CN114426394B - Harmonic oscillator fixing device for welding hemispherical harmonic oscillator and electrode substrate - Google Patents

Harmonic oscillator fixing device for welding hemispherical harmonic oscillator and electrode substrate Download PDF

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Publication number
CN114426394B
CN114426394B CN202210252942.3A CN202210252942A CN114426394B CN 114426394 B CN114426394 B CN 114426394B CN 202210252942 A CN202210252942 A CN 202210252942A CN 114426394 B CN114426394 B CN 114426394B
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China
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harmonic oscillator
rod
hemispherical
electrode substrate
fixing device
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CN114426394A (en
Inventor
霍炎
解伟男
魏振楠
王常虹
任顺清
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00Re-forming shaped glass
    • C03B23/20Uniting glass pieces by fusing without substantial reshaping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders

Abstract

A harmonic oscillator fixing device for welding a hemispherical harmonic oscillator and an electrode substrate relates to a precision assembly detection system. The problem of gap error between the fused quartz hemisphere harmonic oscillator and the fused quartz electrode substrate caused by temperature change in the welding process of the hemisphere harmonic oscillator and the electrode substrate is solved. The invention relates to a harmonic oscillator fixing device for welding a hemispherical harmonic oscillator and an electrode substrate, which comprises two supporting plates, two pressure rods and two supporting rods, wherein the two supporting plates are arranged at intervals up and down and fixedly connected through the two supporting rods, the two pressure rods are arranged up and down oppositely and positioned between the two supporting plates, the upper pressure rod is fixedly connected to the upper supporting plate, the lower pressure rod is fixedly connected to the lower supporting plate, the two pressure rods clamp the mushroom-shaped hemispherical harmonic oscillator, and the two pressure rods are made of ceramic materials. The fixing device is mainly used for fixing the hemispherical harmonic oscillator.

Description

Harmonic oscillator fixing device for welding hemispherical harmonic oscillator and electrode substrate
Technical Field
The invention relates to a precision assembly detection system, in particular to a harmonic oscillator fixing device for welding a hemispherical harmonic oscillator and an electrode substrate.
Background
The hemispherical resonator gyroscope is a novel solid-state vibrating gyroscope, and the measurement of the angular rate is realized by detecting the azimuth angle of the standing wave of the hemispherical resonator through the capacitance change formed by the lip edge of the hemispherical resonator. From the development process and the existing application condition of the hemispherical resonant gyroscope, the hemispherical resonant gyroscope has the inherent characteristics of high precision, high reliability and long service life, and has the characteristics of simple structure, strong space ionizing radiation resistance and the like, and the hemispherical resonant gyroscope has unique physical characteristics, so that the hemispherical resonant gyroscope becomes a core component of an inertial navigation system with long service life, high precision, high stability, low cost and miniaturization, can perfectly adapt to the fields of attitude control of spacecrafts and satellites, aircraft navigation, missile guidance, accurate positioning and orientation, ship navigation, oil drilling exploration and the like, and has the widest application prospect.
The welding process deviation of the fused quartz hemispherical harmonic oscillator and the fused quartz electrode substrate is one of main error sources of the hemispherical resonator gyroscope, a gap error between the fused quartz hemispherical harmonic oscillator and the fused quartz electrode substrate can be generated in the welding process, and the gap error can cause that capacitance values between lips of 8 electrodes and the hemispherical harmonic oscillator which are uniformly distributed in the circumferential direction are different, so that the detection and control precision of the hemispherical resonator gyroscope is influenced. Before the welding process, the positions of the hemispherical harmonic oscillator and the electrode substrate are precisely adjusted, and how to ensure that the relative position between the hemispherical harmonic oscillator and the electrode substrate is not changed in the welding process is very important. At present, in the prior art in China, the relative position is finely adjusted mainly by means of a micrometer, and the relative position between the hemispherical harmonic oscillator and the electrode substrate is fixed by means of mechanisms such as a positioning pin and the like.
