CN114427554A - Piezoelectric stack driven slide valve type high-speed switch valve and control method - Google Patents
Piezoelectric stack driven slide valve type high-speed switch valve and control method Download PDFInfo
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- CN114427554A CN114427554A CN202111625889.9A CN202111625889A CN114427554A CN 114427554 A CN114427554 A CN 114427554A CN 202111625889 A CN202111625889 A CN 202111625889A CN 114427554 A CN114427554 A CN 114427554A
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- stack
- valve core
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- 238000000034 method Methods 0.000 title claims description 6
- 230000033001 locomotion Effects 0.000 claims abstract description 6
- 230000000694 effects Effects 0.000 claims abstract description 4
- 230000004044 response Effects 0.000 abstract description 4
- 238000006073 displacement reaction Methods 0.000 abstract 3
- 230000005284 excitation Effects 0.000 abstract 1
- 230000009471 action Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
- F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
- F16K11/07—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members with cylindrical slides
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/22—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with sealing faces shaped as surfaces of solids of revolution
- F16K3/24—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with sealing faces shaped as surfaces of solids of revolution with cylindrical valve members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/32—Means for additional adjustment of the rate of flow
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/007—Piezo-electric stacks
- F16K31/008—Piezo-electric stacks for sliding valves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
Abstract
The invention discloses a slide valve type high-speed switch valve driven by a piezoelectric stack, and relates to the field of hydraulic control elements. The two piezoelectric stacks are nested together through the sleeve, under the excitation of a voltage signal, the pretightening force of the pretightening disc spring is overcome, the pretightening force and the pretightening disc spring output displacement are overlapped, large displacement output is realized, and the space utilization rate is improved. The valve core adopts the unilateral slide valve type, and the displacement of piezoelectric stack output passes through the output lever and transmits for the valve core, and the valve core overcomes the pretightning force that resets the dish spring under the effect of output lever, makes the ooff valve open, and the ooff valve keeps closing under the reset spring effect after the outage, and the zero setting bolt is adjusted the case and valve body cover volume of opening in advance through preventing turning round the gasket. The invention uses the nested piezoelectric stack as a driver to realize high-frequency switching of the high-speed switch valve, and simultaneously uses the slide valve type valve core to avoid collision between the valve core and the valve body during high-frequency motion, and has the characteristics of high frequency response, low noise and long service life.
Description
Technical Field
The invention relates to the field of hydraulic control elements, in particular to a piezoelectric stack driven slide valve type high-speed switch valve.
Background
The digital hydraulic technology can realize the signal transmission between the hydraulic valve and the controller without A/D or D/A conversion, and has the advantages of high fault tolerance, high speed, accurate control, high efficiency and the like. The high-speed switch valve is used as a digital valve which is widely applied at present, and the on-off time is controlled by changing the duty ratio of a PWM signal, so that the control of flow and pressure is realized. Because the traditional electromagnetic high-speed switch valve is limited by coil inductance, the response speed of the traditional electromagnetic high-speed switch valve is slow, and the control precision of the traditional electromagnetic high-speed switch valve on pressure and flow is limited. The high-speed switch valve works in a high-frequency switch state, and the problems of noise and pressure impact caused by the high-frequency switch valve are still problems to be solved.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a slide valve type high-speed switch valve driven by a piezoelectric stack, which meets the requirement of high frequency response and avoids noise vibration generated by collision of a valve core and a valve body.
The invention also provides a control method of the high-speed switch valve.
