CN114345109A - Silicon-containing organic waste gas treatment process and equipment - Google Patents

Silicon-containing organic waste gas treatment process and equipment Download PDF

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CN114345109A
CN114345109A CN202210042066.1A CN202210042066A CN114345109A CN 114345109 A CN114345109 A CN 114345109A CN 202210042066 A CN202210042066 A CN 202210042066A CN 114345109 A CN114345109 A CN 114345109A
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waste gas
primary
heat exchanger
silicon
direct
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张彬
唐中友
游雄辉
郑声健
杨丽萍
罗家溥
林生平
黄毅峰
罗民宇
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Xiamen Ran Environmental Protection Technology Co ltd
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Abstract

The invention discloses a silicon-containing organic waste gas treatment process and equipment, comprising the following steps: firstly, pretreating silicon-containing organic waste gas by an alkaline washing tower to remove acid components and oil stains in the waste gas; secondly, removing water vapor from the waste gas subjected to alkali washing pretreatment through a demister; and thirdly, enabling the waste gas at the outlet of the demister to enter a primary heat exchanger under the action of an air feeder, and preheating the organic waste gas to 500-600 ℃ under the action of the primary heat exchanger. In the above scheme, the problem that particulate matters such as silica crystals are blocked by a porous structure due to high-temperature reaction is solved by adopting a direct-fired furnace, the direct-fired furnace adopts an air distribution device in a baffle plate form, the turbulence degree of waste gas can be effectively improved, the waste gas inlet temperature is preheated to 500-600 ℃ by adopting a primary heat exchanger, so that the energy-saving effect is achieved, the heat recycling rate can reach 60-80%, the heat exchange tubes of the primary heat exchanger are longitudinally arranged, and the bottom of the primary heat exchanger is provided with a buffer cavity, so that the problem of internal blocking of the heat exchange tubes can be effectively prevented.

