CN114402415A - Short arc type discharge lamp - Google Patents
Short arc type discharge lamp Download PDFInfo
- Publication number
- CN114402415A CN114402415A CN202080063936.2A CN202080063936A CN114402415A CN 114402415 A CN114402415 A CN 114402415A CN 202080063936 A CN202080063936 A CN 202080063936A CN 114402415 A CN114402415 A CN 114402415A
- Authority
- CN
- China
- Prior art keywords
- heat radiation
- electrode
- discharge lamp
- radiation film
- short arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims abstract description 78
- 239000000463 material Substances 0.000 claims abstract description 44
- 239000000654 additive Substances 0.000 claims abstract description 32
- 230000000996 additive effect Effects 0.000 claims abstract description 32
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 18
- 239000010936 titanium Substances 0.000 claims abstract description 17
- 229910000449 hafnium oxide Inorganic materials 0.000 claims abstract description 15
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims abstract description 15
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910001928 zirconium oxide Inorganic materials 0.000 claims abstract description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000001301 oxygen Substances 0.000 claims abstract description 12
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 12
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims abstract description 11
- 230000007547 defect Effects 0.000 claims abstract description 11
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 10
- 229910052735 hafnium Inorganic materials 0.000 claims abstract description 6
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 6
- 239000010955 niobium Substances 0.000 claims abstract description 6
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 6
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims abstract 2
- 239000011148 porous material Substances 0.000 claims description 5
- 238000012545 processing Methods 0.000 claims description 2
- 239000011247 coating layer Substances 0.000 claims 2
- 239000006104 solid solution Substances 0.000 abstract description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 46
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 14
- 229910052721 tungsten Inorganic materials 0.000 description 13
- 239000011248 coating agent Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 12
- 238000012360 testing method Methods 0.000 description 12
- 239000010937 tungsten Substances 0.000 description 12
- 230000017525 heat dissipation Effects 0.000 description 11
- 230000000694 effects Effects 0.000 description 8
- 230000003595 spectral effect Effects 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000008602 contraction Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910021478 group 5 element Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000013507 mapping Methods 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 206010021143 Hypoxia Diseases 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 229910021480 group 4 element Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 238000002411 thermogravimetry Methods 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- 229920000298 Cellophane Polymers 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
- H01J61/523—Heating or cooling particular parts of the lamp
- H01J61/526—Heating or cooling particular parts of the lamp heating or cooling of electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0735—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
Landscapes
- Discharge Lamp (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
The invention provides a short arc type discharge lamp, a pair of electrodes are oppositely arranged in a luminotron, a heat radiation film is formed on the outer surface of at least one electrode in the pair of electrodes, the heat radiation film is not melted, the heat radiation performance is excellent, the film peeling is not generated, and the service life is long. The heat radiation film formed on the outer surface of the electrode is obtained by forming an additive into an oxide, and forming a solid solution in a covering material containing at least 1 of zirconium oxide and hafnium oxide, the additive being composed of at least 1 of titanium, zirconium, hafnium, vanadium, and niobium, and generating oxygen defects in the covering material.
Description
Technical Field
The present invention relates to a short arc type discharge lamp, and more particularly, to a short arc type discharge lamp in which a heat radiation film is formed on an outer surface of an electrode in order to lower a temperature of the electrode when the lamp is lit.
Background
For example, short arc discharge lamps are used as light sources in exposure apparatuses and various projectors used in manufacturing processes of semiconductor devices, liquid crystal display devices, and the like.
The short arc discharge lamp is configured by disposing an anode and a cathode in a light emitting tube so as to face each other, and sealing a light emitting substance such as mercury or xenon gas in the light emitting tube.
In such a short arc type discharge lamp, it is known that evaporation of an electrode material due to overheating of the anode or the like occurs because of a high thermal load applied to the anode at the time of lighting, and the evaporated material adheres to the inner wall of the arc tube, thereby causing so-called blackening in which the light transmittance is lowered.
In order to solve such a problem, a technique of forming a heat dissipation layer on an outer surface of an electrode to suppress a temperature rise of the electrode is known, and japanese patent application laid-open No. 2004-259639 (patent document 1) discloses a discharge lamp in which a heat dissipation layer containing an oxide of at least 1 metal is formed on an outer surface except for a vicinity of a tip of the electrode.
However, zirconia is an oxide ceramic and is stable even at high temperatures, and therefore has a problem that it has poor adhesion to an electrode, is difficult to adhere to the surface of the electrode during production, and is easily peeled off.
Further, the thermal expansion coefficient of tungsten was 4.5X 10-6On the other hand, the thermal expansion coefficient of zirconia is 10.5X 10-6The difference is large, and there is a problem that the heat dissipation layer may be peeled off due to expansion and contraction of the electrode caused by lighting and extinguishing of the lamp.
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open publication No. 2004-259639
Disclosure of Invention
Problems to be solved by the invention
In view of the problems of the prior art described above, an object of the present invention is to provide a short arc discharge lamp in which a pair of electrodes are arranged to face each other inside a light-emitting tube, and a heat radiation film as a high radiation film is formed on an outer surface of at least one of the pair of electrodes, wherein the heat radiation film is not melted, has excellent heat radiation properties, does not cause film separation, and has a long life.
Means for solving the problems
In order to solve the above problems, a short arc type discharge lamp according to the present invention is a short arc type discharge lamp in which a heat radiation film as a high radiation film formed on an outer surface of an electrode is obtained by forming an additive into an oxide to be solid-solved in a coating material and generating an oxygen defect in the coating material, the additive is composed of at least 1 kind of titanium, zirconium, hafnium, vanadium, and niobium, and the coating material contains at least 1 kind of zirconium oxide and hafnium oxide.
Further, a ratio of the additive to the covering material in the heat radiation film is 1 wt% or more and 50 wt% or less.
Further, the film thickness of the heat radiation film is 1 μm or more and 200 μm or less.
Further, the heat radiation film is porous and has pores on the surface.
Further, the average size of the pores is in the range of 1 μm or more and 50 μm or less.
Further, it is characterized in that the emissivity of the visible region of the heat-radiating film is greater than 0.8.
Further, the electrode is characterized in that a concave-convex surface is formed on an outer surface of the electrode, and a heat radiation film is formed on a surface of the concave-convex surface.
Further, the uneven surface is a machined groove.
Further, a fusion-bonding layer made of the same component as the additive is formed on the outer surface of the electrode, and the heat radiation film is formed on the outer surface of the fusion-bonding layer.
Effects of the invention
According to the short arc type discharge lamp of the present invention, since the coating material containing at least 1 of zirconia and hafnium oxide or the coating material composed of at least 1 of zirconia and hafnium oxide is used as the main component of the heat radiation film covering the outer surface of the electrode, the melting point of the zirconia and hafnium oxide is 2700 ℃.
Further, by using zirconium oxide or hafnium oxide as the covering material of the heat radiation film, the emissivity in the long wavelength region of 6 μm or more can be increased as compared with an electrode not provided with a covering material, and therefore, the heat radiation property is excellent.
Further, since the coating material is obtained by forming an additive composed of at least 1 of titanium, zirconium, hafnium, vanadium, and niobium into an oxide and forming a solid solution, and generating oxygen defects in the coating material, it is possible to obtain a black gray color, a spectral emissivity of 0.8 or more in the visible region, and a spectral emissivity of 0.9 or more at a wavelength of 1 μm. Therefore, the heat dissipation property is excellent.
In addition, since the additive is formed as an oxide and dissolved in the coating material, a strong heat radiation film is formed. Further, since a part of the additive is welded to the electrode surface, the heat radiation film is more firmly attached to the electrode.
Further, by setting the thickness of the heat radiation film to a thickness of 1 μm to 200 μm, a film which can obtain a sufficient emissivity and is difficult to peel can be formed.
Further, the heat radiation film is made porous, and thus voids are generated in the surface, whereby the emissivity can be improved. Further, the size of the pores is set in the range of 1 μm to 50 μm, whereby the emissivity can be further improved.
In addition, by forming the uneven surface on the outer surface of the electrode, the adhesion between the heat radiation film and the electrode can be improved. In particular, when the uneven surface is a machined groove, fine cracks are formed on the outer surface of the electrode together with the uneven shape, and therefore, the adhesion can be further improved.
Drawings
Fig. 1 is an overall configuration diagram of a short arc type discharge lamp of the present invention.
Fig. 2 is an enlarged view of the electrode of the present invention.
Fig. 3 is a cross-sectional view of a heat radiation film on the outer surface of an electrode, (a) is a schematic view after coating, and (B) is a schematic view after sintering.
Fig. 4 is a schematic view in consideration of chemical bonding of the heat radiation film, (a) is a case where the electrode is covered with only the covering material without adding the additive, and (B) is a case where the electrode is covered with the covering material with the additive added.
Fig. 5 is an enlarged cross-sectional view showing a state of bonding of the electrode and the heat radiation film.
Fig. 6 is a graph showing the measurement results of the spectral radiance of the electrode.
Fig. 7 is a graph showing the emissivity of the visible region of the electrode.
Fig. 8 is a sectional photograph of the heat radiation film.
Fig. 9 is element mapping of the bolometric film based on EDS analysis.
Fig. 10 is a graph showing thermogravimetric analysis of the heat radiating film.
Detailed Description
Fig. 1 is an overall configuration diagram showing an example of a short arc type discharge lamp to which the present invention is directed.
This short arc type discharge lamp (hereinafter, also simply referred to as "discharge lamp") 1 has a substantially spherical arc tube 2 formed of quartz glass.
Inside the arc tube 2, the anode 3 and the cathode 4 are supported by the electrode core wire 5 and are arranged to face each other. Here, the anode 3 was formed of tungsten, the cathode 4 was formed of thoriated tungsten, and the electrode core 5 was formed of tungsten.
The arc tube 2 is sealed with a predetermined amount of light-emitting substances such as mercury and xenon, and a start assist buffer gas such as argon.
In fig. 2, an anode 3 and a cathode 4 are shown as being arranged to face each other inside the arc tube 2, and in this example, a heat radiation film 6 is provided on the outer surface of the anode 3 except for the tip end portion thereof. Here, the outer surface of the anode 3 means an outer surface except for the tip portion facing the cathode 4. Since the temperature of the front end portion of the anode 3 may rise to the melting point of the heat radiation film 6 or higher at the time of lighting the discharge lamp, the heat radiation film 6 is not provided at the front end portion of the anode 3 in this embodiment.
In the present embodiment, the heat radiating film 6 is provided only on the outer surface of the anode 3, but the heat radiating film 6 may be provided on the outer surface of the cathode 4.
Here, in order to improve the adhesion of the heat radiation film 6 to the electrode, a concave-convex surface may be provided on the outer surface of the anode 3. The uneven surface can be formed by cutting, laser processing, sandblasting, or the like. In particular, when the uneven surface is a machined groove by cutting, fine cracks are formed on the outer surface of the electrode together with the uneven shape, and therefore, the adhesion can be further improved. In addition, when the uneven surface is a machined groove by laser machining, a part of fine metal particles melted and evaporated by laser irradiation adhere to the outer surface of the electrode. Thereby, the outer surface of the electrode is roughened, and thus the adhesion is further improved.
Fig. 3 is a schematic view of a heat radiation film 6 in a case where the heat radiation film 6 is considered as a collection of particles, and the heat radiation film 6 is composed of a covering material 8 and an additive 9. Fig. 3 (a) shows a state after the coating material 8 and the additive 9 are applied to the electrode 3 and before firing, and fig. 3 (B) shows a state after firing in which the heat radiation film 6 is formed.
Since the electrode is at a high temperature when the discharge lamp is turned on, the covering material 8 needs to be stable even at a high temperature. In the present invention, any of zirconium oxide, hafnium oxide, or a mixture of zirconium oxide and hafnium oxide is used for the covering material 8. Since the melting points of zirconium oxide and hafnium oxide are 2700 ℃ or higher, the heat radiation film 6 does not melt when the discharge lamp is lit.
The additive 9 is formed as an oxide 10 after firing and is solid-dissolved in the covering material 8 to cause oxygen defects in the covering material 8. The group iv element and the group v element are formed as an oxide 10 and solid-dissolved in zirconium oxide or hafnium oxide as the covering material 8. However, since tantalum in the group v element has a higher melting point than zirconium oxide and hafnium oxide, if tantalum is melted and dissolved in the covering material 8, the covering material 8 is also melted. Therefore, in the present invention, as the additive 9, titanium, zirconium, hafnium, vanadium, and niobium having a melting point lower than that of zirconium oxide and hafnium oxide are used among the group iv element and the group v element.
The additive 9 in the heat radiation film 6 is contained in a proportion of 1 wt% or more and 50 wt% or less with respect to the covering material 8. If the ratio of the additive 9 to the covering material 8 is more than 50 wt%, the additive 9 cannot be dissolved in the covering material 8, and therefore, the ratio needs to be 50 wt% or less. In addition, if the ratio of the additive 9 to the covering material 8 is low, the heat radiation film 6 does not sufficiently adhere to the electrode, and therefore the ratio is preferably 1 wt% or more, and more preferably 10 wt% or more.
Fig. 3 shows a case where the covering material 8 to which the additive 9 is added is applied to the electrode 3, but only the additive 9 may be applied to the electrode 3 in advance, and the covering material 8 to which the additive 9 is added may be applied. In this case, since the cladding layer made of the same component as the additive is formed on the surface of the electrode and the heat radiation film is formed on the outer surface of the cladding layer, the heat radiation film is more firmly attached to the electrode.
Fig. 4 is a schematic view of the heat radiation film 6 in consideration of chemical bonding, in which fig. 4 (a) shows a case where the electrode is covered with only the covering material without adding an additive, and fig. 4 (B) shows a state where the heat radiation film is formed by adding an additive to the covering material. In fig. 4, a case where zirconia is used as a covering material and titanium is used as an additive will be described.
In the case where titanium is not added, as shown in fig. 4 (a), zirconium oxide exists in a stable state in which zirconium atoms 12 and oxygen atoms 13 are bonded, and thus adhesion to the electrode is poor. Further, the thermal expansion coefficient of tungsten was 4.5X 10-6/K，In contrast, the thermal expansion coefficient of zirconia is 10.5 × 10-6The difference is large, and peeling may occur due to expansion and contraction of the electrodes caused by lighting and extinguishing of the lamp.
On the other hand, when titanium is added, the titanium melts during sintering, and the bonding of tungsten atoms 11 and titanium atoms 14 occurs as shown in fig. 4 (B). Therefore, the heat radiation film 6 is well attached to the electrode.
As shown in fig. 4 (B), the added titanium is bonded to the oxygen atom 13, i.e., formed as an oxide and dissolved in the zirconia. Then, oxygen defects 15 are generated in the heat radiation film 6. Here, although zirconium oxide is a normally white solid and hafnium oxide is a normally colorless solid, if oxygen defect 15 is generated, it appears as a black gray. Therefore, the emissivity can be improved, and the temperature of the electrode can be effectively reduced by heat radiation.
Specific examples of the heat radiation film are described below.
1. Production example
Titanium powder was added to zirconia having a particle size of 10 μm or less in an amount of 10% by weight, and the mixture was mixed well with a solvent composed of nitrocellulose and butyl acetate, and then applied to the side surface of the anode with a pen. Then, the film was dried at 150 ℃ for 30 minutes, and then heat-treated at 1900 ℃ for 120 minutes in a vacuum atmosphere to form a heat-radiating film having a thickness of 10 to 50 μm.
Further, by performing the heat treatment in the vacuum atmosphere, as shown in fig. 5, a part of the zirconia scatters, and a void 20 is generated in a part of the heat radiation film 6.
Further, grooves having a width of 150 μm, a depth of 30 μm, and a pitch of about 150 μm were formed on the surface of the side surface of the anode 3 by cutting with a mechanical lathe. Further, numerous cracks of several widths μm and lengths of several μm to 10 μm are generated on the tungsten surface inside the groove along the tungsten grain boundary during cutting. Thereby, zirconia and titanium penetrate into the cracks to improve the adhesion.
< specification of short arc type discharge lamp >
The diameter of the anode of the electrode is 29mm, and the cathode is arranged between the electrodes with the distance of 7.3 mm. The lamp is an ultra-high pressure mercury lamp for vertical lighting, which is sealed with a proper amount of mercury and rare gas for starting, and has a rated input of 5000W and a voltage of 50V.
2. Analysis of thermal radiation film
(1) Spectral radiance of heat radiation film
Fig. 6 shows the measurement results of the spectral radiance of the electrode having the heat-radiating film of the present invention. The solid line indicates the heat radiation film of the present invention containing zirconia as a main component (example), the broken line indicates the surface of the tungsten electrode on which the heat radiation film is not provided (comparative example 1), and the two-dot chain line indicates the case where the tungsten paste is provided on the surface of the tungsten electrode (comparative example 2).
It was confirmed that the electrode (example) having the heat radiation film of the present invention has a higher emissivity in a long wavelength region of 6 μm or more than comparative examples 1 and 2.
