading equipment; the wafer box keeping and transporting robot is arranged in the wafer box storage frame and is used for conveying the wafer boxes among the stations. One side of the wafer box storage frame is provided with a sliding door corresponding to the artificial phase, and the sliding door is provided with a safety door lock; the film box storage frame is provided with a film box taking button and a film box placing button which are used for controlling the opening and closing of the safety door lock. The wafer box storage frame provided by the invention can be matched with the wafer box storage and transportation robot to design two rows of cache areas, so that the storage capacity of the wafer box is increased, and the requirement on high yield is met. The human station on the magazine storage frame can be used for manually taking out and placing the magazine on the human station when the overhead travelling crane goes wrong.
Description
Technical Field
The invention belongs to the technical field of electronic semiconductor production, and particularly relates to a wafer box storage and transportation system.
Background
In the field of electronic semiconductor, wafers are usually placed in a wafer cassette to perform the transportation and transportation. The number of units in the chip manufacturing equipment is more and more, the requirement of high-capacity small space is required to be met to achieve the expected target, the capacity of the chip conveying equipment is determined by the number of the wafer boxes, the transverse increase of the wafer boxes can cause the machine to be too wide, the occupied area is increased, the transverse stroke of the robot is lengthened, and other bad problems are solved, and therefore, in order to ensure that the high-capacity machine can continuously feed wafers, novel equipment capable of storing and carrying the wafer boxes is required.
Among the prior art, snatch spool box robot has only 2 degrees of freedom, X axle and Z axle promptly, and the spool box is placed the position and is put 4 day parking stalls, wherein 2 OUT and 2 IN position, and the buffer memory is distinguished IN addition, wherein 2 OUT and 2 IN. The existing film box grabbing robot only has 2 degrees of freedom, namely the degrees of freedom of movement of an X axis and a Z axis, so that only film boxes on one side can be grabbed, the grabbing range is limited, an overhead travelling crane position and a buffer position can be grabbed on one side with an l oadport (loading equipment), and the storage capacity is smaller. No person's station in the current scheme, in case the overhead traveling crane equipment that breaks down will lose the function that provides the spool box.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a film cassette storage and transportation system, so as to solve the problem that the existing film cassette grabbing robot can only grab a film cassette on one side, and the grabbing range is limited.
In order to achieve the purpose, the invention adopts the following technical scheme:
a film cassette keeping and transporting system comprises a film cassette keeping and transporting robot and a film cassette storage frame, wherein one side of the film cassette storage frame is sequentially provided with a sky parking position, a buffer parking position and a manual parking position from top to bottom, and the other side of the film cassette storage frame is provided with loading equipment; the wafer box storage and transport robot is arranged in the wafer box storage frame and used for conveying the wafer boxes among stations.
One side of the wafer box storage frame is provided with a sliding door corresponding to the artificial phase, and the sliding door is provided with a safety door lock; and the film box storage frame is provided with a film box taking button and a film box placing button which are used for controlling the safety door lock to open and close.
The wafer box storage and transportation robot comprises an X-axis driving mechanism, a Z-axis driving mechanism and an R-axis driving mechanism which are sequentially connected, wherein the X-axis driving mechanism has a degree of freedom of movement along the X-axis direction; the Z-axis driving mechanism has a degree of freedom of movement along the Z-axis direction; the R-axis driving mechanism has freedom of movement in the direction of the R axis.
The R-axis driving mechanism comprises a rotary driving mechanism, a large arm, a small arm and an end effector, and the rotary driving mechanism is connected with the Z-axis driving mechanism through a Z-axis sliding plate; the rear end of the large arm is connected with the rotary driving mechanism, the front end of the large arm is rotationally connected with the rear end of the small arm, and the front end of the small arm is rotationally connected with the end effector;
the rotary driving mechanism drives the large arm to rotate, and the large arm drives the small arm to rotate reversely, so that the end effector is driven to translate along the direction of the R axis.
The large arm comprises a large arm body and a belt transmission mechanism I, wherein the rear end of the large arm body is connected with the output end of the rotary driving mechanism; the belt transmission mechanism I is arranged in the large arm body and is connected with the rear end of the small arm; the rotary driving mechanism drives the large arm body to rotate, so that the belt transmission mechanism I is driven to rotate in the opposite direction.
The belt transmission mechanism I comprises a belt wheel I, a transmission belt I and a belt wheel II, wherein the belt wheel I is arranged on the Z-axis sliding plate and is accommodated in the rear end of the large arm; the belt wheel II is rotatably arranged at the front end of the large arm and is connected with the belt wheel I through a transmission belt I; the small arm is connected with the belt wheel II.
