CN114353711A - Method for establishing reference for three-coordinate detection of Roots rotor - Google Patents

Method for establishing reference for three-coordinate detection of Roots rotor Download PDF

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Publication number
CN114353711A
CN114353711A CN202210016489.6A CN202210016489A CN114353711A CN 114353711 A CN114353711 A CN 114353711A CN 202210016489 A CN202210016489 A CN 202210016489A CN 114353711 A CN114353711 A CN 114353711A
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China
Prior art keywords
roots rotor
coordinate
theoretical
point coordinates
actual
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CN202210016489.6A
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Chinese (zh)
Inventor
侯亚旅
李辉
沈文武
周贤忠
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Sichuan Leicester Vacuum Technology Co ltd
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Sichuan Leicester Vacuum Technology Co ltd
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Priority to CN202210016489.6A priority Critical patent/CN114353711A/en
Publication of CN114353711A publication Critical patent/CN114353711A/en
Pending legal-status Critical Current

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Abstract

The embodiment of the invention provides a method for establishing a reference for three-coordinate detection of a Roots rotor, and relates to the technical field of vacuum pumps. The method for establishing the reference for the three-coordinate detection of the Roots rotor comprises the following steps: collecting theoretical point coordinates on a theoretical model of the Roots rotor; determining actual point coordinates on the Roots rotor corresponding to the theoretical point coordinates; calculating the rotation quantity required by the coincidence of the actual point coordinates and the theoretical point coordinates; and rotating the theoretical point coordinates according to the rotation quantity to form a detection reference of the Roots rotor. The method does not need to adopt a notch surface of the Roots rotor to establish a detection reference, can reduce detection errors, can reflect the processing quality of the Roots rotor more accurately by utilizing the detection reference determined by the method, has wide application range, and is suitable for all types of Roots rotors and rotors with partial Roots characteristics.