Disclosure of Invention
The technical problems to be solved by the invention are as follows: in the welding process of the hemispherical harmonic oscillator and the quartz electrode substrate, the deformation of the device caused by the temperature change easily causes the gap error between the fused quartz hemispherical harmonic oscillator and the fused quartz electrode substrate, and the gap error can cause the capacitance values between lip edges of 8 electrodes and the hemispherical harmonic oscillator which are uniformly distributed in the circumferential direction to be different, thereby influencing the detection and control precision of the hemispherical resonant gyroscope; and further provides a harmonic oscillator fixing device for welding the hemispherical harmonic oscillator and the electrode substrate.
The technical scheme adopted by the invention for solving the technical problems is as follows:
the utility model provides a be used for hemisphere harmonic oscillator and electrode substrate welded harmonic oscillator fixing device, includes two backup pads, two depression bars and two spinal branch vaulting poles, two backup pads relative interval about set up and carry out fixed connection through two spinal branch vaulting poles, two depression bars set up relatively from top to bottom, and be in between two backup pads, the depression bar rigid coupling that is in the top is in the backup pad of top, the depression bar rigid coupling that is in the below is in the backup pad of below, two depression bars with mushroom-shaped hemisphere harmonic oscillator centre gripping, and two depression bars are ceramic material.
Furthermore, the supporting plate comprises a fixed disc and two cross rods, and the two cross rods are respectively arranged on two sides of the fixed disc and are integrally connected with the fixed disc; the two pressure rods are respectively connected to the fixed discs of the two support plates; the top end of the supporting rod is fixedly connected with the outer end of the cross rod of the supporting plate above, and the bottom end of the supporting rod is fixedly connected with the outer end of the cross rod of the supporting plate below.
Furthermore, the end part of the outer end of the cross rod is provided with a positioning mounting hole, the two ends of the support rod are respectively designed into boss structures, the end parts of the two ends are also provided with mounting threaded holes, and the boss of the support rod is inserted into the positioning mounting hole of the cross rod and is connected through a fastening screw.
Further, the central point of fixed disc put and to open and have circular recess, circular recess's tank bottom department by outer to interior open in proper order and have round first rubber circle mounting groove, round screw thread mounting hole and round second rubber circle mounting groove, first rubber circle mounting groove and second rubber circle mounting groove in imbed an elastic rubber circle respectively.
Furthermore, the pressing rods comprise mounting discs and central fixing rods, one end of each central fixing rod is fixedly connected to the center of each mounting disc in a perpendicular mode, mushroom-shaped hemispherical harmonic oscillators are clamped by the other ends of the central fixing rods of the two pressing rods, a plurality of mounting through holes are formed in the mounting discs in the circumferential direction by taking the central fixing rods as shafts, the mounting discs are inserted into the circular grooves of the supporting plates, and the pressing rods are connected with the supporting plates through the mounting through holes, the fastening screws and the threaded mounting holes.
Furthermore, the other end of the central fixing rod is of a multi-split structure and is matched with the end parts of the two ends of the central rod of the mushroom-shaped hemispherical harmonic oscillator.
Furthermore, the valving structure on the central fixing rod is composed of four arc blocks which are uniformly arranged in the circumferential direction, a cross-shaped groove is formed between the four arc blocks, and the central position of the cross-shaped groove is circular.
Furthermore, the length of the central fixing rod of the lower pressure lever is longer than that of the central fixing rod of the upper pressure lever.
Furthermore, the harmonic oscillator fixing device further comprises a base, a plurality of base mounting holes are circumferentially formed in the fixing disc of the supporting plate located below by taking the circular groove as the center, and the supporting plate located below is in threaded connection with the base mounting holes through fastening screws.