Description

Silicon-containing organic waste gas treatment process and equipment
Technical Field
The invention relates to the technical field of organic gas treatment, in particular to a silicon-containing organic waste gas treatment process and equipment.
Background
Volatile Organic Compounds (VOCs) are one of the main components causing air pollution and are also the main components forming photochemical smog and secondary organic aerosol, so that the treatment of the waste gas of the VOCs is particularly important, along with the stricter national pollution control, the treatment requirement of the waste gas of the VOCs is higher, the early treatment process of the VOCs is not applicable, and the currently approved technologies are a combustion treatment process represented by a Regenerative Thermal Oxidation (RTO) method, a catalytic oxidation process represented by a catalytic Combustion (CO) method, and a combined process represented by a zeolite rotating wheel or activated carbon adsorption concentration assisted with combustion treatment or catalytic oxidation treatment.
With the widespread use of silicon-containing organic substances such as silane in various industries, more and more enterprises discharge waste gas containing silicon components, wherein the silicon element is silicon dioxide in the final oxidation state, the melting point of the silicon dioxide is 1723 ℃, and the boiling point of the silicon dioxide is 2230 ℃, so that all the silicon element in a high-temperature oxidation system exists in the form of silicon dioxide crystals.
The RTO has excellent heat storage function due to a compact pore structure in a heat accumulator, so that the heat recycling rate of the RTO is as high as about 95 percent, and the aims of energy conservation and high treatment efficiency are fulfilled; CO reduces the temperature of the oxidation reaction of pollutants through the action of the catalyst, so as to realize the aim of combining energy saving safety and high treatment rate, and the catalyst takes a honeycomb-shaped porous structure as a carrier, so that the prior common VOCs high-efficiency treatment processes all have porous structures, and silicon dioxide crystals generated in the waste gas treatment process are very easy to be adsorbed in the porous structures, so that the waste gas treatment process is accumulated day by day, a heat accumulator or the catalyst is blocked, the operation of equipment is influenced, and the operation and maintenance burden is increased.
The currently common method is to pretreat the silicon-containing organic waste gas by absorption, condensation and other methods, and reduce the silicon content in the waste gas to alleviate the blockage of the subsequent VOCs treatment system, but the methods have the following disadvantages: (1) the conventional VOCs high-efficiency treatment process has a porous structure, for example, VOCs waste gas contains silicon element, silicon dioxide crystals are generated in the waste gas treatment process, the crystals are easily adsorbed in the porous structure, and the crystals accumulate day by day, so that the porous structure of a heat accumulator or a catalyst is blocked, the operation of equipment is influenced, and the operation and maintenance burden is increased; (2) the method for pretreating the silicon-containing organic waste gas by adopting methods such as absorption, condensation and the like cannot radically solve the problem of blockage of a porous structure in a VOCs treatment unit, and the method has high investment and operation cost and high cost; (3) in view of the above, the invention provides a process and equipment capable of effectively discharging particulate matters such as silica generated in the waste gas treatment process on the premise of ensuring high treatment efficiency of VOCs, so as to realize safe, energy-saving, continuous and efficient operation of a system and reduce operation and maintenance burden.
Disclosure of Invention
In order to overcome the above-mentioned defects in the prior art, embodiments of the present invention provide a silicon-containing organic waste gas treatment process and apparatus, so as to solve the problems that the silicon dioxide crystals generated during the waste gas treatment process in the prior art are easily adsorbed in the porous structure, and the crystals accumulate over time, so as to cause the porous structure of the heat accumulator or the catalyst to be blocked, influence the operation of the apparatus, and increase the operation and maintenance burden.
In order to solve the technical problems, the invention provides the following technical scheme: a silicon-containing organic waste gas treatment process and equipment, which comprises the key steps of:
firstly, pretreating silicon-containing organic waste gas by an alkaline washing tower to remove acid components and oil stains in the waste gas;
secondly, removing water vapor from the waste gas subjected to alkali washing pretreatment through a demister;
thirdly, the waste gas at the outlet of the demister enters a primary heat exchanger under the action of an air feeder, and the organic waste gas is preheated to 500-600 ℃ under the action of the primary heat exchanger;
fourthly, the preheated high-temperature waste gas enters a direct-fired furnace, VOCs components are oxidized and decomposed into inorganic components such as H2O and CO2 through the high-temperature oxidation action of not less than 750 ℃, and meanwhile, silicon elements in the waste gas are oxidized to generate SiO2 crystals;
fifthly, directly taking high-temperature exhaust of the direct-fired furnace as a heat source of a primary heat exchanger, and reducing the exhaust temperature to 200-300 ℃ after heat exchange treatment;
sixthly, the exhaust gas of the primary heat exchanger enters a secondary heat exchanger to be used as a heat source for heating water or other fluids again to realize waste heat recycling, and the exhaust gas temperature after secondary heat exchange is reduced to 100-150 ℃;
seventhly, SiO2 crystals and other particles generated by high-temperature oxidation are gradually brought into the high-temperature filter under the action of exhaust gas flow and are intercepted and removed in the high-temperature filter;
and eighthly, under the action of an exhaust fan, the tail gas is finally discharged through an exhaust funnel to reach the standard.
The silicon-containing organic waste gas treatment process at least comprises an alkaline washing tower, a demister, a blower, a primary heat exchanger, a direct-fired furnace, a secondary heat exchanger, a high-temperature filter and an exhaust fan, wherein all the devices are connected in sequence.
The air feeder and the exhaust fan are mainly used for overcoming system resistance loss and ensuring that the interior of the direct-fired furnace is in a micro-negative pressure state of 100-150 Pa, so that sufficient reaction of waste gas is realized.
