CN114351108A - Glass substrate angle adjusting device for large-area vacuum coating - Google Patents

Glass substrate angle adjusting device for large-area vacuum coating Download PDF

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Publication number
CN114351108A
CN114351108A CN202210048058.8A CN202210048058A CN114351108A CN 114351108 A CN114351108 A CN 114351108A CN 202210048058 A CN202210048058 A CN 202210048058A CN 114351108 A CN114351108 A CN 114351108A
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Prior art keywords
guide rail
plate
seat
fixed
roller mechanism
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CN202210048058.8A
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CN114351108B (en
Inventor
祝海生
胡聪芳
彭涛
陈立
凌云
唐莲
金诚明
黄乐
李俊杰
孙桂红
梁红
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Xiangtan Hongda Vacuum Technology Co ltd
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Xiangtan Hongda Vacuum Technology Co ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention relates to the technical field of vacuum coating, in particular to a glass substrate angle adjusting device for large-area vacuum coating, which comprises a bottom plate, a base, a rear wall and a top plate, wherein the base is arranged on the lower surface of the bottom plate and used for supporting the whole glass substrate angle adjusting device; the top screw guide rail mechanism is fixed on the top plate, and an upper roller mechanism is fixed on the surface of the top screw guide rail mechanism; the substrate is fixed between the upper wheel roller mechanism and the lower wheel roller mechanism; the rear wall screw rod guide rail mechanism and the top screw rod guide rail mechanism enable the upper wheel roller mechanism and the lower wheel roller mechanism to perform angle adjustment according to a preset stroke ratio.

Description

Glass substrate angle adjusting device for large-area vacuum coating
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a glass substrate angle adjusting device for large-area vacuum coating.
Background
The vacuum coating technology is a novel technology for synthesizing and processing novel materials, is an important component in the technical field of surface engineering, and is widely applied to the industries of electronics, aerospace, packaging, decoration, gold stamping printing and the like. The vacuum coating technology is to coat a layer of coating with special performance on the solid surface by physical and chemical means, so that the solid surface has many superior performances superior to the solid material in terms of wear resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation protection, electric conduction, magnetic conduction, insulation and decorative lamp, and the effects of improving the product quality, prolonging the product life, saving energy and obtaining remarkable technical and economic benefits are achieved. The material to be coated is called a substrate and the material to be coated is called a target.
With the rapid development of modern science and technology, the usage amount of transparent conductive glass is continuously increased, in order to improve the production efficiency of conductive glass, the generation line of the transparent conductive glass (namely the size of a glass substrate) is continuously updated, the generation line of the transparent conductive glass is developed to 11 generation lines at present, the size of the substrate is continuously increased, but the substrate frame still adopts the original installation mode of two-side wrapping or four-side wrapping, and the installation mode can cause the problems that the material cost is increased, the substrate cannot stably run due to uneven stress and the like. In the face of the problem of increasing substrate area, US8393460B2 adopts a method of inclining the substrate holder by 15 degrees to hold and transport the substrate. The fixed 15 degrees can only adapt to certain specific conditions, and when the size of the substrate or the coating requirement is changed, the angle cannot be adjusted to meet the design requirement. According to the glass substrate angle adjusting device for large-area vacuum coating, the angle of the substrate can be adjusted while the substrate frame is inclined to meet the installation requirement of the large-area substrate, the requirements of different coating working conditions are met, the substrate can be prevented from forward overturning at a proper substrate angle, and the instability of the movement of the substrate is reduced.
Disclosure of Invention
In order to reduce the installation cost of a large-area glass substrate and the instability of the movement of the substrate, the invention provides a large-area vacuum coating glass substrate angle adjusting device which is used for solving the problems in the background technology.