In order to achieve the purpose, the slide valve type high-speed switch valve driven by the piezoelectric stack can adopt the following technical scheme:
a piezo-electric stack driven slide valve type high-speed switch valve comprises an electromechanical converter assembly and a valve body assembly; the motor converter comprises a shell, an outer piezoelectric stack and an inner piezoelectric stack which are positioned in the shell, a sleeve and an output rod, wherein the sleeve is arranged between the outer piezoelectric stack and the inner piezoelectric stack; the sleeve comprises an accommodating cavity for accommodating the inner piezoelectric stack, a bottom wall positioned at the bottom of the accommodating cavity, and a step part positioned at the outer edge of an opening of the accommodating cavity and protruding outwards; one end of the inner piezoelectric stack abuts against the output rod, and the other end of the inner piezoelectric stack abuts against the bottom wall; the outer piezoelectric stack is arranged around the sleeve, one end of the outer piezoelectric stack abuts against the step part, and the other end of the outer piezoelectric stack abuts against the anti-torsion gasket; the valve body assembly comprises a valve body arranged on the lower end face of the shell, a slide valve type valve core arranged in the valve body to form a throttling effect, a reset bolt arranged on the lower end face of the valve core, and a reset disc spring arranged between the reset bolt and the valve core.
Furthermore, the valve core adopts a slide valve type, and the on-off control between the oil inlet and the oil return port is realized by the reciprocating motion of the slide valve and the matching of the slide valve and the valve body.
Further, the electromechanical converter also comprises a zero adjusting bolt arranged in the base, an inner hexagon bolt arranged on the shell and the base, and an anti-torsion gasket arranged between the outer piezoelectric stack and the base; the external piezoelectric stack is abutted against the base in a contact mode with the anti-torsion gasket.
Furthermore, the motor converter also comprises a pre-tightening end cover arranged on the lower end surface of the shell and a pre-tightening disc spring arranged between the pre-tightening end cover and the output rod; the output rod is always in contact with the inner piezoelectric stack under the pre-tightening force of the pre-tightening disc spring.
Further, the base is in threaded connection with the zero setting bolt, the zero setting bolt is rotated, and the covering amount of a pre-opening between the valve core and the valve body is adjusted through the anti-twisting gasket.
The control method of the slide valve type high-speed switch valve driven by the piezoelectric stack adopts the following technical scheme:
PWM voltage signals are applied to the outer piezoelectric stack and the inner piezoelectric stack, the outer piezoelectric stack and the inner piezoelectric stack are electrified and deformed, the output rod is pushed to move downwards, the valve core is pushed by the output rod to move downwards, so that a throttling port formed by the valve core and the valve body is opened, the oil inlet is communicated with the oil outlet, and the high-speed switch valve is opened.
Has the advantages that:
1. the piezoelectric stack is used as the driver, so that the high-speed switch valve has higher response speed.
2. The valve core adopts a slide valve type structure, avoids collision between the valve core and the valve body during high-frequency motion, and has the characteristics of low noise and long service life.
3. The valve core of the invention adopts a three-shoulder single-side slide valve structure type, has simple structure and process and low processing cost and is suitable for batch production.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a piezo-stack driven slide valve type high-speed switch valve according to an embodiment of the invention;
FIG. 2 is a schematic representation of a spool-type high speed on-off valve closed position according to an embodiment of the present invention;
fig. 3 is a schematic diagram of the valve open position of the spool-type high-speed switch according to an embodiment of the present invention.
Detailed Description
The invention is further elucidated with reference to the drawings and the detailed description.
As shown in fig. 1, 2, and 3, the present embodiment provides a slide valve type high-speed switching valve driven by a piezoelectric stack, which includes a zero adjusting bolt 1, a base 2, an anti-torsion gasket 4, an inner hexagon bolt 3, an outer shell 5, an outer piezoelectric stack 6, a sleeve 7, an inner piezoelectric stack 8, an output rod 9, a pre-tightening disc spring 10, a pre-tightening end cover 11, a valve body 12, a valve core 13, an O-ring one 14, an O-ring two 15, a reset disc spring 16, and a reset bolt 17.