The small arm comprises a small arm body and a belt transmission mechanism II, wherein the rear end of the small arm body is connected with the belt wheel II; the belt transmission mechanism II is arranged in the small arm body and is connected with the end effector; the small arm body rotates to drive the belt transmission mechanism II to rotate along the reverse direction, so that the posture of the end picking device is kept unchanged.
The belt transmission mechanism II comprises a belt wheel III, a transmission belt II and a belt wheel IV, wherein the belt wheel III is arranged at the front end of the large arm and is accommodated in the rear end of the small arm body; the belt wheel IV is rotatably arranged at the front end of the small arm body and is connected with the belt wheel III through a transmission belt II; the end picking-up device is connected with the belt wheel IV.
The gear ratio of the belt wheel I to the belt wheel II is 2: 1; the gear ratio of the belt wheel III to the belt wheel IV is 1: 2.
The X-axis driving mechanism and the Z-axis driving mechanism are both belt transmission mechanisms.
The invention has the advantages and beneficial effects that:
1. the invention can enlarge the grabbing range of the grabbing piece box by adding the R-axis driving mechanism.
2. The R-axis driving mechanism can enable the end effector to move back and forth in the horizontal direction, so that the robot has the degrees of freedom in three directions of an X axis, a Z axis and an R axis, and is more flexible.
3. The storage frame of the film box can be matched with the R shaft to design two rows of cache regions, so that the storage capacity of the film box is increased, and the requirement of high yield is met.
4. The invention adds the manual position, and the film box can be taken and placed manually when the crown block is in failure.
Drawings
FIG. 1 is a schematic view of a cassette storage frame in a cassette storage and transportation system according to the present invention;
FIG. 2 is a right side view of FIG. 1;
FIG. 3 is a rear view of FIG. 1;
FIG. 4 is a schematic view of a wafer cassette storage and transfer robot according to the present invention;
FIG. 5 is a schematic diagram of the X-axis linear drive of the present invention;
FIG. 6 is an isometric view of the R-axis drive mechanism of the present invention;
fig. 7 is a schematic structural view of an R-axis driving mechanism according to the present invention.
In the figure: the device comprises an X-axis driving mechanism 1, an X-axis frame 11, an X-axis sliding plate 12, an X-axis guide rail 13, an X-axis motor 14, an X-axis reducer 15, an X-axis driving wheel 16, an X-axis transmission belt 17, an X-axis driven wheel 18, a Z-axis driving mechanism 2, an R-axis driving mechanism 3, a Z-axis sliding plate 31, a rotary driving mechanism 32, an R-axis motor 321, an R-axis reducer 322, a large arm 33, a large arm 331, a belt wheel I, a belt wheel II, a small arm 34, a small arm 341, a belt wheel III, a belt wheel II, a belt wheel IV 344, an end pick-up 35, a cassette storage frame 4, a cassette taking button 41, a safety door lock 42, a sliding door 43, a cassette releasing button 44, a crown block 5, a buffer position 6, a loading device 7 and a human station 8.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1-2, the present invention provides a film cassette storage and transportation system, which comprises a film cassette storage and transportation robot and a film cassette storage frame 4, wherein one side of the film cassette storage frame 4 is provided with a sky parking space 5, a buffer storage space 6 and a manual parking space 8 from top to bottom, and the other side is provided with a loading device 7; the cassette storage and transport robot is arranged in the cassette storage frame 4 and is used for conveying the cassettes among the stations.
As shown in fig. 3, in the embodiment of the present invention, a sliding door 43 corresponding to the human station 8 is disposed on one side of the cassette storage frame 4, and a safety door lock 42 is disposed on the sliding door 43; the cassette storage frame 4 is provided with a cassette taking button 41 and a cassette placing button 44 for controlling the opening and closing of the safety door lock 42. When the cassette taking button 41 and the cassette placing button 44 are pressed, the cassette storing and transporting robot stops moving, so that the safety door can be opened manually to take and place the cassette, and the safety of personnel can be guaranteed.