In order to achieve the purpose, the invention adopts the following technical scheme:
a glass substrate angle adjusting device for large-area vacuum coating comprises a frame body, at least one rear wall screw rod guide rail mechanism and at least one top screw rod guide rail mechanism; the frame body comprises a bottom plate, a base arranged on the lower surface of the bottom plate and used for supporting the whole glass substrate angle adjusting device, a rear wall fixed on the bottom plate, and a top plate fixed on the rear wall, wherein the bottom plate, the rear wall and the top plate form an opening shape; the glass substrate angle adjusting device also comprises a hinged seat arranged on the bottom plate, a swinging shaft connected to the hinged seat through a pin shaft, and a supporting seat fixed on the upper end surface of the swinging shaft, wherein a lower wheel roller mechanism and a pre-tightening mechanism which is contacted with the lower wheel roller mechanism through the front end so as to apply pre-tightening force to the lower wheel roller mechanism are arranged on the upper surface of the supporting seat; a connecting plate is fixedly arranged on the end face of one side of the supporting seat, a hinge seat is fixedly arranged on the connecting plate, and the hinge seat is connected with one end of a connecting rod; the other end of the connecting rod is connected with the rear wall screw rod guide rail mechanism; the top screw guide rail mechanism is fixed on the top plate, and an upper roller mechanism is fixed on the surface of the top screw guide rail mechanism; the substrate is fixed between the upper wheel roller mechanism and the lower wheel roller mechanism; the rear wall screw rod guide rail mechanism and the top screw rod guide rail mechanism enable the upper wheel roller mechanism and the lower wheel roller mechanism to perform angle adjustment according to a preset stroke ratio.
As a preferred scheme of the present invention, the lower roller mechanism includes a front lower roller, a link, a rear lower roller, and a link, wherein the front lower roller and the rear lower roller are disposed on two sides of the substrate for clamping the substrate, the link is mounted between the rear lower roller and the support base for supporting the lower roller, the link is fixed to a lower end surface of the front lower roller and is connected to a pre-tightening seat on the support base by a pin, and the upper roller mechanism and the lower roller mechanism perform angle adjustment in a certain manner, so as to keep an axis of the upper roller mechanism and an axis of the lower roller on the same line.
As a preferred scheme of the invention, the lower wheel roller mechanism comprises a connecting shaft, the lower end of the connecting shaft is welded with the upper surface of the supporting seat on the swinging shaft, the other end of the connecting shaft is connected with the lower wheel roller at the rear end, one side of the lower wheel roller at the rear end is contacted with the back surface of the substrate, the other side of the substrate is contacted with the lower wheel roller at the front end, the lower wheel roller at the front end is arranged on a connecting frame, and the connecting frame is connected with a hinged seat at the lower part of the connecting frame through a pin shaft. Different pretightening forces can be applied to the substrate by adjusting the pretightening bolts, and meanwhile, the lower wheel roller mechanism can play a certain role in fixing the substrate, so that the movement stability of the substrate is improved.
As a preferred scheme of the invention, the rear wall lead screw guide rail mechanism comprises an installation plate, a guide rail is arranged on the installation plate, a slide block is arranged on the guide rail, a slide plate is arranged on the slide block, a hinge seat is arranged on the slide plate through a fixed pin, and the hinge seat is connected with a connecting rod through a pin shaft;
the motor arranged on the mounting plate is connected with the screw rod through the coupler, the near end of the screw rod close to the motor is provided with a fixed supporting seat and a buffer cushion, and the far end of the screw rod is provided with a supporting seat for supporting the screw rod; the guide rail is installed on the installation plate through a bolt, the sliding block slides along the guide rail, the lead screw is driven to rotate through the motor so as to drive the lead screw nut and the sliding plate installed on the lead screw nut to move longitudinally, and the movement of the sliding plate is controlled by controlling the rotation of the lead screw so as to control the movement of the connecting rod.
According to a preferable scheme of the invention, the top screw guide rail mechanism comprises an installation plate, a guide rail is arranged on the installation plate, a sliding block is arranged on the guide rail, a sliding plate is arranged on the sliding block, a hinge seat is arranged on the sliding plate through a fixed pin, and the hinge seat is connected with an upper roller mechanism through a pin shaft;
the motor arranged on the mounting plate is connected with the screw rod through the coupler, the near end of the screw rod close to the motor is provided with a fixed supporting seat and a buffer cushion, and the far end of the screw rod is provided with a supporting seat for supporting the screw rod; the guide rail is installed on the installation plate through a bolt, the sliding block slides along the guide rail, the lead screw is driven to rotate through the motor so as to drive the lead screw nut and the sliding plate installed on the lead screw nut to move back and forth, and the sliding plate is controlled to move by controlling the rotation of the lead screw so as to control the back and forth movement of the upper roller mechanism.
As a preferred scheme of the invention, the pre-tightening mechanism comprises a fixed seat and a pre-tightening bolt in threaded connection with the fixed seat, the end part of the pre-tightening bolt abuts against the connecting frame, and the connecting frame rotates around the pin shaft by adjusting the pre-tightening bolt so as to pre-tighten the substrates with different sizes.
