CN114413622B - Water-cooling melting chamber of closed melting machine - Google Patents
Water-cooling melting chamber of closed melting machine Download PDFInfo
- Publication number
- CN114413622B CN114413622B CN202111421581.2A CN202111421581A CN114413622B CN 114413622 B CN114413622 B CN 114413622B CN 202111421581 A CN202111421581 A CN 202111421581A CN 114413622 B CN114413622 B CN 114413622B
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- China
- Prior art keywords
- water
- plate
- cooling
- cooling plate
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000001816 cooling Methods 0.000 title claims abstract description 106
- 238000002844 melting Methods 0.000 title claims abstract description 51
- 230000008018 melting Effects 0.000 title claims abstract description 51
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 80
- 230000002093 peripheral effect Effects 0.000 claims abstract description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000000741 silica gel Substances 0.000 claims description 3
- 229910002027 silica gel Inorganic materials 0.000 claims description 3
- 238000009423 ventilation Methods 0.000 claims description 3
- 239000000428 dust Substances 0.000 description 9
- 239000010453 quartz Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B2014/0837—Cooling arrangements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Furnace Details (AREA)
Abstract
The invention provides a water-cooling melting chamber of a closed melting machine, which comprises a melting chamber main body, wherein the melting chamber main body comprises four side plates, a top plate, two front doors, a left side door, a right side door, a bottom bracket and a bottom plate cover plate, the top plate and the four side plates are plate bodies formed by splicing a plurality of water-cooling plates, water inlet and outlet ports and a water channel structure are arranged in the water-cooling plates, and the water-cooling plates comprise a first water-cooling plate, a second water-cooling plate and a third water-cooling plate; the upper layer of the first water cooling plate is provided with a waist-shaped hole, the upper layer of the second water cooling plate is provided with a window, the top plate is a plate body formed by splicing the first water cooling plate, the second water cooling plate and the third water cooling plate through bolts, and the peripheral side plates are plate bodies formed by splicing the second water cooling plate and the third water cooling plate through bolts; the two front doors comprise a left front door and a right front door, the two front doors are positioned on the front side plates of the peripheral side plates, the left front door and the right front door are respectively connected with the water cooling plate through pin shafts, two oppositely arranged cylinder supports are arranged on the bottom support, and the cylinder supports are fixed with cylinders through supporting seats.
Description
Technical Field
The invention relates to the field of semiconductor equipment, in particular to a melting chamber of a closed melting machine.
Background
In the prior art, the melting machine is of an open design, dust in air can pollute a manufactured crucible, and in the arc starting process, noise cannot be controlled, and a large amount of generated heat causes damage to surrounding equipment.
Disclosure of Invention
The invention provides a melting chamber of a closed type melting machine for solving at least one technical problem in the prior art.
The technical scheme of the invention is as follows: the utility model provides a closed melting machine melting chamber, includes melting chamber main part, its characterized in that, melting chamber main part includes curb plate all around, roof, two qianmen, two left and right sides doors, bottom support and bottom plate apron, the roof with curb plate all around is the plate body that comprises a plurality of water-cooling boards concatenation, water inlet and outlet and water course structure are all equipped with to the water-cooling board inside, the water-cooling board includes first water-cooling board, a plurality of second water-cooling board and a plurality of third water-cooling board;
the upper layer of the first water cooling plate is provided with a waist-shaped hole, the upper layer of the second water cooling plate is provided with a window, the top plate is a plate body formed by splicing the first water cooling plate, the second water cooling plate and the third water cooling plate through bolts, and the peripheral side plates are plate bodies formed by splicing the second water cooling plate and the third water cooling plate through bolts;
the two front doors comprise a left front door and a right front door, the two front doors are positioned on the front side plates of the peripheral side plates, the left front door and the right front door are respectively connected with the water cooling plate through pin shafts, two oppositely arranged cylinder supports are arranged on the bottom support, the cylinder supports are fixed with cylinders through supporting seats, the fixed ends of the cylinders are connected with the supporting seats, and the movable ends of the cylinders are respectively connected with the left front door and the right front door.
According to the invention, heat is absorbed through the design of the stainless steel water cooling wall body, and dust in the environment is removed through the cooperation of the sealed wall body design and an exhaust system, so that the environmental noise is reduced. And all there is the water course in the water-cooling plate, make things convenient for rivers to flow according to the direction of settlement, thereby guaranteed when striking quartz crucible, the effect that the little melting chamber of water-cooling played is, 1) provide stable fusion environment, 2) guarantee that the heat of melting chamber can not scatter outside the melting chamber, temperature stability when having guaranteed the melting, it is better to heat up, production quartz crucible quality stability and uniformity are better, 3) noise when isolated striking, thereby provide operating personnel operational safety environment, 4) whole little melting chamber of water-cooling, the qianmen is the cylinder automatic opening control, guarantee mould business turn over security, can not produce the maloperation, and produce the collision.
Further preferably, the left front door and the right front door are respectively provided with a connecting seat, and the connecting seat is fixedly provided with a pin shaft connected with the movable end of the air cylinder.
Further preferably, bearings are arranged at the joint of the left front door and the water cooling plate and the joint of the right front door and the water cooling plate. Is convenient to open and close.
Further preferably, the left side door and the right side door are respectively installed on a left side plate and a right side plate of the peripheral side plates, and the left side door and the right side door are respectively connected with the left side plate and the right side plate through pin shafts.
According to the invention, more functions can be realized by adding two side doors.
Further preferably, the rear side plate of the peripheral side plate is provided with a ventilation interface. The dust generated during arcing is purged, so that the dust can not mound into the crucible and defects are generated.
Further preferably, the first water cooling plate is provided with six waist-shaped holes, and the six waist-shaped holes are circumferentially distributed along the central point of the first water cooling plate.
The quartz crucible is made for smooth water flow and arcing, so that heat cannot be emitted outwards, and in addition, the melting environment of external dust is prevented, the quality of the production crucible is affected, and the melting environment is stable.
Further preferably, the top plate is formed by splicing a first water cooling plate, two second water cooling plates and two third water cooling plates, wherein the first water cooling plate is positioned in the center, and the two second water cooling plates and the two third water cooling plates respectively surround the outer sides of the first water cooling plates.
The invention optimizes the structure of the top plate and can better provide stable melting environment.
Further preferably, the bottom bracket is arranged around the outside of the floor cover, and the bottom bracket includes an outwardly extending extension end on which the cylinder mount is disposed.
The invention can better protect the melting chamber by adding the extending end.
Further preferably, a rectangular flaky protection plate is mounted at the head part of the extending end, and a silica gel pad is sleeved on the periphery of the protection plate.
Not only can the collision of the protruding ends be prevented, but also the friction force can be increased.
Further preferably, the two opposite side plates of the peripheral side plates are respectively provided with a supporting plate, the supporting plates are fixed with the water cooling plate through bolts, and the supporting plates are close to the bottom bracket.
The invention can play a limiting effect by adding the supporting plate.
Drawings
FIG. 1 is a schematic view of the structure of a melting chamber body of the present invention;
FIG. 2 is an enlarged view of the cylinder mount of the present invention;
FIG. 3 is an enlarged schematic view of the junction of the front door and the water cooling plate according to the present invention;
FIG. 4 is a schematic rear view of the melting chamber body of the present invention;
FIG. 5 is a schematic side view of the melting chamber body of the present invention;
FIG. 6 is a schematic view of a first water-cooled plate;
FIG. 7 is a schematic view of a second water-cooled plate;
fig. 8 is a schematic structural view of a third water cooling plate.
In the figure: 1. a first water cooling plate; 2. a second water cooling plate; 3. a third water cooling plate; 4. a side door; 5. a left front door; 6. a right front door; 7. a cylinder support; 8. a cylinder; 9. an extension end; 10. a bottom bracket; 11. a support base; 12. a connecting seat; 13. a bearing; 14. a pin shaft; 15. a side plate; 16. a waist-shaped hole; 17. a viewing window.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1 to 4, a melting chamber of a closed type melting machine comprises a melting chamber main body, wherein the melting chamber main body comprises four side plates 15, a top plate, two front doors, a left side door 4, a right side door 4, a bottom bracket 10 and a bottom plate cover plate, the top plate and the four side plates are plate bodies formed by splicing a plurality of water cooling plates, water inlet and outlet ports and a water channel structure are arranged in the water cooling plates, and the water cooling plates comprise a first water cooling plate 1, a plurality of second water cooling plates 2 and a plurality of third water cooling plates 3; the upper layer of the first water cooling plate is provided with a waist-shaped hole 16, the upper layer of the second water cooling plate is provided with a window 17, the top plate is a plate body formed by splicing the first water cooling plate, the second water cooling plate and the third water cooling plate through bolts, and the peripheral side plates are plate bodies formed by splicing the second water cooling plate and the third water cooling plate through bolts; the two front doors comprise a left front door 5 and a right front door 6, the two front doors are positioned on the front side plates of the peripheral side plates, the left front door and the right front door are respectively connected with the water cooling plate through pin shafts 14, two oppositely arranged cylinder supports 7 are arranged on the bottom support, the cylinder supports are fixed with cylinders 8 through supporting seats 11, fixed ends of the cylinders are connected with the supporting seats, and movable ends of the cylinders are respectively connected with the left front door and the right front door.