Description

Method for establishing reference for three-coordinate detection of Roots rotor
Technical Field
The invention relates to the technical field of vacuum pumps, in particular to a method for establishing a reference for three-coordinate detection of a Roots rotor.
Background
With the development of economy, the progress of society and the rise of the photovoltaic semiconductor industry, higher requirements are put forward on the processing and manufacturing of matched vacuum equipment. The roots rotor of the existing dry vacuum pump has various structures and high machining precision requirement, and provides higher requirement for quality control, especially size detection.
Because the roots rotor has higher requirements on profile and position of the line, the three-coordinate measuring machine is required to be used for detecting the line, and when the three-coordinate measuring machine detects the roots line of the parts, because the roots part does not have the plane characteristic for positioning, the notch surface of the roots rotor is mostly adopted to establish a detection reference, but the detection has the following defects:
1. if the rotor is vertically detected, the chuck is used for clamping the intermediate shaft, the gap surface is blocked, and a detection reference cannot be established;
2. if the rotor is detected horizontally, the side face of the rotor close to the three-coordinate platform cannot be detected because the measuring head is above the rotor, and the rotor needs to be turned over to be detected;
3. the width of the notch surface is too small compared with the width of the part itself, and if there is a small angle deviation due to the processing of the notch surface, the coordinate system direction will be extended to the wrong direction due to the extension error.
Disclosure of Invention
The invention aims to provide a method for establishing a reference for three-coordinate detection of a Roots rotor, which can enable a detection result to reflect the real condition of the rotor more truly.
Embodiments of the invention may be implemented as follows:
the invention provides a method for establishing a reference for three-coordinate detection of a Roots rotor, which comprises the following steps:
collecting theoretical point coordinates on a theoretical model of the Roots rotor;
determining actual point coordinates on the Roots rotor corresponding to the theoretical point coordinates;
calculating the rotation quantity required by the coincidence of the actual point coordinates and the theoretical point coordinates;
and rotating the theoretical point coordinates according to the rotation quantity to form a detection reference of the Roots rotor.
In an alternative embodiment, the step of collecting the theoretical point coordinates on the theoretical model of the roots rotor comprises:
determining an acquisition area on a theoretical model of the Roots rotor;
and collecting the coordinates of the theoretical points in the collection area.
In an alternative embodiment, the acquisition region comprises a frontal profile portion, a lateral profile portion or a full profile portion.
In an alternative embodiment, the theoretical point coordinates are cross-sectional coordinates of a theoretical model of the roots rotor.
In an alternative embodiment, before the step of determining the actual point coordinates on the roots rotor corresponding to the theoretical point coordinates, the method for establishing the reference for three-coordinate detection of the roots rotor further comprises the following steps:
and vertically clamping the Roots rotor.
In an alternative embodiment, the step of calculating the rotation amount required for the actual point coordinates to coincide with the theoretical point coordinates comprises:
presetting a maximum allowable deviation value of the coincidence of the actual point coordinate and the theoretical point coordinate;
judging whether the actual deviation value after the actual point coordinate and the theoretical point coordinate are overlapped to the maximum extent is larger than the maximum allowable deviation value or not;
judging that the fitting fails under the condition that the actual deviation value is larger than the maximum allowable deviation value, and re-collecting the coordinates of the theoretical points;
and under the condition that the actual deviation value is less than or equal to the maximum allowable deviation value, judging that the fitting is successful, and determining the rotation amount required by the superposition of the actual point coordinate and the theoretical point coordinate.
In an alternative embodiment, in the case that the actual deviation value is less than or equal to the maximum allowable deviation value, the fitting is determined to be successful, and the step of determining the rotation amount required for the actual point coordinate to coincide with the theoretical point coordinate includes:
and under the condition that the actual deviation values are smaller than or equal to the maximum allowable deviation value, judging that the fitting is successful, and selecting the rotation quantity corresponding to the minimum actual deviation value.
In an alternative embodiment, the step of rotating the theoretical point coordinates by the rotation amount to form a detection reference of the roots rotor includes:
and rotating the theoretical point coordinate corresponding to the minimum actual deviation value according to the rotation quantity to form a detection reference of the Roots rotor.
In an alternative embodiment, the step of calculating the rotation amount required for the actual point coordinates to coincide with the theoretical point coordinates comprises:
and calculating the rotation amount required by the maximum coincidence of the actual point coordinate and the theoretical point coordinate by utilizing the fitting function of the three-coordinate software.
In an alternative embodiment, the step of collecting the theoretical point coordinates on the theoretical model of the roots rotor comprises:
leading the theoretical model of the Roots rotor into a three-coordinate measuring machine;
theoretical point coordinates were collected on a theoretical model using a three-coordinate measuring machine.
The method for establishing the reference for the three-coordinate detection of the Roots rotor provided by the embodiment of the invention has the beneficial effects that:
1. the method has wide application range, and is suitable for all types of Roots rotors and rotors with partial Roots characteristics;
2. the detection reference is established without adopting a notch surface of the Roots rotor, the theoretical point coordinates are collected on a theoretical model of the Roots rotor and are rotated according to the rotation amount to form the detection reference of the Roots rotor, and the detection error can be reduced;
3. the detection reference determined by the method can reflect the processing quality of the Roots rotor more accurately;
4. after the Roots rotor is vertically clamped, the detection of the contour line can be completed at one time, the rotor does not need to be turned over for secondary detection, and the detection efficiency is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a flow chart of a method for establishing a reference for three-coordinate Roots rotor inspection according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of fitting actual point coordinates to theoretical point coordinates.
Icon: 100-theoretical profile; 200-actual profile.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. indicate an orientation or a positional relationship based on that shown in the drawings or that the product of the present invention is used as it is, this is only for convenience of description and simplification of the description, and it does not indicate or imply that the device or the element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.
Furthermore, the appearances of the terms "first," "second," and the like, if any, are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.
Referring to fig. 1, the present embodiment provides a method for establishing a reference for three-coordinate detection of a roots rotor (hereinafter referred to as "method"), which includes the following steps:
s1: and acquiring theoretical point coordinates on a theoretical model of the Roots rotor.
Specifically, firstly, a theoretical model of the roots rotor is led into a three-coordinate measuring machine, an acquisition region is determined on the theoretical model of the roots rotor, the acquisition region comprises but is not limited to a certain direction of the roots type line, and can also comprise a front profile line part, a side profile line part or a full-circumference profile line part, comprises but is not limited to a certain level of roots type line part, and a plurality of levels of roots type lines can be selected and freely selected according to actual conditions; and then, acquiring the coordinates of the theoretical points in the acquisition region, specifically acquiring the coordinates of the theoretical points on a theoretical model by using a three-coordinate measuring machine, preferably, the coordinates of the theoretical points are the sectional coordinates of the theoretical model of the Roots rotor, so that the molded lines formed by sequentially connecting the sectional coordinates are arc-shaped lines, and compared with straight lines, the processed shape of the surface of the Roots rotor can be more comprehensively reflected.
Referring to fig. 2, a plurality of theoretical point coordinates are sequentially connected to form a theoretical line 100, and the theoretical line 100 is a contour line of a theoretical model surface.
S2: and determining the actual point coordinate on the Roots rotor corresponding to the theoretical point coordinate.
Specifically, firstly, the roots rotor is vertically clamped, and then, actual point coordinates corresponding to theoretical point coordinates are found out on the roots rotor.
