CN114354025B - Force measuring device and end effector - Google Patents

Force measuring device and end effector Download PDF

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CN114354025B
CN114354025B CN202111418877.9A CN202111418877A CN114354025B CN 114354025 B CN114354025 B CN 114354025B CN 202111418877 A CN202111418877 A CN 202111418877A CN 114354025 B CN114354025 B CN 114354025B
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CN114354025A (en
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王峥
刘健慧
刘思聪
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Southern University of Science and Technology
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Abstract

The force measuring device comprises a force sensor, wherein the force sensor comprises an elastic body, a magnetic piece arranged in the elastic body and positioned on a first preset plane, and a sensing piece arranged in the elastic body and positioned on a second preset plane; the first preset plane and the second preset plane are arranged at intervals in parallel, the elastic body can deform under the action of external force, so that the magnetic piece and the induction piece are close to or far away from each other, and the magnetic field position of the induction piece is changed; the sensing element is used for detecting a magnetic field and outputting an induction electric signal. The magnetic piece and the sensing piece are matched with each other, and external force information can be measured without any intermediate switching device by utilizing the characteristic that the elastic body can elastically deform under the action of external force; the sensor has the characteristics of soft texture, strong tolerance and the like, so that the interactivity and the environmental adaptability of the sensor are effectively improved, and the sensor is suitable for environments with complex shapes or fragile environments, such as touch sensing, robot skin, human-computer interaction and the like, which need to be matched.

Description

Force measuring device and end effector
Technical Field
The invention relates to the technical field of sensors, in particular to a force measuring device and an end effector.
Background
A force sensor is a sensing device that converts the magnitude of a force into a corresponding electrical signal output. Currently, most of the force sensors on the market are rigid structures, such as strain gauge force sensors; although the sensor with the structure has the advantages of high measurement precision, wide measurement range, good frequency response characteristic and the like, and occupies important positions in the fields of industrial production and the like. But due to poor interactivity and adaptability, the method is not dominant when applied to touch sensing, robot skin, man-machine interaction and the like which need to be matched with complex appearance environments or fragile environments.
Disclosure of Invention
The invention provides a force sensor, a force measuring device using the force sensor and an end effector, which are used for solving the problems of poor interactivity and adaptability of the existing force sensor.
According to a first aspect, in one embodiment there is provided a force sensor comprising an elastomer, a magnetic member, and an inductive member; wherein:
the magnetic piece is arranged in the elastic body and positioned on a first preset plane, and the magnetic piece is used for forming a magnetic field;
the sensing piece is arranged in the elastic body and positioned on a second preset plane, and is used for detecting a magnetic field so as to output an induction electric signal; the first preset plane and the second preset plane are arranged at intervals in parallel;
the elastic body is used for bearing and transmitting external force, and can deform under the action of the external force, so that the magnetic piece and the induction piece are close to each other or far away from each other, and the magnetic field position where the induction piece is located is changed.
In one embodiment, the magnetic sensor comprises two sensing pieces, wherein the two sensing pieces are arranged on a second preset plane at intervals, and projections of the two sensing pieces on the first preset plane are symmetrically distributed on two sides of the magnetic piece.
In one embodiment, the device comprises a sensing piece, wherein the sensing piece is arranged opposite to the magnetic piece at intervals.
In one embodiment, the sensing element is a hall sensor.
In one embodiment, the elastic body is integrally cast or integrally injection molded from a soft elastic material, so that the magnetic member and the sensing member can be wrapped and fixed in the elastic body.
In one embodiment, the elastomer is made of a silicone material.
In one embodiment, the magnetic member is a permanent magnet alloy or a permanent magnet ferrite.
In one embodiment, the elastic body is provided with a first surface and a second surface which are opposite, the first surface is used for receiving and transmitting the external force, the second surface is used for fixing the elastic body at a preset position, the magnetic piece is arranged in the elastic body and adjacent to the first surface, and the sensing piece is arranged in the elastic body and adjacent to the second surface.
According to a second aspect, an embodiment provides a force measuring device comprising:
a force sensor according to the first aspect; and
the control module is connected with the sensing piece and is used for acquiring an induction electric signal output by the sensing piece and analyzing and calculating the acquired induction electric signal so as to obtain external force information acting on the elastomer.
According to a third aspect, an embodiment provides an end effector comprising a body and the force measuring device of the second aspect, the elastomer being fixedly disposed on a surface of the body.
