CN114346266A - Machining method of special-shaped groove - Google Patents
Machining method of special-shaped groove Download PDFInfo
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- CN114346266A CN114346266A CN202210204600.4A CN202210204600A CN114346266A CN 114346266 A CN114346266 A CN 114346266A CN 202210204600 A CN202210204600 A CN 202210204600A CN 114346266 A CN114346266 A CN 114346266A
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Abstract
The invention relates to a processing method of a special-shaped groove, which comprises a first turning and a second turning which are sequentially carried out; the special-shaped groove is a combined groove of a rectangular groove and a trapezoidal groove; the length of the upper bottom of the trapezoid groove in the special-shaped groove is 1.9-2 mm; the upper bottom of the trapezoid groove is an opening end, and the lower bottom of the trapezoid groove is a long side of the rectangular groove; the first turning is to adopt a groove cutter to machine a groove with the width of the upper bottom of the trapezoidal groove; the second turning is to adopt a forming cutter to process a trapezoidal surface; a through groove is formed in the side surface of the forming cutter; the opening angle of the through groove is 55-60 degrees. According to the machining process provided by the invention, through the adjustment of the machining tool and the machining process, the efficient machining of the special-shaped groove is realized by adopting different machining tools in different machining processes, the condition of tool vibration cannot occur in the machining process, and the service life of the tool is obviously prolonged.
Description
Technical Field
The invention relates to machining of a special-shaped groove, in particular to a machining method of the special-shaped groove.
Background
Currently, in vapor deposition, the target or the backing plate is usually fixed or strengthened by providing a groove or a shaped slot.
CN109346395A discloses a target assembly for a substrate processing chamber, the target assembly comprising: a plate comprising a first side comprising a central portion and a support portion; a target disposed on the central portion; a plurality of grooves formed in the support portion; and a plurality of pads partially disposed in the plurality of grooves.
CN102338598A discloses a hollow target assembly, which comprises an inner lining tube, a target body and a plurality of elastic elements, wherein the target body comprises a plurality of annular hollow targets, which are sequentially sleeved on the outer peripheral surface of the inner lining tube, a groove extending along the axial direction is formed on the inner side wall of one end of the hollow target, and a corresponding concave part on the outer wall of the inner lining tube, so that the elastic elements are tightly abutted against the groove of the hollow target and the concave part of the inner lining tube at the same time for positioning, and therefore, the elastic elements enable the target body and the inner lining tube to be well adhered in a simple and low-cost manner.
CN202922105U discloses a connection structure of a target and a back plate, which belongs to the technical field of connection structures of metal targets and back plate components. The back plate is provided with a cylindrical groove, the target material is partially embedded into the back plate along the thickness direction, the diameter of the groove is matched with the outer diameter of the target material embedded into the back plate, the side surface of the groove is connected with the target material through vacuum electron beam seal welding, and the bottom surface of the groove is diffusion welded with the target material. The connecting structure saves the complex canning treatment process and the canning removal process after diffusion welding, does not need vacuum diffusion welding equipment, and has the advantages of less processing procedures, simple process, low cost and the like. Meanwhile, the connecting structure increases the actual thickness of the target material, can prolong the sputtering time of the target material and prolongs the service life of the target material.
However, the current groove machining process is not suitable for narrow grooves (less than or equal to 2mm), and when a conventional groove cutter is used for machining, machining of special-shaped grooves cannot be achieved, and meanwhile, the problem of cutter vibration exists, so that the turning quality cannot be guaranteed.
Disclosure of Invention
In view of the problems in the prior art, the present invention aims to provide a method for machining a special-shaped groove, so as to solve the problem of tool vibration during the current machining process of the special-shaped groove and avoid the damage of the machining tool of the special-shaped groove.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a processing method of a special-shaped groove, which comprises a first turning and a second turning which are sequentially carried out;
the special-shaped groove is a combined groove of a rectangular groove and a trapezoidal groove; the length of the upper bottom of the trapezoid groove in the special-shaped groove is 1.9-2 mm;
the upper bottom of the trapezoid groove is an opening end, and the lower bottom of the trapezoid groove is a long side of the rectangular groove;
the first turning is to adopt a groove cutter to machine a groove with the width of the upper bottom of the trapezoidal groove;
the second turning is to adopt a forming cutter to process a trapezoidal surface;
a through groove is formed in the side surface of the forming cutter; the opening angle of the through groove is 55-60 degrees.
