CN114415387A - Device and method for improving laser uniformity - Google Patents
Device and method for improving laser uniformity Download PDFInfo
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Abstract
The invention relates to a device and a method for improving laser uniformity, wherein the device comprises: the speckle attenuation module comprises a plurality of transmission microstructures, and the transmission microstructures are arranged on the substrate according to a preset arrangement rule; the transmission structure comprises an incident surface and an emergent surface which are oppositely arranged, the incident surface faces the laser processing module, wherein the refractive indexes of any two adjacent transmission microstructures are different, the preset conditions are met, and the preset conditions are as follows: laser enters from the incident surface and emits a transmission sub-beam from the emergent surface, and the optical path difference between the transmission sub-beams generated by any two adjacent transmission microstructures is larger than the coherence length of the incident laser. The device has good effect of inhibiting speckle patterns caused by laser coherence.
Description
Technical Field
The invention relates to the technical field of optical equipment, in particular to a device and a method for improving laser uniformity.
Background
The laser radiation has a strong coherence. When the object surface is irradiated by the laser, because the object surface has a certain roughness, different laser beams scattered to each direction of the space through the object surface interfere with each other due to the existence of a small optical path difference, so that interference fringes can be formed on the image surface, and granular irregularly distributed noise, namely speckle noise, is generated, which is not beneficial to obtaining uniform illumination. The existence of the speckles seriously affects the detail information of the image, and reduces the definition and the resolution of the image. Therefore, attenuation processing of image speckles due to laser coherence is required.
Speckle contrast is generally used as an evaluation criterion of speckle noise, and the larger the contrast value is, the more serious the speckle noise is. Superimposing N different speckle patterns within the CCD response time or the human eye integration time is an effective way to reduce speckle contrast. When N speckle patterns independent of each other are superposed, the contrast of speckle on image surface or received by human eyes can be reduced to original contrast
Therefore, the larger the number of independent speckle patterns that are superimposed during the CCD response time or the human eye integration time, the more desirable the speckle reduction effect and the better the illumination uniformity.
From the laser light perspective, the laser spectral bandwidth can be increased to achieve speckle attenuation, and the speckle can be improved by changing the laser time correlation, or the speckle attenuation can be achieved by changing the polarization state of the laser.
Disclosure of Invention
The application provides a technical problem that the device that promotes laser homogeneity exists of above-mentioned background art part is solved.
An apparatus for improving laser uniformity, comprising: the speckle attenuation module comprises a plurality of transmission microstructures, and the transmission microstructures are arranged on the substrate according to a preset arrangement rule; the transmission structure comprises an incident surface and an emergent surface which are oppositely arranged, the incident surface faces the laser processing module, the refractive indexes of any two adjacent transmission microstructures are different and meet preset conditions, and the preset conditions are as follows: laser enters from the incident surface and emits a transmission sub-beam from the emergent surface, and the optical path difference between the transmission sub-beams generated by any two adjacent transmission microstructures is larger than the coherence length of the incident laser.
In some embodiments, the refractive index of any two transmissive microstructures on the substrate is different.
In some embodiments, at least two adjacent transmissive microstructures on the substrate have different thicknesses.
In some embodiments, the incident surfaces of at least two adjacent transmissive microstructures on the substrate are not parallel and/or the exit surfaces are not parallel.
In some embodiments, the transmissive microstructures on the substrate are distributed in a ring, in a parallel, or in a grid.
In some embodiments, all of the transmissive microstructures on the substrate have the same surface shape.
In some embodiments, the laser light incident on the transmissive microstructure has an angle not greater than a preset value, perpendicular to the incident surface or perpendicular to the incident surface.
In some embodiments, the speckle reduction module further comprises a laser processing module for pre-processing the laser light for emission to the speckle reduction module, the pre-processing comprising adjusting one or a combination of a beam size, a time dependence, and a polarization state of the laser light.
A method for improving laser uniformity is applied to the device for improving laser uniformity, and the method comprises the following steps:
determining a coverage of the speckle of the laser light on the transmissive microstructure of the speckle attenuation module;
determining whether to perform beam expanding or beam shrinking treatment on the laser according to the coverage range;
determining whether the speckle attenuation module is in periodic motion based on the coverage area.
