CN114414986A - Stability detection method and system in chip detection process - Google Patents

Stability detection method and system in chip detection process Download PDF

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Publication number
CN114414986A
CN114414986A CN202111660792.1A CN202111660792A CN114414986A CN 114414986 A CN114414986 A CN 114414986A CN 202111660792 A CN202111660792 A CN 202111660792A CN 114414986 A CN114414986 A CN 114414986A
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chip
production
production operation
operation activity
stability decision
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CN202111660792.1A
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Chinese (zh)
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顾黎明
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Suzhou Zhirui Photoelectric Material Technology Co ltd
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Suzhou Zhirui Photoelectric Material Technology Co ltd
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Priority to CN202111660792.1A priority Critical patent/CN114414986A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing

Abstract

The embodiment of the invention provides a stability detection method and a system in a chip detection process, wherein a production stability decision characteristic extraction is carried out on a chip production operation activity log through a production stability decision network obtained by training according to set chip production operation activity data aiming at chip production operation activities; and comparing the production stability decision characteristics of each chip production operation activity generated by the production stability decision network with the production stability decision characteristics of the target sample chip production operation activity log obtained in advance to obtain characteristic comparison information, so that whether each obtained production stability decision characteristic is matched with a training basis storage condition can be decided. And if the training basis storage conditions are matched, performing training basis storage on the related chip production operation activity logs. Therefore, the subsequent processing can be carried out after the production stability decision is carried out on the chip production operation activity log.

Description

Stability detection method and system in chip detection process
Technical Field
The invention relates to the technical field of chip detection, in particular to a stability detection method and system in a chip detection process.
Background
For the production stability decision-making technology based on AI, it is very important to train basic data, and how to perform subsequent processing on the chip production operation activity log after making a production stability decision is a technical problem to be solved urgently.
Disclosure of Invention
In view of this, an object of an embodiment of the present invention is to provide a stability detection method in a chip detection process, which is applied to a stability detection system, where the stability detection system is in communication connection with the chip detection system, and the method includes:
acquiring chip abnormal defect positioning data corresponding to the chip detection system, wherein the chip abnormal defect positioning data comprises chip production operation activity logs of a plurality of chip production operation activities of a chip production application environment related to the chip detection system;
performing production stability decision feature extraction on the chip production operation activity log according to a production stability decision network obtained by training set chip production operation activity data aiming at chip production operation activities;
comparing the production stability decision characteristics of each chip production operation activity generated by the production stability decision network with the production stability decision characteristics of a target sample chip production operation activity log obtained in advance to obtain characteristic comparison information;
and judging whether each obtained production stability decision characteristic is matched with a training basis storage condition or not according to the characteristic comparison information, and if the obtained production stability decision characteristic is matched with the training basis storage condition, performing training basis storage on a related chip production operation activity log.
Wherein, the acquiring of the chip abnormal defect positioning data corresponding to the chip detection system includes:
acquiring production time-space domain nodes of a plurality of chip application labels corresponding to the chip detection system, wherein the production time-space domain nodes of different chip application labels have the same production type attribute related to a chip production operation activity log of the chip production operation activity;
and acquiring data of the chip abnormal defect positioning data corresponding to the chip detection system according to the production time-space domain node.
Wherein, the production stability decision feature extraction of the chip production operation activity log is performed according to a production stability decision network obtained by training chip production operation activity data aiming at the chip production operation activity, and comprises the following steps:
and mining the chip production operation activity logs with the set production stability decision characteristics in the chip production operation activity logs to obtain feature extraction information with the classification features of the set production stability decision characteristics.
Wherein, the step of determining whether each obtained production stability decision feature matches the training basis storage condition according to the feature comparison information specifically includes:
calculating comparison classification characteristics related to the characteristic comparison information according to the chip production operation activity logs of the chip production operation activities and the target conditions in the characteristic comparison information;
and deciding whether the comparison classification features are in a preset classification feature range obtained in advance, and if so, determining that the production stability decision features are matched with training basis storage conditions.
The embodiment of the invention also provides a stability detection system in the chip detection process, which is applied to the stability detection system, wherein the stability detection system is in communication connection with the chip detection system, and the system comprises:
an obtaining module, configured to obtain chip abnormal defect positioning data corresponding to the chip detection system, where the chip abnormal defect positioning data includes chip production operation activity logs of a plurality of chip production operation activities of a chip production application environment related to the chip detection system;
the extraction module is used for carrying out production stability decision characteristic extraction on the chip production operation activity log according to a production stability decision network obtained by training set chip production operation activity data aiming at chip production operation activities;
the comparison module is used for comparing the production stability decision characteristics of each chip production operation activity generated by the production stability decision network with the production stability decision characteristics of a target sample chip production operation activity log obtained in advance to obtain characteristic comparison information;
and the storage module is used for judging whether each production stability decision characteristic obtained by the decision of the characteristic comparison information matches a training basis storage condition or not, and if the production stability decision characteristic matches the training basis storage condition, performing training basis storage on the related chip production operation activity log.
Wherein the obtaining module is specifically configured to:
acquiring production time-space domain nodes of a plurality of chip application labels corresponding to the chip detection system, wherein the production time-space domain nodes of different chip application labels have the same production type attribute related to a chip production operation activity log of the chip production operation activity;
and acquiring data of the chip abnormal defect positioning data corresponding to the chip detection system according to the production time-space domain node.
Wherein the extraction module is specifically configured to:
and mining a chip production operation activity log of the set chip production operation activity in the plurality of chip production operation activities to obtain feature extraction information with classification features corresponding to the set production stability decision-making features.
Wherein the storage module is specifically configured to:
calculating comparison classification characteristics related to the characteristic comparison information according to the chip production operation activity logs of the chip production operation activities and the target conditions in the characteristic comparison information;
and deciding whether the comparison classification features are in a preset classification feature range obtained in advance, and if so, determining that the production stability decision features are matched with training basis storage conditions.