According to the machining process provided by the invention, through the adjustment of the machining tool and the machining process, the efficient machining of the special-shaped groove is realized by adopting different machining tools in different machining processes, the condition of tool vibration cannot occur in the machining process, and the service life of the tool is obviously prolonged.
In the present invention, the open angle of the through groove is 55 to 60 °, and may be, for example, 55 °, 55.2 °, 55.4 °, 55.6 °, 55.8 °, 56 °, 56.2 °, 56.4 °, 56.6 °, 56.8 °, 57 °, 57.2 °, 57.4 °, 57.6 °, 57.8 °, 58 °, 58.2 °, 58.4 °, 58.6 °, 58.8 °, 59 °, 59.2 °, 59.4 °, 59.6 °, 59.8 °, or 60 °, but not limited to the above-mentioned values, and other combinations not listed in this range are also applicable.
In the invention, the included angle between one side surface of the open angle of the through groove and the horizontal plane of the side surface of the forming knife is 40-45 degrees, the included angle between the other side surface of the open angle of the through groove and the horizontal plane of the side surface of the forming knife is 80-85 degrees, and the open angle side surface with a smaller included angle with the horizontal plane of the side surface of the forming knife is adjacent to the knife head of the forming knife.
In a preferred embodiment of the present invention, the vertical depth of the through-grooves is 0.38 to 0.42mm, and the side surface of the through-grooves may be, for example, 0.38mm, 0.382mm, 0.384mm, 0.386mm, 0.388mm, 0.39mm, 0.392mm, 0.394mm, 0.396mm, 0.398mm, 0.4mm, 0.402mm, 0.404mm, 0.406mm, 0.408mm, 0.41mm, 0.412mm, 0.414mm, 0.416mm, 0.418mm, or 0.42mm, but not limited to the above-mentioned values, and other combinations not mentioned within this range are also applicable.
As the preferable technical scheme of the invention, the bottom of the through groove is of a chamfer structure.
In a preferred embodiment of the present invention, the chamfered structure is a chamfer having a radius of 0.1 to 0.2mm, and may be, for example, 0.1mm, 0.11mm, 0.12mm, 0.13mm, 0.14mm, 0.15mm, 0.16mm, 0.17mm, 0.18mm, 0.19mm, or 0.2mm, but is not limited to the above-mentioned values, and other combinations not shown in the above-mentioned range are also applicable.
In a preferred embodiment of the present invention, the width of the maximum opening of the through-groove is 0.5 to 2mm, and may be, for example, 0.5mm, 0.6mm, 0.8mm, 1mm, 1.2mm, 1.4mm, 1.6mm, 1.8mm, or 2mm, but is not limited to the above-mentioned values, and other values not mentioned in the above-mentioned range are also applicable. The maximum opening width refers to the width of the opening of the through groove on the side surface of the forming cutter.
In a preferred embodiment of the present invention, the depth of the irregular groove is 1.5 to 1.6mm, and may be, for example, 1.5mm, 1.51mm, 1.52mm, 1.53mm, 1.54mm, 1.55mm, 1.56mm, 1.57mm, 1.58mm, 1.59mm, or 1.6mm, but is not limited to the above-mentioned values, and other combinations not shown in the scope are also applicable.
The depth of the rectangular groove in the irregular groove is 0.8 to 1.2mm, and may be, for example, 0.8mm, 0.82mm, 0.84mm, 0.86mm, 0.88mm, 0.9mm, 0.92mm, 0.94mm, 0.96mm, 0.98mm, 1mm, 1.02mm, 1.04mm, 1.06mm, 1.08mm, 1.1mm, 1.12mm, 1.14mm, 1.16mm, 1.18mm, or 1.2mm, but not limited to the above-mentioned values, and other combinations not listed in this range are also applicable.