The force sensor according to the above embodiment comprises an elastic body, a magnetic piece arranged in the elastic body and positioned on a first preset plane, and a sensing piece arranged in the elastic body and positioned on a second preset plane; the first preset plane and the second preset plane are arranged at intervals in parallel, and the elastic body can deform under the action of external force, so that the magnetic piece and the induction piece are close to or far away from each other, and the magnetic field position of the induction piece is changed; the sensing element is used for detecting a magnetic field and outputting an induction electric signal. The magnetic piece and the induction piece are matched with each other, and the characteristic that the elastic body can elastically deform under the action of external force is utilized, so that the induction piece can output corresponding electric signals through the induction of the detection magnetic field, and external force information can be measured and obtained without any intermediate switching device; meanwhile, as the sensor has the characteristics of soft texture, strong tolerance and the like, the interactivity and environmental adaptability of the sensor are effectively improved, so that the sensor can be suitable for environments such as touch sensing, robot skin, man-machine interaction and the like which need to be matched with complex appearance or fragile environments.
Drawings
FIG. 1 is a structural perspective view of a force sensor of an embodiment.
FIG. 2 is a schematic diagram of the positional relationship between two sensing elements in a force sensor according to an embodiment.
FIG. 3 is a schematic diagram showing a positional relationship between a sensing element and a magnetic element in a force sensor according to an embodiment.
Fig. 4 is a schematic diagram showing a structural state in which the force sensor of the embodiment is acted upon by only positive pressure.
FIG. 5 is a schematic diagram of the structural state of a force sensor according to an embodiment when positive and shear forces are applied.
FIG. 6 is a graph of experimental fit of positive pressure versus Hall voltage in a force sensor according to one embodiment.
FIG. 7 is a graph of experimental fit of positive pressure versus voltage sum in a force sensor of one embodiment.
FIG. 8 is a graph of experimental fit of shear force versus Hall voltage in a force sensor of an embodiment.
FIG. 9 is a graph of experimental fit of shear force versus voltage sum in a force sensor of an embodiment.
FIG. 10 is a graph of experimental fit of shear force versus voltage difference in a force sensor of an embodiment.
FIG. 11 is a graph of positive pressure versus shear force for a proportionality coefficient in a force sensor of one embodiment.
FIG. 12 is a schematic cross-sectional structure of a force sensor of an embodiment.
Fig. 13 is a control schematic block diagram of a force measuring device of an embodiment.
Detailed Description
The invention will be described in further detail below with reference to the drawings by means of specific embodiments. Wherein like elements in different embodiments are numbered alike in association. In the following embodiments, numerous specific details are set forth in order to provide a better understanding of the present application. However, one skilled in the art will readily recognize that some of the features may be omitted, or replaced by other elements, materials, or methods in different situations. In some instances, some operations associated with the present application have not been shown or described in the specification to avoid obscuring the core portions of the present application, and may not be necessary for a person skilled in the art to describe in detail the relevant operations based on the description herein and the general knowledge of one skilled in the art.
Furthermore, the described features, operations, or characteristics of the description may be combined in any suitable manner in various embodiments. Also, various steps or acts in the method descriptions may be interchanged or modified in a manner apparent to those of ordinary skill in the art. Thus, the various orders in the description and drawings are for clarity of description of only certain embodiments, and are not meant to be required orders unless otherwise indicated.
The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The terms "coupled" and "connected," as used herein, are intended to encompass both direct and indirect coupling (coupling), unless otherwise indicated.
According to the force sensor provided by the embodiment of the application, the elastic body is used as the peripheral main body of the sensor, and the magnetic piece and the sensing piece are packaged to form the integral structure of the sensor. Firstly, the magnetic piece and the induction piece are matched, and the characteristics that the elastic body can elastically deform under the action of external force are utilized, so that the induction piece can sense and output corresponding electric signals through detecting the change of a magnetic field (including but not limited to the strength change of the magnetic field), and the information of the external force, such as the direction, the size and the like of the external force, can be finally obtained through analysis and calculation of the electric signals; thus, external force information can be measured and acquired without any intermediate switching device. Secondly, the characteristics of elastic deformation of the elastic body are utilized, so that the sensor has the characteristics of softness, simple and small structure, light texture and the like, and a soft or flexible sensor is formed, so that the interactivity and environmental adaptability of the sensor are effectively improved, and the sensor can be suitable for environments such as touch sensing, robot skin, man-machine interaction and the like which need to be matched with complex appearance environments or fragile environments. Thirdly, through the selection and configuration of the material types of the elastomer, such as the adoption of materials like silica gel and rubber, the characteristics of good temperature resistance, moisture resistance, corrosion resistance, low reaction inertia after molding and the like of the materials can be utilized, so that the sensor can adapt to severe application environments like seabed, underwater and the like.