Compared with the prior art, according to the stability detection method and system in the chip detection process provided by the embodiment of the invention, the chip abnormal defect positioning data corresponding to the chip detection system is obtained, the chip abnormal defect positioning data comprises chip production operation activity logs of a plurality of chip production operation activities in a chip production application environment related to the chip detection system, and then the production stability decision feature extraction is carried out on the chip production operation activity logs through a production stability decision network obtained by training according to the set production stability decision network obtained by training the chip production operation activity data aiming at the chip production operation activities; and comparing the production stability decision characteristics of each chip production operation activity generated by the production stability decision network with the production stability decision characteristics of the target sample chip production operation activity log obtained in advance to obtain characteristic comparison information, so that whether each obtained production stability decision characteristic is matched with a training basis storage condition can be decided. And if the training basis storage conditions are matched, performing training basis storage on the related chip production operation activity logs. Therefore, the subsequent processing can be carried out after the production stability decision is carried out on the chip production operation activity log.
In order to make the aforementioned objects, features and advantages of the embodiments of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 illustrates a component schematic diagram of a stability detection system provided by an embodiment of the present invention;
FIG. 2 is a schematic flow chart illustrating a stability detection method in a chip detection process according to an embodiment of the present invention;
fig. 3 is a functional block diagram of a stability detection system in a chip detection process according to an embodiment of the present invention.
Detailed Description
In order to make the technical solutions of the present invention better understood by the scholars in the technical field, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The terms "first," "second," "third," and the like in the description and in the claims, as well as in the drawings, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Fig. 1 shows a schematic diagram of exemplary components of a stability detection system 100. The stability detection system 100 may be a server that includes one or more processors 104, such as one or more Central Processing Units (CPUs), each of which may implement one or more hardware threads. The stability detection system 100 may also include any storage medium 106 for storing any kind of information, such as code, settings, data, etc. For example, and without limitation, storage medium 106 may include any one or more of the following in combination: any type of RAM, any type of ROM, flash memory devices, hard disks, optical disks, etc. More generally, any storage medium may use any technology to store information. Further, any storage medium may provide volatile or non-volatile retention of information. Further, any storage medium may represent fixed or removable components of the stability detection system 100. In one case, the stability detection system 100 can perform any of the operations of the associated instructions when the processor 104 executes the corresponding instructions stored in any storage medium or combination of storage media. The stability detection system 100 further comprises one or more drive units 108 for interacting with any storage medium, such as a hard disk drive unit, an optical disk drive unit, etc.
Stability detection system 100 also includes an input/output 110 (I/O) for receiving various inputs (via input unit 112) and for providing various outputs (via output unit 114)). One particular output mechanism may include a presentation device 116 and a corresponding Graphical User Interface (GUI) 118. The stability detection system 100 may also include one or more network interfaces 120 for exchanging data with other devices via one or more communication units 122. One or more communication buses 124 couple the above-described components together.
The communication unit 122 may be implemented in any manner, such as over a local area network, a wide area network (e.g., the internet), a point-to-point connection, etc., or any combination thereof. The communication unit 122 may include any combination of hardwired links, wireless links, routers, gateway functions, etc., governed by any protocol or combination of protocols.
Fig. 2 is a schematic flow chart illustrating a stability detection method in a chip detection process according to an embodiment of the present invention, where the stability detection method in the chip detection process can be executed by the stability detection system 100 shown in fig. 1, and detailed steps of the stability detection method in the chip detection process are described as follows.
Step S21, obtaining chip abnormal defect positioning data corresponding to the chip detection system, wherein the chip abnormal defect positioning data comprises chip production operation activity logs of a plurality of chip production operation activities of a chip production application environment related to the chip detection system;
step S22, according to a production stability decision network obtained by training set chip production operation activity data aiming at chip production operation activity, carrying out production stability decision characteristic extraction on the chip production operation activity log;
step S23, comparing the production stability decision-making characteristics of each chip production operation activity generated by the production stability decision-making network with the production stability decision-making characteristics of a target sample chip production operation activity log obtained in advance to obtain characteristic comparison information;
and step S24, judging whether each production stability decision characteristic obtained by the decision according to the characteristic comparison information matches a training basis storage condition, and if the production stability decision characteristic matches the training basis storage condition, storing a training basis of the relevant chip production operation activity log.
According to the steps, chip abnormal defect positioning data corresponding to the chip detection system is obtained, the chip abnormal defect positioning data comprise chip production operation activity logs of a plurality of chip production operation activities of a chip production application environment related to the chip detection system, and then production stability decision characteristics of the chip production operation activity logs are extracted through a production stability decision network obtained by training according to a production stability decision network obtained by training set chip production operation activity data aiming at the chip production operation activities; and comparing the production stability decision characteristics of each chip production operation activity generated by the production stability decision network with the production stability decision characteristics of the target sample chip production operation activity log obtained in advance to obtain characteristic comparison information, so that whether each obtained production stability decision characteristic is matched with a training basis storage condition can be decided. And if the training basis storage conditions are matched, performing training basis storage on the related chip production operation activity logs. Therefore, the subsequent processing can be carried out after the production stability decision is carried out on the chip production operation activity log.