In a preferred embodiment of the present invention, the swing shaft is a cylinder arm or a hydraulic arm with adjustable length.
The invention has the beneficial effects that:
1. through controlling the rear wall and the top lead screw guide rail mechanism simultaneously, the upper and lower rollers can move simultaneously, the upper roller mechanism and the lower roller mechanism are matched to move and rotate, the upper and lower roller mechanisms are matched to move so as to ensure the angle adjustment, and the axis of the upper roller mechanism and the axis of the rear end lower roller mechanism are on the same line when the angle adjustment is carried out, so that the stability of substrate installation is improved, and the angle adjustment of the substrate installed between the upper and lower roller mechanisms is completed.
2. Different pretightening forces are applied to the substrate by adjusting the pretightening bolts, and meanwhile, the lower wheel roller mechanism can play a certain role in fixing the substrate, so that the movement stability of the substrate is improved.
3. The upper wheel roller mechanism is arranged on the hinged seat of the top screw rod guide rail mechanism through a pin shaft, the front-end lower wheel roller is arranged on the connecting frame, and the connecting frame is connected with the hinged seat on the lower portion of the connecting frame through a pin shaft, so that the upper wheel roller mechanism can adapt to substrates of different sizes, and the application range is greatly enlarged.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments of the present invention will be briefly described below. It is obvious that the drawings described below are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
FIG. 1 is a schematic axial view of the overall structure of the present invention.
Fig. 2 is a front view of the overall structure of the present invention.
Fig. 3 is a broken left side view of the adjustment device of the present invention.
Fig. 4 is a schematic structural view of the rear wall screw guide mechanism.
Fig. 5 is a schematic structural view of a top lead screw rail mechanism.
In the figure: the device comprises a base plate 1, a base 2, a hinged base 301, a fixed pin 4, a pin 5, a swinging shaft 6, a supporting base 7, a pre-tightening mechanism 8, a pin 9, a lower roller mechanism 10, a connecting plate 11, a hinged base 12, a pin 13, a connecting rod 14, a pin 15, a substrate 16, an upper roller mechanism 17, a pin 18, a rear wall 19, a top plate 20, a rear wall 21, a lead screw guide rail mechanism 22 and a top lead screw guide rail mechanism.
Detailed Description
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
Wherein the showings are for the purpose of illustration only and are shown by way of illustration only and not in actual form, and are not to be construed as limiting the present patent; to better illustrate the embodiments of the present invention, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
In a first embodiment, as shown in fig. 1 to 5, an angle adjusting device for a large-area vacuum coated glass substrate comprises a frame, at least a rear wall lead screw guide rail mechanism 21 and at least a top lead screw guide rail mechanism 22; the frame body comprises a bottom plate 1, a base 2 arranged on the lower surface of the bottom plate 1 and used for supporting the whole glass substrate angle adjusting device, a rear wall 19 fixed on the bottom plate 1, and a top plate 20 fixed on the rear wall 19, wherein the bottom plate 1, the rear wall 19 and the top plate 20 form an opening shape.
Further, the glass substrate angle adjusting device further comprises a hinged seat 301 arranged on the bottom plate 1, a swinging shaft 6 connected to the hinged seat 301 through a pin shaft 5, and a supporting seat 7 fixed on the upper end face of the swinging shaft 6, wherein a lower wheel roller mechanism 10 and a pre-tightening mechanism 8 which is contacted with the lower wheel roller mechanism 10 through the front end to apply pre-tightening force to the lower wheel roller mechanism 10 are arranged on the upper surface of the supporting seat 7; the supporting seat is characterized in that a connecting plate 11 is fixedly mounted on the end face of one side of the supporting seat 7, a hinged seat 12 is fixedly mounted on the connecting plate 11, and the hinged seat 12 is connected with one end of a connecting rod 14.
And the other end of the connecting rod 14 is connected with the rear wall screw guide rail mechanism 21. And the top screw guide rail mechanism 22 is fixed on the top plate 20, and the upper roller mechanism 17 is fixed on the surface of the top screw guide rail mechanism 22.
And the substrate 16 is fixed between the upper wheel roller mechanism 17 and the lower wheel roller mechanism 10.