As shown in fig. 4, in the embodiment of the present invention, the cassette storing and transporting robot has three degrees of freedom in the X axis, the Z axis, and the R axis, respectively, and the X axis moves horizontally in the left-right direction, the Z axis moves vertically, and the R axis moves horizontally back and forth. Specifically, the wafer box storage and transportation robot comprises an X-axis driving mechanism 1, a Z-axis driving mechanism 2 and an R-axis driving mechanism 3 which are connected in sequence, wherein the X-axis driving mechanism 1 has a degree of freedom of movement along the X-axis direction; the Z-axis drive mechanism 2 has a degree of freedom of movement in the Z-axis direction; the R-axis drive mechanism 3 has a degree of freedom of movement in the R-axis direction.
In the embodiment of the invention, the X-axis driving mechanism 1 and the Z-axis driving mechanism 2 are both belt transmission mechanisms. As shown in fig. 5, the X-axis driving mechanism 1 includes an X-axis frame 11, an X-axis sliding plate 12, an X-axis guide rail 13, an X-axis motor 14, an X-axis reducer 15, an X-axis driving wheel 16, an X-axis transmission belt 17, and an X-axis driven wheel 18, wherein the X-axis frame 11 is provided with the X-axis guide rail 13; an X-axis driving wheel 16 and an X-axis driven wheel 18 are respectively arranged at two ends of the X-axis frame 11 and are connected through an X-axis transmission belt 17; the X-axis speed reducer 15 is arranged on the X-axis frame 11, the input end of the X-axis speed reducer 15 is connected with the X-axis motor 14, and the output end of the X-axis speed reducer 15 is connected with the X-axis driving wheel 16; the X-axis slide plate 12 is slidably fitted to the X-axis guide rail 13 and is connected to the Z-axis drive mechanism 2.
Specifically, the X-axis frame 11 is fixed to a frame of the cassette storage and transportation system, and the X-axis frame 11 is formed by welding stainless steel sections or by splicing aluminum sections. The X-axis transmission mechanism is driven by an X-axis motor 14 and an X-axis speed reducer 15 to drive an X-axis driving wheel 16 to rotate, and is driven by an X-axis transmission belt 17 between the X-axis driving wheel 16 and an X-axis driven wheel 18, and the X-axis transmission belt 17 is fixed with the X-axis sliding plate 12, so that the X-axis sliding plate 12 moves. The X-axis driven pulley 18 can be positionally adjusted by a tensioning device, so that tensioning of the X-axis drive belt 17 is achieved. A fan may be installed below the X-axis to discharge dust generated from the X-axis belt 17 through the fan. In this embodiment, two X-axis guide rails 13 are fixed on the X-axis frame 11, two sliders are arranged on each side of the X-axis guide rail 13, and the X-axis sliding plate 12 is mounted on the sliders. The X-axis guide 13 functions to support and guide the X-axis slide 12 to move along the guide direction. Hard limit and limit sensors are arranged on two sides of the X axis and are used as safety devices of the X axis sliding plate 12.
In this embodiment, the Z-axis driving mechanism 2 includes a Z-axis frame, a Z-axis guide rail and a Z-axis belt transmission mechanism, the Z-axis frame is fixed on the X-axis sliding plate 12 and moves along the X-axis guide rail 13. The Z-axis sliding plate 31 is connected with the Z-axis guide rail in a sliding mode through a Z-axis sliding block and is connected with a Z-axis belt transmission mechanism, and the Z-axis belt transmission mechanism drives the Z-axis sliding plate 31 to slide along the Z-axis guide rail. Specifically, the Z-axis frame can be formed by welding stainless steel plates or splicing metal plates, and is driven by a motor reducer and a driving belt wheel through a driven belt wheel and a synchronous belt. Two Z-axis guide rails are fixed on the Z-axis frame, each Z-axis guide rail is provided with two sliding blocks, and Z-axis sliding plates 31 are arranged on the sliding blocks. The Z-axis sliding plate 31 is fixed with a synchronous belt, and the synchronous belt drives the Z-axis sliding plate 31 to move up and down along a Z-axis guide rail. The driven belt wheel is provided with a belt tensioning mechanism which can tension the synchronous belt.
As shown in fig. 6, in the embodiment of the present invention, the R-axis driving mechanism 3 includes a rotation driving mechanism 32, a large arm 33, a small arm 34, and an end effector 35, and the rotation driving mechanism 32 is connected to the Z-axis driving mechanism 2 through a Z-axis sliding plate 31; the rear end of the large arm 33 is connected with the rotary driving mechanism 32, the front end of the large arm 33 is rotatably connected with the rear end of the small arm 34, and the front end of the small arm 34 is rotatably connected with the end effector 35; the rotary driving mechanism 32 drives the large arm 33 to rotate, and the large arm 33 drives the small arm 34 to rotate reversely, thereby driving the end effector 35 to translate along the R-axis direction.
According to the wafer box storage and transportation equipment provided by the invention, the R-axis driving mechanism 3 is additionally arranged, and the R-axis driving mechanism 3 can enable the end effector 35 to move back and forth in the horizontal direction, so that the robot has the degrees of freedom in three directions of an X axis, a Z axis and an R axis, the flexibility is higher, and the grabbing range is enlarged.
As shown in fig. 7, in the embodiment of the present invention, the rotation driving mechanism 32 includes an R-axis motor 321 and an R-axis reducer 322, wherein the R-axis reducer 322 is disposed on the Z-axis sliding plate 31, an input shaft is connected to an output shaft of the R-axis motor 321, and an output shaft of the R-axis reducer 322 is connected to the rear end of the large arm 33.
Specifically, the input ends of the R-axis motor 321 and the R-axis reducer 322 are connected by a pulley and a belt, and the R-axis reducer 322 is a harmonic reducer.
As shown in fig. 7, in the embodiment of the present invention, the large arm 33 includes a large arm body 331 and a belt transmission mechanism i, wherein the rear end of the large arm body 331 is connected to the output shaft of the R-axis reducer 322; the belt transmission mechanism I is arranged in the large arm body 331 and is connected with the rear end of the small arm 34; the rotation driving mechanism 32 drives the large arm 331 to rotate, thereby driving the belt transmission mechanism i to rotate in the opposite direction.
Specifically, the belt transmission mechanism I comprises a belt wheel I332, a transmission belt I333 and a belt wheel II 334, wherein the belt wheel I332 is fixedly arranged on the Z-axis sliding plate 31 and is accommodated in the rear end of the large arm 33; the belt wheel II 334 is rotatably arranged at the front end of the large arm 33 and is connected with the belt wheel I332 through a transmission belt I333; and the small arm 34 is connected with a belt wheel II 334. When the large arm body 331 swings in the forward direction, the belt wheel II 334 at the front end is driven to swing together, and the belt wheel II 334 and the belt wheel I332 are connected through the transmission belt I333, so that the belt wheel II 334 rotates in the reverse direction, the small arm 34 and the belt wheel II 334 rotate synchronously, namely the swinging direction of the small arm 34 is opposite to the swinging direction of the large arm 33.
As shown in fig. 7, in the embodiment of the present invention, the small arm 34 includes a small arm body 341 and a belt transmission mechanism ii, wherein the rear end of the small arm body 341 is connected to a pulley ii 334; the belt transmission mechanism II is arranged in the small arm body 341 and connected with the end effector 35; the small arm 341 rotates to drive the belt transmission mechanism ii to rotate in the reverse direction, so that the attitude of the end effector 35 is kept unchanged.
Specifically, the belt transmission mechanism ii comprises a belt wheel iii 342, a transmission belt ii 343 and a belt wheel iv 344, wherein the belt wheel iii 342 is fixedly arranged at the front end of the large arm 33 and is accommodated inside the rear end of the small arm body 341; a pulley IV 344 is rotatably arranged at the front end of the small arm body 341 and is connected with a pulley III 342 through a transmission belt II 343; end effector 35 is connected to pulley iv 344. When the small arm 341 swings reversely, the belt wheel iv 344 at the front end is driven to swing together, and the belt wheel iv 344 and the belt wheel iii 342 are connected through the transmission belt ii 343, so that the belt wheel iv 344 rotates in the forward direction, and the end effector 35 rotates together with the belt wheel iv 344, so that the end effector 35 always keeps in one direction.
Further, the gear ratio of the pulley I332 to the pulley II 334 is 2:1, and the gear ratio of the pulley III 342 to the pulley IV 344 is 1:2, so that the end effector 35 can always move linearly at an angle.
In the embodiment of the invention, the wafer box storage frame 4 is built by aluminum profiles, or a stainless steel tube welding frame is adopted, the wafer box storage frame is provided with three stations for placing the wafer boxes, namely a crown block station 5, a buffer station 6 and a human station 8, four wafer boxes can be stored on each row of stations, the two left sides of the crown block station 5 are I N bits, the crown block can place the wafer boxes on I N bits from the top, the two right sides of the crown block are OUT bits, and the crown block takes OUT the wafer boxes from the OUT bits. The buffer position 6 can increase the storage capacity of the wafer box and meet the requirement of high yield. Be provided with push-and-pull door 43 in artifical position 8 department, push-and-pull door 43 has the occupation of land space little, and convenient operation's advantage is provided with emergency exit lock device in push-and-pull door 43 both sides. When the safety door lock 42 is locked, the sliding door 43 on the side cannot be opened. There is the box button 44 of putting the piece and gets the box button 41 of piece in the top of push-and-pull door 43, when the piece box was placed to the manual work, pressed earlier and put the box button 44, made safety lock 42 remove the locking, push-and-pull door 43 can be opened, and the robot stop operation simultaneously guarantees the personal safety, then can place the piece box on I N (putting the piece) positions of manual work position. The operation is the same when taking the film box.
The film box storing and transporting robot can enlarge the grabbing range of grabbing film boxes by adding the R-axis driving mechanism, and can enable the end effector to move back and forth in the horizontal direction, so that the robot has the freedom degrees in three directions of an X axis, a Z axis and an R axis, and is more flexible. The wafer box storage frame provided by the invention can be matched with the wafer box storage and transportation robot to design two rows of cache areas, so that the storage capacity of the wafer box is increased, and the requirement on high yield is met. The human station on the magazine storage frame can be used as a buffer station, and the magazine can be taken out and placed on the human station manually when the overhead traveling crane breaks down.
The above description is only an embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, extension, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.
Claims (10)
1. A film cassette keeping and transporting system is characterized by comprising a film cassette keeping and transporting robot and a film cassette storage frame (4), wherein one side of the film cassette storage frame (4) is sequentially provided with a sky parking position (5), a buffer storage position (6) and a manual position (8) from top to bottom, and the other side is provided with loading equipment (7); the wafer box storage and transport robot is arranged in the wafer box storage frame (4) and used for conveying the wafer boxes among stations.
2. A cassette storage and handling system according to claim 1, wherein a sliding door (43) corresponding to the human station (8) is provided on one side of the cassette storage frame (4), and a safety door lock (42) is provided on the sliding door (43); the film box storage frame (4) is provided with a film box taking button (41) and a film box placing button (44) which are used for controlling the opening and closing of the safety door lock (42).
3. The system for storing and transporting a cartridge according to claim 1, wherein the robot for storing and transporting a cartridge includes an X-axis driving mechanism (1), a Z-axis driving mechanism (2), and an R-axis driving mechanism (3) connected in this order, and the X-axis driving mechanism (1) has a degree of freedom of movement in the X-axis direction; the Z-axis driving mechanism (2) has a degree of freedom of movement along the Z-axis direction; the R-axis driving mechanism (3) has freedom of movement along the direction of the R axis.
4. The cassette storage and transportation system according to claim 3, wherein the R-axis driving mechanism (3) includes a rotary driving mechanism (32), a large arm (33), a small arm (34), and an end effector (35), and the rotary driving mechanism (32) is connected to the Z-axis driving mechanism (2) via a Z-axis slide plate (31); the rear end of the large arm (33) is connected with the rotary driving mechanism (32), the front end of the large arm (33) is rotatably connected with the rear end of the small arm (34), and the front end of the small arm (34) is rotatably connected with the end effector (35);
the rotary driving mechanism (32) drives the large arm (33) to rotate, and the large arm (33) drives the small arm (34) to rotate in the reverse direction, so that the end effector (35) is driven to translate along the direction of the R axis.
5. The system for keeping and transporting cassettes in accordance with claim 4, wherein the arm (33) comprises an arm body (331) and a belt transmission mechanism I, wherein the rear end of the arm body (331) is connected to the output end of the rotary drive mechanism (32); the belt transmission mechanism I is arranged in the large arm body (331) and is connected with the rear end of the small arm (34); the rotary driving mechanism (32) drives the large arm body (331) to rotate, so that the belt transmission mechanism I is driven to rotate in the opposite direction.
6. The cassette storage and transportation system according to claim 5, wherein the belt transmission mechanism I comprises a pulley I (332), a transmission belt I (333), and a pulley II (334), wherein the pulley I (332) is disposed on the Z-axis slide plate (31) and is accommodated inside the rear end of the large arm (33); the belt wheel II (334) is rotatably arranged at the front end of the large arm (33) and is connected with the belt wheel I (332) through a transmission belt I (333); the small arm (34) is connected with the belt wheel II (334).
7. The system for keeping and transporting a cartridge in storage according to claim 6, wherein the arm (34) comprises an arm body (341) and a belt transmission mechanism II, wherein the rear end of the arm body (341) is connected to the pulley II (334); the belt transmission mechanism II is arranged in the small arm body (341) and is connected with the end effector (35); the small arm body (341) rotates to drive the belt transmission mechanism II to rotate along the reverse direction, so that the posture of the end effector (35) is kept unchanged.
8. The system for keeping and transporting cassettes in accordance with claim 7, wherein the belt driving mechanism II comprises a pulley III (342), a belt II (343), and a pulley IV (344), wherein the pulley III (342) is disposed at the front end of the large arm (33) and is accommodated inside the rear end of the small arm body (341); the belt wheel IV (344) is rotatably arranged at the front end of the small arm body (341) and is connected with the belt wheel III (342) through a transmission belt II (343); the end effector (35) is connected to the pulley iv (344).
9. The system for keeping in custody and transporting a cartridge according to claim 8, wherein a gear ratio of the pulley i (332) to the pulley ii (334) is 2: 1; the gear ratio of the pulley III (342) to the pulley IV (344) is 1: 2.
10. The cassette storage/transport system according to claim 3, wherein the X-axis drive mechanism (1) and the Z-axis drive mechanism (2) are both belt transmission mechanisms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011214845.2A CN114435813A (en) | 2020-11-04 | 2020-11-04 | Wafer cassette storage and transportation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011214845.2A CN114435813A (en) | 2020-11-04 | 2020-11-04 | Wafer cassette storage and transportation system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114435813A true CN114435813A (en) | 2022-05-06 |
Family
ID=81361585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011214845.2A Pending CN114435813A (en) | 2020-11-04 | 2020-11-04 | Wafer cassette storage and transportation system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114435813A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001088065A (en) * | 1999-09-14 | 2001-04-03 | Sony Corp | Substrate transfer method, substrate transfer device, and flat panel display manufacturing method |
| CN1906748A (en) * | 2004-10-19 | 2007-01-31 | 东京毅力科创株式会社 | Vertical heat treatment apparatus and method for operating same |
| CN101190524A (en) * | 2006-12-01 | 2008-06-04 | 日本电产三协株式会社 | Arm driving device and robot used for industrial |
-
2020
- 2020-11-04 CN CN202011214845.2A patent/CN114435813A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001088065A (en) * | 1999-09-14 | 2001-04-03 | Sony Corp | Substrate transfer method, substrate transfer device, and flat panel display manufacturing method |
| CN1906748A (en) * | 2004-10-19 | 2007-01-31 | 东京毅力科创株式会社 | Vertical heat treatment apparatus and method for operating same |
| CN101190524A (en) * | 2006-12-01 | 2008-06-04 | 日本电产三协株式会社 | Arm driving device and robot used for industrial |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6468021B1 (en) | Integrated intra-bay transfer, storage, and delivery system | |
| US10593583B2 (en) | Integrated systems for interfacing with substrate container storage systems | |
| JP7300007B2 (en) | Shelf shuttle car and shelving system | |
| TWI556344B (en) | Article transport facility | |
| JP5506979B2 (en) | Buffered loader for lot size reduction | |
| US20190229003A1 (en) | Overhead Transportation System for Transporting Objects between Multiple Work Stations | |
| JP5402233B2 (en) | Robot and article transfer system | |
| KR20050026371A (en) | Universal modular wafer transport system | |
| KR20070054683A (en) | Elevator-based tool loading and buffering system | |
| CN102804355A (en) | Substrate container storage system | |
| US20100143084A1 (en) | Transporting carrier | |
| JP2020075819A (en) | Ceiling hanging shelf and transport system | |
| JP2005225598A (en) | Carriage, and carrying device | |
| CN114435813A (en) | Wafer cassette storage and transportation system | |
| CN214691529U (en) | A packing box grabbing device for storing and taking goods dolly | |
| CN112722670A (en) | Goods storing and taking trolley and vertical warehouse | |
| CN114435935A (en) | Conveying equipment is kept to wafer box | |
| CN214691528U (en) | Wheel reversing mechanism of goods storage trolley | |
| CN214691530U (en) | Goods storing and taking trolley and vertical warehouse | |
| CN214691527U (en) | Wheel mechanism of goods storage trolley | |
| CN213439671U (en) | A manipulator for carrying brilliant box | |
| CN218641658U (en) | Transfer robot | |
| JPS61111296A (en) | Roll transporter | |
| KR20110056933A (en) | Overhead traveling vehicle system | |
| CN214358237U (en) | Packing box grabbing mechanism of goods storage trolley |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |