CN114359192A - Chip template calibration method and device, electronic equipment and storage medium - Google Patents
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Abstract
The invention discloses a method and a device for calibrating a chip template, electronic equipment and a storage medium, wherein the method comprises the following steps: obtaining a chip image meeting the brightness requirement, and preprocessing the chip image, including gray processing, median filtering processing and image pyramid processing; extracting an interested area with a proper size from the preprocessed chip image to obtain an image gray matrix; performing convolution processing on the image gray matrix to obtain the edge intensity of each point in the image gray matrix; extracting a point with the maximum edge intensity, carrying out double-threshold processing on the point with the maximum edge intensity to obtain an edge point, and constructing a chip template based on the edge point; creating an external matrix of the chip template according to the edge points; and manually calibrating the external matrix and the chip image, and recording a compensation angle to obtain a calibration angle of the chip template.
Description
Technical Field
The present invention relates to the field of image processing technologies, and in particular, to a method and an apparatus for calibrating a chip template, an electronic device, and a storage medium.
Background
With the mature development of the electronic industry, great attention has been paid to various fields related to chip design, manufacture, packaging and the like. The chip mounting is carried out by visual recognition on the chip through a chip mounter, and the position and the attitude of the chip are detected, so that the position and attitude calibration precision of the chip has great influence on subsequent registration.
The traditional chinese patent CN201710685980.7 proposes a positioning algorithm for pins with chips based on template matching, which is to create template images at different angles, and match the template images with a chip corner coordinate set and an accurate corner coordinate set to obtain an accurate rotation angle of a chip entity relative to the template images and an accurate offset position coordinate of a chip entity center relative to the template images, thereby realizing the positioning of rectangular pin chips. However, the technical solution does not provide how to calibrate the chip template and how to calibrate the chip template, and the calibration of the chip template still cannot be achieved.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a chip template calibration method and device, electronic equipment and a storage medium, and solves the problems that the existing chip template positioning algorithm cannot calibrate the chip template, the calibration precision is low, the robustness is poor and the like.
The invention provides a chip template calibration method in a first aspect, which comprises the following steps: obtaining a chip image meeting the brightness requirement, and preprocessing the chip image, including gray processing, median filtering processing and image pyramid processing; extracting an interested area with a proper size from the preprocessed chip image to obtain an image gray matrix; performing convolution processing on the image gray matrix to obtain the edge intensity of each point in the image gray matrix; extracting a point with the maximum edge intensity, carrying out double-threshold processing on the point with the maximum edge intensity to obtain an edge point, and constructing a chip template based on the edge point; creating an external matrix of the chip template according to the edge points; and manually calibrating the external matrix and the chip image, and recording a compensation angle to obtain a calibration angle of the chip template.
Further, the step of performing convolution processing on the image gray matrix includes: carrying out boundary zero padding on the image gray matrix, and carrying out convolution processing on the image gray matrix and a convolution kernel in the horizontal direction and a convolution kernel in the vertical direction respectively to obtain a convolution result of the image; and calculating the evolution of the square sum of the convolution results of the image to obtain the edge intensity of each point in the image gray matrix.
Further, the step of extracting a point having a maximum edge intensity includes: calculating the gradient direction angle of each point in the image gray matrix by using the convolution result of the image; and extracting the point with the maximum edge intensity based on the gradient direction angle of each point in the image gray matrix.
Further, the step of extracting a point with a maximum edge intensity based on the gradient direction angle of each point in the image gray matrix includes: creating an edge field of each point in the image gray matrix; acquiring the edge strength of other points in the edge field according to the gradient direction angle of each point; and calculating the edge intensity values of two adjacent positions of each point by using an interpolation method, wherein if the edge intensity of one point is greater than the edge intensity of any one of the edge intensity values of the two adjacent positions of the point, the edge intensity of the point is maximum.