In this embodiment, for step S21, the present embodiment may specifically obtain production time-space domain nodes of a plurality of chip application tags corresponding to the chip detection system, and the production time-space domain nodes of different chip application tags have the same production category attribute related to the chip production operation activity log of the chip production operation activity; and then, carrying out data acquisition on the chip abnormal defect positioning data corresponding to the chip detection system according to the production time-space domain node.
In this embodiment, for step S22, the present embodiment may specifically perform content on the chip production operation activity log with the production stability decision-making characteristic set in the chip production operation activity log.
In this embodiment, for step S24, the present embodiment may calculate the comparison classification feature related to the feature comparison information according to the chip production operation activity log of each chip production operation activity in the feature comparison information and the target condition; and then, deciding whether the comparison classification features are in a preset classification feature range obtained in advance, and if so, determining that the production stability decision features match with training basis storage conditions.
Fig. 3 is a functional block diagram of a stability detection system 300 in a chip detection process according to an embodiment of the present invention, where the functions implemented by the stability detection system 300 in the chip detection process may correspond to the steps executed by the above method. The stability detection system 300 in the chip detection process may be understood as the stability detection system 100, or a processor of the stability detection system 100, or may be understood as a component that is independent from the stability detection system 100 or the processor and implements the functions of the present invention under the control of the stability detection system 100, as shown in fig. 3, and the functions of each functional module of the stability detection system 300 in the chip detection process are described in detail below.
An obtaining module 310, configured to obtain chip abnormal defect location data corresponding to the chip detection system, where the chip abnormal defect location data includes chip production operation activity logs of a plurality of chip production operation activities of a chip production application environment related to the chip detection system;
an extracting module 220, configured to perform production stability decision feature extraction on the chip production operation activity log according to a production stability decision network obtained by training set chip production operation activity data for chip production operation activities;
a comparison module 230, configured to compare the production stability decision-making characteristics of each chip production operation activity generated by the production stability decision-making network with the production stability decision-making characteristics of a target sample chip production operation activity log obtained in advance, respectively, to obtain characteristic comparison information;
and the storage module 240 is configured to determine whether each obtained production stability decision feature matches a training basis storage condition according to the feature comparison information, and if the obtained production stability decision feature matches the training basis storage condition, perform training basis storage on a related chip production operation activity log.
As a possible example, the obtaining module 310 is specifically configured to:
acquiring production time-space domain nodes of a plurality of chip application labels corresponding to the chip detection system, wherein the production time-space domain nodes of different chip application labels have the same production type attribute related to a chip production operation activity log of the chip production operation activity;
and acquiring data of the chip abnormal defect positioning data corresponding to the chip detection system according to the production time-space domain node.
Wherein the extracting module 220 is specifically configured to:
and mining a chip production operation activity log of the set chip production operation activity in the plurality of chip production operation activities to obtain feature extraction information with classification features corresponding to the set production stability decision-making features.
The storage module 240 is specifically configured to:
calculating comparison classification characteristics related to the characteristic comparison information according to the chip production operation activity logs of the chip production operation activities and the target conditions in the characteristic comparison information;
and deciding whether the comparison classification features are in a preset classification feature range obtained in advance, and if so, determining that the production stability decision features are matched with training basis storage conditions.
It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the above-described systems, apparatuses and units may be sampled from the corresponding processes in the foregoing method embodiments, and are not described herein again.
In the embodiments provided in the present invention, it should be understood that the disclosed apparatus and method can be implemented in other ways. The apparatus and method embodiments described above are illustrative only, as the flowcharts and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of systems, methods and computer program products according to various embodiments of the present invention. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of code, which comprises one or more executable instructions for implementing the specified logical function(s). It should also be noted that, in some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems that perform the specified functions or acts, or combinations of special purpose hardware and computer instructions.
In addition, the functional modules in the embodiments of the present invention may be integrated together to form an independent part, or each module may exist separately, or a plurality of modules may be integrated to form an independent part.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any drawing credit or debit acknowledgement in the claims should not be construed as limiting the claim concerned.