Further, the lower roller mechanism 10 includes a front lower roller 1001, a connecting frame 1002, a rear lower roller 1003 and a connecting shaft 1004, wherein the front lower roller 1001 and the rear lower roller 1003 are disposed on two sides of the substrate 16 for clamping the substrate 16, the connecting shaft 1004 is mounted between the rear lower roller 1003 and the supporting seat 7 for supporting the lower roller 1003, the connecting frame 1002 is fixed on a lower end surface of the front lower roller 1001 and is connected to the pre-tightening seat 302 on the supporting seat 7 through a pin 9, the rear lead screw guide rail mechanism 21 includes a mounting plate 2114, a guide rail 2111 is mounted on the mounting plate 2114, a slider 2112 is mounted on the guide rail 2111, a sliding plate 2110 is mounted on the slider 2112, a hinge seat 2108 is mounted on the sliding plate 2110 through a fixing pin 2107, and the hinge seat 2108 is connected to the connecting rod 14 through a pin 15.
The motor 2101 arranged on the mounting plate 2114 is connected with the lead screw 2105 through a coupler 2102, a fixed support 2103 and a buffer cushion 2104 are arranged on the near end of the lead screw 2105 close to the motor 2101, and a support 2109 is arranged on the far end of the lead screw 2105 and used for supporting the lead screw 2105; the guide rail 2111 is mounted on a mounting plate 2114 through a bolt 2113, the slider 2112 slides along the guide rail, the lead screw 2105 is driven to rotate through the motor 2101, the lead screw nut 2106 and the sliding plate 2110 mounted on the lead screw nut are driven to move longitudinally, and the movement of the sliding plate 2110 and the movement of the connecting rod 14 are controlled by controlling the rotation of the lead screw 2105.
Further, the top lead screw guide rail mechanism 22 comprises a mounting plate 2214, a guide rail 2211 is mounted on the mounting plate 2214, a sliding block 2212 is mounted on the guide rail 2211, a sliding plate 2210 is mounted on the sliding block 2212, a hinge seat 2208 is mounted on the sliding plate 2210 through a fixing pin 2207, and the hinge seat 2208 is connected with the upper roller mechanism 17 through a pin 18.
Preferably, the motor 2201 mounted on the mounting plate 2214 is connected with the screw 2205 through a coupler 2202, a fixed support seat 2203 and a buffer pad 2204 are mounted on the proximal end of the screw 2205 close to the motor 2101, and a support seat 2209 is mounted on the distal end for supporting the screw 2205; the guide 2211 is mounted on a mounting plate 2214 through a bolt 2213, a slider 2212 slides along the guide, a lead screw 2205 is driven to rotate by a motor 2201 so as to drive a lead screw nut 2206 and a sliding plate 2210 mounted on the lead screw nut 2206 to move back and forth, and the movement of the sliding plate 2210 and the back and forth movement of the upper roller mechanism 17 are controlled by controlling the rotation of the lead screw 2205.
Preferably, the pre-tightening mechanism 8 comprises a fixed seat 802 and a pre-tightening bolt 801 in threaded connection with the fixed seat 802, an end of the pre-tightening bolt 801 abuts against the connecting frame 1002, and the connecting frame 1002 rotates around the pin shaft 9 by adjusting the pre-tightening bolt 801 to achieve pre-tightening of the substrates 16 with different sizes.
Preferably, the swing shaft 6 is a cylinder arm or a hydraulic arm with adjustable length.
Example two
As shown in fig. 1 to 5, a large-area vacuum coated glass substrate angle adjusting device comprises a frame body, at least one rear wall lead screw guide rail mechanism 21 and at least one top lead screw guide rail mechanism 22; the frame body comprises a bottom plate 1, a base 2 arranged on the lower surface of the bottom plate 1 and used for supporting the whole glass substrate angle adjusting device, a rear wall 19 fixed on the bottom plate 1, and a top plate 20 fixed on the rear wall 19, wherein the bottom plate 1, the rear wall 19 and the top plate 20 form an opening shape. The hinge base 301 is installed on the bottom plate 1 through a fixing pin, the hinge base 301 is connected with the swing shaft 6 installed above the hinge base through a pin shaft 5, the supporting base 7 is installed on the upper surface of the swing shaft 6, the connecting plate 11 is installed at the left end of the supporting base 7, the connecting plate 11 is connected with the hinge base 12 through a fixing pin, and the hinge base 12 is connected with the connecting rod 14 through a pin shaft 13. The rear wall is provided with a rear wall screw rod guide rail mechanism 21, the motor 2101 is connected with a screw rod 2105 through a coupling 2102, the near end of the screw rod 2105 close to the motor 2101 is a fixed end, a fixed support base 2103 and a buffer cushion 2104 are arranged, and the far end is a support end and is provided with a support base 2109. The guide 2111 is mounted on a mounting plate 2114 by a bolt 2113, and a slider 2112 thereon is slidable along the guide, and a slide plate is mounted on the slider 2112. The lead screw 2105 is driven to rotate by the motor 2101, and then the lead screw nut 2106 and the sliding plate 2110 mounted thereon are driven to move longitudinally. A hinge base 2108 is attached to the slide plate 2110 by a fixing pin 2107, and the hinge base 2108 is connected to the connecting rod 14 by a pin 15.
When the sliding plate 2110 moves longitudinally, the connecting rod 14 is driven to move and rotate, and finally the swing shaft 6 and the supporting base 7 and other structures mounted on the supporting base 7 are driven to swing around the hinge base 301, and the pre-tightening base 302 is fixed on the supporting base 7. A pre-tightening mechanism 8 and a lower wheel roller mechanism 10 are arranged on the supporting seat 7, the lower wheel roller mechanism comprises a connecting frame 1002, the connecting frame 1002 is arranged on the pre-tightening seat 302, and a front lower wheel roller 1001 is arranged on the connecting frame and is contacted with the front surface of the substrate 16; the support base 7 is further provided with a connecting shaft 1004, and the connecting shaft 1004 is provided with a rear lower roller 1003 which contacts with the rear surface of the substrate. The pre-tightening mechanism 8 comprises a fixed seat 802 and a pre-tightening bolt 801, and the pre-tightening bolt 801 abuts against the pre-tightening seat 302 to provide pre-tightening force for fixing the substrate. The lower roller mechanism 10 and the pre-tightening mechanism 8 can be matched with an upper roller mechanism 17 arranged on a top lead screw guide rail mechanism 22 to provide clamping force and pre-tightening force required by the substrate. The top lead screw guide mechanism 22 can provide displacement of the upper roller mechanism 17 in the swing direction of the swing shaft, and by setting the stroke ratio of the two lead screw slider mechanisms, the rear wall lead screw guide mechanism 21 and the top lead screw guide mechanism 22 enable the upper roller mechanism 17 and the lower roller mechanism 10 to perform angle adjustment in a determined angle ratio, and can ensure that the axis of the upper roller mechanism 17 and the axis of the lower roller 1003 are on the same line when the angle adjustment is performed, thereby improving the stability of substrate installation.
The top screw guide rail mechanism 22 comprises a mounting plate 2214, a guide rail 2211 is mounted on the upper end surface of the mounting plate 2214, a sliding block 2212 is mounted on the guide rail 2211 through a bolt 2213, a sliding plate 2210 is mounted on the sliding block 2212, a hinge seat 2208 is mounted on the sliding plate 2210 through a fixing pin 2207, and the hinge seat 2208 is connected with the upper roller mechanism 17 through a pin 18. A stepping motor 2201 is installed on one side of the installation plate 2214, the stepping motor 2201 is connected with a screw 2205 through a coupler 2202, a fixed support seat 2203, a support seat 2209 and a buffer pad 2204 are installed at two ends of the screw 2205 respectively, a screw nut 2206 is further installed on the screw 2205, the screw nut 2206 is connected with a sliding plate 2210, and the movement of the sliding plate 2210 is controlled by controlling the rotation of the screw 2205, so that the back and forth movement of the upper roller mechanism 17 is controlled. The movement of the sliding plate on the screw rod guide rail mechanism is controlled by adjusting the motors of the top and rear wall screw rod guide rail mechanisms, so that the upper roller mechanism 17 and the lower roller mechanism 10 are matched to move and rotate, and the angle adjustment of the substrate arranged between the upper roller mechanism and the lower roller mechanism is completed.