In the present invention, the depth refers to the vertical height.
In a preferred embodiment of the present invention, the length of the bottom of the trapezoidal groove in the irregularly shaped groove is 3 to 4mm, and may be, for example, 3mm, 3.1mm, 3.2mm, 3.3mm, 3.4mm, 3.5mm, 3.6mm, 3.7mm, 3.8mm, 3.9mm, or 4mm, but is not limited to the above-mentioned values, and other combinations not shown in the scope are also applicable.
As a preferred technical proposal of the invention, the main shaft rotation speed of the first turning is 280-320r/min, such as 280r/min, 283r/min, 287r/min, 290r/min, 293r/min, 297r/min, 300r/min, 303r/min, 306r/min, 310r/min, 313r/min, 317r/min or 320r/min, but is not limited to the values listed, and other values not listed in the range are also applicable.
Preferably, the cutting speed of the first turning is 110-130mm/min, such as 110mm/min, 112mm/min, 114mm/min, 116mm/min, 118mm/min, 120mm/min, 122mm/min, 124mm/min, 126mm/min, 128mm/min or 130mm/min, but not limited to the enumerated values, and other unrecited values in the range are also applicable.
Preferably, the feed amount of the first turning is 0.01-0.05mm/r, and may be, for example, 0.01mm/r, 0.012mm/r, 0.014mm/r, 0.016mm/r, 0.018mm/r, 0.02mm/r, 0.022mm/r, 0.024mm/r, 0.026mm/r, 0.028mm/r, 0.03mm/r, 0.032mm/r, 0.034mm/r, 0.036mm/r, 0.038mm/r, 0.04mm/r, 0.042mm/r, 0.044mm/r, 0.046mm/r, 0.048mm/r, or 0.05mm/r, etc., but is not limited thereto, and other values not recited in this range are equally applicable.
As a preferred technical proposal of the invention, the main shaft rotation speed of the second turning is 280-320r/min, such as 280r/min, 283r/min, 287r/min, 290r/min, 293r/min, 297r/min, 300r/min, 303r/min, 306r/min, 310r/min, 313r/min, 317r/min or 320r/min, but is not limited to the values listed, and other values not listed in the range are also applicable.
Preferably, the cutting speed of the second turning is 110-130mm/min, such as 110mm/min, 112mm/min, 114mm/min, 116mm/min, 118mm/min, 120mm/min, 122mm/min, 124mm/min, 126mm/min, 128mm/min or 130mm/min, but not limited to the enumerated values, and other unrecited values in the range are also applicable.
Preferably, the feed rate of the second turning is 0.01-0.05mm/r, and may be, for example, 0.01mm/r, 0.012mm/r, 0.014mm/r, 0.016mm/r, 0.018mm/r, 0.02mm/r, 0.022mm/r, 0.024mm/r, 0.026mm/r, 0.028mm/r, 0.03mm/r, 0.032mm/r, 0.034mm/r, 0.036mm/r, 0.038mm/r, 0.04mm/r, 0.042mm/r, 0.044mm/r, 0.046mm/r, 0.048mm/r, or 0.05mm/r, etc., but not limited thereto, and other values not recited in this range are equally applicable.
