CN114415386A - Collimated light source system - Google Patents

Collimated light source system Download PDF

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Publication number
CN114415386A
CN114415386A CN202210181419.6A CN202210181419A CN114415386A CN 114415386 A CN114415386 A CN 114415386A CN 202210181419 A CN202210181419 A CN 202210181419A CN 114415386 A CN114415386 A CN 114415386A
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light source
superlens
source system
collimated light
equal
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郝成龙
谭凤泽
朱瑞
朱健
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Shenzhen Metalenx Technology Co Ltd
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Shenzhen Metalenx Technology Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens

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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Semiconductor Lasers (AREA)

Abstract

The application provides a collimation light source system, which comprises a first super lens, a second super lens, a third super lens and a light source; wherein, the first super lens, the second super lens and the third super lens are sequentially arranged on the light emitting side of the light source with the same optical axis, and satisfy:
Figure DDA0003521188970000011
Figure DDA0003521188970000012
wherein D is1The aperture of the first superlens;D3the aperture of the third superlens; h is the height of the light source; WD is the working distance of the collimated light source system; TTL is the total system length of the collimation light source system; θ is the divergence angle of the light source; f is the focal length of the collimation light source system at the central wavelength of the working waveband. The collimating light source system overcomes the defects of large volume and heavy weight of the traditional collimating light source system.

Description

Collimated light source system
Technical Field
The application relates to the technical field of optics, in particular to a collimated light source system.
Background
Collimated light beam refers to a light beam that does not change significantly after a small beam divergence angle. With the development of optical technology, the application fields of collimated light beams are wider and wider, such as the fields of illumination technology, display technology, measurement technology and the like.
The prior art collimated light source system generally includes a light source and a collimating device composed of a plurality of groups of lenses. Divergent light emitted by the light source is collimated by the plurality of groups of lenses to form collimated light beams.
However, the prior art collimated light source system requires at least four sets of refractive lenses, which results in the disadvantages of large size and heavy weight of the collimated light source system.
Disclosure of Invention
In order to solve the technical problems of large size and heavy weight of a collimated light source system in the prior art, the embodiment of the application provides a collimated light source system. The collimation light source system comprises a first super lens, a second super lens, a third super lens and a light source;
wherein, the first super lens, the second super lens and the third super lens are sequentially arranged on the light emitting side of the light source with the same optical axis, and satisfy:
Figure BDA0003521188950000011
Figure BDA0003521188950000012
Figure BDA0003521188950000013
Figure BDA0003521188950000021
wherein D is1The aperture of the first superlens; d3The aperture of the third superlens; h is the height of the light source; WD is the working distance of the collimated light source system; TTL is the total system length of the collimation light source system; θ is the divergence angle of the light source; f is the focal length of the collimation light source system at the central wavelength of the working waveband.
Optionally, the phase distribution of the first superlens, the second superlens and the third superlens at least satisfies any one of the following formulas:
Figure BDA0003521188950000022
Figure BDA0003521188950000023
Figure BDA0003521188950000024
Figure BDA0003521188950000025
Figure BDA0003521188950000026
Figure BDA0003521188950000027
Figure BDA0003521188950000028
Figure BDA0003521188950000029
wherein r is the distance from the superlens center of the first superlens, the second superlens and the third superlens (300) to any nanostructure; λ is the operating wavelength;
Figure BDA00035211889500000210
any phase associated with the operating wavelength; (x, y) are coordinates on the first, second, and third superlens mirrors; a isiAnd biIs a real number coefficient; f is the focal length of the first superlens, the second superlens or the third superlens.
Optionally, the initial light beam emitted by the light source is converted into a first light beam with a first divergence angle by the first superlens;
the first light beam is converted into a second light beam with a second divergence angle by the second superlens;
the second light beam is converted into a third light beam with a third divergence angle by the third superlens;
wherein the third divergence angle is less than or equal to the first divergence angle; and the first divergence angle is smaller than the second divergence angle.
Optionally, the third divergence angle satisfies:
Figure BDA0003521188950000031
wherein h is the height of the light source; f is the focal length of the collimation light source system at the central wavelength of the working waveband.
Optionally, the third divergence angle is less than or equal to 0.2 °.
Optionally, the working distance is greater than or equal to 0mm and less than or equal to 3 mm.
Optionally, the initial divergence angle is greater than or equal to 15 ° and less than or equal to 60 °.
Optionally, the operating wavelength bands of the collimated light source system include a visible light band, an infrared band, and an ultraviolet band.
Optionally, the central wavelength of the operating band of the collimated light source system is 1550mm, and the bandwidth is ± 20 nm.
Optionally, the first superlens, the second superlens and the third superlens each include a substrate and a nanostructure layer disposed on the substrate;
the nanostructure layer comprises nanostructures arranged in an array.
Optionally, the nanostructure layer comprises superstructure units arranged in an array;
the superstructure unit is a close-stackable pattern; the center position and/or the vertex position of the close-packed pattern is provided with a nano structure.
Optionally, the substrate has an extinction coefficient to the operating band of less than or equal to 0.1.
Optionally, the nanostructure has an extinction coefficient to the operating band of less than or equal to 0.1.
Optionally, the first superlens, the second superlens, and the third superlens further comprise a filler material;
the filling material is filled between the nano structures.
Optionally, an absolute value of a difference between the refractive index of the filler material and the refractive index of the nanostructures is greater than or equal to 0.5.
Optionally, the nanostructure has a period greater than or equal to 0.3 λcAnd is less than or equal to 2 lambdac；
Wherein λ iscIs the central wavelength of the operating band of the collimated light source system.
Optionally, the height of the nanostructures is greater than or equal to 0.3 λcAnd is less than or equal to 5 lambdac；
Wherein λ iscIs the central wavelength of the operating band of the collimated light source system.
Optionally, the nanostructured material comprises one or more of fused silica, quartz glass, crown glass, flint glass, sapphire, crystalline silicon, amorphous silicon, hydrogenated amorphous silicon.
Optionally, the shape of the nanostructure comprises a polarization insensitive structure.
Optionally, the first superlens, the second superlens or the third superlens further includes an antireflection film;
the antireflection film is arranged on one side of the substrate, which is adjacent to the air in the nanostructure layer.
The laser radar transmitting system provided by the embodiment of the application at least has the following beneficial effects:
the collimation light source system that this application embodiment provided adopts three super lenses, through the overall arrangement that sets up first super lens, second super lens and third super lens, thereby makes this collimation light source system satisfy little system overall length, little working distance simultaneously and have high collimation degree. The collimating light source system overcomes the defects of large volume and heavy weight of the traditional collimating light source system.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments or the background art of the present application, the drawings required to be used in the embodiments or the background art of the present application will be described below.
FIG. 1 is a schematic diagram of an alternative configuration of a collimating optical system provided by an embodiment of the present application;
FIG. 2 is a schematic diagram of an alternative structure of a nanostructure provided by an embodiment of the present application;
FIG. 3 illustrates a schematic diagram of yet another alternative structure for nanostructures provided by embodiments of the present application;
FIG. 4 is a schematic diagram illustrating an alternative structure of a superstructure unit provided by an embodiment of the present application;
FIG. 5 shows a schematic diagram of yet another alternative structure of a superstructure unit provided by embodiments of the present application;
FIG. 6 shows a schematic diagram of yet another alternative structure of a superstructure unit provided by embodiments of the present application;
FIG. 7 is a graph showing diameter versus transmittance and phase modulation for an alternative nanostructure provided by embodiments of the present application;
FIG. 8 is a graph showing number versus transmission for an alternative hollow nanostructure provided by an embodiment of the present application;
fig. 9 is a graph showing the relationship between the number and the transmittance of an alternative hollow nanostructure provided in the embodiments of the present application.
The reference numerals in the drawings denote:
100-first superlens; 200-a second superlens; 300-third superlens; 400-light source.
Detailed Description
To facilitate an understanding of the present application, the present application will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present application are shown in the drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete. Also, in the drawings, the thickness, ratio and size of the components are exaggerated for clarity of illustration.
It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element and be integral therewith, or intervening elements may also be present. The terms "mounted," "one end," "the other end," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, "a," "an," "the," and "at least one" do not denote a limitation of quantity, but rather are intended to include both the singular and the plural, unless the context clearly dictates otherwise. For example, "a component" means the same as "at least one component" unless the context clearly dictates otherwise. "at least one of" should not be construed as limited to the quantity "one". The term "and/or" includes any and all combinations of one or more of the associated listed items.
The meaning of "comprising" or "comprises" indicates a property, a quantity, a step, an operation, a component, a part, or a combination thereof, but does not exclude other properties, quantities, steps, operations, components, parts, or combinations thereof.
Embodiments are described herein with reference to cross-sectional views that are idealized embodiments. Thus, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, embodiments described herein should not be construed as limited to the particular shapes of regions as illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, regions shown or described as flat may typically have rough and/or nonlinear features. Also, the acute angles shown may be rounded. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the precise shape of a region and are not intended to limit the scope of the claims.
With the development of the collimated light source system in the fields of illumination and display technology, the miniaturization and light weight become a problem to be solved. The volume and the weight of the collimation light source system are compressed, and more particularly, the volume and the weight of an optical system in the collimation light source system are compressed to further achieve the miniaturization and the light weight of the collimation light source system.
In order to reduce the volume of the collimated light source system, it is necessary to suppress the Total Track Length (TTL) of the collimated light source system as much as possible. The total system length of the collimated light source system refers to the distance from the light emitting surface of the light source in the collimated light source system to the center of the last optical element along the emitting direction. Therefore, the smaller the lens thickness, the smaller the number of lenses, and the shorter the focal length of the lens, the smaller the total system length.
The Working Distance (WD) of the collimation system is the Distance from the light emitting surface of the light source to the surface of the first lens in the emission system in the emission direction. In addition to reducing the number of lenses, reducing the thickness of the lenses, and shortening the spacing between the lenses, the volume of the collimated light source system can be reduced by reducing the working distance. It should be noted that the smaller the working distance, the more advantageous the integration of the collimated light source system.
The collimation degree of the emergent light is one of the important indexes for evaluating the optical performance of the collimation light source system. The size of the collimated light source system is reduced by reducing the total length and the working distance of the system, and the premise of ensuring the optical performance is needed. The prior collimating light source system is generally composed of at least four groups of refractive lenses, and the structure is difficult to simultaneously meet the requirements of small total length of the system, small working distance and high collimation degree.
Therefore, a laser radar transmitting system satisfying a small overall length of the system, a small working distance and a high degree of collimation at the same time is needed.
The super lens is a specific application of a super surface, the surface of the super lens is provided with periodically arranged nano structures, and the characteristic size of each nano structure is a sub-wavelength size. The characteristic dimensions include the dimensions of the nanostructure, such as diameter, perimeter, and height. Sub-wavelength dimensions refer to dimensions that are less than or equal to the incident wavelength, or in some cases may be slightly larger than the incident wavelength. The superlens modulates the phase, amplitude and polarization of incident light by the periodically arranged sub-wavelength-sized nanostructures.
Fig. 1 illustrates a collimated light source system provided by an embodiment of the present application. As shown in FIG. 1, the collimated light source system includes a first superlens 100, a second superlens 200, a third superlens 300, and a light source 400. Wherein, the first superlens 100, the second superlens 200 and the third superlens 300 are sequentially disposed on the light emitting side of the light source 400 along the same optical axis, and satisfy:
Figure BDA0003521188950000071
Figure BDA0003521188950000072
Figure BDA0003521188950000073
Figure BDA0003521188950000074
in the above formulas (1) to (4), D1The aperture of the first superlens 100; d3The aperture of the third superlens 300; h is the height of the light source 400; WD is the working distance of the collimated light source system; TTL is the total system length of the collimation light source system; θ is the divergence angle of light source 400; f is the focal length of the collimation light source system at the central wavelength of the working waveband.
Specifically, the light source 400 having a height h emits an initial light beam having a divergence angle θ. The initial light beam entering the first superlens 100 is transformed into a first light beam having a first divergence angle, which is smaller than the initial divergence angle. The first light beam enters the second superlens 200 and is converted into a second light beam having a second divergence angle, which is larger than the first divergence angle. The second light beam is transformed into a third light beam having a third divergence angle ψ, which is smaller than the initial divergence angle, through a third superlens 300.
According to the embodiment of the present application, the total system length of the collimated light source system satisfies the following formula (5):
TTL＝WD+d12+d23 (5)；
in the formula (5), TTL is the total system length of the collimated light source system; WD is the working distance of the collimated light source system; d12The pitch of the first superlens 100 and the second superlens 200; d23The pitch of the second superlens 200 and the third superlens 300.
Preferably, the Working Distance (WD) of the collimated light source system is greater than or equal to 0mm and less than or equal to 3mm, so that the collimated light source system is more advantageous for integration, thereby reducing the volume of the collimated light source system. More advantageously, the collimated light source system has a Working Distance (WD) less than or equal to 0.5 mm.
Optionally, in order to cover the phase of the third light with 2 pi, so that the light emitted by the collimated light source system does not interfere, thereby ensuring the intensity of the light emitted by the collimated light source system, the phase of the first superlens 100, the second superlens 200, and the third superlens 300 in the collimated light source system provided by the embodiment of the present application at least satisfies any one of the following equations (6) to (13):
Figure BDA0003521188950000081
Figure BDA0003521188950000082
Figure BDA0003521188950000083
Figure BDA0003521188950000091
Figure BDA0003521188950000092
Figure BDA0003521188950000093
Figure BDA0003521188950000094
Figure BDA0003521188950000095
in the above equations (6) to (13), r is the distance from the superlens center of the first superlens 100, the second superlens 200, and the third superlens 300 to the center of any nanostructure; λ is the operating wavelength;
Figure BDA0003521188950000096
any phase associated with the operating wavelength; (x, y) are coordinates on the mirror surfaces of the first, second, and third superlenses 100, 200, 300; a isiAnd biIs a real number coefficient; f is the focal length of the single superlens. Illustratively, the first superlens 100 has a focal length f1The focal length of the second superlens 100 is f2The focal length of the third superlens 300 is f3。aiAnd biAnd the phase coefficient is obtained by optimization according to different design requirements. The formula (7), the formula (9) and the formula (10) can optimize the phase expressed by the odd polynomial without destroying the rotational symmetry of the phase, and the optimization degree of freedom of the superlens is greatly increased. Equation (11) can optimize the asymmetric phase. It should be noted that the first superlens 100, the second superlens 200, and the third superlens 300 provided in the embodiments of the present application have a function of diverging incident light or a function of being afocal.
According to an embodiment of the present application, the third divergence angle ψ satisfies the following formula (14):
Figure BDA0003521188950000097
in formula (14), h is the height of the light source 400; f is the focal length of the collimation light source system at the central wavelength of the working waveband. Preferably, the third divergence angle ψ is less than or equal to 0.5 °. More preferably, the third divergence angle ψ is less than or equal to 0.2 °.
In the collimated light source system provided in the embodiment of the present application, the light source 400 may be a laser light source or an LED light source. For example, the light emitted from the light source 400 may be monochromatic light or white light. Illustratively, the operating band of the collimated light source system provided by the embodiment of the present application has a center wavelength of 1550nm and a bandwidth of ± 20 nm. That is, the first light emitted from the light source 400 has a center wavelength of 1550nm and a bandwidth of ± 20 nm.
Alternatively, in order to make the first light rays emitted from the light source 400 pass through the first superlens 100 as much as possible, the divergence angle of the light source 400, that is, the initial divergence angle θ of the first light rays, is greater than or equal to 15 ° and less than or equal to 60 °.
Next, a super lens used in the embodiment of the present application will be explained. The first superlens 100, the second superlens 200, and the third superlens 300 provided in the embodiments of the present application each include a substrate and a nanostructure layer disposed on the substrate.
Fig. 2 and 3 are perspective views illustrating a nanostructure of a superlens employed in a lidar transmission system provided by an embodiment of the present application. Optionally, the superlens may be filled with air or other material that is transparent or translucent in the operating band between the nanostructures. Preferably, the extinction coefficient of the filler material to the operating band is less than or equal to 0.1, more preferably less than or equal to 0.01 root. For example, the filler material may be fused silica, quartz glass, crown glass, flint glass, sapphire, crystalline silicon, amorphous silicon, hydrogenated amorphous silicon, and the like. Optionally, the filler material is the same as the base material and the material of the nanostructures. Preferably, the filler material is different from the base material, the nanostructure material. According to embodiments of the present application, the absolute value of the difference between the refractive index of the filler material and the refractive index of the nanostructures should be greater than or equal to 0.5.
In an alternative embodiment of the present application, the substrate material and the nanostructure material are high transmittance materials in the operating band, wherein the extinction coefficient is less than or equal to 0.1. Preferably less than or equal to 0.01. Alternatively, the substrate material may be fused silica, quartz glass, crown glass, flint glass, sapphire, crystalline silicon, amorphous silicon, hydrogenated amorphous silicon, or the like. Optionally, the material of the nanostructures is the same as the substrate material. Preferably, the material of the nanostructures is different from the substrate material. More preferably, the superlens adopted in the embodiment of the present application further includes an antireflection film in an operating wavelength band, where the antireflection film is disposed on a side of the substrate layer and the nanostructure layer adjacent to air.
As shown in fig. 2, the nanostructures may be polarization dependent structures that impart a geometric phase to incident light. As shown in FIG. 3, the nanostructures may be polarization insensitive structures that impart a propagation phase to the incident light. For example, a cylindrical shape, a hollow cylindrical shape, a circular hole shape, a hollow circular hole shape, a square cylindrical shape, a square hole shape, a hollow square cylindrical shape, a hollow square hole shape, and the like. For example, the nanostructure may be a solid structure, a hollow structure, or a columnar structure having a ring-shaped cross section.
As shown in fig. 4-6, wherein the nanostructure layer includes superstructure units arranged in an array, the superstructure units being in a close-packable pattern.
As shown in fig. 4, according to an embodiment of the present application, the superstructure units may be arranged in a fan shape. As shown in fig. 5, according to an embodiment of the present application, the superstructure units may be arranged in an array of regular hexagons. Further, as shown in fig. 6, according to an embodiment of the present application, the superstructure units may be arranged in a square array. Those skilled in the art will recognize that the superstructure units included in the nanostructure layer may also include other forms of array arrangements, and all such variations are within the scope of the present application.
According to embodiments of the present application, the superstructure unit may have a nanostructure. As shown in fig. 4 to 6, according to the embodiment of the present application, a nanostructure is disposed at a central position and/or a vertex position of each superstructure unit, respectively. According to an embodiment of the present application, the nanostructure is an all-dielectric building block. Optionally, the working wavelength band of the superlens in the embodiment of the present application is visible light wavelength band, infrared wavelength band and ultraviolet wavelength band, preferably near infrared wavelength band, such as 850nm, 905nm, 940nm and 1550nm, etc. Preferably, the working waveband of the superlens in the embodiment of the present application is an L optical waveband (1550nm +/-20 nm), or at least one waveband is an L optical waveband. According to embodiments of the present application, the nanostructures have a high transmittance in the operating band.
Let the central wavelength of the operating band of the collimated light source system provided by the embodiment of the present application be λcThe bandwidth is Δ λ. Preferably, the period of the nanostructures of the first, second and third superlenses 100, 200, 300 is greater than or equal to 0.3 λcAnd is less than or equal to 2 lambdac. Preferably, the height of the nanostructures of the first, second and third superlenses 100, 200, 300 is greater than or equal to 0.3 λcAnd is less than or equal to 5 lambdac。
FIG. 7 shows a graph of transmittance versus phase modulation for 1200nm high silicon nanorods in a regular quadrilateral arrangement with a period of 600 nm. FIGS. 8 and 9 show graphs of transmittance and phase modulation, respectively, for hollow nanorod structures with a period of 600nm and a height of 1200 nm.
Example 1
Illustratively, the embodiment of the present application provides a collimated light source system, and the key parameters of the system are shown in table 1.
TABLE 1
Total System Length (TTL) 18mm
Working Distance (WD) 0.5mm
Focal length (F) 76.4mm
First super lens caliber D1 0.53mm
Second super lens aperture D2 0.62mm
Third super lens aperture D3 26.62mm
First and second superlens pitch d12 0.95mm
Second third superlens spacing d23 15.05mm
Light source height (h) 0.2mm
Initial divergence angle (theta) 20°
Divergence angle after collimation (psi) 0.15°
WD/f 0.0065
f/TTL 4.24
As shown in Table 1, WD/f is 0.0065<0.04; f/TTL is 4.24, and the ratio is between 1.5 and 5.1; d326.62mm, which falls between 22.9mm and 29.64mm, and satisfies equation (4).
Example 2
Illustratively, the embodiment of the present application provides a collimated light source system, and the key parameters of the system are shown in table 2.
TABLE 2
Figure BDA0003521188950000121
Figure BDA0003521188950000131
As can be seen from table 2, WD/f is 0.0065< 0.04; f/TTL is 4.24, and the ratio is between 1.5 and 5.1; d3 is 26.32mm, belongs to 22.9 mm-29.64 mm, and satisfies formula (4).
Example 3
Illustratively, the embodiment of the present application provides a collimated light source system, and the key parameters of the system are shown in table 3.
TABLE 3
Total System Length (TTL) 20mm
Working Distance (WD) 3mm
Focal length (F) 76.4mm
First super lens caliber D1 1.41mm
Second super lens aperture D2 0.99mm
Third super lens aperture D3 26.62mm
First and second superlens pitch d12 0.48mm
Second third superlens spacing d23 15.02mm
Light source height (h) 0.2mm
Initial divergence angle (theta) 20°
Divergence angle after collimation (psi) 0.15°
WD/f 0.039
f/TTL 3.82
As shown in Table 3, WD/f is 0.039<0.04; f/TTL is 3.82, and the ratio is between 1.5 and 5.1; d326.62mm, which falls between 22.9mm and 29.64mm, and satisfies equation (4).
Example 4
Illustratively, the embodiment of the present application provides a collimated light source system, and the key parameters of the system are shown in table 4.
TABLE 4
Figure BDA0003521188950000132
Figure BDA0003521188950000141
As shown in Table 4, WD/f is 0.039<0.04; f/TTL is 1.91, and the ratio is between 1.5 and 5.1; d326.62mm, which falls between 22.9mm and 29.64mm, and satisfies equation (4).
Example 5
Illustratively, the embodiment of the present application provides a collimated light source system, and the key parameters of the system are shown in table 5.
TABLE 5
Figure BDA0003521188950000142
Figure BDA0003521188950000151
As can be seen from Table 5, WD/f is 0.0065<0.04; f/TTL is 2.183, the ratio falls between 1.5 and 5.1; d352.5mm, which falls between 47.3mm and 61.2mm, and satisfies the formula (4).
Example 6
Illustratively, the embodiment of the present application provides a collimated light source system, and the key parameters of the system are shown in table 6.
TABLE 6
Total System Length (TTL) 49.86mm
Working Distance (WD) 3mm
Focal length (F) 76.4mm
First super lens caliber D1 2.810mm
Second super lens aperture D2 2.644mm
Third super lens aperture D3 55.6mm
First and second superlens pitch d12 0.370mm
Second third superlens spacing d23 44.99mm
Light source height (h) 0.2mm
Initial divergence angle (theta) 40°
Divergence angle after collimation (psi) 0.15°
WD/f 0.039
f/TTL 1.532
As can be seen from Table 6, WD/f is 0.039<0.04; f/TTL is 1.532, the ratio is 1.5To 5.1; d355.6mm, which falls between 47.3mm and 61.2mm, and satisfies the formula (4).
Example 7
Illustratively, the embodiment of the present application provides a collimated light source system, and the key parameters of the system are shown in table 7.
TABLE 7
Figure BDA0003521188950000152
Figure BDA0003521188950000161
As can be seen from Table 7, WD/f is 0.0065<0.04; 2.729, the ratio is between 1.5 and 5.1; d350.0mm, which falls between 47.3mm and 61.2mm, and satisfies the formula (4).
Example 8
Illustratively, the embodiment of the present application provides a collimated light source system, and the key parameters of the system are shown in table 8.
TABLE 8
Figure BDA0003521188950000162
Figure BDA0003521188950000171
As can be seen from Table 8, WD/f is 0.0065<0.04; 2.729, the ratio is between 1.5 and 5.1; d352.5mm, which falls between 47.3mm and 61.2mm, and satisfies the formula (4).
It should be noted that the superlens adopted by the laser radar transmitting system provided by the embodiment of the present application may be processed by a semiconductor process to realize mass production. The semiconductor process can reduce the cost of the super lens and improve the consistency of the mass production of the super lens. Due to the adoption of a semiconductor process, the thickness and the weight of the super lens adopted in the embodiment of the application are far smaller than those of the traditional refractive lens.
The collimation light source system that this application embodiment provided adopts three super lenses, and through the overall arrangement that sets up first super lens, second super lens and third super lens, makes this collimation light source system's overall arrangement satisfy formula (1) to formula (4) to satisfy little system overall length, little working distance and have high collimation degree simultaneously.
The above description is only a specific implementation of the embodiments of the present application, but the scope of the embodiments of the present application is not limited thereto, and any person skilled in the art can easily conceive of changes or substitutions within the technical scope of the embodiments disclosed in the present application, and all the changes or substitutions should be covered by the scope of the embodiments of the present application. Therefore, the protection scope of the embodiments of the present application shall be subject to the protection scope of the claims.

Claims (20)

1. A collimated light source system, comprising a first superlens (100), a second superlens (200), a third superlens (300) and a light source (400);
wherein the first superlens (100), the second superlens (200) and the third superlens (300) are sequentially arranged on the light emitting side of the light source (400) along the same optical axis, and satisfy:
Figure FDA0003521188940000011
Figure FDA0003521188940000012
Figure FDA0003521188940000013
Figure FDA0003521188940000014
wherein D is1Is the aperture of the first superlens (100); d3Is the aperture of the third superlens (300); h is the height of the light source (400); WD is the working distance of the collimated light source system; TTL is the total system length of the collimation light source system; θ is the divergence angle of the light source (400); f is the focal length of the collimation light source system at the central wavelength of the working waveband.
2. The collimated light source system of claim 1, wherein the phase profiles of the first superlens (100), the second superlens (200), and the third superlens (300) satisfy at least any one of the following equations:
Figure FDA0003521188940000015
Figure FDA0003521188940000016
Figure FDA0003521188940000017
Figure FDA0003521188940000018
Figure FDA0003521188940000019
Figure FDA00035211889400000110
Figure FDA00035211889400000111
Figure FDA00035211889400000112
wherein r is the distance from the superlens center of the first superlens (100), the second superlens (200) and the third superlens (300) to any nanostructure; λ is the operating wavelength;
Figure FDA0003521188940000021
any phase associated with the operating wavelength; (x, y) are coordinates on the mirror surfaces of the first (100), second (200) and third (300) superlenses; a isiAnd biIs a real number coefficient; f is the focal length of the first superlens (100), the second superlens (200) or the third superlens (300).
3. The collimated light source system of claim 1, wherein the initial light beam emitted by the light source (400) is converted by the first superlens (100) into a first light beam having a first divergence angle;
the first light beam is converted into a second light beam with a second divergence angle by the second superlens;
the second light beam is converted into a third light beam having a third divergence angle by the third superlens (300);
wherein the third divergence angle is less than or equal to the first divergence angle; and the first divergence angle is smaller than the second divergence angle.
4. The collimated light source system of any one of claims 1 to 3, wherein the third divergence angle satisfies:
Figure FDA0003521188940000022
wherein h is the height of the light source (400); f is the focal length of the collimation light source system at the central wavelength of the working waveband.
5. The collimated light source system of claim 3, wherein the third divergence angle is less than or equal to 0.2 °.
6. The collimated light source system of any one of claims 1 to 3, wherein the working distance is greater than or equal to 0mm and less than or equal to 3 mm.
7. The collimated light source system of claim 3, wherein the initial divergence angle is greater than or equal to 15 ° and less than or equal to 60 °.
8. The collimated light source system of any one of claims 1 to 3, wherein the operating wavelength bands of the collimated light source system include a visible wavelength band, an infrared wavelength band and an ultraviolet wavelength band.
9. A collimated light source system according to any of claims 1 to 3, wherein the collimated light source system has an operating band with a centre wavelength of 1550mm and a bandwidth of ± 20 nm.
10. The collimated light source system of any of claims 1 to 3, wherein the first (100), second (200) and third (300) superlenses each comprise a substrate and a nanostructure layer disposed on the substrate;
the nanostructure layer comprises nanostructures arranged in an array.
11. The collimated light source system of claim 10, wherein the nanostructure layer comprises superstructure units arranged in an array;
the superstructure unit is a close-stackable pattern; the center position and/or the vertex position of the close-packed pattern is provided with a nano structure.
12. The collimated light source system of claim 10, wherein the substrate has an extinction coefficient less than or equal to 0.1 over the operating wavelength band.
13. The collimated light source system of claim 10, wherein the nanostructure has an extinction coefficient of less than or equal to 0.1 over a wavelength band of operation.
14. The collimated light source system of claim 10, wherein the first superlens (100), the second superlens (200), and the third superlens (300) further comprise a filler material;
the filling material is filled between the nano structures.
15. The collimated light source system of claim 14, wherein an absolute value of a difference between the refractive index of the filler material and the refractive index of the nanostructures is greater than or equal to 0.5.
16. The collimated light source system of claim 10, wherein the period of the nanostructure is greater than or equal to 0.3 λcAnd is less than or equal to 2 lambdac；
Wherein λ iscIs the central wavelength of the operating band of the collimated light source system.
17. The collimated light source system of claim 10, wherein the height of the nanostructures is greater than or equal to 0.3 λcAnd is less than or equal to 5 lambdac；
Wherein λ iscIs the central wavelength of the operating band of the collimated light source system.
18. The collimated light source system of claim 10, wherein the nano-structured material comprises one or more of fused silica, quartz glass, crown glass, flint glass, sapphire, crystalline silicon, amorphous silicon, hydrogenated amorphous silicon.
19. The collimated light source system of claim 10, wherein the shape of the nanostructure comprises a polarization insensitive structure.
20. The collimated light source system of claim 10, wherein the first superlens (100), the second superlens (200), or the third superlens (300) further comprises an antireflection film;
the antireflection film is arranged on one side of the substrate, which is adjacent to the air in the nanostructure layer.
CN202210181419.6A 2022-02-25 2022-02-25 Collimated light source system Pending CN114415386A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023246450A1 (en) * 2022-06-24 2023-12-28 深圳迈塔兰斯科技有限公司 Optical system, imaging device including optical system, and electronic apparatus
US11927769B2 (en) 2022-03-31 2024-03-12 Metalenz, Inc. Polarization sorting metasurface microlens array device
US11978752B2 (en) 2019-07-26 2024-05-07 Metalenz, Inc. Aperture-metasurface and hybrid refractive-metasurface imaging systems
US11988844B2 (en) 2017-08-31 2024-05-21 Metalenz, Inc. Transmissive metasurface lens integration

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11988844B2 (en) 2017-08-31 2024-05-21 Metalenz, Inc. Transmissive metasurface lens integration
US11978752B2 (en) 2019-07-26 2024-05-07 Metalenz, Inc. Aperture-metasurface and hybrid refractive-metasurface imaging systems
US11927769B2 (en) 2022-03-31 2024-03-12 Metalenz, Inc. Polarization sorting metasurface microlens array device
WO2023246450A1 (en) * 2022-06-24 2023-12-28 深圳迈塔兰斯科技有限公司 Optical system, imaging device including optical system, and electronic apparatus

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