Above-mentioned promote device of laser homogeneity has the transmission type transmission microstructure of different refractive index parameters through the combination, when the transmission microstructure that rotatory annular distributes, can come a large amount of independent patterns of stack in CCD camera or human eye integration time, and then plays the attenuation purpose to the image stripe that laser coherence leads to, improves illumination homogeneity, improves the definition of figure. Or the static speckle attenuation component combined by the micro lens units with different characteristics is utilized to spatially divide the transmission wavefront, and different optical path differences are introduced among the divided illumination sub-beams, so that the probability of interference of the laser beams is reduced, the attenuation purpose is achieved, the illumination uniformity is improved, and the definition of the pattern is improved. The laser speckle suppression device has the advantages of wide application range, capability of independently working, no need of matching with other optical elements to shape laser spots, easiness in processing of the structure, simplicity in operation, stable performance and good suppression effect on speckle patterns caused by laser coherence.
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FIG. 1 is a schematic diagram of an apparatus for improving laser uniformity provided in one embodiment;
FIG. 2 is a schematic diagram of a speckle reduction unit of an apparatus for improving laser uniformity provided in one embodiment;
FIG. 3 is a schematic diagram of another speckle reduction unit of an apparatus for improving laser uniformity provided in one embodiment.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that, as used herein, the terms "first," "second," and the like may be used herein to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish one element from another.
Please refer to fig. 1 to 3, which show schematic diagrams of the apparatus for improving laser uniformity to which the present application can be applied.
The speckle attenuation module comprises a plurality of transmission microstructures, and the transmission microstructures are arranged on the substrate according to a preset arrangement rule; the transmission structure comprises an incident surface and an emergent surface which are oppositely arranged, the incident surface faces the laser processing module, the refractive indexes of any two adjacent transmission microstructures are different and meet preset conditions, and the preset conditions are as follows: laser enters from the incident surface and emits a transmission sub-beam from the emergent surface, and the optical path difference between the transmission sub-beams generated by any two adjacent transmission microstructures is larger than the coherence length of the incident laser.
The speckle reduction device of the present application is comprised of a plurality (designated by N) of transmissive microstructures made of materials of different refractive indices. Different transmissive microstructures produce a beam of transmitted sub-beams, all of which are collectively referred to as a transmitted beam. Since the transmission microstructures are made of materials with different refractive indexes, different transmission sub-beams after passing through different transmission microstructures have a certain optical path difference with each other. Therefore, in order to ensure that the transmission sub-beams do not interfere with each other, the refractive index parameter n and the thickness of each transmission microstructure are comprehensively considered, so that the optical path difference between the transmission sub-beams of all the transmission microstructures is larger than the laser coherence length, and therefore the transmission sub-beams do not interfere with each other, and the generation of speckles is greatly reduced. Each transmissive microstructure can transmit light to produce a different speckle pattern relative to the other microstructures. In the integration time of the CCD or human eyes, the more the number of the accumulated independent speckle patterns is, the more the speckle contrast can be reduced, the speckle can be attenuated, and the imaging quality can be improved.
In some application scenarios, as shown in fig. 1, a plurality of transmissive microstructures are annularly distributed on a substrate, and the surface sizes of the incident surface and the exit surface of each transmissive microstructure are larger than the spot size of the laser. The speckle reduction unit further comprises a motor connected to the substrate via a rotating shaft.
All the transmission microstructures are distributed on a substrate in an annular shape, the center of the substrate is connected with a motor, and the motor drives the substrate to rotate.
The rotating wheel is driven to rotate by the motor, and the incident laser beams at different moments pass through different transmission microstructures and then are continuously transmitted backwards. Different transmissive microstructures produce a beam of transmitted sub-beams, all of which are collectively referred to as a transmitted beam. Since the transmission microstructures are made of materials with different refractive indexes, different transmission sub-beams after passing through different transmission microstructures have a certain optical path difference with each other. Therefore, in order to ensure that the transmission sub-beams do not interfere with each other, the refractive index parameter n and the thickness of each transmission microstructure are comprehensively considered, so that the optical path difference between the transmission sub-beams of all the transmission microstructures is larger than the laser coherence length, and therefore the transmission sub-beams do not interfere with each other, and the generation of speckles is greatly reduced. Each transmissive microstructure can transmit light to produce a different speckle pattern relative to the other microstructures. In the integration time of the CCD or human eyes, the more the number of the accumulated independent speckle patterns is, the more the speckle contrast can be reduced, the speckle can be attenuated, and the imaging quality can be improved.
The speckle reduction dynamic device described in fig. 1 accumulates several independent images through a certain integration time, and thus achieves the purposes of speckle reduction, illumination homogenization, and image quality improvement.