As a preferred technical solution of the present invention, the machining method includes first turning and second turning performed in sequence;
the special-shaped groove is a combined groove of a rectangular groove and a trapezoidal groove; the depth of the special-shaped groove is 1.5-1.6 mm; the length of the upper bottom of the trapezoid groove in the special-shaped groove is 1.9-2 mm; the length of the lower bottom of the trapezoid groove in the special-shaped groove is 3-4 mm;
the upper bottom of the trapezoid groove is an opening end, and the lower bottom of the trapezoid groove is a long side of the rectangular groove;
the first turning is to adopt a groove cutter to machine a groove with the width of the upper bottom of the trapezoidal groove; the rotating speed of the main shaft for the first turning is 280-320 r/min; the cutting speed of the first turning is 110-; the feeding amount of the first turning is 0.01-0.05 mm/r;
the second turning is to adopt a forming cutter to process a trapezoidal surface; the rotating speed of the main shaft for the second turning is 280-320 r/min; the cutting speed of the second turning is 110-; the feeding amount of the second turning is 0.01-0.05 mm/r;
a through groove is formed in the side surface of the forming cutter; the opening angle of the through groove is 55-60 degrees; the vertical depth of the through groove is 0.38-0.42mm, and the side surface where the through groove is located is taken as a reference; the bottom of the through groove is of a chamfer angle structure; the chamfer structure is a chamfer with the radius of 0.1-0.2 mm; the width of the maximum opening of the through groove is 0.5-2 mm.
According to the machining method provided by the invention, the machining precision of the special-shaped groove is ensured by further controlling the turning parameters in the machining process, the cutter is ensured not to vibrate in the machining process, and the service life of the cutter is prolonged.
Compared with the prior art, the invention has the following beneficial effects:
according to the method for machining the special-shaped groove, the special machining tool is adopted in the special process, so that the efficient machining of the special-shaped groove is realized, the vibration of the tool in the machining process is avoided, the yield of the special-shaped groove machining is improved, and the service life of the tool is prolonged.
Drawings
FIG. 1 is a schematic view of a profile groove obtained in example 1 of the present invention;
FIG. 2 is a schematic view of a molding knife in example 1 of the present invention.
In the figure: 1-trapezoidal groove, 2-rectangular groove.
The present invention is described in further detail below. The following examples are merely illustrative of the present invention and do not represent or limit the scope of the claims, which are defined by the claims.
Detailed Description
To better illustrate the invention and to facilitate the understanding of the technical solutions thereof, typical but non-limiting examples of the invention are as follows:
example 1
The embodiment provides a machining method of a special-shaped groove, which comprises a first turning and a second turning which are sequentially carried out;
the special-shaped groove is a combined groove of a rectangular groove 2 and a trapezoidal groove 1, as shown in fig. 1; the depth of the special-shaped groove is 1.55mm (the depth of the rectangular groove 2 is 1 mm); the length of the upper bottom of the trapezoidal groove 1 in the special-shaped groove is 1.95 mm; the length of the lower bottom of the trapezoid groove 1 in the special-shaped groove is 3.5 mm;
the upper bottom of the trapezoidal groove 1 is an open end, and the lower bottom of the trapezoidal groove 1 is a long side of the rectangular groove 2;
the first turning is to adopt a groove cutter to machine a groove with the width of the upper bottom of the trapezoidal groove; the rotating speed of the main shaft for the first turning is 300 r/min; the cutting speed of the first turning is 120 mm/min; the feeding amount of the first turning is 0.03 mm/r;
the second turning is to adopt a forming cutter to process a trapezoidal surface; the rotating speed of the main shaft for the second turning is 320 r/min; the cutting speed of the second turning is 110 mm/min; the feeding amount of the second turning is 0.01 mm/r;
the schematic view of the forming cutter is shown in fig. 2, and a through groove is formed in the side surface of the forming cutter; the opening angle of the through groove is 55 degrees; the vertical depth of the through groove is 0.4mm, and the side face where the through groove is located is taken as a reference; the bottom of the through groove is of a chamfer angle structure; the chamfer structure is a chamfer with the radius of 0.15 mm; the width of the largest opening of the through groove is 1 mm.
The obtained special-shaped groove meets the expected target, and the product qualification rate is kept above 99% after multiple times of processing.
Example 2
The embodiment provides a machining method of a special-shaped groove, which comprises a first turning and a second turning which are sequentially carried out;
the special-shaped groove is a combined groove of a rectangular groove and a trapezoidal groove; the depth of the special-shaped groove is 1.5mm (the depth of the rectangular groove is 0.8 mm); the length of the upper bottom of the trapezoid groove in the special-shaped groove is 2 mm; the length of the lower bottom of the trapezoid groove in the special-shaped groove is 3 mm;
the upper bottom of the trapezoid groove is an opening end, and the lower bottom of the trapezoid groove is a long side of the rectangular groove;
the first turning is to adopt a groove cutter to machine a groove with the width of the upper bottom of the trapezoidal groove; the rotating speed of the main shaft for the first turning is 280 r/min; the cutting speed of the first turning is 110 mm/min; the feeding amount of the first turning is 0.05 mm/r;
the second turning is to adopt a forming cutter to process a trapezoidal surface; the rotating speed of the main shaft for the second turning is 300 r/min; the cutting speed of the second turning is 120 mm/min; the feeding amount of the second turning is 0.03 mm/r;
a through groove is formed in the side surface of the forming cutter; the opening angle of the through groove is 57 degrees; the vertical depth of the through groove is 0.42mm, and the side face where the through groove is located is taken as a reference; the bottom of the through groove is of a chamfer angle structure; the chamfer structure is a chamfer with the radius of 0.1 mm; the width of the largest opening of the through groove is 2 mm.
The obtained special-shaped groove meets the expected target, and the product qualification rate is kept above 99% after multiple times of processing.
Example 3
The embodiment provides a machining method of a special-shaped groove, which comprises a first turning and a second turning which are sequentially carried out;
the special-shaped groove is a combined groove of a rectangular groove and a trapezoidal groove; the depth of the special-shaped groove is 1.6mm (the depth of the rectangular groove is 1.2 mm); the length of the upper bottom of the trapezoid groove in the special-shaped groove is 1.9 mm; the length of the lower bottom of the trapezoid groove in the special-shaped groove is 4 mm;
the upper bottom of the trapezoid groove is an opening end, and the lower bottom of the trapezoid groove is a long side of the rectangular groove;
the first turning is to adopt a groove cutter to machine a groove with the width of the upper bottom of the trapezoidal groove; the rotating speed of the main shaft for the first turning is 320 r/min; the cutting speed of the first turning is 130 mm/min; the feeding amount of the first turning is 0.01 mm/r;
the second turning is to adopt a forming cutter to process a trapezoidal surface; the rotating speed of the main shaft for the second turning is 280 r/min; the cutting speed of the second turning is 130 mm/min; the feeding amount of the second turning is 0.05 mm/r;
a through groove is formed in the side surface of the forming cutter; the opening angle of the through groove is 60 degrees; the vertical depth of the through groove is 0.38mm, and the side face where the through groove is located is taken as a reference; the bottom of the through groove is of a chamfer angle structure; the chamfer structure is a chamfer with the radius of 0.2 mm; the width of the largest opening of the through groove is 0.5 mm.
The obtained special-shaped groove meets the expected target, and the product qualification rate is kept above 99% after multiple times of processing.
Example 4
The embodiment provides a machining method of a special-shaped groove, which comprises a first turning and a second turning which are sequentially carried out;
the special-shaped groove is a combined groove of a rectangular groove and a trapezoidal groove; the depth of the special-shaped groove is 1.55mm (the depth of the rectangular groove is 1.1 mm); the length of the upper bottom of the trapezoid groove in the special-shaped groove is 1.92 mm; the length of the lower bottom of the trapezoid groove in the special-shaped groove is 3.2 mm;
the upper bottom of the trapezoid groove is an opening end, and the lower bottom of the trapezoid groove is a long side of the rectangular groove;
the first turning is to adopt a groove cutter to machine a groove with the width of the upper bottom of the trapezoidal groove; the rotating speed of the main shaft for the first turning is 300 r/min; the cutting speed of the first turning is 130 mm/min; the feeding amount of the first turning is 0.05 mm/r;
the second turning is to adopt a forming cutter to process a trapezoidal surface; the rotating speed of the main shaft for the second turning is 280 r/min; the cutting speed of the second turning is 110 mm/min; the feeding amount of the second turning is 0.01 mm/r;
a through groove is formed in the side surface of the forming cutter; the opening angle of the through groove is 58 degrees; the vertical depth of the through groove is 0.4mm, and the side face where the through groove is located is taken as a reference; the bottom of the through groove is of a chamfer angle structure; the chamfer structure is a chamfer with the radius of 0.18 mm; the width of the largest opening of the through groove is 1 mm.
