CN114371348A - Super-surface testing device, testing method and PB phase testing method - Google Patents

Super-surface testing device, testing method and PB phase testing method Download PDF

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CN114371348A
CN114371348A CN202111572426.0A CN202111572426A CN114371348A CN 114371348 A CN114371348 A CN 114371348A CN 202111572426 A CN202111572426 A CN 202111572426A CN 114371348 A CN114371348 A CN 114371348A
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waveguide
reflected
polarizer
wave
metasurface
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CN114371348B (en
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罗先刚
罗军
蒲明博
马晓亮
赵泽宇
王宇辉
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Institute of Optics and Electronics of CAS
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    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract

本发明提供了一种超表面测试装置、测试方法及PB相位测试方法,所述测试装置包括:第一同轴波导转换器、第二同轴波导转换器、正交模耦合器、极化器、反射波导、矢量网络分析仪(VNA),两个同轴波导转换器的同轴端与矢量网络分析仪连接,波导端与正交模耦合器连接;正交模耦合器、极化器、反射波导依次相连;反射波导具有用于反射入射圆极化波的反射面。本发明通过采用测试装置可对极化转换反射波束幅值和相位的收集,实现圆极化转换效率和PB(Pancharatnam‑Berry)相位测试。相对于目前常用的自由空间测试法,提出波导测试系统能有效节约样品加工成本,提升测试工作效率。

Figure 202111572426

The invention provides a metasurface testing device, a testing method and a PB phase testing method. The testing device comprises: a first coaxial waveguide converter, a second coaxial waveguide converter, an orthogonal mode coupler, and a polarizer , reflection waveguide, vector network analyzer (VNA), the coaxial ends of the two coaxial waveguide converters are connected to the vector network analyzer, and the waveguide ends are connected to the orthogonal mode coupler; the orthogonal mode coupler, polarizer, The reflective waveguides are connected in sequence; the reflective waveguide has a reflective surface for reflecting incident circularly polarized waves. The present invention can collect the amplitude and phase of the polarization conversion reflected beam by using the test device, so as to realize the circular polarization conversion efficiency and PB (Pancharatnam-Berry) phase test. Compared with the currently commonly used free space test method, the proposed waveguide test system can effectively save the sample processing cost and improve the test work efficiency.

Figure 202111572426

Description

一种超表面测试装置、测试方法及PB相位测试方法A kind of metasurface testing device, testing method and PB phase testing method

技术领域technical field

本发明提出一种超表面测试装置、测试方法及PB相位测试方法,涉及超表面单元结构性能测试领域,特别涉及超表面单元结构极化转换效率、PB相位测试装置和方法。The invention provides a metasurface test device, a test method and a PB phase test method, which relate to the field of metasurface unit structure performance test, in particular to a metasurface unit structure polarization conversion efficiency, PB phase test device and method.

背景技术Background technique

超表面通过特定的单元结构和新奇的物理特性,可在亚波长的尺度上实现对电磁波的约束与调控。同时依靠自身的低损耗、低剖面、易于设计与制作等优点,受到科学界以及工业界的广泛关注。随着超表面的不断发展,单元结构的设计从简单到复杂,所能呈现的功能从单一到多样,这便决定了这些超表面的性能指标要求和评价标准具有多样性和复杂性。对这些超表面的性能做出准确的测量是一项重要的工作。Metasurfaces can confine and control electromagnetic waves at the subwavelength scale through specific unit structures and novel physical properties. At the same time, relying on its own advantages such as low loss, low profile, easy design and fabrication, etc., it has received extensive attention from the scientific and industrial circles. With the continuous development of metasurfaces, the design of unit structures has changed from simple to complex, and the functions that can be presented have changed from single to diverse, which determines the diversity and complexity of the performance index requirements and evaluation criteria of these metasurfaces. Making accurate measurements of the properties of these metasurfaces is an important task.

目前针对于超表面性能的分析,主要集中在对整个超表面即全模测试,这种测试方法可以精确、完整的得到超表面的全部性能,但是全模样品加工成本高,时间长。极化是电磁波重要属性,电磁波的极化调控被广泛应用于通信、探测等方面。通过查阅已发表的文献发现,超表面的极化转换特性的测试是通过远场发射接收方式进行的,对测试系统要求高,测试费用高。因此,对全尺寸超表面的性能测试并不是一种理想的选择,更多的时候需要一种加工和测试成本低、系统简单、效率高的测试方案。At present, the analysis of metasurface performance mainly focuses on the entire metasurface, that is, the full mold test. This test method can accurately and completely obtain all the properties of the metasurface, but the processing cost of the full mold sample is high and the time is long. Polarization is an important property of electromagnetic waves, and the polarization regulation of electromagnetic waves is widely used in communication, detection and other fields. By consulting the published literature, it is found that the test of the polarization conversion characteristics of the metasurface is carried out by the far-field transmission and reception method, which requires high test system and high test cost. Therefore, performance testing of full-scale metasurfaces is not an ideal choice, and more often, a testing solution with low processing and testing costs, simple system and high efficiency is required.