Example 1
Referring to fig. 1 to 3, a force sensor, such as a two-dimensional load cell, is provided in a first embodiment. The force sensor comprises an elastomer 10, a magnetic element 20 and two sensing elements (for ease of description, one of which is defined as a first sensing element and labeled 31, the other sensing element is defined as a second sensing element and labeled 32); the following description will be given respectively.
Referring to fig. 1 to 3, the elastic body 10 serves as an integral peripheral body portion of the sensor, and on one hand, functions to perform alignment matching on the magnetic member 20, the first sensing member 31 and the second sensing member 32; on the other hand, functions to receive and transmit external forces. The elastic body 10 is a plate-like or block-like structure with a certain thickness, and the external contour shape can adopt regular or irregular geometric shapes such as rectangle, circle, curve and the like according to practical situations (such as the dimension of the area shape of the sensing part of the end effector, etc.), so that the elastic body 10 can be naturally formed or has two surfaces which are relatively distributed, for convenience of description, one of the surfaces is defined as a first surface, and the other surface opposite to the first surface is defined as a second surface; the first surface is mainly used for receiving and transmitting external force, so that the elastic body 10 deforms correspondingly towards the direction of the second surface under the action of the external force; the second surface is mainly used for mounting and fixing the whole sensor, such as being adhered and clamped on the surface of the end effector.
In one embodiment, the elastic body 10 is made of a silica gel material, so that the characteristics of slip resistance, shock absorption, deformable stress, strong tolerance and the like of the silica gel material are utilized, and the sensor is light and flexible in overall texture, simple and small in structure and the like. In other embodiments, the elastomer 10 may be a soft elastic material such as rubber or an injection moldable soft material.
Referring to fig. 1 to 3, the magnetic member 20 is disposed in the elastic body 10 and mainly functions to form a magnetic field in the elastic body 10 or in the vicinity of two sensing members; in the natural state (which may also be understood as an initial state, or a state in which no external force is present) of the elastic body 10, the magnetic member 20 is located in a first predetermined plane, which is disposed adjacent to the first surface of the elastic body 10. In particular, the magnetic member 20 may be made of a material having a certain magnetic property, such as a permanent magnetic alloy, a permanent magnetic ferrite, or the like, according to practical situations (e.g., magnetic properties).
Referring to fig. 1 to 3, the first sensing element 31 and the second sensing element 32 are disposed in the elastic body 10, and are mainly used for detecting a magnetic field and outputting an induced electrical signal so as to provide information support for finally measuring or obtaining external force information by calculating and analyzing the electrical signals output by the first sensing element and the second sensing element; in the natural state of the elastic body 10, the first sensing elements 31 and the second sensing elements 32 are arranged on a second preset plane at intervals according to a first preset distance d1, the second preset plane is adjacent to the second surface of the elastic body 10, the second preset plane and the first preset plane are arranged at intervals in parallel according to a second preset distance d2, and projections of the first sensing elements 31 and the second sensing elements 32 on the first preset plane are symmetrically distributed on two sides of the magnetic element 20, so that the first sensing elements 31, the second sensing elements 32 and the magnetic element 20 are arranged at intervals, and the interval distance between the magnetic element 20 and the first sensing elements 31 and the second sensing elements 32 is the same.
In one embodiment, the first sensing element 31 and the second sensing element 32 adopt the same hall sensor, so that the sensitivity of the hall sensor to the magnetic field, the characteristics of simple structure, small volume, wide frequency response, large output voltage change, long service life and the like are utilized, and the sensitivity of the sensor to external force as a whole, and the accuracy and the instantaneity of measurement are improved. In other embodiments, the first sensing element 31 and the second sensing element 32 may also use other functional devices capable of detecting and sensing a magnetic field, such as a magneto-resistive sensor, a thin film magneto-resistive sensor, and the like.
It should be noted that, in this embodiment, descriptions of the first preset plane and the second preset plane, which are virtual and custom planes, are introduced, only for clearly explaining the relative positional relationship among the magnetic member 20, the first sensing member 31, and the second sensing member 32 when the elastic body 10 is in the natural state, and do not represent that the first preset plane and the second preset plane actually exist in the elastic body 10 or the sensor as a whole.