Further, the incident light beam can be perpendicular to the surface of the microstructure and can also have a certain incident angle with the surface of the microstructure. The number N of the transmission microstructures and the rotating speed of the rotating wheel can both influence the number of the superposed stripes within a certain integration time, and the larger the numerical value of N is, the better the effect of attenuation on the stripes is. The rotating speed of the rotating wheel is matched with the CCD or human eye integration time, the unit integration time corresponds to one rotation of the rotating wheel, and the rotating wheel starts new circulation when the next integration time starts. The unit integration time may correspond to 1/2 revolutions or 1/3 revolutions, among other values.
According to the method, the transmission type transmission microstructures with different refractive index parameters are combined, when the transmission microstructures are distributed in a rotating ring shape, a large number of independent patterns can be superposed in the integration time of a CCD camera or human eyes, the purpose of attenuation of image stripes caused by laser coherence is achieved, the illumination uniformity is improved, and the definition of the patterns is improved.
Certainly, the static speckle attenuation component combined by the micro-lens units with different characteristics is utilized to spatially divide the transmission wavefront, and different optical path differences are introduced among the divided illumination sub-beams, so that the probability of interference of the laser beams is reduced, the attenuation purpose is achieved, the illumination uniformity is improved, and the definition of the pattern is improved.
Most preferably, the refractive index of any two of the plurality of transmissive microstructures on the substrate is different. All the transmissive microstructures are made of different optical materials, so that all the transmissive microstructures have different refractive indexes n. The selected materials need to ensure high transmittance at the wavelength of incident laser, meanwhile, due to the difference of refractive indexes n among different materials, optical path difference can be introduced between the transmitted sub-beams passing through the transmission microstructure, when the optical path difference is larger than the coherence length of the incident laser, the interference effect among the transmitted sub-beams can be reduced, the speckle influence caused by the coherence of the laser is reduced, and the effect of attenuating speckles is achieved.
As shown in fig. 2, in some embodiments, the plurality of transmissive microstructures are distributed on the substrate in a ring shape, and the surface sizes of the incident surface and the emergent surface of each transmissive microstructure are larger than the size of the light spot.
It can be understood that when the number N of the transmissive microstructures is large, if there are not enough N different materials to make the microstructures, the transmissive microstructures made of the same material need to be repeated on the substrate. In this case, it is necessary to arrange the transmission microstructures of the same material in a dispersed manner, and at least to ensure that the microstructures in the similar range have different refractive indexes, so that at least the transmission sub-beams in the similar range do not interfere with each other. Most preferably, it is also contemplated to introduce some differences in microstructure thickness, surface wedge angle, etc. between transmissive microstructures made of the same material, increasing the diversity between transmitted sub-beams, reducing the likelihood of interference.
FIG. 2 is another embodiment of the speckle device for attenuating laser light as proposed in the present application (only a cross-section of the device is shown in FIG. 2), in which a static attenuating element is used, and the element is directly placed in the light path without being driven to rotate by a motor, which is more convenient in use.
The static speckle attenuation element shown in FIG. 3 is comprised of a plurality of tiny transmissive microstructures, each of which is comprised of a material having a different refractive index and has similar structural characteristics to those of the microstructure shown in FIG. 1. When an incident beam irradiates on the element shown in fig. 2, the size of the incident beam is far larger than that of one transmission microstructure, light rays at different positions on the cross section of the light beam are transmitted through different transmission microstructures respectively, optical path difference exists between transmission sub-light beams due to the difference of refractive indexes n of different microstructures, when the optical path difference is larger than the coherence length of laser, interference effect is reduced, and stripes are effectively attenuated. The larger the number of effective transmissive microstructures in the light spot coverage, the more effective the speckle suppression effect is, which corresponds to the case where there is a large difference between the light spot size and the size of the transmissive microstructures.
All the transmissive microstructures have the same thickness and the microstructure surfaces are parallel, so that all the sub-beams transmitted through the microstructures are transmitted in the same direction. Due to the difference of the refractive indexes n of the materials of different transmission microstructures, enough optical path difference (larger than the laser coherence length) is introduced between the transmission sub-beams to reduce the interference effect between the transmitted sub-beams, thereby playing a role in speckle attenuation.
The thickness of all transmissive microstructures may also be different. If the surfaces of all transmissive microstructures are parallel, the transmitted sub-beams that pass through the microstructures will still be transmitted in the same direction. At this time, the difference of the refractive index n of the microstructure material and the difference of the transmission distance of the laser in the microstructure will contribute to the optical path difference between the transmitted sub-beams, so that the interference effect between the transmitted sub-beams can be reduced.