According to the invention, heat is absorbed through the design of the stainless steel water cooling wall body, and dust in the environment is removed through the cooperation of the sealed wall body design and an exhaust system, so that the environmental noise is reduced. And all there is the water course in the water-cooling plate, make things convenient for rivers to flow according to the direction of settlement, thereby guaranteed when striking quartz crucible, the effect that the little melting chamber of water-cooling played is, 1) provide stable fusion environment, 2) guarantee that the heat of melting chamber can not scatter outside the melting chamber, temperature stability when having guaranteed the melting, it is better to heat up, production quartz crucible quality stability and uniformity are better, 3) noise when isolated striking, thereby provide operating personnel operational safety environment, 4) whole little melting chamber of water-cooling, the qianmen is the cylinder automatic opening control, guarantee mould business turn over security, can not produce the maloperation, and produce the collision.
Further preferably, the left front door and the right front door are respectively provided with a connecting seat 12, and a pin shaft connected with the movable end of the air cylinder is fixed on the connecting seats.
Further preferably, bearings 13 are arranged at the connection part of the left front door and the water cooling plate and at the connection part of the right front door and the water cooling plate. Is convenient to open and close.
Further preferably, the left side door and the right side door are respectively arranged on the left side plate and the right side plate of the peripheral side plates, and the left side door and the right side door are respectively connected with the left side plate and the right side plate through pin shafts. According to the invention, more functions can be realized by adding two side doors.
Further preferably, the rear side plate of the peripheral side plate is provided with a ventilation interface. The dust generated during arcing is purged, so that the dust can not mound into the crucible and defects are generated.
Further preferably, the first water cooling plate is provided with six waist-shaped holes 16, and the six waist-shaped holes are circumferentially arranged along the central point of the first water cooling plate. The quartz crucible is made for smooth water flow and arcing, so that heat cannot be emitted outwards, and in addition, the melting environment of external dust is prevented, the quality of the production crucible is affected, and the melting environment is stable.
Further preferably, the top plate is formed by splicing a first water cooling plate, two second water cooling plates and two third water cooling plates, the first water cooling plate is positioned in the center, and the two second water cooling plates and the two third water cooling plates respectively surround the outer sides of the first water cooling plates. The invention optimizes the structure of the top plate and can better provide stable melting environment.
It is further preferred that the bottom bracket is arranged around the outside of the floor covering and that the bottom bracket comprises an outwardly extending projecting end 9, on which the cylinder support is arranged. The invention can better protect the melting chamber by adding the extending end.
Further preferably, a rectangular flaky protection plate is arranged at the head part of the extending end, and a silica gel pad is sleeved on the periphery of the protection plate. Not only can the collision of the protruding ends be prevented, but also the friction force can be increased.
Further preferably, the two opposite side plates of the four-side plate are respectively provided with a supporting plate, the supporting plates are fixed with the water cooling plate through bolts, and the supporting plates are close to the bottom bracket. The invention can play a limiting effect by adding the supporting plate.
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.
Claims (5)
1. The utility model provides a closed melting machine melting chamber, includes melting chamber main part, its characterized in that, melting chamber main part includes curb plate all around, roof, two qianmen, two left and right sides doors, bottom support and bottom plate apron, the roof with curb plate all around is the plate body that comprises a plurality of water-cooling boards concatenation, water inlet and outlet and water course structure are all equipped with to the water-cooling board inside, the water-cooling board includes first water-cooling board, a plurality of second water-cooling board and a plurality of third water-cooling board;
the upper layer of the first water cooling plate is provided with a waist-shaped hole, the upper layer of the second water cooling plate is provided with a window, the top plate is a plate body formed by splicing the first water cooling plate, the second water cooling plate and the third water cooling plate through bolts, and the peripheral side plates are plate bodies formed by splicing the second water cooling plate and the third water cooling plate through bolts;
the two front doors comprise a left front door and a right front door, the two front doors are positioned on the front side plates of the peripheral side plates, the left front door and the right front door are respectively connected with the water cooling plate through pin shafts, two oppositely arranged cylinder supports are arranged on the bottom support, the cylinder supports are fixed with cylinders through supporting seats, the fixed ends of the cylinders are connected with the supporting seats, and the movable ends of the cylinders are respectively connected with the left front door and the right front door;
the ventilation port is formed in the rear side plate of the peripheral side plate, six waist-shaped holes are formed in the first water-cooling plate, the six waist-shaped holes are circumferentially distributed along the central point of the first water-cooling plate, the top plate is formed by splicing a first water-cooling plate, two second water-cooling plates and two third water-cooling plates, the first water-cooling plate is located in the center, and the two second water-cooling plates and the two third water-cooling plates respectively surround the outer side of the first water-cooling plate.
2. The melting chamber of claim 1, wherein the left and right side doors are respectively mounted on a left side plate and a right side plate of the peripheral side plate, and the left and right side doors are respectively connected with the left side plate and the right side plate through pin shafts.
3. The melting chamber of claim 1 wherein the bottom bracket is disposed about the outside of the floor cover and the bottom bracket includes an outwardly extending extension end, the cylinder mount being disposed on the extension end.
4. A melting chamber of a closed type melting machine according to claim 3, wherein a rectangular sheet-shaped protection plate is mounted on the head of the protruding end, and a silica gel pad is sleeved on the periphery of the protection plate.
5. The melting chamber of claim 1, wherein two opposite side plates of the peripheral side plates are respectively provided with a support plate, the support plates are fixed with the water cooling plate by bolts, and the support plates are close to the bottom bracket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111421581.2A CN114413622B (en) | 2021-11-26 | 2021-11-26 | Water-cooling melting chamber of closed melting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111421581.2A CN114413622B (en) | 2021-11-26 | 2021-11-26 | Water-cooling melting chamber of closed melting machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114413622A CN114413622A (en) | 2022-04-29 |
| CN114413622B true CN114413622B (en) | 2023-12-26 |
Family
ID=81266212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111421581.2A Active CN114413622B (en) | 2021-11-26 | 2021-11-26 | Water-cooling melting chamber of closed melting machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114413622B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000292029A (en) * | 1999-04-02 | 2000-10-20 | Calsonic Kansei Corp | Liquid tank |
| JP2003240445A (en) * | 2002-02-19 | 2003-08-27 | Jfe Steel Kk | Water cooled panel for door provided in molten metal smelting facility |
| CN205347200U (en) * | 2015-12-08 | 2016-06-29 | 上海汉虹精密机械有限公司 | Melting machine water -cooling melting room |
| CN207009602U (en) * | 2017-05-23 | 2018-02-13 | 东莞市迈泰热传科技有限公司 | A kind of Integral T cooled plate |
| CN109451699A (en) * | 2018-10-17 | 2019-03-08 | 常州常发制冷科技有限公司 | A kind of bendable liquid-cooling heat radiation cabinet |
| CN110459834A (en) * | 2019-08-12 | 2019-11-15 | 江苏常隆客车有限公司 | A kind of pin-connected panel water-cooled plate |
| CN211503808U (en) * | 2019-12-04 | 2020-09-15 | 河北鸿科碳素有限公司 | Novel concatenation formula fin structure |
| CN212451168U (en) * | 2020-05-29 | 2021-02-02 | 锦州万得机械装备有限公司 | Heat shield protection mechanism of quartz crucible melting equipment |
-
2021
- 2021-11-26 CN CN202111421581.2A patent/CN114413622B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000292029A (en) * | 1999-04-02 | 2000-10-20 | Calsonic Kansei Corp | Liquid tank |
| JP2003240445A (en) * | 2002-02-19 | 2003-08-27 | Jfe Steel Kk | Water cooled panel for door provided in molten metal smelting facility |
| CN205347200U (en) * | 2015-12-08 | 2016-06-29 | 上海汉虹精密机械有限公司 | Melting machine water -cooling melting room |
| CN207009602U (en) * | 2017-05-23 | 2018-02-13 | 东莞市迈泰热传科技有限公司 | A kind of Integral T cooled plate |
| CN109451699A (en) * | 2018-10-17 | 2019-03-08 | 常州常发制冷科技有限公司 | A kind of bendable liquid-cooling heat radiation cabinet |
| CN110459834A (en) * | 2019-08-12 | 2019-11-15 | 江苏常隆客车有限公司 | A kind of pin-connected panel water-cooled plate |
| CN211503808U (en) * | 2019-12-04 | 2020-09-15 | 河北鸿科碳素有限公司 | Novel concatenation formula fin structure |
| CN212451168U (en) * | 2020-05-29 | 2021-02-02 | 锦州万得机械装备有限公司 | Heat shield protection mechanism of quartz crucible melting equipment |
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| Publication number | Publication date |
|---|---|
| CN114413622A (en) | 2022-04-29 |
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