Based on this, when the first surface of the elastic body 10 receives an external force applied from the outside, the stressed area on the first surface of the elastic body 10 deforms in the direction of the second surface under the action of the external force, so that the magnetic element 20 is urged to approach the first sensing element 31 and/or the second sensing element 32, and in the approach process of the magnetic element 20, the magnetic field inside the elastic body 10 (or near the two sensing elements) is changed (such as the strength of the magnetic field sensed by the sensing elements, the position of the magnetic field sensed by the sensing elements, etc.), and the first sensing element 31 and the second sensing element 32 output corresponding sensing electric signals under the influence of the magnetic field change, and the related information of the external force, such as the magnitude and direction information of the external force, etc., can be finally measured and obtained through calculation and analysis of the electric signals output by the sensing elements.
Taking the hardness of the elastic body 10, the magnetism of the magnetic element 20 and other parameters as well as the parameters accurately determined, the first sensing element 31 and the second sensing element 32 are all Hall sensors, and the output voltage range of the Hall sensors is 0-5V as an example, and the sensing principle of the force sensor is analyzed; it should be noted that the method involved in the analysis process may be performed by a control module connected to the hall sensor (i.e. the first sensing element 31 and the second sensing element 32) when the force sensor is specifically applied, and the control module may be a system formed by a processor, a computer or related functional devices having data processing capability.
Referring to fig. 4, 6 and 7, the force applied to the force sensor is positive pressure Fz (i.e. the force is applied to the first surface of the elastic body 10 along the Z-axis direction to the magnetic element 20), when the elastic body 10 is elastically deformed, the magnetic element 20 is caused to move in a direction approaching to the first sensing element 31 and the second sensing element 32, and the magnetic element 20 is only displaced in the Z-axis direction; the distance between the magnetic member 20 and the first and second sensing members 31 and 32 is the same, in other words, the magnetic fields detected by the first and second sensing members 31 and 32 in real time are the same; therefore, as the positive pressure F1 increases, the voltage U1 induced by the first sensing element 31 and the voltage U2 induced by the second sensing element 32 linearly increase and keep overlapping (refer to fig. 6 specifically, it should be noted that the dashed line and the solid line are arranged in parallel in fig. 6 only to distinguish the voltage U1 from the voltage U2).
At this time, the relationship between the positive pressure Fz and the sum of the voltages of the hall sensors (i.e., the sum of the voltages output from the first sensing element 31 and the second sensing element 32) (see fig. 7) can be established by the following equation:
Figure SMS_1
according to the formula I, the size information of the positive pressure Fz can be finally measured and obtained; wherein 47.325 and 311.221 in the first formula are fitting results of experimental curves, and can be understood as empirical values obtained by experimental measurement when the force sensor is configured.
Referring to fig. 5 and fig. 8 to 11 in combination with fig. 4, fig. 6 and fig. 7, when the external force applied to the force sensor is a composite force of a positive pressure Fz and a shearing force Fx (also understood as when a force is obliquely applied to the first surface of the elastic body 10, the force can be decomposed into a positive pressure Fz along the Z-axis direction and a shearing force Fx lying in the XY-axis plane); or when positive pressure Fz and shear force Fx are separately applied to the elastic body 10, that is: the positive pressure Fz is applied to the elastic body 10, then the positive pressure Fz is kept constant, and then the shearing force Fx applied to the elastic body 10 is gradually increased from zero, wherein the existence of the shearing force Fx causes the magnetic element 20 to move towards the direction close to the first sensing element 31 and away from the second sensing element 32, so that the output voltage of the first sensing element 31 is linearly increased while the output voltage of the second sensing element 32 is linearly decreased (refer to fig. 8 specifically).