The surfaces of all transmissive microstructures, or the surfaces of partially transmissive microstructures, may also have slight angular differences, the surfaces of the transmissive microstructures no longer being parallel. All sub-beams transmitted through the microstructure will not be transmitted in the same direction, which will enlarge the overall angular spread of the transmitted beams, thereby introducing spatial and angular diversity between the transmitted sub-beams, and reducing the probability of interference between each other. Therefore, the possibility of interference between the transmitted sub-beams can be further reduced through the optical path difference introduced by the difference of the refractive index n of the transmission microstructure and the common superposition effect of spatial and angular diversity, so that a better speckle attenuation effect is obtained.
All the transmission microstructures have the same surface area, the surface size is equal to the light spot size, and the whole light spot size can be contained. The transmission microstructures have the same surface shape, and the surface shape can be rectangular, square, multi-square or irregular. In the aspect of surface shape selection, only the side length of the light beam passing through in the moving process needs to be larger than the side length or the diameter of the light spot.
In some embodiments, all of the transmissive microstructures on the substrate have the same surface shape.
The static speckle attenuation element can be circular, square, polygonal, etc. in shape. The transmissive microstructures on the static speckle attenuation element can be distributed in a variety of ways, such as circular, parallel, grid, etc.
When the static speckle attenuation element faces a large-size laser spot, if the spot size can cover most of the surface of the attenuation element, a good speckle attenuation effect can be achieved.
When the laser spot is oriented to a small-size laser spot, if the size of the spot is the same order of magnitude as that of the transmission microstructure, the small-size spot needs to be expanded and shaped in advance before the light beam enters the static speckle attenuation element, and the expanded light beam passes through a larger number of transmission microstructures. If the beam expansion shaping method is not used, the speckle reduction element of FIG. 2 may be periodically moved, e.g., rotated or moved, to increase the speckle reduction effect of the time integral.
In some embodiments, when the laser light is incident on the incident surface of the transmissive microstructure, the laser light is perpendicular to the incident surface or the angle between the laser light and the incident surface is not greater than a preset angle.
The speckle attenuation method can be suitable for the fields of visible light, infrared, ultraviolet and other multispectral, and only needs to select corresponding materials of application wave bands.
The speckle attenuation method can be suitable for small light spot size (such as micron or millimeter magnitude) and large light spot size (greater than or equal to millimeter magnitude), and has wide applicability.
The static speckle attenuation element can be circular, square, polygonal, etc. in shape. The transmissive microstructures on the static speckle attenuation element can be distributed in a variety of ways, such as circular, parallel, grid, etc.
When the static speckle attenuation element faces a large-size laser spot, if the spot size can cover most of the surface of the attenuation element, a good speckle attenuation effect can be achieved.
When the laser spot is oriented to a small-size laser spot, if the size of the spot is the same order of magnitude as that of the transmission microstructure, the small-size spot needs to be expanded and shaped in advance before the light beam enters the static speckle attenuation element, and the expanded light beam passes through a larger number of transmission microstructures. If the beam expansion shaping method is not used, the speckle reduction element of FIG. 2 may be periodically moved, e.g., rotated or moved, to increase the speckle reduction effect of the time integral.
In some embodiments, the laser processing module adjusts one or a combination of a spectral bandwidth of the laser, adjusts a time correlation, and adjusts a polarization state of the laser.
The laser wavelength, polarization, illumination angle, coherence, and roughness of the illuminated object surface all contribute to speckle characteristics.
From the laser light perspective, the laser spectral bandwidth can be increased to achieve speckle attenuation, and the speckle can be improved by changing the laser time correlation, or the speckle attenuation can be achieved by changing the polarization state of the laser.
In addition to the static attenuation method, the method proposed by the present application achieves the same effect as the conventional speckle attenuation method using a dynamic optical element. However, in the conventional method, when a small spot size is faced, in order to obtain a good speckle attenuation effect, the spot may need to be shaped in advance by beam expansion, collimation, or the like, so that a corresponding optical element needs to be introduced, and the cost and the volume of the system are increased. In addition, conventional methods such as vibrating optical fibers have problems of difficulty in optical path alignment, high energy loss rate, and the like.