Furthermore, the supporting plate is made of stainless steel. Compared with the prior art, the invention has the following beneficial effects:
1. the pressure lever designed by the invention is made of ceramic materials, so that the phenomenon that the position of the mushroom-shaped hemispherical harmonic oscillator is changed due to deformation of a device caused by temperature rise in the welding process of the fused quartz hemispherical harmonic oscillator and the fused quartz electrode substrate, the butt joint precision of the mushroom-shaped hemispherical harmonic oscillator and the quartz electrode substrate is influenced, and finally, a gap error is generated between the welded fused quartz hemispherical harmonic oscillator and the fused quartz electrode substrate;
2. the contact part of the pressure lever and the mushroom-shaped hemispherical harmonic oscillator is designed into a four-lobe structure, so that the pressure lever is ensured to be fully contacted with the end face of the harmonic oscillator rod, and the reliability of the fixing device is improved;
3. the rubber ring is arranged at the connecting part of the ceramic pressure lever and the supporting plate, so that the damage to the structure of the pressure lever caused by uneven stress of the pressure lever due to installation flatness in the fastening process is avoided, and the reliability of the device is improved;
4. the backup pad design has the location mounting hole, and the device installation of being convenient for promotes fixing device availability factor, and the location mounting hole possesses the restraint function to the bracing piece position simultaneously, can strengthen device frame construction stability.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention to its proper form.
FIG. 1 is a schematic view of the assembled overall structure of the present invention;
FIG. 2 is a schematic view of the present invention mounted on a base;
FIG. 3 is an exploded view of the structure of the present invention;
FIG. 4 is a schematic view of the support plate in an upper position;
FIG. 5 is a schematic view of the structure of the support plate at the bottom;
FIG. 6 is a schematic view of the structure of the pressing rod at the upper part;
FIG. 7 is a schematic view of the structure of the lower compression bar;
FIG. 8 is a front view of the present invention;
FIG. 9 is an enlarged view of a portion of FIG. 8 at A;
FIG. 10 is an enlarged view of a portion of FIG. 8 at B;
fig. 11 is a side view of the present invention.
In the figure: 1-a support plate; 1-1-a fixed disc; 1-1-1-circular groove; 1-1-2-a first rubber ring mounting groove; 1-1-3-thread mounting holes; 1-1-4-a second rubber ring mounting groove; 1-1-5-elastic rubber ring; 1-1-6-base mounting holes; 1-2-cross bar; 1-2-1-positioning the mounting hole; 2-a compression bar; 2-1-installing a disc; 2-1-1-installing a through hole; 2-2-central fixed rod; 2-2-1-arc block; 2-2-2-cross pattern grooves; 3-a support bar; 4-mushroom-shaped hemisphere harmonic oscillator; 5-base.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and the following embodiments are used for illustrating the present invention and are not intended to limit the scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inside", "outside", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted" and "connected" are to be construed broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in a specific case to those of ordinary skill in the art.
Referring to fig. 1 to 11, the embodiment of the present application provides a harmonic oscillator fixing device for welding a hemisphere harmonic oscillator and an electrode substrate, including two backup pads 1, two depression bars 2 and two bracing pieces 3, two backup pads 1 up-down relative interval set up and carry out fixed connection through two bracing pieces 3, two depression bars 2 set up relatively from top to bottom, and be in between two backup pads 1, the 2 rigid couplings of depression bar that are in the top are on the backup pad 1 that is in the top, the 2 rigid couplings of depression bar that are in the below are on the backup pad 1 that is in the below, two depression bars 2 with mushroom-shaped hemisphere harmonic oscillator 4 centre gripping, and two depression bars 2 are ceramic material.