Since the sum of the voltages output from the first sensing element 31 and the second sensing element 32 (i.e., the sum of the hall voltages) is maintained constant while the positive pressure Fz is maintained, the change in the shearing force Fx does not affect the sum of the hall voltages, and the sum of the voltages is only related to the positive pressure Fz (see fig. 9 in detail); meanwhile, the shear force Fx is proportional to the hall voltage difference (i.e. the voltage U1 outputted by the first sensing element 31 minus the voltage U2 outputted by the second sensing element 32) (see fig. 10), and the ratio can be defined as a proportionality coefficient k; in implementation, the scaling factor k under different positive pressures Fz can be experimentally measured by applying different positive pressures Fz, such as 0.5kg, 1.0kg, 1.5kg, 2.0kg, etc., to the force sensor to fit a straight line (see fig. 11 specifically), so as to establish the formula two:
Figure SMS_2
obtaining a proportionality coefficient k between the shearing force Fx and the Hall voltage difference under different positive pressures Fz according to a formula II; further, equation three can be established:
Figure SMS_3
based on the formula I, the formula II and the formula III, the external force information can be finally measured and obtained, wherein the external force information comprises two-dimensional composite component forces of the external force in the directions of a Z axis and an X axis, namely: shear force Fx and positive pressure Fz. It should be noted that, -0.17936 and 13.3727 in the second formula are fitting results of experimental curves, and can be understood as empirical values obtained by experimental measurement when the force sensor is configured.
From the above analysis, it can be seen that: the force sensor can realize one-dimensional force measurement and two-dimensional force measurement by virtue of the elastic deformation characteristic of the elastic body 10 through the cooperation of the magnetic element 20 and the first sensing element 31 and the second sensing element 32.
In specific implementation, taking the hall sensors as the first sensing element 31 and the second sensing element 32, the first preset distance d1 and the second preset distance d2 can be selected and set according to the specific application of the force sensor, the magnetic property of the magnetic element 20, the output voltage range of the hall sensor, and the like, and the sensitivity of the force sensor and the allocation of the measured external force can be realized through the control of the first preset distance d1 and the second preset distance d2, so that the force sensor can be suitable for different application scenes.
Specifically, as can be seen from the above analysis, when the shear force Fx gradually increases from zero, the magnetic element 20 is biased to move from between the first sensing element 31 and the second sensing element 32, so that the voltages output by the first sensing element 31 and the second sensing element 32 show an increase and a decrease (see fig. 8 specifically); thus, the first preset distance d1 determines the maximum shear force Fx that the force sensor can measure. The second preset distance d2 determines the voltage output by the sensing element, and the range of the voltage output by the sensing element can be determined by setting the second preset distance d2, so that the measuring range of the sensor can be determined. In general, the greater the stiffness of the elastomer 10, the greater the external force that the force sensor can measure; the stronger the magnetism of the magnetic member 20, the smaller the moving distance of the magnetic member 20 will cause the voltage output by the sensing member to change greatly, so that the force sensor becomes extremely sensitive.
Under the condition that the hardness of the elastic body 10 is unchanged, the weaker the magnetism of the magnetic piece 20 is, the larger the second preset distance d2 cannot be set, so that the voltage drop output by the sensing piece is zero, and the force sensor cannot sense the external force; on the contrary, the stronger the magnetism of the magnetic member 20 is, the smaller the second preset distance d2 cannot be set, so as to prevent the voltage output by the sensing member from directly reaching the maximum value. Based on the same principle, the elastomer 10 with smaller hardness can be used under the condition that the magnetism of the magnetic member 20 is unchanged, so as to realize sensing of small external force. Therefore, the force sensor can be applied to different application scenes in a targeted manner by selectively configuring parameters such as the first preset distance d1, the second preset distance d2, the hardness of the elastic body 10, the magnetism of the magnetic member 20, and the like.
In one embodiment, the elastic body 10 is integrally molded with a soft elastic material such as silica gel, rubber, or the like, or integrally injection molded, so as to integrally fix the magnetic element 20, the first sensing element 31, and the second sensing element 32 in the elastic body 10 in a wrapping manner, thereby forming an integrally packaged soft or flexible force sensor. In specific implementation, taking a silica gel casting process as an example, the first sensing piece 31 and the second sensing piece 32 can be placed on a mold in advance, and the distance between the first sensing piece and the second sensing piece is adjusted to a first preset distance d1; then injecting molten silica gel into the mold and enabling the liquid level of the silica gel to meet a second preset distance d2; then the magnetic element 20 is placed between the first sensing element 31 and the second sensing element 32 (or the two sensing elements are symmetrically distributed on two sides of the magnetic element 20); finally, molten silica gel is again injected so as to cover the magnetic member 20 to a certain thickness (e.g., 1 mm). Thus, the package fixing of the magnetic member 20 and the two sensing members and the molding of the force sensor can be completed.
Example two
Referring to fig. 12 in combination with fig. 4, 6 and 7, a second embodiment provides a force sensor, such as a one-dimensional load cell; the force sensor differs from the first embodiment in that: a sensing element (for ease of description, this sensing element is defined as a third sensing element and is designated 33) is disposed within the elastomer 10.
The third sensing element 33 is disposed in the elastic body 10 and is disposed opposite to the magnetic element 20 with a second preset distance d 2. Thus, by utilizing the elastic deformation characteristic of the elastic body 10, the sensing measurement of the positive pressure Fz can be realized under the cooperation of the magnetic element 20 and the third sensing element 33; for specific sensing principle, reference may be made to the method for measuring and analyzing positive pressure Fz in the first embodiment, which is not described herein.
Example III
Referring to fig. 13, a force measuring device is provided in a third embodiment, which includes a control module a, a force sensor B, a power module C, and other components according to needs; the force sensor B is the force sensor in the first embodiment or the second embodiment; the control module A can adopt a system composed of a processor, a computer or related functional devices with data analysis and processing capabilities, and the power supply module C is mainly used for a power supply device for supplying power to the sensing piece; the control module A is utilized to receive (or acquire) the induction electric signals output by the induction piece, and the acquired induction electric signals are analyzed and calculated, so that external force information acting on the force sensor (particularly the elastic body 10) can be obtained, and one-dimensional force measurement or two-dimensional force measurement is realized. The specific analysis and calculation method of the control module a can refer to the method adopted in the first embodiment for analyzing the sensing principle of the force sensor, which is not described herein.
Example IV
The fourth embodiment provides an end effector, such as a mechanical finger, a man-machine interaction device, a robot bone, etc., which includes a body and the force measuring device of the third embodiment; the second surface of the elastic body 10 may be fixed on the surface of the body by means of adhesion, clamping, etc.; on one hand, the force sensor can adapt to the surface morphology of the body by utilizing the characteristics of light and soft property, strong adaptability, strong interactivity and the like of the force sensor; on the other hand, the sensing capability of the end effector to external force can be improved, so that corresponding functional actions can be executed. In specific implementation, the plurality of force sensors can be arranged at different sensing positions on the body of the end effector, and the sensing electric signals output by the plurality of force sensors are analyzed and calculated by the control module A, so that a sensing system similar to a neural network can be constructed on the end effector.
The foregoing description of the invention has been presented for purposes of illustration and description, and is not intended to be limiting. Several simple deductions, modifications or substitutions may also be made by a person skilled in the art to which the invention pertains, based on the idea of the invention.

Claims (7)

1. The force measuring device is characterized by comprising a force sensor and a control module, wherein the force sensor comprises an elastic body, and a magnetic piece and two induction pieces which are matched in an aligned manner; wherein:
the magnetic piece is arranged in the elastic body and positioned on a first preset plane, and the magnetic piece is used for forming a magnetic field;
the induction piece is used for detecting a magnetic field so as to output an induction electric signal; the two sensing pieces are arranged in the elastic body at intervals and positioned on a second preset plane, and projections of the two sensing pieces on the first preset plane are symmetrically distributed on two sides of the magnetic piece; the first preset plane and the second preset plane are arranged at intervals in parallel;
the elastic body is used for bearing and transmitting external force, and can deform under the action of the external force, so that the magnetic piece and the induction piece are close to each other or far away from each other, and the magnetic field position of the induction piece is changed;
the control module is respectively connected with the two sensing pieces and is used for acquiring the induction electric signals respectively output by the two sensing pieces and analyzing and calculating the acquired induction electric signals to obtain external force information acting on the elastic body so as to realize two-dimensional force measurement; the external force information includes component force information of the external force in two different directions.
2. Force measuring device according to claim 1, characterized in that the sensor element is a hall sensor.
3. Force measuring device according to claim 1, characterized in that the elastomer is integrally cast or injection molded from a soft elastomer material to enable the magnetic and inductive elements to be secured in the elastomer.
4. A force measuring device according to claim 3, wherein the elastomer is made of a silicone material.
5. Force measuring device according to claim 1, wherein the magnetic element is a permanent magnet alloy or a permanent magnet ferrite.
6. The force measuring device of claim 1, wherein the elastomer body has opposing first and second surfaces, the first surface for receiving and transmitting an external force, the second surface for securing the elastomer body in a predetermined position, the magnetic member disposed within the elastomer body adjacent the first surface, and the sensing member disposed within the elastomer body adjacent the second surface.
7. An end effector comprising a body and a force measuring device according to any one of claims 1 to 6, wherein the elastomer is fixedly arranged on a surface of the body.
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