In some embodiments, a method for improving laser uniformity is applied to the apparatus for improving laser uniformity, and the method includes:
determining the coverage of the speckle of the laser on the transmission microstructure of the speckle attenuation module;
wherein, the coverage range is the coverage range of the laser beam when the laser enters the lens microstructure;
determining whether to perform beam expanding or beam shrinking treatment on the laser according to the coverage range;
the beam expanding and beam reducing are based on the fact that the coverage range of laser just covers all the transmission microstructures of the speckle attenuation module best, so that when the laser beam is large, the beam reducing is carried out, and when the laser beam is small, the beam expanding is carried out.
From the coverage, it is determined whether the speckle attenuation module is performing the periodic motion.
Of course, when the laser beam is small, e.g., only covers one transmissive microstructure, the speckle reduction module can be periodically moved, e.g., rotated, translated back and forth, to achieve as much laser light as possible through more transmissive microstructures.
It will be understood by those skilled in the art that all or part of the processes of the apparatus implementing the embodiments described above can be implemented by the relevant hardware instructed by a computer program, which can be stored in a computer-readable storage medium, and when executed, can include the processes of the embodiments of the apparatus described above. The storage medium may be a non-volatile storage medium such as a magnetic disk, an optical disk, a Read-Only Memory (ROM), or a Random Access Memory (RAM).
The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above examples only show some embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (9)
1. An apparatus for improving laser uniformity, comprising: the speckle attenuation module comprises a plurality of transmission microstructures, and the transmission microstructures are arranged on the substrate according to a preset arrangement rule; the transmission structure comprises an incident surface and an emergent surface which are oppositely arranged, the incident surface faces the laser processing module, the refractive indexes of any two adjacent transmission microstructures are different and meet preset conditions, and the preset conditions are as follows: laser enters from the incident surface and emits a transmission sub-beam from the emergent surface, and the optical path difference between the transmission sub-beams generated by any two adjacent transmission microstructures is larger than the coherence length of the incident laser.
2. The apparatus of claim 1, wherein the refractive index of any two transmissive microstructures on the substrate are different.
3. The apparatus of claim 1, wherein at least two adjacent transmissive microstructures on the substrate have different thicknesses.
4. The apparatus of claim 1, wherein the incident planes and/or the exit planes of at least two adjacent transmissive microstructures on the substrate are not parallel.
5. The apparatus of claim 1, wherein the transmissive microstructures on the substrate are distributed in a ring, parallel or grid.
6. The apparatus of claim 1, wherein all the transmissive microstructures on the substrate have the same surface shape.
7. The apparatus of claim 1, wherein the angle between the laser beam incident on the transmissive microstructure and the incident plane or the perpendicular plane to the incident plane is not greater than a predetermined value.
8. The apparatus of claim 1, further comprising a laser processing module, wherein the laser processing module is configured to pre-process the laser light and transmit the pre-processed laser light to the speckle attenuation module, and the pre-processing comprises adjusting one or a combination of a beam size, a time correlation, and a polarization state of the laser light.
9. A method for improving laser uniformity, which is applied to the apparatus for improving laser uniformity of any one of the above 1 to 8, the method comprising:
determining a coverage of the speckle of the laser light on the transmissive microstructure of the speckle attenuation module;
determining whether to perform beam expanding or beam shrinking treatment on the laser according to the coverage range;
determining whether the speckle attenuation module is in periodic motion based on the coverage area.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101276063A (en) * | 2007-03-31 | 2008-10-01 | 索尼德国有限责任公司 | Image generating apparatus |
| CN108255006A (en) * | 2015-12-18 | 2018-07-06 | 海信集团有限公司 | A kind of diffusion sheet |
| CN208506389U (en) * | 2018-05-31 | 2019-02-15 | 歌尔科技有限公司 | Laser speckle processing unit and laser projection device |
| CN113721370A (en) * | 2021-09-13 | 2021-11-30 | 重庆新宙创镱科技有限公司 | Laser speckle suppression system, forming method thereof and speckle suppression module |
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2021
- 2021-12-31 CN CN202111675749.2A patent/CN114415387A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101276063A (en) * | 2007-03-31 | 2008-10-01 | 索尼德国有限责任公司 | Image generating apparatus |
| CN108255006A (en) * | 2015-12-18 | 2018-07-06 | 海信集团有限公司 | A kind of diffusion sheet |
| CN208506389U (en) * | 2018-05-31 | 2019-02-15 | 歌尔科技有限公司 | Laser speckle processing unit and laser projection device |
| CN113721370A (en) * | 2021-09-13 | 2021-11-30 | 重庆新宙创镱科技有限公司 | Laser speckle suppression system, forming method thereof and speckle suppression module |
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