When the substrate angle is to be adjusted, the steps are as follows:
the method comprises the following steps: starting the top lead screw guide rail mechanism 22 and the rear wall lead screw guide rail mechanism 21 to enable the upper wheel roller mechanism 17 and the lower wheel roller mechanism 10 to deviate to the positions suitable for installing the substrate;
step two: installing the substrate 16 between the rollers, adjusting the pre-tightening mechanism 8 and pre-tightening the substrate 16 by using a pre-tightening bolt 801 to abut against the connecting frame 1002;
step three: the rear wall lead screw guide mechanism 21 and the top lead screw guide mechanism 22 make the upper roller mechanism 17 and the lower roller mechanism 10 perform the adjustment at a certain angle at a preset stroke ratio.
In the description herein, references to the description of the terms "embodiment," "example," "specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. In the present specification, the directional terms such as "front", "rear", "upper", "lower", etc. are added for convenience of description, and do not limit the present invention.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.

Claims (6)

1. A glass substrate angle adjusting device for large-area vacuum coating comprises a frame body, at least one rear wall screw rod guide rail mechanism (21) and at least one top screw rod guide rail mechanism (22);
the frame body comprises a bottom plate (1), a base (2) arranged on the lower surface of the bottom plate (1) and used for supporting the whole glass substrate angle adjusting device, a rear wall (19) fixed on the bottom plate (1), and a top plate (20) fixed on the rear wall (19), wherein the bottom plate (1), the rear wall (19) and the top plate (20) form an opening shape; the method is characterized in that:
the glass substrate angle adjusting device further comprises a hinged seat (301) arranged on the bottom plate (1), at least one swinging shaft (6) connected to the hinged seat (301) through a pin shaft (5), and a supporting seat (7) fixed on the upper end face of the swinging shaft (6), wherein a lower wheel roller mechanism (10) and a pre-tightening mechanism (8) which is in contact with the lower wheel roller mechanism (10) through the front end so as to apply pre-tightening force to the lower wheel roller mechanism (10) are arranged on the upper surface of the supporting seat (7); a connecting plate (11) is fixedly installed on the end face of one side of the supporting seat (7), a hinge seat (12) is fixedly installed on the connecting plate (11), and the hinge seat (12) is connected with one end of a connecting rod (14);
the rear wall screw rod guide rail mechanism (21) is fixed on the rear wall (19), and the other end of the connecting rod (14) is connected with the rear wall screw rod guide rail mechanism (21);
the top screw guide rail mechanism (22) is fixed on the top plate (20), and an upper roller mechanism (17) is fixed on the surface of the top screw guide rail mechanism (22);
the substrate (16) is fixed between the upper wheel roller mechanism (17) and the lower wheel roller mechanism (10);
wherein the rear wall screw guide mechanism (21) and the top screw guide mechanism (22) enable the upper roller mechanism (17) and the lower roller mechanism (10) to perform angle adjustment at a preset stroke ratio.
2. The glass substrate angle adjusting apparatus according to claim 1, wherein: the lower roller mechanism (10) comprises a front end lower roller (1001), a connecting frame (1002), a rear end lower roller (1003) and a connecting shaft (1004), wherein the front end lower roller (1001) and the rear end lower roller (1003) are arranged on two sides of a substrate (16) and used for clamping the substrate (16), the connecting shaft (1004) is arranged between the rear end lower roller (1003) and a supporting seat (7) and used for supporting the lower roller (1003), the connecting frame (1002) is fixed on the lower end face of the front end lower roller (1001) and connected to a pre-tightening seat (302) on the supporting seat (7) through a pin shaft (9), and the axis of the upper roller mechanism (17) and the axis of the lower roller (1003) are adjusted at a determined angle through the upper roller mechanism (17) and the lower roller mechanism (10) to keep the same line.
3. The glass substrate angle adjusting apparatus according to claim 1 or 2, wherein: the rear wall screw rod guide rail mechanism (21) comprises a mounting plate (2114), a guide rail (2111) is mounted on the mounting plate (2114), a sliding block (2112) is mounted on the guide rail (2111), a sliding plate (2110) is mounted on the sliding block (2112), a hinge seat (2108) is mounted on the sliding plate (2110) through a fixing pin (2107), and the hinge seat (2108) is connected with a connecting rod (14) through a pin shaft (15);
the motor (2101) arranged on the mounting plate (2114) is connected with the screw rod (2105) through the coupling (2102), the near end of the screw rod (2105) close to the motor (2101) is provided with a fixed supporting seat (2103) and a buffer pad (2104), and the far end is provided with a supporting seat (2109) for supporting the screw rod (2105); the guide rail (2111) is installed on the installation plate (2114) through a bolt (2113), the slider (2112) slides along the guide rail, the lead screw (2105) is driven to rotate through the motor (2101) so as to drive the lead screw nut (2106) and the sliding plate (2110) installed on the lead screw nut to move longitudinally, and the movement of the sliding plate (2110) and the movement of the connecting rod (14) are controlled by controlling the rotation of the lead screw (2105).