In addition, as shown in fig. 7, the emissivity of the electrode having the heat-radiating film of the present invention in the visible region is 0.8 or more over the entire visible light range from 380nm to 780 nm.
(2) Solid solution state
Fig. 8 shows an SEM photograph of a cross section of the heat radiation film of the present invention. Fig. 9 shows an elemental map by EDS (Energy dispersive X-ray spectrometry) analysis for the same portion as the photograph of fig. 8.
In the SEM photograph shown in fig. 8, no added titanium was observed. That is, it is known that titanium added to the heat radiation film does not exist as particles.
On the other hand, in the elemental mapping shown in fig. 9, zirconium and added titanium, which are main components of the heat radiation film, are detected separately. In addition, since the light element cannot be detected in the current EDS, it is known that the portion where zirconium is detected is zirconia.
From the SEM photograph of the cross section of the heat-radiating film and the observation result based on the elemental mapping, it was found that the added titanium was dispersed and dissolved in the zirconia film appropriately.
(3) Oxygen deficiency
The oxygen defects of the zirconia as the radiation film were confirmed by thermogravimetric analysis.
The heat radiation film (zirconia) of the example fired on the electrode was cut off by a cemented carbide blade to obtain a 12mg sample. The data were set in a thermogravimetric apparatus, heated from room temperature to 1300 ℃ at 5 ℃/min under atmospheric atmosphere, and the change in weight was measured. For comparison, the results of the same analysis performed with the same amount of zirconia are shown in fig. 9.
The zirconia was not observed to change in weight by heating, but showed 6.9% weight increase up to 1300 ℃ in the heat-radiating film. This is considered to be because the oxygen defects are formed in the zirconia film in which oxygen is insufficient due to the effect of titanium dissolved in zirconia, but the defects are recovered by bonding with oxygen by heating in the atmosphere, and as a result, the weight is increased. The sample before analysis was dark gray, but changed to white after analysis, and returned to the state of ordinary zirconia.
3. Confirmation of Effect
Table 1 shows the evaluation results of the adhesion of the heat-radiating film and the results of confirming the effect of improving the heat dissipation property by the heat-radiating film.
[ Table 1]
In table 1, "a" indicates that the heat-radiating film did not peel in the tape peeling test and the temperature raising and lowering repetition test, and "B" indicates that peeling occurred. Further, "-" means that no test was conducted. That is, the temperature increase/decrease test was performed only for the case of "a" in the tape peeling test.
(1) Adhesion Property
For the evaluation of adhesion, first, a 15mm wide cellophane adhesive tape (available from Nichiban corporation; CT405AP, adhesion 3.93N/10mm) was stuck to the peripheral surface of the anode having a diameter of 29mm after the radiation film was coated on the electrode and sintered, and the tape was rapidly peeled off, and whether the radiation film was adhered to the adhesive surface of the tape was visually checked.
Further, with respect to the adhesiveness to the expansion and contraction of the electrode caused by heat, the flicker lighting test was repeated 50 times with the anode having the sintered heat radiation film mounted thereon being turned on at a rated power of 5000W for 1 hour and then turned off for 30 minutes, and the peeling of the heat radiation film was visually confirmed. At this time, the portion of the heat radiation film on the anode side closest to the electrode tip reached about 2000 ℃.
As a result, in the tape peeling test, only sample 1 was "B", that is, the heat radiation film peeled from the electrode surface and adhered to the tape.
In addition, the samples (samples 2 to 7 and the conventional example) evaluated as "a" in the tape peeling test were subjected to a temperature increase/decrease repetition test, and as a result, sample 2 was evaluated as "B".
(2) Heat dissipation
The effect of improving the heat dissipation performance was confirmed by evaluating the lighting time until the illuminance reached 95% of the initial lighting period in the lighting test. It was evaluated that the shorter the illuminance maintaining time, the worse the heat dissipation (the temperature of the electrode did not decrease, the evaporation amount of the electrode was large, and therefore the degree of illuminance decrease due to blackening was large), and the longer the time, the better the heat dissipation (the temperature of the electrode was low, blackening was reduced).
Here, since samples 4, 5, and 6 to which zirconium was added had almost the same visual appearance, it is considered that all changes with time were the same, and only sample 5 was tested as a test for confirming the effect of improving the heat dissipation property.
Further, the lamp was vertically lighted at a rated power of 5000W (voltage 50V).
In the conventional specifications of the tungsten paste, the illuminance maintenance ratio of 95% is 200 hours after lighting.
On the other hand, in the specifications of the heat-radiating film of the present invention ( samples 3, 5, and 7), the illuminance maintenance ratio of 95% was about 450 hours to 510 hours of lighting, and it was confirmed that the illuminance maintenance ratio was significantly improved as compared with the conventional specifications.
Further, sample 2 was inferior to the conventional example. This is considered to be because the film peels off due to repetition of lighting and extinguishing of the lamp, and no longer functions as a heat radiation film, that is, the effect of suppressing the increase in the electrode temperature disappears.
According to the short arc type discharge lamp of the present invention, since the covering material containing at least 1 of zirconium oxide and hafnium oxide is used as the main component of the heat radiation film formed on the outer surface of the electrode, the following effects are obtained: the heat radiation film is not melted even when the lamp is turned on, has excellent heat dissipation, does not cause film peeling, and can maintain stable lighting for a long time.
Further, by forming an additive composed of at least 1 of titanium, zirconium, hafnium, vanadium, and niobium as an oxide and dissolving the oxide in the coating material, and by generating oxygen defects in the coating material, the heat-radiating film is blackish gray, and the spectral emissivity in the visible region can be made 0.8 or more, and the spectral emissivity at a wavelength of 1 μm can be made 0.9 or more, and the heat radiation property is further excellent.
Description of the reference symbols
1: short arc type discharge lamp
2: luminous tube
3: anode
4: cathode electrode
5: electrode core wire
6: heat radiation film
8: covering material
9: additive material
10: oxide compound
11: tungsten atom
12: zirconium atom
13: oxygen atom
14: titanium atom
15: oxygen deficiency
20: and (4) forming a hollow hole.
Claims (9)
1. A short arc type discharge lamp in which a pair of electrodes are arranged to face each other inside a luminous tube, and a heat radiation film is formed on an outer surface of at least one of the pair of electrodes,
the heat radiation film is obtained by forming an additive into an oxide to be solid-solved in a covering material composed of at least 1 of titanium, zirconium, hafnium, vanadium, and niobium, and generating an oxygen defect in the covering material, and the covering material contains at least 1 of zirconium oxide and hafnium oxide.
2. The short arc type discharge lamp according to claim 1,
the additive of the heat radiation film is in a ratio of 1 wt% or more and 50 wt% or less with respect to the covering material.
3. The short arc type discharge lamp according to claim 1 or 2,
the film thickness of the heat radiation film is 1 [ mu ] m or more and 200 [ mu ] m or less.
4. The short arc type discharge lamp according to any one of claims 1 to 3,
the heat radiation film is porous and has pores on the surface.
5. The short arc type discharge lamp according to claim 4,
the average size of the pores is in the range of 1 μm to 50 μm.
6. The short arc type discharge lamp according to any one of claims 1 to 5,
the emissivity of the visible region of the heat-radiating film is greater than 0.8.
7. The short arc type discharge lamp according to any one of claims 1 to 6,
an uneven surface is formed on the outer surface of the electrode, and a heat radiation film is formed on the surface of the uneven surface.
8. The short arc type discharge lamp according to claim 7,
the concave-convex surface is a processing groove.
