CN114354669A - Method for detecting talcum powder particles in dust-free wiping cloth for clean room - Google Patents

Method for detecting talcum powder particles in dust-free wiping cloth for clean room Download PDF

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Publication number
CN114354669A
CN114354669A CN202210059105.9A CN202210059105A CN114354669A CN 114354669 A CN114354669 A CN 114354669A CN 202210059105 A CN202210059105 A CN 202210059105A CN 114354669 A CN114354669 A CN 114354669A
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China
Prior art keywords
dust
wiping cloth
sample
electron microscope
scanning electron
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Pending
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CN202210059105.9A
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Chinese (zh)
Inventor
宋丽
闫成成
游滨芳
游劲松
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Shenzhen X&y International Industrial Co ltd
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Shenzhen X&y International Industrial Co ltd
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Publication of CN114354669A publication Critical patent/CN114354669A/en
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Abstract

The invention is suitable for the technical field of detection, and provides a method for detecting talcum powder particles in dust-free wiping cloth for a clean room, which comprises the steps of setting detection conditions, manufacturing a sample and analyzing by a scanning electron microscope.

Description

Method for detecting talcum powder particles in dust-free wiping cloth for clean room
Technical Field
The invention belongs to the technical field of detection, and particularly relates to a method for detecting talcum powder particles in dust-free wiping cloth for a clean room.
Background
With the development of modern science and technology, the electronic semiconductor industry has higher requirements on cleanliness indexes in the manufacturing process, dust-free wiping cloth for a clean room has larger influence on products except common cleaning performance, and talcum powder particles in the products also have direct influence on the products, for example, tiny talcum powder particles in the wiping cloth can cause magnetic heads in magnetic disks to be scrapped, but the common detection method only mainly tests the common cleanliness, for example, IEST-RP-CC004.4 of American national environmental society and national textile industry standard FZ/T05646-.
Disclosure of Invention
The invention aims to provide a method for detecting talcum powder particles in clean room dust-free wiping cloth, and aims to solve the problem that an electronic semiconductor is damaged by the talcum powder in the clean room dust-free wiping cloth in the manufacturing process.
The invention provides a method for detecting talcum powder particles in dust-free wiping cloth for a clean room, which comprises the following steps of:
setting detection conditions: according to the main component Mg of talcum powder3[Si4O10](OH)2Setting a substance containing O-Si-Mg as the detection condition of the talcum powder in a scanning electron microscope;
preparing a sample:
randomly drawing N pieces of dust-free wiping cloth with the quantity accounting for 25% -35% from a pack of dust-free wiping cloth samples as dust-free wiping cloth to be tested;
respectively and randomly selecting 40-60 different positions on the surfaces of the N pieces of dust-free wiping cloth to be tested by using N sample holders adhered with conductive adhesive to be adhered to obtain N parallel samples;
scanning electron microscope analysis: and sequentially fixing N parallel samples on a sample table of the scanning electron microscope, and sending the samples into a vacuum chamber for scanning analysis, wherein the scanning electron microscope respectively outputs the quantity values of the talcum powder particles in the N parallel samples through detection reports.
Further, the manufacturing method of the sample holder adhered with the conductive adhesive comprises the following steps:
the clean jumpsuit, the mask and the cleaning gloves are worn;
separately preparing a sample holder and an area of 1cm2The black conductive adhesive of (3);
and adhering the black conductive adhesive to the sample holder.
Further, the step of scanning electron microscope analysis also comprises the step of outputting the detected size, form and element components of the talcum powder particles through a detection report by the scanning electron microscope.
Further, after the step of scanning electron microscope analysis, the method also comprises the step of calculating the average value of the number values of the talcum powder particles in the N parallel samples as the number value of the talcum powder particles in the dust-free wiping cloth sample.
Further, a threshold value is set according to a client index, the number value of the talcum powder particles in the dust-free wiping cloth sample is compared with the threshold value, if the number value of the talcum powder particles in the dust-free wiping cloth sample is not larger than the threshold value, the detection result is qualified, otherwise, the detection result is unqualified.
The invention has the beneficial effects that: the invention provides a method for detecting talcum powder particles in dust-free wiping cloth for a clean room, which can carry out quantitative analysis by using a scanning electron microscope through the appearance form and the element composition of talcum powder, thereby detecting whether the dust-free wiping cloth contains the talcum powder which is difficult to be observed and judged by naked eyes, and judging whether the dust-free wiping cloth meets the process requirement of a precise electronic semiconductor.
Drawings
FIG. 1 is a scanning electron microscope analysis result of one parallel sample of talc powder particles in the clean room dust-free wiping cloth provided by the embodiment of the invention;
FIG. 2 is a scanning electron microscope analysis result of another parallel sample of talc powder particles in the clean room dust-free wiping cloth provided by the embodiment of the invention;
FIG. 3 is a scanning electron microscope analysis result of the last parallel sample of talc powder particles in the clean room dust-free wiping cloth according to the embodiment of the present invention;
fig. 4 is a result of analyzing the form, size and composition of talc particles detected in the talc particles in the clean room dust-free wiping cloth according to the embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The following detailed description of specific implementations of the present invention is provided in conjunction with specific embodiments:
example (b):
the embodiment of the invention provides a method for detecting talcum powder particles in dust-free wiping cloth for a clean room, which comprises the following steps:
step S1, setting detection conditions: according to the main component Mg of talcum powder3[Si4O10](OH)2Setting a substance containing O-Si-Mg as a detection condition of Talcum powder (Talcum powder) in a scanning electron microscope;
in the embodiment of the invention, other necessary parameters are set for the scanning electron microscope, including the magnification factor of 1200.
Step S2, sample preparation:
preparing a sample containing 12 pieces of dust-free wiping cloth, and randomly drawing 3 pieces of dust-free wiping cloth as dust-free wiping cloth to be tested;
respectively and randomly selecting 50 different positions on the surfaces of 3 pieces of dust-free wiping cloth to be tested to be pasted by using 3 sample holders stuck with conductive adhesive to obtain 3 parallel samples;
step S3, scanning electron microscope analysis: and sequentially fixing the 3 parallel samples on a sample table of a scanning electron microscope, sending the samples into a vacuum chamber for scanning analysis, respectively outputting the quantity values of the talcum powder particles in the 3 parallel samples by the scanning electron microscope through detection reports, wherein the detection reports are shown in figures 1-3, and the quantity values of the talcum powder particles in the 3 parallel samples are respectively 0, 0 and 1 according to the detection reports.
Further, the method for manufacturing the sample holder with the conductive paste adhered thereto in step S2 includes:
the clean jumpsuit, the mask and the cleaning gloves are worn;
separately preparing a sample holder and an area of 1cm2The black conductive adhesive of (3);
and sticking the black conductive adhesive on the sample holder.
Further, step S3 includes that the detection report of the scanning electron microscope further includes the form, size, and elemental composition of the detected talc powder particles, as shown in fig. 4, so as to facilitate further confirmation of the detected talc powder particles.
Further, after step S3, the method further includes calculating an average value of the number of talc particles in the 3 replicates as the number of talc particles in the dust-free wipe sample, wherein the average value is rounded to 0.3 according to the values 0, and 1 in the above test report.
And further setting a threshold value according to the client index, comparing the number value of the talcum powder particles in the dust-free wiping cloth sample with the threshold value, and if the number value of the talcum powder particles in the dust-free wiping cloth sample is not more than the threshold value, determining that the detection result is qualified, otherwise, determining that the detection result is unqualified.
In the embodiment of the invention, the threshold value is set to be 5 according to the client index, and the detection result of the dustless wiping cloth sample is qualified because the quantity value 0.3 of the dustless wiping cloth sample does not exceed 5.
In the embodiment of the invention, the scanning electron microscope used is Phenom Particle XL.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.

Claims (5)

1. A method for detecting talcum powder particles in dust-free wiping cloth for a clean room is characterized by comprising the following steps:
setting detection conditions: according to the main component Mg of talcum powder3[Si4O10](OH)2Setting a substance containing O-Si-Mg as the detection condition of the talcum powder in a scanning electron microscope;
preparing a sample:
randomly drawing N pieces of dust-free wiping cloth with the quantity accounting for 25% -35% from a pack of dust-free wiping cloth samples as dust-free wiping cloth to be tested;
respectively and randomly selecting 40-60 different positions on the surfaces of the N pieces of dust-free wiping cloth to be tested by using N sample holders adhered with conductive adhesive to be adhered to obtain N parallel samples;
scanning electron microscope analysis: and sequentially fixing N parallel samples on a sample table of the scanning electron microscope, and sending the samples into a vacuum chamber for scanning analysis, wherein the scanning electron microscope respectively outputs the quantity values of the talcum powder particles in the N parallel samples through detection reports.
2. The method for detecting the talc particles in the clean room dust-free wiping cloth according to claim 1, wherein the method for manufacturing the sample holder adhered with the conductive adhesive comprises:
the clean jumpsuit, the mask and the cleaning gloves are worn;
separately preparing a sample holder and an area of 1cm2The black conductive adhesive of (3);
and adhering the black conductive adhesive to the sample holder.
3. The method for detecting the talc particles in the clean room dust-free wiping cloth according to claim 1, further comprising outputting the detected size, morphology and elemental composition of the talc particles through a detection report by a scanning electron microscope in the step of scanning electron microscope analysis.
4. The method for detecting the talc particles in the clean room dust-free wiping cloth of claim 1, further comprising calculating an average value of the number values of the talc particles in the N parallel samples as the number value of the talc particles in the dust-free wiping cloth sample after the step of scanning electron microscope analysis.
5. The method of claim 4, further comprising setting a threshold value according to a customer specification, comparing the amount of talc particles in the dust-free wipe sample with the threshold value, and if the amount of talc particles in the dust-free wipe sample is not greater than the threshold value, determining that the test result is acceptable, otherwise, determining that the test result is not acceptable.
CN202210059105.9A 2022-01-19 2022-01-19 Method for detecting talcum powder particles in dust-free wiping cloth for clean room Pending CN114354669A (en)

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CN202210059105.9A CN114354669A (en) 2022-01-19 2022-01-19 Method for detecting talcum powder particles in dust-free wiping cloth for clean room

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Publication number Priority date Publication date Assignee Title
US20100084082A1 (en) * 2008-09-30 2010-04-08 Fujifilm Corporation Heat-sensitive transfer sheet
CN104990840A (en) * 2015-06-05 2015-10-21 中国海洋大学 Method for observing morphology of ultrafine powder sample by using scanning electron microscope
US20200070098A1 (en) * 2017-03-09 2020-03-05 Organo Corporation Method of evaluating level of cleanliness of hollow fiber membrane device, method of washing hollow fiber membrane device, and washing device for hollow fiber membrane device
CN111812138A (en) * 2020-06-08 2020-10-23 河北省产品质量监督检验研究院 Method for measuring asbestos content in brake pad by scanning electron microscope-energy spectrometer
CN112557431A (en) * 2020-12-25 2021-03-26 上海富乐德智能科技发展有限公司 Nondestructive detection method for pollutant components on surface of part

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100084082A1 (en) * 2008-09-30 2010-04-08 Fujifilm Corporation Heat-sensitive transfer sheet
CN104990840A (en) * 2015-06-05 2015-10-21 中国海洋大学 Method for observing morphology of ultrafine powder sample by using scanning electron microscope
US20200070098A1 (en) * 2017-03-09 2020-03-05 Organo Corporation Method of evaluating level of cleanliness of hollow fiber membrane device, method of washing hollow fiber membrane device, and washing device for hollow fiber membrane device
CN111812138A (en) * 2020-06-08 2020-10-23 河北省产品质量监督检验研究院 Method for measuring asbestos content in brake pad by scanning electron microscope-energy spectrometer
CN112557431A (en) * 2020-12-25 2021-03-26 上海富乐德智能科技发展有限公司 Nondestructive detection method for pollutant components on surface of part

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Title
叶翔宇;杨志清;王倩;金环;韩高锋;: "PM2.5日用防护口罩检测技术探讨", 中国纤检, no. 03, pages 94 - 101 *
管映亭等: "防静电无尘擦拭布通用规范", 《中华人民共和国电子行业标准》, pages 27 - 28 *

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Inventor after: Song Li

Inventor after: Yan Chengcheng

Inventor after: You Pinfang

Inventor after: Feng Jinsong

Inventor before: Song Li

Inventor before: Yan Chengcheng

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Application publication date: 20220415

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