The obtained special-shaped groove meets the expected target, and the product qualification rate is kept above 99% after multiple times of processing.
Comparative example 1
The only difference from example 1 is that the cutting speed of the second turning was 150 mm/min. The obtained special-shaped groove can not reach the expected target, the problem of cutter vibration exists in the machining process of the trapezoidal surface, the trapezoidal surface is mechanically damaged and can not reach the production standard, and the product percent of pass is 75 +/-2% after multiple times of machining.
Comparative example 2
The only difference from example 1 is that the cutting speed of the second turning was 80 mm/min. The obtained special-shaped groove can not reach the expected target, the problem of poor processing precision exists in the processing process of the trapezoidal surface, the production standard can not be reached, and the product percent of pass is 70 +/-3% after multiple processing.
Comparative example 3
The only difference from example 1 is that the feed for the second turning was 0.1 mm/r. The obtained special-shaped groove can not reach the expected target, the problem of poor machining precision exists in the machining process of the trapezoidal surface, the trapezoidal surface is mechanically damaged and can not reach the production standard, and the product percent of pass is 80 +/-3% after multiple times of machining.
Comparative example 4
The only difference from embodiment 1 is that the feed for the second turning is 0.005 mm/r. The obtained special-shaped groove can not reach the expected target, the problem of cutter vibration exists in the machining process of the trapezoidal surface, the trapezoidal surface is mechanically damaged and can not reach the production standard, and the product percent of pass is 72 +/-4% after multiple times of machining.
According to the results of the embodiment and the comparative example, the special processing tool is adopted in the specific process, so that the special processing method for the special-shaped groove, provided by the invention, realizes the efficient processing of the special-shaped groove, avoids the vibration of the tool in the processing process, improves the yield and the processing precision of the special-shaped groove processing, and prolongs the service life of the tool.
The applicant declares that the present invention illustrates the detailed structural features of the present invention through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must be implemented depending on the above detailed structural features. It should be understood by those skilled in the art that any modifications of the present invention, equivalent substitutions of selected components of the present invention, additions of auxiliary components, selection of specific modes, etc., are within the scope and disclosure of the present invention.
The preferred embodiments of the present invention have been described in detail, however, the present invention is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present invention within the technical idea of the present invention, and these simple modifications are within the protective scope of the present invention.
It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and the invention is not described in any way for the possible combinations in order to avoid unnecessary repetition.
In addition, any combination of the various embodiments of the present invention is also possible, and the same should be considered as the disclosure of the present invention as long as it does not depart from the spirit of the present invention.
Claims (10)
1. The machining method of the special-shaped groove is characterized by comprising a first turning and a second turning which are sequentially carried out;
the special-shaped groove is a combined groove of a rectangular groove and a trapezoidal groove; the length of the upper bottom of the trapezoid groove in the special-shaped groove is 1.9-2 mm;
the upper bottom of the trapezoid groove is an opening end, and the lower bottom of the trapezoid groove is a long side of the rectangular groove;
the first turning is to adopt a groove cutter to machine a groove with the width of the upper bottom of the trapezoidal groove;
the second turning is to adopt a forming cutter to process a trapezoidal surface;
a through groove is formed in the side surface of the forming cutter; the opening angle of the through groove is 55-60 degrees.
2. The process of claim 1, wherein the vertical depth of the through grooves is 0.38 to 0.42mm, based on the side on which the through grooves are located.
3. The machining method according to claim 1 or 2, wherein the bottom of the through groove is chamfered.
4. The process of claim 3 wherein said chamfer configuration is a chamfer of 0.1 to 0.2mm radius.
5. The process according to any one of claims 1 to 4, wherein the width of the maximum opening of the through slot is from 0.5 to 2 mm.
6. The machining method according to any one of claims 1 to 5, wherein the depth of the irregularly shaped groove is 1.5 to 1.6 mm.
7. The process of any one of claims 1 to 6, wherein the length of the lower base of the trapezoidal groove in the profile groove is 3 to 4 mm.
8. The machining method as claimed in any one of claims 1 to 7, wherein the spindle speed for the first turning is 280-320 r/min;
preferably, the cutting speed of the first turning is 110-;
preferably, the feed amount of the first turning is 0.01-0.05 mm/r.
9. The machining method as claimed in any one of claims 1 to 8, wherein the spindle rotation speed for the second turning is 280-320 r/min;
preferably, the cutting speed of the second turning is 110-;
preferably, the feed amount of the second turning is 0.01-0.05 mm/r.
10. The machining method according to any one of claims 1 to 9, characterized in that it comprises a first turning and a second turning performed in sequence;
the special-shaped groove is a combined groove of a rectangular groove and a trapezoidal groove; the depth of the special-shaped groove is 1.5-1.6 mm; the length of the upper bottom of the trapezoid groove in the special-shaped groove is 1.9-2 mm; the length of the lower bottom of the trapezoid groove in the special-shaped groove is 3-4 mm;
the upper bottom of the trapezoid groove is an opening end, and the lower bottom of the trapezoid groove is a long side of the rectangular groove;
the first turning is to adopt a groove cutter to machine a groove with the width of the upper bottom of the trapezoidal groove; the rotating speed of the main shaft for the first turning is 280-320 r/min; the cutting speed of the first turning is 110-; the feeding amount of the first turning is 0.01-0.05 mm/r;
the second turning is to adopt a forming cutter to process a trapezoidal surface; the rotating speed of the main shaft for the second turning is 280-320 r/min; the cutting speed of the second turning is 110-; the feeding amount of the second turning is 0.01-0.05 mm/r;
a through groove is formed in the side surface of the forming cutter; the opening angle of the through groove is 55-60 degrees; the vertical depth of the through groove is 0.38-0.42mm, and the side surface where the through groove is located is taken as a reference; the bottom of the through groove is of a chamfer angle structure; the chamfer structure is a chamfer with the radius of 0.1-0.2 mm; the width of the maximum opening of the through groove is 0.5-2 mm.
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| CN205834278U (en) * | 2016-06-30 | 2016-12-28 | 厦门三安光电有限公司 | Jiggering cutter repaiied by a kind of copper dish |
| CN209532131U (en) * | 2018-12-20 | 2019-10-25 | 东曹(上海)电子材料有限公司 | It is a kind of for processing the cutter of seal groove |
-
2022
- 2022-03-03 CN CN202210204600.4A patent/CN114346266B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001018164A (en) * | 1999-07-08 | 2001-01-23 | Toho Engineering Kk | Pad with hard foam resin groove for working semiconductor device and tool for turning grooving of this pad |
| WO2011031754A1 (en) * | 2009-09-09 | 2011-03-17 | Illinois Tool Works Inc. | Pipe-machining apparatus with a cutting device |
| CN103357906A (en) * | 2012-04-02 | 2013-10-23 | 艾通电磁技术（昆山）有限公司 | Chute forming tool |
| CN103551611A (en) * | 2013-11-01 | 2014-02-05 | 无锡雨田精密工具有限公司 | Grooving forming blade |
| CN205834278U (en) * | 2016-06-30 | 2016-12-28 | 厦门三安光电有限公司 | Jiggering cutter repaiied by a kind of copper dish |
| CN209532131U (en) * | 2018-12-20 | 2019-10-25 | 东曹(上海)电子材料有限公司 | It is a kind of for processing the cutter of seal groove |
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|---|---|
| CN114346266B (en) | 2023-04-28 |
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