4. The glass substrate angle adjusting apparatus according to claim 1 or 2, wherein: the top screw guide rail mechanism (22) comprises a mounting plate (2214), a guide rail (2211) is arranged on the mounting plate (2214), a sliding block (2212) is arranged on the guide rail (2211), a sliding plate (2210) is arranged on the sliding block (2212), a hinge seat (2208) is arranged on the sliding plate (2210) through a fixing pin (2207), and the hinge seat (2208) is connected with the upper roller mechanism (17) through a pin shaft (18);
a motor (2201) arranged on the mounting plate (2214) is connected with a screw rod (2205) through a coupler (2202), a fixed support seat (2203) and a buffer pad (2204) are arranged on the near end of the screw rod (2205) close to the motor (2101), and a support seat (2209) for supporting the screw rod (2205) is arranged on the far end; the guide rail (2211) is installed on the installation plate (2214) through a bolt (2213), the slider (2212) slides along the guide rail, the lead screw (2205) is driven to rotate through the motor (2201) so as to drive the lead screw nut (2206) and the sliding plate (2210) installed on the lead screw nut to move back and forth, and the movement of the sliding plate (2210) is controlled through controlling the rotation of the lead screw (2205) so as to control the back and forth movement of the upper wheel roller mechanism (17).
5. The glass substrate angle adjusting apparatus according to claim 2, wherein: the pre-tightening mechanism (8) comprises a fixed seat (802) and a pre-tightening bolt (801) in threaded connection with the fixed seat (802), the end portion of the pre-tightening bolt (801) abuts against the connecting frame (1002), and the connecting frame (1002) rotates around the pin shaft (9) by adjusting the pre-tightening bolt (801) so as to achieve pre-tightening on substrates (16) with different sizes.
6. The glass substrate angle adjusting apparatus according to claim 5, wherein: the swing shaft (6) is a cylinder arm or a hydraulic arm with adjustable length.
CN202210048058.8A 2022-01-17 2022-01-17 Glass substrate angle adjusting device of large tracts of land vacuum coating Active CN114351108B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101177776A (en) * 2006-11-07 2008-05-14 中国科学院物理研究所 Substrate angle adjusting device used for impulse laser deposition system
WO2015168975A1 (en) * 2014-05-08 2015-11-12 深圳市深新隆实业有限公司 Method for coating diamond crystal film and equipment therefor
CN211848127U (en) * 2019-12-30 2020-11-03 深圳海容高新材料科技有限公司 Precise adjusting device for film thickness uniformity of vacuum coating machine
CN213519906U (en) * 2020-12-15 2021-06-22 众鼎瑞展电子科技(深圳)有限公司 Plating film removes carrier
CN213950996U (en) * 2020-12-30 2021-08-13 芜湖金三氏数控科技有限公司经开区分公司 Height-adjusting mechanism for combined glass coating roller
CN214422523U (en) * 2020-12-30 2021-10-19 芜湖金三氏数控科技有限公司经开区分公司 Adjusting device for glass coating roller

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101177776A (en) * 2006-11-07 2008-05-14 中国科学院物理研究所 Substrate angle adjusting device used for impulse laser deposition system
WO2015168975A1 (en) * 2014-05-08 2015-11-12 深圳市深新隆实业有限公司 Method for coating diamond crystal film and equipment therefor
CN211848127U (en) * 2019-12-30 2020-11-03 深圳海容高新材料科技有限公司 Precise adjusting device for film thickness uniformity of vacuum coating machine
CN213519906U (en) * 2020-12-15 2021-06-22 众鼎瑞展电子科技(深圳)有限公司 Plating film removes carrier
CN213950996U (en) * 2020-12-30 2021-08-13 芜湖金三氏数控科技有限公司经开区分公司 Height-adjusting mechanism for combined glass coating roller
CN214422523U (en) * 2020-12-30 2021-10-19 芜湖金三氏数控科技有限公司经开区分公司 Adjusting device for glass coating roller

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