发明内容SUMMARY OF THE INVENTION

为了解决以上问题,本发明提出一种超表面测试装置、测试方法及PB相位测试方法,该测试装置可以较为快速且准确的得到超表面单元结构的极化转换性能。同时还可以通过对旋转角度不同的超表面单元结构的测量,获取其PB相位,以此来获取单元结构的几何相位调控能力。PB(Pancharatnam-Berry)相位是与电磁波的偏振或极化相关的几何相位,即基于亚波长单元结构的PB相位可以更灵活地调控电磁波。In order to solve the above problems, the present invention provides a metasurface test device, a test method and a PB phase test method, which can obtain the polarization conversion performance of the metasurface unit structure relatively quickly and accurately. At the same time, the PB phase can be obtained by measuring the metasurface unit structure with different rotation angles, so as to obtain the geometric phase control ability of the unit structure. The PB (Pancharatnam-Berry) phase is a geometric phase related to the polarization or polarization of the electromagnetic wave, that is, the PB phase based on the subwavelength unit structure can tune the electromagnetic wave more flexibly.

本发明解决其技术问题所采用的技术方案为:The technical scheme adopted by the present invention to solve its technical problems is:

一种超表面测试装置,测试装置包括:第一同轴波导转换器、第二同轴波导转换器、正交模耦合器、极化器、反射波导、矢量网络分析仪(VNA):两个同轴波导转换器的同轴端与矢量网络分析仪连接,波导端与正交模耦合器连接;正交模耦合器、极化器、反射波导依次相连;反射波导具有用于反射入射圆极化波的反射面。A metasurface testing device, the testing device includes: a first coaxial waveguide converter, a second coaxial waveguide converter, an orthogonal mode coupler, a polarizer, a reflective waveguide, and a vector network analyzer (VNA): two The coaxial end of the coaxial waveguide converter is connected with the vector network analyzer, and the waveguide end is connected with the orthogonal mode coupler; the orthogonal mode coupler, the polarizer and the reflection waveguide are connected in sequence; reflective surface of the chemical wave.

进一步地,测试装置包括能带动被测结构转动的电机。Further, the testing device includes a motor that can drive the structure to be tested to rotate.

进一步地,极化器为圆极化器、反射波导为反射方波导,使用方圆过渡波导用于两者的连接。Further, the polarizer is a circular polarizer, the reflective waveguide is a reflective square waveguide, and a square-circle transition waveguide is used for the connection between the two.

进一步地,第一同轴波导转换器、第二同轴波导转换器、正交模耦合器、极化器、反射波导间固定连接或可拆卸连接。Further, the first coaxial waveguide converter, the second coaxial waveguide converter, the orthogonal mode coupler, the polarizer, and the reflective waveguides are fixedly or detachably connected.

进一步地,被测结构可以为单个超表面单元结构或由N×M个超表面单元结构组成的阵列,N与M为正整数。Further, the measured structure can be a single metasurface unit structure or an array composed of N×M metasurface unit structures, where N and M are positive integers.

本发明还提出以下技术方案:The present invention also proposes the following technical solutions:

一种基于如上所述的超表面测试装置的测试方法,包括以下步骤:A test method based on the above-mentioned metasurface test device, comprising the following steps:

1)未装载被测结构时,测得归一化基准反射信号S21-1:第一同轴波导转换器(1)辐射线极化波,通过正交模耦合器(3)的公共端口进入极化器(4)被转换为圆极化波,圆极化波进入反射波导(6),经过反射波导(6)的反射面反射,被极化转换为正交的圆极化反射波,正交圆极化反射波又通过极化器(4)被转化为正交的线极化波,再由正交模耦合器(3)分离后,最终由第二同轴波导转换器(2)接收反射波,此时在矢量网络分析仪上显示获取的反射波信号,即所述归一化基准反射信号S21-1,并对该信号S21-1的振幅值进行直通校准,校准后该振幅值近似为1;1) When the measured structure is not loaded, the normalized reference reflection signal S21-1 is measured: the first coaxial waveguide converter (1) radiates the linearly polarized wave, which enters through the common port of the orthogonal mode coupler (3). The polarizer (4) is converted into a circularly polarized wave, the circularly polarized wave enters the reflective waveguide (6), is reflected by the reflective surface of the reflective waveguide (6), and is polarized and converted into an orthogonal circularly polarized reflected wave, The orthogonal circularly polarized reflected wave is converted into an orthogonal linearly polarized wave through the polarizer (4), and then separated by the orthogonal mode coupler (3), and finally transmitted by the second coaxial waveguide converter (2). ) to receive the reflected wave, at this time, the acquired reflected wave signal, that is, the normalized reference reflected signal S21-1, is displayed on the vector network analyzer, and the amplitude value of the signal S21-1 is directly calibrated. The amplitude value is approximately 1;

2)加载被测结构,测得反射信号S21-2:第一同轴波导转换器1辐射与前述相同极化方向的线极化波,通过正交模耦合器(3)进入极化器(4)被转换为圆极化波,圆极化波进入反射波导(6)被反射面和结构反射,被结构极化转换的部分圆极化入射波转化为旋向与入射波相同的圆极化反射波,未被结构极化转换的部分圆极化入射波转化为旋向与入射波相反的圆极化反射波;两种圆极化反射波通过极化器(4)被转化为正交的两个方向的线极化波,由正交模耦合器(3)分离并分别通过两个同轴波导转换器接收反射波,未受所述被测结构极化转换的反射波由第二同轴波导转换器(2)接收,并在矢量网络分析仪上显示相应的反射信号S21-2;被结构极化转换的反射波由第一同轴波导转换器(1)接收,即反射信号S11;2) Load the measured structure, and measure the reflected signal S21-2: the first coaxial waveguide converter 1 radiates a linearly polarized wave in the same polarization direction as the aforementioned, and enters the polarizer ( 4) Converted into circularly polarized waves, the circularly polarized waves enter the reflective waveguide (6) and are reflected by the reflective surface and the structure, and the partially circularly polarized incident waves converted by the structural polarization are converted into circular polarized waves with the same rotation as the incident waves. Part of the circularly polarized incident wave that is not converted by the structural polarization is converted into a circularly polarized reflected wave whose handedness is opposite to that of the incident wave; the two circularly polarized reflected waves are converted into positive polarized waves through the polarizer (4). The linearly polarized waves in the two directions are separated by the orthogonal mode coupler (3) and respectively receive the reflected waves through two coaxial waveguide converters. The two coaxial waveguide converters (2) receive and display the corresponding reflected signal S21-2 on the vector network analyzer; the reflected wave polarized by the structure is received by the first coaxial waveguide converter (1), that is, reflected signal S11;