The Roots rotor is vertically clamped, the detection reference can be established for the Roots rotor, the circumferential profile of the Roots rotor is directly and once detected, the Roots rotor does not need to be turned over for secondary detection, and the detection efficiency is improved.
Of course, in other embodiments, horizontal clamping can be adopted for the roots rotor, and the detection of the contour of the circumference of the roots rotor can also be realized.
Referring to fig. 2, the actual profile 200 is formed by sequentially connecting a plurality of actual point coordinates, and the actual profile 200 is a contour line of the surface of the roots rotor.
S3: and calculating the rotation quantity required by the coincidence of the actual point coordinates and the theoretical point coordinates.
Specifically, referring to fig. 2, the rotation amount required for the coincidence of the actual point coordinate and the theoretical point coordinate, that is, the rotation amount required for the coincidence of the actual profile 200 and the theoretical profile 100, may also be directly calculated.
And calculating the rotation amount required by the maximum coincidence of the actual point coordinate and the theoretical point coordinate by utilizing the fitting function of the three-coordinate software. The amount of rotation here includes at least one of the amount of translation and the amount of rotation, that is, rotating the actual point coordinates to coincide with the theoretical point coordinates may require only translation without rotation, only rotation without translation, limitation of direction rotation, or the like.
The specific process of calculating the rotation amount is as follows:
firstly, presetting the maximum allowable deviation value of the coincidence of the actual point coordinate and the theoretical point coordinate. Since, theoretically, there is no case where the actual point coordinates completely coincide with the theoretical point coordinates, the maximum allowable deviation value is preset.
And secondly, judging whether the actual deviation value after the actual point coordinate and the theoretical point coordinate are overlapped to the maximum extent is larger than the maximum allowable deviation value. The actual deviation value can be calculated by a least square method.
And under the condition that the actual deviation value is larger than the maximum allowable deviation value, judging that the fitting fails, and re-collecting the coordinates of the theoretical points. And under the condition that the actual deviation value is less than or equal to the maximum allowable deviation value, judging that the fitting is successful, and determining the rotation amount required by the superposition of the actual point coordinate and the theoretical point coordinate.
In other embodiments, S1 to S3 may be repeated to obtain rotation amounts required by overlapping different actual profiles 200 and theoretical profiles 100, and when a plurality of actual deviation values are smaller than or equal to the maximum allowable deviation value, it is determined that the fitting is successful, and the rotation amount corresponding to the minimum actual deviation value is selected.
S4: and rotating the theoretical point coordinates according to the rotation quantity to form a detection reference of the Roots rotor.
And rotating the theoretical point coordinate corresponding to the minimum actual deviation value according to the rotation quantity to form a detection reference of the Roots rotor. The machining precision of the surface of the Roots rotor is detected through the detection reference, so that the machining quality of the Roots rotor can be reflected more accurately.
The method for establishing the reference for the three-coordinate detection of the Roots rotor provided by the embodiment is not limited to use times, if the established reference for one time is not accurate enough, the method can be used for establishing the reference for multiple times, and the detection reference which is most approximate to the actual condition is selected and used for surface machining detection of the Roots rotor.
The method for establishing the reference for the three-coordinate detection of the Roots rotor provided by the embodiment has the beneficial effects that:
1. the method has wide application range, and is suitable for all types of Roots rotors and rotors with partial Roots characteristics, including single-stage Roots rotors and multi-stage Roots rotors, or two-lobe Roots rotors, three-lobe Roots rotors, four-lobe Roots rotors, five-lobe Roots rotors and the like;
2. the detection reference is established without adopting a notch surface of the Roots rotor, the theoretical point coordinates are collected on a theoretical model of the Roots rotor and are rotated according to the rotation amount to form the detection reference of the Roots rotor, and the detection error can be reduced;
3. the detection reference determined by the method can reflect the processing quality of the Roots rotor more accurately;
4. after the Roots rotor is vertically clamped, the detection of the contour line can be completed at one time, the rotor does not need to be turned over for secondary detection, and the detection efficiency is improved.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A reference establishing method for three-coordinate detection of a Roots rotor is characterized by comprising the following steps:
collecting theoretical point coordinates on a theoretical model of the Roots rotor;
determining actual point coordinates on the Roots rotor corresponding to the theoretical point coordinates;
calculating the rotation quantity required by the coincidence of the actual point coordinates and the theoretical point coordinates;
and rotating the theoretical point coordinates according to the rotation quantity to form a detection reference of the Roots rotor.
2. The roots rotor three-coordinate inspection benchmarking method of claim 1, wherein the step of collecting theoretical point coordinates on a theoretical model of roots rotor comprises:
determining a collection area on the theoretical model of the Roots rotor;
and collecting the theoretical point coordinates in the collection area.
3. A roots rotor three coordinate inspection datum method according to claim 2 wherein the collection area includes a positive profile portion, a lateral profile portion or a full profile portion.
4. The roots rotor three-coordinate inspection benchmarking method of claim 1, wherein the theoretical point coordinates are cross-sectional coordinates of the theoretical model of the roots rotor.
5. The roots rotor three-coordinate measuring and establishing reference method as claimed in claim 1, wherein before the step of determining actual point coordinates on the roots rotor corresponding to the theoretical point coordinates, the roots rotor three-coordinate measuring and establishing reference method further comprises:
and vertically clamping the Roots rotor.
6. A roots rotor three coordinate detection datum method as claimed in claim 1 wherein the step of calculating the rotation required to bring the actual point coordinates into coincidence with the theoretical point coordinates includes:
presetting a maximum allowable deviation value of the coincidence of the actual point coordinate and the theoretical point coordinate;
judging whether the actual deviation value after the actual point coordinate and the theoretical point coordinate are overlapped to the maximum extent is larger than the maximum allowable deviation value or not;
judging that the fitting fails under the condition that the actual deviation value is larger than the maximum allowable deviation value, and re-collecting the theoretical point coordinates;
and under the condition that the actual deviation value is smaller than or equal to the maximum allowable deviation value, judging that the fitting is successful, and determining the rotation amount required by the coincidence of the actual point coordinate and the theoretical point coordinate.
7. A Roots rotor three coordinate detection datum method according to claim 6, wherein in the event that the actual deviation value is less than or equal to the maximum allowed deviation value, a successful fitting is determined and the step of determining the rotation required for the actual point coordinates to coincide with the theoretical point coordinates comprises:
and when the actual deviation values are smaller than or equal to the maximum allowable deviation value, judging that the fitting is successful, and selecting the rotation amount corresponding to the minimum actual deviation value.
8. The roots rotor three-coordinate detection datum method according to claim 7, wherein the step of rotating the theoretical point coordinate by the rotation amount to form a detection datum of the roots rotor comprises the steps of:
and rotating the theoretical point coordinate corresponding to the minimum actual deviation value according to the rotation amount to form the detection reference of the Roots rotor.
9. A roots rotor three coordinate detection datum method as claimed in claim 1 wherein the step of calculating the rotation required to bring the actual point coordinates into coincidence with the theoretical point coordinates includes:
and calculating the rotation amount required by the maximum coincidence of the actual point coordinate and the theoretical point coordinate by utilizing the fitting function of three-coordinate software.
10. The roots rotor three-coordinate inspection benchmarking method of claim 1, wherein the step of collecting theoretical point coordinates on a theoretical model of roots rotor comprises:
leading the theoretical model of the Roots rotor into a three-coordinate measuring machine;
and collecting the coordinates of the theoretical point on the theoretical model by using the three-coordinate measuring machine.
CN202210016489.6A 2022-01-07 2022-01-07 Method for establishing reference for three-coordinate detection of Roots rotor Pending CN114353711A (en)