In the present embodiment, as shown in fig. 1, fig. 2 and fig. 3, the two supporting plates 1 and the two supporting rods 3 form a supporting frame of the mushroom-shaped hemispherical resonator 4, the supporting plate located below provides a stable support for the whole set of device, and a mounting through hole is designed on the supporting plate and can be connected with the base 5, so as to improve the stability of the device and ensure the stable connection between the mushroom-shaped hemispherical resonator 4 and the quartz electrode substrate; the mushroom-shaped hemispherical resonator 4 is clamped by the two pressure rods 2, and the quartz hemispherical resonator and the quartz electrode substrate are deformed due to temperature rise in the welding process, so that the position of the mushroom-shaped hemispherical resonator 4 is changed, the fixing reliability of the mushroom-shaped hemispherical resonator is affected, the butt joint precision of the mushroom-shaped hemispherical resonator 4 and the quartz electrode substrate is affected, and finally a gap error is generated between the welded fused quartz hemispherical resonator and the fused quartz electrode substrate, the gap error can cause that the capacitance values between 8 electrodes circumferentially and hemispherical resonator lips are different on the fused quartz electrode substrate, and the detection and control precision of the hemispherical resonator is affected, so the two pressure rods 2 for clamping the mushroom-shaped hemispherical resonator 4 are made of a ceramic material with a low temperature expansion coefficient, the device is prevented from being deformed, the quick and reliable fixing function of the mushroom-shaped hemispherical resonator 4 is realized, the welding efficiency of the fused quartz hemispherical resonator and the fused quartz electrode substrate is fully improved, and the batch production significance of hemispherical resonance is achieved.
In a possible embodiment, the supporting plate 1 comprises a fixed disc 1-1 and two cross rods 1-2, wherein the two cross rods 1-2 are respectively arranged at two sides of the fixed disc 1-1 and are integrally connected with the fixed disc 1-1; the two pressure rods 2 are respectively connected to the fixed discs 1-1 of the two support plates 1, the top end of the support rod 3 is fixedly connected with the outer end of the cross rod 1-2 of the support plate 1 above, and the bottom end of the support rod 3 is fixedly connected with the outer end of the cross rod 1-2 of the support plate 1 below.
In this embodiment, as shown in fig. 11, the outer diameter of the fixing disk 1-1 is wider than the maximum outer diameter of the mushroom-shaped hemispherical resonator 4, so that the fixing device can be stabilized and the mushroom-shaped hemispherical resonator 4 can be protected.
In a possible embodiment, the outer end part of the cross rod 1-2 is provided with a positioning installation hole 1-2-1, the two ends of the support rod 3 are respectively designed into a boss structure, the end parts of the two ends are also provided with installation threaded holes, and the boss of the support rod 3 is inserted into the positioning installation hole 1-2-1 of the cross rod 1-2 and is connected through a fastening screw.
In this embodiment, as shown in fig. 3, 8 and 9, the support rod 3 is made of stainless steel, the support rod 3 is firmly connected with the support plate above and the support plate below through fastening screws, so as to form an integral frame of the fixing device, the boss structures at two ends of the support rod 3 are matched with the positioning mounting holes 1-2-1 on the support plate, and the bosses on the support rod can be embedded into the positioning mounting holes 1-2-1 on the support plate, so as to facilitate installation, realize position constraint on the support rod, eliminate unstable factors of the frame structure, improve the stability of the device, and enhance the reliability of fixing the mushroom-shaped hemispherical resonator.
In a possible embodiment, a circular groove 1-1-1 is formed in the center of the fixed disc 1-1, a circle of first rubber ring mounting groove 1-1-2, a circle of threaded mounting hole 1-1-3 and a circle of second rubber ring mounting groove 1-1-4 are sequentially formed in the groove bottom of the circular groove 1-1-1 from outside to inside, and an elastic rubber ring 1-1-5 is embedded into each of the first rubber ring mounting groove 1-1-2 and the second rubber ring mounting groove 1-1-4.
In this embodiment, as shown in fig. 4 and 5, two large and small rubber ring installation grooves are designed in the fixed disk 1-1 of the support plate 1, after the rubber rings are installed in the rubber ring installation grooves, because the rubber rings are located at the joints of the pressure rods and the support plate, the two pressure rods 2 are respectively installed in the circular grooves 1-1-1 of the two support plates 1 through the fastening screws, so that the phenomenon that stress is uneven between the pressure rods 2 and the bottoms of the circular grooves 1-1-1 in the tightening process due to the fact that the fastening screws are easy to cause, and further, the installation plane between the pressure rods 2 and the bottoms of the circular grooves 1-1-1 is uneven, the mechanical structure of the pressure rods made of ceramic materials is damaged in the fastening process of the fastening screws, and the reliability of fixing of the mushroom-shaped hemispherical harmonic oscillator is affected.
In a possible embodiment, the compression bar 2 comprises a mounting disc 2-1 and a central fixing bar 2-2, one end of the central fixing bar 2-2 is vertically and fixedly connected to the central position of the mounting disc 2-1, the mushroom-shaped hemispherical resonator 4 is clamped by the other ends of the central fixing bars 2-2 of the two compression bars 2, a plurality of mounting through holes 2-1-1 are circumferentially formed in the mounting disc 2-1 by taking the central fixing bar 2-2 as an axis, the mounting disc 2-1 is inserted into the circular groove 1-1-1 of the support plate 1, and the compression bar 2 is screwed on the threaded mounting hole 1-1-3 of the support plate 1 through the mounting through hole 2-1-1 and a fastening screw.
In this embodiment, as shown in fig. 6 and 7, three mounting through holes 2-1-1 are provided, and the mounting through holes are firmly connected to the support plate 1 by fastening screws. In a possible embodiment, the other end of the central fixing rod 2-2 is a multi-split structure and is matched with the two end parts of the central rod of the mushroom-shaped hemispherical resonator 4.
In a possible embodiment, the split structure on the central fixing rod 2-2 is composed of four arc-shaped blocks 2-2-1 which are uniformly arranged in the circumferential direction, a cross-shaped groove 2-2-2 is formed between the four arc-shaped blocks 2-2-1, and the center position of the cross-shaped groove 2-2-2 is circular.
In the present embodiment, as shown in fig. 6 and 7, the end of the central fixing rod 2-2 is divided into four lobes, so that the mushroom-shaped hemispherical resonator 4 is fully contacted with the ejector rod of the mushroom-shaped hemispherical resonator 4 in the fixing process of the mushroom-shaped hemispherical resonator 4, and the mushroom-shaped hemispherical resonator 4 is prevented from being extruded from the side due to uneven stress in the pressing process, thereby improving the reliability of the fixing device.
In a possible embodiment, the length of the central fixing rod 2-2 of the lower press rod 2 is longer than the length of the central fixing rod 2-2 of the upper press rod 2.
In this embodiment, as shown in fig. 6 and 7, the length of the pressing bar at the lower side is longer than that of the pressing bar at the upper side, which facilitates the placement of the fixing device for the fused quartz electrode substrate.
In a possible embodiment, the harmonic oscillator fixing device further comprises a base 5, a plurality of base mounting holes 1-1-6 are circumferentially formed in the fixing disc 1-1 of the lower support plate 1 by taking the circular groove 1-1-1 as a center, and the lower support plate 1 is screwed on the base 5 through fastening screws and the base mounting holes 1-1-6.
In the present embodiment, as shown in fig. 2, the lower supporting plate 1 is designed with four base mounting holes 1-1-6, which can be connected with the base 5 by fastening screws, so as to prevent the device from overturning and improve the stability of the device.
In a possible embodiment, the support plate 1 is made of stainless steel.
Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that features described in different dependent claims and herein may be combined in ways different from those described in the original claims. It is also to be understood that features described in connection with individual embodiments may be used in other described embodiments.