The direct-fired furnace at least comprises a direct-fired furnace air inlet, a combustion system, an air distribution device, a high-temperature reaction chamber, a direct-fired furnace access door and a direct-fired furnace exhaust port, wherein the air distribution device adopts a baffle plate form and is mainly used for improving the turbulence degree of waste gas, the volume of the high-temperature reaction chamber is required to ensure that the retention time of the waste gas is not less than 1.5 seconds, and the direct-fired furnace access door is arranged to facilitate the shutdown and the internal access maintenance.
The primary heat exchanger at least comprises a secondary heat exchange function, but is not limited to a secondary heat exchange function, the secondary heat exchange function is taken as an example for explanation, the primary heat exchanger at least comprises a heat source air inlet, a heat source air outlet, a primary cold source air inlet, a primary cold source air outlet, a secondary cold source air inlet, a secondary cold source air outlet, a heat exchange tube nest, a primary heat exchanger access door, an online ash blowing port, a primary buffer cavity, a secondary buffer cavity and a partition plate, the primary cold source air inlet and the primary cold source air outlet are respectively connected with the primary buffer cavity through the heat exchange tube nest, and the secondary cold source air inlet and the secondary cold source air outlet are respectively connected with the secondary buffer cavity through the heat exchange tube nest; the primary buffer cavity and the secondary buffer cavity are separated by a partition plate; the heat exchange tubes are longitudinally arranged, so that particles such as silicon dioxide crystals and the like generated in the heat exchange tubes can fall into the primary buffer cavity and the secondary buffer cavity under the action of gravity, and the heat exchange tubes are prevented from being blocked; the front ends of all stages of heat exchange tubes are provided with online soot blowing ports, and soot blowing pipes can be buried through the online soot blowing ports according to engineering requirements, so that dust on the outer surfaces of the heat exchange tubes is blown off online, and the heat exchanger access door is arranged for facilitating shutdown and internal maintenance.
The air feeder outlet is connected with the first-stage cold source air inlet, the first-stage cold source air outlet is connected with the second-stage cold source air inlet, the second-stage cold source air outlet is connected with the direct-fired furnace air inlet, the direct-fired furnace air outlet is connected with the heat source air inlet, and the heat source air outlet is connected with the heat source air inlet of the secondary heat exchanger.
Wherein, high temperature filter contains filter air inlet, filter gas vent, ash discharge hopper, filler drawer and high efficiency and packs at least, and the filter air inlet is located the lower part, and the filter gas vent is located upper portion, forms air current from bottom to top, and the particulate matter is held back in the clearance of high efficiency filler through the effect of blockking of multistage high efficiency filler, and the part falls into the ash discharge hopper under the action of gravity, and high efficiency filler adopts high temperature resistant type to install with the drawer form, so that clearance and change.
The technical scheme of the invention has the following beneficial effects:
1. the direct-fired furnace mode is adopted to overcome the problem that the porous structure is blocked by particles such as silicon dioxide crystals and the like generated by high-temperature reaction.
2. The direct-fired furnace adopts the air distribution device in the form of a baffle plate, so that the turbulence degree of waste gas can be effectively improved.
3. The primary heat exchanger is adopted to preheat the temperature of the waste gas inlet to 500-600 ℃ so as to achieve the effect of energy saving, and the heat recycling rate can reach 60-80%.
4. The heat exchange tubes of the primary heat exchanger are longitudinally arranged, and the bottom of the heat exchange tubes is provided with the buffer cavity, so that the problem of internal blockage of the heat exchange tubes can be effectively solved.
5. The front ends of all stages of heat exchange tubes are provided with online soot blowing ports, and soot can be buried in the blowing pipes through the online soot blowing ports according to engineering requirements so as to realize online soot blowing of dust on the outer surfaces of the heat exchange tubes.
6. The high-temperature filter adopts multistage high-temperature resistant type high-efficiency filler to trap particulate matters, and the filler is installed in a drawer mode so as to be convenient for cleaning and replacement and save investment and operation cost.
7. The silicon-containing organic waste gas treatment process can realize effective treatment of the silicon-containing organic waste gas, has low investment and operation cost and is suitable for popularization.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of a direct-fired furnace according to the present invention;
FIG. 3 is a schematic view of a primary heat exchanger according to the present invention;
FIG. 4 is a schematic view of a high temperature filter according to the present invention in a partial cross-sectional configuration.
[ reference numerals ]
1. An alkaline washing tower; 2. a demister; 3. a blower; 4. a direct-fired furnace; 5. a primary heat exchanger; 6. a secondary heat exchanger; 7. a high temperature filter; 8. an exhaust fan; 41. a direct-fired furnace air inlet; 42. a combustion system; 43. an air distribution device; 44. a high-temperature reaction chamber; 45. a direct-fired furnace access door; 46. an exhaust port of the direct-fired furnace; 51. a heat source air inlet; 52. heat exchange tubes; 53. a secondary cold source exhaust port; 54. a secondary cold source air inlet; 55. a primary cold source air inlet; 56. (ii) a 57. A heat source exhaust port; 58. a primary heat exchanger access door; 59. online soot blowing; 510. a secondary buffer cavity; 511. a partition plate; 512. a primary buffer chamber; 71. a filter air inlet; 72. an ash discharge hopper; 73. a stuffing drawer; 74. a filter exhaust port; 75. high-efficiency filling.
Detailed Description
In order to make the technical problems, technical solutions and advantages of the present invention more apparent, the following detailed description is given with reference to the accompanying drawings and specific embodiments.
Example 1:
referring to fig. 1 to 4, the embodiment of the present invention provides a silicon-containing organic waste gas treatment process and apparatus, the key steps of which include:
firstly, pretreating silicon-containing organic waste gas by an alkaline washing tower 1 to remove acid components and oil stains in the waste gas;
secondly, removing water vapor from the waste gas subjected to alkali washing pretreatment through a demister 2;