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CN202210016489.6A CN114353711A (en) 2022-01-07 2022-01-07 Method for establishing reference for three-coordinate detection of Roots rotor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210016489.6A CN114353711A (en) 2022-01-07 2022-01-07 Method for establishing reference for three-coordinate detection of Roots rotor

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102147221A (en) * 2010-11-20 2011-08-10 无锡透平叶片有限公司 Three-coordinate measuring method of blade with T-shaped root
CN105606020A (en) * 2014-11-10 2016-05-25 中国科学院沈阳科学仪器股份有限公司 Quick detection system and quick detection method for Roots dry pump rotors
JP6917096B1 (en) * 2020-12-25 2021-08-11 リンクウィズ株式会社 Information processing method, information processing system, program

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102147221A (en) * 2010-11-20 2011-08-10 无锡透平叶片有限公司 Three-coordinate measuring method of blade with T-shaped root
CN105606020A (en) * 2014-11-10 2016-05-25 中国科学院沈阳科学仪器股份有限公司 Quick detection system and quick detection method for Roots dry pump rotors
JP6917096B1 (en) * 2020-12-25 2021-08-11 リンクウィズ株式会社 Information processing method, information processing system, program

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
高国防;武太文;杨登;: "便携式测量机在曲面件在机测量中的应用", 制造技术与机床, no. 05 *

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