3)将获取的S21-1的振幅平方减去加载被测结构时的S21-2的振幅平方,得到被测结构的圆极化转换效率为(S21-1)2-(S21-2)23) Subtract the obtained amplitude square of S21-1 from the amplitude square of S21-2 when the tested structure is loaded, and obtain the circular polarization conversion efficiency of the tested structure as (S21-1) 2 -(S21-2) 2 .

进一步地,第一同轴波导转换器辐射的线极化波可以为H极化、V极化或其他极化方向的线极化波。Further, the linearly polarized waves radiated by the first coaxial waveguide converter may be H-polarized, V-polarized or linearly polarized waves in other polarization directions.

本发明还提出又一技术方案:The present invention also proposes another technical solution:

一种基于如上所述的超表面测试装置的PB相位测试方法,包括:A PB phase testing method based on the above-mentioned metasurface testing device, comprising:

1)测得反射信号S11,具体包括:1) Measure the reflected signal S11, which specifically includes:

加载被测结构,第一同轴波导转换器辐射与前述相同极化方向的线极化波,通过正交模耦合器进入极化器被转换为圆极化波,圆极化波进入反射波导被反射面和结构反射,被结构极化转换的部分圆极化入射波转化为旋向与入射波相同的圆极化反射波,未被结构极化转换的部分圆极化入射波转化为旋向与入射波相反的圆极化反射波;两种圆极化反射波通过极化器被转化为正交的两个方向的线极化波,由正交模耦合器分离并分别通过两个同轴波导转换器接收反射波,被结构极化转换的部分反射波由第一同轴波导转换器接收,即反射信号S11;Loading the structure under test, the first coaxial waveguide converter radiates a linearly polarized wave in the same polarization direction as the aforementioned, enters the polarizer through the orthogonal mode coupler and is converted into a circularly polarized wave, and the circularly polarized wave enters the reflection waveguide Reflected by the reflective surface and the structure, the partially circularly polarized incident wave converted by the structural polarization is converted into a circularly polarized reflected wave with the same handedness as the incident wave, and the partially circularly polarized incident wave that is not converted by the structural polarization is converted into a circularly polarized incident wave. The circularly polarized reflected wave is opposite to the incident wave; the two circularly polarized reflected waves are converted into two orthogonal linearly polarized waves by the polarizer, which are separated by the orthogonal mode coupler and pass through two The coaxial waveguide converter receives the reflected wave, and the partially reflected wave converted by the structural polarization is received by the first coaxial waveguide converter, that is, the reflected signal S11;

2)转动被测结构,旋转角度为θ;自动采集不同角度θ所对应的S11的相位信息;2) Rotate the measured structure, the rotation angle is θ; automatically collect the phase information of S11 corresponding to different angles θ;

3)选取所测频段范围任意频点,绘制θ与相位信息坐标图。3) Select any frequency point in the measured frequency range, and draw a coordinate diagram of θ and phase information.

其中,本发明所述的测试装置,可根据被测结构大小和工作频率范围定制波导结构尺寸。Among them, the testing device of the present invention can customize the size of the waveguide structure according to the size of the tested structure and the operating frequency range.

本发明与现有技术相比,有益效果为:使用本测试装置对超表面单元结构进行测试,不需要远场测试设备,结构紧凑,可有效降低全尺寸超表面极化特性测试过程所需要加工和测试成本,提升测试工作效率。Compared with the prior art, the present invention has the following beneficial effects: using the testing device to test the metasurface unit structure does not require far-field testing equipment, has a compact structure, and can effectively reduce the processing required for the full-scale metasurface polarization characteristic testing process. and test cost, improve test work efficiency.

附图说明Description of drawings

图1为本发明的结构示意图;Fig. 1 is the structural representation of the present invention;

图2为本发明实例中所用被测结构;Fig. 2 is the tested structure used in the example of the present invention;

图3为本发明实例中被测结构极化转换测试与理论对比图;Fig. 3 is the polarization conversion test and theoretical comparison diagram of the structure under test in the example of the present invention;

图4为本发明实例中被测结构PB相位测试与理论对比图。FIG. 4 is a comparison diagram of the PB phase test and theoretical comparison of the structure under test in the example of the present invention.

附图标记:Reference number:

1-第一同轴波导转换器、2-第二同轴波导转换器、3-正交模耦合器、4-极化器、5-方圆过渡波导、6-反射波导、7-被测结构。1-First coaxial waveguide converter, 2-Second coaxial waveguide converter, 3-Orthogonal mode coupler, 4-Polarizer, 5-Square transition waveguide, 6-Reflection waveguide, 7-Measured structure .