The base 2 is detachably and fixedly connected with the shell 5 (through four inner hexagon screws 4). The base 2 and the zero setting bolt 1 are connected through threads, the zero setting bolt 1 is screwed up, and the axial distance between the anti-torsion gasket 4 and the base 2 can be adjusted, so that the valve core and the valve body pre-opening covering amount can be adjusted. Base 2 is equipped with the location boss, prevents turning round gasket 4 and is equipped with positioning groove, and both cooperate each other to form the radial positioning of preventing turning round gasket 4, prevent transmission moment of torsion to external pressure piezoelectric stack 6. The outer piezoelectric 6 stack and the inner piezoelectric 8 stack form a nested structure through the sleeve 7, and the space utilization rate is improved. The sleeve 7 comprises a containing cavity 72 for containing the inner piezoelectric stack 8, a bottom wall 71 positioned at the bottom of the containing cavity, and a step part 73 positioned at the outer edge of the opening of the containing cavity and protruding outwards; one end of the inner piezoelectric stack 8 abuts against the output rod 9 and the other end abuts against the bottom wall 71; the outer piezo stack 6 is arranged around the sleeve 7 and one end of the outer piezo stack 6 abuts against the step 73 and the other end abuts against the anti-twist gasket 4. The output rod 9 is always in contact with the inner piezoelectric stack 8 under the action of the pre-tightening disc spring 10, the pre-tightening end cover 11 is in threaded connection with the shell 5, and the pre-tightening force of the pre-tightening disc spring 10 is adjusted through the pre-tightening end cover 11. Output rod 9 is equipped with the location boss, and shell 5 is equipped with the positioning groove, and both cooperate and form the radial location of output rod 9, prevent that output rod 9 from transmitting the moment of torsion to interior piezo-electric stack 8.
The valve body 12 is screwed to the housing 5. The valve core 13 is arranged in the valve body 12, and the valve core 13 is always in contact with the output rod 9 under the action of the pre-tightening force of the reset disc spring 16. The reset bolt 17 is in threaded connection with the valve body 12, and the pretightening force of the reset disc spring 16 is adjusted through the reset bolt 17.
The working principle of the invention is as follows:
1. as shown in fig. 2, when the outer piezoelectric stack 6 and the inner piezoelectric stack 8 are not energized, the output rod 9 is at the uppermost position under the action of the pre-tightening force of the pre-tightening disc spring 10, the valve core 13 is kept in contact with the output rod 9 under the action of the pre-tightening force of the resetting disc spring 16, the valve core 13 is at the uppermost position, a throttle formed by the valve core 13 and the valve body 12 is kept closed, the oil inlet P and the oil outlet T are not communicated, and the high-speed switch valve is closed. By adjusting the zero set bolt 1, the covering amount of the pre-opening of the throttling ports of the valve core 13 and the valve body 12 can be adjusted.
2. As shown in fig. 3, when the outer piezoelectric stack 6 and the inner piezoelectric stack 8 are electrified and deformed, the output rod 9 is pushed to move downwards, and the output rod 9 pushes the valve core 13 to move downwards. The movement of the valve core 13 opens a throttle port 18 formed by the valve core 13 and the valve body 12, the oil inlet P and the oil outlet T are communicated, and the high-speed switch valve is opened. By applying PWM voltage signals to the external piezoelectric stack 6 and the internal piezoelectric stack 8, high-frequency switching motion of the slide valve type high-speed switching valve driven by the piezoelectric stacks can be realized.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that other parts not specifically described are within the prior art or common general knowledge to those of ordinary skill in the art. Without departing from the principle of the invention, several improvements and modifications can be made, and these improvements and modifications should also be construed as the scope of the invention.
Claims (6)
1. A piezo-electric stack driven slide valve type high-speed switch valve is characterized in that: includes an electro-mechanical converter assembly and a valve body assembly;
the motor converter comprises a shell (5), a base (2) arranged at the upper end of the shell (5), an outer piezoelectric stack (6) and an inner piezoelectric stack (8) which are positioned in the shell, a sleeve (7) arranged between the outer piezoelectric stack (6) and the inner piezoelectric stack (8), and an output rod (9); the sleeve (7) comprises a containing cavity (72) for containing the internal piezoelectric stack (8), a bottom wall (71) positioned at the bottom of the containing cavity, and a step part (73) positioned at the outer edge of the opening of the containing cavity and protruding outwards; one end of the inner piezoelectric stack (8) abuts against the output rod (9) and the other end abuts against the bottom wall (71); the outer piezoelectric stack (6) is arranged around the sleeve (7), one end of the outer piezoelectric stack (6) abuts against the step part (73) and the other end of the outer piezoelectric stack (6) abuts against the anti-torsion gasket (4);
the valve body assembly comprises a valve body (12) arranged on the lower end face of the shell (5), a slide valve type valve core (13) arranged in the valve body (12) to form a throttling effect, a reset bolt (17) arranged on the lower end face of the valve core (13), and a reset disc spring (16) arranged between the reset bolt (17) and the valve core (13).
2. A piezo-stack actuated spool-type high-speed switching valve according to claim 1, wherein: the valve core (13) adopts a slide valve type, and is matched with the valve body (12) through the reciprocating motion of the slide valve to realize the on-off control between the oil inlet and the oil return port.
3. A piezo-stack actuated spool-type high-speed switching valve according to claim 1, wherein: the motor converter also comprises a zero adjusting bolt (1) arranged in the base (2), an inner hexagon bolt (3) arranged on the shell (5) and the base (2), and an anti-twisting gasket (4) arranged between the outer piezoelectric stack (6) and the base (5); the outer piezoelectric stack (6) is abutted against the base (2) in a contact mode with the anti-torsion gasket (4).
4. A piezo-stack actuated spool-type high speed switching valve according to claim 3, wherein: the motor converter also comprises a pre-tightening end cover (11) arranged on the lower end face of the shell (5) and a pre-tightening disc spring (10) arranged between the pre-tightening end cover (11) and the output rod (9); the output rod (9) is always in contact with the inner piezoelectric stack (8) under the pre-tightening force of the pre-tightening disc spring (10).
5. A piezo-stack driven spool-type high speed switching valve according to claim 4, wherein: the base (2) is connected with the zero setting bolt (1) through threads, the zero setting bolt (1) is rotated, and the covering amount of a pre-opening between the valve core (13) and the valve body (12) is adjusted through the anti-torsion gasket (4).
6. A control method of a slide valve type high-speed switch valve driven by a piezoelectric stack according to any one of claims 1 to 5 is characterized in that PWM voltage signals are applied to the external piezoelectric stack (6) and the internal piezoelectric stack (8), the external piezoelectric stack (6) and the internal piezoelectric stack (8) are electrified to deform, an output rod (9) is pushed to move downwards, the output rod (9) pushes a valve core (13) to move downwards, so that a throttling port (18) formed by the valve core (13) and a valve body (12) is opened, an oil inlet (P) is communicated with an oil outlet (T), and the high-speed switch valve is opened.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111625889.9A CN114427554B (en) | 2021-12-28 | 2021-12-28 | Slide valve type high-speed switching valve driven by piezoelectric stack and control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111625889.9A CN114427554B (en) | 2021-12-28 | 2021-12-28 | Slide valve type high-speed switching valve driven by piezoelectric stack and control method |
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| Publication Number | Publication Date |
|---|---|
| CN114427554A true CN114427554A (en) | 2022-05-03 |
| CN114427554B CN114427554B (en) | 2023-06-20 |
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| CN202111625889.9A Active CN114427554B (en) | 2021-12-28 | 2021-12-28 | Slide valve type high-speed switching valve driven by piezoelectric stack and control method |
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Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5148833A (en) * | 1988-12-23 | 1992-09-22 | Kabushiki Kaisha Komatsu Seisakusho | High-speed flow control valve |
| JP2004197754A (en) * | 2002-12-16 | 2004-07-15 | Fujikin Inc | Piezoelectric element driven metal diaphragm control valve |
| CN101235903A (en) * | 2008-03-11 | 2008-08-06 | 浙江大学 | Piezo crystal drive high speed switch valve |
| CN102979849A (en) * | 2012-12-13 | 2013-03-20 | 浙江师范大学 | Active-type piezoelectric hydraulic damper |
| CN102979941A (en) * | 2012-12-13 | 2013-03-20 | 浙江师范大学 | High-capacity piezoelectric stack valve provided with sensor |
| CN102996838A (en) * | 2012-12-13 | 2013-03-27 | 浙江师范大学 | Intelligent large-flow electro-hydraulic valve |
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| CN104590528A (en) * | 2014-12-30 | 2015-05-06 | 浙江大学 | Ship propulsion shafting longitudinal vibration control device based on piezoelectric stack-hydraulic micro-displacement amplifier |
| CN106224322A (en) * | 2016-08-26 | 2016-12-14 | 南京航空航天大学 | A kind of two-way adjustable speed electricity hydrostatic actuator and method of work thereof |
| CN110219846A (en) * | 2019-05-23 | 2019-09-10 | 浙江大学城市学院 | A kind of high-speed driving device towards two-dimensional valve |
| CN110594477A (en) * | 2019-09-29 | 2019-12-20 | 南京航启电液控制设备有限公司 | Soft landing PWM control method and system for piezoelectric high-speed switch valve |
| CN110985212A (en) * | 2019-11-04 | 2020-04-10 | 南京航空航天大学 | Indirect hydraulic drive type fuel oil switch valve of pump control cylinder and control method thereof |
| CN111188942A (en) * | 2020-02-20 | 2020-05-22 | 大连理工大学 | Piezoelectric valve capable of sensing force and displacement automatically and displacement control method |
| CN112081938A (en) * | 2020-07-14 | 2020-12-15 | 南京航空航天大学 | Piezoelectric driving large-flow fuel valve |
| CN112290824A (en) * | 2020-09-14 | 2021-01-29 | 南京航空航天大学 | Threaded piezoelectric linear actuator with high thrust and working method thereof |
| CN113422537A (en) * | 2021-06-09 | 2021-09-21 | 南京航空航天大学 | High-frequency large-displacement multidimensional discrete magnetostrictive actuator and control method |
-
2021
- 2021-12-28 CN CN202111625889.9A patent/CN114427554B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5148833A (en) * | 1988-12-23 | 1992-09-22 | Kabushiki Kaisha Komatsu Seisakusho | High-speed flow control valve |
| JP2004197754A (en) * | 2002-12-16 | 2004-07-15 | Fujikin Inc | Piezoelectric element driven metal diaphragm control valve |
| CN101235903A (en) * | 2008-03-11 | 2008-08-06 | 浙江大学 | Piezo crystal drive high speed switch valve |
| CN102979849A (en) * | 2012-12-13 | 2013-03-20 | 浙江师范大学 | Active-type piezoelectric hydraulic damper |
| CN102979941A (en) * | 2012-12-13 | 2013-03-20 | 浙江师范大学 | High-capacity piezoelectric stack valve provided with sensor |
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| CN104590528A (en) * | 2014-12-30 | 2015-05-06 | 浙江大学 | Ship propulsion shafting longitudinal vibration control device based on piezoelectric stack-hydraulic micro-displacement amplifier |
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| CN110985212A (en) * | 2019-11-04 | 2020-04-10 | 南京航空航天大学 | Indirect hydraulic drive type fuel oil switch valve of pump control cylinder and control method thereof |
| CN111188942A (en) * | 2020-02-20 | 2020-05-22 | 大连理工大学 | Piezoelectric valve capable of sensing force and displacement automatically and displacement control method |
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| CN112290824A (en) * | 2020-09-14 | 2021-01-29 | 南京航空航天大学 | Threaded piezoelectric linear actuator with high thrust and working method thereof |
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| Publication number | Publication date |
|---|---|
| CN114427554B (en) | 2023-06-20 |
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