thirdly, the waste gas at the outlet of the demister enters a primary heat exchanger 5 under the action of an air feeder 3, and the organic waste gas is preheated to 500-600 ℃ under the action of the primary heat exchanger 5;
fourthly, the preheated high-temperature waste gas enters a direct-fired furnace 4, VOCs components are oxidized and decomposed into inorganic components such as H2O and CO2 through the high-temperature oxidation action of not less than 750 ℃, and meanwhile, silicon elements in the waste gas are oxidized to generate S iO2 crystals;
fifthly, directly taking high-temperature exhaust of the direct-fired furnace 4 as a heat source of the primary heat exchanger 5, and reducing the exhaust temperature to 200-300 ℃ after heat exchange treatment;
sixthly, the exhaust gas of the primary heat exchanger 5 enters a secondary heat exchanger 6 to be used as a heat source for heating water or other fluids again to realize waste heat recycling, and the exhaust gas temperature after secondary heat exchange is reduced to 100-150 ℃;
seventhly, SiO2 crystals and other particulate matters generated by high-temperature oxidation are gradually brought into the high-temperature filter 7 under the action of exhaust gas flow and are intercepted and removed in the high-temperature filter 7;
eighthly, under the action of the exhaust fan 8, the tail gas is finally discharged through the exhaust funnel 9 to reach the standard.
The silicon-containing organic waste gas treatment process at least comprises an alkaline washing tower 1, a demister 2, a blower 3, a primary heat exchanger 5, a direct-fired furnace 4, a secondary heat exchanger 6, a high-temperature filter 7 and an exhaust fan 8, wherein all the devices are connected in sequence; the air feeder 3 and the exhaust fan 8 are mainly used for overcoming the system resistance loss and ensuring that the interior of the direct-fired furnace 4 is in a micro-negative pressure state of 100-150 Pa, so that the waste gas is fully reacted.
Referring to fig. 2, the direct-fired furnace 4 at least comprises a direct-fired furnace air inlet 41, a combustion system 42, an air distribution device 43, a high-temperature reaction chamber 44, a direct-fired furnace access door 45 and a direct-fired furnace exhaust port 46. The air distribution device 43 adopts a baffle plate form and is mainly used for improving the turbulence degree of the waste gas; the volume of the high-temperature reaction cavity 44 needs to ensure that the residence time of the waste gas is not less than 1.5 seconds, and the maintenance door 45 of the direct-fired furnace is arranged to facilitate the shutdown and the internal maintenance.
Referring to fig. 3, the primary heat exchanger 5 includes at least two stages of heat exchange, but is not limited to two stages, and the two stages of heat exchange are described as an example. The primary heat exchanger 5 at least comprises a heat source air inlet 51, a heat source air outlet 57, a primary cold source air inlet 56, a primary cold source air outlet 55, a secondary cold source air inlet 54, a secondary cold source air outlet 53, a heat exchange tube array 52, a primary heat exchanger access door 58, an online ash blowing port 59, a primary buffer cavity 512, a secondary buffer cavity 510 and a partition 511. The primary cold source air inlet 56 and the primary cold source air outlet 55 are respectively connected with the primary buffer cavity 512 through the heat exchange tube array 52, and the secondary cold source air inlet 54 and the secondary cold source air outlet 53 are respectively connected with the secondary buffer cavity 510 through the heat exchange tube array 52; the primary buffer chamber 512 and the secondary buffer chamber 510 are separated by a partition 511; the heat exchange tubes 52 are longitudinally arranged, so that particles such as silica crystals generated in the heat exchange tubes 52 can fall into the primary buffer cavity 512 and the secondary buffer cavity 510 under the action of gravity, and the heat exchange tubes 52 are prevented from being blocked; the front ends of all stages of heat exchange tubes 52 are provided with online soot blowing ports 59, and soot blowing pipes can be embedded into the online soot blowing ports 59 according to engineering requirements, so that online soot blowing of dust on the outer surfaces of the heat exchange tubes 52 is realized. The primary heat exchanger access door 58 is arranged to facilitate shutdown and internal access.
If 1 ~ 5, forced draught blower 3 export links to each other with one-level cold source air inlet 56, and one-level cold source exhaust 55 links to each other with second grade cold source air inlet 54, and second grade cold source exhaust 53 links to each other with direct-fired furnace air inlet 41, and direct-fired furnace exhaust 46 links to each other with heat source air inlet 51, and heat source exhaust 57 links to each other with secondary heat exchanger heat source air inlet.
Referring to fig. 4, the high temperature filter 7 at least includes a filter inlet 71, a filter outlet 74, an ash discharge hopper 72, a filler drawer 73 and a high efficiency filler 75. The filter air inlet 71 is positioned at the lower part, the filter air outlet 74 is positioned at the upper part, airflow from bottom to top is formed, and the particles are partially trapped in gaps of the high-efficiency filler 75 by the blocking effect of the multi-stage high-efficiency filler 75 and partially fall into the ash discharge hopper 72 under the action of gravity. The high efficiency packing 75 is of a high temperature resistant type and is installed in a drawer type for easy cleaning and replacement.
The flow rate of certain silicon-containing organic waste gas is 5000m3/h, the concentration of VOCs is 2000mg/m3, wherein the content of silicon element is 100mg/m3, 12 hours of gas is continuously exhausted every day, and the specific design parameters are as follows:
Figure BDA0003470694450000071
Figure BDA0003470694450000081
the points to be finally explained are: first, in the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounted," "connected," and "connected" should be understood broadly, and may be a mechanical connection or an electrical connection, or a communication between two elements, and may be a direct connection, and "upper," "lower," "left," and "right" are only used to indicate a relative positional relationship, and when the absolute position of the object to be described is changed, the relative positional relationship may be changed;
secondly, the method comprises the following steps: in the drawings of the disclosed embodiments of the invention, only the structures related to the disclosed embodiments are referred to, other structures can refer to common designs, and the same embodiment and different embodiments of the invention can be combined with each other without conflict;
and finally: the above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that are within the spirit and principle of the present invention are intended to be included in the scope of the present invention.

Claims (7)

1. A silicon-containing organic waste gas treatment process comprises the following key steps:
firstly, pretreating silicon-containing organic waste gas by an alkaline washing tower (1) to remove acid components and oil stains in the waste gas;
secondly, removing water vapor from the waste gas subjected to alkali washing pretreatment through a demister (2);
thirdly, the waste gas at the outlet of the demister enters a primary heat exchanger (5) under the action of an air feeder (3), and the organic waste gas is preheated to 500-600 ℃ under the action of the primary heat exchanger (5);
fourthly, the preheated high-temperature waste gas enters a direct-fired furnace (4), VOCs components are oxidized and decomposed into inorganic components such as H2O and CO2 through the high-temperature oxidation effect of not less than 750 ℃, and meanwhile, silicon elements in the waste gas are oxidized to generate SiO2 crystals;
fifthly, directly taking high-temperature exhaust of the direct-fired furnace (4) as a heat source of the primary heat exchanger (5), and reducing the exhaust temperature to 200-300 ℃ after heat exchange treatment;
sixthly, the exhaust gas of the primary heat exchanger (5) enters a secondary heat exchanger (6) to be used as a heat source again for heating water or other fluids to realize waste heat recycling, and the exhaust temperature after secondary heat exchange is reduced to 100-150 ℃;
seventhly, SiO2 crystals and other particulate matters generated by high-temperature oxidation are gradually brought into the high-temperature filter (7) under the action of exhaust gas flow and are intercepted and removed in the high-temperature filter (7);
eighthly, under the action of the exhaust fan (8), the tail gas is finally discharged through the exhaust funnel (9) to reach the standard.
2. The silicon-containing organic waste gas treatment equipment according to claim 1, which adopts the silicon-containing organic waste gas treatment process according to claim 1, and is characterized in that the silicon-containing organic waste gas treatment process at least comprises an alkaline tower (1), a demister (2), a blower (3), a primary heat exchanger (5), a direct-fired furnace (4), a secondary heat exchanger (6), a high-temperature filter (7) and an exhaust fan (8), and the equipment is connected in sequence.
3. The silicon-containing organic waste gas treatment equipment according to claim 2, wherein the blower (3) and the exhaust fan (8) are mainly used for overcoming system resistance loss and ensuring that the interior of the direct-fired furnace (4) is in a micro-negative pressure state of 100-150 Pa.
4. The silicon-containing organic waste gas treatment equipment according to claim 1, wherein the direct-fired furnace (4) at least comprises a direct-fired furnace air inlet (41), a combustion system (42), an air distribution device (43), a high-temperature reaction chamber (44), a direct-fired furnace access door (45) and a direct-fired furnace exhaust port (46), and the air distribution device (43) is in the form of a baffle plate.
5. The silicon-containing organic waste gas treatment equipment according to claim 2, wherein the primary heat exchanger (5) at least comprises a heat source air inlet (51), a heat source air outlet (57), a primary cold source air inlet (56), a primary cold source air outlet (55), a secondary cold source air inlet (54), a secondary cold source air outlet (53), a heat exchange tube array (52), a primary heat exchanger access door (58), an online ash blowing port (59), a primary buffer cavity (512), a secondary buffer cavity (510) and a partition plate (511), wherein the primary cold source air inlet (56) and the primary cold source air outlet (55) are respectively connected with the primary buffer cavity (512) through the heat exchange tube array (52), and the secondary cold source air inlet (54) and the secondary cold source air outlet (53) are respectively connected with the secondary buffer cavity (510) through the heat exchange tube array (52); the primary buffer cavity (512) and the secondary buffer cavity (510) are separated by a partition plate (511); the heat exchange tubes (52) are longitudinally arranged, so that particles such as silica crystals and the like generated in the heat exchange tubes (52) can fall into the primary buffer cavity (512) and the secondary buffer cavity (510) under the action of gravity, and the heat exchange tubes (52) are prevented from being blocked; the front end of each stage of heat exchange tube array (52) is provided with an online ash blowing port (59).
6. The silicon-containing organic waste gas treatment equipment according to any one of claims 2 or 5, wherein the outlet of the blower (3) is connected with a primary cold source air inlet (56), a primary cold source air outlet (55) is connected with a secondary cold source air inlet (54), a secondary cold source air outlet (53) is connected with a direct-fired furnace air inlet (41), a direct-fired furnace air outlet (46) is connected with a heat source air inlet (51), and a heat source air outlet (57) is connected with a secondary heat exchanger heat source air inlet (53).
7. The silicon-containing organic waste gas treatment equipment according to claim 2, wherein the high temperature filter (7) at least comprises a filter inlet (71), a filter outlet (74), an ash discharge hopper (72), a filler drawer (73) and a high efficiency filler (75), the filter inlet (71) is positioned at the lower part, the filter outlet (74) is positioned at the upper part to form a bottom-up airflow, and the high efficiency filler (75) is of a high temperature resistant type and is installed in a drawer type.
CN202210042066.1A 2022-01-14 2022-01-14 Silicon-containing organic waste gas treatment process and equipment Pending CN114345109A (en)