Claims (7)

1. A harmonic oscillator fixing device for welding a hemispherical harmonic oscillator and an electrode substrate is characterized in that: the mushroom-shaped hemispherical harmonic oscillator comprises two supporting plates (1), two pressing rods (2) and two supporting rods (3), wherein the two supporting plates (1) are arranged at intervals and fixedly connected through the two supporting rods (3) at intervals, the two pressing rods (2) are arranged oppositely from top to bottom and are positioned between the two supporting plates (1), the pressing rod (2) positioned above is fixedly connected to the supporting plate (1) positioned above, the pressing rod (2) positioned below is fixedly connected to the supporting plate (1) positioned below, the two pressing rods (2) clamp the mushroom-shaped hemispherical harmonic oscillator (4), and the two pressing rods (2) are made of ceramic materials;
the supporting plate (1) comprises a fixed disc (1-1) and two cross rods (1-2), wherein the two cross rods (1-2) are respectively arranged on two sides of the fixed disc (1-1) and are integrally connected with the fixed disc (1-1); the two compression rods (2) are respectively connected to the fixed discs (1-1) of the two support plates (1); the top end of the supporting rod (3) is fixedly connected with the outer end of the cross rod (1-2) of the supporting plate (1) positioned above, and the bottom end of the supporting rod (3) is fixedly connected with the outer end of the cross rod (1-2) of the supporting plate (1) positioned below;
a circular groove (1-1-1) is formed in the center of the fixed disc (1-1), a circle of first rubber ring installation groove (1-1-2), a circle of threaded installation hole (1-1-3) and a circle of second rubber ring installation groove (1-1-4) are sequentially formed in the groove bottom of the circular groove (1-1-1) from outside to inside, and an elastic rubber ring (1-1-5) is respectively embedded in the first rubber ring installation groove (1-1-2) and the second rubber ring installation groove (1-1-4);
the mushroom-shaped hemispherical harmonic oscillator is characterized in that the compression bar (2) comprises an installation disc (2-1) and a central fixing rod (2-2), one end of the central fixing rod (2-2) is vertically and fixedly connected to the central position of the installation disc (2-1), the other end of the central fixing rod (2-2) of the two compression bars (2) clamps the mushroom-shaped hemispherical harmonic oscillator (4), a plurality of installation through holes (2-1-1) are formed in the installation disc (2-1) in the circumferential direction by taking the central fixing rod (2-2) as an axis, the installation disc (2-1) is inserted into a circular groove (1-1-1) of the support plate (1), and the compression bar (2) is connected with the support plate (1) through the installation through holes (2-1-1), fastening screws and threaded installation holes (1-1-3).
2. The resonator fixing device for welding the hemispherical resonator with the electrode substrate according to claim 1, wherein: the end part of the outer end of the cross rod (1-2) is provided with a positioning mounting hole (1-2-1), the two ends of the supporting rod (3) are respectively designed into boss structures, the end parts of the two ends are also provided with mounting threaded holes, and the boss of the supporting rod (3) is inserted into the positioning mounting hole (1-2-1) of the cross rod (1-2) and is connected through a fastening screw.
3. The resonator fixing device for welding the hemispherical resonator with the electrode substrate according to claim 2, wherein: the other end of the central fixing rod (2-2) is of a multi-split structure and is matched with the end parts of the two ends of the central rod of the mushroom-shaped hemispherical harmonic oscillator (4).
4. The resonator fixing device for welding the hemispherical resonator and the electrode substrate according to claim 3, wherein: the split structure on the central fixing rod (2-2) is composed of four arc-shaped blocks (2-2-1) which are uniformly arranged in the circumferential direction, a cross-shaped flower groove (2-2-2) is formed between the four arc-shaped blocks (2-2-1), and the central position of the cross-shaped flower groove (2-2-2) is circular.
5. The fixing device for the hemispherical resonator and the electrode substrate as claimed in claim 4, wherein: the length of the central fixing rod (2-2) of the lower compression bar (2) is longer than that of the central fixing rod (2-2) of the upper compression bar (2).
6. The resonator fixing device for welding the hemispherical resonator with the electrode substrate according to claim 5, wherein: the harmonic oscillator fixing device further comprises a base (5), a plurality of base mounting holes (1-1-6) are circumferentially formed in the fixing disc (1-1) of the supporting plate (1) below by taking the circular groove (1-1-1) as the center, and the supporting plate (1) below is in threaded connection with the base mounting holes (1-1-6) through fastening screws on the base (5).
7. The resonator fixing device for welding the hemispherical resonator with the electrode substrate according to claim 6, wherein: the supporting plate (1) is made of stainless steel.
CN202210252942.3A 2022-03-15 2022-03-15 Harmonic oscillator fixing device for welding hemispherical harmonic oscillator and electrode substrate Active CN114426394B (en)

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