Further, the step of performing dual-threshold processing on the point with the maximum edge intensity includes: setting a maximum threshold value and a minimum threshold value of the edge intensity; judging whether the point with the edge intensity being the maximum value is an edge point or not according to the maximum threshold value, the minimum threshold value and the maximum value of the edge intensity; and selecting edge points to construct a chip template.
Further, if the edge intensity maximum value is greater than the maximum threshold value, the point with the edge intensity maximum value is determined as an edge point; if the edge intensity maximum value is smaller than the minimum threshold value, judging the point with the edge intensity maximum value as a non-edge point; if the edge intensity maximum value is larger than the minimum threshold value and smaller than the maximum threshold value, the edge area is established by using the point with the edge intensity as the maximum value, if the edge point exists in the edge area, the point is used as the edge point, otherwise, the point is a non-edge point.
Further, the step of creating the external matrix of the chip template includes: drawing a convex hull of the edge point; selecting one edge in the convex hull as an x reference axis, selecting an edge point through which the x reference axis passes as an origin point, and drawing a y reference axis perpendicular to the x reference axis; projecting all edge points on each edge in the convex hull to an x reference axis and a y reference axis, calculating the area of a projection rectangle corresponding to each edge, screening the minimum value of the area of the projection rectangle, and taking the projection rectangle corresponding to the minimum value of the area of the projection rectangle as an external matrix of the edge points.
A second aspect of the present invention provides a chip template calibration apparatus, including: the acquisition unit is used for acquiring a chip image meeting the brightness requirement; the processing unit is used for preprocessing the chip image, extracting an interested area with a proper size from the preprocessed chip image and obtaining an image gray matrix; performing convolution processing on the image gray matrix to obtain the edge intensity of each point in the image gray matrix; extracting a point with the maximum edge intensity, carrying out double-threshold processing on the point with the maximum edge intensity to obtain an edge point, and constructing a chip template based on the edge point; creating an external matrix of the chip template according to the edge points; and manually calibrating the external matrix and the chip image, and recording a compensation angle to obtain a calibration angle of the chip template.
A third aspect of the present invention provides an electronic apparatus comprising: a processor and a memory for storing computer program code comprising computer instructions, the electronic device performing the chip template calibration method as described above, in case the processor executes the computer instructions.
A fourth aspect of the present invention provides a computer-readable storage medium having a computer program stored therein, the computer program comprising program instructions that, if executed by a processor, cause the processor to execute the chip template calibration method as described above.
The chip template calibration method and the chip template calibration device solve the problems that the initial chip template cannot be calibrated in the positioning algorithm of the conventional chip mounter, the calibration precision is low, and the robustness is poor; the chip packaging method has strong applicability for chips with different packages and different pin specifications; in addition, the method is high in calculation speed and efficiency.
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For purposes of illustration and not limitation, the present invention will now be described in accordance with its preferred embodiments, particularly with reference to the accompanying drawings, in which:
fig. 1 is a flowchart of a method for calibrating a chip template according to an embodiment of the present invention;
FIG. 2 is a flow chart of another method for calibrating a chip template according to another embodiment of the present invention;
FIG. 3 is a schematic diagram of an image gray-scale matrix I according to another embodiment of the present invention;
FIG. 4 is a flow chart of another method for calibrating a chip template according to another embodiment of the present invention;
FIG. 5 is a graph of edge strength provided by another embodiment of the present invention;
FIG. 6 is a gradient direction matrix diagram provided by another embodiment of the present invention;
FIG. 7 is a schematic diagram of edge points provided in accordance with another embodiment of the present invention;
FIG. 8 is a flow chart of another method for calibrating a chip template according to another embodiment of the present invention;
fig. 9 is a schematic structural diagram of a chip template calibration apparatus according to another embodiment of the present invention;
fig. 10 is a schematic structural diagram of a chip template calibration apparatus according to another embodiment of the present invention.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, a detailed description of the present invention will be given below with reference to the accompanying drawings and specific embodiments. It should be noted that the embodiments of the present invention and features of the embodiments may be combined with each other without conflict.
In the following description, numerous specific details are set forth to provide a thorough understanding of the present invention, and the described embodiments are merely a subset of the embodiments of the present invention, rather than a complete embodiment. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
Fig. 1 is a flowchart of a method for calibrating a chip template according to an embodiment of the present invention. The chip template calibration method comprises the steps of firstly obtaining a chip image meeting the brightness requirement, preprocessing the chip image by gray scale, median filtering, image pyramid and the like, then extracting an interested region, carrying out operations of convolution, maximum judgment, double-threshold processing and the like on a matrix in the interested region to obtain edge points, creating an external rectangle by using the edge points, and finally carrying out manual calibration on the external rectangle to obtain the final template calibration pose.
Referring to fig. 1, the method for calibrating the chip template includes the following steps:
and S100, acquiring a chip image meeting the brightness requirement.
In the embodiment, images of the chip at a plurality of different brightnesses are captured by the CCD. And selecting a chip image meeting the brightness requirement from the plurality of images. Wherein the brightness requirement is
S200, preprocessing the acquired chip image meeting the brightness requirement.
In this embodiment, the obtained chip image meeting the brightness requirement is sequentially subjected to gray processing, median filtering processing, and image pyramid processing, so as to obtain a preprocessed chip image.
Fig. 2 is a flowchart of another method for calibrating a chip template according to another embodiment of the present invention. Referring to fig. 2, the step of preprocessing the selected chip image meeting the brightness requirement includes:
s201, carrying out gray level processing on the acquired chip image meeting the brightness requirement to obtain a gray level image of the chip.
S202, performing median filtering processing on the gray level image of the chip to obtain a chip image after the median filtering processing.
S203, selecting a proper image pyramid layer number, and zooming the chip image after the median filtering processing to a proper size to obtain a preprocessed chip image.
The invention respectively carries out gray processing, median filtering processing and image pyramid processing on the acquired chip image, and can effectively eliminate noise mixed in the image.
S300, extracting an interested area with a proper size from the preprocessed chip image to obtain an image gray matrix I.
In the present embodiment, a region of interest (ROI) of a suitable size is drawn from the preprocessed chip image in the form of a box, a circle, an ellipse, an irregular polygon, or the like. The region of interest (ROI) of suitable size is able to completely cover all the pins of the chip in the pre-processed chip image. Based on the region of interest (ROI) of suitable size, an image gray matrix I is obtained, as shown in fig. 3.
S400, performing convolution processing on the image gray matrix I to obtain the edge intensity of each point in the image gray matrix I, extracting the point with the edge intensity being the maximum value, performing double-threshold processing on the point with the edge intensity being the maximum value to obtain the edge point, and constructing a chip template based on the edge point.
Fig. 4 is a flowchart of another method for calibrating a chip template according to another embodiment of the present invention. Referring to fig. 4, the step of constructing the chip template includes:
s401, performing convolution processing on the image gray matrix I to obtain a convolution result of the image, and calculating the edge intensity of the image based on the convolution result.
In this embodiment, the core image gray-scale matrix I obtained in step S300 is subjected to zero padding on the boundary and then is respectively matched with the convolution kernel sobel in the horizontal directionxAnd the convolution kernel sobel in the vertical directionyConvolution is performed to obtain convolution results dx and dy of the image, and then the square sum of the convolution results dx and dy is used to obtain the edge intensity magnitude of each point of the image gray matrix I, as shown in fig. 5.
The calculation formula of the edge strength is as follows:
s402, calculating the gradient direction angle of each point in the image gray matrix I by using the convolution result of the image.
In the present embodiment, the gradient direction angle of each point in the image gray-scale matrix I is calculated by using the convolution results dx and dy of each point in the image gray-scale matrix I obtained in step S401, and the gradient direction matrix of the image gray-scale matrix I is generated based on the gradient direction angle of each point in the image gray-scale matrix I, as shown in fig. 6.
The calculation formula of the gradient direction angle is as follows:
and S403, extracting the point with the edge intensity being the maximum value based on the gradient direction angle of each point in the image gray matrix I.
In this embodiment, the step of extracting a point having a maximum edge intensity includes:
the edge intensity of each point (r, c) in the image gray matrix I is used as a kernel to create an edge field of 3x3, the edge intensities of other points in the edge field are obtained along the gradient direction angle of each kernel, the edge intensity values of two positions adjacent to the kernel are calculated by using an interpolation method, if the edge intensity of the kernel is greater than the edge intensity of any one of the edge intensity values of two positions adjacent to the kernel, the kernel is a maximum value maxup, otherwise, the kernel is a non-maximum value, as shown in fig. 7.
The method for calculating the edge intensity values at two positions adjacent to the kernel by using the interpolation method comprises the following steps:
if the gradient direction angle of i nucleus, angle (i) epsilon (45, 90) < U [ -135, -90], the edge strength of one position adjacent to i nucleus is magnitude (r-1, c) ((angle (i)) + magnitude (r-1, c-1) × (tan (angle (i)), and the edge strength of the other position is magnitude (r +1, c) ((angle (i)) + magnitude (r +1, c +1) × (tan (angle (i)) + magnitude (r +1, c +1) × (angle (i)).
If the gradient direction angle of i nucleus, angle (i) epsilon (90, 135 ^ (-90, -45), the edge strength of one position adjacent to i nucleus is magnitude (r-1, c) (angle (i)) + magnitude (r-1, c +1) × (angle (i)), and the edge strength of the other position is magnitude (r +1, c) × (1-tan (angle (i)) + magnitude (r +1, c-1) × (angle (i)).
If the gradient direction angle of i nucleus, angle (i) is ∈ [0, 45) < U [ -180, -135), the edge strength at one position adjacent to i nucleus is magnitude (r, c-1) (angle (i)) + magnitude (r-1, c-1) ((angle (i))) and the edge strength at the other position is magnitude (r, c +1) ((angle (i)) + magnitude (r +1, c +1) ((angle (i))).
If the gradient direction angle of i nucleus, angle (i) and ∈ (135, 180 [ (-45, 0) ], the edge strength of one position adjacent to i nucleus is magnitude (r, c +1) ((angle (i))) + magnitude (r-1, c +1) × (angle (i))) and the edge strength of the other position is magnitude (r, c-1) ((angle (i)) + magnitude (r +1, c +1) × (angle (i))).
S404, performing double-threshold processing on the point with the maximum edge strength to obtain an edge point, and constructing a chip template based on the edge point.
In this embodiment, a specific method for performing double-threshold processing on a point whose edge intensity is the maximum value maxup is as follows:
(1) and setting a maximum threshold h and a minimum threshold l of the edge strength.
(2) And judging whether the point with the edge intensity being the maximum value is an edge point or not according to the maximum threshold h, the minimum threshold l and the maximum value of the edge intensity, and constructing a chip template based on the edge point.
Based on the maximum threshold h and the minimum threshold l of the edge intensity, the sizes of the maximum value maxup and the maximum threshold of the edge intensity and the sizes of the maximum value maxup and the minimum threshold of the edge intensity are respectively judged.
If the maximum value maxup of the edge intensity of the point i is larger than the maximum threshold h, the point is judged as an edge point; and if the maximum value maxup of the edge intensity of the point i is smaller than the minimum threshold l, judging the point as a non-edge point.
If the maximum value maxup of the edge intensity of the point i is larger than the minimum threshold l and smaller than the maximum threshold h, the point is taken as a core to create a 3x3 field, if the determined edge point exists in the field, the point is taken as an edge point, otherwise, the point is taken as a non-edge point.
And constructing an edge point matrix based on the obtained edge points, and taking the edge point matrix as a chip template to be created.
And S500, creating an external matrix of the chip template according to the edge points.
FIG. 8 is a flowchart of another method for calibrating a chip template according to another embodiment of the present invention. Referring to fig. 8, the step of creating the external matrix of the edge point includes:
and S501, drawing a convex hull of the edge point.
S502, selecting one edge in the convex hull as an x reference axis, selecting one edge point through which the x reference axis passes as an origin point, and drawing a y reference axis perpendicular to the x reference axis.
S503, projecting all edge points on each edge of the convex hull to an x reference axis and a y reference axis, calculating the area of a projection rectangle corresponding to each edge, screening the minimum value of the area of the projection rectangle, and taking the projection rectangle corresponding to the minimum value of the area of the projection rectangle as an external matrix of the edge points, namely the external matrix of the chip template.
The convolution processing method for one edge in the convex hull comprises the following steps: projecting all edge points on one edge of the convex hull to a y reference axis of the x reference axis to obtain the maximum x coordinate value of the projection pointmaxAnd x coordinate minimum value xminAnd the maximum y coordinate of the projected point ymaxAnd y-coordinate minimum value yminBased on the maximum x coordinate of the projection pointmaxAnd x coordinate minimum value xminAnd the maximum y coordinate of the projected point ymaxAnd y-coordinate minimum value yminAnd calculating the rectangular area of the projection surrounded by the four projection points, and taking the rectangular area of the projection as the rectangular area of the projection corresponding to the side.
The calculation formula of the projection rectangular area is as follows:
S＝(xmax-xmin)(ymax-ymin)
s600, manually calibrating the external matrix and the chip image, and recording the compensation angle to obtain the calibration angle of the chip template.
The circumscribed rectangle created in step S500 has the same center c (x, y) as the chip template obtained in step S400, so that the calibration of the chip template can be converted into the calibration of the circumscribed rectangle; and rotating the external rectangle, manually calibrating the external rectangle and the acquired chip image, recording the compensation angle, and adding the compensation angle to the rotation angle acquired by later template registration to obtain a real calibration angle.
The chip template calibration method comprises the steps of firstly obtaining a chip image meeting the brightness requirement, preprocessing the chip image by gray scale, median filtering, image pyramid and the like, then extracting an interested region, carrying out operations of convolution, maximum judgment, double-threshold processing and the like on a matrix in the interested region to obtain edge points, creating an external rectangle by using the edge points, and finally carrying out manual calibration on the external rectangle to obtain the final template calibration pose.
The chip template calibration method solves the problems that the chip initial template cannot be calibrated in the positioning algorithm of the existing chip mounter, the calibration precision is low, and the robustness is poor; the chip packaging method has strong applicability for chips with different packages and different pin specifications; in addition, the method has high calculation speed and high efficiency, and the positioning time of the large pin chip and the small pin chip in the later stage of the chip registration by adopting the calibration method is not more than 200ms and not more than 100 ms.
The method of embodiments of the present invention is set forth above in detail and the apparatus of embodiments of the present invention is provided below.
Referring to fig. 9, fig. 9 is a schematic structural diagram of a chip template calibration apparatus 700 according to another embodiment of the present invention.
In this embodiment, the chip template calibration apparatus 700 may be applied to a computer apparatus, and the chip template calibration apparatus 700 may include a plurality of functional modules composed of program code segments. The program codes of the various program segments in the chip template calibration apparatus 700 may be stored in the memory of the computer apparatus and executed by at least one processor of the computer apparatus to implement (see fig. 1 for details) the chip template calibration function.
In this embodiment, the chip template calibration apparatus 700 may be divided into a plurality of functional modules according to the functions performed by the chip template calibration apparatus. The functional module may include: an acquisition unit 701 and a processing unit 702. The module referred to herein is a series of computer program segments capable of being executed by at least one processor and capable of performing a fixed function and is stored in memory. In the present embodiment, the functions of the modules will be described in detail in the following embodiments.
An obtaining unit 701, configured to obtain a chip image meeting a brightness requirement; a processing unit 702, configured to pre-process the chip image, and extract an area of interest with a suitable size from the pre-processed chip image to obtain an image grayscale matrix; performing convolution processing on the image gray matrix to obtain the edge intensity of each point in the image gray matrix; extracting a point with the maximum edge intensity, carrying out double-threshold processing on the point with the maximum edge intensity to obtain an edge point, and constructing a chip template based on the edge point; creating an external matrix of the chip template according to the edge points; and manually calibrating the external matrix and the chip image, and recording a compensation angle to obtain a calibration angle of the chip template.
In correspondence to the above method embodiment, referring to fig. 10, fig. 10 is a schematic diagram of a chip template calibration apparatus provided in the present invention, where the apparatus 800 may include:
a memory 801 for storing a computer program;
the processor 802, when executing the computer program stored in the memory 801, may implement the following steps:
acquiring a chip image meeting the brightness requirement; preprocessing the chip image, and extracting an interested area with a proper size from the preprocessed chip image to obtain an image gray matrix; performing convolution processing on the image gray matrix to obtain the edge intensity of each point in the image gray matrix; extracting a point with the maximum edge intensity, carrying out double-threshold processing on the point with the maximum edge intensity to obtain an edge point, and constructing a chip template based on the edge point; creating an external matrix of the chip template according to the edge points; and manually calibrating the external matrix and the chip image, and recording a compensation angle to obtain a calibration angle of the chip template.
For the introduction of the device provided by the present invention, please refer to the above method embodiment, which is not described herein again.
Corresponding to the above method embodiment, the present invention further provides a computer-readable storage medium having a computer program stored thereon, the computer program, when executed by a processor, implementing the steps of:
acquiring a chip image meeting the brightness requirement; preprocessing the chip image, and extracting an interested area with a proper size from the preprocessed chip image to obtain an image gray matrix; performing convolution processing on the image gray matrix to obtain the edge intensity of each point in the image gray matrix; extracting a point with the maximum edge intensity, carrying out double-threshold processing on the point with the maximum edge intensity to obtain an edge point, and constructing a chip template based on the edge point; creating an external matrix of the chip template according to the edge points; and manually calibrating the external matrix and the chip image, and recording a compensation angle to obtain a calibration angle of the chip template.
The computer-readable storage medium may include: various media capable of storing program codes, such as a usb disk, a removable hard disk, a Read-only Memory (ROM), a Random Access Memory (RAM), a magnetic disk, or an optical disk.
For the introduction of the computer-readable storage medium provided by the present invention, please refer to the above method embodiments, which are not described herein again.
The embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same or similar parts among the embodiments are referred to each other. The device, the apparatus and the computer-readable storage medium disclosed in the embodiments correspond to the method disclosed in the embodiments, so that the description is simple, and the relevant points can be referred to the description of the method.
The above-described embodiments should not be construed as limiting the scope of the invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions can occur, depending on design requirements and other factors. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A method for calibrating a chip template is characterized by comprising the following steps:
obtaining a chip image meeting the brightness requirement, and preprocessing the chip image, including gray processing, median filtering processing and image pyramid processing;
extracting an interested area with a proper size from the preprocessed chip image to obtain an image gray matrix;
performing convolution processing on the image gray matrix to obtain the edge intensity of each point in the image gray matrix;
extracting a point with the maximum edge intensity, carrying out double-threshold processing on the point with the maximum edge intensity to obtain an edge point, and constructing a chip template based on the edge point;
creating an external matrix of the chip template according to the edge points;
and manually calibrating the external matrix and the chip image, and recording a compensation angle to obtain a calibration angle of the chip template.
2. The method for calibrating the chip template according to claim 1, wherein the step of performing convolution processing on the image gray matrix comprises:
carrying out boundary zero padding on the image gray matrix, and carrying out convolution processing on the image gray matrix and a convolution kernel in the horizontal direction and a convolution kernel in the vertical direction respectively to obtain a convolution result of the image;
and calculating the evolution of the square sum of the convolution results of the image to obtain the edge intensity of each point in the image gray matrix.
3. The method for calibrating a chip template according to claim 2, wherein the step of extracting the point having the maximum edge intensity comprises:
calculating the gradient direction angle of each point in the image gray matrix by using the convolution result of the image;
and extracting the point with the maximum edge intensity based on the gradient direction angle of each point in the image gray matrix.
4. The method for calibrating the chip template according to claim 3, wherein the step of extracting the point with the maximum edge intensity based on the gradient direction angle of each point in the image gray matrix comprises:
creating an edge field of each point in the image gray matrix;
acquiring the edge strength of other points in the edge field according to the gradient direction angle of each point;
and calculating the edge intensity values of two adjacent positions of each point by using an interpolation method, wherein if the edge intensity of one point is greater than the edge intensity of any one of the edge intensity values of the two adjacent positions of the point, the edge intensity of the point is maximum.
5. The method for calibrating a chip template according to claim 1, wherein the step of performing a dual-threshold process on the point where the edge intensity is maximum includes:
setting a maximum threshold value and a minimum threshold value of the edge intensity;
judging whether the point with the edge intensity being the maximum value is an edge point or not according to the maximum threshold value, the minimum threshold value and the maximum value of the edge intensity;
and selecting edge points to construct a chip template.
6. The method for calibrating a chip template according to claim 5, wherein if the maximum value of the edge intensity is greater than the maximum threshold value, the point with the maximum value of the edge intensity is determined as an edge point;
if the edge intensity maximum value is smaller than the minimum threshold value, judging the point with the edge intensity maximum value as a non-edge point;
if the edge intensity maximum value is larger than the minimum threshold value and smaller than the maximum threshold value, the edge area is established by using the point with the edge intensity as the maximum value, if the edge point exists in the edge area, the point is used as the edge point, otherwise, the point is a non-edge point.
7. The method for calibrating a chip template according to claim 1, wherein the step of creating the external matrix of the chip template comprises:
drawing a convex hull of the edge point;
selecting one edge in the convex hull as an x reference axis, selecting an edge point through which the x reference axis passes as an origin point, and drawing a y reference axis perpendicular to the x reference axis;
projecting all edge points on each edge in the convex hull to an x reference axis and a y reference axis, calculating the area of a projection rectangle corresponding to each edge, screening the minimum value of the area of the projection rectangle, and taking the projection rectangle corresponding to the minimum value of the area of the projection rectangle as an external matrix of the edge points.
8. A chip template calibration device is characterized by comprising:
the acquisition unit is used for acquiring a chip image meeting the brightness requirement;
the processing unit is used for preprocessing the chip image, extracting an interested area with a proper size from the preprocessed chip image and obtaining an image gray matrix; performing convolution processing on the image gray matrix to obtain the edge intensity of each point in the image gray matrix; extracting a point with the maximum edge intensity, carrying out double-threshold processing on the point with the maximum edge intensity to obtain an edge point, and constructing a chip template based on the edge point; creating an external matrix of the chip template according to the edge points; and manually calibrating the external matrix and the chip image, and recording a compensation angle to obtain a calibration angle of the chip template.
9. An electronic device, comprising: a processor and a memory for storing computer program code comprising computer instructions, the electronic device performing the chip template calibration method according to any one of claims 1 to 7, when the processor executes the computer instructions.
10. A computer-readable storage medium, in which a computer program is stored, the computer program comprising program instructions which, if executed by a processor, cause the processor to carry out the chip template calibration method according to any one of claims 1 to 7.
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| TWI810103B (en) * | 2022-09-07 | 2023-07-21 | 大陸商環旭電子股份有限公司 | Method, system, storage medium and intelligent terminal for detecting wafers on tray |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI810103B (en) * | 2022-09-07 | 2023-07-21 | 大陸商環旭電子股份有限公司 | Method, system, storage medium and intelligent terminal for detecting wafers on tray |
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