具体实施方式Detailed ways

下面结合附图及具体实施方式对本发明进行详细说明,但本发明的保护范围并不仅限于下面实施例,应包括权利要求书中的全部内容。The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but the protection scope of the present invention is not limited to the following examples, and should include all the contents in the claims.

如图1所示,一种超表面测试装置,包括:第一同轴波导转换器1、第二同轴波导转换器2、正交模耦合器3、极化器4、反射波导6、矢量网络分析仪(VNA);两个同轴波导转换器1、2用于发射和接收正交线极化波,两个同轴波导转换器的同轴端与矢量网络分析仪连接,用于向矢量网络分析仪传递信号,波导端与正交模耦合器3连接;正交模耦合器3能分离或合成正交线极化波;正交模耦合器3、极化器4、反射方波导6依次相连。第一同轴波导转换器1、第二同轴波导转换器2、正交模耦合器3、极化器4、反射波导6间可固定连接也可采用可拆卸连接,其连接方式并不影响功能的实现,本实施例中依次通过螺钉相互连接。极化器4可实现入射的线极化转化为圆极化波,也能把反射回来的圆极化波转化为线极化波。反射波导6具有用于反射入射圆极化波的反射面。本实施例中,为便于说明,系统采用水平方向布置,实际运用中,系统的摆放位置可以设置为垂直或其他向。本领域技术人员可根据被测结构大小和工作频率范围定制波导结构尺寸。As shown in Figure 1, a metasurface testing device includes: a first coaxial waveguide converter 1, a second coaxial waveguide converter 2, an orthogonal mode coupler 3, a polarizer 4, a reflection waveguide 6, a vector Network analyzer (VNA); two coaxial waveguide converters 1 and 2 are used to transmit and receive orthogonal linearly polarized waves, and the coaxial ends of the two coaxial waveguide converters are connected to the vector network analyzer for transmitting and receiving orthogonal linearly polarized waves. The vector network analyzer transmits signals, and the waveguide end is connected to the orthogonal mode coupler 3; the orthogonal mode coupler 3 can separate or synthesize orthogonal linearly polarized waves; the orthogonal mode coupler 3, the polarizer 4, the reflective square waveguide 6 are connected in turn. The first coaxial waveguide converter 1, the second coaxial waveguide converter 2, the orthogonal mode coupler 3, the polarizer 4, and the reflective waveguide 6 can be fixedly connected or detachably connected, and the connection method does not affect the To realize the function, in this embodiment, the screws are connected to each other in sequence. The polarizer 4 can realize the conversion of incident linear polarization into circularly polarized waves, and can also convert the reflected circularly polarized waves into linearly polarized waves. The reflection waveguide 6 has a reflection surface for reflecting the incident circularly polarized wave. In this embodiment, for the convenience of description, the system is arranged in a horizontal direction. In actual application, the placement position of the system may be set to be vertical or in other directions. Those skilled in the art can customize the size of the waveguide structure according to the size of the structure under test and the operating frequency range.

本实施例中,第一同轴波导转换器1和第二同轴波导转换器2所选型号为HD-100WCAS、正交模耦合器3所选型号为HD-100CWOMT23.825T3、极化器4所选型号为HD-23.825CWPST1、反射波导6所选型号为HD-20X20WSST1,另外,由于所选的极化器4截面为圆形,反射波导6截面为方形,因此为了连接上述两个装置,这里选用了型号为HD-20X20RCA23.825T1的方圆过渡波导5,方圆过渡波导5的圆波导口与圆极化器4相连,方波导口与反射方波导6相连;如果上述两个装置截面形状相同,可以直接进行连接,无需另选其他装置;另外,这里仅对本实施例所选型号进行举例说明,本领域技术人员可根据实际条件进行同轴波导转换器、正交模耦合器、圆极化器、方圆过渡波导、反射方波导的选择。在测试时,被测结构可以是单个的超表面单元结构,如图2所示;也可以是由多个超表面单元结构组成的阵列,如N×N或N×M个图2所示的超表面单元结构所组成的阵列,N与M为正整数。测试时,可将如图2所示的超表面单元结构装配到图1中7的位置。被测结构为长方形贴片长为l,宽为w,本实施例中,其取值为l=18mm,w=5mm,材质为不锈钢,贴片厚度1mm。贴片距离反射面的距离为7.5mm。超表面单元结构材质也可为介质,本测量装置的测量原理与超表面单元结构的材质无关,可用于任意材质的超表面单元结构的圆极化转换效率的测试。为了测量超表面单元结构PB相位,本实施例中,使用电机带动固定在电机轴上的超表面单元结构进行旋转,电机可改变被测结构转角θ。实际使用中,只要被测结构或前述测试装置相互间能相对旋转即可实现对PB相位的测量,这里并不对产生相对旋转的具体结构进行限制。In this embodiment, the selected model of the first coaxial waveguide converter 1 and the second coaxial waveguide converter 2 is HD-100WCAS, the selected model of the orthogonal mode coupler 3 is HD-100CWOMT23.825T3, and the polarizer 4 The selected model is HD-23.825CWPST1, and the selected model of reflective waveguide 6 is HD-20X20WSST1. In addition, since the selected polarizer 4 has a circular cross-section and the reflective waveguide 6 has a square cross-section, in order to connect the above two devices, The square-circle transition waveguide 5 with model HD-20X20RCA23.825T1 is selected here. The circular waveguide port of the square-circle transition waveguide 5 is connected to the circular polarizer 4, and the square waveguide port is connected to the reflection square waveguide 6. If the above two devices have the same cross-sectional shape , it can be directly connected without selecting other devices; in addition, only the model selected in this embodiment is illustrated here, and those skilled in the art can perform coaxial waveguide converters, orthogonal mode couplers, circular polarization according to actual conditions. The selection of the device, the square-circle transition waveguide, and the reflective square waveguide. During testing, the tested structure can be a single metasurface unit structure, as shown in Figure 2; it can also be an array composed of multiple metasurface unit structures, such as N×N or N×M as shown in Figure 2 An array of metasurface unit structures, where N and M are positive integers. During testing, the metasurface unit structure shown in FIG. 2 can be assembled to the position of 7 in FIG. 1 . The measured structure is a rectangular patch with a length of l and a width of w. In this embodiment, the values are l=18mm, w=5mm, the material is stainless steel, and the thickness of the patch is 1mm. The distance between the patch and the reflective surface is 7.5mm. The material of the metasurface unit structure can also be a medium. The measurement principle of this measuring device has nothing to do with the material of the metasurface unit structure, and can be used to test the circular polarization conversion efficiency of the metasurface unit structure of any material. In order to measure the PB phase of the metasurface unit structure, in this embodiment, a motor is used to drive the metasurface unit structure fixed on the motor shaft to rotate, and the motor can change the rotation angle θ of the measured structure. In actual use, the measurement of the PB phase can be achieved as long as the structure under test or the aforementioned test device can rotate relative to each other, and the specific structure that generates the relative rotation is not limited here.

该测试装置的极化转换效率测试使用方法如下:包括以下步骤:The method of using the polarization conversion efficiency test of the test device is as follows: it includes the following steps:

1)取得基准信号:未装载超表面单元结构,测得归一化反射信号S21。这里的S21表示的是由第一同轴波导转换器1发出的,并由第二同轴波导转换器2接收的信号,同理,S11表示的是由第一同轴波导转换器1发出的,并由第一同轴波导转换器1接收的信号。为便于分辨,这里将此步的S21标识为S21-1。在第一同轴波导转换器1输出的电磁波频率段内,通过直通校准该反射信号S21的振幅值,表征第一同轴波导转换器1输入线极化波能量与输出线极化波能量之比。电磁波发射和接收过程如下:第一同轴波导转换器1辐射H极化波,通过正交模耦合器3的公共端口进入极化器4被转换为圆极化波,圆极化波通过方圆过渡波导5,进入反射波导6,此时,进入反射波导6的圆极化波被反射面反射,同时由于半波损失,入射波被反射波导6极化转换为正交的圆极化反射波,正交圆极化反射波又通过极化器4被转化为V极化,再由正交模耦合器3分离后,由第二同轴波导转换器2接收,在矢量网络分析仪上显示信号S21-1,再通过操作矢量网络分析仪对S21-1的振幅值进行直通校准,校准后该值近似为1,具体校准方法为本领域技术人员的常规使用手段,这里不做赘述。1) Obtain a reference signal: the metasurface unit structure is not loaded, and the normalized reflection signal S21 is measured. Here S21 represents the signal sent by the first coaxial waveguide converter 1 and received by the second coaxial waveguide converter 2. Similarly, S11 represents the signal sent by the first coaxial waveguide converter 1 , and the signal received by the first coaxial waveguide converter 1 . For ease of identification, S21 in this step is identified as S21-1 here. In the frequency band of the electromagnetic wave output by the first coaxial waveguide converter 1, the amplitude value of the reflected signal S21 is calibrated through the straight-through to represent the difference between the input linearly polarized wave energy and the output linearly polarized wave energy of the first coaxial waveguide converter 1 Compare. The electromagnetic wave transmitting and receiving process is as follows: the first coaxial waveguide converter 1 radiates the H-polarized wave, enters the polarizer 4 through the common port of the orthogonal mode coupler 3 and is converted into a circularly polarized wave, and the circularly polarized wave passes through the square circle. The transition waveguide 5 enters the reflective waveguide 6. At this time, the circularly polarized wave entering the reflective waveguide 6 is reflected by the reflective surface, and at the same time, due to the half-wave loss, the incident wave is polarized and converted into the orthogonal circularly polarized reflected wave by the reflective waveguide 6 , the orthogonal circularly polarized reflected wave is converted into V polarization by polarizer 4, and then separated by orthogonal mode coupler 3, received by the second coaxial waveguide converter 2, and displayed on the vector network analyzer Signal S21-1, and then perform a straight-through calibration on the amplitude value of S21-1 by operating a vector network analyzer, and the value is approximately 1 after calibration.

2)加载被测结构,被测结构被加载在反射面之前,测得反射信号S21-2。电磁波发射和接收过程如下:第一同轴波导转换器1辐射与步骤1)相同的极化波,本实施例中为H极化波,通过正交模耦合器3进入极化器被转换为圆极化波,圆极化波通过方圆过渡波导5,进入反射波导6被反射面反射,由于半波损失和被测结样品共同作用,由被测结构极化转换的圆极化入射波转化为旋向与入射波相同的圆极化反射波,未被测结构极化转换的圆极化入射波转化为旋向与入射波相反的圆极化反射波;两种圆极化反射波通过极化器4被转化为正交的两个方向的线极化波,由正交模耦合器3分离并分别通过两个同轴波导转换器接收,未被被测结构极化转换的部分由第二同轴波导转换器(2)接收,并在矢量网络分析仪上显示信号S21-2,被测结构极化转换的部分由第一同轴波导转换器(1)接收,即反射信号S11;2) Load the structure under test, before the structure under test is loaded on the reflective surface, the reflected signal S21-2 is measured. The electromagnetic wave transmitting and receiving process is as follows: the first coaxial waveguide converter 1 radiates the same polarized wave as step 1), which is H-polarized wave in this embodiment, and enters the polarizer through the orthogonal mode coupler 3 and is converted into Circularly polarized wave, the circularly polarized wave passes through the square-circle transition waveguide 5, enters the reflective waveguide 6 and is reflected by the reflective surface. Due to the joint action of the half-wave loss and the measured junction sample, the circularly polarized incident wave converted by the polarization conversion of the measured structure is converted It is a circularly polarized reflected wave with the same handedness as the incident wave. The circularly polarized incident wave that is not polarized by the measured structure is converted into a circularly polarized reflected wave with the opposite handedness to the incident wave; the two circularly polarized reflected waves pass through The polarizer 4 is converted into two orthogonal linearly polarized waves, which are separated by the orthogonal mode coupler 3 and received through two coaxial waveguide converters respectively. The second coaxial waveguide converter (2) receives and displays the signal S21-2 on the vector network analyzer, and the polarization-converted part of the structure under test is received by the first coaxial waveguide converter (1), that is, the reflected signal S11 ;

3)步骤1)获取的S21-1振幅平方减去加载被测结构时的S21-2的振幅平方,即为被测结构(此时为附图2所示的单个超表面单元结构)的圆极化转换效率(S21-1)2-(S21-2)2。需要注意,这里第一同轴波导转换器1辐射H极化波,是为了便于说明,除此之外,也可选择V极化波或其他方向极化波。3) The square of the amplitude of S21-1 obtained in step 1) minus the square of the amplitude of S21-2 when the tested structure is loaded, which is the circle of the tested structure (in this case, the single metasurface unit structure shown in Figure 2). Polarization conversion efficiency (S21-1) 2 -(S21-2) 2 . It should be noted that the first coaxial waveguide converter 1 here radiates H-polarized waves for the convenience of description, and in addition, V-polarized waves or polarized waves in other directions can also be selected.

圆极化转换效率测试结果如图3所示,本实施例中,通过数值模拟证实,该测试装置进行的极化转换效率测试结果(如虚线所示)与CST理论仿真结果(如实线所示)是吻合的。需要注意,在使用CST理论仿真来验证测试装置性能时,CST理论仿真的参数设置需要与实际测试装置相一致;如本实施例中被测结构与电机轴连接,电机轴直径为3mm,反射波导6的反射面中心预留3.1mm直径小孔,便于电机轴进入反射波导6,调节电机轴位置,使被测结构距离反射波导6的反射面7.5mm,那么在做CST理论仿真时,也需要仿真相同的电机轴和被测结构距离反射波导6的反射面的距离,才能保证仿真结果与测试装置的可比性。在10-11GHz范围内,所选被测结构的最大的极化转换率为97.87%,且在f=10.588GHz附近,极化转换率接近100%。The test results of the circular polarization conversion efficiency are shown in Figure 3. In this embodiment, it is confirmed by numerical simulation that the test results of the polarization conversion efficiency (shown by the dotted line) and the CST theoretical simulation results (shown by the solid line) performed by the test device ) are consistent. It should be noted that when using CST theoretical simulation to verify the performance of the test device, the parameter settings of the CST theoretical simulation need to be consistent with the actual test device. A small hole with a diameter of 3.1mm is reserved in the center of the reflective surface of 6, so that the motor shaft can enter the reflective waveguide 6. Adjust the position of the motor shaft so that the measured structure is 7.5mm away from the reflective surface of the reflective waveguide 6. Then, when doing CST theoretical simulation, it is also necessary to Only by simulating the same motor shaft and the distance between the measured structure and the reflective surface of the reflective waveguide 6 can the comparability of the simulation results and the test device be ensured. In the range of 10-11 GHz, the maximum polarization conversion rate of the selected tested structure is 97.87%, and in the vicinity of f=10.588 GHz, the polarization conversion rate is close to 100%.

该测试装置同时可用于PB相位测试,用于确定所设计的超表面单元结构是否具有优良的几何相位调控能力,具体步骤包括:The test device can also be used for PB phase test to determine whether the designed metasurface unit structure has excellent geometric phase control capability. The specific steps include:

通过加载被测结构测得反射信号S11,转动被测结构,转速为v1,转过的角度为θ。因被测结构每旋转180°,其PB相位变化为2π,通常给定较慢的转速可以获得更精准的PB相位,但速度过低会影响数据测量的效率,因此其值可由本领域技术人员根据实际进行具体选择;通过自动采集不同角度θ,所对应的S11的相位信息;选取所测频段范围任意频点,绘制θ与相位信息坐标图。需要注意,这里第一同轴波导转换器1辐射H极化波,是为了便于说明,除此之外,也可选择V极化波或其他方向极化波。The reflected signal S11 is measured by loading the structure under test, and the structure under test is rotated, the rotational speed is v 1 , and the rotated angle is θ. Because the measured structure rotates 180°, its PB phase changes by 2π. Usually, a slower rotation speed can obtain a more accurate PB phase. However, if the speed is too low, the efficiency of data measurement will be affected, so its value can be determined by those skilled in the art. The specific selection is made according to the actual situation; the phase information of S11 corresponding to different angles θ is automatically collected; any frequency point in the measured frequency range is selected, and a coordinate diagram of θ and phase information is drawn. It should be noted that the first coaxial waveguide converter 1 here radiates H-polarized waves for the convenience of description, and in addition, V-polarized waves or polarized waves in other directions can also be selected.

本测试装置用于测试PB相位的结果如图4所示,提取频率f=10.588GHz处的不同角度θ所对应的S11的相位变化关系,该波导装置测试的PB相位与理论是一致的,即本测试装置具有优良的PB相位测试准确度。The results of the test device used to test the PB phase are shown in Figure 4. The phase change relationship of S11 corresponding to different angles θ at the frequency f=10.588GHz is extracted. The PB phase tested by the waveguide device is consistent with the theory, that is, The test device has excellent PB phase test accuracy.

综上所述,本发明提出了一种用于极化转换超表面单元结构的交叉极化测试装置及测试方法,该测试方法可较为快速且准确的得到被测结构的极化转换性能和PB相位。To sum up, the present invention proposes a cross-polarization test device and a test method for a polarization conversion metasurface unit structure, and the test method can obtain the polarization conversion performance and PB of the tested structure relatively quickly and accurately. phase.

因此,上面结合附图对本发明的实施例进行了描述,但是本发明并不局限于上述的具体实施方式,上述的实施方式仅仅是示意性的,而不是限制性的。本领域的普通技术人员在本发明的启示下,在不脱离本发明宗旨和权利要求所保护的范围情况下,还可做出很多形式,这些均属于本发明的保护之内。本发明未详细阐述部分属于本领域技术人员的公知技术。Therefore, the embodiments of the present invention are described above with reference to the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation manners, which are merely illustrative rather than restrictive. Under the inspiration of the present invention, those of ordinary skill in the art can also make many forms without departing from the spirit of the present invention and the scope protected by the claims, which all belong to the protection of the present invention. Parts not described in detail in the present invention belong to the well-known technologies of those skilled in the art.

Claims (9)

1.一种超表面测试装置,所述测试装置包括:第一同轴波导转换器(1)、第二同轴波导转换器(2)、正交模耦合器(3)、极化器(4)、反射波导(6)、矢量网络分析仪,其特征在于:1. A metasurface testing device comprising: a first coaxial waveguide converter (1), a second coaxial waveguide converter (2), an orthogonal mode coupler (3), a polarizer ( 4), reflection waveguide (6), vector network analyzer, it is characterized in that: 所述第一和第二同轴波导转换器的同轴端与所述矢量网络分析仪连接,波导端与所述正交模耦合器(3)连接;所述正交模耦合器(3)、极化器(4)、反射波导(6)依次相连;所述反射波导(6)具有用于对入射的圆极化波进行反射的反射面。The coaxial ends of the first and second coaxial waveguide converters are connected to the vector network analyzer, and the waveguide ends are connected to the orthogonal mode coupler (3); the orthogonal mode coupler (3) The polarizer (4) and the reflection waveguide (6) are connected in sequence; the reflection waveguide (6) has a reflection surface for reflecting the incident circularly polarized wave. 2.根据权利要求1所述的一种超表面测试装置,其特征在于:2. a kind of metasurface testing device according to claim 1, is characterized in that: 所述测试装置还包括能带动被测结构转动的电机。The testing device also includes a motor that can drive the structure to be tested to rotate. 3.根据权利要求2所述的一种超表面测试装置,其特征在于:3. a kind of metasurface testing device according to claim 2, is characterized in that: 所述被测结构与所述电机的电机轴采用机械连接方式连接。The structure under test is connected with the motor shaft of the motor in a mechanical connection manner. 4.根据权利要求1所述的一种超表面测试装置,其特征在于:4. a kind of metasurface testing device according to claim 1, is characterized in that: 所述极化器(4)为圆极化器、所述反射波导(6)为反射方波导,其中,使用方圆过渡波导(5)用于上述两者的连接。The polarizer (4) is a circular polarizer, and the reflective waveguide (6) is a reflective square waveguide, wherein a square-circular transition waveguide (5) is used for the connection between the two. 5.根据权利要求1所述的一种超表面测试装置,其特征在于:5. a kind of metasurface testing device according to claim 1, is characterized in that: 所述第一同轴波导转换器(1)、第二同轴波导转换器(2)、正交模耦合器(3)、极化器(4)、反射波导(6)间固定连接或可拆卸连接。The first coaxial waveguide converter (1), the second coaxial waveguide converter (2), the orthogonal mode coupler (3), the polarizer (4), and the reflective waveguide (6) are fixedly connected or can be connected. Remove the connection. 6.根据权利要求1所述的一种超表面测试装置,其特征在于:6. a kind of metasurface testing device according to claim 1, is characterized in that: 所述被测结构可以为单个超表面单元结构或由N×M个超表面单元结构组成的阵列,N与M为正整数。The measured structure can be a single metasurface unit structure or an array composed of N×M metasurface unit structures, where N and M are positive integers. 7.一种基于权利要求1-6中任一项所述的超表面测试装置的测试方法,其特征在于,所述测试方法包括以下步骤:7. A test method based on the metasurface testing device described in any one of claims 1-6, wherein the test method comprises the following steps: 步骤1):未装载被测结构时,测得归一化基准反射信号S21-1,具体包括:Step 1): when the structure to be tested is not loaded, the normalized reference reflection signal S21-1 is measured, which specifically includes: 第一同轴波导转换器(1)辐射线极化波,线极化波通过正交模耦合器(3)的公共端口进入极化器(4)被转换为圆极化波,圆极化波进入反射波导(6),经过反射波导(6)的反射面反射,被极化转换为正交的圆极化反射波,正交的圆极化反射波又通过极化器(4)被转化为正交的线极化波,该正交的线极化波再由正交模耦合器(3)分离后,最终由第二同轴波导转换器(2)接收反射波,此时在矢量网络分析仪上显示获取的反射波信号,即所述归一化基准反射信号S21-1,并对该信号S21-1的振幅值进行直通校准;The first coaxial waveguide converter (1) radiates linearly polarized waves, and the linearly polarized waves enter the polarizer (4) through the common port of the orthogonal mode coupler (3) and are converted into circularly polarized waves, which are circularly polarized The wave enters the reflective waveguide (6), is reflected by the reflective surface of the reflective waveguide (6), and is polarized and converted into an orthogonal circularly polarized reflected wave, and the orthogonal circularly polarized reflected wave is passed through the polarizer (4). It is converted into an orthogonal linearly polarized wave, the orthogonal linearly polarized wave is separated by the orthogonal mode coupler (3), and finally the reflected wave is received by the second coaxial waveguide converter (2). The acquired reflected wave signal, that is, the normalized reference reflected signal S21-1, is displayed on the vector network analyzer, and the amplitude value of the signal S21-1 is directly calibrated; 步骤2):加载被测结构,测得反射信号S21-2,具体包括:Step 2): load the structure to be tested, and measure the reflected signal S21-2, which specifically includes: 第一同轴波导转换器(1)辐射与前述线极化波相同极化方向的线极化波,该线极化波通过正交模耦合器(3)进入极化器(4)被转换为圆极化波,圆极化波进入反射波导(6)被反射面和被测结构反射,反射的圆极化波通过极化器(4)被转化为正交的两个方向的线极化波,该正交的两个方向的线极化波由正交模耦合器(3)分离并分别通过第一和第二同轴波导转换器接收反射波,未受所述被测结构极化转换的部分反射波由第二同轴波导转换器(2)接收,并在矢量网络分析仪上显示相应的反射信号S21-2;The first coaxial waveguide converter (1) radiates a linearly polarized wave in the same polarization direction as the aforementioned linearly polarized wave, and the linearly polarized wave enters the polarizer (4) through the orthogonal mode coupler (3) and is converted It is a circularly polarized wave. The circularly polarized wave enters the reflective waveguide (6) and is reflected by the reflective surface and the measured structure. The reflected circularly polarized wave is converted into two orthogonal linear poles through the polarizer (4). The linearly polarized waves in the orthogonal two directions are separated by the orthogonal mode coupler (3) and respectively receive the reflected waves through the first and second coaxial waveguide converters, which are not affected by the measured structure. The converted partial reflected wave is received by the second coaxial waveguide converter (2), and the corresponding reflected signal S21-2 is displayed on the vector network analyzer; 步骤3):将获取的信号S21-1的振幅平方减去加载被测结构时获取的信号S21-2的振幅平方,得到被测结构的圆极化转换效率。Step 3): subtract the amplitude square of the signal S21-2 obtained when the structure under test is loaded from the square of the amplitude of the obtained signal S21-1 to obtain the circular polarization conversion efficiency of the structure under test. 8.根据权利要求7所述的测试方法,其特征在于:8. testing method according to claim 7, is characterized in that: 所述第一同轴波导转换器(1)辐射的线极化波可以为H极化、V极化或其他极化方向的线极化波。The linearly polarized waves radiated by the first coaxial waveguide converter (1) may be H-polarized, V-polarized or linearly polarized waves in other polarization directions. 9.一种基于权利要求1-6中任一项所述的超表面测试装置的PB相位测试方法,其特征在于,该PB相位测试方法包括:9. a PB phase testing method based on the metasurface testing device described in any one of claims 1-6, is characterized in that, this PB phase testing method comprises: 1)测得反射信号S11,具体包括:1) Measure the reflected signal S11, which specifically includes: 加载被测结构,第一同轴波导转换器(1)辐射线极化波,该线极化波通过正交模耦合器(3)进入极化器(4)被转换为圆极化波,圆极化波进入反射波导(6)被反射面和被测结构反射,反射的圆极化波通过极化器(4)被转化为正交的两个方向的线极化波,该正交的两个方向的线极化波由正交模耦合器(3)分离并分别通过第一和第二同轴波导转换器接收反射波,被被测结构极化转换的反射波由第一同轴波导转换器(1)接收,即得到相应的反射信号S11;Loading the structure under test, the first coaxial waveguide converter (1) radiates a linearly polarized wave, and the linearly polarized wave enters the polarizer (4) through the orthogonal mode coupler (3) and is converted into a circularly polarized wave, The circularly polarized wave enters the reflective waveguide (6) and is reflected by the reflective surface and the measured structure, and the reflected circularly polarized wave is converted into two orthogonal linearly polarized waves through the polarizer (4). The linearly polarized waves in the two directions are separated by the orthogonal mode coupler (3) and the reflected waves are respectively received by the first and second coaxial waveguide converters. The shaft waveguide converter (1) receives, that is, the corresponding reflected signal S11 is obtained; 2)转动被测结构,旋转角度为θ;自动采集不同角度θ所对应的反射信号S11的相位信息;2) Rotate the measured structure, the rotation angle is θ; automatically collect the phase information of the reflected signal S11 corresponding to different angles θ; 3)选取所测频段范围任意频点,绘制θ与相位信息坐标图。3) Select any frequency point in the measured frequency range, and draw a coordinate diagram of θ and phase information.
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