Claims (8)

1. A stability detection method in a chip detection process is characterized by being applied to a stability detection system, wherein the stability detection system is in communication connection with the chip detection system, and the method comprises the following steps:
acquiring chip abnormal defect positioning data corresponding to the chip detection system, wherein the chip abnormal defect positioning data comprises chip production operation activity logs of a plurality of chip production operation activities of a chip production application environment related to the chip detection system;
performing production stability decision feature extraction on the chip production operation activity log according to a production stability decision network obtained by training set chip production operation activity data aiming at chip production operation activities;
comparing the production stability decision characteristics of each chip production operation activity generated by the production stability decision network with the production stability decision characteristics of a target sample chip production operation activity log obtained in advance to obtain characteristic comparison information;
and judging whether each obtained production stability decision characteristic is matched with a training basis storage condition or not according to the characteristic comparison information, and if the obtained production stability decision characteristic is matched with the training basis storage condition, performing training basis storage on a related chip production operation activity log.
2. The method of claim 1, wherein the obtaining chip abnormal defect location data corresponding to the chip inspection system comprises:
acquiring production time-space domain nodes of a plurality of chip application labels corresponding to the chip detection system, wherein the production time-space domain nodes of different chip application labels have the same production type attribute related to a chip production operation activity log of the chip production operation activity;
and acquiring data of the chip abnormal defect positioning data corresponding to the chip detection system according to the production time-space domain node.
3. The method of claim 2, wherein the performing production stability decision feature extraction on the chip production operation activity log according to a production stability decision network trained from chip production operation activity data set for the chip production operation activity comprises:
and mining the chip production operation activity logs with the set production stability decision characteristics in the chip production operation activity logs to obtain feature extraction information with the classification features of the set production stability decision characteristics.
4. The method according to claim 1, wherein the step of deciding whether each of the obtained production stability decision features matches a training criterion storage condition according to the feature comparison information specifically comprises:
calculating comparison classification characteristics related to the characteristic comparison information according to the chip production operation activity logs of the chip production operation activities and the target conditions in the characteristic comparison information;
and deciding whether the comparison classification features are in a preset classification feature range obtained in advance, and if so, determining that the production stability decision features are matched with training basis storage conditions.
5. The stability detection system in the chip detection process is characterized by being applied to a stability detection system, wherein the stability detection system is in communication connection with the chip detection system, and the system comprises:
an obtaining module, configured to obtain chip abnormal defect positioning data corresponding to the chip detection system, where the chip abnormal defect positioning data includes chip production operation activity logs of a plurality of chip production operation activities of a chip production application environment related to the chip detection system;
the extraction module is used for carrying out production stability decision characteristic extraction on the chip production operation activity log according to a production stability decision network obtained by training set chip production operation activity data aiming at chip production operation activities;
the comparison module is used for comparing the production stability decision characteristics of each chip production operation activity generated by the production stability decision network with the production stability decision characteristics of a target sample chip production operation activity log obtained in advance to obtain characteristic comparison information;
and the storage module is used for judging whether each production stability decision characteristic obtained by the decision of the characteristic comparison information matches a training basis storage condition or not, and if the production stability decision characteristic matches the training basis storage condition, performing training basis storage on the related chip production operation activity log.
6. The system of claim 5, wherein the acquisition module is specifically configured to:
acquiring production time-space domain nodes of a plurality of chip application labels corresponding to the chip detection system, wherein the production time-space domain nodes of different chip application labels have the same production type attribute related to a chip production operation activity log of the chip production operation activity;
and acquiring data of the chip abnormal defect positioning data corresponding to the chip detection system according to the production time-space domain node.
7. The system of claim 5, wherein the extraction module is specifically configured to:
and mining a chip production operation activity log of the set chip production operation activity in the plurality of chip production operation activities to obtain feature extraction information with classification features corresponding to the set production stability decision-making features.
8. The system of claim 5, wherein the storage module is specifically configured to:
calculating comparison classification characteristics related to the characteristic comparison information according to the chip production operation activity logs of the chip production operation activities and the target conditions in the characteristic comparison information;
and deciding whether the comparison classification features are in a preset classification feature range obtained in advance, and if so, determining that the production stability decision features are matched with training basis storage conditions.
CN202111660792.1A 2021-12-31 2021-12-31 Stability detection method and system in chip detection process Withdrawn CN114414986A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111660792.1A CN114414986A (en) 2021-12-31 2021-12-31 Stability detection method and system in chip detection process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111660792.1A CN114414986A (en) 2021-12-31 2021-12-31 Stability detection method and system in chip detection process

Publications (1)

Publication Number Publication Date
CN114414986A true CN114414986A (en) 2022-04-29

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