9. The short arc type discharge lamp according to any one of claims 1 to 8,
a fusion-coating layer made of the same component as the additive is formed on the outer surface of the electrode, and the heat-radiating film is formed on the surface of the fusion-coating layer.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019185853 | 2019-10-09 | ||
| JP2019-185853 | 2019-10-09 | ||
| PCT/JP2020/030230 WO2021070459A1 (en) | 2019-10-09 | 2020-08-06 | Short arc discharge lamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114402415A true CN114402415A (en) | 2022-04-26 |
Family
ID=75437811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202080063936.2A Pending CN114402415A (en) | 2019-10-09 | 2020-08-06 | Short arc type discharge lamp |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7294436B2 (en) |
| CN (1) | CN114402415A (en) |
| WO (1) | WO2021070459A1 (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004259639A (en) * | 2003-02-27 | 2004-09-16 | Allied Material Corp | Discharge lamp and its electrode structure |
| JP2010153292A (en) * | 2008-12-26 | 2010-07-08 | Ushio Inc | Discharge lamp |
| JP2010284873A (en) * | 2009-06-11 | 2010-12-24 | Asahi Glass Co Ltd | Heat-ray-reflective transparent material, method of manufacturing the same, and greenhouse provided with the same |
| CN103975414A (en) * | 2012-07-03 | 2014-08-06 | 株式会社东芝 | Tungsten alloy part, and discharge lamp, transmitting tube and magnetron using same |
| CN103987864A (en) * | 2012-01-07 | 2014-08-13 | 株式会社东芝 | Tungsten alloy, tungsten alloy part using same, discharge lamp, transmission tube, and magnetron |
| JP2015185221A (en) * | 2014-03-20 | 2015-10-22 | スタンレー電気株式会社 | Filament and light source device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4959482A (en) * | 1972-10-13 | 1974-06-10 | ||
| DE102009021235B4 (en) | 2009-05-14 | 2018-07-26 | Osram Gmbh | Discharge lamp with coated electrode |
-
2020
- 2020-08-06 CN CN202080063936.2A patent/CN114402415A/en active Pending
- 2020-08-06 WO PCT/JP2020/030230 patent/WO2021070459A1/en active Application Filing
- 2020-08-06 JP JP2021550389A patent/JP7294436B2/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004259639A (en) * | 2003-02-27 | 2004-09-16 | Allied Material Corp | Discharge lamp and its electrode structure |
| JP2010153292A (en) * | 2008-12-26 | 2010-07-08 | Ushio Inc | Discharge lamp |
| JP2010284873A (en) * | 2009-06-11 | 2010-12-24 | Asahi Glass Co Ltd | Heat-ray-reflective transparent material, method of manufacturing the same, and greenhouse provided with the same |
| CN103987864A (en) * | 2012-01-07 | 2014-08-13 | 株式会社东芝 | Tungsten alloy, tungsten alloy part using same, discharge lamp, transmission tube, and magnetron |
| CN103975414A (en) * | 2012-07-03 | 2014-08-06 | 株式会社东芝 | Tungsten alloy part, and discharge lamp, transmitting tube and magnetron using same |
| JP2015185221A (en) * | 2014-03-20 | 2015-10-22 | スタンレー電気株式会社 | Filament and light source device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7294436B2 (en) | 2023-06-20 |
| WO2021070459A1 (en) | 2021-04-15 |
| JPWO2021070459A1 (en) | 2021-04-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5534073B2 (en) | Fluorescent lamp | |
| KR101706143B1 (en) | Discharge lamp comprising coated electrode | |
| HU199195B (en) | Electric lamp with improved current lead-in | |
| US11170987B1 (en) | Short-arc discharge lamp | |
| JP2002316884A (en) | High-transmittance alumina for ceramic metal halide lamp | |
| CN114402415A (en) | Short arc type discharge lamp | |
| JP2004220784A (en) | Junction, assembly for high-pressure discharge lamp and high-pressure discharge lamp | |
| JP2021521608A (en) | Electrodes for discharge lamps, discharge lamps, and methods for manufacturing electrodes | |
| WO2008137219A1 (en) | High temperature coating for discharge lamps | |
| EP0871202A2 (en) | Metal halide discharge lamp | |
| JP2010539666A (en) | High pressure discharge lamp | |
| JP2007250343A (en) | Manufacturing method of sintered electrode for cold-cathode tube | |
| JP3610853B2 (en) | Low pressure discharge lamp | |
| JP2005123016A (en) | Alloy for lead member of electric bulb, and electrode structure of electric bulb using the same | |
| JP2002326878A (en) | Joint body and high-pressure discharge lamp | |
| JP3671976B2 (en) | Low pressure discharge lamp | |
| CN113936991A (en) | Short arc type discharge lamp | |
| CN115547807A (en) | Short arc type discharge lamp | |
| JP2003249191A (en) | Electrode for discharge lamp | |
| CN117133624A (en) | Discharge lamp and method for manufacturing electrode for discharge lamp | |
| WO2012053383A1 (en) | Electrode for fluorescent lamp and fluorescent lamp | |
| JP2005011745A (en) | Metal-halide lamp, its manufacturing method, and conductive cermet | |
| CN115692163A (en) | Discharge lamp and method for evaluating life of discharge lamp | |
| CN117936360A (en) | Discharge lamp with a discharge vessel having a discharge vessel with a discharge lamp chamber | |
| JP4159048B2 (en) | Assembly, luminous container, assembly for high pressure discharge lamp, and high pressure discharge lamp |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |