CN114361006B - Vacuum sealed ion source and mass spectrometer - Google Patents
Vacuum sealed ion source and mass spectrometer Download PDFInfo
- Publication number
- CN114361006B CN114361006B CN202210027179.4A CN202210027179A CN114361006B CN 114361006 B CN114361006 B CN 114361006B CN 202210027179 A CN202210027179 A CN 202210027179A CN 114361006 B CN114361006 B CN 114361006B
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- sealing block
- ion source
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- 238000007789 sealing Methods 0.000 claims abstract description 60
- 230000000149 penetrating effect Effects 0.000 claims abstract description 4
- 150000002500 ions Chemical class 0.000 claims description 60
- 230000009471 action Effects 0.000 claims description 7
- 238000012423 maintenance Methods 0.000 abstract description 7
- 238000010030 laminating Methods 0.000 abstract 1
- 230000005684 electric field Effects 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The invention discloses a vacuum sealed ion source and a mass spectrometer, which comprises an ultraviolet lamp, a fixed seat and an ion electrode; one end of the ion electrode is provided with a light hole, and the ultraviolet lamp is arranged on the outer wall of the fixed seat; the inner wall of the ion electrode is provided with a rubber tube coaxially arranged with the light hole, and one end of the rubber tube is surrounded with the light hole for sealing and fixing; the fixed seat is also provided with an adjusting hole penetrating through the inner wall of the ion electrode, an operating rod is arranged in the adjusting hole, and one end of the operating rod extends into the ionization chamber and is provided with a sealing block; the rubber tube is equipped with the supporting seat in the one side of keeping away from the sealing block, and the surface laminating setting of one side of sealing block is kept away from with the rubber tube to the supporting seat. According to the invention, when the ultraviolet lamp is required to be disassembled and assembled, the operating rod drives the sealing element to press the rubber tube, so that the rubber tube is closed, the light holes are isolated from the ionization chamber, the vacuum is not required to be destroyed, the disassembly and assembly work of the ultraviolet lamp is completed, the waiting time for stopping and starting the vacuum is saved, and the maintenance efficiency of the instrument is improved.
Description
[ Field of technology ]
The invention relates to the technical field of mass spectrometers, in particular to a vacuum sealing ion source and a mass spectrometer.
[ Background Art ]
The vacuum ultraviolet lamp has the outstanding advantages of long service life, simple ionization structure, high sensitivity, less ion fragments and the like, can effectively improve the detection precision of the mass spectrometer on a sample, and is widely used as an ionization source of a common mass spectrometer. However, while the ultraviolet lamp is widely used as an ion source of a mass spectrometer instrument, the vacuum of the instrument is destroyed in the daily test and maintenance process when the ultraviolet lamp is disassembled and assembled; after the ultraviolet lamp is installed, vacuum is restarted, time and labor are consumed, and a plurality of inconveniences exist, so that the instrument maintenance efficiency is lower.
In view of the foregoing, it is desirable to provide a vacuum sealed ion source and mass spectrometer that overcomes the above-described drawbacks.
[ Invention ]
The invention aims to provide a vacuum sealing ion source and a mass spectrometer, which aim to solve the problems of time and labor waste caused by vacuum stopping and starting of a traditional ion source in disassembly and assembly of an ultraviolet lamp and improve the maintenance efficiency of the instrument.
In order to achieve the above purpose, the invention provides a vacuum sealed ion source, which comprises an ultraviolet lamp, a hollow fixing seat and an ion electrode arranged in the fixing seat, wherein an ionization chamber is formed by surrounding the inner wall of the ion electrode; a light hole is formed in one end of the ion electrode, and the ultraviolet lamp is arranged on the outer wall of one end, close to the light hole, of the fixing seat; the inner wall of the ion electrode is provided with a rubber tube which is coaxially arranged with the light hole at one end close to the light hole, and the light hole is sealed and fixed at one end of the rubber tube; the fixed seat is also provided with an adjusting hole penetrating through the inner wall of the ion electrode, an operating rod is arranged in the adjusting hole, and one end of the operating rod extends into the ionization chamber and is provided with a sealing block; the rubber tube is provided with a supporting seat at one side far away from the sealing block, and the supporting seat is attached to the surface of the rubber tube at one side far away from the sealing block; the operation rod is used for driving the sealing block to be pressed in the direction close to the supporting seat, so that the rubber tube is closed under the joint pressing action of the sealing block and the supporting seat, and the light hole is isolated from the ionization chamber.
In a preferred embodiment, the ultraviolet lamp is fixed on the fixed seat through a fixed disc; the ultraviolet lamp is sealed with the fixed disc and the fixed disc is sealed with the fixed seat through rubber rings.
In a preferred embodiment, the ion electrode comprises a focusing electrode, and a repulsion electrode and a hole electrode which are respectively arranged at two sides of the focusing electrode; a cylindrical accommodating groove is formed in one side, away from the light hole, of the repulsive electrode, and the rubber tube is coaxially arranged in the accommodating groove; the light hole is a round hole and is coaxially arranged at the center of the bottom of the accommodating groove.
In a preferred embodiment, a fixing flange extending vertically towards the blind end is arranged at one end, close to the light hole, of the rubber tube, and the fixing flange is connected with the bottom of the accommodating groove in a sealing mode.
In a preferred embodiment, the supporting seat is fixed on the side wall of the accommodating groove, one end far away from the repulsion electrode is provided with an arc groove, and the surface of the arc groove is attached to the arc surface of the rubber tube; the sealing block is cylindrical, and the central axis is parallel to the central axis of the rubber tube; the operating rod is fixedly connected with the cambered surface preset position of the sealing block.
In a preferred embodiment, the repulsive electrode is provided with a fixing groove coaxially arranged with the adjusting hole at one side far away from the accommodating groove, and the fixing groove is cylindrical and has a radius larger than that of the adjusting hole; a sealing ring is fixed in the fixing groove, and the sealing ring is sleeved on the operating rod.
In a preferred embodiment, an arc-shaped insulating pad is arranged on one side surface of the sealing block, which is close to the adjusting hole; the arc-shaped insulating pad is used for insulating the sealing block from the inner wall of the repulsive electrode.
In a preferred embodiment, the focusing electrode is cylindrical and a plurality of focusing electrodes, and the hole electrode is a cylindrical hole electrode; adjacent focusing electrodes, repulsive electrodes and focusing electrodes, and focusing electrodes and hole electrodes are insulated by insulating pads.
In a preferred embodiment, an insulating layer is provided between the ion electrode and the holder.
The invention also provides a mass spectrometer comprising a mass spectrometer cavity and a vacuum sealed ion source as described in any of the above embodiments; the fixed seat is connected with the cavity of the mass spectrometer through a flange plate, and an insulating sheet is arranged between the hole electrode and the flange plate; sample ions sequentially pass through the ionization chamber and the hole electrode and then enter the cavity of the mass spectrometer.
According to the vacuum sealing ion source provided by the invention, the operating rod is arranged in the adjusting hole, and the rubber tube is arranged in the ionization chamber, so that when the ultraviolet lamp is required to be dismounted, the operating rod drives the sealing block to press the rubber tube, and the rubber tube is closed under the joint pressing action of the sealing block and the supporting seat, so that the light hole is isolated from the ionization chamber, the dismounting work of the ultraviolet lamp can be rapidly completed under the condition that the vacuum condition of the mass spectrometer is not required to be damaged, the waiting time for vacuum breaking and restarting is saved, and the instrument maintenance efficiency is greatly improved.
[ Description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a cross-sectional view of a vacuum sealed ion source provided by the present invention;
FIG. 2 is a schematic perspective view of a seal arrangement in the vacuum sealed ion source of FIG. 1;
fig. 3 is an isometric view of a seal configuration in the vacuum-sealed ion source of fig. 2.
Fig. 4 is a cross-sectional view of a mass spectrometer provided by the present invention.
Reference numerals in the drawings: 100. vacuum sealing an ion source; 200. a mass spectrometer; 201. a mass spectrometer cavity; 202. a flange plate; 203. a third nut; 10. an ultraviolet lamp; 11. a fixed plate; 12. a first nut; 20. a fixing seat; 21. an insulating layer; 22. an adjustment aperture; 30. an ion electrode; 31. a focusing electrode; 32. a repulsive electrode; 321. a receiving groove; 322. a fixing groove; 323. a seal ring; 33. a hole electrode; 34. an ionization chamber; 35. an insulating pad; 36. a sample injection pipeline; 37. a light hole; 38. a voltage dividing resistor; 40. a rubber tube; 41. fixing and flanging; 42. a second nut; 43. a support base; 431. an arc-shaped groove; 50. an operation lever; 60. and a sealing block.
[ Detailed description ] of the invention
In order to make the objects, technical solutions and advantageous technical effects of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and detailed description. It should be understood that the detailed description is intended to illustrate the invention, and not to limit the invention.
It is also to be understood that the terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
It should be further understood that the term "and/or" as used in the present specification and the appended claims refers to any and all possible combinations of one or more of the associated listed items, and includes such combinations.
In an embodiment of the present invention, a vacuum sealed ion source 100 is provided for rapidly completing replacement of an ultraviolet lamp 10 under a vacuum condition without breaking an instrument, thereby improving maintenance efficiency of the instrument.
As shown in fig. 1 to 3, the vacuum sealed ion source 100 includes an ultraviolet lamp 10, a hollow holder 20, and an ion electrode 30 disposed in the holder 20. In this embodiment, the fixing base 20 and the ion electrode 30 are both cylindrical. An insulating layer 21 is arranged between the ion electrode 30 and the fixing base 20. Therefore, the fixing base 20 plays a supporting role on the internal ion electrode 30, and the interference on the loading electric field of the ion electrode 30 is avoided through the insulating layer 21.
The ultraviolet lamp 10 is fixed on one end face of the fixed seat 20 through a circular fixed disk 11. The fixed disk 11 is locked with the fixed seat 20 through the first nut 12, so that the fixed disk 11 is convenient to detach. Further, the space between the ultraviolet lamp 10 and the fixed disc 11 and the space between the fixed disc 11 and the fixed seat 20 are sealed by rubber rings (not shown in the figure), so as to ensure the sealing performance.
In the embodiment of the invention, the ion electrode 30 includes a focusing electrode 31, and a repulsive electrode 32 and a porous electrode 33 respectively disposed on two sides of the focusing electrode 31. The focusing electrode 31 is in a cylindrical ring shape and has a plurality of focusing electrodes. Each focusing electrode 31 is a cylindrical electrode with a through hole in the center, and is made of stainless steel, and the size of the through hole can be designed according to practical requirements. The hole electrode 33 is a cylindrical electrode with a through hole or a funnel in the center, and is made of stainless steel, and the size of the through hole can be designed according to practical requirements. The inner wall of the ion electrode 30 encloses an ionization chamber 34, i.e. an inner cylindrical region of the repeller electrode 32, the focusing electrode 31 and the aperture electrode 33 constitutes the ion source ionization chamber 34.
In the present embodiment, the ionization chamber 34 has a cylindrical shape, and the number of the focusing electrodes 31 is three. Further, adjacent focusing electrodes 31, repulsive electrodes 32 and focusing electrodes 31, and focusing electrodes 31 and hole electrodes 33 are insulated by polytetrafluoroethylene insulating pads 35.
Specifically, each of the ion electrodes 30 is provided with a wiring pin (not shown), the electrode is pressurized by the wiring pin, voltages V0 and V1 are respectively applied to the repulsive electrode 32 and the hole electrode 33, and the adjacent electrodes are divided by a voltage dividing resistor 38 of 1mΩ, so that a uniform axial electric field is formed in the ionization chamber 34. A sample feeding pipe 36 is drilled in the sidewall of the repulsive electrode 32, and a capillary tube (not shown) is provided on the sample feeding pipe 36. The sample to be measured can enter the ionization chamber 34 through the capillary tube, and is ionized in the ionization chamber 34, so that ions are led out under the action of the axial electric field. That is, in normal use, the gas to be measured is injected from the repulsion electrode 32 through the quartz capillary, ionized by the ultraviolet lamp 10 in the ionization source cavity, led out from the hole electrode 33 into the mass spectrometer cavity 200 under the action of the axial electric field, and finally detected by the detector.
In the embodiment of the invention, a light hole 37 is formed at one end of the ion electrode 30, and the ultraviolet lamp 10 is mounted on the outer wall of one end of the fixing base 20, which is close to the light hole 37. The light hole 37 is a circular hole, and is formed on the repulsive electrode 32 for transmitting ultraviolet light emitted by the ultraviolet lamp 10. Specifically, a cylindrical receiving groove 321 is formed in a side of the repulsive electrode 32 away from the light hole 37. The light hole 37 is coaxially arranged at the center of the bottom of the accommodating groove 321.
The inner wall of the ion electrode 30 is provided with a rubber tube 40 coaxially disposed with the light-transmitting hole 37 at one end near the light-transmitting hole 37. In the present embodiment, the rubber tube 40 is a fluorine rubber tube. One end of the rubber tube 40 is surrounded by a light hole 37 for sealing and fixing. In this embodiment, the rubber tube 40 is coaxially disposed in the receiving groove 321. Specifically, a fixing flange 41 extending vertically towards the blind end is arranged at one end of the rubber tube 40 near the light hole 37, and the fixing flange 41 is in sealing connection with the bottom of the accommodating groove 321 through four second nuts 42 arranged at equal intervals.
The holder 20 is also provided with a regulating hole 22 penetrating the inner wall of the ion electrode 30. That is, the adjustment hole 22 penetrates both the arc-shaped side wall of the fixing base 20 and the side wall of the repulsive electrode 32. An operating lever 50 is provided in the adjustment hole 22. Further, in one embodiment, the adjusting hole 22 is threaded on a portion of the fixing base 20 to match the outer diameter of the operating rod 50, and the surface of the corresponding operating rod 50 is also threaded. Thus, the up-and-down adjustment of the lever 50 can be achieved by the interaction of the threads, wherein the adjustment of the tightness of the lever 50 can be performed manually, or automatically by a motor (not shown).
Further, the repulsive electrode 32 has a fixing groove 322 provided coaxially with the adjustment hole 22 on a side away from the receiving groove 321. The fixing groove 322 has a cylindrical shape and a radius larger than that of the adjustment hole 22. A sealing ring 323 is fixed in the fixing groove 322, and the sealing ring 323 is pressed in the fixing groove 322 through an insulating peek (polyether ether ketone) nut (not shown in the figure). Meanwhile, the sealing ring 323 is sleeved on the operating rod 50, so that when the operating rod 50 is adjusted up and down, a gap between the operating rod 50 and the inner wall of the adjusting hole 22 can be sealed.
One end of the lever 50 extends into the ionization chamber 34 and is provided with a sealing block 60. The sealing block 60 has a cylindrical shape, and the central axis is parallel to the central axis of the rubber tube 40. The operation rod 50 is fixedly connected with the preset position of the cambered surface of the sealing block 60, in this embodiment, the diameter of the sealing block 60 is consistent with the pipe diameter of the rubber pipe 40, and the operation rod 50 is fixed at the midpoint of the sealing block 60 along the central axis direction. Further, a side surface of the sealing block 60 adjacent to the adjustment hole 22 is provided with an arc-shaped insulating pad (not shown). The arc-shaped insulating pad serves to insulate the sealing block 60 from the inner wall of the repeller electrode 32. It can be understood that when the operation lever 50 is adjusted up and down, the sealing block 60 disposed in the accommodating groove 321 may touch the inner wall of the repulsive electrode 32, so as to cause interference, and therefore, the arc-shaped insulating pad can isolate the sealing block 60 from the inner wall of the repulsive electrode 32, so as to avoid the interference of the sealing block 60 to the repulsive electrode 32.
The rubber tube 40 is provided with a support seat 43 at a side remote from the sealing block 60. The support seat 43 is attached to the surface of the rubber tube 40 on the side away from the seal block 60. Specifically, the supporting seat 43 is fixed to a side wall of the accommodating groove 321, and an arc groove 431 is formed at an end far away from the repulsive electrode 32, and a surface of the arc groove 431 is attached to an arc surface of the rubber tube 40. Accordingly, the support seat 43 can provide support for the rubber tube 40.
When the ultraviolet lamp 10 needs to be disassembled and assembled, the operation rod 50 is used for driving the sealing block 60 to press along the direction close to the supporting seat 43, so that the rubber tube 40 is closed under the joint pressing action of the sealing block 60 and the supporting seat 43, and the light hole 37 is isolated from the vacuum of the ionization chamber 34, and the disassembly and assembly operation of the ultraviolet lamp 10 can be completed without stopping the vacuum. After the ultraviolet lamp 10 is installed, the sealing block 60 is pulled back to the initial position by the operating lever 50, and the rubber tube 40 is opened at this time, and the vacuum sealing ion source 100 can be operated normally.
As shown in fig. 4, the present invention also provides a mass spectrometer 200 comprising a mass spectrometer chamber 201 and a vacuum sealed ion source 100 as described in any of the above embodiments. The fixed seat 20 is connected with the mass spectrometer cavity 201 through the flange plate 202, and the fixed seat 20 and the flange plate 202 are locked through the third nut 203. An insulating sheet (not shown) is provided between the hole electrode 33 and the flange 202, thereby insulating the hole electrode 33 from the flange 202. Specifically, sample ions sequentially pass through the ionization chamber 34 and the aperture electrode 33 and then enter the mass spectrometer cavity 201, thereby completing detection.
In summary, according to the vacuum sealed ion source 100 and the mass spectrometer 200 provided by the invention, the operating rod 50 is arranged in the adjusting hole 22 and the rubber tube 40 is arranged in the ionization chamber 34, when the ultraviolet lamp 10 needs to be disassembled and assembled, the operating rod 50 drives the sealing block 60 to press the rubber tube 40, so that the rubber tube 40 is closed under the joint pressing action of the sealing block 60 and the supporting seat 43, and further the light hole 37 is isolated from the ionization chamber 34, the disassembly and assembly work of the ultraviolet lamp 10 can be rapidly completed under the condition that the vacuum condition of the mass spectrometer 200 is not damaged, the waiting time of vacuum breaking and restarting is saved, and the instrument maintenance efficiency is greatly improved.
In the foregoing embodiments, the descriptions of the embodiments are emphasized, and in part, not described or illustrated in any particular embodiment, reference is made to the related descriptions of other embodiments.
Those of ordinary skill in the art will appreciate that the elements and method steps of the examples described in connection with the embodiments disclosed herein can be implemented as electronic hardware, or as a combination of computer software and electronic hardware. Whether such functionality is implemented as hardware or software depends upon the particular application and design constraints imposed on the solution. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present invention.
In the embodiments provided in the present invention, it should be understood that the disclosed system or apparatus/terminal device and method may be implemented in other manners. For example, the system or apparatus/terminal device embodiments described above are merely illustrative, e.g., the division of the modules or units is merely a logical function division, and there may be additional divisions in actual implementation, e.g., multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection via interfaces, devices or units, which may be in electrical, mechanical or other forms.
The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in the embodiments of the present invention may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit. The integrated units may be implemented in hardware or in software functional units.
The present invention is not limited to the details and embodiments described herein, and thus additional advantages and modifications may readily be made by those skilled in the art, without departing from the spirit and scope of the general concepts defined in the claims and the equivalents thereof, and the invention is not limited to the specific details, representative apparatus and illustrative examples shown and described herein.
Claims (10)
1. The vacuum sealing ion source is characterized by comprising an ultraviolet lamp, a hollow fixing seat and an ion electrode arranged in the fixing seat, wherein an ionization chamber is formed by surrounding the inner wall of the ion electrode; a light hole is formed in one end of the ion electrode, and the ultraviolet lamp is arranged on the outer wall of one end, close to the light hole, of the fixing seat; the inner wall of the ion electrode is provided with a rubber tube which is coaxially arranged with the light hole at one end close to the light hole, and the light hole is sealed and fixed at one end of the rubber tube; the fixed seat is also provided with an adjusting hole penetrating through the inner wall of the ion electrode, an operating rod is arranged in the adjusting hole, and one end of the operating rod extends into the ionization chamber and is provided with a sealing block; the rubber tube is provided with a supporting seat at one side far away from the sealing block, and the supporting seat is attached to the surface of the rubber tube at one side far away from the sealing block; the operation rod is used for driving the sealing block to be pressed in the direction close to the supporting seat, so that the rubber tube is closed under the joint pressing action of the sealing block and the supporting seat, and the light hole is isolated from the ionization chamber.
2. The vacuum-tight ion source of claim 1, wherein the ultraviolet lamp is secured to the stationary base by a stationary plate; the ultraviolet lamp is sealed with the fixed disc and the fixed disc is sealed with the fixed seat through rubber rings.
3. The vacuum sealed ion source of claim 1, wherein said ion electrode comprises a focusing electrode and a repulsive electrode and a porous electrode disposed on either side of said focusing electrode, respectively; a cylindrical accommodating groove is formed in one side, away from the light hole, of the repulsive electrode, and the rubber tube is coaxially arranged in the accommodating groove; the light hole is a round hole and is coaxially arranged at the center of the bottom of the accommodating groove.
4. The vacuum sealed ion source of claim 3, wherein a fixing flange extending vertically towards the blind end is arranged at one end of the rubber tube close to the light hole, and the fixing flange is connected with the bottom of the containing groove in a sealing manner.
5. The vacuum seal ion source according to claim 3, wherein the support base is fixed on the side wall of the accommodating groove, an arc-shaped groove is formed at one end far away from the repulsive electrode, and the surface of the arc-shaped groove is attached to the arc surface of the rubber tube; the sealing block is cylindrical, and the central axis is parallel to the central axis of the rubber tube; the operating rod is fixedly connected with the cambered surface preset position of the sealing block.
6. The vacuum sealed ion source according to claim 3, wherein the repulsive electrode is provided with a fixing groove coaxially arranged with the adjusting hole on one side away from the accommodating groove, the fixing groove is cylindrical, and the radius of the fixing groove is larger than that of the adjusting hole; a sealing ring is fixed in the fixing groove, and the sealing ring is sleeved on the operating rod.
7. The vacuum sealed ion source according to claim 3, wherein an arc-shaped insulating pad is arranged on the surface of one side of the sealing block, which is close to the adjusting hole; the arc-shaped insulating pad is used for insulating the sealing block from the inner wall of the repulsive electrode.
8. The vacuum-tight ion source of claim 3, wherein said focusing electrode is cylindrical in shape and is a plurality of said aperture electrodes being cylindrical aperture electrodes; adjacent focusing electrodes, repulsive electrodes and focusing electrodes, and focusing electrodes and hole electrodes are insulated by insulating pads.
9. The vacuum sealed ion source of claim 1, wherein an insulating layer is provided between the ion electrode and the holder.
10. A mass spectrometer comprising a mass spectrometer cavity and a vacuum sealed ion source according to any of claims 3 to 8; the fixed seat is connected with the cavity of the mass spectrometer through a flange plate, and an insulating sheet is arranged between the hole electrode and the flange plate; sample ions sequentially pass through the ionization chamber and the hole electrode and then enter the cavity of the mass spectrometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210027179.4A CN114361006B (en) | 2022-01-11 | 2022-01-11 | Vacuum sealed ion source and mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210027179.4A CN114361006B (en) | 2022-01-11 | 2022-01-11 | Vacuum sealed ion source and mass spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114361006A CN114361006A (en) | 2022-04-15 |
| CN114361006B true CN114361006B (en) | 2024-05-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210027179.4A Active CN114361006B (en) | 2022-01-11 | 2022-01-11 | Vacuum sealed ion source and mass spectrometer |
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| Country | Link |
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| CN (1) | CN114361006B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2995658A (en) * | 1959-01-19 | 1961-08-08 | Ass Elect Ind | Mass spectrometers |
| JP2002025497A (en) * | 2000-07-07 | 2002-01-25 | Canon Inc | Vacuum analyzer, mass spectrometer and electron microscopic apparatus |
| KR20050108629A (en) * | 2004-05-12 | 2005-11-17 | (주)영린기기 | A gas chromatograph mass spectrometer ion source employing a cylindrical repeller |
| KR100748617B1 (en) * | 2006-10-13 | 2007-08-10 | 한국표준과학연구원 | Gas chromatograph-mass spectrometer having improved detection limit |
| CN102103972A (en) * | 2009-12-18 | 2011-06-22 | 中国科学院大连化学物理研究所 | Vacuum ultraviolet lamp ionization device |
| CN202948899U (en) * | 2012-12-05 | 2013-05-22 | 中国科学院大连化学物理研究所 | Electrostatic lens device based on vacuum ultra violet (VUV) lamp ionization source |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102221576B (en) * | 2010-04-15 | 2015-09-16 | 岛津分析技术研发（上海）有限公司 | The method and apparatus of a kind of generation, analysis ion |
| JP6593548B2 (en) * | 2016-10-24 | 2019-10-23 | 株式会社島津製作所 | Mass spectrometer and ion detector |
| GB2590351B (en) * | 2019-11-08 | 2024-01-03 | Thermo Fisher Scient Bremen Gmbh | Atmospheric pressure ion source interface |
-
2022
- 2022-01-11 CN CN202210027179.4A patent/CN114361006B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2995658A (en) * | 1959-01-19 | 1961-08-08 | Ass Elect Ind | Mass spectrometers |
| JP2002025497A (en) * | 2000-07-07 | 2002-01-25 | Canon Inc | Vacuum analyzer, mass spectrometer and electron microscopic apparatus |
| KR20050108629A (en) * | 2004-05-12 | 2005-11-17 | (주)영린기기 | A gas chromatograph mass spectrometer ion source employing a cylindrical repeller |
| KR100748617B1 (en) * | 2006-10-13 | 2007-08-10 | 한국표준과학연구원 | Gas chromatograph-mass spectrometer having improved detection limit |
| CN102103972A (en) * | 2009-12-18 | 2011-06-22 | 中国科学院大连化学物理研究所 | Vacuum ultraviolet lamp ionization device |
| CN202948899U (en) * | 2012-12-05 | 2013-05-22 | 中国科学院大连化学物理研究所 | Electrostatic lens device based on vacuum ultra violet (VUV) lamp ionization source |
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| Publication number | Publication date |
|---|---|
| CN114361006A (en) | 2022-04-15 |
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