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CN115888305A (en) * 2022-11-14 2023-04-04 江苏嘉盛环境设备制造有限公司 Vacuum pump tail gas treatment System (VOCs) process for lithium battery industry

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CN111457400A (en) * 2020-05-12 2020-07-28 宜兴市智博环境设备有限公司 Organosilane-containing waste gas and liquid incineration system and process
CN111637471A (en) * 2020-05-28 2020-09-08 北京森麟技术有限公司 Waste gas and waste liquid incineration treatment process and treatment system containing organic silicon
CN112197621A (en) * 2020-08-27 2021-01-08 合肥宽信机电有限公司 Gas-gas pipe type heat exchanger

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Publication number Priority date Publication date Assignee Title
CN202109497U (en) * 2011-05-25 2012-01-11 徐忠良 Special incineration equipment for waste gas generated in organic silicon production process
CN205570084U (en) * 2016-03-07 2016-09-14 重庆交通大学 Novel filtration formula exhaust -gas treatment device
CN205909327U (en) * 2016-06-28 2017-01-25 哈尔滨市金京锅炉有限公司 Boiler fume afterheat recovery device
CN209229757U (en) * 2018-11-26 2019-08-09 上海盛剑环境系统科技股份有限公司 A kind of direct combustion furnace apparatus
CN210180238U (en) * 2019-06-10 2020-03-24 四川省鑫广达环保设备有限责任公司 Novel air horizontal tube heat exchanger
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CN111637471A (en) * 2020-05-28 2020-09-08 北京森麟技术有限公司 Waste gas and waste liquid incineration treatment process and treatment system containing organic silicon
CN112197621A (en) * 2020-08-27 2021-01-08 合肥宽信机电有限公司 Gas-gas pipe type heat exchanger

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115888305A (en) * 2022-11-14 2023-04-04 江苏嘉盛环境设备制造有限公司 Vacuum pump tail gas treatment System (VOCs) process for lithium battery industry

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